WO2014206174A1 - 非穿通型反向导通绝缘栅双极型晶体管的制造方法 - Google Patents
非穿通型反向导通绝缘栅双极型晶体管的制造方法 Download PDFInfo
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- WO2014206174A1 WO2014206174A1 PCT/CN2014/078790 CN2014078790W WO2014206174A1 WO 2014206174 A1 WO2014206174 A1 WO 2014206174A1 CN 2014078790 W CN2014078790 W CN 2014078790W WO 2014206174 A1 WO2014206174 A1 WO 2014206174A1
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- Prior art keywords
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- bipolar transistor
- type substrate
- insulated gate
- gate bipolar
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- 238000000034 method Methods 0.000 title claims abstract description 22
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 64
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 25
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 25
- 239000010703 silicon Substances 0.000 claims abstract description 25
- 238000005468 ion implantation Methods 0.000 claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 12
- 238000002513 implantation Methods 0.000 claims abstract description 8
- 210000000746 body region Anatomy 0.000 claims description 9
- 239000007943 implant Substances 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 6
- 102000004129 N-Type Calcium Channels Human genes 0.000 claims description 5
- 108090000699 N-Type Calcium Channels Proteins 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 3
- 229910052796 boron Inorganic materials 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 238000000407 epitaxy Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/66325—Bipolar junction transistors [BJT] controlled by field-effect, e.g. insulated gate bipolar transistors [IGBT]
- H01L29/66333—Vertical insulated gate bipolar transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/083—Anode or cathode regions of thyristors or gated bipolar-mode devices
- H01L29/0834—Anode regions of thyristors or gated bipolar-mode devices, e.g. supplementary regions surrounding anode regions
Definitions
- the present invention relates to an insulated gate bipolar transistor technology, and more particularly to a method of fabricating a non-punch-through reverse conducting insulated gate bipolar transistor.
- Figure 1 is a non-punch-through reverse conducting insulated gate bipolar transistor (Non Punch Through Reverse) Conducting Insulated Gate Bipolar Transistor, NPT RC IGBT) internal structure section schematic.
- the front structure of the IGBT is the same as VDMOS except that a P-type layer is added between the drain and drain regions.
- a process similar to that of manufacturing a field effect transistor is performed on the front side, and then the silicon wafer is thinned, and then a P+ emitter region is formed on the back surface thereof (that is, the extra P-type layer is formed).
- the difficulty of this method mainly has two aspects: First, the need to reduce the silicon wafer flow capacity, especially for the common IGBT below 1200 volts, the thickness of which is below 200 microns, the film circulation process is very demanding; A special double exposure machine is required to expose the wafer.
- a method for fabricating a non-punch-through reverse conducting insulated gate bipolar transistor includes the steps of: providing an N-type substrate; forming a P+ emitter region by ion implantation on the N-type substrate; Forming an N-type drift region on one side of the type substrate having a P+ emitter region; preparing a front surface structure of the insulated gate bipolar transistor on the N-type drift region; thinning the N-type substrate to the back surface The P+ emitter region; forming a metal electrode on the back surface of the N-type substrate.
- the N-type substrate has a thickness of 100 to 650 microns
- the N-type drift region has a thickness of 10 to 650 microns
- the thickness of the N-type substrate and the N-type drift region is It is equivalent to the thickness of a normal circulating silicon wafer.
- the normally flowing silicon wafer is a 6 inch silicon wafer having a thickness of 625 microns or 675 microns, or an 8 inch silicon wafer having a thickness of 725 microns.
- the normally flowing silicon wafer is a 6 inch silicon wafer
- the N-type drift region is 300 microns thick
- the N-type substrate is 325 microns or 375 microns thick.
- the normally flowing silicon wafer is an 8-inch silicon wafer
- the N-type drift region is 400 microns thick
- the N-type substrate is 325 microns thick.
- the step of forming a P+ emitter region by ion implantation on an N-type substrate comprises: photolithographically forming an implant pattern on the N-type substrate; performing ions on the implant pattern Injection forms a P+ emitter region.
- the implanted ions are boron and the implant dose is 1E13 ⁇ 1E20. Cm-2, the implantation energy is 30 ⁇ 200 keV.
- the N-type substrate has a resistivity of 0.001 to 10 ohm.cm
- the N-type drift region has a resistivity of 5 to 500 ohm.cm.
- the metal electrode in the step of forming a metal electrode on the back surface of the N-type substrate, may be formed by sputtering or evaporation.
- the step of preparing a front side structure of the insulated gate bipolar transistor on the N-type drift region includes: forming a P-type body region on the N-type drift region; and forming the P-type body region; Forming an N-type emitter region on the region; forming a gate layer on the N-type channel between the P-type body regions; extracting an emitter electrode on the N-type emitter region, and extracting a gate electrode on the gate layer electrode.
- the N-type substrate is thinned using mechanical grinding.
- the metal electrode is formed by sputtering or evaporation.
- the above method uses an injection and epitaxy method to prepare an NPT RC IGBT.
- the P/N spacer structure on the N-type substrate can be operated by a conventional lithography machine and an ion implantation apparatus, and the thickness of the wafer after extension is the same as that of the normal circulation wafer, and thus is compatible with the existing conventional processes.
- Figure 1 is a schematic cross-sectional view of the internal structure of the NPT RC IGBT
- FIG. 2 is a flow chart showing a method of manufacturing an NPT IGBT according to an embodiment
- FIG. 5 is an NPT RC IGBT structure corresponding to step S103 of FIG. 2;
- NPT RC IGBT structure corresponding to step S104 of FIG. 2;
- FIG. 7 is an NPT RC IGBT structure corresponding to step S105 of FIG. 2;
- FIG. 8 is an NPT RC IGBT structure corresponding to step S106 of FIG. 2.
- FIG. 2 is a flow chart showing a method of manufacturing a non-punch-through reverse conducting insulated gate bipolar transistor according to an embodiment. The method includes the following steps S101 to S106.
- Step S101 providing an N-type substrate.
- the N-type substrate refers to a substrate formed by doping N-type ions into a semiconductor material, and is formed into a wafer shape of a standard size (6 inches or 8 inches, etc.), on which various semiconductor processes can be performed, such as Figure 3 shows.
- the N-type substrate has a thickness of 100 to 650 ⁇ m and a resistivity of 0.001 to 10 ohm•cm ( ⁇ •cm).
- the N-type substrate 100 serves as a support for the subsequent epitaxial layer and is also used to form the final P-type layer.
- Step S102 forming a P+ emitter region by ion implantation on the N-type substrate.
- a plurality of P-type regions 102 are formed on the N-type substrate 100 at intervals.
- the P-type region 102 is formed by ion implantation.
- the ion implantation specifically includes the following steps:
- Step S121 photolithographically forming an implant pattern on the N-type substrate.
- This step is a conventional step of photolithography, including steps of coating photoresist, baking, photolithography, cleaning, and the like.
- an implantation pattern is formed on the N-type substrate 100, that is, a part of the surface of the N-type substrate 100 is covered with the photoresist 200, and the other portion is exposed. The exposed portion is the area used to form the P-type region.
- Step S122 performing ion implantation on the implantation pattern to form a P+ emitter region.
- Ion implantation is performed by bombarding the surface of the entire N-type substrate 100 with ions.
- the implanted ions are boron, and the implantation dose is 1E13 ⁇ 1E20. Cm-2, the implantation energy is 30 ⁇ 200 keV.
- a plurality of spaced P-type regions 102 as shown in FIG. 4, that is, P+ emitter regions of the finally formed IGBT, can be formed on the N-type substrate 100.
- Step S123 Clearing the photoresist.
- the photoresist 200 is removed from the surface of the N-type substrate 100.
- an N-type substrate 100 having a P-type region 102 is formed.
- Step S103 epitaxially preparing an N-type drift region on one side of the N-type substrate having a P+ emitter region.
- epitaxial fabrication refers to forming a substrate, referred to as an epitaxial layer, over the N-type substrate 100. That is, the N-type drift region 300 shown in FIG.
- the technique for preparing the epitaxial layer is relatively conventional and will not be described here.
- the thickness of the formed N-type drift region 300 is 10 to 650 ⁇ m, and the sum of the thicknesses of the N-type substrate 100 is equivalent to the thickness of the normal-flow silicon wafer.
- the N-type drift region 300 is used to form other layers of the IGBT other than the P+ emitter region, and is referred to as a front surface structure of the IGBT in this embodiment. That is, the thickness of the N-type drift region 300 can be used to form a complete IGBT front surface structure, and the thickness together with the N-type substrate 100 is equivalent to the thickness of a normal flow silicon wafer.
- a normal flow silicon wafer is typically a 6 inch silicon wafer having a thickness of 625 microns or 675 microns, or an 8 inch silicon wafer having a thickness of 725 microns.
- examples of possible thicknesses are: when used in a 6 inch silicon wafer process, the N-type drift region 300 is 300 microns thick, the N-type substrate 100 is 325 microns or 375 microns thick; when used in an 8-inch silicon wafer process The N-type drift region 300 is 400 microns thick, and the N-type substrate 100 is 325 microns thick.
- other thicknesses satisfying the above two conditions can also be selected.
- the resistivity of the N-type drift region 300 is 5 to 500 ohm•cm ( ⁇ •cm).
- Step S104 preparing a front structure of the insulated gate bipolar transistor on the N-type drift region.
- the front structure is shown in FIG. 6.
- This step includes forming a P-type body region 302 on the N-type drift region 300 and forming an N-type emitter region 304 on the P-type body region 302. Between the two P-type body regions 302 is an N-type channel, and a gate layer 306 is formed on the N-type channel. They are then taken up through the electrodes as emitters and gates.
- Step S105 thinning the N-type substrate to the N-type channel.
- the N-type substrate 100 is thinned from a direction facing away from the P-type region 102 toward the P-type region 102 until the P-type region 102 is also exposed on the back surface of the N-type substrate 100.
- the thinned N-type substrate 100 is as shown in FIG.
- the manner in which the N-type substrate 100 is thinned may be mechanically ground. It can be understood that in order to reduce the processing time at the time of thinning and to avoid the waste generated by the N-type substrate 100, the thickness of the N-type substrate 100 should be as small as possible while ensuring the safety of circulation.
- Step S106 forming a metal electrode on the back surface of the N-type substrate. That is, a metal layer is formed on the P+ emitter region and thus the electrode acts as a collector of the entire IGBT, and finally forms an NPT Refer to Figure 7 for the complete structure of the IGBT.
- the metal electrode may be formed by sputtering or evaporation.
- an NPT RC IGBT is prepared by injection and epitaxy.
- the P/N spacer structure on the N-type substrate 100 can be operated by a conventional lithography machine and an ion implantation apparatus, and the thickness of the wafer after extension is the same as that of the normal circulation wafer, and thus is compatible with the existing conventional processes. .
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
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Abstract
Description
Claims (12)
- 一种非穿通型反向导通绝缘栅双极型晶体管的制造方法,包括如下步骤:提供N型衬底;在所述N型衬底上采用离子注入的方式形成P+发射区;在所述N型衬底上具有P+发射区的一面外延制备N型漂移区;在所述N型漂移区上制备所述绝缘栅双极型晶体管的正面结构;将所述N型衬底减薄至背面露出所述P+发射区;及在所述N型衬底背面形成金属电极。
- 根据权利要求1所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法,其特征在于,所述N型衬底的厚度为100~650微米,所述N型漂移区的厚度为10~650微米,且所述N型衬底和N型漂移区的厚度之和与正常流通硅片的厚度相当。
- 根据权利要求2所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法,其特征在于,所述正常流通硅片是厚度为625微米或675微米的6英寸硅片,或者是厚度为725微米的8英寸硅片。
- 根据权利要求3所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法,其特征在于,所述正常流通硅片采用6英寸硅片,所述N型漂移区为300微米厚,所述N型衬底为325微米或375微米厚。
- 根据权利要求3所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法,其特征在于,所述正常流通硅片采用8英寸硅片,所述N型漂移区为400微米厚,所述N型衬底为325微米厚。
- 根据权利要求1所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法,其特征在于,所述在N型衬底上采用离子注入的方式形成P+发射区的步骤包括:在所述N型衬底上光刻形成注入图形;在所述注入图形上进行离子注入形成P+发射区。
- 根据权利要求6所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法,其特征在于,注入离子为硼,注入剂量为1E13~1E20 cm-2,注入能量为30~200千电子伏特。
- 根据权利要求1所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法,其特征在于,所述N型衬底的电阻率为0.001~10欧姆•厘米,所述N型漂移区的电阻率为5~500欧姆•厘米。
- 根据权利要求1所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法,其特征在于,所述在N型衬底背面形成金属电极的步骤中,可以采用溅射或蒸发方式形成所述金属电极。
- 根据权利要求1所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法,其特征在于,所述在N型漂移区上制备绝缘栅双极型晶体管的正面结构的步骤包括:在所述N型漂移区上间隔形成P型体区;在所述P型体区上形成N型发射区;在所述P型体区之间的N型沟道上形成栅极层;及在所述N型发射区上引出发射极电极,在所述栅极层上引出栅极电极。
- 根据权利要求1所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法,其特征在于,采用机械研磨减薄所述N型衬底。
- 根据权利要求1所述的非穿通型反向导通绝缘栅双极型晶体管的制造方法,其特征在于,采用溅射或蒸发方式形成所述金属电极。
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2007012972A (ja) * | 2005-07-01 | 2007-01-18 | Shindengen Electric Mfg Co Ltd | 半導体装置及びその製造方法 |
JP2012033782A (ja) * | 2010-07-30 | 2012-02-16 | Shindengen Electric Mfg Co Ltd | Igbtの製造方法及びigbt |
CN102916042A (zh) * | 2012-09-28 | 2013-02-06 | 江苏物联网研究发展中心 | 逆导igbt器件结构及制造方法 |
CN102931216A (zh) * | 2011-08-11 | 2013-02-13 | 上海华虹Nec电子有限公司 | 集成有肖特基二极管的绝缘栅双极晶体管结构及制备方法 |
CN103022089A (zh) * | 2012-06-19 | 2013-04-03 | 电子科技大学 | 一种无snapback效应的逆导型绝缘栅双极晶体管 |
CN103165442A (zh) * | 2011-12-12 | 2013-06-19 | 上海华虹Nec电子有限公司 | 背面图形化的方法 |
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CN101640186B (zh) * | 2009-07-20 | 2011-02-16 | 无锡凤凰半导体科技有限公司 | 绝缘栅双极型晶体管集成快恢复二极管制作方法 |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007012972A (ja) * | 2005-07-01 | 2007-01-18 | Shindengen Electric Mfg Co Ltd | 半導体装置及びその製造方法 |
JP2012033782A (ja) * | 2010-07-30 | 2012-02-16 | Shindengen Electric Mfg Co Ltd | Igbtの製造方法及びigbt |
CN102931216A (zh) * | 2011-08-11 | 2013-02-13 | 上海华虹Nec电子有限公司 | 集成有肖特基二极管的绝缘栅双极晶体管结构及制备方法 |
CN103165442A (zh) * | 2011-12-12 | 2013-06-19 | 上海华虹Nec电子有限公司 | 背面图形化的方法 |
CN103022089A (zh) * | 2012-06-19 | 2013-04-03 | 电子科技大学 | 一种无snapback效应的逆导型绝缘栅双极晶体管 |
CN102916042A (zh) * | 2012-09-28 | 2013-02-06 | 江苏物联网研究发展中心 | 逆导igbt器件结构及制造方法 |
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