WO2014203474A1 - 多結晶シリコンの結晶性評価方法 - Google Patents
多結晶シリコンの結晶性評価方法 Download PDFInfo
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- WO2014203474A1 WO2014203474A1 PCT/JP2014/002920 JP2014002920W WO2014203474A1 WO 2014203474 A1 WO2014203474 A1 WO 2014203474A1 JP 2014002920 W JP2014002920 W JP 2014002920W WO 2014203474 A1 WO2014203474 A1 WO 2014203474A1
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
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- C—CHEMISTRY; METALLURGY
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- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/007—Apparatus for preparing, pre-treating the source material to be used for crystal growth
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- C—CHEMISTRY; METALLURGY
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- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
Definitions
- the present invention relates to a method of evaluating crystallinity of polycrystalline silicon by X-ray diffraction method, and polycrystalline silicon rod or polycrystalline silicon suitable as a raw material for stably producing single crystal silicon using the same. It relates to the method of selecting a mass.
- Single crystal silicon which is essential for the production of semiconductor devices and the like, is crystal-grown by the CZ method or FZ method, and a polycrystalline silicon rod or a polycrystalline silicon block is used as a raw material at that time.
- Such polycrystalline silicon materials are often manufactured by the Siemens method (see Patent Document 1 etc.).
- the Siemens method refers to vapor phase growth (deposition) of polycrystalline silicon on the surface of a silicon core wire by bringing a silane source gas such as trichlorosilane or monosilane into contact with the heated silicon core wire by CVD (Chemical Vapor Deposition) method. It is a way to
- a polycrystalline silicon block is charged in a quartz crucible, and a seed crystal is immersed in a silicon melt obtained by heating and melting this to eliminate dislocation lines (no After the rearrangement, the crystal is pulled by gradually enlarging the diameter to a predetermined diameter. At this time, if unmelted polycrystalline silicon remains in the silicon melt, this unmelted polycrystalline piece floats in the vicinity of the solid-liquid interface by convection, causing the occurrence of dislocations and causing the crystal lines to disappear. It becomes a cause.
- needle-like crystals may be precipitated in the polycrystalline silicon rod (polycrystalline silicon rod) during the process of manufacturing the rod by the Siemens method, and such a polycrystalline silicon rod is used for FZ.
- polycrystalline silicon rod polycrystalline silicon rod
- the melting of individual crystallites is not uniform because it depends on its size, and unmelted crystallites pass through the melting zone as solid particles through to the single crystal rod. It has been pointed out that unmelted particles are incorporated into the solidification surface of single crystals, which causes defect formation.
- Patent Document 2 the sample surface cut out perpendicularly to the long axis direction of the polycrystalline silicon rod is polished or polished, and the contrast is such that microcrystals of the structure can be visually recognized even under an optical microscope after etching.
- the present invention has been made in view of such problems, and the object of the present invention is to select polycrystalline silicon suitable as a raw material for producing single crystal silicon with high quantitativeness and reproducibility, and to use single crystal silicon. It is to provide a technology that contributes to stable manufacturing.
- the method of evaluating crystallinity of polycrystalline silicon according to the present invention is a method of evaluating crystallinity of polycrystalline silicon by an X-ray diffraction method, wherein the polycrystalline silicon is used as a plate-like sample.
- the plate-like sample is disposed at a position where Bragg reflection from the first mirror index surface ⁇ h 1 k 1 l 1 > is detected, and the X-ray irradiation region defined by the slit is on the main surface of the plate-like sample.
- ⁇ rotation angle
- I B 1 baseline diffraction intensity value
- the first and second mirror index planes are a ⁇ 111> plane and a ⁇ 220> plane.
- the method for selecting polycrystalline silicon rods according to the present invention is a method for selecting polycrystalline silicon rods used as a raw material for producing single crystal silicon by X-ray diffraction method, and the polycrystalline silicon rods are chemically
- a plate-like sample having a main surface, which is a cross section perpendicular to the radial direction of the polycrystalline silicon rod, is collected by precipitation by a phase method, and the plate-like sample is subjected to a first Miller index surface ⁇ h 1
- the Bragg reflection from k 1 l 1 > is disposed at a position to be detected, and the center of the plate-like sample is rotated so that the X-ray irradiation region defined by the slit ⁇ scans on the main surface of the plate-like sample
- a chart showing the rotational angle ( ⁇ ) dependency of the plate-like sample of the Bragg reflection intensity from the Miller index plane is determined by in-plane rotation as a rotation angle ⁇ , and a diffraction intensity value (I B asked
- the first and second mirror index planes are a ⁇ 111> plane and a ⁇ 220> plane.
- the plate-like sample is collected from a position within R / 3 from the radial center of the polycrystalline silicon rod of radius R, and the ⁇ scan is performed to obtain the diffraction intensity value of the baseline (I B Value is determined, and the I B ⁇ 111> value of Miller index face ⁇ 111> is higher than the I B ⁇ 220> value of Miller index face ⁇ 220>, and the plate-like sample is polycrystal with radius R Collect from 2R / 3 or more and 3R / 3 from the radial center of the silicon rod, perform the ⁇ scan to determine the baseline diffraction intensity value (I B ), and use Miller index surface ⁇ 220> When the I B ⁇ 220> value is higher than the I B ⁇ 111> value of Miller index plane ⁇ 111>, it is selected as a raw material for single crystal silicon production.
- the polycrystalline silicon rod is grown by the Siemens method.
- the polycrystalline silicon rod selected by the above method or the polycrystalline silicon block obtained by crushing the polycrystalline silicon rod is used as the raw material.
- the polycrystalline silicon rod selected by the method of the present invention is considered to realize a heat flow in the crystal that is less likely to cause a local unmelted state. Therefore, in the case of growing a single crystal by the FZ method using such a polycrystalline silicon rod, or growing a single crystal by the CZ method using a polycrystalline silicon block obtained by crushing such a polycrystalline silicon rod The occurrence of the local unmelted state is suppressed, and stable production of single crystal silicon becomes possible.
- the inventors of the present invention have been studying the quality improvement of polycrystalline silicon to stably manufacture single crystal silicon, and it is included in polycrystalline silicon rods due to the difference in various conditions at the time of polycrystalline silicon deposition. It came to obtain the knowledge that the difference in the degree of "crystallinity"
- a block of polycrystalline silicon contains many crystallites and crystal grains, and these crystal faces are considered to be oriented in random directions (random orientation). I tend to. However, according to studies by the present inventors, the crystals contained in the polycrystalline silicon block are not necessarily completely randomly oriented.
- the present inventors took a plate-like sample whose main surface is a cross section perpendicular to the radial direction from many different polycrystalline silicon rods grown by deposition by a chemical vapor deposition method, and Miller index in the same manner as described above
- the chart of the Bragg reflection intensity from the Miller index surface ⁇ hkl> has a baseline value (diffraction intensity) of the chart depending on the sample It turned out to be fluctuating.
- samples are taken from a large number of polycrystalline silicon rods (silicon rods), and for each sample, the Bragg reflection intensity is measured for various Miller index planes.
- the magnitude relationship between the Miller index planes of different baseline diffraction intensity values (I B ) appearing on the above-mentioned chart of Bragg reflection intensity is specific
- the crystal lines do not disappear in the step of single crystallization, while it is found that the probability that the crystal lines disappear in the step of single crystallization is high when the specific conditions are not satisfied.
- the crystal grains in the polycrystalline silicon rod are not always randomly oriented, and the "crystallinity" of polycrystalline silicon depends on the conditions at the time of precipitation.
- Patent Document 2 discloses that the crystal lines disappear when pulling up a single crystal by the FZ method if the proportion of needle crystals present in the polycrystalline silicon rod is large.
- needle crystals present in the inner region of the polycrystalline silicon rod tend to be in an undissolved state even when passing through the "shrinkage" portion which is a floating zone (thermal melting zone) at the time of FZ pulling up, and the crystal line disappears. It is assumed.
- the polycrystalline silicon rod is Depending on the production conditions (temperature, gas flow rate, TSC concentration, etc.), a clear influence on the presence or absence of crystal line annihilation was observed. That is, the crystallinity of a polycrystalline silicon rod suitable as a raw material for producing single crystal silicon is not sufficient for macro evaluation from the viewpoint of presence or absence, density or location of needle crystals, and evaluation from a more microscopic viewpoint is It should be done.
- a plate-like sample whose main surface is a cross section perpendicular to the radial direction of the polycrystalline silicon rod is taken, and the plate-like sample is subjected to Bragg reflection from the first Miller index surface ⁇ h 1 k 1 l 1 > It is disposed at a position to be detected, and is rotated in-plane at a rotation angle ⁇ with the center of the plate-like sample as a rotation center so that the X-ray irradiation region defined by the slit ⁇ scans on the main surface of the plate-like sample
- a chart showing the rotational angle ( ⁇ ) dependence of the plate-like sample on the Bragg reflection intensity from the Miller index plane is determined, the baseline diffraction intensity value (I B 1 ) is determined from the chart, and further, the method Diffraction intensity value (I B 2 ) of the baseline is obtained from the ⁇ scan chart obtained from the second Miller index surface ⁇ h 2 k 2 l 2 >, and the magnitude relationship between I B 1 value and I B 2 value
- the amount of source gas supplied per surface area and the surface temperature also change with the growth of the silicon rod. For this reason, the site dependency of the crystallinity of the polycrystalline silicon rod tends to be higher in the radial direction than in the longitudinal direction (stretching direction) of the silicon rod.
- the site dependency of this crystallinity in the radial direction depends on the manufacturing conditions of the polycrystalline silicon rod, and when it is used as a raw material for manufacturing single crystal silicon, There is a tendency towards something that does not occur.
- the above-mentioned plate-like sample is taken from a position within R / 3 from the radial center of the polycrystalline silicon rod of radius R, and ⁇ scan is performed to obtain the baseline diffraction intensity value (I B )
- the I B ⁇ 111> value of Miller index surface ⁇ 111> is higher than the I B ⁇ 220> value of Miller index surface ⁇ 220>, and the radial center of the polycrystalline silicon rod of radius R is obtained.
- a polycrystalline silicon rod is selected by the above-described method, and is used as a silicon raw material to produce single crystal silicon, or a polycrystalline silicon block obtained by crushing the selected polycrystalline silicon rod is used.
- Single crystal silicon is manufactured using it as a silicon raw material. This can suppress the occurrence of the problem of the disappearance of crystal lines in single crystallization.
- FIGS. 1A and 1B are diagrams for explaining an example of extraction of a plate-like sample 20 for X-ray diffraction profile measurement from a polycrystalline silicon rod 10 grown by precipitation by a chemical vapor deposition method such as Siemens. It is.
- reference numeral 1 denotes a silicon core wire for depositing polycrystalline silicon on the surface to form a silicon rod.
- CTR a portion close to silicon core wire 1
- EDG a portion close to the side surface of polycrystalline silicon rod 10 to confirm presence or absence of the crystalline direction dependency of crystallinity of polycrystalline silicon rod 10
- R / 2 a portion between CTR and EGD
- the diameter of the polycrystalline silicon rod 10 illustrated in FIG. 1A is approximately 120 mm, and from the side of the polycrystalline silicon rod 10, the rod 11 having a diameter of approximately 20 mm and a length of approximately 60 mm And cut out vertically.
- a portion (CTR) close to the silicon core wire 1 of this rod 11 a portion close to the side surface of polycrystalline silicon rod 10 (EDG), and a portion (R / 2) between CTR and EGD
- CTR silicon core wire 1 of this rod 11
- EDG polycrystalline silicon rod 10
- R / 2 a portion between CTR and EGD
- a disc-like sample (20 CTR , 20 EDG , 20 R / 2 ) having a thickness of approximately 2 mm whose main surface is a cross section perpendicular to the radial direction of the polycrystalline silicon rod 10 is collected.
- the portion, length, and number of the rod 11 to be collected may be appropriately determined in accordance with the diameter of the silicon rod 10 and the diameter of the hollow rod 11.
- the disk-like sample 20 may be any portion of the hollow rod 11 However, it is preferable that the position of the silicon rod 10 can be reasonably estimated.
- the circle from three points of the central portion, a half position of the radius from the center, and an outer position with respect to the radius of the circumference of the silicon rod It is preferable to obtain a plate-like sample.
- the diameter of the disk-shaped sample 20 is set to about 20 mm only, and the diameter may be appropriately determined in the range where there is no problem in X-ray diffraction measurement.
- the disk-like sample 20 collected as described above is placed at a position where Bragg reflection from the Miller index surface ⁇ hkl> is detected. And the in-plane rotation with the rotation angle ⁇ about the center of the disk-shaped sample 20 so that the X-ray irradiation region defined by the slits ⁇ scan on the main surface of the disk-shaped sample 20
- a chart showing the rotational angle ( ⁇ ) dependency of the disk-like sample 20 of Bragg reflection intensity from hkl> is determined, a baseline is determined from the chart, and a diffraction intensity value (I B ) of the baseline is crystalline. Used as an evaluation index.
- the peaks from Miller index planes ⁇ 111>, ⁇ 220>, ⁇ 311> and ⁇ 400> are particularly effective for the evaluation of crystallinity, so the surface ⁇ hkl>, ⁇ 111>, ⁇ 220>, ⁇ 311>, it is preferable to compare I B value of Miller index surfaces of ⁇ 400>, in particular, ⁇ 111> I B value of surface and ⁇ It is effective to compare the I B values of the 220> plane.
- the above-mentioned crystallinity evaluation method is used to select a polycrystalline silicon rod used as a raw material for producing single crystal silicon by X-ray diffraction.
- the method of selecting polycrystalline silicon rods according to the present invention is a method for selecting polycrystalline silicon rods used as a raw material for producing single crystal silicon by X-ray diffraction method, and the polycrystalline silicon rods are chemically
- a plate-like sample having a main surface, which is a cross section perpendicular to the radial direction of the polycrystalline silicon rod, is collected by precipitation by a phase method, and the plate-like sample is subjected to a first Miller index surface ⁇ h 1
- the Bragg reflection from k 1 l 1 > is disposed at a position to be detected, and the center of the plate-like sample is rotated so that the X-ray irradiation region defined by the slit ⁇ scans on the main surface of the plate-like sample
- a chart showing the rotational angle ( ⁇ ) dependency of the plate-like sample of the Bragg reflection intensity from the Miller index plane is determined by in-plane rotation as a rotation angle ⁇ , and a diffraction intensity value (I B 1)
- the above plate-like sample is taken from a position within R / 3 from the radial center of the polycrystalline silicon rod of radius R, and ⁇ scan is performed to obtain a baseline diffraction intensity value (I B )
- the I B ⁇ 111> value of the Miller index surface ⁇ 111> is higher than the I B ⁇ 220> value of the Miller index surface ⁇ 220>
- the above plate-like sample is Miller index plane ⁇ 220 when the baseline diffraction intensity value (I B ) is determined by taking a ⁇ scan from 2R / 3 to 3R / 3 from the radial center of the crystalline silicon rod
- a polycrystalline silicon rod in which the I B ⁇ 220> value of > is higher than the I B ⁇ 111> value of Miller index plane ⁇ 111> is selected as a raw material for single crystal silicon production.
- FIG. 2 is a view for explaining an outline of an example of a measurement system in obtaining an X-ray diffraction profile from a disk-shaped sample 20 by a so-called ⁇ -2 ⁇ method.
- the X-ray beam 40 (Cu-K ⁇ ray: wavelength 1.54 ⁇ ) emitted from the slit 30 and collimated enters the disc-shaped sample 20, and the sample is rotated while rotating the disc-shaped sample 20 in the XY plane.
- the intensity of the diffracted X-ray beam for each angle ( ⁇ ) is detected by a detector (not shown) to obtain an X-ray diffraction chart of ⁇ -2 ⁇ .
- FIG. 4 is a view for explaining an outline of a measurement system in obtaining an X-ray diffraction profile from a disk-shaped sample 20 by a so-called ⁇ scan method.
- FIG. 4 is a view for explaining an outline of a measurement system in obtaining an X-ray diffraction profile from a disk-shaped sample 20 by a so-called ⁇ scan method.
- FIG. 5 is an example of a chart obtained by performing the ⁇ scan measurement on Miller index planes ⁇ 111>, ⁇ 220>, ⁇ 311>, and ⁇ 400>.
- the Bragg reflection intensity is substantially constant regardless of the above mirror index surface, and the Bragg reflection intensity does not depend so much on the rotation angle ⁇ , and is the same chart as the powder sample.
- FIG. 6 is a view for explaining the outline of another example of the measurement system when determining the X-ray diffraction profile from the disc-like sample 20 by the ⁇ scan method, and in the example shown in this figure, the disc-like sample
- FIG. 7 is an example of a chart obtained by performing the ⁇ scan measurement on Miller index planes ⁇ 111>, ⁇ 220>, ⁇ 311>, and ⁇ 400> substantially as shown in FIG. The same ⁇ scan chart is obtained.
- the disk-shaped sample is obtained. It becomes possible to obtain the distribution of crystallinity within 20 planes.
- the evaluation of crystallinity according to the present invention is based on the Siemens method. It goes without saying that it is significant not only as a method of selecting polycrystalline silicon rods grown by the method described above, but also as a method of evaluating the crystal grain size of polycrystalline silicon by the X-ray diffraction method.
- the ⁇ scan chart for the mirror index surface ⁇ hkl> of the plate-like sample treats the ⁇ scan chart itself as the “baseline” if the diffraction intensity is substantially constant. In some cases, “waves” can be seen in the ⁇ scan chart.
- FIG. 9 is an example of a ⁇ scan chart in which “waviness” is observed for mirror index planes ⁇ 111> and ⁇ 220> of a plate-like sample.
- these samples were extract
- this baseline also shows “waviness”, but the average diffraction intensity (I B ave ) of the ⁇ scan chart is 3.50 kcps There is employed this value as I B value of Miller index surfaces ⁇ 220>.
- the ⁇ scan chart is not limited to one in which the diffraction intensity is substantially constant, and in some cases, a peak-like diffraction intensity distribution may appear. If a peak-like diffraction intensity distribution appears in the ⁇ scan chart, one having an S / N ratio of 3 or more is determined as a “peak”, and the peak intensity is integrated for the peak portion. Establish a baseline according to the method used to determine the baseline.
- the collection position of the plate-like sample is not limited to the three parts shown in FIGS. 1A and 1B.
- the position within 2R / 3, 2R / 3 or more and the position within 3R / 3 may be three positions.
- Baseline diffraction intensity for each disk-like sample obtained from these polycrystalline silicon rods, and presence or absence of crystal line disappearance when growing single crystal silicon rods by FZ method using polycrystalline silicon rods are summarized in Table 1 (Example) and Table 2 (Comparative Example).
- the numerical values in the table are the diffraction intensity (I B : unit: kcps) of the baseline for each Miller index plane, and the presence or absence of needle crystals was confirmed by the method described in Patent Document 2.
- the I B ⁇ 220> value of the Miller index surface ⁇ 220> of the plate-like sample collected from the above is higher than the I B ⁇ 111> value of the Miller index surface ⁇ 111>.
- the mirror index surface ⁇ 111> of the plate-like sample collected from a position (central portion) within R / 3 from the radial center of the polycrystalline silicon rod of radius R The I B ⁇ 111> value is higher than the I B ⁇ 220> value of Miller index surface ⁇ 220>, but the position within 2 R / 3 or more and 3 R / 3 or more from the radial center of polycrystalline silicon rod of radius R.
- the condition that the I B ⁇ 220> value of the Miller index surface ⁇ 220> of the plate-like sample collected from (surface) is higher than the I B ⁇ 111> value of the Miller index surface ⁇ 111> is not satisfied.
- the orientation of the Miller index plane ⁇ 111> also exists on the surface side of the polycrystalline silicon rod.
- the plate-like sample has a main cross section perpendicular to the growth axis direction (radial direction) of the polycrystalline silicon rod, when X-ray diffraction measurement of this plate-like sample is performed, the ⁇ 111> plane grows Match the axial direction. On the other hand, the direction of the ⁇ 220> plane is shifted 45 ° with the growth axis direction.
- a plate-like sample When a plate-like sample includes a ⁇ 111> plane orientation region and a ⁇ 220> plane orientation region, the thermal diffusivity of the plate-like sample is measured according to the ratio of the ⁇ 111> plane orientation region to the ⁇ 220> plane orientation region. The thermal diffusivity will be obtained.
- the value of thermal diffusivity decreases when the ⁇ 220> plane orientation region becomes dominant, and the value of thermal diffusivity increases when the ⁇ 111> plane orientation region becomes dominant. This is nothing but the result of the heat in the polycrystalline silicon propagating in the crystal axis direction (the direction perpendicular to the Miller index plane).
- phase change of silicon progresses continuously and at a constant rate from solid to liquid and from liquid to solid, but such continuous phase change does not affect.
- soaking along the major axis of the polycrystalline silicon rod is considered to be a very important factor.
- the reason why the crystal line does not disappear when there is a tendency of the orientation of the Miller index plane ⁇ 220> on the surface side of the polycrystalline silicon rod can be considered to be due to such a heat equalization effect.
- the heat of the portion propagates in the long axis direction (vertical direction) of the polycrystalline silicon rod and is easily dissipated.
- the portion corresponds to a “neck” in which the silicon melt is squeezed into a thin shape in the FZ single crystallization step, and is a region where high temperature is required to be maintained. Therefore, if the ⁇ 220> plane orientation is dominant in the central portion of the polycrystalline silicon rod, heat concentration on the portion is inhibited, resulting in the inhibition of stable crystal growth.
- the present invention provides a technique for selecting polycrystalline silicon suitable as a raw material for producing single crystal silicon with high quantitativeness and reproducibility, and contributing to stable production of single crystal silicon.
Abstract
Description
10 多結晶シリコン棒
11 ロッド
20 板状試料
30 スリット
40 X線ビーム
Claims (10)
- 多結晶シリコンの結晶性をX線回折法により評価する方法であって、
前記多結晶シリコンを板状試料とし、該板状試料を第1のミラー指数面<h1k1l1>からのブラッグ反射が検出される位置に配置し、スリットにより定められるX線照射領域が前記板状試料の主面上をφスキャンするように該板状試料の中心を回転中心として回転角度φで面内回転させ、前記ミラー指数面からのブラッグ反射強度の前記板状試料の回転角度(φ)依存性を示すチャートを求め、該チャートからベースラインの回折強度値(IB 1)を求め、さらに、前記手法により、第2のミラー指数面<h2k2l2>から得られるφスキャン・チャートからベースラインの回折強度値(IB 2)を求め、前記IB 1値と前記IB 2値の大小関係を、前記多結晶シリコンの結晶性の評価指標として用いる、ことを特徴とする多結晶シリコンの結晶性評価方法。 - 前記第1および第2のミラー指数面は、<111>面および<220>面である、請求項1に記載の多結晶シリコンの結晶性評価方法。
- 単結晶シリコン製造用原料として用いる多結晶シリコン棒をX線回折法により選択するための方法であって、
前記多結晶シリコン棒は化学気相法による析出により育成されたものであり、該多結晶シリコン棒の径方向に垂直な断面を主面とする板状試料を採取し、該板状試料を第1のミラー指数面<h1k1l1>からのブラッグ反射が検出される位置に配置し、スリットにより定められるX線照射領域が前記板状試料の主面上をφスキャンするように該板状試料の中心を回転中心として回転角度φで面内回転させ、前記ミラー指数面からのブラッグ反射強度の前記板状試料の回転角度(φ)依存性を示すチャートを求め、該チャートからベースラインの回折強度値(IB 1)を求め、さらに、前記手法により、第2のミラー指数面<h2k2l2>から得られるφスキャン・チャートからベースラインの回折強度値(IB 2)を求め、前記IB 1値と前記IB 2値の大小関係を判定基準として単結晶シリコン製造用原料としての適否を判断する、ことを特徴とする多結晶シリコン棒の選択方法。 - 前記第1および第2のミラー指数面は、<111>面および<220>面である、請求項3に記載の多結晶シリコン棒の選択方法。
- 前記板状試料を、半径Rの前記多結晶シリコン棒の径方向の中心からR/3以内の位置から採取し、前記φスキャンを行って前記ベースラインの回折強度値(IB値)を求め、ミラー指数面<111>のIB <111>値がミラー指数面<220>のIB <220>値よりも高く、且つ、前記板状試料を、半径Rの前記多結晶シリコン棒の径方向の中心から2R/3以上で3R/3以内の位置から採取し、前記φスキャンを行って前記ベースラインの回折強度値(IB)を求め、ミラー指数面<220>のIB <220>値がミラー指数面<111>のIB <111>値よりも高い場合に、単結晶シリコン製造用原料として選択する、請求項4に記載の多結晶シリコン棒の選択方法。
- 前記多結晶シリコン棒はシーメンス法で育成されたものである、請求項3乃至5の何れか1項に記載の多結晶シリコン棒の選択方法。
- 請求項3乃至5の方法により選択された多結晶シリコン棒。
- 請求項7に記載の多結晶シリコン棒を破砕して得られた多結晶シリコン塊。
- 請求項7に記載の多結晶シリコン棒をシリコン原料として用いる単結晶シリコンの製造方法。
- 請求項8に記載の多結晶シリコン塊を原料として用いる単結晶シリコンの製造方法。
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JP6470223B2 (ja) * | 2016-04-04 | 2019-02-13 | 信越化学工業株式会社 | 単結晶シリコンの製造方法 |
US20200321363A1 (en) * | 2016-05-11 | 2020-10-08 | Ipg Photonics Corporation | Process and system for measuring morphological characteristics of fiber laser annealed polycrystalline silicon films for flat panel display |
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CN109270082B (zh) * | 2018-08-09 | 2021-05-11 | 宁夏中晶半导体材料有限公司 | 一种利用腐蚀方法及微观检测确定单晶硅晶线的方法 |
CN110133023B (zh) * | 2019-05-17 | 2022-04-26 | 西安奕斯伟材料科技有限公司 | 多晶硅选择方法、多晶硅及其在直拉法中的应用 |
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