WO2014201725A1 - 一种玻璃基板的输送装置 - Google Patents

一种玻璃基板的输送装置 Download PDF

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Publication number
WO2014201725A1
WO2014201725A1 PCT/CN2013/078537 CN2013078537W WO2014201725A1 WO 2014201725 A1 WO2014201725 A1 WO 2014201725A1 CN 2013078537 W CN2013078537 W CN 2013078537W WO 2014201725 A1 WO2014201725 A1 WO 2014201725A1
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WO
WIPO (PCT)
Prior art keywords
glass substrate
driving
glass
conveying device
air floating
Prior art date
Application number
PCT/CN2013/078537
Other languages
English (en)
French (fr)
Inventor
杨卫兵
吴俊豪
林昆贤
汪永强
舒志优
齐明虎
陈增宏
杨国坤
蒋运芍
李晨阳子
Original Assignee
深圳市华星光电技术有限公司
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Application filed by 深圳市华星光电技术有限公司 filed Critical 深圳市华星光电技术有限公司
Publication of WO2014201725A1 publication Critical patent/WO2014201725A1/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups

Definitions

  • the invention belongs to the technical field of substrate transportation, and in particular relates to a conveying device for a glass substrate. Background technique
  • the glass substrate is a common component in the production of devices such as liquid crystal display devices.
  • the glass is usually laminated in a stack in isolation from each other.
  • the glass below the glass to be conveyed is taken out one by one. This process is time consuming and labor intensive. Summary of the invention
  • An object of the present invention is to provide a conveying device for a glass substrate which can quickly and easily take out the glass to be conveyed.
  • a glass substrate conveying device wherein the glass reverse conveying device comprises a carrying platform and an air floating system, and the carrying platform is used for supporting a stacked glass stacking frame, the gas
  • the float system includes an air floating device for suspending the glass substrate to be transported on the stack, and a substrate driving device for driving the glass substrate to be transported.
  • the air floating device includes an air floating platform, and an air floating platform driving mechanism that drives the air floating platform from a side of the stack into the lower side of the glass substrate to be transported.
  • the air floating platform includes a left air floating platform, and the right air floats the glass to be transported!
  • the reverse left air floating platform driving mechanism drives the right air floating platform to enter the right air floating platform driving mechanism from the right side of the stack into the lower side of the glass substrate to be transported.
  • the left air floating platform and the right air floating platform structure phase are further improved as the above technical solution, wherein the left air floating platform driving mechanism includes a left support frame extending in the up and down direction, and a left Moving the track and a left motor driving the support frame to move linearly along the left moving track, the left air floating platform being disposed on the left support frame.
  • the left air floating platform driving mechanism includes a left support frame extending in the up and down direction, and a left Moving the track and a left motor driving the support frame to move linearly along the left moving track, the left air floating platform being disposed on the left support frame.
  • the left air floating platform includes parallel arrangement in the left and right direction a plurality of support plates, a support beam connecting the plurality of support plates together, and the plurality of support plates are uniformly provided with a plurality of air holes.
  • one or more of the plurality of support plates are provided with a collation sensor for identifying information of the glass substrate on the stack.
  • the substrate driving device is disposed on the support beam.
  • the substrate driving device includes a plurality of driving units, each driving unit includes a driving wheel set, a driven wheel set, and a driving cylinder, and the driving cylinder is configured to drive the driving wheel set to rotate,
  • the driven wheel set is configured to cooperate with the driving wheel set to convey the glass substrate to be conveyed while clamping the glass substrate to be conveyed between the driving wheel set and the driven wheel set.
  • the driving wheel set is located below the driven wheel set.
  • the glass substrate to be transported is glass 1 for a liquid crystal display device.
  • the glass reverse conveying device of the present invention comprises a carrying platform for supporting a laminated glass stacking and an air floating system, the air floating system comprising An air floating device for suspending the glass substrate to be transported on the rack, and a substrate driving device for driving the glass substrate to be transported, whereby the stacking rack is carried on the carrying platform, and then enters the stacking rack through the air floating device to be transported Below the glass substrate, the glass substrate to be transported is suspended, and the glass to be transported is driven by the substrate driving device! ⁇ Reverse flow stacking, which can quickly and reliably take out the glass to be transported.
  • FIG. 1 is a perspective view of a conveying apparatus for a glass substrate according to an embodiment of the present invention.
  • Figure 2 is a top plan view of the glass reverse transport device of Figure 1.
  • Fig. 3 is a side elevational view showing the conveying device of the glass substrate of Fig. 1 in the front-rear direction.
  • Fig. 4 is a side elevational view showing the conveying device of the glass substrate of Fig. 1 in the left-right direction.
  • Figure 5 is an enlarged view of A in Figure 4.
  • Fig. 6 is a top plan view showing the left air floating platform and the left air floating platform driving mechanism of the air floating platform of the glass reverse conveying device of Fig. 1.
  • Fig. 7 is a front elevational view showing a stacker used in an embodiment of the conveying device for the glass substrate of Fig. 1. detailed description The specific embodiments of the present invention are further described below in conjunction with the accompanying drawings.
  • the conveying device 100 for a glass substrate of the present embodiment includes a carrying platform 200 and an air floating system 300.
  • the platform 200 is used to support a stacked glass frame 400.
  • the stack 400 is transported by the transfer tool to the load platform 200, and the load platform 200 is configured to adjust the position of the stack 400 in the up and down direction.
  • the stack 400 can take the usual form of the industry.
  • Fig. 7 shows the stack 400 used in this embodiment.
  • the air floating system 300 includes an air floating device 600 for suspending the glass substrate 500 to be transported on the stacker 400, and a substrate driving device for driving the glass substrate 500 to be transported. 700. Therefore, after the stacking frame 400 is carried on the carrying platform 200, the air floating device 600 enters the lower side of the glass frame 500 to be transported in the stacking frame 400, and the glass is to be transported by the anti-500 suspension, and then the _3 ⁇ 4 ⁇ anti-driving device is used. 700 drives the glass to be conveyed _3 ⁇ 4 ⁇ backflow stacker 400, which can quickly and easily take out the glass to be conveyed
  • the air floating device 600 includes an air floating platform 610, and an air floating platform driving mechanism that drives the air floating platform 610 to enter the glass substrate 500 to be transported from both sides of the stacking frame 400 in the left and right direction X. 620.
  • the air flotation platform 610 includes a left air floating platform 612 and a right air floating platform 614, as shown in FIG.
  • the air floating platform driving mechanism 620 includes a left air floating platform driving mechanism 622 that drives the left air floating platform 612 from the left side of the stacking frame 400 to enter the glass substrate 500 to be transported, and drives The right air floating platform 614 enters the right air floating platform driving mechanism 624 from the right side of the stacking frame 400 below the glass to be conveyed 500, as shown in FIGS. 1 and 2.
  • the left air floating platform 612 and the right air floating platform 614 have the same structure; the left air floating platform driving mechanism 622 has the same structure as the right air floating platform driving mechanism 624. Thereby, the left air floating platform driving mechanism 622 and the right air floating platform driving mechanism 624 can respectively make the left air floating platform 612 and the right air floating platform 614 enter the lower side of the glass reverse 500 to be transported from the left and right sides. .
  • the left air floating platform driving mechanism 622 and the right air floating platform driving mechanism 624 have the same structure, so the following only The left air floating platform 612 and the left air floating platform driving mechanism 622 will be described, and the right air floating platform 614 and the right air floating platform driving mechanism 624 will be omitted.
  • the left air floating platform 612 includes a plurality of support plates 630 arranged in parallel in the left-right direction X, and support beams 632 that connect the plurality of support plates 630 together. That is, a plurality of support plates 630 are fixed to the support beams 632.
  • a plurality of air holes 634 are uniformly disposed on the plurality of support plates 630.
  • a plurality of dense air holes 634 are connected to a gas source (not shown) through a pipe.
  • the left air floating platform driving mechanism 622 includes a left support frame 626 extending in the up and down direction Z, a left moving track 628, and a left motor that drives the support frame to linearly move along the moving track. 627.
  • the left air floating platform 612 is disposed on the left support frame 626.
  • the left moving track 628 is connected to the right moving track (not labeled).
  • At least one of the plurality of support plates 630 is provided with a mapping sensor 640 for identifying information of the glass substrate on the stacker 400.
  • the collation sensor 640 is disposed near the free end of the support plate 630.
  • the information of the glass substrate may include basic information such as the production number of the glass substrate, the date of manufacture, the good product, and the model number. Thereby, the scanning check and inspection of the bill can be conveniently realized.
  • the substrate driving device 700 is disposed on the support beam 632.
  • the substrate driving device 700 includes a plurality of driving units 710.
  • the substrate driving device 700 has six driving units 710 disposed on the support beam 632 of the left air floating platform 612.
  • Each drive unit 710 includes a drive wheel set 720, a driven wheel set 730, and a drive cylinder 740.
  • the driving cylinder 740 is configured to drive the driving wheel set 720 to rotate
  • the driven wheel set 730 is configured to clamp the glass substrate 500 to be conveyed between the driving wheel set 720 and the driven wheel set 730
  • the glass substrate 500 to be conveyed is conveyed in cooperation with the driving wheel set 720.
  • the drive wheel set 720 is located below the driven wheel set 730.
  • an air floating system 300 is provided. After the air floating platform 610 is driven by the air floating platform driving mechanism 620 into the space directly adjacent to the layer and layer of the stacking rack, the gas blown out by the plurality of air holes 634 is suspended to suspend the glass substrate 500 to be transported by the substrate driving device. 700 light clip! ⁇ Inversely driving the glass to be transported 1 500 "outflow" to the stacker 400, thereby realizing the transmission and scanning check of the glass back 500 to be transported.
  • the air floating platform 610 can be controlled to enter below any target glass substrate as needed, and the glass substrate can be suspended, thereby reliably Detection or transmission of glass substrates.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

一种玻璃基板（500）的输送装置（100），所述玻璃基板（500）的输送装置（100）包括承载平台（200）及气浮系统（300），所述承载平台（200）用于支撑叠放玻璃基板（500）的层叠架（400），所述气浮系统（300）包括用于使所述层叠架（400）上的待传送玻璃基板（500）悬浮的气浮装置（600）、用于驱动所述待输送玻璃基板（500）移动的基板驱动装置（700）。该玻璃基板的输送装置（100），层叠架（400）承载在承载平台（200）上，通过气浮装置（600）进入层叠架（400）内待输送玻璃基板（500）的下方，使待输送玻璃基板（500）悬浮，再利用基板驱动装置（700）驱动待输送玻璃基板（500）流出层叠架（400），能够方便快捷地取出待输送玻璃基板。

Description

一种玻璃基板的输送装置 技术领域
本发明属于基板输送技术领域， 具体涉及一种玻璃基板的输送装置。 背景技术
玻璃基板是液晶显示装置等设备生产中的常见组成部分。 目前， 在生产过程 中， 玻璃 反通常相互隔离地层叠在层叠架内。 当需要对玻璃基板进行输送或检 查时， 需将待输送玻璃 反下方的玻璃 反逐片取出。 此过程耗时耗力。 发明内容
本发明的目的在于， 提供一种玻璃基板的输送装置， 其能够方便快捷地取出 待输送玻璃 反。
本发明通过如下技术方案实现： 一种玻璃基板的输送装置， 其中， 所述玻璃 反的输送装置包括承载平台及气浮系统， 所 载平台用于支撑叠放玻璃 反 的层叠架， 所述气浮系统包括用于使所述层叠架上的待输送玻璃基板悬浮的气浮 装置、 用于驱动所述待输送玻璃基板移动的基板驱动装置。
作为上述技术方案的进一步改进， 所述气浮装置包括气浮平台、 驱动所述气 浮平台从所述层叠架的侧部进入所述待输送玻璃基板的下方的气浮平台驱动机 构。
作为上述技术方案的进一步改进， 所述气浮平台包括左气浮平台、 右气浮平 所述待输送玻璃！ ^反的下方的左气浮平台驱动机构、 驱动所述右气浮平台从所述 层叠架的右侧部进入所述待输送玻璃基板的下方的右气浮平台驱动机构。
作为上述技术方案的进一步改进， 所述左气浮平台和所述右气浮平台结构相 作为上述技术方案的进一步改进， 所述左气浮平台驱动机构包括沿上下方向 延伸的左支撑架、 左移动轨道和驱动所述支撑架沿所述左移动轨道线性移动的左 马达， 所述左气浮平台设置在所述左支撑架上。
作为上述技术方案的进一步改进， 所述左气浮平台包括沿左右方向平行布置 的多个支撑板、 将所述多个支撑板连接在一起的支撑梁， 所述多个支撑板上均匀 设置有多个气孔。
作为上述技术方案的进一步改进， 所述多个支撑板中的一个或更多支撑板上 设置有用于识别所述层叠架上的玻璃基板的信息的核对传感器。
作为上述技术方案的进一步改进， 所述基板驱动装置设置在所述支撑梁上。 作为上述技术方案的进一步改进， 所述基板驱动装置包括多个驱动单元， 各 驱动单元均包括主动轮组、 从动轮组、 及驱动气缸， 所述驱动气缸用于驱动所述 主动轮组转动， 所述从动轮组用于在将所述待输送玻璃基板夹持在所述主动轮组 与所述从动轮组之间的情况下与所述主动轮组配合输送所述待输送玻璃基板。
作为上述技术方案的进一步改进， 所述主动轮组位于所述从动轮组的下方。 作为上述技术方案的进一步改进， 所述待输送玻璃基板为用于液晶显示装置 的玻璃 1 。
本发明的有益效果是： 本发明的玻璃 反的输送装置包括承载平台及气浮系 统， 所述承载平台用于支撑叠放玻璃 反的层叠架， 所述气浮系统包括用于使所 述层叠架上的待输送玻璃基板悬浮的气浮装置、 用于驱动所述待输送玻璃基板移 动的基板驱动装置， 由此， 层叠架承载在承载平台上后， 通过气浮装置进入层叠 架内待输送玻璃基板的下方， 使待输送玻璃基板悬浮， 再利用基板驱动装置驱动 待输送玻璃！ ^反流出层叠架， 能够方便快捷地且可靠地取出待输送玻璃 反。 附图说明
图 1是根据本发明的一个具体实施例的玻璃基板的输送装置的立体示意图。 图 2是图 1的玻璃 反的输送装置的俯视示意图。
图 3是图 1的玻璃基板的输送装置的前后方向上的侧视示意图。
图 4是图 1的玻璃基板的输送装置的左右方向上的侧视示意图。
图 5是图 4中 A处放大图。
图 6是图 1的玻璃 反的输送装置的气浮平台的左气浮平台与左气浮平台驱 动机构的俯视示意图。
图 7是图 1的玻璃基板的输送装置的实施例中使用的层叠架的正面示意图。 具体实施方式 以下结合附图对本发明的具体实施方式进行进一步的说明。
如图 1至图 4所示， 本实施例的玻璃基板的输送装置 100包括承载平台 200 及气浮系统 300。 所 载平台 200用于支撑叠放玻璃 ^反的层叠架 400。 在本发 明的另一个具体实施例中， 层叠架 400由搬送工具搬送到该承载平台 200上， 且 该承载平台 200设置成可以调整层叠架 400的上下方向 Ζ的位置。 层叠架 400可 以采用业界通常的样态。 图 7显示了本实施例采用的层叠架 400。
本实施例中， 所述气浮系统 300包括用于使所述层叠架 400上的待输送玻璃 基板 500悬浮的气浮装置 600、和用于驱动所述待输送玻璃基板 500移动的基板驱 动装置 700。 由此， 当层叠架 400承载在承载平台 200上后， 通过气浮装置 600进 入层叠架 400内待输送玻璃 反500的下方， 4吏待输送玻璃 反500悬浮， 再利 用_¾ ^反驱动装置 700驱动待输送玻璃_¾ ^反流出层叠架 400,能够方便快捷地取出待 输送玻璃 反 500„
其中， 所述气浮装置 600包括气浮平台 610、驱动所述气浮平台 610从所述层 叠架 400的左右方向 X两侧部进入所述待输送玻璃基板 500的下方的气浮平台驱 动机构 620。 具体而言， 所述气浮平台 610包括左气浮平台 612、 右气浮平台 614, 如图 3所示。 相应地， 所述气浮平台驱动机构 620包括驱动所述左气浮平台 612 从所述层叠架 400的左侧部进入所述待输送玻璃基板 500的下方的左气浮平台驱 动机构 622、驱动所述右气浮平台 614从所述层叠架 400的右侧部进入所述待输送 玻璃 ^反 500的下方的右气浮平台驱动机构 624, 如图 1和图 2所示。
本实施例中， 所述左气浮平台 612和所述右气浮平台 614结构相同； 所述左 气浮平台驱动机构 622与所述右气浮平台驱动机构 624结构相同。 由此， 能够通 过所述左气浮平台驱动机构 622与所述右气浮平台驱动机构 624, 使左气浮平台 612、 右气浮平台 614分别从左右两侧进入待输送玻璃 反 500的下方。
这样一来， 当需要对任意位置的待输送玻璃 ^反 500进行输送或检查时， 无 需将待输送玻璃 反 500下方的玻璃 反逐片取出， 而是直接使气浮平台进入待 输送玻璃基板 500的下方， 将其驱动送出层叠架 400, 方便快捷、 且可靠地避免输 送过程中的破片等。
如上所述， 由于所述左气浮平台 612和所述右气浮平台 614结构相同， 所述 左气浮平台驱动机构 622与所述右气浮平台驱动机构 624结构相同， 所以以下仅 介绍左气浮平台 612、 左气浮平台驱动机构 622, 省略对右气浮平台 614、 右气浮 平台驱动机构 624进行说明。
如图 6所示， 所述左气浮平台 612包括沿左右方向 X平行布置的多个支撑板 630、 将所述多个支撑板 630连接在一起的支撑梁 632。 即， 多个支撑板 630固定 在支撑梁 632上。 所述多个支撑板 630上均匀设置有多个气孔 634。 密布的多个气 孔 634通过管路与未图示的气源连接。
如图 1至图 6所示， 所述左气浮平台驱动机构 622包括沿上下方向 Z延伸的 左支撑架 626、左移动轨道 628和驱动所述支撑架沿所述移动轨道线性移动的左马 达 627。 且所述左气浮平台 612设置在所述左支撑架 626上。 本实施例中， 左移动 轨道 628与右移动轨道（未标示 )连接为一体。
本实施例中， 所述多个支撑板 630中的至少一个支撑板 630上设置有用于识 别所述层叠架 400上的玻璃基板的信息的核对（mapping )传感器 640。 如图 6所 示， 核对传感器 640设置在支撑板 630的自由端附近。 玻璃基板的信息可以包括 玻璃基板的生产编号、 生产日期、 是否良品、 型号等基本信息。 由此， 可以方便 地实现帐料的扫描核对、 和检查。
如图 4、 图 5和图 6所示， 所述基板驱动装置 700设置在所述支撑梁 632上。 具体而言， 所述基板驱动装置 700包括多个驱动单元 710。 如图 4所示， 所述基板 驱动装置 700具有设置在左气浮平台 612的支撑梁 632上的 6个驱动单元 710。各 驱动单元 710均包括主动轮组 720、 从动轮组 730、 及驱动气缸 740。 所述驱动气 缸 740用于驱动所述主动轮组 720转动， 所述从动轮组 730用于在将所述待输送 玻璃基板 500夹持在所述主动轮组 720与所述从动轮组 730之间的情况下与所述 主动轮组 720配合输送所述待输送玻璃基板 500。所述主动轮组 720位于所述从动 轮组 730的下方。
本发明的玻璃 反的输送装置中，设置有气浮系统 300。 当气浮平台 610被气 浮平台驱动机构 620驱动进入加层叠架的层与层直接的空间后， 利用密布的多个 气孔 634吹出来的气体将待输送玻璃基板 500悬浮起来， 由基板驱动装置 700轻 夹！^反并驱动待输送玻璃 1 500 "流出" 层叠架 400, 进而实现待输送玻璃 反 500的传输和扫描核对。本发明的玻璃基板的输送装置中， 可根据需要控制气浮平 台 610进入到任一目标玻璃基板的下方， 使该玻璃基板悬浮起来， 进而可靠地实 现玻璃基板的检测或传输。
以上具体实施方式对本发明进行了详细的说明， 但这些并非构成对本发明的 限制。 本发明的保护范围并不以上述实施方式为限， 但凡本领域普通技术人员根 据本发明所揭示内容所作的等效修饰或变化， 皆应纳入权利要求书中记载的保护 范围内。

Claims

权 利 要 求 书
1、 一种玻璃基板的输送装置， 其中， 所述玻璃基板的输送装置包括承载平台 及气浮系统， 所 载平台用于支撑叠放玻璃 反的层叠架， 所述气浮系统包括 用于使所述层叠架上的待输送玻璃基板悬浮的气浮装置、 用于驱动所述待输送玻 璃基板移动的基板驱动装置。
2、 根据权利要求 1所述的玻璃基板的输送装置， 其中， 所述气浮装置包括气 浮平台、 驱动所述气浮平台从所述层叠架的侧部进入所述待输送玻璃基板的下方 的气浮平台驱动机构。
3、 根据权利要求 2所述的玻璃 反的输送装置， 其中， 所述气浮平台包括左 层叠架的左侧部进入所述待输送玻璃基板的下方的左气浮平台驱动机构、 驱动所 述右气浮平台从所述层叠架的右侧部进入所述待输送玻璃基板的下方的右气浮平 台驱动机构。
4、 根据权利要求 3所述的玻璃 反的输送装置， 其中， 所述左气浮平台和所 构相同。
5、 根据权利要求 4所述的玻璃 反的输送装置， 其中， 所述左气浮平台驱动 机构包括沿上下方向延伸的左支撑架、 左移动轨道和驱动所述支撑架沿所述左移 动轨道线性移动的左马达， 所述左气浮平台设置在所述左支撑架上。
6、 根据权利要求 5所述的玻璃 反的输送装置， 其中， 所述左气浮平台包括 沿左右方向平行布置的多个支撑板、 将所述多个支撑板连接在一起的支撑梁， 所 述多个支撑板上均匀设置有多个气孔。
7、 根据权利要求 6所述的玻璃 ^反的输送装置， 其中， 所述多个支撑板中的 至少一个支撑板上设置有用于识别所述层叠架上的玻璃基板的信息的核对传感 器。
8、 根据权利要求 6所述的玻璃基板的输送装置， 其中， 所述基板驱动装置设 置在所述支撑梁上。
9、 根据权利要求 8所述的玻璃基板的输送装置， 其中， 所述基板驱动装置包 括多个驱动单元， 各驱动单元均包括主动轮组、 从动轮组、 及驱动气缸， 所述驱 动气缸用于驱动所述主动轮组转动， 所述从动轮组用于在将所述待输送玻璃基板 夹持在所述主动轮组与所述从动轮组之间的情况下与所述主动轮组配合输送所述 待输送玻璃 反。
10、 根据权利要求 9所述的玻璃基板的输送装置， 其中， 所述主动轮组位于 所述从动轮组的下方。
11、 根据权利要求 9所述的玻璃基板的输送装置， 其中， 所述待输送玻璃基 板为用于液晶显示装置的玻璃基板。
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