WO2014196259A1 - Élément coulissant - Google Patents

Élément coulissant Download PDF

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Publication number
WO2014196259A1
WO2014196259A1 PCT/JP2014/059920 JP2014059920W WO2014196259A1 WO 2014196259 A1 WO2014196259 A1 WO 2014196259A1 JP 2014059920 W JP2014059920 W JP 2014059920W WO 2014196259 A1 WO2014196259 A1 WO 2014196259A1
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WO
WIPO (PCT)
Prior art keywords
layer
sliding
concentration
hard carbon
atomic
Prior art date
Application number
PCT/JP2014/059920
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English (en)
Japanese (ja)
Inventor
一等 杉本
拓 小野寺
Original Assignee
株式会社日立製作所
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Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP2015521329A priority Critical patent/JPWO2014196259A1/ja
Publication of WO2014196259A1 publication Critical patent/WO2014196259A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
    • F01L3/00—Lift-valve, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces; Parts or accessories thereof
    • F01L3/02—Selecting particular materials for valve-members or valve-seats; Valve-members or valve-seats composed of two or more materials
    • F01L3/04—Coated valve members or valve-seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M59/00—Pumps specially adapted for fuel-injection and not provided for in groups F02M39/00 -F02M57/00, e.g. rotary cylinder-block type of pumps
    • F02M59/02—Pumps specially adapted for fuel-injection and not provided for in groups F02M39/00 -F02M57/00, e.g. rotary cylinder-block type of pumps of reciprocating-piston or reciprocating-cylinder type
    • F02M59/10—Pumps specially adapted for fuel-injection and not provided for in groups F02M39/00 -F02M57/00, e.g. rotary cylinder-block type of pumps of reciprocating-piston or reciprocating-cylinder type characterised by the piston-drive
    • F02M59/102—Mechanical drive, e.g. tappets or cams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M59/00—Pumps specially adapted for fuel-injection and not provided for in groups F02M39/00 -F02M57/00, e.g. rotary cylinder-block type of pumps
    • F02M59/44—Details, components parts, or accessories not provided for in, or of interest apart from, the apparatus of groups F02M59/02 - F02M59/42; Pumps having transducers, e.g. to measure displacement of pump rack or piston
    • F02M59/445—Selection of particular materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M2200/00—Details of fuel-injection apparatus, not otherwise provided for
    • F02M2200/02—Fuel-injection apparatus having means for reducing wear
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M2200/00—Details of fuel-injection apparatus, not otherwise provided for
    • F02M2200/90—Selection of particular materials
    • F02M2200/9038—Coatings

Definitions

  • the present invention relates to a sliding part.
  • the hard carbon film is a carbon film called DLC (diamond-like carbon), amorphous carbon, amorphous carbon or the like.
  • Hard carbon film includes both sp 2 bonds and sp 3 bonds to the binding between the carbon atoms, no definite crystal structure (without grain boundaries) an amorphous structure, the sp 3 bonds
  • the friction coefficient is low due to the high hardness and toughness derived from it and the self-lubricating property derived from sp 2 bonding.
  • PVD methods such as sputtering and arc ion plating, plasma CVD, etc. as film forming methods, and it is general to produce a hydrogen-containing carbon film using a part of hydrocarbon gas as a raw material.
  • Patent Document 1 and Patent Document 2 have been reported as hard coatings utilizing the self-lubricating property of carbon or sliding parts using the same.
  • Patent Document 1 discloses a hard film in which a graphite particle deposition layer defined by Raman spectroscopic analysis is formed on the surface of a DLC layer.
  • the graphite particle deposition layer is said to have rapid self-lubricating property in the early stage of sliding, that is, conformability, and can contribute to lowering the friction coefficient in the initial stage of use of the sliding part.
  • Patent Document 2 relates to a similar conforming layer, and discloses a sliding member using DLC containing N, H, and Si formed by DC pulse plasma CVD as the conforming layer.
  • An object of the present invention is to obtain a sliding component having low friction characteristics that is stable over a long period of time.
  • the present invention provides a sliding component comprising a component provided with a hard carbon coating and a steel component slidably contacted with the hard carbon coating, wherein the hard carbon coating comprises a first layer on the surface layer and a first layer below the first layer.
  • the first layer includes at least one element X (B, Cr, Ti) and C and H
  • the second layer includes the element X contained in the first layer. At least one of them is included, and the first layer has a lower element concentration of the element X than the second layer.
  • the sliding component of the present invention includes at least a component 3 having a hard carbon film 1 on the surface of a base material 2 and a steel component 4.
  • the hard carbon film of the part before use has a layer structure of two or more layers having at least a first layer (surface layer) 11 and a second layer 12.
  • the first layer contains at least one element X (B, Cr, Ti) and carbon and hydrogen.
  • the second layer includes at least one element X included in the first layer, and the first layer has a lower element concentration of the element X than the second layer.
  • the second layer may include Ti that is not included in the first layer, but includes at least one of B and Cr.
  • a part of the carbon body is discharged from the first layer of the hard carbon film and adsorbs to the steel part surface away from the film surface.
  • the carbon body discharged from the first layer can be easily adsorbed on the surface of steel parts as compared with pure carbon, and can have a strong transfer reaction.
  • amorphous carbon mainly composed of a carbon network of sp 2 bonds easily retains sp 3 bonds such as —CH 3 by including H, but by including the element X in this bond, It becomes easy to combine with O that is bound to Fe element on the surface of the steel part, and as a result, the discharged carbon body is firmly adsorbed on the surface of the steel part.
  • the second layer in contrast to the first layer that retains the inherent self-lubricating characteristics of C, the second layer preferably has a microstructure that suppresses self-lubricating characteristics and prevents wear due to frictional heat.
  • B is capable of forming a heat-resistant BC bond
  • Cr or Ti is an element capable of forming a heat-resistant carbide. Both elements combine with C to achieve high hardness characteristics and high heat resistance characteristics. It is an element that can achieve both. If the concentration of element X in the second layer is the same as or lower than that of the first layer, the second layer exhibits the same self-lubricating characteristics as the first layer due to an increase in the proportion of C, and is rubbed by friction. As a result, the entire hard carbon film is significantly worn out.
  • the first layer contains a large amount of C to actively self-lubricate, and a small amount of element X helps self-lubricating characteristics.
  • the second layer provided immediately below the first layer has a higher element X concentration than the first layer in order to protect the hard carbon film itself from wear including self-lubrication.
  • the layers are clearly separated from each other, but the elements contained in the layers slightly diffuse to the adjacent layers. Therefore, there is a gentle concentration gradient in the film thickness direction at the boundary between layers.
  • a portion where the concentration is inclined is allowed as an interlayer (boundary).
  • the Cr concentration of the first layer is 0.05 atomic% or more and 0.12 atomic%.
  • the Cr concentration of the second layer is set to a range of 0.24 atomic% or less.
  • the Cr concentration of the first layer is 0.05 atomic% or more with respect to the concentration range, transfer to the steel part is promoted and a stable friction coefficient is easily obtained.
  • the Cr concentration in the first layer is 0.12 atomic% or less, the initial friction coefficient can be sufficiently lowered.
  • the Cr concentration of the second layer is 0.24 atomic% or less, the film hardness is high and wear is difficult.
  • the sliding component preferably has a first layer hardness of 15 GPa or less and a second layer of 24 GPa or more when measured by an instrumented indentation hardness test.
  • the kind of element X at this time does not matter.
  • the instrumented indentation hardness test specified in ISO14577-1 is a device that can analyze the hardness of a hard carbon film microscopically. In the case of a hard carbon film containing hydrogen, the lower the hardness, the higher the self-lubricating property and the tendency to wear away.By making the first layer, which requires conformability, 15 GPa or less, it can contribute to lower friction. Contributing to wear prevention by making the two layers 24GPa or more.
  • the element X is B, and N is contained in the same degree as B.
  • B and N are added in amorphous carbon, BN bonds with high hardness and high heat resistance can be formed, so wear is reduced more especially when both B and N are included in the second layer. Can be formed.
  • the sliding component it is preferable to have a film structure in which an intermediate layer that enhances adhesion is provided between the second layer and the substrate.
  • the base material is a steel material
  • the film structures such as the first layer, the second layer, and the intermediate layer can be used in appropriate combination.
  • the sliding parts are arranged on various automobile parts, since the surface can take advantage of the characteristics of promoting self-lubrication while maintaining the hardness of the coating itself.
  • components disposed in the internal combustion engine include a valve lifter, a tappet, an adjusting shim, a cam, a camshaft, a rocker arm, a piston, a piston pin, a piston ring, a timing gear, and a timing chain.
  • examples of the sliding parts arranged in the fuel supply pump and the fuel injection system include an injector, a plunger, a cylinder, a cam, and a vane.
  • the present invention is not limited to these, and can be widely applied to other sliding parts.
  • the cylinder 503 and the plunger 501 slide.
  • 502 is an oil seal
  • 504 is a lifter
  • 505 is a cam
  • 506 is a fuel flow path
  • 507 is a suction side valve
  • 508 is a discharge side valve.
  • valve lifter 601 and the cam 602 slide.
  • 603 is a valve
  • 604 is an intake duct or exhaust duct
  • 605 is a combustion chamber.
  • the hard carbon film is preferably produced by a sputtering method using a solid carbon target and a hydrocarbon gas in combination, and it is preferable to use a film production apparatus incorporating a non-equilibrium magnetron sputtering technique with a relatively high plasma ionization rate.
  • a film production apparatus incorporating a non-equilibrium magnetron sputtering technique with a relatively high plasma ionization rate.
  • the non-equilibrium magnetron sputtering technique is a technique that can increase the plasma density on the substrate side by controlling the plasma distribution.
  • C and B which are difficult to ionize, can take a higher-order excited state to form a non-equilibrium state, and by controlling the parameters, the hardness is 25 GPa or more.
  • a hard film can be produced.
  • Ar gas is usually used for plasma control.
  • controlling the composition ratio of the hard coating a method of controlling by preparing two types of solid target containing element X and solid carbon target and adjusting the respective input power is preferable. Further, when N is contained, it is preferable to enclose a small amount of either or both of N gas and ammonia gas in the furnace.
  • the Cr target power was decreased to increase the C target power, and a second layer containing Cr (thickness 1.7 ⁇ m) was deposited, and subsequently the applied bias was reduced, With the vacuum gas pressure increased, the input power of the Cr target was further reduced to deposit a first layer (thickness 0.5 ⁇ m) containing a small amount of Cr.
  • the hardness of the first layer was 9 GPa and the hardness of the second layer was 24 GPa.
  • a hard carbon film having the composition shown in Examples 2 to 8 and Comparative Examples 1 to 8 was deposited on the substrate in the same procedure as in Example 1-1.
  • a metal intermediate layer and a metal carbide intermediate layer were provided between the substrate and the hard carbon film.
  • B was a boron carbide target
  • Cr was a Cr target
  • Ti was a Ti target.
  • N, C, or O may be mixed into the film without intentionally entering the supply source.
  • This mixed element is considered to have been obtained from residual air distributed in the furnace, water vapor and floating dust.
  • the purity of the supply gas such as Ar was set to 99.9% or more and the degree of vacuum and humidity in the furnace were changed and investigated, O inevitably mixed was less than 12 atomic%, and Ar was less than 18 atomic%. I understood that.
  • the H concentration that cannot be analyzed by XPS was measured with an ERDA (elastic recoil detection method) analyzer, and the H concentration in the hard carbon films of the examples and comparative examples prepared with the sputtering device was 4 atom% to 25 atom%. It was found to be in the range.
  • ERDA elastic recoil detection method
  • the friction and wear test apparatus includes a plate test piece 701, a ring test piece 702, a heater 703, a torque measurement arm 704, a load cell 705, a test chamber 706, and heat retaining water 10.
  • the plate test piece is obtained by using a steel material represented by SUS440B as a base material and forming a hard carbon film on the surface that slides with the ring test piece.
  • a steel material represented by SKD10 was used as the ring test piece.
  • the plate test piece was rotated so that the peripheral speed of the outer periphery of the sliding part was 0.5 m / s, and the ring test piece was slid with a maximum load of 10 kgf (maximum surface pressure of 8 MPa). .
  • the test temperature was set higher than the normal temperature, and the hot water was always adjusted to 80 ° C. with a heater.
  • the process of removing abrasion powder by blowing the friction surface with dry air after sliding for 0.5 hour was defined as one cycle, and this was repeated 20 cycles (total sliding time 10 hours).
  • Example 4 the Cr concentration of the first layer is relatively high as compared with the other examples. In this case, the coefficient of friction is slightly higher. Therefore, it is more preferable to control the Cr concentration of the first layer to 0.12 atomic% or less as in the other examples.
  • Example 5 the Cr concentration of the second layer is relatively high and the hardness is 18 GPa as compared with the other examples. In this case, slight wear was observed at the inner end of the friction part having a low peripheral speed. If the Cr concentration of the second layer is too high, the hardness of the hard carbon film cannot be maintained high, and thus wear easily occurs. Therefore, it is more preferable to control the Cr concentration of the second layer to 0.24 atomic% or less as in the other examples.
  • Comparative Example 1 when the results of Comparative Examples 1 to 4 in which a hard carbon film having a single layer (the composition of the first layer and the second layer is the same in Table 1) are provided on the intermediate layer, Comparative Example 1 having a low Cr concentration are shown.
  • Comparative Example 2 the hard carbon layer was abraded and the intermediate layer was exposed, both of which resulted in a high coefficient of friction during the test.
  • Comparative Example 1 with a low hardness exhibited significant wear.
  • Comparative Example 4 with a high Cr concentration did not show significant wear, but the coefficient of friction was remarkably high from the start of the test.
  • Comparative Example 3 having a Cr concentration between Comparative Example 2 and Comparative Example 4 showed a slight friction and a higher friction coefficient than the Example. From these results, it was found that a single layer hard carbon film containing Cr cannot achieve both a stable friction coefficient and wear resistance at any Cr concentration.
  • Comparative Example 5 does not contain an additive element in the first layer. This was low friction at the start of the test, but the coefficient of friction increased with each cycle, resulting in high friction. This shows that it is necessary to add a small amount of element X to the first layer. From the above, when Cr is used as the additive element, it is preferable to control the Cr concentration of the first layer to 0.05 atomic% or more and 0.12 atomic% or less, and the Cr concentration of the second layer to 0.24 atomic% or less.
  • the first layer that needs to have a low coefficient of friction be a low hardness
  • the second layer that needs to have wear resistance be a high hardness.
  • the first layer is preferably 15 GPa or less in Example 3
  • the second layer is preferably 24 GPa or more in Example 1.
  • Example 6 and Example 7, Comparative Example 6 and Comparative Example 7 are shown.
  • Example 8 Comparative Example 8 are shown.
  • carbon, B, and N are contained in an amorphous (non-crystal) structure, and particularly when the atomic concentrations of B and N are comparable. It has been found that it has a stable heat resistance and is difficult to wear.
  • N is preferably contained in the second layer in order to improve the wear resistance, but it was confirmed that even if it is contained in the first layer, the friction coefficient is not greatly affected if it is contained in a small amount. If the first layer contains an amount of N equal to that of the second layer as in Comparative Example 8, the friction coefficient will be significantly increased.
  • plunger pump In the plunger pump which is one of the fuel supply pumps, a hard carbon film was coated on the plunger surface, and the actual machine was evaluated. As a result, it was confirmed that the sliding parts having the hard carbon film shown in Examples 1 to 8 showed excellent low friction and wear resistance characteristics.
  • the binding energy of molecular adsorption was estimated by molecular dynamics simulation. Assuming C (CH 3) 3 as the simplest molecular structure of amorphous carbon released between sliding parts by self-lubricating reaction, C (CH 3) 3 and B (CH 3) 3 , Cr (CH 3 ) 3 and Ti (CH3 ) 3 were compared. In general, iron oxide is formed on the surface of steel parts exposed to the atmosphere. In this experiment, assuming that the iron oxide is exposed on the surface of the part, -O-Fe ( The binding energy with OH) 5 was calculated and the absolute values of C—O and X—O were compared.
  • the iron oxide was replaced with the iron hydroxide, and it was found that the result of the iron oxide shows the same tendency as the iron hydroxide.
  • the absolute values of the binding energies of B—O, Cr—O and Ti—O were large, indicating that they were strongly adsorbed.

Abstract

L'invention concerne un élément coulissant qui présente : un élément doté d'un film de revêtement en carbone dur ; et un élément en acier qui est en contact coulissant avec l'élément. Le film de revêtement en carbone dur comprend au moins une première couche qui forme la couche de surface et une deuxième couche qui se trouve sous la première couche. La première couche contient C, H et au moins un des éléments X (B, Cr, Ti) et la deuxième couche contient au moins un des éléments X qui sont contenus dans la première couche. La concentration en éléments X dans la première couche est inférieure à celle dans la deuxième couche.
PCT/JP2014/059920 2013-06-06 2014-04-04 Élément coulissant WO2014196259A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015521329A JPWO2014196259A1 (ja) 2013-06-06 2014-04-04 摺動部品

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013-119395 2013-06-06
JP2013119395 2013-06-06

Publications (1)

Publication Number Publication Date
WO2014196259A1 true WO2014196259A1 (fr) 2014-12-11

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019113039A (ja) * 2017-12-26 2019-07-11 日立オートモティブシステムズ株式会社 高圧燃料供給ポンプおよびその製造方法
US10619739B2 (en) * 2015-07-31 2020-04-14 Nippon Piston Ring Co., Ltd Piston ring
CN115013207A (zh) * 2022-05-10 2022-09-06 哈尔滨工程大学 一种基于高低温重整制氢的混合动力系统及控制方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11280680A (ja) * 1998-03-30 1999-10-15 Sanyo Electric Co Ltd 硬質炭素被膜が形成された回転圧縮機
JP2007070565A (ja) * 2005-09-09 2007-03-22 Toyota Motor Corp 摺動ユニット及び摺動方法
JP2007277663A (ja) * 2006-04-10 2007-10-25 Toyota Motor Corp 摺動材
JP2011052238A (ja) * 2009-08-31 2011-03-17 Hitachi Tool Engineering Ltd 摺動部品

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11280680A (ja) * 1998-03-30 1999-10-15 Sanyo Electric Co Ltd 硬質炭素被膜が形成された回転圧縮機
JP2007070565A (ja) * 2005-09-09 2007-03-22 Toyota Motor Corp 摺動ユニット及び摺動方法
JP2007277663A (ja) * 2006-04-10 2007-10-25 Toyota Motor Corp 摺動材
JP2011052238A (ja) * 2009-08-31 2011-03-17 Hitachi Tool Engineering Ltd 摺動部品

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10619739B2 (en) * 2015-07-31 2020-04-14 Nippon Piston Ring Co., Ltd Piston ring
JP2019113039A (ja) * 2017-12-26 2019-07-11 日立オートモティブシステムズ株式会社 高圧燃料供給ポンプおよびその製造方法
CN115013207A (zh) * 2022-05-10 2022-09-06 哈尔滨工程大学 一种基于高低温重整制氢的混合动力系统及控制方法
CN115013207B (zh) * 2022-05-10 2023-12-29 哈尔滨工程大学 一种基于高低温重整制氢的混合动力系统及控制方法

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