WO2014146399A1 - 彩膜基板、该彩膜基板的制作方法及液晶面板 - Google Patents

彩膜基板、该彩膜基板的制作方法及液晶面板 Download PDF

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Publication number
WO2014146399A1
WO2014146399A1 PCT/CN2013/082197 CN2013082197W WO2014146399A1 WO 2014146399 A1 WO2014146399 A1 WO 2014146399A1 CN 2013082197 W CN2013082197 W CN 2013082197W WO 2014146399 A1 WO2014146399 A1 WO 2014146399A1
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WO
WIPO (PCT)
Prior art keywords
color film
film layer
bottom pad
spacer
substrate
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PCT/CN2013/082197
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English (en)
French (fr)
Inventor
杨瑞智
林准焕
张俊瑞
Original Assignee
京东方科技集团股份有限公司
成都京东方光电科技有限公司
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Publication of WO2014146399A1 publication Critical patent/WO2014146399A1/zh

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • G02F1/13396—Spacers having different sizes

Definitions

  • Color film substrate method for manufacturing the color film substrate, and liquid crystal panel
  • the present disclosure relates to a color filter substrate, a method of fabricating the same, and a liquid crystal panel including the color film substrate. Background technique
  • FIG. 1 is a plan view showing the position of a conventional spacer (e.g., a column spacer) on a color filter substrate, and a cross-sectional view of a liquid crystal panel having the color filter substrate. As shown in FIG. 1, the height of the spacers in the conventional liquid crystal panel is equal.
  • a conventional spacer e.g., a column spacer
  • the spacer in order to adjust the liquid crystal filling amount under the adverse effects of low temperature bubbles and gravity, in order to reduce the product defect caused by the error of the liquid crystal dropping amount in the mass production process, the spacer may be used.
  • the objects are made in two or three different heights.
  • FIGS. 2 and 3 show a conventional liquid crystal panel having a plurality of spacers.
  • the conventional liquid crystal panel of Fig. 2 has spacers of two different heights which are formed by the following method.
  • the absolute height of the spacer is controlled by using a halftone (Half Tone) reticle or a Gray Tone reticle by using different exposure amounts at different positions of the color film substrate. It is easier to achieve different heights of the spacers in this way, but the halftone reticle or gray tone reticle used is typically twice or more expensive than a normal reticle of the same size.
  • the area of the reticle used in the general color film substrate process is much larger than the area of the reticle used in the array substrate process, which means that the price of the common reticle used for the color film substrate is already higher than that of the array substrate.
  • the ordinary reticle is much more expensive. If the spacer is used in this way, the manufacturing cost of the color film substrate will be further improved. In addition, since the photoresist itself may be sensitive to different exposure doses, the spacer formed by such a method may also cause a difference in the morphology of the spacers formed at different heights, thereby causing other adverse effects. .
  • Fig. 3 shows a scheme for realizing a spacer having a plurality of heights by using the step layer 9 of the array substrate itself.
  • the height of the spacer body 6 made in the manner of FIG. 3 is the same, and the combination of the spacer body 6 and the step layer 9 forms a relatively high spacer, and the spacer body 6 itself is formed. Relatively low spacer. Therefore, the spacer is formed in this way, and no additional cost is added to the reticle.
  • the thickness of each layer in the array substrate is relatively fixed, it is made in this way.
  • the height difference between the spacers of different heights is also relatively fixed, so that the adjustment range of the corresponding liquid crystal filling amount becomes more limited.
  • the spacers of the array substrate are required to be formed by using the spacers of different heights in this manner, it is necessary to provide spacers according to the position of the step layer on the array substrate, which limits the design of the spacers in design. position.
  • the mats should be placed between two adjacent light-transmissive areas on the black matrix, and a certain distance should be left between the spacers and each of the light-transmitting areas to avoid pixel leakage caused by poor rubbing orientation. .
  • the size (referring to the diameter) of the spacer formed in this manner is generally smaller than the size of the conventional spacer (i.e., its diameter is smaller than the diameter of the spacer shown in Figs. 1 and 2).
  • a smaller spacer size results in a lower ratio of spacer support area, and the display panel has a lower pressing strength and is not suitable for an increasingly wide range of touch screen terminal applications.
  • a flat layer is also formed on the array substrate, whereby the surface of the substantially planar array substrate is not available as shown in FIG. Step layer 9. In this case, if the spacers of the same height are still used, various heights of the spacers cannot be achieved in the high-end display panel.
  • the present disclosure provides a color film substrate capable of forming a plurality of height differences of a spacer and having a low manufacturing cost, a method of fabricating the same, and a liquid crystal panel including the color filter substrate.
  • a method of fabricating a color filter substrate comprising the steps of: providing a bottom pad on a substrate at a design position of a portion of the spacer; and on the bottom pad and on the substrate
  • the spacer bodies of the same height are respectively disposed at other design positions of the spacers without the underpad to form spacers having different overall heights.
  • a spacer having a plurality of heights can be formed by using a common reticle, and the spacer has a higher supporting ratio, and at the same time, the size of the spacer has a certain adjustment margin. , can correspond to different panel pressing strength requirements. Moreover, since the heights of the multi-height spacers used in the liquid crystal panels of different specifications are different, the spacers formed in the color filter substrate of the present disclosure are different. The height of the mat can be tailored to the needs of the spacer.
  • the fabrication of various height spacers formed in accordance with the fabrication method of the present disclosure does not require the use of an expensive Half Tone reticle or a Gray Tone reticle, and during the fabrication process, There is no need to add additional processes, no additional costs, and lower production costs.
  • the relatively high spacer and the relatively low spacer are respectively disposed at the same position on the black matrix, and do not affect the aperture ratio of the pixel region. Therefore, the design of the black matrix does not require the location of the spacers.
  • FIG. 1 is a schematic view and a cross-sectional view of a spacer on a color filter substrate in a conventional liquid crystal panel including a color filter substrate;
  • FIG. 2 is a schematic view and a cross-sectional view of a multi-height spacer obtained by exposing a halftone reticle or a gray tone reticle on a color filter substrate in a conventional liquid crystal panel including the color filter substrate;
  • FIG. 3 is a schematic view and a cross-sectional view of a multi-height spacer obtained by using a step layer of an array substrate on a color filter substrate in a conventional liquid crystal panel including the color filter substrate;
  • 4A and 4B are a plan view and a cross-sectional view, respectively, of a color film substrate after forming a first color film layer in Embodiment 1 of the present disclosure;
  • 5A and 5B are a plan view and a cross-sectional view, respectively, of a color film substrate after forming a second color film layer in Embodiment 1 of the present disclosure;
  • FIG. 6A and FIG. 6B are respectively a schematic view of the position of the spacer formed on the color filter substrate by using the manufacturing method of the embodiment 1 of the present disclosure, and a cross-sectional view of the color filter substrate;
  • 6C is a cross-sectional view of the color filter substrate including the flat layer 5 produced by the fabrication method of the embodiment 1 of the present disclosure
  • 7A and 7B are a plan view and a cross-sectional view, respectively, of a color filter substrate after forming a color film layer in Embodiment 3 of the present disclosure
  • 8A and FIG. 8B are respectively a schematic view showing the position of a spacer formed on the color filter substrate by using the manufacturing method of the third embodiment of the present disclosure, and a cross-sectional view of the color filter substrate;
  • Figure 8C is a cross-sectional view of a color film substrate comprising a flat layer 5 formed by the fabrication method of Embodiment 3 of the present disclosure
  • 9A and 9B are a plan view and a cross-sectional view, respectively, of a color filter substrate after forming a color film layer in Embodiment 4 of the present disclosure
  • FIG. 10A and FIG. 10B are respectively a schematic view showing the position of a spacer formed on the color filter substrate by using the manufacturing method of the embodiment 4 of the present disclosure, and a cross-sectional view of the color filter substrate;
  • Figure 10C is a cross-sectional view of a color filter substrate comprising a flat layer 5 formed by the fabrication method of Embodiment 4 of the present disclosure
  • 11A and 11B are a plan view and a cross-sectional view, respectively, of a color filter substrate after forming a first color film layer in Embodiment 5 of the present disclosure;
  • 12A and 12B are a plan view and a cross-sectional view, respectively, of a color filter substrate after forming a third color film layer in Embodiment 5 of the present disclosure;
  • FIG. 13A and FIG. 13B are respectively a schematic view of the position of the spacer formed on the color filter substrate by using the manufacturing method of the embodiment 5 of the present disclosure, and a cross-sectional view of the color filter substrate;
  • Figure 13C is a cross-sectional view of a color filter substrate comprising a flat layer 5 formed by the fabrication method of Embodiment 5 of the present disclosure
  • 14A and 14B are respectively a plan view and a cross-sectional view of a color filter substrate after forming a first color film layer in Embodiment 6 of the present disclosure
  • 15A and 15B are a plan view and a cross-sectional view, respectively, of a color filter substrate after forming a second color film layer in Embodiment 6 of the present disclosure;
  • 16A and 16B are respectively a plan view and a cross-sectional view of a color filter substrate after forming a third color film layer in Embodiment 6 of the present disclosure;
  • FIG. 17A and FIG. 17B are respectively a schematic view showing the position of a spacer formed on the color filter substrate by using the manufacturing method of the embodiment 6 of the present disclosure, and a cross-sectional view of the color filter substrate;
  • Figure 17C is a cross-sectional view of a color filter substrate comprising a flat layer 5 formed by the fabrication method of Embodiment 6 of the present disclosure
  • 18A and 18B are respectively a plan view and a cross-sectional view of a color filter substrate after forming a first color film layer in Embodiment 7 of the present disclosure
  • 19A and 19B are color films after forming a second color film layer in Embodiment 7 of the present disclosure, respectively. a top view and a cross-sectional view of the substrate;
  • 20A and 20B are respectively a plan view and a cross-sectional view of a color filter substrate after forming a third color film layer in Embodiment 7 of the present disclosure;
  • FIG. 21A and FIG. 21B are respectively a schematic view of the position of the spacer formed on the color filter substrate by using the manufacturing method of the embodiment 7 of the present disclosure, and a cross-sectional view of the color filter substrate;
  • Figure 21C is a cross-sectional view of a color filter substrate comprising a flat layer 5 produced by the fabrication method of Embodiment 7 of the present disclosure
  • Figure 22 is a schematic view showing the position of the spacer on the color filter substrate and the cross-sectional view of the liquid crystal panel including the color filter substrate in the color filter substrate of Embodiment 8 of the present disclosure.
  • the embodiment provides a method for fabricating a color filter substrate, the method comprising the following steps: Step 1: providing a bottom pad at a design position of a higher spacer on the first substrate; Step 2: respectively providing spacer bodies of the same height on the bottom pad and at the design positions of the lower spacers on the first substrate to form spacers having different heights.
  • the bottom pad may have two or more different heights, so that when the spacer bodies of the same height are respectively disposed on the bottom pads of the different heights, spacers having different heights may be formed.
  • a black matrix 1 and a color film layer such as the first color film layer 2 may be sequentially formed on the first substrate.
  • a bottom pad 8 is formed on the first color film layer 2 at a design position of a part of the spacer.
  • the design position of the spacer on the color film layer 2 generally refers to the position of the gap between two adjacent light-transmitting regions on the same color film layer, for example, in FIG. 5A, the first color film layer 2 or the second color film.
  • the area enclosed by the broken line inside the layer 3 represents the light-transmitting area on the color film layer, and the design of the spacer in which the bottom pad 8 is located is located between the adjacent two light-transmitting areas.
  • the bottom pad 8 can be formed simultaneously with the color film layer in the process of forming a color film layer.
  • the color film layer may be a color film layer having three different colors, for example, the first color film layer 2, the second color film layer 3, and the third color film layer 4, respectively, as shown in FIGS. 6A-6C. Shown.
  • the first color film layer 2 is a red film layer
  • the second color film layer 3 is a green film layer
  • the third color film layer 4 is a blue film layer.
  • the color film layer having the above three colors is only an example of a preferred embodiment, the color film layer may also adopt other different colors, and the color film layer is not limited to having only three different colors, and may have more colors. .
  • the steps of simultaneously forming the underpad 8 in the process of forming a color film layer in this embodiment are as follows:
  • Step 11A As shown in FIG. 5A and FIG. 5B, a first color film layer 2 is formed on the black matrix 1, and the process is exactly the same as that of the conventional color film layer;
  • Step 12A As shown in Figs. 5A and 5B, a second color film layer 3 is formed on the black matrix 1, and a bottom pad 8 is simultaneously formed on the first color film layer 2.
  • the underpad 8 and the second color film layer 3 are formed by the same reticle through the same patterning process, which is formed by slightly modifying the conventional reticle for the color film layer.
  • Step 13A A third color film layer 4 is formed on the black matrix 1, and the process is exactly the same as that of the conventional color film layer.
  • step 2 as shown in FIGS. 6A and 6B, the spacer bodies 6 are respectively formed on the bottom pad 8 and at other design positions of the spacers on which the underlying pads are not provided on the color film layer 2-4, so as to be formed differently. Height Separator.
  • the steps of forming the spacer body on the bottom pad 8 and at other design positions of the spacers on which the underlying pads are not provided on the color film layers 3, 4 are as follows:
  • Step 21 A A spacer body 6 of the same height is formed on the bottom pad 8 and the second color film layer 3 and the third color film layer 4, respectively.
  • the process of the spacer body 6 is identical to that of the conventional spacer having the same height.
  • the spacers finally have two different heights.
  • the bottom pad 8 having a certain height is previously formed on the first color film layer 2 in step 12A, although the photoresist coating is applied at each position on the color film layer in the process of forming the spacer body 6 in step 21A.
  • the thickness of the spacer body 6 is substantially the same, but the height of the spacer formed on the first color film layer 2 is the same as that of the second color film layer 3 and the first layer due to the presence of the bottom pad 8.
  • the final height of the spacers on the three color film layers 4 is different.
  • the cross-sectional shape of the bottom pad 8 is preferably circular, and may of course be other shapes, for example, may be octagonal; the shape of the color film layer is strip-shaped, and of course other shapes may be used.
  • the height of the bottom pad 8 is, for example, greater than 0 and less than or equal to 3 microns.
  • the exposure dose can be controlled by controlling the size of the light-transmitting region on the reticle, and the thickness of the prepared underpad 8 can be controlled, thereby making the spacer body formed on the bottom pad 8
  • the final height difference is formed between the spacer bodies formed on the color film layer, so that it is possible to cope with a wider liquid crystal filling margin (Margin).
  • the thickness of the bottom pad 8 is controllable, the height difference formed can be adjusted as needed.
  • the relatively high spacers and the relatively short spacers are respectively located between adjacent two light-transmitting regions on the respective color film layers, and correspondingly arranged, and on the black matrix Therefore, the aperture ratio of the pixel region is not affected, and the size of the spacer has a certain adjustment margin, so that it can correspond to a higher panel pressing strength requirement.
  • Fig. 6C is a cross-sectional view showing a color filter substrate having spacers of different heights obtained in the case where the flat film 5 (Overcoat) is included in the color filter substrate.
  • the flattening effect of the flat layer 5 is limited, and the high step difference on the color filter substrate may not be completely eliminated.
  • the color filter substrate produced by the fabrication method of the present embodiment is particularly suitable for the case where only a low spacer height difference is required.
  • Example 2
  • step 1 the step of simultaneously forming the bottom pad in the process of forming a color film layer comprises:
  • Step 11B forming a first color film layer on the black matrix
  • Step 12B forming a second color film layer on the black matrix
  • Step 13B A third color film layer is formed on the black matrix, and a bottom pad is simultaneously formed on the first color film layer and the second color film layer.
  • the bottom pad and the third color film layer are simultaneously formed by a patterning process by a patterning process which is formed by slightly modifying a conventional reticle for forming a color film layer.
  • the bottom pad formed on the first color film layer and the bottom pad formed on the second color film layer have the same height.
  • the spacers finally have two different heights.
  • the bottom pad on the first color film layer and the bottom pad on the second color film layer can also be made to different heights, and only by controlling the size of the light transmissive area on the reticle, the exposure dose can be controlled, thereby enabling Controlling the thickness of the bottom pad produced, so that the height difference between the spacers on different color film layers can also be formed due to the difference in the height of the spacers on the color film layers of different colors, so in this way In the formed color film substrate, the spacers may have two or three different height differences.
  • Example 3 Example 3:
  • the color film layer is a color film layer having three different colors, which are a first color film layer 2, a second color film layer 3, and a third color film layer 4.
  • the first color film layer 2 is a red film layer
  • the second color film layer 3 is a green film layer
  • the third color film layer 4 is a blue film layer.
  • the color film layer having the above three colors is only an example of a preferred embodiment, the color film layer may also adopt other different colors, and the color film layer is not limited to having only three different colors, and may have more colors. .
  • the manufacturing method of the color film substrate of this embodiment includes the following steps: Step 1: providing a bottom pad at a design position of the spacer on the first substrate; specifically, forming a bottom pad at a design position of the spacer on the color film layer, the bottom pad is forming the color
  • the film layer is formed simultaneously in the process.
  • underpads There are two types of underpads to be made, namely a first underpad 81 and a second underpad 82.
  • Step 1 specifically includes the following steps:
  • Step 11C forming a first color film layer 2 on the black matrix 1, the process of which is exactly the same as that of the conventional color film layer;
  • Step 12C forming a second color film layer 3 on the black matrix 1 and simultaneously forming a first bottom pad 81 on the first color film layer 2;
  • the first underpad 81 and the second color film layer 3 are formed by the same reticle through the same patterning process, which is formed by slightly modifying a conventional reticle for forming a color film layer;
  • Step 13C As shown in Figs. 7A and 7B, a third color film layer 4 is formed on the black matrix 1, and a second pad 82 is formed on the first pad 81 and the second color film layer 3 at the same time.
  • Step 2 A spacer body 6 is formed on the bottom pad and at other design positions of the spacer on which the underlying pad is not provided on the color film layer. This step specifically includes:
  • Step 21C A spacer body 6 of the same height is formed on the exposed second underpad 82 and the third color film layer 4, respectively.
  • the process of the spacer body 6 is identical to that of the conventional spacer having the same height.
  • the spacers finally have three different heights.
  • the second bottom pad 82 is formed in advance on the second color film layer 3, although
  • the plurality of spacer bodies 6 formed in step 21C have the same height, but are finally formed on the first color film layer 2 due to the presence of the first bottom pad 81 and the second bottom pad 82 disposed under the spacer body 6.
  • the height of the spacer is different from the height of the spacer formed on the second color film layer 3 and the third color film layer 4, respectively.
  • the cross-sectional shapes of the first bottom pad 81 and the second bottom pad 82 are both circular, and may of course be other shapes, for example, may be octagonal; the color film layer has a strip shape, of course, Use a different shape.
  • the first bottom pad 81 and the second bottom pad 82 have the same height, and the height ranges thereof are, for example, greater than 0 and less than or equal to 3 micrometers.
  • the exposure dose can be controlled by controlling the size of the light-transmitting region on the reticle, and the first underpad 81 or the second underpad 82 can be controlled. Thickness such that the spacer formed at the position of the second bottom pad 82 is formed between the spacer formed at the position of the first bottom pad 81 and the spacer formed on the third color film layer 4. A height difference is formed, so that it is possible to respond to a wider liquid crystal fill margin (Margin). And since the thicknesses of the first bottom pad 81 and the second bottom pad 82 are controllable, the height difference formed can be adjusted as needed.
  • the relatively high spacers and the relatively short spacers are respectively located between adjacent two light-transmitting regions on the respective color film layers, and correspondingly arranged, they are regularly arranged on the black matrix. Therefore, the aperture ratio of the pixel region is not affected, and the size of the spacer has a certain adjustment margin, so that it can correspond to a higher panel pressing strength requirement.
  • Fig. 8C is a cross-sectional view showing a color filter substrate having spacers of different heights obtained in the case where the flat film 5 (Overcoat) is included in the color filter substrate.
  • the flattening effect of the flat layer 5 is limited, and the high step difference on the color filter substrate cannot be completely eliminated.
  • the color filter substrate produced by the production method of this embodiment is suitable for a case where a high spacer height difference is required.
  • Example 4
  • the color film layer is a color film layer having three different colors, which are a first color film layer 2, a second color film layer 3, and a third color film layer 4.
  • the first color film layer 2 is a red film layer
  • the second color film layer 3 is a green film layer
  • the third color film layer 4 is a blue film layer.
  • the color film layer having the above three colors is only an example of a preferred embodiment, the color film layer may also adopt other different colors, and the color film layer is not limited to having only three different colors, and may have more colors. .
  • Step 1 providing a bottom pad at a design position of the spacer on the first substrate; specifically, forming a bottom pad at a design position of the spacer on the color film layer, the bottom pad is forming the color film layer
  • the process is formed simultaneously.
  • there are two types of bottom pads to be produced namely, a first bottom pad 81 and a second bottom pad 82.
  • Step 1 specifically includes the following steps:
  • Step 11D forming a first color film layer 2 on the black matrix 1, the process of which is different from the conventional color film The process of the layers is exactly the same;
  • Step 12D forming a second color film layer 3 on the black matrix 1 and simultaneously forming a first bottom pad 81 on the first color film layer 2;
  • the first underpad 81 and the second color film layer 3 are formed by the same reticle through the same patterning process, and the reticle is formed by slightly modifying the existing reticle for forming the color film layer;
  • Step 13D As shown in Figs. 9A and 9B, a third color film layer 4 is formed on the black matrix 1, and a second bottom pad 82 is simultaneously formed on the first pad 81.
  • Step 2 A spacer body is formed on the bottom pad and at other design positions of the spacer on which the underlying pad is not provided on the color film layer. This step specifically includes:
  • Step 21D A spacer body 6 having the same height is formed on the second underpad 82 and on the second color film layer 3 and the third color film layer 4, respectively.
  • the process of the spacer 6 is identical to that of a conventional spacer having the same height.
  • the spacers finally have two different heights.
  • the color film layer is formed.
  • the thickness of the photoresist coating at each position is substantially the same, that is, the height of the spacer body 6 is the same, but the first color film layer 2 is formed due to the presence of the first bottom pad 81 and the second bottom pad 82.
  • the final height of the spacer is different from the final height of the spacer on the second color film layer 3 and the third color film layer 4.
  • the cross-sectional shape of the first bottom pad 81 and the second bottom pad 82 is preferably circular, and may of course be other shapes, such as an octagonal shape; the color film layer has a strip shape, and of course Use a different shape.
  • the first bottom pad 81 and the second bottom pad 82 have the same height, and the height range thereof is, for example, greater than 0 and less than or equal to 3 micrometers.
  • the relatively high spacers and the relatively short spacers are respectively located between adjacent light-transmissive regions on the respective color film layers, and correspondingly arranged, they are regularly arranged on the black matrix, and thus are not It will affect the aperture ratio of the pixel area, and the size of the spacer has a certain adjustment margin, so that it can correspond to a higher panel pressing strength requirement.
  • Fig. 10C is a cross-sectional view showing a color filter substrate having different height spacers obtained in the case where the flat film 5 (Overcoat) is included in the color filter substrate.
  • the flat layer 5 is flat
  • the canned effect is limited, and the high step difference on the color film substrate cannot be completely eliminated.
  • the color filter substrate produced by the production method of this embodiment is suitable for a case where a high spacer height difference is required.
  • the color film layer is a color film layer having three different colors, which are a first color film layer 2, a second color film layer 3, and a third color film layer 4.
  • the first color film layer 2 is a red film layer
  • the second color film layer 3 is a green film layer
  • the third color film layer 4 is a blue film layer.
  • the color film layer having the above three colors is only an example of a preferred embodiment, the color film layer may also adopt other different colors, and the color film layer is not limited to having only three different colors, and may have more colors. .
  • Step 1 providing a bottom pad 8 at a design position of the spacer on the first substrate
  • Step 2 respectively providing spacer bodies on the bottom pad and other design positions of the spacers on the first substrate without the underlying pads to form spacers having different heights; or, the bottom pads There are two or more different heights, and spacer bodies are respectively disposed on the bottom pads of the different heights to form spacers having different heights.
  • the bottom pad is disposed at the design position of the spacer on the first substrate.
  • the bottom pad 8 is formed on the black matrix 1 at a design position corresponding to the spacer on the color film layer.
  • the design position of the spacer on the black matrix corresponding to the color film layer generally refers to the position of the gap between the adjacent two light-transmitting regions on the same color film layer on the black matrix.
  • the bottom pad 8 is simultaneously formed in the process of forming the color film layer.
  • Step 11E As shown in FIG. 11A and FIG. 11B, the first color film layer 2 is formed on the black matrix 1, and the bottom pad 8 is formed on the black matrix corresponding to the position of the third color film layer 4;
  • the bottom pad 8 and the first color film layer 2 are formed by the same reticle through the same patterning process, and the reticle is formed by slightly modifying a conventional reticle for forming a color film layer; Step 12E: 12A and 12B, a second color is formed on the black matrix 1, respectively.
  • the process of the film layer 3 and the third color film layer 4 is exactly the same as that of the conventional color film layer; in the step 2, the spacers on the bottom pad and the first substrate are not provided with the spacers of the bottom pad
  • the spacer body is respectively disposed at the design position, and the step is specifically: after the color film layer is formed on the black matrix, the position of the bottom pad on the color film layer and the bottom pad not corresponding to the color film layer Spacers are formed at other design locations of the mat.
  • Step 21E As shown in Figs. 13A and 13B, a spacer body 6 having the same height is formed on the third color film layer 4 corresponding to the position of the bottom pad 8 and the first color film layer 2 and the second color film layer 3, respectively.
  • the process of the spacer body 6 is identical to that of the conventional spacer having the same height.
  • the spacers finally have two different heights.
  • step 12E Since in step 12E, the bottom pad 8 having a certain height is formed in advance on the position of the third color film layer 4 on the black matrix 1, although in the process of forming the spacer body 6 in step 21E, each of the color film layers is formed.
  • the thickness of the photoresist coating at the position is substantially the same, that is, the height of the spacer body 6 is the same, but due to the presence of the bottom pad 8, the final height of the spacer formed on the third color film layer 4 is first The final height of the spacers on the color film layer 2 and the second color film layer 3 is different.
  • the cross-sectional shape of the bottom pad 8 is preferably circular, and may of course be other shapes, for example, may be octagonal; the shape of the color film layer is strip-shaped, and of course other shapes may be used.
  • the height of the bottom pad 8 is, for example, greater than 0 and less than or equal to 3 microns.
  • the exposure dose can be controlled by controlling the size of the light-transmitting region on the reticle, and the thickness of the prepared bottom pad 8 can be controlled, thereby making the spacer at the position of the bottom pad 8.
  • a height difference is formed between the object and the spacer formed at the bottomless pad position, so that it can correspond to a wider liquid crystal filling margin (Margin) requirement.
  • the thickness of the bottom pad 8 is controllable, the height difference formed can be adjusted as needed.
  • the relatively high spacers and the relatively short spacers are respectively located between adjacent two light-transmitting regions on the respective color film layers, and correspondingly arranged, they are regularly arranged on the black matrix. Therefore, the aperture ratio of the pixel region is not affected, and the size of the spacer has a certain adjustment margin, so that it can correspond to a higher panel pressing strength requirement.
  • Fig. 13C is a cross-sectional view showing a color filter substrate having different height spacers obtained in the case where the flat film 5 (Overcoat) is included in the color filter substrate.
  • the flattening effect of the flat layer 5 is limited, and the high step difference on the color filter substrate cannot be completely eliminated.
  • the color film substrate produced by the manufacturing method of the embodiment is particularly suitable for only requiring a lower spacer. The case where the height of the mat is poor.
  • the color film layer comprises three color film layers of different colors, which are a first color film layer 2, a second color film layer 3 and a third color film layer 4, respectively.
  • the first color film layer 2 is a red film layer
  • the second color film layer 3 is a green film layer
  • the third color film layer 4 is a blue film layer.
  • the color film layer having the above three colors is only an example of a preferred embodiment, the color film layer may also adopt other different colors, and the color film layer is not limited to having only three different colors, and may have more colors. .
  • Step 1 providing a bottom pad at a design position of the spacer on the first substrate; specifically, forming a bottom pad on the black matrix 1 at a design position corresponding to the spacer on the color film layer, the bottom pad is in the formation
  • the process of forming a colored film layer is simultaneously formed.
  • the step of simultaneously forming the bottom pad in the process of forming the color film layer specifically includes:
  • Step 11F As shown in FIG. 14A and FIG. 14B, the first color film layer 2 is formed on the black matrix 1, while at the same position on the black matrix 1 corresponding to the second color film layer 3 and the corresponding third color film layer 4, respectively. Forming a first bottom pad 81;
  • the first underlying pad 81 on the second color film layer 3 and the third color film layer 4 and the first color film layer 2 are formed by the same reticle through the same patterning process, which is a conventional color film layer
  • the reticle is slightly modified to form;
  • Step 12F As shown in FIG. 15A and FIG. 15B, a second color film layer 3 is formed on the black matrix 1, and a second bottom pad 82 is formed on the first bottom pad 81;
  • the second underpad 82 and the second color film layer 3 are formed by the same reticle through the same patterning process, and the reticle is formed by slightly modifying the existing reticle for forming the color film layer;
  • Step 13F As shown in Figs. 16A and 16B, a third color film layer 4 is formed on the black matrix 1; the process is exactly the same as that of the conventional color film layer.
  • Step 2 After the color film layer is formed on the black matrix, the spacer body is respectively formed on the color film layer corresponding to the position of the bottom pad and other design positions on the color film layer which do not correspond to the spacer of the bottom pad.
  • the steps specifically include: Step 21F: forming a spacer of the same height on the third color film layer 4 corresponding to the position of the second bottom pad 82, the position of the second color film layer 3 corresponding to the first bottom pad 81, and the first color film layer 2, respectively.
  • Body 6 The process of the spacer body 6 is identical to that of the conventional spacer having the same height.
  • the spacers finally have three different heights.
  • the first bottom pad 81 is formed in advance on the black matrix 1 corresponding to the position of the second color film layer 3 in step 12F, the first bottom is formed on the black matrix 1 corresponding to the position of the third color film layer 4, respectively.
  • the height is the same, but due to the presence of the first bottom pad 81 and the second bottom pad 82, the final height of the spacer formed on the third color film layer 4 and the spacer formed on the second color film layer 3 The final height, and the final height of the spacer formed on the first color film layer 2 are different.
  • the cross-sectional shape of the first bottom pad 81 and the second bottom pad 82 is preferably circular, and may of course be other shapes, such as an octagonal shape; the color film layer has a strip shape, and of course Use a different shape.
  • the height of the first undercushion 81 and the second underpad 82 is, for example, greater than 0 and less than or equal to 3 ⁇ m.
  • the exposure dose can be controlled by controlling the size of the light-transmitting region on the reticle, thereby enabling control of the fabricated first underpad 81 and second underpad 82.
  • the relatively high spacers and the relatively short spacers are respectively located between adjacent light-transmissive regions on the respective color film layers, and correspondingly arranged, they are regularly arranged on the black matrix, and thus are not It will affect the aperture ratio of the pixel area, and the size of the spacer has a certain adjustment margin, so that it can correspond to a higher panel pressing strength requirement.
  • Fig. 17C is a cross-sectional view showing a color filter substrate having different height spacers obtained in the case where the flat film 5 (Overcoat) is included in the color filter substrate.
  • the flattening effect of the flat layer 5 is limited, and the high step difference on the color filter substrate cannot be completely eliminated.
  • the color filter substrate produced by the production method of the present embodiment is particularly suitable for a case where a height difference of a plurality of spacers is required.
  • the color film layer comprises three color film layers of different colors, which are a first color film layer 2, a second color film layer 3 and a third color film layer 4, respectively.
  • the first color film layer 2 is a red film layer
  • the second color film layer 3 is a green film layer
  • the third color film layer 4 is a blue film layer.
  • the color film layer having the above three colors is only an example of a preferred embodiment, the color film layer may also adopt other different colors, and the color film layer is not limited to having only three different colors, and may have more colors. .
  • Step 1 providing a bottom pad at a design position of the spacer on the first substrate; specifically, forming a bottom pad on the black matrix 1 at a design position corresponding to the spacer on the color film layer, the bottom pad is in the formation
  • the process of forming a colored film layer is simultaneously formed.
  • the step of simultaneously forming the bottom pad in the process of forming the color film layer comprises: Step 11G: forming the first color film layer 2 on the black matrix 1 as shown in FIGS. 18A and 18B, while being black Forming a first bottom pad 81 at a position corresponding to the third color film layer 4 on the matrix;
  • the first underpad 81 and the first color film layer 2 are formed by the same reticle through the same patterning process, and the reticle is formed by slightly modifying the existing reticle for forming the color film layer;
  • Step 12G As shown in FIG. 19A and FIG. 19B, a second color film layer 3 is formed on the black matrix 1, and a second bottom pad 82 is formed on the first bottom pad 81;
  • the second bottom pad 82 and the second color film layer 3 are formed by the same reticle through the same patterning process, and the reticle is formed by slightly modifying the existing reticle for forming the color film layer; Step 13G As shown in FIG. 20A and FIG. 20B, a third color film layer 4 is formed on the black matrix 1; the process is exactly the same as that of the conventional color film layer.
  • Step 2 After the color film layer is formed on the black matrix, the spacer body is respectively formed on the color film layer corresponding to the position of the bottom pad and other design positions on the color film layer which do not correspond to the spacer of the bottom pad.
  • the steps include:
  • Step 21G A spacer body 6 having the same height is formed on the third color film layer 4 corresponding to the position of the second bottom pad 82 and the first color film layer 2 and the second color film layer 3, respectively.
  • the process of the spacer body 6 is identical to that of a conventional spacer having the same height.
  • the spacers ultimately have two different heights.
  • the superposed layer of the first bottom pad 81 and the second bottom pad 82 is formed in advance on the position of the third color film layer 4 on the black matrix 1, although the spacer body 6 is formed in step 21G.
  • the thickness of the photoresist coating at each position on the color film layer is substantially the same, that is, the height of the spacer body 6 is the same, but due to the superposition of the first bottom pad 81 and the second bottom pad 82
  • the presence of the layer is such that the final height of the spacer body 6 formed on the third color film layer 4 is different from the final height of the spacer body on the first color film layer 2 and the second color film layer 3.
  • the cross-sectional shape of the first bottom pad 81 and the second bottom pad 82 is preferably circular, and may of course be other shapes, such as an octagonal shape; the color film layer has a strip shape, and of course Use a different shape.
  • the height of the first undercushion 81 and the second underpad 82 is, for example, greater than 0 and less than or equal to 3 ⁇ m.
  • the exposure dose can be controlled by controlling the size of the light-transmitting region on the reticle, and the first underpad 81 or the second underpad 82 can be controlled.
  • the thickness of the spacer is such that the spacer formed at the position of the first bottom pad 81 or the second bottom pad 82 forms a height difference with the spacer formed at the position without the bottom pad, so that it can correspond to a wider width.
  • the demand for liquid crystal fill margin (Margin) since the thickness of the first bottom pad 81 / the second bottom pad 82 is controllable, the height difference formed can be adjusted as needed.
  • the relatively high spacers and the relatively short spacers are respectively located between adjacent light-transmissive regions on the respective color film layers, and correspondingly arranged, they are regularly arranged on the black matrix, and thus are not It will affect the aperture ratio of the pixel area, and the size of the spacer has a certain adjustment margin, so that it can correspond to a higher panel pressing strength requirement.
  • Fig. 21C is a cross-sectional view showing a color filter substrate having different height spacers obtained in the case where the flat film 5 (Overcoat) is included in the color filter substrate.
  • the flattening effect of the flat layer 5 is limited, and the high step difference on the color filter substrate cannot be completely smoothed.
  • the color filter substrate produced by the production method of the present embodiment is particularly suitable for use in a case where a high spacer height difference is required.
  • the manufacturing method of the present disclosure is also applicable to a color film substrate having a color film layer having three or more colors, and a color film substrate is produced by using the manufacturing method in the embodiment in the case of a color film layer having more colors. It is possible to form more spacers of different heights, that is, a height difference in which more spacers can be formed.
  • the color filter substrate which is fabricated by the fabrication methods described in Embodiments 1-7.
  • the color filter substrate includes a first substrate 7, a black matrix 1, a color film layer 2-4, and a plurality of spacer bodies 6.
  • the color film substrate further includes a bottom pad 8, and the bottom pad 8 is disposed on the color film layer 4.
  • a part of the spacer body 6 is provided on the bottom pad 8, and a part of the spacer body 6 is disposed at a position where the underlying pad is not provided on the color film layer.
  • the bottom pad 8 may be directly disposed on the black matrix 1, and the color film layer 4 is formed on the bottom pad 8.
  • the bottom pad 8 is made of the same material as the color film layer, and the height of the plurality of spacer bodies 6 can be the same.
  • the embodiment further provides a liquid crystal panel comprising a color filter substrate and an array substrate, wherein the color filter substrate uses the color filter substrate in the embodiment.
  • a method of fabricating a color filter substrate comprising the steps of: 1) providing a bottom pad at a design position of a spacer on a first substrate; 2) on the bottom pad and the The spacers are respectively disposed at other design positions of the spacers on the first substrate without the underlying pads to form spacers having different heights; or the bottom pads have two or more different heights, Spacers are respectively disposed on the bottom pads of different heights to form spacers having different heights.
  • the bottom pad is disposed at the design position of the spacer on the first substrate, specifically: forming a bottom pad at a design position of the spacer on the color film layer; Providing a spacer on the bottom pad and at other design positions of the spacer on which the bottom pad is not provided on the first substrate is specifically: a bottom pad is not provided on the bottom pad and on the color film layer.
  • the spacers are respectively formed at the other design positions of the spacers; respectively, the spacers are respectively disposed on the bottom pads of the different heights: the spacers are respectively formed on the bottom pads of the different heights.
  • the undercushion is simultaneously formed in the process of forming the color film layer.
  • the color film layer adopts a color film layer having three different colors, which are a first color film layer, a second color film layer, and a third color film layer, respectively, in step 1), in formation
  • the step of simultaneously forming the bottom pad in the process of coloring the film layer includes:
  • the steps of forming the spacers on the bottom pad and at other design positions of the spacers on the color film layer without the underlying pad include:
  • the step of simultaneously forming the bottom pad in the process of forming the color film layer comprises:
  • the steps of forming the spacers on the bottom pad and at other design positions of the spacers on the color film layer without the underlying pad include:
  • the bottom pad comprises a first bottom pad and a second bottom pad
  • the step of simultaneously forming the bottom pad in forming the color film layer comprises:
  • the steps of forming the spacers on the bottom pad and at other design positions of the spacers on the color film layer without the underlying pad include:
  • the bottom pad includes a first bottom pad and a second bottom pad, and the step of simultaneously forming the bottom pad in forming the color film layer comprises:
  • IID forming a first color film layer on the black matrix
  • 12D forming a second color film layer on the black matrix, and simultaneously forming a first bottom pad on the first color film layer
  • the steps of respectively forming the spacers on the bottom pad and at other design positions of the spacers on which the underlying pads are not provided on the color film layer include:
  • the step of disposing the bottom pad at the design position of the spacer on the first substrate is specifically: forming a bottom on the black matrix corresponding to the design position of the spacer on the color film layer Pad
  • the step of respectively providing spacers on the bottom pad and other design positions of the spacers on the first substrate without the underlying pad is specifically: forming a color film layer on the black matrix Afterwards, spacers are respectively formed on the color film layer corresponding to the position of the bottom pad and other design positions of the spacers on the color film layer that do not correspond to the bottom pad; respectively, the spacers are respectively disposed on the bottom pads of different heights
  • the pad is specifically: After the color film layer is formed, spacers are respectively formed on the color film layer corresponding to the positions of the bottom pads of different heights.
  • the undercushion is simultaneously formed in the process of forming the color film layer.
  • the color film layer adopts a color film layer having three different colors, which are a first color film layer, a second color film layer, and a third color film layer, respectively, in step 1), in formation
  • the step of simultaneously forming the bottom pad in the process of coloring the film layer includes:
  • step 2) after the color film layer is formed on the black matrix, the spacers are respectively formed on the color film layer corresponding to the position of the bottom pad and other design positions on the color film layer that do not correspond to the spacer of the bottom pad.
  • the steps include:
  • the bottom pad includes a first bottom pad and a second bottom pad.
  • the step of simultaneously forming the bottom pad in forming the color film layer comprises:
  • IIF forming a first color film layer on the black matrix, and forming a first bottom pad respectively at positions corresponding to the second color film layer and the corresponding third color film layer on the black matrix;
  • step 2) after the color film layer is formed on the black matrix, the spacers are respectively formed on the color film layer corresponding to the position of the bottom pad and other design positions on the color film layer that do not correspond to the spacer of the bottom pad.
  • the steps include:
  • the bottom pad includes a first bottom pad and a second bottom pad.
  • the step of simultaneously forming the bottom pad in forming the color film layer comprises:
  • IIG IIG
  • step 2) after the color film layer is formed on the black matrix, the spacers are respectively formed on the color film layer corresponding to the position of the bottom pad and other design positions on the color film layer that do not correspond to the spacer of the bottom pad.
  • the steps include:

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Abstract

一种彩膜基板的制作方法、彩膜基板和包括该彩膜基板的液晶面板。所述方法包括如下步骤：在基板上隔垫物的部分的设计位置处设置底垫（81，82）；以及在所述底垫（81，82）上以及在所述基板上未设底垫（81，82）的隔垫物的其他设计位置处分别设置相同高度的隔垫体（6），以形成具有不同总体高度的隔垫物。该制作方法能够使隔垫物形成多种高度差、且制作成本低。

Description

彩膜基板、 该彩膜基板的制作方法及液晶面板 技术领域
本公开涉及一种彩膜基板及该彩膜基板的制作方法、以及包含该彩膜基 板的液晶面板。 背景技术
常规的液晶面板中， 彩膜基板和阵列基板之间通常设置有多个隔垫物， 且所述多个隔垫物的高度通常都相同。 图 1为示出了常规的隔垫物（例如柱 状隔垫物）在彩膜基板上的位置的平面图和具有该彩膜基板的液晶面板的截 面视图。如图 1所示， 目前常规的液晶面板中隔垫物的高度是相等的。然而， 随着液晶显示器的进一步推广应用，为了在低温气泡和重力的不利影响下可 调整液晶填充量，以降低在批量生产过程中因液晶滴下量的误差造成的产品 不良现象， 可将隔垫物做成两种或三种不同高度。
图 2和图 3示出了具有多个高度的隔垫物的常规的液晶面板。
图 2的常规的液晶面板中具有两种不同高度的隔垫物，其由如下方法形 成。 使用半色调（Half Tone )掩模版或灰色调（ Gray Tone )掩模版， 在彩膜 基板的不同位置通过采用不同的曝光量， 从而控制隔垫物的绝对高度。 采用 这种方式来实现隔垫物的不同高度较为容易，但其使用的半色调掩模版或灰 色调掩模版的价格通常为同等尺寸的普通掩模版的两倍或者更高。而一般彩 膜基板制程中使用的掩模版的面积较阵列基板制程中使用的掩模版的面积 要大很多，这意味着制作彩膜基板所使用的普通掩模版的价格已经比制作阵 列基板所使用的普通掩模版要贵很多， 如果再利用这种方式来制作隔垫物， 则会进一步提升彩膜基板的制作成本。 另外， 由于光刻胶本身会因为曝光剂 量不同而敏感程度不同，采用此种方式形成的隔垫物也有可能会造成所形成 的不同高度的隔垫物产生形貌差异， 从而带来其他不良影响。
图 3示出了利用阵列基板自身的段差层 9来实现具有多个高度的隔垫物 的方案。 采用图 3中的方式制成的隔垫体 6的自身高度^ ^本相同的， 而隔 垫体 6与段差层 9的组合形成了相对较高的隔垫物，隔垫体 6自身形成了相 对较低的隔垫物。 因此采用这种方式制作隔垫物， 在掩模版方面没有增加额 外成本。 但由于阵列基板中各个层的厚度相对固定， 因而采用这种方式制成 的不同高度的隔垫物之间的高度差也相对固定 ,使得对应的液晶填充量的调 整范围变得较为有限。 另外， 由于采用该方式制作不同高度的隔垫物需要利 用阵列基板的段差层 9, 因而需要根据阵列基板上的段差层的位置来设置隔 垫物， 这样在设计上限制了隔垫物的设置位置。 如图 3所示， 例如与阵列基 板上的段差层 9 组合的隔垫物的相对较高的隔垫物和例如未与阵列基板上 的段差层 9 组合的隔垫物的相对较低的隔垫物均应设置在黑矩阵上的相邻 两个透光区域之间，而且隔垫物与每个透光区域之间一般要留出一定的距离 以避免因摩擦取向不良而造成的像素漏光。这样就使得黑矩阵的设计需要考 虑隔垫物的位置的影响， 像素区域的开口率也会因此而无法得到进一步提 高。 较低的像素开口率会带来较低的透过率， 而较低的透过率不利于高像素 密度 PPI ( Pixel Per Inch, , 每英寸的像素数， 用于表征显示器件的显示精细 程度）的实现。 另一方面， 通过此种方式形成的隔垫物的尺寸（指直径）一 般要小于普通隔垫物的尺寸 （即其直径小于图 1 和图 2 中所示隔垫物的直 径）。 较小的隔垫物尺寸会带来较低的隔垫物支撑面积比例， 显示面板的按 压强度较低， 也不适用于日趋广泛的触摸屏终端应用。 此外， 出于对更高显 示品质的追求， 目前较高端的显示面板产品中， 在阵列基板上也会形成平坦 层， 由此，基本平面的阵列基板的表面没有图 3所示的可以利用的段差层 9。 在这种情况下， 如果仍然使用自身高度相同的隔垫物， 则在高端显示面板中 无法实现隔垫物的多种高度。 发明内容
本公开提供一种能够使隔垫物形成多种高度差、且制作成本低的彩膜基 板及其制作方法、 以及包含该彩膜基板的液晶面板。
根据本公开， 提供了一种彩膜基板的制作方法， 该方法包括如下步骤： 在基板上在隔垫物的部分的设计位置处设置底垫； 以及在所述底垫上以及在 所述基板上未设底垫的隔垫物的其他设计位置处分别设置相同高度的隔垫 体， 以形成具有不同总体高度的隔垫物。
根据本公开的制作方法，使用普通的掩模版即可制成具有多种高度的隔 垫物， 且隔垫物具有较高的支撑比例， 同时也使隔垫物的尺寸具有一定的调 整余量， 可对应不同的面板按压强度要求。 并且， 由于不同规格的液晶面板 中所使用的多高度隔垫物的高度各不相同，而本公开彩膜基板中所制成的隔 垫物的高度恰好可以根据此种需要来进行隔垫物的制作。 另外， 根据本公开 的制作方法中所形成的多种高度的隔垫物的制作无需采用价格昂贵的半色 调 （Half Tone )掩模版或灰色调 （Gray Tone )掩模版， 并且在制作过程中， 既不需要增加额外工序， 也不需要增加额外成本， 制作成本较低。 所制成的 多种高度的隔垫物中， 高度相对较高的隔垫物和高度相对较矮的隔垫物分别 对应设于黑矩阵上的相同位置， 不会影响像素区域的开口率， 因此黑矩阵的 设计无需迁就隔垫物的位置。 附图说明
为了更清楚地说明本公开或现有技术中的技术方案，下面将对本公开提 供的技术方案或现有技术描述中所需要使用的附图作筒单地介绍，显而易见 地，下面描述中的附图仅仅是本公开的技术方案的部分具体实施方式图示说 明， 对于本领域普通技术人员来讲， 在不付出创造性劳动的前提下， 还可以 根据这些附图获得其他的附图。
图 1为包含彩膜基板的常规液晶面板中，隔垫物在彩膜基板上的位置示 意图和截面视图；
图 2为包含所述彩膜基板的常规的液晶面板中，采用半色调掩模版或灰 色调掩模版曝光得到的多高度隔垫物在彩膜基板上的位置示意图和截面视 图；
图 3为包含所述彩膜基板的常规的液晶面板中，利用阵列基板的段差层 得到的多高度隔垫物在彩膜基板上的位置示意图和截面视图；
图 4A和图 4B分别为本公开实施例 1中形成第一彩色膜层后的彩膜基 板的俯视图和截面视图；
图 5A和图 5B分别为本公开实施例 1中形成第二彩色膜层后的彩膜基 板的俯视图和截面视图；
图 6A和图 6B分别为采用本公开实施例 1中制作方法制成的隔垫物在 彩膜基板上的位置示意图和所述彩膜基板的截面视图；
图 6C为本公开实施例 1中制作方法制成的包含平坦层 5的彩膜基板的 截面视图；
图 7A和图 7B分别为本公开实施例 3中形成彩色膜层后的彩膜基板的 俯视图和截面视图； 图 8A和图 8B分别为采用本公开实施例 3中制作方法制成的隔垫物在 彩膜基板上的位置示意图和所述彩膜基板的截面视图；
图 8C为采用本公开实施例 3中制作方法制成的包含平坦层 5的彩膜基 板的截面视图；
图 9A和图 9B分别为本公开实施例 4中形成彩色膜层后的彩膜基板的 俯视图和截面视图；
图 10A和图 10B分别为采用本公开实施例 4中制作方法制成的隔垫物 在彩膜基板上的位置示意图和所述彩膜基板的截面视图；
图 10C为采用本公开实施例 4中制作方法制成的包含平坦层 5的彩膜 基板的截面视图；
图 11A和图 11B分别为本公开实施例 5中形成第一彩色膜层后的彩膜 基板的俯视图和截面视图；
图 12A和图 12B分别为本公开实施例 5中形成第三彩色膜层后的彩膜 基板的俯视图和截面视图；
图 13A和图 13B分别为采用本公开实施例 5中制作方法制成的隔垫物 在彩膜基板上的位置示意图和所述彩膜基板的截面视图；
图 13C为采用本公开实施例 5中制作方法制成的包含平坦层 5的彩膜 基板的截面视图；
图 14A和图 14B分别为本公开实施例 6中形成第一彩色膜层后的彩膜 基板的俯视图和截面视图；
图 15A和图 15B分别为本公开实施例 6中形成第二彩色膜层后的彩膜 基板的俯视图和截面视图；
图 16A和图 16B分别为本公开实施例 6中形成第三彩色膜层后的彩膜 基板的俯视图和截面视图；
图 17A和图 17B分别为采用本公开实施例 6中制作方法制成的隔垫物 在彩膜基板上的位置示意图和所述彩膜基板的截面视图；
图 17C为采用本公开实施例 6中制作方法制成的包含平坦层 5的彩膜 基板的截面视图；
图 18A和图 18B分别为本公开实施例 7中形成第一彩色膜层后的彩膜 基板的俯视图和截面视图；
图 19A和图 19B分别为本公开实施例 7中形成第二彩色膜层后的彩膜 基板的俯视图和截面视图；
图 20A和图 20B分别为本公开实施例 7中形成第三彩色膜层后的彩膜 基板的俯视图和截面视图；
图 21A和图 21B分别为采用本公开实施例 7中制作方法制成的隔垫物 在彩膜基板上的位置示意图和所述彩膜基板的截面视图；
图 21C为采用本公开实施例 7中制作方法制成的包含平坦层 5的彩膜 基板的截面视图； 以及
图 22为本公开实施例 8的彩膜基板中所述隔垫物在彩膜基板上的位置 示意图和包含所述彩膜基板的液晶面板的截面视图。
图中： 1 -黑矩阵； 2 -第一彩色膜层； 3 -第二彩色膜层； 4 -第三彩色 膜层； 5 -平坦层； 6 -隔垫体； 7 -第一基板； 8 -底垫； 81 -第一底垫； 82 -第二底垫； 9 -段差层。 具体实施方式
下面将结合本公开实施例中的附图，对本公开实施例中的技术方案进行 清楚、 完整地描述， 显然， 所描述的实施例仅仅是本公开一部分实施例， 而 不是全部的实施例。基于本公开中的实施例， 本领域普通技术人员在没有作 出创造性劳动前提下所获得的所有其他实施例， 都属于本公开保护的范围。
除非另作定义，此处使用的技术术语或者科学术语应当为本公开所属领 域内具有一般技能的人士所理解的通常意义。本公开专利申请说明书以及权 利要求书中使用的 "第一"、 "第二" 以及类似的词语并不表示任何顺序、 数 量或者重要性， 而只是用来区分不同的组成部分。 同样， "一个" 或者 "一" 等类似词语也不表示数量限制， 而是表示存在至少一个。 "连接" 或者 "相 连"等类似的词语并非限定于物理的或者机械的连接， 而是可以包括电性的 连接， 不管是直接的还是间接的。 "上"、 "下"、 "左"、 "右" 等仅用于表示 相对位置关系， 当被描述对象的绝对位置改变后， 则该相对位置关系也相应 地改变。 实施例 1 :
本实施例提供一种彩膜基板的制作方法， 该方法包括如下步骤： 步骤 1 : 在第一基板上较高隔垫物的设计位置处设置底垫； 和 步骤 2: 在所述底垫上以及所述第一基板上较低隔垫物的设计位置处分 别设置高度相同的隔垫体， 以形成具有不同高度的隔垫物。 所述底垫可具有 两种或多种不同的高度，在从而当所述不同高度的底垫上分别设置高度相同 的隔垫体时， 可形成具有不同高度的隔垫物。
在步骤 1中， 如图 4A和 4B所示， 可首先在第一基板上顺序形成黑矩 阵 1和彩色膜层， 比如第一彩色膜层 2。 然后如图 5A和 5B所示， 例如在第 一彩色膜层 2上在部分的隔垫物的设计位置形成底垫 8。 彩色膜层 2上的隔 垫物的设计位置通常是指同一彩色膜层上相邻两个透光区域之间的空隙位 置， 例如在图 5A中， 第一彩色膜层 2或第二彩色膜层 3内部的虚线所围成 的区域表示了彩色膜层上的透光区域，而底垫 8所处的隔垫物的设计位置则 位于相邻的两个透光区域之间。
本实施例中， 底垫 8可在形成彩色膜层的过程中与彩色膜层同时形成。 本实施例中，彩色膜层可采用具有三种不同颜色的彩色膜层，例如可分 别为第一彩色膜层 2、第二彩色膜层 3和第三彩色膜层 4,如图 6A-6C所示。 例如， 第一彩色膜层 2为红色膜层， 第二彩色膜层 3为绿色膜层， 第三彩色 膜层 4为蓝色膜层。
当然，彩色膜层具有上述三种颜色只是作为优选方案的示例，彩色膜层 也可以采用其他不同的颜色，并且，彩色膜层也不限于只具有三种不同颜色， 也可以具有更多种颜色。
具体地，本实施例中在形成彩色膜层的过程中同时形成所述底垫 8的步 骤如下：
步骤 11A: 如图 5A和图 5B所示， 在黑矩阵 1上形成第一彩色膜层 2, 该制程与常规的彩色膜层的制程完全相同； 和
步骤 12A: 如图 5A和图 5B所示， 在黑矩阵 1上形成第二彩色膜层 3 , 并同时在所述第一彩色膜层 2上形成底垫 8。
底垫 8与第二彩色膜层 3由同一块掩模版通过同一次构图工艺形成，该 掩模版是通过对常规的制作彩色膜层的掩模版进行稍加改进而形成。
步骤 13A: 在黑矩阵 1上形成第三彩色膜层 4, 其制程与常规的彩色膜 层的制程完全相同。
步骤 2中， 如图 6A和 6B所示， 在底垫 8上以及在彩色膜层 2-4上未 设底垫的隔垫物的其他设计位置处分别形成隔垫体 6, 以形成具有不同高度 的隔垫物。
具体地， 本实施例中， 在底垫 8上以及在彩色膜层 3、 4上未设底垫的 隔垫物的其他设计位置处分别形成隔垫体的步骤如下：
步骤 21 A:在底垫 8上以及第二彩色膜层 3和第三彩色膜层 4上分别形 成高度相同的隔垫体 6。 所述隔垫体 6的制程与常规的高度相同的隔垫物的 制程完全相同。
如图 6A和图 6B所示， 采用本实施例制作方法制成的彩膜基板中， 隔 垫物最终具有两种不同的高度。
由于在步骤 12A中， 在第一彩色膜层 2上预先形成了具有一定高度的 底垫 8, 虽然在步骤 21A形成隔垫体 6的过程中， 彩色膜层上的各个位置处 光阻涂布的厚度基本相同， 即制成的隔垫体 6的高度相同， 但由于底垫 8的 存在，使得第一彩色膜层 2上形成的隔垫物的最终高度与第二彩色膜层 3和 第三彩色膜层 4上的隔垫物的最终高度不同。
本实施例中， 底垫 8的截面形状优选为圓形， 当然也可以为其他形状， 比如可以为八边形； 彩色膜层的形状为条状， 当然也可以采用别的形状。
底垫 8的高度范围例如为大于 0并小于等于 3微米。
在制作底垫 8的过程中，通过控制掩模版上透光区域的尺寸从而可以控 制曝光剂量， 进而能够控制所制作的底垫 8的厚度， 从而使制作在底垫 8上 的隔垫体与制作在彩色膜层上的隔垫体之间形成最终高度差， 因此可以对应 更宽的液晶填充量裕量（Margin )的需求。 并且由于底垫 8的厚度可控， 因 此所形成的高度差可以根据需要进行调整。
本实施例中，由于相对较高的隔垫物和相对较矮的隔垫物均分别位于各 个彩色膜层上的相邻两个透光区域之间， 且对应设置， 并在黑矩阵上规则排 歹 ij , 因此不会影响到像素区域的开口率， 且使得隔垫物的尺寸有一定的调整 余量， 从而可对应较高的面板按压强度要求。
图 6C所示为彩膜基板中包括有平坦层 5 ( Overcoat )的情况下所得到的 具有不同高度的隔垫物的彩膜基板的截面视图。 从该图中可知， 平坦层 5的 平坦化作用有限， 可能无法完全消除彩膜基板上较高的段差。
采用本实施例中制作方法制作的彩膜基板特别适合于只需要较低的隔 垫物高度差的情况。 实施例 2:
本实施例中彩膜基板的制作方法与实施例 1的不同之处在于步骤 1。 本实施例中， 步骤 1中，在形成彩色膜层的过程中同时形成所述底垫的 步骤包括：
步骤 11B: 在黑矩阵上形成第一彩色膜层；
步骤 12B: 在黑矩阵上形成第二彩色膜层； 和
步骤 13B: 在黑矩阵上形成第三彩色膜层， 并同时在第一彩色膜层和第 二彩色膜层上形成底垫。 其中， 底垫与所述第三彩色膜层由同一块掩模版通 过构图工艺同时形成，该掩模版是对常规的制作彩色膜层的掩模版稍加改进 而形成的。
形成在第一彩色膜层上的底垫和形成在第二彩色膜层上的底垫的高度 相同。
本实施例中彩膜基板的其他制作过程都与实施例 2相同， 这里不再赘 述。
采用本实施例制作方法形成的彩膜基板中，隔垫物最终具有两种不同的 高度。
当然，也可以将第一彩色膜层上的底垫和第二彩色膜层上的底垫制作为 不同的高度，只需要通过控制掩模版上透光区域的尺寸从而可以控制曝光剂 量， 进而能够控制所制作的底垫的厚度， 这样， 由于不同颜色的彩色膜层上 的隔垫物的高度不同， 同样也能形成不同彩色膜层上隔垫物之间的高度差， 因此采用这种方式形成的彩膜基板中，隔垫物可以具有两种或三种不同的高 度差。 实施例 3:
本实施例中，所述彩色膜层采用具有三种不同颜色的彩色膜层，分别为 第一彩色膜层 2、 第二彩色膜层 3和第三彩色膜层 4。 例如， 第一彩色膜层 2为红色膜层， 第二彩色膜层 3为绿色膜层， 第三彩色膜层 4为蓝色膜层。
当然，彩色膜层具有上述三种颜色只是作为优选方案的示例，彩色膜层 也可以采用其他不同的颜色，并且，彩色膜层也不限于只具有三种不同颜色， 也可以具有更多种颜色。
本实施例彩膜基板的制作方法包括如下步骤： 步骤 1 : 在第一基板上隔垫物的设计位置处设置底垫； 具体地， 是在彩 色膜层上的隔垫物的设计位置处形成底垫，所述底垫是在形成所述彩色膜层 的过程中同时形成的。
所制作的底垫有两种， 即第一底垫 81和第二底垫 82。
步骤 1具体包括如下步骤：
步骤 11C: 在黑矩阵 1上形成第一彩色膜层 2, 其制程与常规的彩色膜 层的制程完全相同；
步骤 12C: 在黑矩阵 1上形成第二彩色膜层 3 , 并同时在所述第一彩色 膜层 2上形成第一底垫 81 ;
第一底垫 81与第二彩色膜层 3由同一块掩模版通过同一次构图工艺形 成， 该掩模版是对常规的制作彩色膜层的掩模版稍加改进而形成的； 和
步骤 13C: 如图 7A和图 7B所示， 在黑矩阵 1上形成第三彩色膜层 4, 并同时在第一底垫 81上和第二彩色膜层 3上形成第二底垫 82。
步骤 2: 在所述底垫上以及在彩色膜层上未设底垫的隔垫物的其他设计 位置处分别形成隔垫体 6。 该步骤具体包括：
步骤 21C: 在暴露的第二底垫 82上以及第三彩色膜层 4上分别形成高 度相同的隔垫体 6。 隔垫体 6的制程与常规的高度相同的隔垫物的制程完全 相同。
如图 8A和图 8B所示， 采用本实施例制作方法形成的彩膜基板中， 隔 垫物最终具有三种不同的高度。
由于在步骤 12C和步骤 13C中， 在第一彩色膜层 2上预先形成有第一 底垫 81和第二底垫 82, 在第二彩色膜层 3上预先形成有第二底垫 82, 虽然 步骤 21C中所形成的多个隔垫体 6的高度相同，但由于隔垫体 6下设置的第 一底垫 81和第二底垫 82的存在，使得第一彩色膜层 2上最终形成的隔垫物 的高度与第二彩色膜层 3以及第三彩色膜层 4上最终形成的隔垫物的高度分 别不同。
本实施例中， 第一底垫 81和第二底垫 82的截面形状均为圓形， 当然也 可以为其他形状， 比如可以为八边形； 彩色膜层的形状为条状， 当然也可以 采用别的形状。
本实施例中， 第一底垫 81和第二底垫 82的高度相同，且其高度范围均 例如为大于 0并小于等于 3微米。 在制作第一底垫 81或第二底垫 82的过程中，通过控制掩模版上透光区 域的尺寸从而可以控制曝光剂量， 进而能够控制所制作的第一底垫 81或第 二底垫 82的厚度，从而使得制作在第二底垫 82的位置上的隔垫物与制作在 第一底垫 81的位置上的隔垫物以及制作在第三彩色膜层 4上的隔垫物之间 形成高度差， 因此可以对应更宽的液晶填充量裕量（Margin )的需求。 并且 由于第一底垫 81和第二底垫 82的厚度可控， 因此所形成的高度差可以根据 需要进行调整。
本实施例中，由于相对较高的隔垫物和相对较矮的隔垫物均分别位于各 个彩色膜层上的相邻两个透光区域之间，且对应设置，在黑矩阵上规则排列， 因此不会影响到像素区域的开口率， 且使得隔垫物的尺寸有一定的调整余 量， 从而可对应较高的面板按压强度要求。
图 8C所示为彩膜基板中包括有平坦层 5 ( Overcoat )的情况下所得到的 具有不同高度的隔垫物的彩膜基板的截面视图。 从该图中可知， 平坦层 5的 平坦化作用有限， 无法完全消除彩膜基板上较高的段差。
采用本实施例中制作方法制作的彩膜基板适合于需要较高的隔垫物高 度差的情况。 实施例 4:
本实施例中，所述彩色膜层采用具有三种不同颜色的彩色膜层，分别为 第一彩色膜层 2、 第二彩色膜层 3和第三彩色膜层 4。 例如， 第一彩色膜层 2为红色膜层， 第二彩色膜层 3为绿色膜层， 第三彩色膜层 4为蓝色膜层。
当然，彩色膜层具有上述三种颜色只是作为优选方案的示例，彩色膜层 也可以采用其他不同的颜色，并且，彩色膜层也不限于只具有三种不同颜色， 也可以具有更多种颜色。
本实施例彩膜基板的制作方法包括如下步骤：
步骤 1 : 在第一基板上隔垫物的设计位置处设置底垫； 具体地， 是在彩 色膜层上的隔垫物的设计位置处形成底垫，底垫是在形成所述彩色膜层的过 程中同时形成的。 其中， 所制作的底垫有两种， 即第一底垫 81和第二底垫 82。
步骤 1具体包括如下步骤：
步骤 11D: 在黑矩阵 1上形成第一彩色膜层 2, 其制程与常规的彩色膜 层的制程完全相同；
步骤 12D: 在黑矩阵 1上形成第二彩色膜层 3 , 并同时在所述第一彩色 膜层 2上形成第一底垫 81 ;
第一底垫 81与第二彩色膜层 3由同一块掩模版通过同一次构图工艺形 成， 该掩模版是对现有的制作彩色膜层的掩模版稍加改进而形成的；
步骤 13D: 如图 9A和图 9B所示， 在黑矩阵 1上形成第三彩色膜层 4, 并同时在所述第一底垫 81上形成第二底垫 82。
步骤 2: 在所述底垫上以及在彩色膜层上未设底垫的隔垫物的其他设计 位置处分别形成隔垫体。 该步骤具体包括：
步骤 21D: 在第二底垫 82上以及第二彩色膜层 3和第三彩色膜层 4上 分别形成高度相同的隔垫体 6。 所述隔垫物 6的制程与常规的高度相同的隔 垫物的制程完全相同。
如图 10A和图 10B所示， 采用本实施例制作方法制成的彩膜基板中， 隔垫物最终具有两种不同的高度。
由于在步骤 12D和 13D中， 在第一彩色膜层 2上预先叠合形成了第一 底垫 81和第二底垫 82, 虽然在步骤 21D形成隔垫体 6的过程中， 彩色膜层 上的各个位置处光阻涂布的厚度基本相同， 即制成的隔垫体 6的高度相同， 但由于第一底垫 81和第二底垫 82的存在，使得第一彩色膜层 2上形成的隔 垫物的最终高度与第二彩色膜层 3和第三彩色膜层 4上的隔垫物的最终高度 是不同的。
本实施例中， 第一底垫 81和第二底垫 82的截面形状优选为圓形， 当然 也可以为其他形状， 比如可以为八边形； 彩色膜层的形状为条状， 当然也可 以采用别的形状。
本实施例中， 第一底垫 81和第二底垫 82的高度相同，且其高度范围例 如为大于 0并小于等于 3微米。
本实施例中，由于相对较高的隔垫物和相对较矮的隔垫物分别位于各个 彩色膜层上的相邻透光区域之间， 且对应设置， 在黑矩阵上规则排列， 因此 不会影响到像素区域的开口率， 且使得隔垫物的尺寸有一定的调整余量， 从 而可对应较高的面板按压强度要求。
图 10C所示为彩膜基板中包括有平坦层 5 ( Overcoat ) 的情况下所得到 的具有不同高度隔垫物的彩膜基板的截面视图。 由图中可知， 平坦层 5的平 坦化作用有限， 无法完全消除彩膜基板上较高的段差。
采用本实施例中制作方法制作的彩膜基板适合于需要较高的隔垫物高 度差的情况。 实施例 5:
本实施例中，所述彩色膜层采用具有三种不同颜色的彩色膜层，分别为 第一彩色膜层 2、 第二彩色膜层 3和第三彩色膜层 4。 例如， 第一彩色膜层 2为红色膜层， 第二彩色膜层 3为绿色膜层， 第三彩色膜层 4为蓝色膜层。
当然，彩色膜层具有上述三种颜色只是作为优选方案的示例，彩色膜层 也可以采用其他不同的颜色，并且，彩色膜层也不限于只具有三种不同颜色， 也可以具有更多种颜色。
本实施例彩膜基板的制作方法包括如下步骤：
步骤 1 : 在第一基板上隔垫物的设计位置处设置底垫 8;
步骤 2: 在所述底垫上以及所述第一基板上未设底垫的隔垫物的其他设 计位置处分别设置隔垫体， 以形成具有不同高度的隔垫物； 或者， 所述底垫 具有两种或多种不同的高度， 在所述不同高度的底垫上分别设置隔垫体， 以 形成具有不同高度的隔垫物。
由于本实施例彩膜基板中第一基板上的其他功能层（比如黑矩阵 )的制 作过程可以采用常规的技术， 因此这里不再详述。
在步骤 1中，在第一基板上隔垫物的设计位置处设置底垫具体是： 在黑 矩阵 1上对应彩色膜层上的隔垫物的设计位置处形成底垫 8。 所述黑矩阵上 对应彩色膜层上的隔垫物的设计位置通常是指黑矩阵上对应同一彩色膜层 上相邻两个透光区域之间的空隙位置。
本实施例中， 底垫 8是在形成所述彩色膜层的过程中同时形成的。
具体地，本实施例中在形成彩色膜层的过程中同时形成所述底垫的步骤
:¾口下：
步骤 11E:如图 11A和图 11B所示，在黑矩阵 1上形成第一彩色膜层 2, 同时在黑矩阵上对应第三彩色膜层 4的位置处形成底垫 8;
底垫 8与所述第一彩色膜层 2是由同一块掩模版通过同一次构图工艺形 成， 该掩模版通过对常规的制作彩色膜层的掩模版进行稍加改进而形成； 步骤 12E: 如图 12A和图 12B所示， 在黑矩阵 1上分别形成第二彩色 膜层 3和第三彩色膜层 4, 其制程与常规的彩色膜层的制程完全相同； 步骤 2中，在所述底垫上以及所述第一基板上未设底垫的隔垫物的其他 设计位置处分别设置隔垫体， 该步骤具体是： 待所述黑矩阵上形成彩色膜层 后，在彩色膜层上对应所述底垫的位置和在彩色膜层上未对应底垫的隔垫物 的其他设计位置处分别形成隔垫物。 其步骤如下：
步骤 21E: 如图 13A和 13B所示， 在第三彩色膜层 4上对应底垫 8的 位置以及第一彩色膜层 2和第二彩色膜层 3上分别形成高度相同的隔垫体 6。 所述隔垫体 6的制程与常规的高度相同的隔垫物的制程完全相同。
如图 13A和图 13B所示， 采用本实施例制作方法制成的彩膜基板中， 隔垫物最终具有两种不同的高度。
由于在步骤 12E中， 在黑矩阵 1上对应第三彩色膜层 4的位置预先形 成了具有一定高度的底垫 8, 虽然在步骤 21E形成隔垫体 6的过程中， 彩色 膜层上的各个位置处光阻涂布的厚度基本相同，即所制作的隔垫体 6的高度 相同， 但由于底垫 8的存在， 使得第三彩色膜层 4上形成的隔垫物的最终高 度与第一彩色膜层 2和第二彩色膜层 3上的隔垫物的最终高度是不同的。
本实施例中， 底垫 8的截面形状优选为圓形， 当然也可以为其他形状， 比如可以为八边形； 彩色膜层的形状为条状， 当然也可以采用别的形状。
底垫 8的高度范围例如为大于 0并小于等于 3微米。
在制作底垫 8的过程中，通过控制掩模版上透光区域的尺寸从而可以控 制曝光剂量， 进而能够控制所制作的底垫 8的厚度， 从而使得制作在底垫 8 的位置上的隔垫物与制作在无底垫位置上的隔垫物之间形成高度差， 因此可 以对应更宽的液晶填充量裕量（Margin )的需求。 并且由于底垫 8的厚度可 控， 因此所形成的高度差可以根据需要进行调整。
本实施例中，由于相对较高的隔垫物和相对较矮的隔垫物均分别位于各 个彩色膜层上的相邻两个透光区域之间，且对应设置，在黑矩阵上规则排列， 因此不会影响到像素区域的开口率， 且使得隔垫物的尺寸有一定的调整余 量， 从而可对应较高的面板按压强度要求。
图 13C所示为彩膜基板中包括有平坦层 5 ( Overcoat ) 的情况下所得到 的具有不同高度隔垫物的彩膜基板的截面视图。 由图中可知， 平坦层 5的平 坦化作用有限， 无法完全消除彩膜基板上较高的段差。
采用本实施例中制作方法制作的彩膜基板特别适合于只需要较低的隔 垫物高度差的情况。 实施例 6:
本实施例中，所述彩色膜层包括三种不同颜色的彩色膜层，分别为第一 彩色膜层 2、 第二彩色膜层 3和第三彩色膜层 4。 例如， 第一彩色膜层 2为 红色膜层， 第二彩色膜层 3为绿色膜层， 第三彩色膜层 4为蓝色膜层。
当然，彩色膜层具有上述三种颜色只是作为优选方案的示例，彩色膜层 也可以采用其他不同的颜色，并且，彩色膜层也不限于只具有三种不同颜色， 也可以具有更多种颜色。
本实施例彩膜基板的制作方法包括如下步骤：
步骤 1 : 在第一基板上隔垫物的设计位置处设置底垫； 具体地， 在黑矩 阵 1上对应彩色膜层上的隔垫物的设计位置处形成底垫，底垫是在形成所述 彩色膜层的过程中同时形成的。 其中， 所制作的底垫有两种， 即第一底垫
81和第二底垫 82。
步骤 1 中， 在形成彩色膜层的过程中同时形成所述底垫的步骤具体包 括：
步骤 11F:如图 14A和图 14B所示，在黑矩阵 1上形成第一彩色膜层 2, 同时在黑矩阵 1上对应第二彩色膜层 3和对应第三彩色膜层 4的位置处分别 形成第一底垫 81 ;
第二彩色膜层 3和第三彩色膜层 4上的第一底垫 81与第一彩色膜层 2 由同一块掩模版通过同一次构图工艺形成，该掩模版是对常规的制作彩色膜 层的掩模版稍加改进而形成的；
步骤 12F:如图 15A和图 15B所示，在黑矩阵 1上形成第二彩色膜层 3 , 同时在所述第一底垫 81上形成第二底垫 82;
第二底垫 82与第二彩色膜层 3由同一块掩模版通过同一次构图工艺形 成， 该掩模版是对现有的制作彩色膜层的掩模版稍加改进而形成的；
步骤 13F:如图 16A和图 16B所示，在黑矩阵 1上形成第三彩色膜层 4; 其制程与常规的彩色膜层的制程完全相同。
步骤 2: 待黑矩阵上形成彩色膜层后， 在彩色膜层上对应底垫的位置和 在彩色膜层上未对应底垫的隔垫物的其他设计位置处分别形成隔垫体。其步 骤具体包括： 步骤 21F: 在第三彩色膜层 4上对应第二底垫 82的位置、 第二彩色膜 层 3上对应第一底垫 81的位置以及第一彩色膜层 2上分别形成高度相同的 隔垫体 6。所述隔垫体 6的制程与常规的高度相同的隔垫物的制程完全相同。
如图 17A和图 17B所示， 采用本实施例制作方法制成的彩膜基板中， 隔垫物最终具有三种不同的高度。
由于在步骤 12F中，在黑矩阵 1上对应第二彩色膜层 3的位置预先形成 了第一底垫 81 , 在黑矩阵 1上对应第三彩色膜层 4的位置分别预先形成了 第一底垫 81和第二底垫 82的叠加层，虽然在步骤 21F形成隔垫体 6的过程 中， 彩色膜层上的各个位置处光阻涂布的厚度基本相同， 即所制作的隔垫体 6的高度相同， 但由于第一底垫 81和第二底垫 82的存在， 使得第三彩色膜 层 4上形成的隔垫物的最终高度与第二彩色膜层 3上形成的隔垫物的最终高 度、 以及第一彩色膜层 2上形成的隔垫物的最终高度是不同的。
本实施例中， 第一底垫 81和第二底垫 82的截面形状优选为圓形， 当然 也可以为其他形状， 比如可以为八边形； 彩色膜层的形状为条状， 当然也可 以采用别的形状。
第一底垫 81和第二底垫 82的高度范围例如为大于 0并小于等于 3微米。 在制作第一底垫 81和第二底垫 82的过程中，通过控制掩模版上透光区 域的尺寸从而可以控制曝光剂量， 进而能够控制所制作的第一底垫 81和第 二底垫 82的厚度， 从而使得制作在第一底垫 81和第二底垫 82的位置上的 隔垫物与制作没有底垫位置上的隔垫物之间形成高度差， 因此可以对应更宽 的液晶填充量裕量（Margin ) 的需求。 并且由于第一底垫 81和第二底垫 82 的厚度可控， 因此所形成的隔垫物的高度差可以根据需要进行调整。
本实施例中，由于相对较高的隔垫物和相对较矮的隔垫物分别位于各个 彩色膜层上的相邻透光区域之间， 且对应设置， 在黑矩阵上规则排列， 因此 不会影响到像素区域的开口率， 且使得隔垫物的尺寸有一定的调整余量， 从 而可对应较高的面板按压强度要求。
图 17C所示为彩膜基板中包括有平坦层 5 ( Overcoat ) 的情况下所得到 的具有不同高度隔垫物的彩膜基板的截面视图。 由图中可知， 平坦层 5的平 坦化作用有限， 无法完全消除彩膜基板上较高的段差。
采用本实施例中制作方法制作的彩膜基板特别适合于需要多种隔垫物 的高度差的情况。 实施例 7:
本实施例中，所述彩色膜层包括三种不同颜色的彩色膜层，分别为第一 彩色膜层 2、 第二彩色膜层 3和第三彩色膜层 4。 例如， 第一彩色膜层 2为 红色膜层， 第二彩色膜层 3为绿色膜层， 第三彩色膜层 4为蓝色膜层。
当然，彩色膜层具有上述三种颜色只是作为优选方案的示例，彩色膜层 也可以采用其他不同的颜色，并且，彩色膜层也不限于只具有三种不同颜色， 也可以具有更多种颜色。
本实施例彩膜基板的制作方法包括如下步骤：
步骤 1 : 在第一基板上隔垫物的设计位置处设置底垫； 具体地， 在黑矩 阵 1上对应彩色膜层上的隔垫物的设计位置处形成底垫，底垫是在形成所述 彩色膜层的过程中同时形成的。 其中， 所制作的底垫有两种， 即第一底垫
81和第二底垫 82。
步骤 1中， 在形成彩色膜层的过程中同时形成所述底垫的步骤包括： 步骤 11G:如图 18A和图 18B所示，在黑矩阵 1上形成第一彩色膜层 2, 同时在黑矩阵上对应第三彩色膜层 4的位置处形成第一底垫 81 ;
第一底垫 81与第一彩色膜层 2由同一块掩模版通过同一次构图工艺形 成， 该掩模版是对现有的制作彩色膜层的掩模版稍加改进而形成的；
步骤 12G: 如图 19A和图 19B所示， 在黑矩阵 1上形成第二彩色膜层 3 , 同时在第一底垫 81上形成第二底垫 82;
其中， 第二底垫 82与第二彩色膜层 3由同一块掩模版通过同一次构图 工艺形成， 该掩模版是对现有的制作彩色膜层的掩模版稍加改进而形成的； 步骤 13G: 如图 20A和图 20B所示， 在黑矩阵 1上形成第三彩色膜层 4; 其制程与常规的彩色膜层的制程完全相同。
步骤 2: 待黑矩阵上形成彩色膜层后， 在彩色膜层上对应底垫的位置和 在彩色膜层上未对应底垫的隔垫物的其他设计位置处分别形成隔垫体。其步 骤具体包括：
步骤 21G: 在第三彩色膜层 4上对应第二底垫 82的位置以及第一彩色 膜层 2和第二彩色膜层 3上分别形成高度相同的隔垫体 6。 所述隔垫体 6的 制程与常规的高度相同的隔垫物的制程完全相同。
如图 21A和图 21B所示， 采用本实施例制作方法制成的彩膜基板中， 隔垫物最终具有两种不同的高度。
由于在步骤 11G和步骤 12G中， 在黑矩阵 1上对应第三彩色膜层 4的 位置预先形成了第一底垫 81和第二底垫 82的叠加层，虽然在步骤 21G形成 隔垫体 6的过程中， 彩色膜层上的各个位置处光阻涂布的厚度基本相同， 即 制成的隔垫体 6的高度相同，但由于所述第一底垫 81和第二底垫 82的叠加 层的存在，使得第三彩色膜层 4上形成的隔垫体 6的最终高度与第一彩色膜 层 2和第二彩色膜层 3上的隔垫体的最终高度是不同的。
本实施例中， 第一底垫 81和第二底垫 82的截面形状优选为圓形， 当然 也可以为其他形状， 比如可以为八边形； 彩色膜层的形状为条状， 当然也可 以采用别的形状。
第一底垫 81和第二底垫 82的高度范围例如为大于 0并小于等于 3微米。 在制作第一底垫 81或第二底垫 82的过程中，通过控制掩模版上透光区 域的尺寸从而可以控制曝光剂量， 进而能够控制所制作的第一底垫 81或第 二底垫 82的厚度， 从而使得制作在第一底垫 81或第二底垫 82的位置上的 隔垫物与制作在无底垫的位置上的隔垫物之间形成高度差， 因此可以对应更 宽的液晶填充量裕量（Margin ) 的需求。 并且由于第一底垫 81/第二底垫 82 的厚度可控， 因此所形成的高度差可以根据需要进行调整。
本实施例中，由于相对较高的隔垫物和相对较矮的隔垫物分别位于各个 彩色膜层上的相邻透光区域之间， 且对应设置， 在黑矩阵上规则排列， 因此 不会影响到像素区域的开口率， 且使得隔垫物的尺寸有一定的调整余量， 从 而可对应较高的面板按压强度要求。
图 21C所示为彩膜基板中包括有平坦层 5 ( Overcoat ) 的情况下所得到 的具有不同高度隔垫物的彩膜基板的截面视图。 由图中可知， 平坦层 5的平 坦化作用有限， 无法完全抹平彩膜基板上较高的段差。
采用本实施例中制作方法制作的彩膜基板特别适合于需要较高的隔垫 物高度差的情况下使用。 另外，本公开制作方法同样适用于制作具有三种以上颜色的彩色膜层的 彩膜基板，在具有更多不同颜色的彩色膜层的情况下采用本实施例中的制作 方法制作彩膜基板， 可以形成更多不同高度的隔垫物， 即可以形成更多隔垫 物的高度差。 实施例 8:
本实施例提供一种彩膜基板，其采用实施例 1 ~ 7所述的制作方法制成。 例如， 如图 22所示， 该彩膜基板包括第一基板 7、 黑矩阵 1、 彩色膜层 2-4和多个隔垫体 6。 所述彩膜基板还包括底垫 8, 所述底垫 8设置在彩色膜 层 4上。 在所述多个隔垫体 6中， 部分隔垫体 6设置在底垫 8上， 部分隔垫 体 6设置在彩色膜层上未设底垫的位置。
或者，所述底垫 8可直接设置在所述黑矩阵 1上， 而彩色膜层 4形成于 该底垫 8上。
底垫 8采用与彩色膜层相同的材料制成， 多个隔垫体 6的高度可相同。 本实施例还提供一种液晶面板， 包括彩膜基板和阵列基板，其中所述彩 膜基板采用本实施例中的彩膜基板。
根据本公开的一个示例，提供了一种彩膜基板的制作方法， 包括如下步 骤： 1 )在第一基板上隔垫物的设计位置处设置底垫； 2 )在所述底垫上以及 所述第一基板上未设底垫的隔垫物的其他设计位置处分别设置隔垫物，以形 成具有不同高度的隔垫物； 或者， 所述底垫具有两种或多种不同的高度， 在 所述不同高度的底垫上分别设置隔垫物， 以形成具有不同高度的隔垫物。
在上述的示例中， 步骤 1 ) 中， 在第一基板上隔垫物的设计位置处设置 底垫具体是： 在彩色膜层上的隔垫物的设计位置处形成底垫； 步骤 2 ) 中， 在所述底垫上以及所述第一基板上未设底垫的隔垫物的其他设计位置处分 别设置隔垫物具体是：在所述底垫上以及在彩色膜层上未设底垫的隔垫物的 其他设计位置处分别形成隔垫物；在所述不同高度的底垫上分别设置隔垫物 具体是： 在所述不同高度的底垫上分别形成隔垫物。 在上述的示例中， 在步骤 1 ) 中， 所述底垫在形成所述彩色膜层的过程 中同时形成。
在上述的示例中，所述彩色膜层采用具有三种不同颜色的彩色膜层，分 别为第一彩色膜层、 第二彩色膜层和第三彩色膜层， 则步骤 1 ) 中， 在形成 彩色膜层的过程中同时形成所述底垫的步骤包括：
11A )在黑矩阵上形成第一彩色膜层；
12A )在黑矩阵上形成第二彩色膜层， 并同时在所述第一彩色膜层上形 成底垫；
13A)在黑矩阵上形成第三彩色膜层；
步骤 2)中， 在所述底垫上以及在彩色膜层上未设底垫的隔垫物的其他 设计位置处分别形成隔垫物的步骤包括：
21A)在所述底垫上以及第二彩色膜层和 /或第三彩色膜层上分别形成高 度相同的隔垫物；
或者，
步骤 1) 中， 在形成彩色膜层的过程中同时形成所述底垫的步骤包括：
IIB)在黑矩阵上形成第一彩色膜层；
12B)在黑矩阵上形成第二彩色膜层；
13B)在黑矩阵上形成第三彩色膜层， 并同时在第一彩色膜层和第二彩 色膜层上形成底垫；
步骤 2)中， 在所述底垫上以及在彩色膜层上未设底垫的隔垫物的其他 设计位置处分别形成隔垫物的步骤包括：
21B)在所述底垫上以及第三彩色膜层上分别形成高度相同的隔垫物； 或者，
步骤 1) 中， 所述底垫包括第一底垫和第二底垫， 在形成彩色膜层的过 程中同时形成所述底垫的步骤包括：
IIC)在黑矩阵上形成第一彩色膜层；
12C)在黑矩阵上形成第二彩色膜层， 并同时在所述第一彩色膜层上形 成第一底垫；
13C)在黑矩阵上形成第三彩色膜层， 并同时在所述第一底垫上形成第 二底垫和在所述第二彩色膜层上形成第一底垫；
步骤 2)中， 在所述底垫上以及在彩色膜层上未设底垫的隔垫物的其他 设计位置处分别形成隔垫物的步骤包括：
21C)在所述第一底垫、 第二底垫上以及第三彩色膜层上分别形成高度 相同的隔垫物；
或者，
所述底垫包括第一底垫和第二底垫，在形成彩色膜层的过程中同时形成 所述底垫的步骤包括：
IID)在黑矩阵上形成第一彩色膜层； 12D )在黑矩阵上形成第二彩色膜层， 并同时在所述第一彩色膜层上形 成第一底垫；
13D )在黑矩阵上形成第三彩色膜层， 并同时在所述第一底垫上形成第 二底垫；
在步骤 2 )中， 在所述底垫上以及在彩色膜层上未设底垫的隔垫物的其 他设计位置处分别形成隔垫物的步骤包括：
21D )在所述第二底垫上以及第三彩色膜层和 /或第二彩色膜层上分别形 成高度相同的隔垫物。
在上述的示例中， 步骤 1 ) 中， 在第一基板上隔垫物的设计位置处设置 底垫的步骤具体是：在黑矩阵上对应彩色膜层上的隔垫物的设计位置处形成 底垫；
步骤 2 )中， 在所述底垫上以及所述第一基板上未设底垫的隔垫物的其 他设计位置处分别设置隔垫物的步骤具体是：待所述黑矩阵上形成彩色膜层 后，在彩色膜层上对应所述底垫的位置和在彩色膜层上未对应底垫的隔垫物 的其他设计位置处分别形成隔垫物；在所述不同高度的底垫上分别设置隔垫 物具体是： 待所述彩色膜层形成后， 在彩色膜层上对应所述不同高度的底垫 的位置分别形成隔垫物。
在上述的示例中， 在步骤 1 ) 中， 所述底垫在形成所述彩色膜层的过程 中同时形成。
在上述的示例中，所述彩色膜层采用具有三种不同颜色的彩色膜层，分 别为第一彩色膜层、 第二彩色膜层和第三彩色膜层， 则步骤 1 ) 中， 在形成 彩色膜层的过程中同时形成所述底垫的步骤包括：
11E )在黑矩阵上形成第一彩色膜层， 同时在黑矩阵上对应第三彩色膜 层的位置处形成底垫；
12E )在黑矩阵上形成第二彩色膜层；
13E )在黑矩阵上形成第三彩色膜层；
步骤 2 ) 中， 待黑矩阵上形成彩色膜层后， 在彩色膜层上对应底垫的位 置和在彩色膜层上未对应底垫的隔垫物的其他设计位置处分别形成隔垫物 的步骤包括：
21E )在所述第三彩色膜层上对应底垫的位置以及第一彩色膜层和 /或第 二彩色膜层上分别形成高度相同的隔垫物； 或者，
所述底垫包括第一底垫和第二底垫， 步骤 1 ) 中， 在形成彩色膜层的过 程中同时形成所述底垫的步骤包括：
IIF )在黑矩阵上形成第一彩色膜层， 同时在黑矩阵上对应第二彩色膜 层和对应第三彩色膜层的位置处分别形成第一底垫；
12F )在黑矩阵上形成第二彩色膜层， 同时在第一底垫上形成第二底垫； 13F )在黑矩阵上形成第三彩色膜层；
步骤 2 ) 中， 待黑矩阵上形成彩色膜层后， 在彩色膜层上对应底垫的位 置和在彩色膜层上未对应底垫的隔垫物的其他设计位置处分别形成隔垫物 的步骤包括：
21F )在所述第三彩色膜层上对应第二底垫的位置、 所述第二彩色膜层 上对应第一底垫的位置以及第一彩色膜层上分别形成高度相同的隔垫物； 或者，
所述底垫包括第一底垫和第二底垫， 步骤 1 ) 中， 在形成彩色膜层的过 程中同时形成所述底垫的步骤包括：
IIG )在黑矩阵上形成第一彩色膜层， 同时在黑矩阵上对应第三彩色膜 层的位置处形成第一底垫；
12G )在黑矩阵上形成第二彩色膜层， 同时在所述第一底垫上形成第二 底垫；
13G )在黑矩阵上形成第三彩色膜层；
步骤 2 ) 中， 待黑矩阵上形成彩色膜层后， 在彩色膜层上对应底垫的位 置和在彩色膜层上未对应底垫的隔垫物的其他设计位置处分别形成隔垫物 的步骤包括：
21G )在所述第三彩色膜层上对应第二底垫的位置以及第一彩色膜层和 /或第二彩色膜层上分别形成高度相同的隔垫物。
以上实施方式仅用于说明本公开， 而并非对本公开的限制，有关技术领 域的普通技术人员， 在不脱离本公开的精神和范围的情况下， 还可以做出各 种变化和变型， 因此所有等同的技术方案也属于本公开的范畴， 本公开的专 利保护范围应由权利要求限定。

Claims

权利要求书
1. 一种彩膜基板的制作方法， 包括如下步骤：
在基板上在隔垫物的部分的设计位置处设置底垫； 以及
在所述底垫上以及在所述基板上未设底垫的隔垫物的其他设计位置处 分别设置相同高度的隔垫体， 以形成具有不同总体高度的隔垫物。
2. 根据权利要求 1所述的制作方法， 其特征在于， 所述底垫具有至少 一种高度。
3. 根据权利要求 1或 2所述的制作方法， 其特征在于还包括在所述基 板上形成彩色膜层。
4. 根据权利要求 3所述的制作方法， 其特征在于， 所述底垫与所述彩 色膜层采用同一掩模板同时形成于所述基板上的不同位置上。
5. 根据权利要求 4所述的制作方法， 其特征在于， 所述彩色膜层包括 具有至少三种不同颜色的彩色膜层。
6. 根据权利要求 5所述的制作方法， 其特征在于， 在所述基板的第一 位置分两次形成两个上下堆叠的底垫。
7. 根据权利要求 6所述的制作方法， 其特征在于， 在所述基板的与所 述第一位置不同的第二位置形成一个底垫。
8. 一种彩膜基板， 包括：
第一基板；
形成于所述第一基板上的黑矩阵；
形成于所述黑矩阵上的彩色膜层；
形成于所述彩色膜上的多个高度相同的隔垫体， 以及
底垫， 所述底垫的位置与部分的所述隔垫体的位置重叠。
9. 根据权利要求 8所述的彩膜基板， 其特征在于， 所述底垫具有至少 一种高度。
10. 根据权利要求 8所述的彩膜基板， 其特征在于， 所述底垫的高度范 围为大于 0并小于等于 3微米。
11. 根据权利要求 8-10的任一项所述的彩膜基板， 其特征在于还包括 平坦层， 其位于所述隔垫体下。
12. 一种液晶面板， 包括权利要求 8-11 的任一所述的彩膜基板和阵列 基板。
PCT/CN2013/082197 2013-03-19 2013-08-23 彩膜基板、该彩膜基板的制作方法及液晶面板 WO2014146399A1 (zh)

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