WO2014123058A1 - 圧力検出装置の製造方法、圧力検出装置、感圧センサ及び電子機器 - Google Patents
圧力検出装置の製造方法、圧力検出装置、感圧センサ及び電子機器 Download PDFInfo
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- WO2014123058A1 WO2014123058A1 PCT/JP2014/052078 JP2014052078W WO2014123058A1 WO 2014123058 A1 WO2014123058 A1 WO 2014123058A1 JP 2014052078 W JP2014052078 W JP 2014052078W WO 2014123058 A1 WO2014123058 A1 WO 2014123058A1
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- pressure
- fixed resistor
- circuit
- resistance value
- sensitive
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0414—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position
- G06F3/04142—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position the force sensing means being located peripherally, e.g. disposed at the corners or at the side of a touch sensing plate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/225—Measuring circuits therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/225—Measuring circuits therefor
- G01L1/2262—Measuring circuits therefor involving simple electrical bridges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0414—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position
- G06F3/04144—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position using an array of force sensing means
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/045—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using resistive elements, e.g. a single continuous surface or two parallel surfaces put in contact
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/047—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using sets of wires, e.g. crossed wires
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
Definitions
- the present invention relates to a method for manufacturing a pressure detection device including a pressure sensor whose electric resistance value continuously changes in accordance with the applied pressure, the pressure detection device, a pressure sensor that can be used for the method, and the pressure sensor. It is related with the electronic device provided with.
- a pressure detection device including a pressure sensor whose electric resistance value continuously changes in accordance with the applied pressure, the pressure detection device, a pressure sensor that can be used for the method, and the pressure sensor. It is related with the electronic device provided with.
- Japanese Patent Application No. 2013-21077 filed in Japan on February 6, 2013, and filed in Japan on August 9, 2013
- the contents described in Japanese Patent Application No. 2013-166201 are incorporated herein by reference and made a part of the description of this specification.
- JP 2011-133421 A JP-A-2005-106513
- the data obtained by measurement is calibrated by computer processing. For this reason, when the measurement amount of the pressure sensor increases, there is a problem that the response of the pressure sensor may be delayed due to exceeding the processing capability of the computer.
- Problems to be solved by the present invention include a method for manufacturing a pressure detection device, a pressure detection device, and a pressure sensitivity that can be used in the pressure detection device that can reduce measurement variation and suppress response delay when the measurement amount increases. It is to provide an electronic device including a sensor and the pressure sensitive sensor.
- a method for manufacturing a pressure detection device includes a first circuit including a pressure-sensitive body whose electrical resistance value continuously changes according to the applied pressure, and sets the electrical resistance value to a desired value.
- a first step of preparing a pressure-sensitive sensor comprising a second circuit including an adjustable fixed resistor electrically connected in series; and a predetermined pressure is applied to the pressure-sensitive body. Based on a ratio of at least the electric resistance value of the pressure-sensitive body in the first circuit and at least the electric resistance value of the fixed resistor in the second circuit. And a second step of adjusting the electrical resistance value of the fixed resistor.
- a method for manufacturing a pressure detection device includes a first circuit including a pressure-sensitive body whose electrical resistance value continuously changes according to the applied pressure, and sets the electrical resistance value to a desired value.
- a first step of preparing a pressure-sensitive sensor comprising a second circuit including an adjustable fixed resistor electrically connected in series; and a predetermined pressure is applied to the pressure-sensitive body. And, when a predetermined voltage is applied to the pressure-sensitive sensor, at least the partial pressure of the pressure-sensitive body of the first circuit, or at least the fixed resistor of the second circuit. And a second step of adjusting the electrical resistance value of the fixed resistor based on the partial pressure of the fixed resistor.
- an electric resistance value of the fixed resistor may be adjusted by adjusting a volume of the fixed resistor.
- the first step measures at least one partial pressure in at least the pressure-sensitive body of the first circuit and at least the fixed resistor of the second circuit. Or measuring an electrical resistance value of at least the pressure sensitive body of the first circuit and at least the fixed resistor of the second circuit.
- the first circuit may include a first resistor electrically connected in parallel with the pressure sensitive body.
- the second circuit may include a second resistor electrically connected in parallel with the fixed resistor.
- the pressure-sensitive body includes a first substrate on which a first electrode is provided, and a second substrate having a second electrode provided so as to face the first electrode. And a spacer interposed between the first substrate and the second substrate, and a pressure sensitive material provided to cover at least one surface of the first electrode or the second electrode And may be provided.
- a first circuit including a pressure-sensitive body whose electric resistance value continuously changes according to the applied pressure, and a second circuit including a fixed resistor are provided.
- a pressure sensor configured to be electrically connected in series; voltage applying means for applying a predetermined voltage to the pressure sensor; at least the pressure sensitive body of the first circuit; and the second circuit.
- the fixed resistors or an electric resistance value of at least the fixed resistor of at least the pressure-sensitive body and the second circuit of the first circuit.
- Measuring means, and the electrical resistance value of the fixed resistor is at least the pressure sensitive body of the first circuit when a predetermined pressure is applied to the pressure sensitive body.
- Electrical resistance value of the second circuit Characterized in that the electrical resistance value of Kutomo the fixed resistor is adjustable for adjusting the ratio of.
- the electric resistance value of the fixed resistor may be adjustable by partially removing the fixed resistor.
- a pressure-sensitive sensor includes a pressure-sensitive body whose electric resistance value changes continuously according to the applied pressure, and a fixed resistor that can be partially removed. Includes a first substrate having a first electrode, a first connection pattern extending from the first electrode, and a second electrode provided to face the first electrode; A second substrate having a second connection pattern extending from the second electrode, a spacer interposed between the first substrate and the second substrate, and the first substrate And a pressure-sensitive material provided to cover at least one surface of the second electrode or the second electrode, and the first substrate is branched from the first connection pattern A first connection piece electrically connected to one end of the fixed resistor, and an electrical connection to the other end of the fixed resistor A second connection piece connected to the second connection piece; and a third connection pattern provided on the second connection piece, wherein the fixed resistor includes the first connection piece and the second connection piece. It is characterized by being interposed between the pieces.
- the first substrate and the second substrate are the same substrate bent at a bent portion, and the first substrate is connected to the second connection via the bent portion. You may have further the 4th connection pattern electrically connected to the pattern.
- An electronic device includes a panel unit, And a plurality of pressure-sensitive sensors that are deformed in response to pressing through the panel unit, wherein the plurality of pressure-sensitive sensors continuously change in electrical resistance value according to the applied pressure.
- a first circuit including at least a pressure sensitive body, and a second circuit including at least a fixed resistor and connected in series with the first circuit, each having a resistance ratio of the plurality of pressure sensitive sensors.
- the resistance ratio is an electrical resistance value of at least the pressure sensitive body of the first circuit when a predetermined pressure is applied to the pressure sensitive body, and the pressure sensitive It is a ratio of at least the electric resistance value of the fixed resistor in the second circuit when the predetermined pressure is applied to the body.
- the volume of the fixed resistor electrically connected in series with the pressure sensitive body is at least the pressure sensitive of the first circuit when the predetermined pressure is applied to the pressure sensitive body.
- the partial pressure of the fixed resistor or the pressure sensitive body is divided.
- the pressure can be optimized. For this reason, it is not necessary to calibrate the measurement error at the time of pressure detection by computer processing, and it is possible to reduce the measurement variation between the products of the pressure detection device or between the pressure sensors provided in the electronic equipment, and to reduce the response delay at the time of measurement. Can be suppressed.
- FIG. 1 is an overall conceptual diagram showing a pressure detection device according to a first embodiment of the present invention.
- 2 (A) and 2 (B) are views showing the pressure-sensitive sensor in this embodiment, FIG. 2 (A) is an exploded perspective view, and FIG. 2 (B) is a plan view.
- FIG. 3 is a cross-sectional view taken along line III-III in FIG.
- FIG. 4 is an enlarged view of a portion IV in FIG.
- FIG. 5 is a process diagram showing a manufacturing method of the pressure detection device according to the first embodiment of the present invention.
- 6 (A) and 6 (B) are graphs showing the relationship between the load applied in the pressure detection device according to the first embodiment of the present invention and the partial pressure of the fixed resistor, and FIG. 6 (A) is a fixed diagram.
- FIG. 6B is a graph before adjusting the volume of the resistor, and FIG. 6B is a graph after adjusting the volume of the fixed resistor.
- FIG. 7 is an electric circuit diagram showing the pressure detection device in the first embodiment of the present invention.
- FIG. 8 is an overall conceptual diagram showing a pressure detection device according to the second embodiment of the present invention.
- FIG. 9 is an electric circuit diagram showing a pressure detection device according to the third embodiment of the present invention.
- FIG. 10 is an electric circuit diagram showing a pressure detection device in the fourth embodiment of the present invention.
- FIG. 13 is an exploded perspective view of the touch panel according to the fifth embodiment of the present invention.
- FIG. 14 is a cross-sectional view showing a pressure-sensitive sensor and an elastic member in the fifth embodiment of the present invention.
- FIG. 15 is a plan view of a display device according to the fifth embodiment of the present invention.
- FIG. 16 is an electric circuit diagram showing a pressure detection device according to another embodiment of the present invention.
- FIG. 1 is an overall conceptual diagram showing a pressure detection device 1 in this embodiment
- FIG. 2 (A) and FIG. 2 (B) are an exploded perspective view and a plan view showing a pressure-sensitive sensor 2
- FIG. 2B is a cross-sectional view taken along line III-III in FIG. 2B
- FIG. 4 is an enlarged view of a portion IV in FIG.
- the pressure detection device 1 includes a pressure sensor 2, a voltage application device 31 that applies a predetermined voltage to the pressure sensor 2, and a fixed resistor included in the pressure sensor 2. And a voltmeter 32 for measuring a partial pressure V P1 of 5.
- the pressure-sensitive sensor 2 and the voltage application device 31 are electrically connected in series by first to fourth wiring patterns 601 to 603 and first to fourth wirings 641 to 644 composed of cables and the like. It is connected to the.
- the pressure-sensitive sensor 2 includes a first circuit 91 that includes a pressure-sensitive body 4 that is a portion that detects a pressure force, and a first resistor that includes a fixed resistor 5 that adjusts the partial pressure applied to the pressure-sensitive body 4.
- the second circuit 92 is electrically connected in series.
- the pressure sensitive body 4 includes a first substrate 41 and a second substrate 44 provided substantially in parallel to the first substrate 41.
- a first electrode 42 and a first pressure-sensitive material 43 are provided on the upper surface of the first substrate 41 in FIG. 2A, and on the lower surface of the second substrate 44 in FIG.
- a second electrode 45 and a second pressure sensitive material 46 are provided.
- a spacer 47 is provided between the first and second substrates 41 and 44.
- the first substrate 41 and the second substrate 44 have a substantially equal rectangular shape and are formed of a flexible insulating film.
- the material constituting such an insulating film include polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyimide resin (PI), and polyetherimide resin (PEI).
- PET polyethylene terephthalate
- PEN polyethylene naphthalate
- PI polyimide resin
- PEI polyetherimide resin
- the first electrode 42 is formed by printing and curing a conductive paste such as a silver paste, a gold paste, or a copper paste on the first substrate 41.
- the second electrode 45 is also formed by printing and curing a conductive paste such as a silver paste, a gold paste, or a copper paste on the second substrate 44.
- the first electrode 42 may be made of a high resistance conductive material such as carbon.
- the second electrode 45 may also be made of a high resistance conductive material such as carbon.
- the first and second electrodes 42 and 45 have a circular shape, but the shape of the first and second electrodes 42 and 45 is not particularly limited.
- the first electrode 42 is electrically connected to the first wiring pattern 601 as shown in FIG.
- the first wiring pattern 601 is formed by printing and curing a conductive paste such as a silver paste, a gold paste, or a copper paste on the first substrate 41.
- a third wiring pattern 603 described later is also formed by printing a conductive paste such as a silver paste, a gold paste, or a copper paste on the first substrate 41 and curing it.
- the second electrode 45 is electrically connected to the second wiring pattern 602.
- the second wiring pattern 602 is formed by printing and curing a conductive paste such as a silver paste, a gold paste, or a copper paste on the second substrate 42.
- the first pressure-sensitive material 43 and the second pressure-sensitive material 46 are made of a high-resistance conductive material such as carbon, for example. Specifically, it is formed by printing and curing a carbon paste so as to cover the first and second electrodes 42 and 45.
- first electrode 42 is made of a high-resistance conductive material such as carbon
- first electrode 42 and the first pressure-sensitive material 43 may be integrally formed.
- second electrode 45 is made of a high-resistance conductive material such as carbon
- the second electrode 45 and the second pressure-sensitive material 46 may be integrally formed.
- the pressure-sensitive materials 43 and 46 are made of a material whose electrical resistance value changes according to a load (pressing force) applied to the pressure-sensitive materials 43 and 46. May be.
- a load pressing force
- examples of such a material include conductive rubber formed by blending carbon powder, metal powder such as silver, copper, germanium and the like into a rubber composition.
- the pressure sensitive materials 43 and 46 may be configured using a material containing semiconductor particles such as molybdenum disulfide particles.
- the pressure-sensitive materials 43 and 46 materials in which a tunnel current flows in accordance with pressure applied from the outside may be used.
- An example of such a material is a quantum tunneling composite material (Quantum Tunneling Composite) available from PERATECH LTD under the trade name “QTC”.
- beads are preferably organic elastic fillers or inorganic oxide fillers.
- the organic elastic filler polymers such as silicone, acrylic, styrene, and urethane, nylon 6, nylon 11, nylon 12, and the like can be used.
- the beads are preferably added in a volume ratio of 10 to 30% with respect to the pressure sensitive materials 43 and 46. In this case, the detection accuracy of the pressure detection device 1 is further improved.
- the first pressure-sensitive material 43 is formed so as to cover the upper surface of the first electrode 42 in the drawing.
- the second pressure-sensitive material 46 is formed so as to cover the lower surface of the second electrode 45 in the drawing. Only one of the first pressure-sensitive material 43 or the second pressure-sensitive material 46 may be provided.
- the conductive rubber, semiconductor material, or quantum tunneling composite material described above is used as the first and second pressure sensitive materials 43 and 46, the pressure sensitive materials 43 and 46 are integrated as a single member. You may form in.
- first and second electrodes and the first and second pressure sensitive materials are not particularly limited.
- one or both of the first and second electrodes may have a ring shape.
- One or both of the first and second pressure sensitive materials may be ring-shaped.
- the configuration of the pressure sensitive body is not particularly limited to the above.
- one of the first electrode and the second electrode is divided into two electrodes that are independent from each other, one of the divided electrodes is connected to the first wiring pattern, and the other is connected to the second electrode. You may connect to a wiring pattern.
- each of the two divided electrodes may be provided with a comb-tooth shape, and the two electrodes may be arranged so that the comb-tooth portions are spaced apart from each other.
- the spacer 47 in the present embodiment is a member that keeps the distance between the first and second substrates 41 and 44 constant by being interposed between the first substrate 41 and the second substrate 44. It is. As shown in FIGS. 2 (A) and 2 (B), the spacer 47 has a rectangular outer shape substantially equal to the first and second substrates 41 and 44, and includes polyethylene terephthalate (PET), It is formed from an insulating material such as polyethylene naphthalate (PEN), polyimide resin (PI), or polyetherimide resin (PEI).
- PET polyethylene terephthalate
- PEN polyethylene naphthalate
- PI polyimide resin
- PEI polyetherimide resin
- an opening 471 having an outer diameter slightly larger than the first and second pressure-sensitive materials 43 and 46 is provided at the approximate center of the spacer 47.
- the thickness of the spacer 47 is the thickness of the first and second electrodes 42 and 45 and the thickness of the pressure-sensitive materials 43 and 46 formed between the electrodes 42 and 45. And the total thickness is substantially equal.
- the electrodes 42 and 45 and the pressure sensitive materials 43 and 46 are accommodated in the opening 471 of the spacer 47, and the pressure sensitive materials 43 and 46 are held in a state of approaching or contacting each other.
- the pressure-sensitive materials 43 and 46 contact in an unloaded state, there is no play until the electrodes are made conductive by the applied pressure, and the detection accuracy of the pressure-sensitive sensor 2 can be improved. .
- the configuration of the pressure-sensitive body 4 may be reversed upside down. That is, in FIG. 2A, the first substrate 41, the first electrode 42 provided on the first substrate 41, and the first pressure-sensitive material 43 are arranged on the upper side in the drawing, and the second substrate. 44 and the second electrode 45 and the second pressure-sensitive material 46 provided on the second substrate 44 may be arranged on the lower side in the drawing.
- the fixed resistor 5 will be described.
- the embodiment will be described as a mode in which the electrical resistance value is adjusted by trimming.
- the fixed resistor 5 can be finely adjusted as long as the electrical resistance value can be finely adjusted. Good.
- the present invention includes a case where the fixed resistor 5 is a variable resistor (volume).
- the fixed resistor 5 in the present embodiment has a rectangular shape, and is interposed between first and second connection pieces 61 and 62 described later.
- the fixed resistor 5 is composed of a member having an electrical resistance value relatively higher than that of the first and second connection pieces 61 and 62.
- An example of such a member is carbon.
- the fixed resistor 5 in this embodiment is formed by printing a carbon paste on the convex portion 411 of the first substrate 41 and curing it.
- Specific printing methods for forming the fixed resistor 5 include screen printing, gravure offset printing, ink jet printing, and the like.
- a first connection piece 61 extending along the first side portion 51 is provided on the first side portion 51 side of the fixed resistor 5.
- a second connection piece 62 extending along the second side portion 52 is provided on the second side portion 52 side of the fixed resistor 5.
- the 1st side part 51 in this embodiment is equivalent to an example of the one end of the fixed resistor in this invention
- the 2nd side part 52 in this embodiment is an example of the other end of the fixed resistor in this invention. It corresponds to.
- the first connection piece 61 is a wiring formed by printing and curing a conductive paste such as silver paste, gold paste, or copper paste on the first substrate 41, and the first wiring described above.
- the pattern 601 is branched from the pattern 601.
- the first connection piece 61 is electrically connected to the fixed resistor 5 at the first side portion 51.
- the second connection piece 62 is also a wiring formed by printing and curing a conductive paste such as a silver paste, a gold paste, or a copper paste on the first substrate 41, as shown in FIG.
- the third wiring pattern 603 is electrically connected.
- the second connection piece 62 is electrically connected to the fixed resistor 5 at the second side portion 52.
- the shape of the 1st and 2nd connection pieces 61 and 62 is not specifically limited.
- Specific examples of the printing method for forming the first and second connection pieces 61 and 62 include a screen printing method, a gravure offset printing method, and an ink jet printing method.
- the first and second connection pieces 61 and 62, the first electrode 42, and the wiring patterns 601 and 603 are formed on the first substrate 41 by printing at the same time. These may be formed by printing and curing each separately.
- the second electrode 45 and the wiring pattern 602 are also formed by printing on the second substrate 42 at the same time, but they may be formed by separately printing and curing them.
- the first wiring pattern 601 is connected to one terminal of the voltmeter 32 through the first wiring 641 as shown in FIG.
- the second wiring pattern 602 is connected to one terminal of the voltage application device 31 through the second wiring 642.
- the third wiring pattern 603 is connected to the other terminal of the voltage application device 31 through the third wiring 643 and is connected to the other terminal of the voltmeter 32 through the fourth wiring 644. Has been.
- the first connection piece 61 is electrically connected to the voltmeter 32 and the first electrode 42 of the pressure sensitive body 4. Further, the second connection piece 62 is electrically connected to the voltmeter 32 and the voltage application device 31.
- first wiring pattern 601 and the first wiring 641 in the present embodiment correspond to an example of the first connection portion in the present invention
- the second wiring pattern 602 and the second wiring 642 in the present embodiment are the same.
- the third wiring pattern 603, the third wiring 643, and the fourth wiring 644 in the present embodiment correspond to an example of the second connection portion in the present invention. .
- the voltage application device 31 is constituted by a DC power source or the like, and applies a voltage VA to the electric circuit of the pressure detection device 1.
- the voltage application device 31 in this embodiment corresponds to an example of the voltage application unit of the present invention.
- a voltmeter 32 that measures a partial pressure VP ⁇ b> 1 applied to the fixed resistor 5 as a voltage is applied by the voltage application device 31 is provided.
- the voltmeter 32 in the present embodiment corresponds to an example of a partial pressure measuring unit of the present invention.
- FIG. 5 is a process diagram showing a method for manufacturing the pressure detection device 1 in the present embodiment.
- step S10 of FIG. 5 the pressure sensitive sensor 2 having the above-described configuration is prepared.
- a predetermined known pressure is applied along the arrow direction in FIG.
- the divided voltage V P1 (equal to the divided voltage of the second circuit 92 in this embodiment) applied to the fixed resistor 5 is measured by the voltmeter 32.
- step S20 the fixed resistor 5 is trimmed along the direction of the arrow in FIG. 4 so that the measured value indicated by the pressure detection device 1 becomes the known pressure value.
- FIG. 6A and 6B show the relationship between the load (pressurizing force) applied to the pressure detection device 1 and the partial pressure V P1 of the fixed resistor 5 for each sample of the pressure detection device 1.
- FIG. 6A is a graph before trimming the fixed resistor 5
- FIG. 6B is a graph after trimming the fixed resistor 5.
- FIG. 7 is an electric circuit diagram of the pressure detection device 1.
- the thickness of the pressure sensitive material 43 and 46 between the samples is different, the electrical resistance value R 2 of the pressure sensitive element 4 is different for each sample
- the electric resistance value R 1 of the fixed resistor 5 is different for each sample. That is, the electric resistance value R 2 of the pressure sensitive element 4, the electric resistance value R 1 of the fixed resistance 5, the ratio of (R 2: R 1) is different between the samples with each other.
- the above ratio (R 2 : R 1 ) is determined from the Ohm's law.
- the partial pressure VP1 of the fixed resistor 5 varies between the samples 1-5.
- the voltage VA applied by the voltage application device 31 is 5 volts.
- the partial pressure V P1 of the fixed resistor 5 when a load of 9 N is applied to each of the pressure sensitive bodies 4 of the samples 2 to 5 is 4 volts (the electric resistance value of the pressure sensitive body 4).
- trimming of the fixed resistor 5 is performed as follows. Do.
- the fixed resistor 5 is gradually trimmed in a state where a load of 9 N is applied to the pressure sensitive body 4.
- the electrical resistance of the object since the cross-sectional area of the object is increased in inverse proportion to the cross-sectional area as smaller, with electrical resistance value R 1 of the fixed resistor 5 with the relevant trimming increases , also increases the partial pressure V P1 of the fixed resistor 5 from Ohm's law.
- the voltage V A applied to the pressure sensor 2 is a constant value (5 volts)
- the voltage V P2 applied to the pressure sensor 4 is (5-V P1 ) volts.
- the ratio V P2 : V P1 becomes the above ratio 1: 4.
- the electric resistance value R 2 of the pressure sensitive element 4 the electric resistance value R 1 of the fixed resistance 5, the ratio (R 2: R 1) is also 1: 4.
- the method for trimming the fixed resistor 5 is not particularly limited. For example, trimming may be performed by cutting, laser processing, or the like, or trimming may be performed by bending and cutting the fixed resistor 5 at a weakened portion provided in advance in the fixed resistor 5. Further, when the fixed resistor 5 is trimmed, the first and second connection pieces 61 and 62 may be trimmed simultaneously, or only the fixed resistor 5 may be trimmed. Further, the convex portion 411 of the first substrate 41 may be trimmed at the same time.
- the fixed resistor 5 is trimmed for each sample so that the ratio becomes a predetermined ratio (ratio 1: 4 of the sample 1 in this example). To do.
- the volume to which the fixed resistor 5 should be trimmed may be calculated in advance for each of the samples 2 to 5, and the fixed resistor 5 may be trimmed at a time based on the result of the calculation. That is, for example, when the sample 3 in FIG. 6A is trimmed, since the partial voltage V P1 of the fixed resistor 5 is 3.5 volts, the voltage V P2 of the pressure sensitive body 4 and the fixed resistor The ratio of 5 to the partial pressure V P1 is 1.5: 3.5. In this case, the electric resistance value R 2 of the pressure sensitive element 4, the electric resistance value R 1 of the fixed resistance 5, the ratio of (R 2: R 1) is also 1.5: 3.5 and is in Yes.
- the electrical resistance value R 1 of the fixed resistor 5 is 6 /3.5 times is sufficient. That is, as the cross-sectional area of the object decreases, the electrical resistance value of the object increases in inverse proportion to the cross-sectional area. Therefore, the length W of the fixed resistor 5 shown in FIG. What is necessary is just to trim the said fixed resistor 5 in the place where it becomes double.
- a voltmeter for measuring the partial pressure V P2 of the pressure sensitive body 4 may be provided instead of the voltmeter 32 for measuring the partial pressure V P1 of the fixed resistor 5.
- the divided voltage V P2 of the pressure sensitive body 4 and the divided voltage V of the fixed resistor 5 are used.
- this ratio (V P2 : V P1 ) is a ratio (R 2 : R 1 ) between the electrical resistance value R 2 of the pressure sensitive body and the electrical resistance value R 1 of the fixed resistor 5 from Ohm's law.
- the fixed resistor 5 is trimmed by the same method as above based on the ratio (R 2 : R 1 ). Note that in this case, the partial pressure V P2 of pressure sensitive element 4 decreases as the trimming of the fixed resistor 5. Therefore, so that the partial pressure V P2 of the pressure sensitive element 4 is finished trimming of the fixed resistor 5 was lowered to a predetermined value.
- the electrical resistance value R 1 of the fixed low-resistance body 5 (equal to the combined resistance value of the second circuit 92 in the present embodiment) and the electrical resistance value R 2 of the pressure-sensitive body 4 (the first resistance in the present embodiment). equal to the combined resistance of the first circuit 91.) was measured in advance, respectively, in step S10, and the electric resistance value R 2 of the pressure sensitive element 4 from the measurement results, the electrical resistance R 1 of the fixed resistance 5
- the ratio (R 2 : R 1 ) may be determined.
- the electric resistance value R 2 of the pressure sensitive body 4 is made constant, and the ratio (R 2 : R 1 ) is a predetermined ratio (in the above example, the ratio 1: 4 in the sample 1).
- the fixed resistor 5 to adjust the electrical resistance R 1 may be trimmed so.
- a method of measuring the electrical resistance value R 2 of the electric resistance value R 1 and the pressure sensitive element 4 of the fixed resistor 5 can be exemplified a two-terminal method and the four-terminal method or the like.
- the partial pressure V P1 (voltmeter of the fixed resistor 5 when the applied pressure is applied to the pressure sensitive body 4 is measured.
- the magnitude of the applied pressure is obtained based on the voltage indicated by 32.
- the voltmeter 32 instead of the case of providing a voltage meter for measuring the partial pressure V P2 of the pressure sensitive element 4, obtains the magnitude of the pressure based on the partial pressure V P2 of the pressure sensitive element 4 .
- step S10 in the present embodiment corresponds to an example of the first process in the present invention
- step S20 in the present embodiment corresponds to an example of the second process in the present invention.
- the pressure-sensitive body 4 included in the pressure detection device 1 includes the two substrates 41 and 44, the electrodes 42 and 45 provided between the substrates 41 and 44, and the pressure-sensitive material. 43, 46.
- a pressure-sensitive sensor mainly having such a configuration changes the magnitude of the electrical resistance value of the pressure-sensitive material according to the pressure applied to the pressure-sensitive material, and is applied to the pressure-sensitive material accordingly. Utilizing the fact that the partial pressure also changes, the applied pressure is detected from the relationship between the partial pressure and the applied pressure in the pressure-sensitive sensor (voltage-load characteristic).
- This voltage-load characteristic varies depending on the roughness of the contact surface between pressure sensitive materials. For this reason, after forming a pressure sensitive material on an electrode, the partial pressure applied to a pressure sensor cannot be adjusted for every pressure detection apparatus by directly adjusting the thickness of these pressure sensitive materials. In other words, the variation in the partial pressure of the pressure-sensitive sensor resulting from the variation in the thickness of the pressure-sensitive material between the products of the pressure detection device, and hence the variation in the electrical resistance value, are reduced by directly adjusting the thickness of the pressure-sensitive material It is not possible.
- the pressure sensor 2 of the pressure detection device 1 has a fixed resistor 5 electrically connected in series with the pressure sensor 4 as shown in FIG.
- the pressure (load) applied to the pressure sensitive body 4 is detected from the partial pressure VP 1 applied to the fixed resistor 5.
- the following equation (1) is established from Ohm's law.
- R 1 / R 2 V P1 / (V A ⁇ V P1 ) (1)
- the fixed resistor By optimizing only the electric resistance value R 1 of 5, the partial voltage V P1 of the fixed resistor 5, and consequently the electric resistance value R 2 of the pressure sensitive body 4, and the electric resistance value R of the fixed resistor 5 1 and the ratio of (R 2: R 1) may be a value obtained by unified across products.
- a constant pressure is the partial pressure V P1 of the fixed resistor 5 in the case of being applied to the pressure sensitive element 4, if you want a value X which is unified for each product of the pressure detection device 1, the equation (1) From the relationship, the electrical resistance of the fixed resistor 5 is such that the ratio of the electrical resistance value R 1 of the fixed resistor 5 and the electrical resistance value R 2 of the pressure sensitive body is X: (V A ⁇ X). the resistance R 1 may be adjusted. That is, the fixed resistor 5 may be trimmed so that the electric resistance value R 1 of the fixed resistor 5 is X ⁇ R 2 / (V A ⁇ X).
- the partial pressure VP1 of the fixed resistor 5 is changed between products without directly adjusting the thickness of the pressure-sensitive materials 43 and 46 of the pressure-sensitive body 4 (electrical resistance value R 2 of the pressure-sensitive body 4).
- a unified value X can be used.
- the electrical resistance value R 2 of the pressure sensitive element 4, the electric resistance value R 1 of the fixed resistance 5, the ratio of (R 2: R 1) may be a value obtained by unified across products. For this reason, measurement variations between products of the pressure detection device 1 can be reduced without changing the voltage-load characteristic of the pressure-sensitive body 4.
- the pressure detection device 1 can calibrate measurement variations between products of the pressure detection device 1 without performing computer processing. For this reason, even when the measurement amount of the pressure detection device 1 increases, it is possible to suppress a response delay from occurring in the pressure detection device 1 due to the increase in the measurement amount.
- a pressure detection device provided with a voltmeter for measuring the partial pressure V P2 of the pressure sensitive body 4 instead of the voltmeter 32 for measuring the partial pressure V P1 of the fixed resistor 5 is similar to the above.
- An effect can be obtained. That is, by optimizing only the electric resistance value R 1 of the fixed resistor 5 by trimming, the partial pressure V P2 of the pressure-sensitive body 4, and consequently the electric resistance value R 2 of the pressure-sensitive body 4, and the fixed resistor
- the ratio (R 2 : R 1 ) of the electrical resistance value R 1 of 5 can be a unified value among products. As a result, it is possible to reduce the measurement variation between the products of the pressure detection device without changing the voltage-load characteristic of the pressure sensitive body 4, and to reduce the response delay when the measurement amount of the pressure detection device increases. Occurrence can be suppressed.
- FIG. 8 is an overall conceptual diagram showing a pressure detection device 1B according to the second embodiment of the present invention.
- the pressure detection device 1B according to the second embodiment is the same as the first embodiment described above except that the configuration of the pressure sensitive sensor 2B and the internal wiring of the pressure detection device 1B are different, and thus differs from the first embodiment. Only the portions will be described, and portions that are the same as those of the first embodiment are denoted by the same reference numerals as those of the first embodiment, and description thereof will be omitted.
- the pressure detection device 1B in the present embodiment includes a pressure sensor 2B.
- the pressure sensor 2B includes a first circuit 91 including a pressure sensor 4B, and a fixed resistor. And a second circuit 92 including 5 are electrically connected in series.
- the pressure sensitive body 4B is provided so as to cover the first and second electrodes 42, 45, the first pressure sensitive material 43 provided so as to cover the first electrode 42, and the second electrode 45.
- a second pressure sensitive material 46 all of which are provided on the same substrate 48.
- the fixed resistor 5 is also provided on the substrate 48.
- the substrate 48 is made of a flexible insulating film such as polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyimide resin (PI), or polyetherimide resin (PEI).
- PET polyethylene terephthalate
- PEN polyethylene naphthalate
- PI polyimide resin
- PEI polyetherimide resin
- first to third wiring patterns 601 to 603 led out toward the right side in the drawing and a second wiring 602 through a bent portion 481 of the substrate 48.
- a fourth wiring 604 that is electrically connected is provided.
- the first wiring pattern 601, the third and fourth wiring patterns 603 and 604 can be connected to the connector 21.
- the first and second electrodes 42 and 45, the first and second pressure sensitive materials 43 and 46, and the first to fourth wiring patterns 601 to 604 are: All are provided on the same substrate 48. Then, the substrate 48 is bent at a bent portion 481 provided between the first electrode 42 and the second electrode 45 in the substrate 48, whereby the first and second electrodes are interposed via the pressure sensitive materials 43 and 46.
- the electrodes 42 and 45 can be opposed to each other.
- the pressure-sensitive body 4B in this embodiment is configured by interposing a spacer (not shown) between the substrates 48 bent by the bent portion 481.
- the pressure detection device 1B in the present embodiment includes a voltage application device 31, a voltmeter 32, and first to fourth wirings 641 to 644 formed from cables or the like. ing.
- the voltmeter 32 is electrically connected to the first wiring 641 and the fourth wiring 644, and can measure the voltage applied between these wirings 641 and 644.
- the voltage application device 31 is electrically connected to the second wiring 642 and the third wiring 643.
- first to fourth wirings 641 to 644 are led out from the connector 21 toward the left side in the drawing as shown in FIG.
- the first wiring 641 is electrically connected to the first wiring pattern 601 via the connector 21
- the second wiring 642 is electrically connected to the fourth wiring pattern 604 via the connector 21.
- the third wiring 643 and the fourth wiring 644 are electrically connected to the third wiring pattern 603 through the connector 21.
- first wiring pattern 601 in the present embodiment corresponds to an example of the first connection pattern in the present invention
- second wiring pattern 602 in the present embodiment corresponds to an example of the second connection pattern in the present invention
- third wiring pattern 603 in the present embodiment corresponds to an example of the third connection pattern in the present invention
- fourth wiring pattern 604 in the present embodiment corresponds to an example of the fourth connection pattern in the present invention. To do.
- the electric circuit diagram of the pressure detection device 1B in the present embodiment also has the same configuration as that of FIG. 7 described in the first embodiment. Therefore, also in this embodiment, to trim the fixed resistor 5, the electric resistance value R 2 of the pressure sensitive element 4B, the electric resistance value R 1 of the fixed resistance 5, the ratio of (R 2: By adjusting R 1 ), it is possible to reduce measurement variation between products of the pressure detection device 1B without changing the voltage-load characteristic of the pressure sensitive body 4B.
- FIG. 9 is an electric circuit diagram showing a pressure detection device 1C according to the third embodiment of the present invention.
- the pressure detection device 1 ⁇ / b> C in the third embodiment is the same as the first embodiment described above except that the first circuit 91 includes the first resistor 8 ⁇ / b> A, and therefore, different parts from the first embodiment. Only the portions that are the same as those of the first embodiment will be described with the same reference numerals as those of the first embodiment, and description thereof will be omitted.
- the first circuit 91 of the pressure detection device 1 ⁇ / b> C is electrically connected in parallel with the pressure-sensitive body 4 and has a first resistance value R 3.
- the body 8A is included.
- the first resistor 8A is formed, for example, by providing a desired resistive material between the first and second wiring patterns 601 and 602.
- the pressure detection device 1C according to the present embodiment also forms a potential difference at both ends of the pressure-sensitive body 4 due to the current flowing through the first resistor 8A even when measuring a minute load. Variations on the low load side can be absorbed.
- the pressure detection device 1 ⁇ / b> C at least one of the partial pressure V P2 of the pressure sensitive body 4 or the partial pressure V P1 of the fixed resistor 5 when a predetermined pressure is applied to the pressure sensitive body 4. (in this example a partial pressure V P1 of the fixed resistor 5) is measured (first step), and the partial pressure V P2 of the pressure sensitive element 4, and the partial pressure V P1 of the fixed resistor 5, the ratio (V Trimming (second step) of the fixed resistor 5 is performed based on ( P2 : V P1 ).
- the measurement variation between products of the pressure detection apparatus 1C can be reduced without changing the voltage-load characteristic of the pressure sensitive body 4.
- the combined resistance value (R 2 ⁇ R 3 / (R 2 + R 3 )) of the first circuit 91 when a predetermined pressure is applied to the pressure sensitive body 4 and the fixed resistor an electrical resistance value R 1 of 5, measured in advance (first step), the ratio thereof: based on ((R 2 ⁇ R 3 / (R 2 + R 3)) R 1), a fixed resistor 5 trimming (second step) may be performed.
- FIG. 10 is an electric circuit diagram showing a pressure detection device 1D according to the fourth embodiment of the present invention.
- the pressure detection device 1D according to the fourth embodiment is the same as the first embodiment described above except that the second circuit 92 includes the second resistor 8B. Only the portions that are the same as those of the first embodiment will be described with the same reference numerals as those of the first embodiment, and description thereof will be omitted.
- the second circuit 92 of the pressure detection device 1D of this embodiment, as shown in FIG. 10, are connected in parallel fixed resistor 5 electrically, a second resistor having a predetermined electrical resistance value R 4
- the body 8B is included.
- the second resistor 8B is not particularly shown, but for example, a conductive material such as a conductive paste can be formed between the first and second connection pieces 61 and 62 on the first substrate 41 with a desired line. It is formed by printing with a width and curing.
- the second resistor 8B is electrically connected in parallel with the fixed resistor 5, so that the accuracy of the fixed resistor 5 during trimming can be improved.
- the electrical resistance value R 1 of the fixed resistor 5, the electrical resistance value R 2 of the pressure-sensitive body 4 at a predetermined load, and the electrical resistance value R 4 of the second resistor 8 B are each 1000 ohms. It is assumed that the voltage VA applied by the voltage application device 31 is 10 volts, and that the volume of the fixed resistor 5 is halved by trimming (the electrical resistance value is 2000 ohms, twice that before trimming).
- the second resistor 8B when the second resistor 8B is not provided, the partial pressure applied to the fixed resistor 5 after trimming increases by 5/3 volt with respect to the partial pressure before trimming.
- the second resistor 8B is provided, the partial pressure applied to the fixed resistor 5 after trimming only increases by 2/3 volt with respect to the partial pressure before trimming.
- the fixed resistor 5 when the fixed resistor 5 is trimmed by a certain amount, the amount of change in the partial pressure applied to the fixed resistor 5 is reduced by providing the second resistor 8B. Thereby, fine adjustment of the partial pressure of the fixed resistor 5 by trimming becomes easy, and the accuracy of the trimming can be improved.
- the pressure detection device 1D in the present embodiment at least one of the partial pressure V P2 of the pressure sensitive body 4 or the partial pressure V P1 of the fixed resistor 5 when a predetermined pressure is applied to the pressure sensitive body 4. (in this example a partial pressure V P1 of the fixed resistor 5) is measured (first step), and the partial pressure V P2 of the pressure sensitive element 4, and the partial pressure V P1 of the fixed resistor 5, the ratio (V Trimming (second step) of the fixed resistor 5 is performed based on ( P2 : V P1 ).
- the measurement variation between the products of the pressure detection device 1 ⁇ / b> D can be reduced without changing the voltage-load characteristic of the pressure-sensitive body 4.
- the partial pressure V P1 ′ of the second circuit 92 is measured (first step), and when the predetermined pressure is applied to the pressure sensitive body 4, the partial pressure V P2 of the pressure sensitive body 4 is
- the trimming of the fixed resistor 5 (second step) may be performed based on the ratio (V P2 : V P1 ′ ) with the divided voltage V P1 ′ of the second circuit 92.
- the body 5 may be trimmed (second step).
- FIG. 13 is an exploded perspective view showing a touch panel according to the fifth embodiment
- FIG. 14 is a pressure-sensitive view according to the fifth embodiment. It is sectional drawing which shows a body and an elastic member
- FIG. 15 is a top view which shows the display apparatus in 5th Embodiment.
- the electronic device M includes a panel unit 10, a display device 50, a pressure sensor 2, a seal member 70, and a first support member 80.
- the second support member 90, and the panel unit 10 includes the cover member 20 and the touch panel 40.
- the panel unit 10 is supported by the first support member 80 via the pressure sensor 2 and the seal member 70, and the panel unit with respect to the first support member 80 is elastically deformed by the pressure sensor 2 and the seal member 70. Ten minute vertical movements are allowed.
- the configuration of the panel unit 10 is not particularly limited to the above.
- the panel unit 10 may be configured only from the cover member 20 by omitting the touch panel 40, or the panel unit 10 may be configured by using a touch pad instead of the touch panel 40.
- This electronic device M can display an image by the display device 50 (display function). Further, the electronic device M can detect the XY coordinate position by the touch panel 40 (position input function) when an arbitrary position on the screen is indicated by an operator's finger or a touch pen. Furthermore, when the panel unit 10 is pressed in the Z direction by an operator's finger or the like, the electronic apparatus M can detect the pressing operation by the pressure sensor 2 (press detection function).
- the cover member 20 includes a transparent substrate 21M that can transmit visible light, as shown in FIGS.
- Specific examples of the material constituting the transparent substrate 21M include glass, polymethyl methacrylate (PMMA), polycarbonate (PC), and the like.
- PMMA polymethyl methacrylate
- PC polycarbonate
- the cover member 20 is visible light.
- An opaque substrate that does not transmit light may be used.
- a shielding portion (frame portion) 23M formed by applying, for example, white ink or black ink is provided on the lower surface of the transparent substrate 21M.
- the shielding portion 23M is formed in a frame shape in a region excluding the rectangular transparent portion 22M located in the center on the lower surface of the transparent substrate 21M.
- the shapes of the transparent portion 22M and the shielding portion 23M are not particularly formed as described above. Moreover, you may form the shielding part 23M by bonding the decorating member decorated in white and black on the lower surface of the transparent substrate 21M. Alternatively, a transparent sheet having substantially the same size as the transparent substrate 21M and having only a portion corresponding to the shielding portion 23M colored in white or black is prepared, and the sheet is attached to the lower surface of the transparent substrate 21M. Thus, the shielding portion 23M may be formed.
- the touch panel 40 is a capacitive touch panel that includes two electrode sheets 41 ⁇ / b> M and 42 ⁇ / b> M that are superposed on each other.
- the structure of the touch panel 40 is not particularly limited to this, and for example, a resistive film type touch panel or an electromagnetic induction type touch panel may be employed.
- the 1st electrode pattern 412 and the 2nd electrode pattern 422 which are demonstrated below may be formed in the lower surface of the cover member 20, and the cover member 20 may be utilized as a part of touch panel.
- a touch panel in which electrodes are formed on both surfaces of one sheet may be used.
- the first electrode sheet 41M includes a first transparent base material 411 that can transmit visible light, and a plurality of first electrode patterns 412 provided on the first transparent base material 411. Yes.
- Specific materials constituting the first transparent substrate 411 include, for example, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethylene (PE), polypropylene (PP), polystyrene (PS), ethylene-acetic acid.
- resin materials such as vinyl copolymer resin (EVA), vinyl resin, polycarbonate (PC), polyamide (PA), polyimide (PI), polyvinyl alcohol (PVA), acrylic resin, triacetyl cellulose (TAC), and glass. can do.
- the first electrode pattern 412 is, for example, a transparent electrode made of indium oxide (ITO) or a conductive polymer, and is a strip-shaped planar pattern (so-called solid pattern) extending along the Y direction in FIG. Pattern).
- ITO indium oxide
- a conductive polymer a conductive polymer
- nine electrode patterns 412 are arranged in parallel to each other on the first transparent substrate 411. Note that the shape, number, arrangement, and the like of the first electrode pattern 412 are not particularly limited to the above.
- the first electrode pattern 412 is made of ITO, it is formed by, for example, sputtering, photolithography, and etching.
- the first electrode pattern 412 is made of a conductive polymer, it may be formed by sputtering or the like as in the case of ITO, or a printing method such as screen printing or gravure offset printing, It may be formed by etching after coating.
- the conductive polymer constituting the first electrode pattern 412 include organic compounds such as polythiophene, polypyrrole, polyaniline, polyacetylene, and polyphenylene, among which PEDOT It is preferable to use a / PSS compound.
- the first electrode pattern 412 may be formed by printing a conductive paste on the first transparent substrate 411 and curing it. In this case, in order to ensure sufficient light transmittance of the touch panel 40, each first electrode pattern 412 is formed in a mesh shape instead of the planar pattern.
- a conductive paste for example, a mixture of metal particles such as silver (Ag) or copper (Cu) and a binder such as polyester or polyphenol can be used.
- the plurality of first electrode patterns 412 are connected to a touch panel drive circuit (not shown) via the first lead wiring pattern 413.
- the first lead wiring pattern 413 is provided on the first transparent base material 411 at a position facing the shielding portion 23M of the cover member 20, and the operator pulls the first lead wiring pattern 413 from the operator. It is not visible. For this reason, the first lead wiring pattern 413 is formed by printing a conductive paste on the first transparent substrate 411 and curing it.
- the second electrode sheet 42M also includes a second transparent substrate 421 that can transmit visible light, and a plurality of second electrode patterns 422 provided on the second transparent substrate 421. Yes.
- the second transparent substrate 421 is made of the same material as the first transparent substrate 411 described above.
- the second electrode pattern 422 is also a transparent electrode made of, for example, indium tin oxide (ITO) or a conductive polymer, like the first electrode pattern 412 described above.
- ITO indium tin oxide
- the second electrode pattern 422 is constituted by a strip-shaped planar pattern extending along the X direction in FIG. In the example shown in FIG. 13, six second electrode patterns 422 are arranged in parallel to each other on the second transparent substrate 421.
- the shape, number, arrangement, etc. of the second electrode wiring pattern 422 are not particularly limited to the above.
- the plurality of second electrode patterns 422 are connected to a touch panel drive circuit (not shown) via the second lead wiring pattern 423.
- the touch panel drive circuit periodically applies a predetermined voltage between the first electrode pattern 412 and the second electrode pattern 422, for example, for each intersection of the first and second electrode patterns 412 and 422.
- the position of the finger on the touch panel 40 is detected based on the change in capacitance.
- the second lead-out wiring pattern 423 is provided on the second transparent substrate 421 at a position facing the shielding portion 23M of the cover member 20, and the operator pulls out the second lead-out wiring pattern 423. It is not visible. For this reason, like the above-mentioned 1st extraction wiring pattern 413, this 2nd extraction wiring pattern 423 is also formed by printing the electrically conductive paste on the 2nd transparent base material 421, and hardening it.
- the first electrode sheet 41M and the second electrode sheet 42M are attached to each other via a transparent adhesive so that the first electrode pattern 412 and the second electrode pattern 422 are substantially orthogonal in a plan view. It has been.
- the touch panel 40 itself is also attached to the lower surface of the cover member 20 via a transparent adhesive so that the first and second electrode patterns 412 and 422 are opposed to the transparent portion 22M of the cover member 20.
- transparent pressure-sensitive adhesives include acrylic pressure-sensitive adhesives.
- the panel unit 10 composed of the cover member 20 and the touch panel 40 described above is supported by the first support member 80 via the pressure sensor 2 and the seal member 70 as shown in FIG. As shown in FIG. 11, the pressure sensitive sensor 2 is provided at the four corners of the panel unit 10. On the other hand, the seal member 70 is disposed outside the pressure-sensitive sensor 2 and is provided over the entire circumference along the outer edge of the panel unit 10.
- the pressure sensor 2 and the seal member 70 are respectively attached to the lower surface of the cover member 20 via an adhesive, and are attached to the first support member 80 via an adhesive.
- the pressure sensor 2 can hold
- an elastic member 65 is provided on the top of the pressure-sensitive body 4 of the pressure-sensitive sensor 2 in the present embodiment.
- the elastic member 65 is laminated on the second substrate 44 via an adhesive 651.
- the elastic member 65 is made of an elastic material such as a foam material or a rubber material.
- Specific examples of the foaming agent that constitutes the elastic member 65 include closed cell urethane foam, polyethylene foam, silicone foam, and the like.
- Examples of the material constituting the elastic member 65 include polyurethane rubber, polystyrene rubber, and silicone rubber.
- the elastic member 65 may be laminated below the first substrate 41. Alternatively, the elastic member 65 may be stacked on the second substrate 44 and may be stacked below the first substrate 41. Although the elastic member 65 may be omitted, by providing the elastic member 65, the load applied to the pressure-sensitive sensor 2 can be evenly distributed throughout the pressure-sensitive body 4, and the pressure-sensitive sensor 2 detection accuracy can be improved. Further, when the support members 80, 90 (described later) are distorted due to the presence of the elastic member 65, or when the tolerance in the thickness direction of the support members 80, 90, etc. is large, these can be absorbed. Furthermore, when an excessive pressure or impact is applied to the pressure sensor 2, the elastic member 65 can prevent the pressure sensor 2 from being damaged or broken.
- the electronic apparatus M in the present embodiment includes a plurality (four in this example) of pressure sensitive sensors 2 (hereinafter also referred to as pressure sensitive sensors 2P, 2Q, 2R, and 2S).
- Each of the pressure-sensitive sensors 2P, 2Q, 2R, and 2S uses an unillustrated voltage applying unit and a partial pressure measuring unit, so that the electric resistance value R 2 (the combined resistance of the first circuit 91) of the pressure-sensitive body 4 is obtained. Value) and the electrical resistance value R 1 of the fixed resistor 5 (the combined resistance value of the second circuit 92), so that the resistance ratio (R 2 : R 1 ) is equal between the pressure sensors.
- the fixed resistors 5 of the pressure sensors 2P, 2Q, 2R, and 2S are trimmed and adjusted.
- the pressure-sensitive sensor 2P, 2Q, 2R in a state of applying respective predetermined load F to 2S, the pressure sensitive sensor 2P, 2Q, 2R, and the electrical resistance value R 2 of the pressure sensitive element 4 2S,
- the ratio (R 2 : R 1 ) of the electric resistance value R 1 of each fixed resistor 5 of the pressure sensitive sensors 2P, 2Q, 2R, 2S is substantially the same.
- substantially the same means that the electrical resistance value R 2 of the pressure sensitive body 4 (when the predetermined load F is applied to all of the pressure sensitive sensors 2P, 2Q, 2R, and 2S included in the electronic device M, respectively.
- the ratio (R 2 / R 1 ) of each resistance (the combined resistance value of the first circuit 91) and the electrical resistance value R 1 of the fixed resistor 5 (the combined resistance value of the second circuit 92) The value in the pressure sensor) is within ⁇ 5% of the average value of the ratios (R 2 / R 1 ) in all the pressure sensitive sensors 2P, 2Q, 2R, 2S.
- the electric resistance value R 2 of the pressure sensitive element 4 in all of the pressure-sensitive sensor, fixed resistor The electrical resistance values of the fixed resistors 5 of the respective pressure-sensitive sensors are adjusted so that the ratio (R 2 : R 1 ) of the electrical resistance value R 1 of the body 5 is substantially the same.
- the seal member 70 in the present embodiment is made of an elastic material such as a foam material or a rubber material, like the elastic member 65 described above.
- Specific examples of the foam material constituting the seal member 70 include closed cell urethane foam, polyethylene foam, silicone foam, and the like.
- examples of the rubber material constituting the seal member 70 include polyurethane rubber, polystyrene rubber, silicone rubber, and the like.
- the pressure sensor 2 and the seal member 70 described above are sandwiched between the cover member 20 and the first support member 80 as shown in FIG.
- the first support member 80 has a frame portion 81 and a holding portion 82.
- the frame portion 81 has a rectangular frame shape having an opening that can accommodate the cover member 20.
- the holding part 82 has a rectangular ring shape, and protrudes radially inward from the lower end of the frame part 81.
- the first support member 80 is made of, for example, a metal material such as aluminum, or a resin material such as polycarbonate (PC) or ABS resin.
- the frame portion 81 and the holding portion 82 are integrally formed, but they may be formed separately.
- the holding portion 82 in the present embodiment includes a first region 821 that holds the pressure-sensitive sensor 2 and a second region 822 that holds the seal member 70.
- the first region 821 is annularly disposed so as to surround the central opening 823 of the holding portion 82, and the second region 822 is annularly disposed radially outward with respect to the first region 821. ing.
- the first region 821 may be formed in a convex shape.
- the pressure-sensitive sensor 2 and the seal member 70 are disposed adjacent to each other, but the pressure-sensitive sensor 2 and the seal member 70 may be disposed separately (that is, the first region 821 and the first region 821).
- the second region 822 may be spaced apart).
- the relationship between the thickness of the first region 821 and the thickness of the second region 822 is not particularly limited, but the first region 821 is relatively thicker than the second region 822 as in this embodiment. It is preferable that In this case, the space formed between the panel unit 10 and the first support member 80, a first gap portion S 1 in which the pressure sensor 2 is provided with a sealing member 70 is provided and are relatively narrower with respect to a second distance portion S 2 (S 1 ⁇ S 2 ).
- a first gap portion S 1 in which the pressure sensor 2 is provided with a sealing member 70 is provided and are relatively narrower with respect to a second distance portion S 2 (S 1 ⁇ S 2 ).
- a thin elastic body has a larger stress value than a thick elastic body at the same displacement. Therefore, when satisfying the above relationship (S 1 ⁇ S 2), when the panel unit 10 is pressed, the stress per unit displacement occurring pressure sensor 2, per unit displacement occurring to the seal member 70 Can be made relatively large with respect to the stress.
- the display device 50 includes a display area 51B in which an image is displayed, an outer edge area 52B that surrounds the display area 51B, and flanges 53B that protrude from both ends of the outer edge area 52B. Yes.
- the display area 51B of the display device 50 is configured by a thin display device such as a liquid crystal display, an organic EL display, or electronic paper.
- a through hole 531 is provided in the flange 53B, and this through hole 531 is opposed to a screw hole 824 (see FIG. 12) formed in the back surface of the first support member 80.
- the screw 54 is screwed into the screw hole 824 through the through-hole 531, so that the display device 50 is fixed to the first support member 80, whereby the display region 51B is It faces the transparent portion 22 ⁇ / b> B of the cover member 20 through the central opening 823 of one support member 80.
- the second support member 90 is made of, for example, a metal material such as aluminum, or a resin material such as polycarbonate (PC) or ABS resin, like the first support member 80 described above.
- the second support member 90 is attached to the first support member 80 via an adhesive so as to cover the back surface of the display device 50. Note that the second support member 90 may be screwed to the first support member 80 instead of the adhesive.
- the electronic apparatus M in the present embodiment includes a plurality (four in this example) of pressure sensitive sensors 2P, 2Q, 2R, and 2S, and these pressure sensitive sensors 2P, 2Q, 2R, and 2S. in a predetermined load F and electric resistance value R 2 of the pressure sensitive element 4 in the state of being respectively applied to the pressure sensor, the electrical resistance R 1 of the fixed resistance 5, the ratio of (R 2: R 1 ) Are substantially identical to each other.
- measurement variations among the pressure sensitive sensors 2P, 2Q, 2R, and 2S are reduced without changing the voltage-load characteristics of the pressure sensitive bodies 4 of the pressure sensitive sensors 2P, 2Q, 2R, and 2S. be able to. For this reason, it is possible to improve detection accuracy in the pressure sensitive sensors 2P, 2Q, 2R, and 2S, and to suppress a response delay when the measurement amount increases.
- the first circuit 91 includes the first resistor 8A described in the third embodiment, and the second resistor described in the fourth embodiment.
- the second circuit 92 may include the resistor 8B.
- the divided voltage V P1 ) of the resistor 5 is measured (first step), and the ratio (V P2) between the divided voltage V P2 ′ of the first circuit 91 and the divided voltage V P1 ′ of the second circuit 92 is measured.
- the fixed resistor 5 may be trimmed (second step).
- Value (R 1 ⁇ R 4 / (R 1 + R 4 )) and a ratio thereof ((R 2 ⁇ R 3 / (R 2 + R 3 )): (R 1 ⁇ R 4 / (R 1 + R 4 ))) may be used to trim the fixed resistor 5 (second step).
- first and second substrates 41 and 44 constituting the pressure sensitive body 4 described in the first embodiment may be the same substrate.
- the pressure-sensitive body is configured by bending the substrate with a spacer interposed therebetween.
- an electric resistance value R 2 of the pressure sensitive substance 4 in the case where a predetermined pressure to the pressure sensitive element 4 is applied, the electric resistance value R 1 of the fixed resistance 5, the ratio (R 2 : R 1 ) may be adjusted by increasing the volume of the fixed resistor.
- the first circuit 91 may include a resistor that is electrically connected in series with the pressure-sensitive body 4 and has a predetermined electric resistance value.
- the second circuit 92 may include a resistor that is electrically connected in series with the fixed resistor 5 and has a predetermined electric resistance value. Also in these cases, at least one of the partial pressure of the first circuit 91 and the partial pressure of the second circuit 92 when the predetermined pressure is applied to the pressure-sensitive body 4 is measured (first step). Based on the ratio of the divided voltage of the first circuit 91 and the divided voltage of the second circuit 92, the voltage of the pressure sensitive body 4 is obtained by trimming the fixed resistor 5 (second step). -It is possible to reduce measurement variations between products of the pressure detector without changing the load characteristics. When the pressure is actually measured using this pressure detection device, the pressure is applied to the pressure sensitive body 4 based on the partial pressure of the first circuit 91 or the partial pressure of the second circuit. The magnitude of the applied pressure is obtained.
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Abstract
Description
文献の参照による組み込みが認められる指定国については、2013年2月6日に日本国に出願された特願2013-21077号に記載された内容、及び2013年8月9日に日本国に出願された特願2013-166201号に記載された内容を参照により本明細書に組み込み、本明細書の記載の一部とする。
前記パネルユニットを介した押圧に応じて変形する複数の感圧センサと、を備えた電子機器であって、複数の前記感圧センサは、加圧力に応じて電気的抵抗値が連続的に変化する感圧体を少なくとも含む第1の回路と、固定抵抗体を少なくとも含み前記第1の回路と直列に接続された第2の回路と、をそれぞれ有し、複数の前記感圧センサの抵抗比は互いに略同一であり、前記抵抗比は、前記感圧体に所定加圧力が印加されている場合における前記第1の回路のうちの少なくとも前記感圧体の電気的抵抗値と、前記感圧体に前記所定加圧力が印加されている場合における前記第2の回路のうちの少なくとも前記固定抵抗体の電気的抵抗値と、の比であることを特徴とする。
図1は本実施形態における圧力検出装置1を示す全体概念図であり、図2(A)及び図2(B)は感圧センサ2を示す分解斜視図及び平面図であり、図3は図2(B)におけるIII-III線に沿った断面図であり、図4は図2(B)におけるIV部の拡大図である。
図8は本発明の第2実施形態での圧力検出装置1Bを示す全体概念図である。第2実施形態における圧力検出装置1Bは、感圧センサ2Bの構成及び圧力検出装置1Bの内部配線が異なること以外は、上述した第1実施形態と同様であるので、第1実施形態と相違する部分についてのみ説明し、第1実施形態と同一である部分については、第1実施形態と同一の符号を付して説明を省略する。
図9は本発明の第3実施形態における圧力検出装置1Cを示す電気回路図である。第3実施形態における圧力検出装置1Cは、第1の回路91が第1の抵抗体8Aを有すること以外は、上述した第1実施形態と同様であるので、第1実施形態と相違する部分についてのみ説明し、第1実施形態と同一である部分については、第1実施形態と同一の符号を付して説明を省略する。
図10は本発明の第4実施形態での圧力検出装置1Dを示す電気回路図である。第4実施形態における圧力検出装置1Dは、第2の回路92が第2の抵抗体8Bを有すること以外は、上述した第1実施形態と同様であるので、第1実施形態と相違する部分についてのみ説明し、第1実施形態と同一である部分については、第1実施形態と同一の符号を付して説明を省略する。
図11及び図12は第5実施形態における電子機器を示す平面図及び断面図であり、図13は第5実施形態におけるタッチパネルを示す分解斜視図であり、図14は第5実施形態における感圧体及び弾性部材を示す断面図であり、図15は第5実施形態における表示装置を示す平面図である。なお、以下の説明において、上述の実施形態と同一である部分については、同一の符号を付して説明を省略する。
2、2B・・・感圧センサ
91・・・第1の回路
4、4B・・・感圧体
41・・・第1の基板
42・・・第1の電極
43・・・第1の感圧材料
44・・・第2の基板
45・・・第2の電極
46・・・第2の感圧材料
47・・・スペーサ
48・・・基板
92・・・第2の回路
5・・・固定抵抗体
51・・・第1の側部
52・・・第2の側部
31・・・電圧印加装置
32・・・電圧計
601・・・第1の配線パターン
602・・・第2の配線パターン
603・・・第3の配線パターン
604・・・第4の配線パターン
61・・・第1の接続片
62・・・第2の接続片
641・・・第1の配線
642・・・第2の配線
643・・・第3の配線
644・・・第4の配線
M・・・電子機器
10・・・パネルユニット
20・・・カバー部材
22M・・・透明部分
40・・・タッチパネル
50・・・表示装置
51B・・・表示領域
Claims (12)
- 加圧力に応じて電気的抵抗値が連続的に変化する感圧体を含む第1の回路と、電気的抵抗値を所望の値に調整可能な固定抵抗体を含む第2の回路と、が電気的に直列に接続して構成された感圧センサを準備する第1の工程と、
前記感圧体に所定加圧力が印加されている場合における前記第1の回路のうちの少なくとも前記感圧体の電気的抵抗値と、前記第2の回路のうちの少なくとも前記固定抵抗体の電気的抵抗値と、の比に基づいて、前記固定抵抗体の電気的抵抗値を調整する第2の工程と、を備えたことを特徴とする圧力検出装置の製造方法。 - 加圧力に応じて電気的抵抗値が連続的に変化する感圧体を含む第1の回路と、電気的抵抗値を所望の値に調整可能な固定抵抗体を含む第2の回路と、が電気的に直列に接続して構成された感圧センサを準備する第1の工程と、
前記感圧体に所定加圧力が印加されていると共に、前記感圧センサに所定電圧が印加されている場合において、前記第1の回路のうちの少なくとも前記感圧体の分圧、又は、前記第2の回路のうちの少なくとも前記固定抵抗体の分圧に基づいて、前記固定抵抗体の電気的抵抗値を調整する第2の工程と、を備えたことを特徴とする圧力検出装置の製造方法。 - 請求項1又は2に記載の圧力検出装置の製造方法であって、
前記第2の工程は、前記固定抵抗体の体積を調整することにより、前記固定抵抗体の電気的抵抗値を調整することを特徴とする圧力検出装置の製造方法。 - 請求項1~3の何れか1項に記載の製造方法であって、
前記第1の工程は、前記第1の回路のうちの少なくとも前記感圧体と前記第2の回路のうちの少なくとも前記固定抵抗体とにおける少なくとも一方の分圧を測定すること、又は、前記第1の回路のうちの少なくとも前記感圧体及び前記第2の回路のうちの少なくとも前記固定抵抗体の電気的抵抗値を測定することを含むことを特徴とする圧力検出装置の製造方法。 - 請求項1~4の何れか1項に記載の圧検出装置の製造方法であって、
前記第1の回路は、前記感圧体と電気的に並列に接続された第1の抵抗体を含むことを特徴とする圧力検出装置の製造方法。 - 請求項1~5の何れか1項に記載の圧力検出装置の製造方法であって、
前記第2の回路は、前記固定抵抗体と電気的に並列に接続された第2の抵抗体を含むことを特徴とする圧力検出装置の製造方法。 - 請求項1~6の何れか1項に記載の製造方法であって、
前記感圧体は、
第1の電極が設けられた第1の基板と、
前記第1の電極に対向するように設けられた第2の電極を有する第2の基板と、
前記第1の基板と前記第2の基板との間に介装されたスペーサと、
前記第1の電極又は前記第2の電極の少なくとも一方の表面を覆うように設けられた感圧材料と、を備えていることを特徴とする圧力検出装置の製造方法。 - 加圧力に応じて電気的抵抗値が連続的に変化する感圧体を含む第1の回路と、固定抵抗体を含む第2の回路と、が電気的に直列に接続して構成された感圧センサと、
前記感圧センサに所定電圧を印加する電圧印加手段と、
前記第1の回路のうちの少なくとも前記感圧体と前記第2の回路のうちの少なくとも前記固定抵抗体とにおける少なくとも一方の分圧、又は、前記第1の回路のうちの少なくとも前記感圧体及び前記第2の回路のうちの少なくとも前記固定抵抗体の電気的抵抗値、を測定する測定手段と、を備え、
前記固定抵抗体の電気的抵抗値は、前記感圧体に所定加圧力が印加されている場合における前記第1の回路のうちの少なくとも前記感圧体の電気的抵抗値と、前記第2の回路のうちの少なくとも前記固定抵抗体の電気的抵抗値と、の比を調整するために調整可能であることを特徴とする圧力検出装置。 - 請求項8に記載の圧力検出装置であって、
前記固定抵抗体の電気的抵抗値は、部分的に前記固定抵抗体を除去することにより調整可能であることを特徴とする圧力検出装置。 - 加圧力に応じて電気的抵抗値が連続的に変化する感圧体と、
部分的に除去可能な固定抵抗体と、を備え、
前記感圧体は、
第1の電極と、前記第1の電極から延在する第1の接続パターンと、を有する第1の基板と、
前記第1の電極に対向するように設けられた第2の電極と、前記第2の電極から延在する第2の接続パターンと、を有する第2の基板と、
前記第1の基板と前記第2の基板との間に介装されたスペーサと、
前記第1の電極又は前記第2の電極の少なくとも一方の表面を覆うように設けられた感圧材料と、を有しており、
前記第1の基板は、
前記第1の接続パターンから分岐していると共に、前記固定抵抗体の一方端に電気的に接続された第1の接続片と、
前記固定抵抗体の他方端に電気的に接続された第2の接続片と、
前記第2の接続片に設けられた第3の接続パターンと、をさらに有し、
前記固定抵抗体は、前記第1の接続片と前記第2の接続片との間に介在していることを特徴とする感圧センサ。 - 請求項10に記載の感圧センサであって、
前記第1の基板と前記第2の基板は、折り曲げ部で折り曲げられた同一の基板であり、
前記第1の基板は、前記折り曲げ部を介して前記第2の接続パターンに電気的に接続された第4の接続パターンをさらに有することを特徴とする感圧センサ。 - パネルユニットと、
前記パネルユニットを介した押圧に応じて変形する複数の感圧センサと、を備えた電子機器であって、
複数の前記感圧センサは、加圧力に応じて電気的抵抗値が連続的に変化する感圧体を少なくとも含む第1の回路と、固定抵抗体を少なくとも含み前記第1の回路と直列に接続された第2の回路と、をそれぞれ有し、
複数の前記感圧センサの抵抗比は互いに略同一であり、
前記抵抗比は、前記感圧体に所定加圧力が印加されている場合における前記第1の回路のうちの少なくとも前記感圧体の電気的抵抗値と、前記感圧体に前記所定加圧力が印加されている場合における前記第2の回路のうちの少なくとも前記固定抵抗体の電気的抵抗値と、の比であることを特徴とする電子機器。
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- 2014-01-29 TW TW103103432A patent/TWI629459B/zh active
- 2014-01-30 JP JP2014560741A patent/JP5997781B2/ja active Active
- 2014-01-30 CN CN201480007359.XA patent/CN104969048A/zh active Pending
- 2014-01-30 US US14/765,506 patent/US20150378483A1/en not_active Abandoned
- 2014-01-30 WO PCT/JP2014/052078 patent/WO2014123058A1/ja active Application Filing
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Also Published As
Publication number | Publication date |
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TW201447248A (zh) | 2014-12-16 |
JPWO2014123058A1 (ja) | 2017-02-02 |
TWI629459B (zh) | 2018-07-11 |
US20150378483A1 (en) | 2015-12-31 |
JP5997781B2 (ja) | 2016-09-28 |
CN104969048A (zh) | 2015-10-07 |
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