WO2014104176A1 - 気相分解方法、分析方法、品質管理方法、製造方法、及び、容器 - Google Patents
気相分解方法、分析方法、品質管理方法、製造方法、及び、容器 Download PDFInfo
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- WO2014104176A1 WO2014104176A1 PCT/JP2013/084840 JP2013084840W WO2014104176A1 WO 2014104176 A1 WO2014104176 A1 WO 2014104176A1 JP 2013084840 W JP2013084840 W JP 2013084840W WO 2014104176 A1 WO2014104176 A1 WO 2014104176A1
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- organic material
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- vapor phase
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/04—Pressure vessels, e.g. autoclaves
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/508—Containers for the purpose of retaining a material to be analysed, e.g. test tubes rigid containers not provided for above
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0609—Holders integrated in container to position an object
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/12—Specific details about materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/14—Means for pressure control
Definitions
- the present invention relates to a vapor phase decomposition method for decomposing an organic material, an analysis method of the decomposed organic material, a quality control method of the analyzed organic material, a manufacturing method using the analyzed organic material, and an organic material It relates to the container for disassembling.
- Non-Patent Document 1 As a method for analyzing impurities contained in organic substances, the pressure decomposition method described in Non-Patent Document 1 is known. According to the method described in Non-Patent Document 1, a polymer material is immersed in an acid solution such as nitric acid, heated and pressurized, and an organic substance is dissolved in the acid solution to obtain a measurement sample solution. Then, an impurity containing a metal element (hereinafter referred to as a metal impurity) and / or an impurity containing a nonmetallic element (hereinafter referred to as a nonmetallic impurity) contained in the measurement sample is detected.
- a metal impurity an impurity containing a metal element
- a nonmetallic impurity an impurity containing a nonmetallic element
- Non-Patent Document 1 since the polymer material and the acid solution are in direct contact, impurities contained in the acid solution are contained in the measurement sample solution, and contamination of the measurement sample solution occurs. .
- impurities adhering to the inner wall of the container containing the acid solution, and metals and / or non-metals contained as impurities on the inner wall are dissolved in the acid solution by contact with the acid solution, and are contained in the measurement sample solution. It will be.
- the present invention has been made in view of the above-mentioned problems, and its purpose is to prevent the introduction of impurities derived from the decomposition solution and to analyze the metal impurities and / or non-metal impurities in the organic material more accurately.
- Vapor phase decomposition method, analysis method of decomposed organic material, quality control method of analyzed organic material, manufacturing method using analyzed organic material, and decomposition of organic material To provide a container.
- the vapor phase decomposition method according to the present invention includes a preparation step of storing the organic material and the decomposition solution in a sealed container so that the organic material and a decomposition solution for decomposing the organic material do not come into contact with each other. And a decomposition step of decomposing the organic material with a decomposition gas obtained by vaporizing the decomposition liquid.
- the organic material contained in the sealed container is preferably 0.001 mg or more and 500 mg or less.
- the vapor phase decomposition method includes an alkali metal, an alkaline earth metal, a lanthanoid, an actinoid, a transition metal, a boron group, a carbon group, a nictogen, or a chalcogen from the organic material decomposed in the decomposition step.
- the method further includes a recovery step of recovering a measurement sample containing at least one element belonging to the above.
- the analysis method according to the present invention is characterized in that it includes an analysis step of detecting impurities in a measurement sample obtained by decomposing an organic material by any one of the gas phase decomposition methods described above.
- the quality control method includes an analysis step for detecting impurities in a measurement sample obtained by decomposing an organic material by any one of the vapor phase decomposition methods, and an amount of impurities detected in the analysis step. Includes an extraction step of extracting an organic material that is equal to or less than a predetermined reference amount.
- the manufacturing method includes an analysis step for detecting impurities in a measurement sample obtained by decomposing an organic material by any one of the above gas phase decomposition methods, and an amount of impurities detected in the analysis step.
- the method includes an extraction step of extracting an organic material that is equal to or less than a predetermined reference amount, and a manufacturing step of manufacturing an organic electronic device using the organic material extracted in the extraction step.
- the container according to the present invention is a container for decomposing an organic material, and has a sealed space for accommodating a decomposition solution for decomposing the organic material therein, and against a pressure for decomposing the organic material.
- An outer container portion that is pressure-resistant, and an inner container that is provided in the outer container portion and is formed of a material that is resistant to the decomposition solution, and in which the organic material is accommodated from the opened upper portion.
- the inner container is provided so that the decomposition liquid does not contact the inner wall when the decomposition liquid is accommodated in the outer container portion.
- the vapor phase decomposition method according to the present invention includes a preparation step of storing the organic material and the decomposition solution in a sealed container so that the organic material and a decomposition solution for decomposing the organic material do not come into contact with each other. Since the inside of the container is pressurized and includes a decomposition step of decomposing the organic material with the decomposition liquid gas vaporized from the decomposition liquid, impurities derived from the decomposition liquid are contained in the decomposed organic material. It is possible to prevent mixing.
- a method for vapor phase decomposition of an organic material according to the present invention includes a preparation step of storing the organic material and the decomposition solution in a sealed container so that the organic material and a decomposition solution for decomposing the organic material do not come into contact with each other. And a decomposing step of decomposing the organic material with a decomposing liquid gas vaporized from the decomposing liquid.
- the organic material is decomposed by the decomposition liquid gas obtained by vaporizing the decomposition liquid. Therefore, impurities contained in the decomposition solution can be prevented from being mixed into the measurement sample obtained by decomposing the organic material.
- the organic material is a material containing an organic material and includes an organic electronic material.
- the organic electronic material is an organic material used as a material constituting an electronic device, and includes, for example, an organic thin film solar cell material, an organic EL material, an organic transistor (semiconductor) material, and the like.
- the vapor phase decomposition method of the present invention since the generation of contamination due to impurities contained in the decomposition solution is suppressed, accurate analysis of the measurement sample after decomposition is possible even if the amount of organic material to be decomposed is small. Can be used. Therefore, the vapor phase decomposition method according to the present invention is also suitable for the decomposition of expensive organic electronics materials.
- organic materials include organometallic complexes.
- the organic material includes, for example, a thin film obtained by depositing or applying an organic material, and an organic solution in which the thin film is dissolved.
- the thin film refers to, for example, a thin film formed by vapor deposition or a thin film formed by coating, but the formation method is not particularly limited.
- organic material examples include aromatic hydrocarbons, polycyclic aromatic hydrocarbons, compounds derived from heteroaromatic hydrocarbons having hetero atoms in the skeleton or polycyclic heteroaromatic hydrocarbons, and rings having covalent bonds. And the like, compounds containing fullerene in the skeleton, compounds containing porphyrin and phthalocyanine in the skeleton, metal complex compounds containing these structures, oligomers and polymers containing these structures, and the like.
- the vapor phase decomposition method of the present invention may be a hardly decomposable organic material having a benzene ring, and can be efficiently vapor-phase decomposed. Can be subject to phase decomposition.
- the decomposition solution is a solution for decomposing organic material, and may be any solution that is vaporized by heating and pressurization to generate decomposition solution gas, such as hydrofluoric acid, nitric acid, hydrochloric acid, sulfuric acid, phosphoric acid.
- An acid solution containing at least one acid selected from the group consisting of hydrogen peroxide solution and perchloric acid can be used.
- the decomposition solution may be an acid aqueous solution of at least one of the above-described acids and water.
- the organic material and the decomposition solution are accommodated in a sealed container so that the organic material and the decomposition solution for decomposing the organic material are not in direct contact with each other.
- the decomposition solution is directly stored in a sealed container, and the organic material stored in the inner container having an opening is stored in the sealed container.
- the organic material may be stored so that the organic material and the decomposition liquid do not come into contact with each other by storing the opening of the inner container storing the organic material so as to be positioned above the liquid surface of the decomposition liquid.
- the inner container containing the organic material and the inner container containing the decomposition solution may be housed in the sealed container, respectively. Furthermore, the inner container containing the organic material may be placed on a table provided in the sealed container, and the decomposition solution may be stored under the table, or the inner container containing the organic material and the decomposition solution may be stored. The accommodated inner container may be placed adjacent to the table. Further, the inner container containing the decomposition solution may be placed on the table, and the inner container containing the organic material may be placed on the lower side of the table. That is, if the organic material and the decomposition liquid are accommodated in the sealed container so that the organic material is not directly contacted in the sealed container and the organic material is exposed to the decomposition liquid gas from which the decomposition liquid is vaporized. Good.
- the organic material contained in the sealed container is preferably 0.001 mg or more and 500 mg or less, more preferably 0.1 mg or more and 500 mg or less, and most preferably 1 mg or more and 50 mg or less.
- the organic material and the decomposition solution do not come into direct contact, and therefore, contamination due to impurities contained in the decomposition solution occurs in the measurement sample obtained by decomposing the organic material. It is suppressed. Therefore, a measurement sample obtained using a small amount of organic material can be used for accurate analysis.
- the amount of the decomposition solution stored in the sealed container is not particularly limited. For example, when the volume of the sealed container is 100%, the decomposition solution is 1% to 40% of the volume of the sealed container.
- the organic material can be efficiently decomposed if it is housed in the container.
- the amount of the decomposition solution stored in the sealed container may be an amount that can sufficiently decompose the organic material. Therefore, for example, a decomposition solution of 5 mL or more and 20 mL or less may be accommodated per 500 mg of the organic material to be decomposed.
- the organic material contained in the sealed container may be a bulk, a thin film formed by vapor deposition, or a thin film formed by coating. After the organic material and the decomposition solution are accommodated in the sealed container, the sealed container is sealed.
- the inside of the sealed container is pressurized by heating, and the organic material is decomposed by the decomposition liquid gas obtained by vaporizing the decomposition liquid. That is, pressurization is performed by heating the inside of an airtight container that contains an organic material and a decomposition solution and is sealed. Pressurization and heating in the sealed container can be suitably performed by a conventionally known method.
- the heating temperature of the hermetic container may be any desired pressurization described below and may be any temperature that vaporizes the decomposition solution, preferably 100 ° C. or higher and 240 ° C. or lower, and 150 ° C. or higher and 240 ° C. or lower. More preferably, it is most preferably 200 ° C. or higher and 240 ° C. or lower.
- the heating time of the sealed container is preferably 1 hour or more and 72 hours or less per 500 mg of the organic material, more preferably 1 hour or more and 48 hours or less, and 1 hour or more and 24 hours or less. Is most preferred.
- the pressure applied to the sealed container by heating at the above-described temperature is a pressure at which the organic material can be decomposed by the vaporized decomposition solution, and is preferably 1 MPa or more and 15 MPa or less, preferably 5 MPa or more and 15 MPa or less. Is more preferable, and is most preferably 7 MPa or more and 15 MPa or less.
- the sealed container When heating the sealed container, it is preferable to heat the entire sealed container. In particular, if heat is applied to the upper portion of the sealed container, it is possible to prevent the droplets aggregated on the upper wall in the sealed container from falling on the organic material and causing contamination.
- the organic material is decomposed in a gas phase by the decomposition gas obtained by vaporizing the decomposition solution. Therefore, it is possible to prevent impurities contained in the decomposition solution and impurities attached to the inner wall of the sealed container from being mixed into the measurement sample obtained by decomposing the organic material. As a result, it can be subjected to an analysis that more accurately detects a trace amount of metal impurities and / or non-metal impurities contained in the organic material.
- the vapor phase decomposition method according to the present invention includes at least one element belonging to an alkali metal, an alkaline earth metal, a lanthanoid, an actinoid, a transition metal, a boron group, a carbon group, a nictogen or a chalcogen from an organic material decomposed in a decomposition step.
- a recovery step of recovering the measurement sample containing the above may be further included.
- the organic material is vapor-phase decomposed by the decomposition liquid gas and sublimates, and the metal element and / or the non-metal element contained in the organic material remains.
- the metal element and / or non-metal element remaining after decomposing the organic material is recovered as a measurement sample.
- the metal element and / or nonmetal element remaining after the decomposition of the organic material is an impurity contained in the organic material, that is, a metal impurity and / or a nonmetal impurity.
- a metal impurity refers to an impurity containing at least one metal element belonging to an alkali metal, alkaline earth metal, lanthanoid, actinoid, or transition metal
- a non-metallic impurity refers to an alkali metal or alkaline earth metal.
- the recovery of the metal element and / or the non-metallic element may be performed using a conventionally known recovery liquid.
- the recovery liquid include nitric acid, hydrochloric acid, hydrofluoric acid, sulfuric acid, phosphoric acid, aqueous hydrogen peroxide, and An acid solution containing at least one acid selected from the group consisting of perchloric acid can be used.
- the recovery liquid is dropped into the inner container that contains and decomposes the organic material, and the metal element and / or the non-metal element attached to the inner wall of the inner container is dissolved.
- the metallic element and / or the nonmetallic element may be recovered by further heating the inner container in which the recovered liquid is dropped.
- the decomposition at a high temperature at which the metal impurities and / or non-metal impurities contained in the organic material are volatilized is not performed, so the alkali metal and alkaline earth metal contained in the organic material
- At least one element belonging to lanthanoid, actinoid, transition metal, boron group, carbon group, nictogen, or chalcogen can be recovered as a metal impurity and / or a nonmetal impurity. That is, it can be used for the analysis of whether or not these elements are contained in the organic material.
- elements such as Na, K, Zn, Cu, Ag, Cd, Sn, Sb, and Pb can be suitably recovered as metal impurities and / or non-metal impurities.
- Be, Mg, Ca, Sr, and Ba are mentioned as an alkaline-earth metal which can be collect
- lanthanoids that can be recovered in the recovery step include La, Ce, Lu, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, and Yb.
- actinoids that can be recovered in the recovery process include Th and U.
- transition metals that can be recovered in the recovery process include Fe, Co, Ni, Ti, Sc, V, Cr, Mn, Cu, Y, Zr, Nb, Mo, Ru, Rh, Pd, Ag, Hf, Ta, W, Re, Os, Ir, Pt, Au, Zn and Cd.
- the boron group that can be recovered in the recovery step include Ga, In, Tl, B, and Al.
- examples of the carbon group that can be recovered in the recovery step include Si, Ge, Sn, and Pb.
- P, As, Sb, and Bi are mentioned as a nicotine which can be collect
- S, Se, and Te are mentioned as a chalcogen which can be collect
- the vapor phase decomposition method according to the present invention may be a hardly decomposable organic material having a benzene ring and can be efficiently decomposed in the vapor phase, so the decomposition step is repeated. Without decomposing the organic material, it is possible to recover metal impurities or non-metal impurities for analysis.
- the organic material is decomposed by ashing at a high temperature, so that an element that volatilizes at a high temperature cannot be recovered and used for analysis (for example, Reference 1 (see Hygiene Test Method, Note 2005, Edited by the Pharmaceutical Society of Japan, P391)).
- the gas phase decomposition method of the present invention it is possible to recover metal impurities and / or non-metal impurities that have been difficult to recover by the conventional decomposition method, and depending on the conventional decomposition method, It is also possible to decompose a hardly decomposable organic material that has been difficult to resolve. Furthermore, according to the vapor phase decomposition method of the present invention, impurities derived from the decomposition solution are prevented from being mixed into the decomposed organic material, and the metal impurities and / or non-metal impurities in the organic material are analyzed more accurately. Is possible.
- the method for analyzing an organic material according to the present invention includes an analysis step of detecting metal impurities and / or non-metal impurities in a measurement sample obtained by decomposing an organic material by the above-described vapor phase decomposition method according to the present invention. Is included.
- the metal element and / or non-metal element remaining by decomposing the organic material by the vapor phase decomposition method according to the present invention is recovered as a metal impurity and / or non-metal impurity, and is conventionally known as a measurement sample. Elemental analysis is performed by the measuring method. Examples of the method for elemental analysis of the measurement sample include inductively coupled plasma mass spectrometry (ICP-MS), inductively coupled plasma emission spectroscopy (ICP-AES), and atomic absorption spectrometry (AAS).
- ICP-MS inductively coupled plasma mass spectrometry
- ICP-AES inductively coupled plasma emission spectroscopy
- AAS atomic absorption spectrometry
- a metal sample and / or a non-metal impurity contained in an organic material can be more accurately analyzed by analyzing a measurement sample obtained by vapor phase decomposition of the organic material. Can be detected.
- the quality control method according to the present invention includes an analysis step for detecting metal impurities and / or non-metal impurities in a measurement sample obtained by decomposing an organic material by the above-described vapor phase decomposition method according to the present invention, An extraction step of extracting an organic material whose amount of metal impurities and / or non-metal impurities detected in the analysis step is equal to or less than a predetermined reference amount.
- the metal element and / or non-metal element remaining by decomposing the organic material by the vapor phase decomposition method according to the present invention is recovered as a metal impurity and / or non-metal impurity, and is conventionally known as a measurement sample. Elemental analysis is performed by the measuring method. Examples of the method for elemental analysis of the measurement sample include inductively coupled plasma mass spectrometry (ICP-MS), inductively coupled plasma emission spectroscopy (ICP-AES), and atomic absorption spectrometry (AAS).
- ICP-MS inductively coupled plasma mass spectrometry
- ICP-AES inductively coupled plasma emission spectroscopy
- AAS atomic absorption spectrometry
- an organic material in which the amount of metal impurities and / or non-metal impurities detected in the analysis step is equal to or less than a predetermined reference amount is extracted. That is, the organic material is selected based on the amount of metal impurities and / or non-metal impurities detected in the analysis step. In the extraction step, the organic material may be selected based on the type of metal element contained in the metal impurity detected in the analysis step or the type of non-metal element contained in the non-metal impurity.
- the quality control method of the present invention it is possible to accurately detect the metal impurities and / or non-metal impurities contained in the organic material, so that the organic material is selected based on the detection result.
- the quality of the organic material can be kept constant. Therefore, the quality control method according to the present invention is also suitable for quality control of organic materials used in the manufacture of organic electronics products, where more precise quality control is required.
- the production method according to the present invention includes an analysis step for detecting metal impurities and / or non-metal impurities in a measurement sample obtained by decomposing an organic material by the above-described vapor phase decomposition method according to the present invention, and the above analysis.
- An extraction step of extracting an organic material whose amount of metal impurities and / or non-metal impurities detected in the step is equal to or less than a predetermined reference amount, and an organic electronic device using the organic material extracted in the extraction step The manufacturing process of manufacturing.
- the metal element and / or non-metal element remaining by decomposing the organic material by the vapor phase decomposition method according to the present invention is recovered as a metal impurity and / or non-metal impurity, and is conventionally known as a measurement sample. Elemental analysis is performed by the measuring method. Examples of the method for elemental analysis of the measurement sample include inductively coupled plasma mass spectrometry (ICP-MS), inductively coupled plasma emission spectroscopy (ICP-AES), and atomic absorption spectrometry (AAS).
- ICP-MS inductively coupled plasma mass spectrometry
- ICP-AES inductively coupled plasma emission spectroscopy
- AAS atomic absorption spectrometry
- an organic material in which the amount of metal impurities and / or non-metal impurities detected in the analysis step is equal to or less than a predetermined reference amount is extracted. That is, the organic material is selected based on the amount of metal impurities and / or non-metal impurities detected in the analysis step. In the extraction step, the organic material may be selected based on the type of metal element contained in the metal impurity detected in the analysis step or the type of non-metal element contained in the non-metal impurity.
- organic electronic product (organic electronic device) is manufactured using the organic material extracted in the extraction process.
- organic electronics products include organic thin film solar cells, organic EL, and organic transistors (semiconductors).
- the production method according to the present invention can produce high-quality organic electronics products because the amount of metal impurities and / or non-metal impurities contained in the organic material extracted in the extraction step is below the reference amount. Yes, the product yield can be improved.
- the container according to the present invention is a container for decomposing an organic material, and has a sealed space for accommodating a decomposition solution for decomposing the organic material therein, and against a pressure for decomposing the organic material.
- An outer container portion that is pressure-resistant, and an inner container that is provided in the outer container portion and is formed of a material that is resistant to the decomposition solution, and in which the organic material is accommodated from the opened upper portion.
- the inner container is provided so that the decomposition liquid does not contact the inner wall when the decomposition liquid is accommodated in the outer container portion.
- FIG. 1 is a cross-sectional view illustrating a container for decomposing an organic material according to an embodiment of the present invention.
- the container 10 includes an outer container portion 1 and an inner container 4.
- the container 10 is used for decomposing the organic material 5.
- the container 10 may further include a support portion (not shown) including a table on which the inner container 4 is placed.
- the inner container 4 containing the organic material 5 is immersed in the decomposition solution 6 contained in the outer container part 1.
- the outer container part 1 has a sealed space for accommodating an organic material 5 and a decomposition solution 6 for decomposing the organic material 5 therein.
- the outer container part 1 is pressure resistant to the pressure applied to decompose the organic material 5 accommodated therein.
- the outer container part 1 is heat resistant with respect to the heat applied in order to decompose
- the pressure resistance against the pressure applied to decompose the organic material 5 means that when the pressure is applied to decompose the organic material 5, it is difficult to expand or soften, and the shape is constant. It is intended to keep and not deform.
- being heat resistant to the heat applied to decompose the organic material 5 means that when heated to decompose the organic material 5, it is difficult to elute or soften, and the shape remains constant and does not deform. Intended.
- the outer container part 1 has a double wall structure of an inner cylinder part 3 and an outer cylinder part 2 outside thereof.
- the inner cylinder portion 3 faces the sealed space and is formed of a material that is resistant to the decomposition solution 6.
- the inner cylinder portion 3 is formed of a material that is resistant to the decomposition solution 6 because the decomposition solution 6 is in direct contact with the decomposition solution 6 when the decomposition solution 6 is accommodated in the sealed space.
- the material that is resistant to the decomposition solution 6 is intended to be a material with less elution of metal components and / or non-metal components with respect to the decomposition solution 6, and metal components and / or with respect to the decomposition solution 6. It is more preferable that the material does not elute non-metallic components.
- Examples of the material that is resistant to the decomposition solution 6 include a fluororesin, platinum, or a ceramic material.
- PTFE polytetrafluoroethylene (tetrafluoride)
- PFA tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer
- PVDF polyvinylidene fluoride (difluoride)
- PCTFE polychlorotrifluoro Ethylene (trifluoride) etc.
- the ceramic material include alumina, zirconia, calcia, magnesia, yttria and the like.
- the shape of the inner cylinder part 3 is not particularly limited as long as a sealed space exists inside and the organic material 5 and the decomposition liquid 6 can be accommodated.
- the inner cylinder part 3 may be divided into two members, a lower part and a lid part, and the decomposition liquid 6 may be accommodated in the lower part, and the lid part may be placed and sealed so as to close it from above.
- the thickness of the lower wall, the side wall, and the upper wall of the inner cylinder part 3 is not particularly limited as long as it is a thickness capable of preventing outflow of the contained decomposition solution 6 and sealing the inner space.
- the outer cylinder part 2 is located outside the inner cylinder part 3 and is provided so as to wrap around the inner cylinder part 3. And the outer cylinder part 2 is pressure-proof with respect to the pressure for dissolving the organic material 5.
- FIG. Therefore, in order to decompose the organic material 5 accommodated therein, even if pressure is applied by heating and the inner cylinder part 3 is deformed, the outer cylinder part 2 has pressure resistance, so the outer container part The deformation of the entire 1 can be prevented.
- the outer cylinder portion 2 only needs to be pressure resistant and heat resistant to the pressure and heat for dissolving the organic material 5, and is formed of, for example, stainless steel.
- the outer cylinder part 2 should just be provided so that the inner cylinder part 3 may be wrapped at least at the time of pressurization and heating. That is, the outer cylinder part 2 is divided into two members, a lower part and a lid part. The inner cylinder part 3 is accommodated in the lower part, and the lid part is placed and sealed so as to close it from above. And may be subjected to heating.
- the thickness of the lower wall, the side wall, and the upper wall of the outer cylinder part 2 is not particularly limited as long as the desired pressure resistance and heat resistance can be obtained.
- the inner cylinder part 3 faces the sealed space in which the decomposition liquid 6 is accommodated, and the outer cylinder part 2 and the decomposition liquid 6 are not in contact with each other. It is possible to prevent the derived metal impurities and / or non-metallic impurities from dissolving into the decomposition solution 6 and causing contamination, and to suppress elution of metal impurities and / or non-metal impurities into the decomposition solution 6.
- the inner cylinder part 3 may be further formed into a two-layer structure to prevent the metal impurities and / or non-metal impurities derived from the outer cylinder part 2 from dissolving into the decomposition liquid 6 more reliably.
- the inner container 4 is formed of a material that is resistant to the decomposition solution 6 and is a columnar container having an open top.
- the organic material 5 is accommodated in the inner container 4 from the upper open part.
- the inner container 4 is provided in the outer container part 1 so that the decomposition solution 6 does not contact the inner wall. Since the inner container 4 is exposed to the decomposition liquid gas in which the decomposition liquid 6 is vaporized, the elution of the metal component and / or the non-metallic component is small with respect to the decomposition liquid 6 or the metal component with respect to the decomposition liquid 6. And / or it needs to be formed of a material that does not elute non-metallic components.
- Examples of the material that is resistant to the decomposition solution 6 constituting the inner container 4 include a fluororesin, platinum, or a ceramic material.
- PTFE polytetrafluoroethylene (tetrafluoride)
- PFA tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer
- PVDF polyvinylidene fluoride (difluoride)
- PCTFE polychlorotrifluoro Ethylene (trifluoride) etc.
- the ceramic material include alumina, zirconia, calcia, magnesia, yttria and the like.
- the inner container 4 is, for example, placed on a table (not shown) provided in the outer container part 1 and decomposed below the table positioned above the liquid surface of the decomposition liquid 6.
- the liquid 6 may be accommodated.
- the table is provided with a hole for allowing the decomposition gas to pass through, or the inner diameter of the table is made smaller than the inner diameter of the inner cylinder portion 3, and a gap is formed between the table and the inner wall of the inner cylinder portion 3. Therefore, it is preferable to provide a flow path for the decomposition liquid gas.
- a table may be provided on the upper part of a stand (not shown) provided so as to protrude from the bottom surface inside the outer container part 1, and provided so as to protrude from at least two places on the side wall of the inner cylinder part 3.
- the table may be provided to be supported from below by supporting pins (not shown). The height of the stand or the position of the support pin may be configured to be changeable.
- the inner container 4 and a decomposition liquid container (not shown) containing the decomposition liquid 6 may be placed adjacent to each other on the table. Furthermore, the inner container 4 may be placed on the lower side of the table, and the decomposition solution container containing the decomposition solution may be placed on the upper side of the table. That is, the inner container 4 may be configured such that the inner wall 4 does not come into contact with the decomposition liquid 6 and the organic material 5 in the inner container 4 is exposed to the decomposition liquid gas vaporized from the decomposition liquid 6.
- a decomposition liquid container it is formed with the material which is resistant to the decomposition liquid 6, and the thing in which a decomposition liquid is accommodated from the open
- a plurality of inner containers 4 may be provided in the outer container portion 1, whereby a plurality of organic materials 5 can be decomposed simultaneously.
- the size of the inner container 4 is not particularly limited as long as the organic material 5 accommodated therein is sufficiently large to be exposed to the decomposition liquid gas from which the decomposition liquid 6 is vaporized. Further, a small container having a smaller capacity than the inner container 4 may be accommodated in the inner container 4, and the organic material 5 may be accommodated in the small container for use in decomposition.
- the organic material 5 is accommodated in the inner container 4 provided in the pressure-resistant outer container part 1 that accommodates the decomposition solution 6, and the inside of the outer container part 1 is heated.
- the organic material 5 is vapor-phase decomposed by the decomposition liquid gas obtained by vaporizing the decomposition liquid 6. Therefore, metal impurities and / or non-metal impurities contained in the decomposition liquid 6, metal impurities and / or non-metal impurities attached to the inner wall of the outer container part 1 (inner wall of the inner cylinder part 3) and the inner wall of the inner container 4.
- it can prevent mixing in the measurement sample obtained by decomposing the organic material 5.
- the organic material 5 is decomposed using the container 10, it can be subjected to analysis for more accurately detecting a trace amount of metal impurities and / or non-metal impurities contained in the organic material 5.
- Example 1 Blank test
- a blank test of the gas phase decomposition method according to the present invention was performed.
- the blank test by performing the same treatment as the vapor phase decomposition using the container described in the embodiment without using an organic material, the metal impurities and / or non-metal impurities contained in the decomposition solution, and the outer container part It was investigated how much metal impurities and / or non-metal impurities adhering to the inner wall of the sample were mixed in the measurement sample.
- a decomposition solution As a decomposition solution, a mixed acid solution of 40% hydrofluoric acid and 68% nitric acid (1: 1) was used. The inner container was emptied, and the decomposition liquid was exposed to vaporized decomposition gas, and the inside of the outer container was heated at 200 ° C. for 5 hours to obtain high-temperature pressurization conditions.
- a SUS container was used as the outer cylinder, and a PTFE container was used as the inner cylinder.
- Two PTFE inner containers (VPD-1 and VPD-2) were placed in the outer container. The inner containers were taken out and nitric acid was added dropwise to collect metal impurities and / or non-metallic impurities in each inner container, and used as measurement samples.
- the above measurement sample was measured by ICP-MS (manufactured by PerkinElmer).
- the amounts of metal impurities and non-metal impurities contained in the measurement sample were as shown in Table 1.
- the values shown in Table 1 were calculated by multiplying the concentration (ng / g) measured by ICP-MS and the liquid amount (g) adjusted for the liquid. It described similarly also in the other Example described below.
- Example 2 Fullerene
- Gas phase decomposition was carried out using fullerene as the organic material.
- 7 mg of fullerene was accommodated and subjected to vapor phase decomposition.
- As the decomposition solution a mixed acid solution of 68% nitric acid and 96% sulfuric acid was used. High temperature pressurization conditions were obtained by heating at 230 ° C. After the decomposition treatment, the inner container was taken out, nitric acid was dropped and dissolved by heating, and metal impurities and / or non-metallic impurities in the inner container were collected to obtain a measurement sample.
- Example 3 5,6,11,12-tetraphenylnaphthacene
- Example 4 N, N′-diphenyl-N, N′-di (m-tolyl) benzidine
- Gas phase decomposition was performed using N, N′-diphenyl-N, N′-di (m-tolyl) benzidine (TPD) as the organic material. 9 mg of TPD was accommodated in the container described in the embodiment, and vapor phase decomposition was performed in the same manner as in Example 2. After the decomposition treatment, the inner container was taken out, nitric acid was dropped and dissolved by heating, and metal impurities and / or non-metallic impurities in the inner container were collected to obtain a measurement sample.
- TPD N, N′-diphenyl-N, N′-di (m-tolyl) benzidine
- Example 5 Tris (8-hydroxyquinolinate) aluminum (III)
- Gas phase decomposition was performed using tris (8-hydroxyquinolinate) aluminum (III) (Alq3) as the organic material. 10 mg of Alq3 was accommodated in the container described in the embodiment, and vapor phase decomposition was performed in the same manner as in Example 2. After the decomposition treatment, the inner container was taken out, nitric acid was dropped and dissolved by heating, and metal impurities and / or non-metallic impurities in the inner container were collected to obtain a measurement sample.
- Example 6 Comparison of sample decomposition
- each organic material shown in Table 6 was accommodated in the container shown in the embodiment and subjected to vapor phase decomposition.
- As the decomposition solution 68% nitric acid or a mixed acid solution of 68% nitric acid and 96% sulfuric acid was used. High temperature pressurization conditions were obtained by heating at 230 ° C. After the decomposition treatment, the inner container was taken out and nitric acid was added dropwise to confirm the presence or absence of precipitates in the inner container.
- microwave heating was performed by adding 68% nitric acid or a mixed acid solution of 68% nitric acid and 96% sulfuric acid to 10 mg of the organic material shown in Table 6.
- Microwave heating was performed using a microwave sample pretreatment apparatus (Milestone General). The sample solution after decomposition was heat-treated, nitric acid was added and dissolved by heating, the volume was made constant with water, and the presence or absence of a precipitate was visually confirmed.
- the present invention can be used for analysis of metal impurities and / or non-metal impurities of organic materials used in various fields.
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Abstract
Description
本発明に係る有機物材料の気相分解方法は、有機物材料と、当該有機物材料を分解する分解液とが接触しないように、当該有機物材料と当該分解液とを密閉容器内に収容する準備工程と、上記密閉容器内を加熱することによって加圧し、上記有機物材料を、上記分解液が気化した分解液ガスにより分解する分解工程とを包含している。
準備工程において、有機物材料と、有機物材料を分解する分解液とが直接接触しないように、有機物材料と分解液とを密閉容器内に収容する。例えば、密閉容器内に分解液を直接収容し、開口部を有する内容器内に収容した有機物材料を密閉容器内に収容する。このとき、有機物材料を収容した内容器の開口部が分解液の液面よりも上側に位置するように収容することによって、有機物材料と分解液とが接触しないように収容すればよい。
分解工程において、密閉容器内を加熱することによって加圧し、有機物材料を、分解液が気化した分解液ガスにより分解する。すなわち、有機物材料と分解液とが収容されて密閉された密閉容器内を加熱することによって加圧する。密閉容器内の加圧及び加熱は、従来公知の方法により好適に行うことができる。
本発明に係る気相分解方法は、分解工程において分解した有機物材料から、アルカリ金属、アルカリ土類金属、ランタノイド、アクチノイド、遷移金属、ほう素族、炭素族、ニクトゲンあるいはカルコゲンに属する少なくとも1つの元素が含まれる測定試料を回収する回収工程をさらに包含してもよい。
本発明に係る有機物材料の分析方法は、上述した本発明に係る気相分解方法により、有機物材料を分解して得られた測定試料中の金属不純物及び/又は非金属不純物を検出する分析工程を包含している。
本発明に係る品質管理方法は、上述した本発明に係る気相分解方法により、有機物材料を分解して得られた測定試料中の金属不純物及び/又は非金属不純物を検出する分析工程と、上記分析工程において検出された金属不純物及び/又は非金属不純物の量が、予め定められた基準量以下である有機物材料を抽出する抽出工程とを包含している。
本発明に係る製造方法は、上述した本発明に係る気相分解方法により、有機物材料を分解して得られた測定試料中の金属不純物及び/又は非金属不純物を検出する分析工程と、上記分析工程において検出された金属不純物及び/又は非金属不純物の量が、予め定められた基準量以下である有機物材料を抽出する抽出工程と、上記抽出工程において抽出された有機物材料を用いて有機電子機器を製造する製造工程とを包含している。
本発明に係る容器は、有機物材料を分解するための容器であって、内部に上記有機物材料を分解する分解液を収容する密閉空間を有し、上記有機物材料を分解するための圧力に対して耐圧性である外容器部と、上記外容器部内に設けられ、上記分解液に対して耐溶性である材料により形成されており、開放された上部から上記有機物材料が収容される内容器とを備え、上記内容器は、上記分解液が上記外容器部に収容されたときに、その内壁に上記分解液が接触しないように設けられている。
外容器部1は、内部に有機物材料5と、有機物材料5を分解する分解液6とを収容する密閉空間を有している。外容器部1は、内部に収容した有機物材料5を分解するために加えられる圧力に対して耐圧性である。また、外容器部1は、内部に収容した有機物材料5を分解するために加えられる熱に対して耐熱性であることが好ましい。
外容器部1は、内筒部3と、その外側の外筒部2との2重壁構造である。内筒部3は、密閉空間に面し、分解液6に対して耐溶性である材料により形成されている。内筒部3は、密閉空間に分解液6が収容されたとき、分解液6に直接接触するため、分解液6に対して耐溶性である材料により形成される。分解液6に対して耐溶性である材料とは、分解液6に対して金属成分及び/又は非金属成分の溶出が少ない材料を意図しており、分解液6に対して金属成分及び/又は非金属成分が溶出しない材料であることがより好ましい。
外筒部2は、内筒部3の外側に位置し、内筒部3を包みこむように設けられている。そして、外筒部2は、有機物材料5を溶解させるための圧力に対して耐圧性である。したがって、内部に収容した有機物材料5を分解するために、加熱して圧力が加えられ、内筒部3が変形したとしても、外筒部2が耐圧性を有しているため、外容器部1全体の変形を防ぐことができる。また、外筒部2は、有機物材料5を溶解させるために加えられる熱に対して耐熱性であることが好ましい。これにより、外容器部1の熱による変形を防ぐことができる。
内容器4は、分解液6に対して耐溶性である材料により形成されており、上部が開放された柱状の容器である。有機物材料5は上部の開放部分から内容器4内に収容される。内容器4は、その内壁に分解液6が接触しないように、外容器部1内に設けられている。内容器4は、分解液6が気化した分解液ガス中に曝されるので、分解液6に対して金属成分及び/又は非金属成分の溶出が少ない、又は、分解液6に対して金属成分及び/又は非金属成分が溶出しない材料により形成されている必要がある。
本発明に係る気相分解方法のブランク試験を行った。ブランク試験では、有機物材料を用いずに、実施形態に記載した容器を用いて気相分解と同様の処理を行うことによって、分解液に含まれる金属不純物及び/又は非金属不純物、及び外容器部の内壁に付着した金属不純物及び/又は非金属不純物が、測定試料にどれくらい混入するかを調べた。
有機物材料としてフラーレンを用いて、気相分解を行った。実施形態に記載した容器内にフラーレン 7mgを収容し、気相分解した。分解液としては、68%硝酸と96%硫酸との混酸溶液を用いた。230℃で加熱することで高温加圧条件とした。分解処理後内容器を取り出し、硝酸を滴下して加熱溶解し、内容器内の金属不純物及び/又は非金属不純物を回収して、測定試料とした。
有機物材料として5,6,11,12-テトラフェニルナフタセン(ルブレン)を用いて、本発明に係る気相分解方法と、比較例としてマイクロウェーブ法とのそれぞれにより分解した。
有機物材料としてN,N’-ジフェニル-N,N’-ジ(m-トリル)ベンジジン(TPD)を用いて、気相分解を行った。実施形態に記載した容器内にTPD 9mgを収容し、実施例2と同様に気相分解した。分解処理後、内容器を取り出し、硝酸を滴下して加熱溶解し、内容器内の金属不純物及び/又は非金属不純物を回収して、測定試料とした。
有機物材料としてトリス(8-ヒドロキシキノリネート)アルミニウム(III)(Alq3)を用いて、気相分解を行った。実施形態に記載した容器内にAlq3 10mgを収容し、実施例2と同様に気相分解した。分解処理後、内容器を取り出し、硝酸を滴下して加熱溶解し、内容器内の金属不純物及び/又は非金属不純物を回収して、測定試料とした。
本発明に係る気相分解方法と、比較例としてマイクロウェーブ法とのそれぞれによる有機物材料の分解性を比較した。分解後に沈殿物が生じた場合、有機物材料の分解が不十分であったと判断できるため、各分解方法による分解後に、有機物材料に由来する沈殿物が生じるか否かを評価した。
2 外筒部
3 内筒部
4 内容器
5 有機物材料
6 分解液
Claims (7)
- 有機物材料と、当該有機物材料を分解する分解液とが接触しないように、当該有機物材料と当該分解液とを密閉容器内に収容する準備工程と、
上記密閉容器内を加熱することによって加圧し、上記有機物材料を、上記分解液が気化した分解液ガスにより分解する分解工程と
を包含することを特徴とする気相分解方法。 - 上記密閉容器内に収容する上記有機物材料は、0.001mg以上、500mg以下であることを特徴とする請求項1に記載の気相分解方法。
- 上記分解工程において分解した上記有機物材料から、アルカリ金属、アルカリ土類金属、ランタノイド、アクチノイド、遷移金属、ほう素族、炭素族、ニクトゲン、又は、カルコゲンに属する少なくとも1つの元素が含まれる測定試料を回収する回収工程をさらに包含することを特徴とする請求項1又は2に記載の気相分解方法。
- 請求項1~3のいずれか1項に記載の気相分解方法により、有機物材料を分解して得られた測定試料中の不純物を検出する分析工程
を包含することを特徴とする有機物材料の分析方法。 - 請求項1~3のいずれか1項に記載の気相分解方法により、有機物材料を分解して得られた測定試料中の不純物を検出する分析工程と、
上記分析工程において検出された不純物の量が、予め定められた基準量以下である有機物材料を抽出する抽出工程と
を包含することを特徴とする有機物材料の品質管理方法。 - 請求項1~3のいずれか1項に記載の気相分解方法により、有機物材料を分解して得られた測定試料中の不純物を検出する分析工程と、
上記分析工程において検出された不純物の量が、予め定められた基準量以下である有機物材料を抽出する抽出工程と、
上記抽出工程において抽出された有機物材料を用いて有機電子機器を製造する製造工程と
を包含することを特徴とする有機電子機器の製造方法。 - 有機物材料を分解するための容器であって、
内部に上記有機物材料を分解する分解液を収容する密閉空間を有し、上記有機物材料を分解するための圧力に対して耐圧性である外容器部と、
上記外容器部内に設けられ、上記分解液に対して耐溶性である材料により形成されており、開放された上部から上記有機物材料が収容される内容器とを備え、
上記内容器は、上記分解液が上記外容器部に収容されたときに、その内壁に上記分解液が接触しないように設けられていることを特徴とする容器。
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04181143A (ja) * | 1990-11-15 | 1992-06-29 | Nec Kyushu Ltd | 試料回収装置 |
JP2002040009A (ja) * | 2000-07-28 | 2002-02-06 | Mitsubishi Materials Silicon Corp | シリコン基板中の微量不純物分析方法 |
JP2006140195A (ja) * | 2004-11-10 | 2006-06-01 | Toshiba Ceramics Co Ltd | シリコンウェーハの不純物分析方法及びそれに用いるシリコンウェーハの気相分解装置 |
JP2006228874A (ja) * | 2005-02-16 | 2006-08-31 | Sumco Corp | 貼り合わせsoiウェーハ表面金属不純物の評価方法 |
JP2008309491A (ja) * | 2007-06-12 | 2008-12-25 | Covalent Materials Corp | 基板の分解方法および評価方法ならびに基板分解装置 |
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---|---|---|---|---|
JPH04181143A (ja) * | 1990-11-15 | 1992-06-29 | Nec Kyushu Ltd | 試料回収装置 |
JP2002040009A (ja) * | 2000-07-28 | 2002-02-06 | Mitsubishi Materials Silicon Corp | シリコン基板中の微量不純物分析方法 |
JP2006140195A (ja) * | 2004-11-10 | 2006-06-01 | Toshiba Ceramics Co Ltd | シリコンウェーハの不純物分析方法及びそれに用いるシリコンウェーハの気相分解装置 |
JP2006228874A (ja) * | 2005-02-16 | 2006-08-31 | Sumco Corp | 貼り合わせsoiウェーハ表面金属不純物の評価方法 |
JP2008309491A (ja) * | 2007-06-12 | 2008-12-25 | Covalent Materials Corp | 基板の分解方法および評価方法ならびに基板分解装置 |
Cited By (1)
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---|---|---|---|---|
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