WO2014094514A1 - 高纯晶体二氧化硅的制备方法 - Google Patents

高纯晶体二氧化硅的制备方法 Download PDF

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WO2014094514A1
WO2014094514A1 PCT/CN2013/087200 CN2013087200W WO2014094514A1 WO 2014094514 A1 WO2014094514 A1 WO 2014094514A1 CN 2013087200 W CN2013087200 W CN 2013087200W WO 2014094514 A1 WO2014094514 A1 WO 2014094514A1
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silica
purity
parts
quartz
crystalline silica
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PCT/CN2013/087200
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French (fr)
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姜兴茂
张涛
贾泓
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常州大学
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Priority to US14/742,828 priority Critical patent/US9624110B2/en

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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/113Silicon oxides; Hydrates thereof
    • C01B33/12Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/126Preparation of silica of undetermined type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0053Details of the reactor
    • B01J19/0066Stirrers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/18Stationary reactors having moving elements inside
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/113Silicon oxides; Hydrates thereof
    • C01B33/12Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/18Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/16Oxides
    • C30B29/18Quartz
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B7/00Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions
    • C30B7/10Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions by application of pressure, e.g. hydrothermal processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049Controlling or regulating processes
    • B01J2219/00051Controlling the temperature
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00761Details of the reactor

Definitions

  • the invention relates to a method for preparing high-purity crystalline silica, belonging to the technical field of chemical industry.
  • Crystalline silica is a polymorph of ct-quartz (low-temperature quartz), ⁇ -quartz (high-temperature quartz), ex-cristobalite (low-temperature cristobalite), and ⁇ -cristobalite (high-temperature cristobalite).
  • Quartz/cristobalite is a hard, wear-resistant, chemically stable silicate mineral, usually milky white or colorless, translucent, hardness 7, brittle, shell-like fracture, grease luster, relative density 2.65, Electrical, thermal and certain mechanical properties have significant anisotropy.
  • Crystalline silica is chemically stable, insoluble in acid (except HF), slightly soluble in KOH solution, melting temperature 1710 ° C ⁇ 1756 ° C, and becomes quartz glass after cooling. Crystalline silica has high dielectric properties, high heat resistance, high hardness, excellent mechanical properties, chemical stability, low thermal expansion coefficient, good electrical insulation, and resistance to ultraviolet rays. It is widely used in high strength, super hardness and high toughness. High-tech new materials such as superplastic materials and insulating materials, electrode materials and superconducting materials, special low-temperature sintered refractories, and heat exchange materials.
  • Quartz/cristobalite powder is a good raw material for the manufacture of optical fibers.
  • Silicon micropowder naturally quartz or fused silica micropowder
  • High-purity quartz is the main raw material for producing high-performance materials such as monocrystalline silicon, polycrystalline silicon, quartz glass, optical fibers, solar cells, and integrated circuit substrates.
  • High-purity quartz sand is mainly used in industries such as quartz glass and integrated circuits, and its high-end products are widely used in large-scale and ultra-large scale integrated circuits, optical fiber, laser, military and aerospace industries.
  • the importance of high-purity quartz is also the preparation of metal silicon for polysilicon, making it a key raw material for crystalline silicon and its solar photovoltaic industry. Since these industries are related to the long-term development of the country, the strategic position of high-purity quartz is very important, and the processing technology of its high-end products is monopolized and restricted by the United States and Germany.
  • High-purity quartz is usually a high-end quartz mineral raw material processed with natural quartz mineral resources. Its main feature is that the purity of SiO 2 is extremely high, and metal ions such as iron, titanium, chromium, zirconium, lithium, potassium and sodium are hardly allowed. The inclusion hydroxyl (-OH) is present.
  • High-purity quartz generally uses natural crystal as raw material, and then it can be selected and purified to achieve quality indicators. begging.
  • high-grade quartz raw materials are in short supply, natural crystal reserves are decreasing year by year, and they are expensive and gradually depleted. Therefore, after the purification process, the quality index requirements can be met. Replacing natural crystal stones with other siliceous resources is of great practical significance.
  • the binder is usually an epoxy polymer
  • the filler is usually made of quartz powder, which optimizes the coefficient of thermal expansion and increases the modulus of elasticity.
  • the functional filler of quartz powder can improve the insulation properties, thermal conductivity, curing shrinkage, controllability of viscosity, arc resistance, mechanical damage resistance, compressive strength and chemical stability of the resin.
  • the quartz powder currently used for semiconductor packaging is crystalline quartz powder, fused silica and spherical quartz powder. Among them, crystalline quartz powder is used for low-grade molding compound, and molten quartz powder is used for high-grade molding compound. In order to reduce the thickness and environmental protection requirements of the chip package, the amount of quartz powder added to the molding compound is increasing.
  • the spherical powder used in China is mainly imported powder made of natural raw materials.
  • High-purity ultrafine silicon micropowder relies heavily on imports. Among them, the rubber industry is the largest user, and the coatings industry is an important application field with great potential.
  • Electronic plastic packaging materials, silicon substrate materials and electronic and electrical casting materials all rely on imports of high-purity ultrafine silicon micropowder raw materials.
  • the demand for crystalline silicon micropowder is expected to exceed 700,000 tons per year.
  • fused silica ceramics the annual domestic demand for silicon micropowder will reach 10,000 tons, and the market prospect is broad.
  • Ordinary 300 mesh silicon micropowder is only 600 yuan / ton, and 8000-10000 purpose ultra-fine high-purity electronic type of micro-powder for the price of up to 100,000 yuan / ton, if upgraded to nano-scale fine powder, the price is as high as 200,000 yuan / ton the above.
  • Quartz powder is usually ground from natural quartz.
  • Chinese patent application CN200710132668 describes a method for preparing high-purity quartz sand, which uses quartz sand as a basic raw material, and removes the surface of the sand by roasting and water-crushing the bulk material. And internal mineral foreign matter and re-baking, water-crushing to remove some combustible and soluble impurities in quartz sand, and finally removing most of the mineral foreign matter by acid leaching to obtain high-purity quartz sand.
  • the quartz sand produced by the method can be used for production. Polysilicon material. However, the fineness and particle size of this method are difficult to reach below 2 microns, the particle size distribution is also wide, and the sphericity is low.
  • quartz powder is also highly radioactive. In addition to the purity of the quartz mine itself, iron and nickel contamination is also caused during the grinding process.
  • Polycrystalline quartz can be grown in a few days at 50 ° C and 3 GPa.
  • Amorphous silica can also be crystallized into quartz crystals in supercritical water (400-800 ° C, 1000-300 atmospheres).
  • Chinese patent application CN200710132668 describes a method for producing large-sized artificial optical quartz crystal by hydrothermal method, which is grown in a high temperature autoclave. Growth temperature ⁇ 3 4 0 °C, pressure ⁇ 1500 atmospheres.
  • the chemically synthesized silicon micropowder is substantially free of radioactive alpha-ray contamination and can achieve uranium content below 0.02 ppm.
  • silica gel was hydrothermally crystallized with an aqueous solution of NaF and NaOH at 250-500 ° C and 1000 atm. They found that the best conditions for preparing nano-silica crystals were 25-35 nm silica gel, temperature 250-300 ° C, pressure 1000. Atmospheric pressure.
  • the growth method of quartz crystals is mainly high temperature and high pressure, so the equipment requirements are high.
  • the industry has not solved the production problem of high-purity crystalline silica spheres.
  • the technical problem to be solved by the present invention is that the silicon oxide particles contain a large amount of metal impurities/ions, high production cost, and radioactive contamination in the preparation process of the prior crystalline silicon oxide.
  • a novel method for preparing high-purity single crystal silica powder is provided, which has low production cost, and the prepared single crystal silicon oxide particles have high purity (99.999%), and further can achieve non-aggregation, monodispersion, spherical, etc.
  • a preparation method of high-purity crystalline silica is carried out according to the following steps: (1) mixing: uniformly mixing a silica sol and an organic base to obtain a mixed solution,
  • the silica colloidal solution particles in the step (1) are 5 ⁇ 25 ⁇ , and the silica colloidal solution preferably has a particle size ranging from 10 nm to 3000 nm;
  • the step (1) comprises 1 to 50 parts of silica, 3 to 90 parts of an organic base, and the balance of water, 100 parts by weight, based on the parts by weight of the mixed solution; preferably in parts by weight of the mixed solution
  • the amount of the silica is preferably in the range of 1 to 30 parts, and the amount of the organic base is preferably in the range of 15 parts to 30 parts, and the balance is 100 parts by weight
  • the reaction temperature in the step (2) is preferably in the range of 180 to 300 ° C.
  • the reaction time is preferably in the range of 8 to 168 hours.
  • the preferred embodiment of the base in the step (2) is selected from at least one of an organic base or a basic polymer; specifically, a fatty amine, an alcohol amine, an amide, an ester cyclic amine, an aromatic amine, a naphthyl amine or a polyethyleneimine.
  • an organic base or a basic polymer specifically, a fatty amine, an alcohol amine, an amide, an ester cyclic amine, an aromatic amine, a naphthyl amine or a polyethyleneimine.
  • a fatty amine specifically, a fatty amine, an alcohol amine, an amide, an ester cyclic amine, an aromatic amine, a naphthyl amine or a polyethyleneimine.
  • One or more kinds preferably one or more of ethylenediamine, ethanolamine, polyethyleneimine, and the like.
  • the crystalline silicon oxide obtained in the step (6) is highly pure. After hydrothermal treatment, the total content of metal impurities is greatly reduced, and the amount of 700 ppm and 50 ppm or more in the oxidized silica gel raw material is reduced to 100 ppm and less than 5 ppm, respectively.
  • a preferred technical solution in the above technical solution is to air-dry or dry the quartz powder washed with deionized water before drying.
  • a preferred embodiment of the above technical solution is to perform stirring during hydrothermal synthesis.
  • the invention adopts a high-purity and highly monodisperse silica colloid as a raw material, controls the concentration of the crystallization accelerator (organic alkali), ensures a proper growth rate, and controls the quantity density of the silica colloid in the hydrothermal synthesis system,
  • the crystallization temperature, the pH of the solution, and the surface charge of the silica particles control the coalescence of the silica particles during crystallization. Since an organic base is used as a crystallization agent in the crystallization process, excessive pH and silica solubility are avoided.
  • the addition of an organic base can adsorb/complex heavy metal ions in the reaction system and increase the purity of the final quartz powder.
  • the organic base can also form a protective layer on the surface layer of the silica, which provides favorable conditions for forming monodispersity of quartz.
  • the medium-temperature hydrothermal method avoids the high energy consumption caused by high temperature and high pressure, high equipment investment and safety problems, and high solubility of silica under high temperature and high pressure conditions, difficult nucleation, less nucleation, crystal growth Fast, the crystal size is too large, the condensation is serious, the sphericity is low, and the shape is irregular. Stirring the reaction system to ensure uniformity
  • the concentration and temperature distribution are favorable for mass transfer/heat transfer, ensuring the synthesis of spherical particles, avoiding the high concentration of crystalline silicon oxide and the concentration of silica particles at the bottom of the reactor due to the high density of crystal silicon, which is easy to agglomerate and grow.
  • the problem of larger porous large particles avoids the high energy consumption caused by high temperature and high pressure, high equipment investment and safety problems, and high solubility of silica under high temperature and high pressure conditions, difficult nucleation, less nucleation, crystal growth Fast, the crystal size is too large, the condensation is serious, the sphericity
  • the chemical synthesis method uses analytically pure raw materials, and the obtained nano- and sub-micron silica crystal particles have no radioactive alpha ray pollution, and can achieve uranium content of 0.02 ppb or less.
  • the size of the finished silica crystals can be controlled by adjusting the monodisperse silica colloid size, feed composition, and reaction temperature.
  • the crystal phase of the crystal such as cristobalite or quartz can be controlled by the type of crystallization agent and hydrothermal conditions.
  • the invention adopts the method of hydrothermal synthesis to prepare nano-scale and micro-scale single crystal silicon dioxide, and does not need to grind and classify the method, so the preparation method is simple, the production cost is low, and no alkali metal or alkaline earth metal salt is added in the preparation process. Also, no alkali metal or alkaline earth metal hydroxide is used.
  • organic amines aliphatic amines, alcohol amines, amides, ester cyclic amines, aromatic amines, naphthalene amines
  • PKI polyethyleneimine
  • the hydrothermal temperature is 8 ⁇ 168 hours under the stirring condition of the reaction temperature of 180 ⁇ 300 ° C; the hydrothermally synthesized silica particles are distributed in a monodisperse form, and the particle size is controllable, Between 5 ⁇ -25 ⁇ , good technical results have been obtained. Attachment
  • Example 1 is a transmission electron microscope image of a product after hydrothermal synthesis of Example 2;
  • Example 2 is an X-ray diffraction diagram of the product after the hydrothermal synthesis of Example 1 is quartz;
  • Figure 3 is a DLS diagram of the monodispersity of the product after hydrothermal synthesis in Example 5;
  • Fig. 4 is an X-ray diffraction diagram of the product after the hydrothermal synthesis of Example 2 is cristobalite.
  • the chemical element analysis of the purity of the silica, the purity of the crystalline silica is higher than 99.999%, and the total metal content is less than 8 ppm.
  • the obtained nano quartz powder has no radioactive alpha ray pollution, and the uranium content can be 0.02 ppb or less.
  • 1 is a transmission electron microscope image of a single crystal particle of a product after hydrothermal synthesis of Example 1.
  • FIG. 2 is a water heat of Example 1.
  • the X-ray diffraction pattern of the synthesized product proves that the product is ⁇ -quartz;
  • Fig. 3 is a test chart of the product DLS after hydrothermal synthesis of Example 1, indicating that the product has good monodispersity.
  • the product after hydrothermal synthesis is ⁇ -cristobalite. After drying, the powder sample XRD shows only X-square quartz diffraction peak. The chemical element analyzes the purity of silica, the purity of crystalline silica is higher than 99.999%, and the total metal The content of the nano-quartz powder is not contaminated by radioactive alpha ray, and the uranium content can be less than 0.02 ppb.
  • Figure 4 is the X-ray diffraction pattern of the product after hydrothermal synthesis in Example 2, which proves that the product is ex-square. Quartz.
  • the chemical element analysis of the purity of the silica, the purity of the crystalline silica is higher than 99.999%, and the total metal content is less than 5ppm.
  • the obtained nano quartz powder has no radioactive alpha ray pollution, and the uranium content can be 0.02 ppb or less.
  • the chemical element analysis of the purity of the silica, the purity of the crystalline silica is higher than 99.999%, and the total metal content is less than 10 ppm.
  • the obtained nano quartz powder has no radioactive alpha ray pollution and can achieve a uranium content of 0.02 ppb or less.
  • the obtained nano quartz powder has no radioactive alpha ray pollution and can achieve a uranium content of 0.02 ppb or less.
  • the chemical element analysis of the purity of the silica the purity of the raw material silica is 99.9283%, the purity of the crystalline silicon dioxide of the product is 99.9894%, and the metal content is reduced from 717 ppm to 106 ppm, which proves that the addition of the organic base during the hydrothermal treatment has a silicon oxide.
  • the purification of metal impurities in the particles is removed.
  • the obtained nano quartz powder has no radioactive alpha ray pollution and can achieve a uranium content of 0.02 ppb or less.
  • the chemical element analysis of the purity of the silica the purity of the raw material silica is 99.9951%, the purity of the product crystalline silica is 99.9995%, and the metal content is reduced from 49 ppm to 5 ppm, which proves that the addition of the organic base during the hydrothermal treatment has The removal of metal impurities is removed.

Abstract

本发明涉及高纯晶体二氧化硅的制备方法。将粒度为 5nm~25µm 二氧化硅胶体、有机碱(三乙胺、聚乙烯亚胺类高分子有机胺)聚醚酰亚胺均匀混合得到混合溶液,其中以混合溶液的重量份数计,含有 1~50 份的二氧化硅、3~90 份的有机碱、其余为水,共100份;在 180℃-300℃下水热反应 8~168小时;经过重力沉降或离心分离;水洗:用去离子水洗去残余的有机碱;干燥:在 60℃~80℃干燥;收集包装,得到高纯和单分散球形二氧化硅颗粒。晶体二氧化硅纯度均高于 99.999%,且金属总含量小于 10ppm。该方法生产成本低,降低氧化硅中金属杂质含量,制备的氧化硅颗粒具有单晶、高纯、无放射性的优点。

Description

高纯晶体二氧化硅的制备方法 技术领域
本发明涉及一种制备高纯晶体二氧化硅的方法, 属于化工技术领域。
背景技术
晶体二氧化硅,化学式 Si02, 是 ct-石英 (低温石英)、 β-石英 (高温石英) 、 ex-方石英 (低 温方石英)和 β-方石英 (高温方石英)等多晶型的总称。 石英 /方石英是一种坚硬、 耐磨、 化 学性能稳定的硅酸盐矿物,通常为乳白色或无色, 半透明状,硬度 7, 性脆, 贝壳状断口, 油脂光泽, 相对密度 2.65, 其电学、 热学和某些机械性均具有明显的异向性。 晶体二氧 化硅的化学性质稳定, 不溶于酸 (除 HF), 微溶于 KOH溶液中, 熔化温度 1710°C〜1756 °C, 冷却后即变为石英玻璃。 晶体二氧化硅具有有高介电、 耐热性好、 硬度大、 机械性 能优良, 化学稳定、 热膨胀系数低、 电绝缘性好, 抗紫外线等特性, 广泛应用于高强、 超硬、 高韧性、 超塑性材料和绝缘材料、 电极材料及超导材料、 特种低温烧结耐火材料, 热交换材料等高技术新材料。
石英 /方石英粉是制造光导纤维的优质原料。 硅微粉 (天然石英或熔融石英微粉) 具 有粒度小、 比表面积大、 分散性能好等特点。 以其优越的稳定性、 补强性、 增稠性和触 变性广泛应用于光学玻璃、 电子元器件以及超大规模集成电路封装、 电气绝缘、 高档陶 瓷、 油漆涂料、 精密铸造、 医药、 化装品、 橡胶、 移动通讯、 航空航天等生产领域, 享 有 "工业味精" "材料科学的原点"之美誉。 由于硅微粉颗粒细小, 纯度高, 在制玻生 产中易熔化、 时间短, 制品性能和外观质量均易达到标准。
高纯石英是生产单晶硅、 多晶硅、 石英玻璃、 光纤、 太阳能电池、 集成电路基板等 高性能材料的主要原料。 高纯石英砂主要应用在石英玻璃和集成电路等行业, 其高档产 品被广泛应用在大规模及超大规模集成电路、 光纤、 激光、 军事和航天工业。 高纯石英 的重要性还在于多晶硅用金属硅的制备,使之成为晶硅及其太阳能光伏产业的关键原料。 由于这些行业关系到国家的长远发展, 因此, 高纯石英的战略地位非常重要, 其高端产 品的加工技术被美国、 德国等所垄断并限制。
高纯石英通常是采用天然石英矿物资源加工的高端石英矿物原料产品, 其主要特征 是对 Si02纯度要求极高, 几乎不允许铁、 钛、 铬、 锆、 锂、 钾、 钠等金属离子和包裹体 羟基 (-OH)存在。
高纯石英一般选用天然水晶为原料, 再经过精选提纯加工后, 才能达到质量指标要 求。 但是, 在世界范围内, 高品级石英原料紧缺, 天然水晶储量逐年减少, 价格昂贵, 并逐渐趋向枯竭。 因此, 采用提纯加工后, 才能达到质量指标要求。 以其它硅质资源替 代天然水晶石具有非常重要实际意义。
随着微电子工业的迅猛发展, 中国已成为世界的封装大国。 而随着信息产业的发展, 集成电路向着超大规模、 超高速、 高密度、 大功率、 高精度、 多功能方向迅速发展, 以 及计算机、 通信、 汽车电子和其他消费类系统的蓬勃发展对微电子封装提出了更高的要 求。 超大规模集成电路对封装材料的要求也越来越高, 对石英粉的纯度、 细度和粒径分 布有严格的要求, 不仅要求对其超细, 而且要求其有高纯度、 低放射性元素含量。
由于现代电子封装的发展又促进集成电路和电子器件的发展, 封装对系统的影响已 变得和芯片一样重要, 封装成本在半导体销售值中所占比例越来越大, 各国在进一步加 大对芯片制造投入的同时, 竞相对封装技术的研究开发注入大量的资金, 电子封装呈现 出良好的发展态势。 据介绍. 为适应现代电子封装的要求, 环氧模塑料向着高纯度、 高 可靠性、 高导热、 高耐焊性、 高耐湿性、 高粘接强度、 高玻璃化温度、 低应力、 低膨胀、 低粘度、 环保型、 易加工型等新型材料方向发展。 今天所使用的大部分半导体封装材料 都是两相复合材料, 黏结剂通常是环氧基聚合物, 而填料通常使用的是石英粉, 这样可 以优化热膨胀系数和提高弹性系数。 此外, 石英粉这种功能填料可以提高树脂的的绝缘 性能、 导热性能、 固化收縮性能、 黏度的可控性、 抗电弧能力、 机械损伤性能、 抗压强 度和化学稳定性。 目前用于半导体封装的石英粉有结晶石英粉、 熔融石英和球形石英 粉. 其中, 结晶石英粉用于低档塑封料, 熔融和球形石英粉用于高档塑封料。 应芯片封 装向薄型化和环保的要求, 石英粉在塑封料中的加入量要求越来越高。
现在国内使用的球形粉主要是天然原料制成的进口粉。 高纯超细硅微粉大量依靠进 口。 其中, 橡胶行业是最大的用户, 涂料行业是重要有巨大潜力的应用领域, 电子塑封 料、 硅基板材料和电子电器浇注料对高纯超细硅微粉原料全部依靠进口。 在电子产品方 面, 对结晶型硅微粉的需求, 预计年需求量将超过 70万吨; 在熔融石英陶瓷方面, 国内 对硅微粉的年需求量将达万吨, 市场前景广阔。 普通 300 目硅微粉只有 600 元 /吨, 而 8000-10000 目的超细高纯电子类适用微粉价格却高达 10万元 /吨, 如果再升级至纳米级 微细粉吨价更高达 20万元 /吨以上。
石英粉通常由天然石英研磨而成。 中国专利申请 CN200710132668介绍一种制备高 纯石英砂的方法, 采用石英砂为基本原料, 通过对块状原料的焙烧、 水碎去除砂粒表面 和内部的矿异物以及再次焙烧、 水碎去除石英砂中的某些可燃和可溶性杂质, 最后通过 酸浸去除绝大多数的矿异物, 得到高纯石英砂, 该方法生产的石英砂可用来生产多晶硅 材料。 但此方法细度和粒径很难达到 2微米以下, 粒径分布也比较宽, 球形度低。 通常 石英粉放射性也高。 除了石英矿的本身纯度外, 研磨过程中也带来铁、 镍污染。
Okabayashi等人( Chemistry Letters, 34(1), 58-59, 2005)常压下 1000°C高温晶化处理 含微量氧化钙、 氧化钛的无晶形二氧化硅制得球形石英单晶。 Huang WL等人 (European Journal of Mineralogy, 15(5), 843-853, 2003)在海水或蒸馏水中在 50-450°C和 50 MPa 至 3GPa压力下可以合成多晶石英。 在 400°C下, 压力从 50 MPa升至 3GPa, 晶化速度提 高五个数量级。 高压能增强晶体成核。 在 50°C和 3GPa压力下, 几天内可以生长多晶石 英。无晶形二氧化硅也可以在超临界水 (400- 800° C , 1000-300 大气压)条件下晶化成为 石英晶体。 中国专利申请 CN200710132668介绍水热法生产大尺寸人造光学石英晶体的 方法, 在高温高压釜中生长。 生长温度〜 3 4 0 °C , 压力〜 1500 大气压。 化学法合成的 硅微粉基本没有放射性 α射线污染, 可做到 0.02PPb以下的铀含量。
Fyfe WS和 Mckay DS (American Mineralogist, 47(1-2), 83-89, 1962)发现 OH-能催化 无晶形二氧化硅的结晶。 在 330°C, 结晶速度与氢氧根离子的浓度的平方成正比。 基于 此, Lee等人 (Korean Journal of Chemical Engineering, 13(5), 489-495, 1996)在反应温度 240-450°C, 100-300 atm压力下, 以 KOH, NaOH, Na2C03, KF 以及 NaF为结晶剂生长 1-10 微米石英颗粒。
Balitsky等人 (High Pressure Research, 20(1-6), SI, 273-279, 2001)以单分散的二氧化硅 胶体为原料, 以 NaOH 为结晶剂生长水热法晶化成 α石英。 这些方法采用高温高压 (250-300°C, 100 MPa), 长出的石英尺寸较大, 结聚严重, 球形度低, 型状也不规则, 远远不能满足电子级超细高纯球形要求。
Schaf 等人 (Solid State Sciences, 8(6), 625-633, 2006)在 125- 220°C和 100 MPa水压下 处理二氧化硅胶体历时 5- 90 天合成纳米二氧化硅结晶。 Bertone 等人 (Hydrothermal synthesis of quartz nanocrystals, Nano Letters, 3(5), 655-659, 2003.)使用 NaOH水热合成亚 微米石英粉末。 通过透析、 过滤、 离心分离分级得到少量纳米石英颗粒。
Korytkova等人 (Inorganic Materials, 38(3), 227-235, 2002)发现以 NaF以及 NaOH的 水溶液在 250-500°C和 1000大气压下水热晶化处理二氧化硅凝胶。 他们发现制备纳米 二氧化硅晶体的最佳条件是选用 25-35纳米二氧化硅凝胶, 温度 250-300°C, 压力 1000 大气压。
Yanagisawa K等人 (Journal of Materials Science, 39(8), 2931-2934, 2004)研究发现在 低于 30(TC.时, 以 NaOH作为晶化剂水热处理二氧化硅凝胶可以得到单分散亚微米至数 微米的石英粉末。 由此可见, 选用 NaOH作为唯一的晶化剂水热法很难得到高度单分散 纳米二氧化硅结晶。
Bassett, Boucher 及 Zettlemoyer 在 1972 年( Journal of Materials Science, 7(12), 1379-1382, 1972). 碱金属氯化物 \有助于无晶形二氧化硅结晶。 在低于 1000°C, 无晶形二 氧化硅不会结晶。然而,当与 20%重量氯化锂混合 后, 700°C 2小时内可以形成 a-quartz。 与 NH4F、 NaF以及 KF相反, Shmulovich, Graham及 Yardley(Contributions to Mineralogy and Petrology, 141(1), 95-108, 2001)发现 NaCl或 KCl的加入大大降低了二氧化硅在水热 反应液的溶解度。 Newton和 Manning (Geochimica et Cosmochimica Acta, 57(9), 1993)研究 发现在 800°C 及 1000大气压下, NaCl的加入降低了 90%石英的溶解度。 姜兴茂等人有 关晶体生长的计算机模拟研究 (Ind. Eng. Chem. Res. 49(12): 5631-5643, 2010.)表明,高的反 应温度、 扩散系数及溶解度可以抑制晶核过早形成, 防止形成较多新的稳定晶核, 有利 于控制晶核的数量并生长少而大的单晶。 相反, 如果晶体在体系里的溶解度低, 成核容 易, 晶核的数量多, 长成的晶体也小。 所以, 为合成单分散纳米石英颗粒, 应当降低二 氧化硅在体系的溶解度并避免较高的反应温度和二氧化硅前驱体浓度。 姜兴茂等人 (中 国专利申请 201110034575.1 )通过添加 NaCl来控制晶体氧化硅间的团聚以提高颗粒的单 分散性。
总之, 到目前为此, 石英晶体的生长方法主要是高温高压, 因而设备要求高。 工业 界至今没有解决高纯晶体氧化硅球的生产问题。 迫切需要研究开发出一种低成本生产高 纯度、 低放射性元素含量、 亚微米及纳米石英颗粒的方法。
发明内容
本发明所要解决的技术问题是现有的晶体氧化硅制备过程中氧化硅颗粒含大量金属 杂质 /离子、 生产成本较高、 存在放射性污染的缺点。 提供一种新的制备高纯度单晶二氧 化硅粉的方法, 该方法生产成本低, 制备的单晶氧化硅颗粒具有高纯 (99.999%)、 进一 步也可达到无聚集、 单分散、 球形等特点。
为解决上述问题, 本发明采用的技术方案如下: 一种高纯晶体二氧化硅的制备方法, 按照以下步骤进行: ( 1 ) 混合: 将二氧化硅溶胶、 有机碱均匀混合得到混合溶液,
(2) 混合溶液在反应温度为 180°C及以上、 搅拌条件下或直接进行水热为 8〜168小时;
( 3 ) 将混合溶液重力沉降或离心分离得沉淀;
(4) 去离子水水洗: 将沉淀用用去离子水水洗去残余的碱;
( 5 ) 干燥: 水洗后的沉淀在 60°C〜120°C干燥;
( 6) 收集包装干燥产品, 得到高纯二氧化硅颗粒。
上述技术方案中, 其中步骤 (1 ) 中二氧化硅胶体溶液粒为 5ηηι〜25μηι, 二氧化硅 胶体溶液粒度优选范围为 10nm〜3000nm;
其中步骤 (1 ) 中以混合溶液的重量份数计, 含有 1〜50份的二氧化硅、 3〜90份的有机 碱、其余为水,共 100份;优选以混合溶液的重量份数计,二氧化硅的用量优选范围为 1〜 30份, 有机碱的用量优选范围为 15 份〜 30份, 其余为水, 共 100份; 步骤(2) 中反应 温度优选范围为 180〜300°C、 反应时间优选范围为 8〜168小时。
步骤(2) 中碱优选方案选自有机碱或碱性聚合物中的至少一种; 具体为脂肪胺、 醇 胺、 酰胺、 酯环胺、 芳香胺、 萘系胺或聚乙烯亚胺中的一种或几种, 优选乙二胺、 乙醇 胺、 聚乙烯亚胺等的一种或几种。
步骤 (6)制得的晶体氧化硅高纯。 经过水热处理, 金属杂质总含量大幅降低, 由氧 化硅胶体原料中的 700 ppm及 50 ppm以上分别降低到 100 ppm及 5 ppm以下。
上述技术方案中优选的技术方案为干燥前先将去离子水水洗后的石英粉末风干或晾 干。
上述技术方案中优选的技术方案为水热合成时进行搅拌。
本发明以高纯高度单分散二氧化硅胶体为原料, 控制晶化促进剂(有机碱) 的浓度, 保证了合适的生长速度, 通过控制二氧化硅胶体在水热合成体系里的数量密度、 晶化温 度、溶液 pH值及二氧化硅颗粒表面电荷, 控制二氧化硅颗粒在晶化过程中的聚结。 由于 晶化过程中采用有机碱作为晶化剂, 避免了过高的 pH及氧化硅溶解度。 有机碱的添加, 可以吸附 /络合反应体系中的重金属离子, 提高最终石英粉末的纯度。 有机碱也可以在二 氧化硅的表层形成保护层, 对形成石英的单分散性提供了有利条件。
采用中温水热法, 避免了高温高压条件下带来的高能耗, 高设备投资和安全性问题, 以及在高温高压条件下, 二氧化硅溶解度高, 成核难, 成核少, 晶体生长过快, 晶体尺 寸过大, 结聚严重, 球形度低, 型状不规则的问题。 对反应体系进行搅拌, 保证了均匀 的浓度、 温度分布, 有利于传质 /传热, 保证了球形颗粒的合成, 避免了由于晶体氧化硅 密度高、 重力沉降带来的氧化硅颗粒在反应釜底部浓度过高, 容易团聚长成较大多孔大 颗粒的问题。
本化学合成法采用分析纯原料,制得的纳米、亚微米二氧化硅晶体颗粒没有放射性 α 射线污染,可做到 0.02ppb以下的铀含量。通过调节单分散二氧化硅胶体大小,原料组成, 及反应温度, 可以控制成品二氧化硅晶体的大小。 晶体的晶相如方石英或石英可以通过 晶化剂种类及水热条件控制。
本发明由于采用水热合成的方法制备纳米级及微米级单晶二氧化硅, 不用磨碎分级 的的方法, 所以制备方法简单, 生产成本较低, 制备过程中没有添加碱金属或碱土金属 盐, 也没有使用碱金属或碱土金属的氢氧化物。 有机胺 (脂肪胺、 醇胺、 酰胺、 酯环胺、 芳香胺、 萘系胺) 以及它们的聚合物如聚乙烯亚胺 (PEI)的添加进一步去除了氧化硅溶胶 原料残留的微量金属离子, 保证最终晶体二氧化硅颗粒高纯度。采用本发明的设计方案, 在反应温度为 180〜300°C、搅拌条件下进行水热为 8〜168小时;水热合成的二氧化硅颗 粒呈单分散形态分布, 粒径可控, 可以在 5ηηι-25μηι之间, 取得了较好的技术效果。 附 图 说 明
图 1为实施例 2水热合成后产物透射电子显微镜图像;
图 2为实施例 1水热合成后产物为石英的 X-射线衍射图;
图 3为实施例 5水热合成后产物单分散性的 DLS图;
图 4为实施例 2水热合成后产物为方石英的 X-射线衍射图。
具体实施方式
下面通过实施例对本发明作进一步的阐述。
实施例 1
将 4克乙二胺加入到重 28.2克、 100纳米二氧化硅胶体溶液中, 以混合溶液的重量 百分比计最终二氧化硅浓度为 50%, 混合均匀。 然后, 将这混合物倒入聚四氟乙烯水热 反应釜中, 升温到 180°C, 搅拌, 恒温搅拌 168小时。 冷却后, 离心沉降, 去离子水水 洗 2次, 在 60 °C干燥, 收集。 XRD显示有 (X-石英衍射峰。
化学元素分析二氧化硅的纯度, 晶体二氧化硅纯度均高于 99.999%, 且金属总含量 小于 8ppm。 制得的纳米石英粉没有放射性 α射线污染, 可做到铀含量为 0.02ppb以下。 图 1为实施例 1水热合成后产物单晶颗粒的透射电子显微镜图像; 图 2为实施例 1水热 合成后产物 X-射线衍射图, 证明产物为 α-石英; 图 3为实施例 1水热合成后产物 DLS 测试图, 说明了产品的单分散性好。
实施例 2
将 4克乙醇胺加入到重 28.2克、 5纳米二氧化硅胶体溶液中, 以混合溶液的重量百 分比计最终二氧化硅浓度为 26%, 混合均匀。 然后, 将这混合物倒入聚四氟乙烯水热反 应釜中, 升温到 300°C, 搅拌, 恒温 8小时。 冷却后, 离心沉降, 去离子水水洗 2次, 在 60 °C干燥, 收集。
水热合成后产物为 α-方石英, 干燥后粉末样品 XRD显示仅有 (X-方石英衍射峰。 化学元素分析二氧化硅的纯度, 晶体二氧化硅纯度均高于 99.999%, 且金属总含量 小于 7ppm。 制得的纳米石英粉没有放射性 α射线污染, 可做到铀含量为 0.02ppb以下。 图 4为实施例 2水热合成后产物 X-射线衍射图, 证明了产物为 ex-方石英。
实施例 3
将 20克乙二胺加入到重 2.0克、 10微米二氧化硅胶体溶液中, 以混合溶液的重量百 分比计最终二氧化硅浓度为 1%, 混合均匀。然后, 将这混合物倒入聚四氟乙烯水热反应 釜中, 升温到 300°C, 搅拌, 恒温 14小时。 冷却后, 离心沉降, 去离子水水洗 2次, 在 80 °C干燥, 收集。 XRD显示有 (X-石英衍射峰。
化学元素分析二氧化硅的纯度, 晶体二氧化硅纯度均高于 99.999%, 且金属总含量 小于 5ppm。 制得的纳米石英粉没有放射性 α射线污染, 可做到铀含量为 0.02ppb以下。 实施例 4
将 1克聚乙烯亚胺加入到重 26克、 50纳米左右二氧化硅胶体溶胶中, 以混合溶液的 重量百分比计最终二氧化硅浓度为 20%, 混合均匀, 然后倒入聚四氟乙烯水热反应釜中, 升温到 300°C, 搅拌, 恒温 10小时。 冷却后, 离心沉降, 去离子水水洗 2次, 在 70 °C 干燥, 收集。 XRD显示仅有 α-石英的衍射峰。
化学元素分析二氧化硅的纯度, 晶体二氧化硅纯度均高于 99.999%, 且金属总含量 小于 10ppm。制得的纳米石英粉没有放射性 α射线污染,可做到铀含量为 0.02ppb以下。 实施例 5
将 3.2克聚乙烯亚胺加入到重 26克、 300纳米左右二氧化硅胶体溶胶中, 以混合溶 液的重量百分比计最终二氧化硅浓度为 20%, 混合均匀, 然后倒入聚四氟乙烯水热反应 釜中, 升温到 260°C, 搅拌, 恒温 12小时。 冷却后, 离心沉降, 去离子水水洗 2次, 在 70 °C干燥, 收集。 水热合成后产物为石英, XRD显示仅有 ex-石英的衍射峰。
制得的纳米石英粉没有放射性 α射线污染,可做到铀含量为 0.02ppb以下。化学元素 分析二氧化硅的纯度, 原材料二氧化硅的纯度为 99.9283%, 产物晶体二氧化硅纯度为 99.9894%, 金属含量从 717ppm降至 106ppm, 证明水热处理过程中有机碱的添加具有从 氧化硅颗粒中去除金属杂质的提纯作用。
实施例 5
将 4.2克聚乙烯亚胺加入到重 26克、 50纳米左右二氧化硅胶体溶胶中, 以混合溶液 的重量百分比计最终二氧化硅浓度为 20%, 混合均匀, 然后倒入聚四氟乙烯水热反应釜 中, 升温到 260°C, 搅拌, 恒温 13小时。 冷却后, 离心沉降, 去离子水水洗 2次, 在 70 °C干燥, 收集。 XRD显示仅有 (X-石英的衍射峰。
制得的纳米石英粉没有放射性 α射线污染,可做到铀含量为 0.02ppb以下。化学元素 分析二氧化硅的纯度, 原材料二氧化硅的纯度为 99.9951%, 产物晶体二氧化硅纯度为 99.9995%, 金属含量从 49ppm降至 5ppm, 证明水热处理过程中有机碱的添加具有从氧 化硅中去除金属杂质的提纯作用。

Claims

权利要求书
1. 一种高纯晶体二氧化硅的制备方法, 其特征在于按照以下步骤进行:
( 1 ) 混合: 将二氧化硅胶体溶液、 有机碱均匀混合得到混合溶液,
( 2 ) 混合溶液在反应温度为 180 °C及以上、 搅拌条件下直接进行水热反应, 反应时间 8〜168小时;
( 3 ) 将混合溶液重力沉降或离心分离得沉淀;
(4) 去离子水水洗: 将沉淀用用去离子水水洗去残余的碱;
( 5 ) 干燥: 水洗后的沉淀在 60°C〜80°C干燥;
( 6) 收集包装干燥产品, 得到球形高纯单晶氧化硅颗粒。
2. 根据权利要求 1所述的一种高纯晶体二氧化硅的制备方法, 其特征在于其中步骤 (1 ) 中二氧化硅胶体溶液粒为 5ηηι〜25μηι, 其中步骤 (1 ) 中以混合溶液的重量份数计, 含有 1〜50份的二氧化硅、 3〜90份的有机碱、 其余为水, 共 100份。
3. 根据权利要求 1所述的一种高纯晶体二氧化硅的制备方法, 其特征在于步骤 (1 ) 制得 的晶体氧化硅高纯。 经过水热处理, 金属杂质总含量大幅降低, 由氧化硅胶体原料中的 700 ppm及 50 ppm以上分别降低到 100 ppm及 5 ppm以下。
4. 根据权利要求 2 所述的一种高纯晶体二氧化硅的制备方法, 其特征在于二氧化硅胶体 溶液粒度范围为 10nm〜3000nm; 其中步骤 (1 ) 中混合溶液的重量份数计, 二氧化硅的 用量范围为 3〜30份, 有机碱的用量范围为 5 份〜 30份, 其余为水, 共 100份。
5. 根据权利要求 1所述的一种高纯晶体二氧化硅的制备方法, 其特征在于步骤 (2) 中反 应温度范围为 180〜300°C、 反应时间范围为 8〜168小时。
6. 根据权利要求 1所述的一种高纯晶体二氧化硅的制备方法, 其特征在于步骤 (2) 中有 机碱为脂肪胺、 醇胺、 酰胺、 酯环胺、 芳香胺、 萘系胺或聚醚酰亚胺中的一种或几种。
7. 根据权利要求 5所述的一种高纯晶体二氧化硅的制备方法, 其特征在于步骤 (2) 中有 机碱为乙二胺、 乙醇胺或聚乙烯亚胺的一种或几种。
8. 根据权利要求 1所述的一种高纯晶体二氧化硅的制备方法, 其特征在于步骤 (1 ) 中胶 体二氧化硅采用单分散颗粒时, 水热反应后氧化硅为大小均匀高纯单晶氧化硅颗粒。
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