WO2014084574A1 - 발열 분포 측정을 이용한 불량 분석 장치 및 방법 - Google Patents
발열 분포 측정을 이용한 불량 분석 장치 및 방법 Download PDFInfo
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- WO2014084574A1 WO2014084574A1 PCT/KR2013/010797 KR2013010797W WO2014084574A1 WO 2014084574 A1 WO2014084574 A1 WO 2014084574A1 KR 2013010797 W KR2013010797 W KR 2013010797W WO 2014084574 A1 WO2014084574 A1 WO 2014084574A1
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- distribution measurement
- heat distribution
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/72—Investigating presence of flaws
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Definitions
- the present invention relates to a failure analysis apparatus and method using a heat generation distribution measurement, and more particularly, the sub-micron spatial resolution, local heat generated by a defect (or failure) such as a semiconductor device,
- the present invention relates to a defect analysis apparatus and method for measuring in a non-contact manner and superimposing a semiconductor micropattern image to track and analyze defect locations with high accuracy.
- defects include mask misalignment, impurity concentration, non-uniformity within the wafer such as thin film thickness, and micro defects in the wafer.
- defects include short circuits of metal, increased local resistance, abnormal contact resistance, and microplasma oxide. Microplasma leakage, oxide breakdown, and device latch-up.
- the operation of identifying the cause of the defect when the defect occurs in the semiconductor device is as follows. First, after the completion of the manufacturing process, the electrical defects of the device are checked, and the location of the defects is tracked with precision within several micros using various non-destructive methods (Thermal emission microscopy, photon emission microscopy, scanning acoustic microscopy, etc.). Will be performed. After that, the semiconductor wafer is cut at the point where the defect is suspected by using a focused ion beam (FIB), and the cut section is magnified and observed using a scanning electron microscope (SEM) or using a component analysis device. Analyze the cause of the defect.
- FIB focused ion beam
- SEM scanning electron microscope
- the physical limit of the spatial resolution due to the optical diffraction limit is about 3 ⁇ m, and there is a limit in the defect location tracking precision of the micro pattern semiconductor.
- a new principle rather than the existing mid-infrared heat radiation detection method, irradiates the sample with light having a short wavelength in the ultraviolet or visible light band through an optical microscope and reflects the distribution of the change in reflectance caused by local heat generation of the sample.
- Thermo-reflectance microscopy technique which measures the exothermic distribution of a sample, has been reported in various ways, and heat distribution measurement / analysis techniques of semiconductor devices using the same have been reported.
- thermoreflectance thermography discloses the invention of improving the spatial resolution of a thermal image by adding a confocal microscope principle to a thermal reflection microscope principle.
- the surface of the semiconductor device such as a metal, a dielectric, a semiconductor material may be exposed to a variety of materials, there is a problem that it is not easy to effectively measure the heat distribution of various materials when measuring the heat distribution using a general heat reflection microscope.
- an object of the present invention is to provide a new failure analysis method that has not been proposed in the case of failure analysis that can use the exothermic phenomenon.
- Another object of the present invention is to enable local heating distribution resulting from defects in semiconductor devices to be measured in a spatial resolution of 1 ⁇ m or less and in a non-contact manner.
- Another object of the present invention is to provide a means for tracking and analyzing defect locations with high accuracy by overlapping with a semiconductor micropattern image.
- Another object of the present invention is to provide a means for more effectively measuring the heat distribution of various materials exposed to semiconductor devices and the like.
- the first aspect of the present invention comprises a sample mounting unit for mounting a sample to check whether or not through the heat distribution characteristics; A light source for irradiating the visible light to a sample; A power supply unit generating a driving signal for causing periodic heat generation at a defective point of the sample; A first detector detecting light reflected from a surface of the sample; And a signal generator for synchronizing driving signals of the detector and the power supply unit.
- the apparatus further includes a controller and an image processor, wherein the controller measures a change in reflectance due to temperature change at a point of failure of the sample by a phase-locked heat reflection method and converts it into a heat distribution.
- the control unit and the image processing unit obtain a thermal distribution according to the wavelength to derive a wavelength range that can most appropriately observe the thermal distribution at the point of failure of the sample.
- the analysis apparatus may further include a first optical splitter, and transmits the beam emitted from the light source unit to the sample unit and delivers the beam transmitted from the sample unit to the detector.
- the detection unit is preferably triggered at multiple times the period for temperature-modulating the sample.
- the analyzer further includes a second optical splitter, and performs a function of transferring the beam transmitted from the sample unit to the second detector, a spectrometer may be further provided in front of the second detector.
- the second aspect of the present invention comprises the steps of irradiating the sample with visible light to the sample to determine whether or not through the exothermic distribution characteristics; Supplying power to generate a driving signal for causing periodic heat generation at a defective point of the sample; And detecting light reflected from the surface of the sample, and generating a signal for synchronizing driving signals of the detector and the power supply unit.
- the method further comprises the step of measuring the change in reflectance due to the temperature change at the point of failure of the sample by a phase-locked heat reflection method and converting it into a heat distribution.
- the method further includes the step of measuring the wavelength dependence of the thermal reflection coefficient using the beam transmitted from the sample unit and calculating the optimum wavelength.
- the method may further include transmitting a beam emitted from the light source unit to the sample unit and transferring a beam transmitted from the sample unit to the detector.
- the detector may further include triggering a plurality of times a period for temperature-modulating the sample.
- semiconductor manufacturing companies in order to accurately track the defect location requires a higher spatial resolution than the current defect inspection equipment has the effect that can meet this.
- FIG. 1 is a schematic diagram showing the configuration of a failure analysis apparatus according to an embodiment of the present invention.
- FIG. 2 is an image of measuring a heat distribution with respect to a failure analysis position according to an exemplary embodiment of the present invention.
- FIG 3 is a graph illustrating an example in which the heat reflection coefficient is changed for each wavelength due to the interference effect of light of the semiconductor device.
- Figure 4 is a comparison image of the semiconductor defect inspection equipment by other equipment commercially available thermal distribution image according to the present invention.
- FIG. 1 is a schematic diagram showing the configuration of a failure analysis apparatus according to an embodiment of the present invention.
- a failure analysis apparatus may include a light source unit 100, a sample unit 200, a first detection unit 300, a control unit and an image processing unit 400, a power supply unit 500,
- the signal generator 600 includes a lock-in correlator (not shown), a first optical splitter 237, and various lenses 233, 235, and 239.
- the present invention may further include a second optical splitter 250, a spectrometer 265, and a second detector 310.
- the additional part is a part for selecting the optimum wavelength for each sample by detecting the wavelength dependence of the reflectance change according to the temperature change of the sample by performing the detection by the second detector 310 through the spectroscope 265 for each wavelength. to be.
- This part is not an essential part of the present invention, but it can play a more effective role in failure analysis. This will be described later in detail.
- the light source 100 is a light source that provides light in which light rays having a plurality of wavelengths are mixed in the visible light wavelength region.
- the type includes a wavelength filter (not shown) that selects only a certain wavelength together with a light source capable of obtaining a broad wavelength line width, such as white light having multiple rays, an LED, a solid light source, or a specific line width of about 10 nm to 50 nm. LEDs having a line width can be used.
- the emission region of the light source 100 may include a collimating lens 239 for emitting the light source as a parallel beam.
- the first and second detectors 300 and 310 may include a plurality of optical signal detectors including a charged coupled device (CCD), a photo detector, an avalanche photo diode (APD), and a photo multiplier tube (PMT). .
- CCD charged coupled device
- APD avalanche photo diode
- PMT photo multiplier tube
- the first optical splitter 237 transmits the beam emitted from the light source unit 100 to the sample unit 200 and transmits the beam transmitted from the sample unit 200 to the first detection unit 300. It is.
- the optical splitter 237 is not directly required for the exothermic temperature distribution measurement, and thus can be selectively removed.
- the second optical splitter 250 distributes the beam transmitted from the sample to the first detector 300 and the second detector 310.
- the controller and the image processor 400 may include a signal generator 600 for synchronizing the power supply unit 500, the first and second detectors 300 and 310, and the control of the power supply unit 500, and the measured signal processor (not shown). It consists of hardware and software, including).
- the connection lines of the system control unit and the image processing unit 400 are schematically illustrated and may be implemented to include a function of controlling them through connection with a detection unit, a vacuum chamber, a light source, etc. in an actual implementation.
- the controller and the image processor 400 may be connected to the second detector 310 and may be synchronized, or may not be synchronized. This approach is explained further.
- the temperature change on the front surface of the sample may be changed by using a thermoelectric cooler (TEC) to which the sample is attached.
- TEC thermoelectric cooler
- phase-locked thermal reflection can be used to measure the wavelength dependence of reflectance change with temperature change, and a method of obtaining and averaging multiple images at each temperature (for example, 20 degrees, 30 degrees, 40 degrees, etc.) can be used.
- the thermoelectric element driving signal and the second detection unit need to be synchronized, and in the latter case, the synchronization is not necessary.
- an electrical signal is applied to an object having a heat distribution, and at the same time, visible light is irradiated to the object through an optical microscope and a transparent window to detect the distribution of reflected light with a CCD camera, for example, to generate a heat distribution of the object.
- the heat distribution of the object is measured by measuring the reflectance distribution according to the phase lock thermal reflection method.
- the sample is temperature-modulated by a specific frequency f, and is configured by the power supply 500 to apply a periodic drive signal such that the heating and cooling are repeated periodically.
- a periodic temperature change of the sample is generated by the driving signals of the periodic heating and cooling.
- the CCD which is the first detection unit 300 can detect the light reflected from the sample.
- the CCD, which is the first detection unit 300 is triggered in multiple times (eg, two times or more) of the period for temperature-modulating the sample, and thus multiple times (eg, two times or more) in the period of temperature modulation of the sample.
- the data secured through the CCD is sent to the controller and the image processor 400 to process the data.
- the signal generator 600 modulates the sample by a specific frequency, and the CCD of the first detector 300 synchronizes to trigger a plurality of times (eg, two or more times) a period of temperature-modulating the sample. It is a function to perform a task.
- the amount of change in temperature has a relation proportional to the rate of change in reflectance, and in this case, k has a value of about 10 -2 to 10 -5 as a heat reflection coefficient. . That is, the exothermic temperature distribution can be measured through the change in reflectance.
- the measured result indicates relative thermal distribution information according to the type of sample.
- each material has a characteristic of varying an appropriate wavelength band. Therefore, it is desirable to vary the appropriate wavelength band according to the material or region to be measured. In the case of continuously monitoring a semiconductor substrate on which a certain pattern is formed, it is necessary to select an appropriate wavelength band in advance and continuously use it. In addition, when measuring an object that does not know the appropriate wavelength band, it may be effective to use the spectrometer 265 and the second detector 310.
- the thermal distribution image may be obtained for each wavelength using the spectrometer.
- the appropriate wavelength band is calculated according to the object (or a specific region of the object), and the object is measured in the corresponding wavelength band using the same.
- FIG. 2 is an image of measuring a heat distribution with respect to a failure analysis position according to an exemplary embodiment of the present invention.
- the method according to the embodiment of the present invention in the case of a metal wiring short circuit, contact resistance abnormality, etc. of the semiconductor device, heat is generated and it can be accurately tracked.
- the local heat distribution generated from the defect of the micropattern semiconductor element is measured by a spatial resolution of 1 ⁇ m or less and a non-contact method, and the defect position is accurately tracked and analyzed by overlapping with the semiconductor micropattern image.
- the material constituting the sample surface is varied, and most of them have a multilayer structure, so the wavelength dependence of the heat reflection coefficient is very large.
- the value of the thermal reflection coefficient changes rapidly according to the wavelength of light.
- the value of the thermal reflection coefficient changes rapidly even with the change of the protective film thickness of several nanometers. Therefore, depending on the wavelength of light used to measure the heat reflection of the sample, the use of light with a wavelength whose heat reflection coefficient value is close to 0 may not be possible to measure the heat distribution. On the contrary, when the light having the maximum heat reflection coefficient is used. High sensitivity heating distribution measurement is possible.
- the wavelength of the light used in the measurement, the type of sample material, and the sample having a multi-layer structure may vary depending on the thickness of the layer as well as the material of the layer due to the interference effect of light occurring in the multi-layer structure.
- FIG. 3 is a graph showing an example in which the heat reflection coefficient is changed for each wavelength due to the interference effect of light of the semiconductor device, and the heat reflection coefficient according to the wavelength of the SiNx passivation layer / Poly-Si / SiO 2 / Si substrate structure. Referring to FIG. 3, it may be confirmed that the heat reflection coefficient may change rapidly according to the wavelength of light used for the heat reflection measurement, and even the heat reflection coefficient may have a wavelength close to zero.
- a second light splitter In the heat reflection microscope system, a second light splitter, a reflector, a light receiving lens, and a spectroscopic imaging system are provided to measure a spectrum of light reflected from a sample surface.
- the spectrum of the relative reflectance change on the surface of the sample.
- Figure 4 is a comparison image of the semiconductor defect inspection equipment by other equipment commercialized by the prior art. The image of FIG. 4 is provided for comparison with the image of FIG. 2.
- the analysis apparatus according to the present invention can measure hot spots generated from microdefects with high magnification and high resolution.
- the spatial resolution The physical limit of 3 ⁇ m was compared to the limit of defect tracking accuracy of highly integrated and fine pattern semiconductors.
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Claims (12)
- 발열 분포 특성을 통해 불량 여부를 확인하고자 하는 시료를 탑재하는 시료 탑재부;상기 가시광을 시료에 조사시키기 위한 광원;상기 시료의 불량지점에서 주기적인 발열을 야기 시키기 위한 구동신호를 발생시키는 전원공급부;상기 시료의 표면으로부터 반사된 빛을 검출하는 제1 검출부; 및상기 검출부와 전원공급부의 구동신호를 동기화를 위한 신호발생기를 포함하는 발열 분포 측정을 이용한 불량 분석 장치.
- 제1 항에 있어서,제어부 및 영상처리부를 더 포함하되,상기 제어부는 시료의 불량지점에서 온도변화에 의한 반사율 변화를 측정하고 이를 열분포로 변환하는 발열 분포 측정을 이용한 불량 분석 장치.
- 제2 항에 있어서,제어부 및 영상처리부는, 상기 시료의 불량 지점에서 파장에 따른 열분포를 획득하는 발열 분포 측정을 이용한 불량 분석 장치.
- 제1 항에 있어서,제1 광분배기를 더 포함하고,상기 광원부로부터 출사되는 빔을 시료부에 전달하고 시료부로부터 전달되어 온 빔을 검출부로 전달하는 기능을 수행하는 것을 특징으로 하는 발열 분포 측정을 이용한 불량 분석 장치.
- 제1 항에 있어서,상기 검출부는 시료를 온도-모듈레이션 시키는 주기의 복수배로 트리거되는 것을 특징으로 하는 발열 분포 측정을 이용한 불량 분석 장치.
- 제1 항에 있어서,제2 광분배기를 더 포함하고,상기 시료부로부터 전달되어 온 빔을 제2 검출부로 전달하는 기능을 수행하고, 제 2 검출부 전단에는 분광기가 더 구비되는 발열 분포 측정을 이용한 불량 분석 장치.
- 제1 항에 있어서,상기 광원으로 통해서 나온 광이 선택적인 파장의 광을 전달하기 위해 필터를 더 포함하는 발열 분포 측정을 이용한 불량 분석 장치.
- 발열 분포 특성을 통해 불량 여부를 확인하고자 하는 시료에 가시광을 시료에 조사하는 단계;상기 시료를 주기적으로 발열을 야기 시키기 위한 구동신호를 발생시키기 위해 전원을 공급하는 단계; 및상기 시료의 표면으로부터 반사된 빛을 검출하고, 상기 검출부와 전원공급부의 구동신호를 동기화를 위한 신호를 발생하는 단계를 포함하는 발열 분포 측정을 이용한 불량 분석 방법.
- 제8 항에 있어서,상기 시료의 반사율 변화로부터 위상잠금 열반사법으로 측정하고 이를 열분포로 변환하는 단계를 더 포함하는 발열 분포 측정을 이용한 불량 분석 방법.
- 제8 항에 있어서,상기 광원부로부터 출사되는 빔을 시료부에 전달하고 시료부로부터 전달되어 온 빔을 검출부로 전달하는 단계를 더 포함하는 발열 분포 측정을 이용한 불량 분석 방법.
- 제8 항에 있어서,상기 검출부는 시료를 온도-모듈레이션 시키는 주기의 복수배로 트리거하는 단계를 더 포함하는 발열 분포 측정을 이용한 불량 분석 방법.
- 제8 항에 있어서,상기 시료부로부터 전달되어 온 빔을 이용하여 파장별로 열반사 계수 변화를 산출하는 단계를 더 포함하는 발열 분포 측정을 이용한 불량 분석 방법.
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JP2015543997A JP2016502082A (ja) | 2012-11-27 | 2013-11-26 | 発熱分布測定を利用した不良分析装置及び方法 |
US14/647,772 US9933376B2 (en) | 2012-11-27 | 2013-11-26 | Apparatus and method for analyzing defects by using heat distribution measurement |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3190395A4 (en) * | 2014-09-03 | 2018-04-25 | Korea Basic Science Institute | Temperature distribution measuring device and method |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9927350B2 (en) * | 2013-10-17 | 2018-03-27 | Trustees Of Boston University | Thermal property microscopy with frequency domain thermoreflectance and uses thereof |
KR101533588B1 (ko) * | 2014-06-19 | 2015-07-03 | 한국광기술원 | 발광 소자 불량 검출 장치 및 방법 |
KR101528200B1 (ko) * | 2014-12-30 | 2015-06-12 | 한국기초과학지원연구원 | 3차원 열영상 측정 장치 및 방법 |
US10180359B2 (en) * | 2017-01-29 | 2019-01-15 | Microsanj, LLC | Method and system for calibrating thermal imaging systems |
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CN109030546B (zh) * | 2018-07-23 | 2019-09-20 | 清华大学 | 高温变形和温度测量系统和方法 |
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US11338390B2 (en) * | 2019-02-12 | 2022-05-24 | Lawrence Livermore National Security, Llc | Two-color high speed thermal imaging system for laser-based additive manufacturing process monitoring |
US11654635B2 (en) | 2019-04-18 | 2023-05-23 | The Research Foundation For Suny | Enhanced non-destructive testing in directed energy material processing |
JP7331732B2 (ja) * | 2020-02-25 | 2023-08-23 | 三菱電機株式会社 | アバランシェフォトダイオードの評価方法 |
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CN113008936B (zh) * | 2021-03-23 | 2022-10-04 | 深圳市梯易易智能科技有限公司 | 一种利用红外热成像识别基材与脏污的方法 |
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KR102528823B1 (ko) * | 2021-11-18 | 2023-05-04 | 한국기초과학지원연구원 | 시분해 열영상 측정 장치 및 방법 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040032581A1 (en) * | 2002-01-15 | 2004-02-19 | Mehrdad Nikoonahad | Systems and methods for inspection of specimen surfaces |
WO2009149103A1 (en) * | 2008-06-03 | 2009-12-10 | Jeong Hwan J | Interferometric defect detection and classification |
KR20100058012A (ko) * | 2008-11-24 | 2010-06-03 | 참앤씨(주) | 불량 검사를 위한 광학 시스템 |
US20120035863A1 (en) * | 2009-05-01 | 2012-02-09 | Shin-Etsu Handotai Co., Ltd. | Inspection method of soi wafer |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9618897D0 (en) | 1996-09-10 | 1996-10-23 | Bio Rad Micromeasurements Ltd | Micro defects in silicon wafers |
US20100279213A1 (en) * | 2000-05-04 | 2010-11-04 | Kla-Tencor Corporation | Methods and systems for controlling variation in dimensions of patterned features across a wafer |
US6806951B2 (en) | 2000-09-20 | 2004-10-19 | Kla-Tencor Technologies Corp. | Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen |
US6891627B1 (en) * | 2000-09-20 | 2005-05-10 | Kla-Tencor Technologies Corp. | Methods and systems for determining a critical dimension and overlay of a specimen |
US7173245B2 (en) | 2001-01-04 | 2007-02-06 | The Regents Of The University Of California | Submicron thermal imaging method and enhanced resolution (super-resolved) AC-coupled imaging for thermal inspection of integrated circuits |
JP2003007792A (ja) * | 2001-06-27 | 2003-01-10 | Seiko Epson Corp | 半導体解析装置、半導体解析方法及び半導体装置の製造方法 |
AU2002366137A1 (en) * | 2001-11-19 | 2003-06-10 | The Circle For The Promotion Of Science And Engineering | Method for thermal analysis and system for thermal analysis |
JP2006071424A (ja) * | 2004-09-01 | 2006-03-16 | National Institute Of Advanced Industrial & Technology | ナノ薄膜熱物性測定方法および測定装置 |
US7429735B2 (en) | 2005-03-15 | 2008-09-30 | Mass Institute Of Technology (Mit) | High performance CCD-based thermoreflectance imaging using stochastic resonance |
JP2007071803A (ja) * | 2005-09-09 | 2007-03-22 | Hitachi High-Technologies Corp | 欠陥観察方法及びその装置 |
WO2008137848A2 (en) | 2007-05-04 | 2008-11-13 | Masschusetts Institute Of Technology (Mit) | Optical characterization of photonic integrated circuits |
US7673732B2 (en) | 2007-09-28 | 2010-03-09 | Pro Engineering & Manufacturing, Inc. | Transfer plate and method of interfacing to a belt |
-
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040032581A1 (en) * | 2002-01-15 | 2004-02-19 | Mehrdad Nikoonahad | Systems and methods for inspection of specimen surfaces |
WO2009149103A1 (en) * | 2008-06-03 | 2009-12-10 | Jeong Hwan J | Interferometric defect detection and classification |
KR20100058012A (ko) * | 2008-11-24 | 2010-06-03 | 참앤씨(주) | 불량 검사를 위한 광학 시스템 |
US20120035863A1 (en) * | 2009-05-01 | 2012-02-09 | Shin-Etsu Handotai Co., Ltd. | Inspection method of soi wafer |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3190395A4 (en) * | 2014-09-03 | 2018-04-25 | Korea Basic Science Institute | Temperature distribution measuring device and method |
US10139284B2 (en) | 2014-09-03 | 2018-11-27 | Korea Basic Science Institute | Temperature distribution measuring apparatus and method |
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JP2016502082A (ja) | 2016-01-21 |
KR101336946B1 (ko) | 2013-12-04 |
US20150316496A1 (en) | 2015-11-05 |
US9933376B2 (en) | 2018-04-03 |
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