WO2014024690A1 - Robot industriel - Google Patents

Robot industriel Download PDF

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Publication number
WO2014024690A1
WO2014024690A1 PCT/JP2013/070160 JP2013070160W WO2014024690A1 WO 2014024690 A1 WO2014024690 A1 WO 2014024690A1 JP 2013070160 W JP2013070160 W JP 2013070160W WO 2014024690 A1 WO2014024690 A1 WO 2014024690A1
Authority
WO
WIPO (PCT)
Prior art keywords
arm
hand
motor
arm portion
industrial robot
Prior art date
Application number
PCT/JP2013/070160
Other languages
English (en)
Japanese (ja)
Inventor
矢澤　隆之
佳久 増澤
智樹 田辺
洋和 渡邊
Original Assignee
日本電産サンキョー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2012247114A external-priority patent/JP6051021B2/ja
Application filed by 日本電産サンキョー株式会社 filed Critical 日本電産サンキョー株式会社
Priority to CN201380011432.6A priority Critical patent/CN104136174B/zh
Priority to KR1020167007910A priority patent/KR101691775B1/ko
Priority to KR1020167007912A priority patent/KR101691777B1/ko
Priority to US14/386,579 priority patent/US9764461B2/en
Priority to KR1020167007911A priority patent/KR101691776B1/ko
Priority to KR1020147024129A priority patent/KR101687463B1/ko
Priority to TW105114809A priority patent/TWI635938B/zh
Priority to TW105114810A priority patent/TWI669200B/zh
Priority to TW105114811A priority patent/TWI635939B/zh
Priority to TW102128540A priority patent/TWI581927B/zh
Publication of WO2014024690A1 publication Critical patent/WO2014024690A1/fr
Priority to US15/185,974 priority patent/US10265845B2/en
Priority to US15/185,962 priority patent/US10350750B2/en
Priority to US15/185,950 priority patent/US10226863B2/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0054—Cooling means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices

Definitions

  • the first invention relates to an industrial robot used in a vacuum.
  • the second invention relates to an origin position return method for an industrial robot that returns the industrial robot to the origin position.
  • the present invention also relates to an industrial robot including a hand and an arm.
  • 3rd invention is related with the industrial robot which has an arm which consists of a plurality of arm parts connected so that relative rotation is possible.
  • the fourth invention relates to an industrial robot having an arm composed of a plurality of arm portions that are connected to each other so as to be relatively rotatable, and a method for controlling the industrial robot.
  • the vacuum robot described in Patent Document 1 includes a hand on which a substrate is mounted, an arm to which the hand is coupled to the distal end side, and a main body unit to which the proximal end side of the arm is coupled.
  • the arm includes an arm base that is pivotably connected to the main body, a first arm whose base end is rotatably connected to the arm base, and a base end that is pivotable to the distal end side of the first arm.
  • a second arm connected to the second arm.
  • the arm base and the first arm are formed in a hollow shape.
  • An arm drive motor that drives the arm and a first speed reducer that decelerates the rotation of the arm drive motor and transmits it to the first arm are disposed inside the arm base.
  • the base end side of the first arm is fixed to the output shaft of the first speed reducer.
  • a second speed reducer that decelerates the rotation of the arm driving motor and transmits it to the second arm is disposed on the distal end side of the first arm.
  • the proximal end side of the second arm is fixed to the output shaft of the second reduction gear.
  • an origin position return method for returning an industrial robot that performs a series of operations according to a control program from an emergency stop position to an origin position is known (for example, see Patent Document 2).
  • the origin position return method described in Patent Document 2 the emergency stop acquired based on the coordinates (current state) of the current position of the industrial robot at the time of emergency stop recorded in the robot controller and the detection result by the encoder Based on the coordinates of the actual current position of the industrial robot at the time, the industrial robot is caused to perform a predetermined operation to return the industrial robot to the origin position.
  • an articulated industrial robot having an arm composed of a plurality of arm portions is known (for example, see Patent Document 3).
  • the industrial robot described in Patent Document 3 is rotatable to a first arm part that is rotatably attached to the main body part, a second arm part that is rotatably attached to the first arm part, and a second arm part.
  • the industrial robot also includes a first drive motor that rotates the first arm portion and the second arm portion, a second drive motor that rotates the third arm portion, and each of the two hands.
  • two hand drive motors to be rotated for example, this industrial robot is arranged at the entrance of a semiconductor manufacturing system, takes out a semiconductor wafer contained in a cassette from the cassette, and accommodates the semiconductor wafer in a predetermined processing apparatus.
  • a semiconductor transfer robot for transferring a semiconductor wafer is known (for example, see Patent Document 4).
  • the transfer robot described in Patent Document 4 is a horizontal articulated three-axis robot, an elevating shaft provided on a base, an arm whose base end side is rotatably connected to the elevating shaft, And a hand rotatably connected to the distal end side.
  • the arm includes a first arm portion whose base end side is rotatably connected to the lifting shaft, a base end side rotatably connected to the front end side of the first arm portion, and a hand is rotated to the front end side. It is comprised from the 2nd arm part connected so that a movement is possible.
  • the transfer robot includes three motors that rotate the first arm unit, the second arm unit, and the hand.
  • the position of the hand is controlled based on a cylindrical coordinate system having the origin at the rotation center of the first arm portion with respect to the lifting axis. Further, in Patent Document 1, the hand moves on a straight line passing through the center of rotation of the first arm portion when viewed from above and below (that is, the hand moves in the radial direction of the cylindrical coordinate system).
  • Patent Document 4 describes that the position of the hand may be controlled based on the XY coordinate system.
  • the transfer robot described in Patent Document 4 is used in a semiconductor manufacturing system for manufacturing a semiconductor.
  • semiconductor wafer processing devices are arranged radially about the rotation center of the first arm unit, and the transfer robot is configured to rotate the first arm unit.
  • the semiconductor wafer is transferred by moving the hand radially around the moving center (that is, by moving the hand on a straight line passing through the rotation center of the first arm portion).
  • an object of the first invention is to drive a hand or an arm disposed in the atmosphere inside the arm in an industrial robot in which at least a part of the arm disposed in a vacuum has an atmospheric pressure.
  • An object of the present invention is to provide an industrial robot capable of efficiently cooling a motor.
  • the first drive motor that rotates the first arm part and the second arm part the second drive motor that rotates the third arm part
  • an industrial robot provided with two hand drive motors for rotating each of the two hands, the first arm unit, the second arm unit, the third arm unit, and the hand are operating.
  • the one arm part, the second arm part, the third arm part, or the hand may collide with, for example, a cassette in which a semiconductor wafer is accommodated or a processing apparatus for processing the semiconductor wafer to cause an unexpected accident.
  • an object of the present invention is to provide an industrial robot capable of making an emergency stop so that the posture of the arm is in a predetermined state, and a control method for the industrial robot.
  • the semiconductor wafer is processed radially around the rotation center of the first arm portion.
  • the device is arranged.
  • the installation area of the semiconductor manufacturing system tends to increase, and there is a need to change the layout of the processing apparatus to reduce the installation area of the semiconductor manufacturing system.
  • the semiconductor wafer is transferred by moving the hand linearly at a position that does not follow the straight line passing through the center of rotation of the first arm portion when viewed from above and below. There may be cases where it must be done.
  • the transfer robot described in Patent Document 4 includes three motors that rotate the first arm unit, the second arm unit, and the hand, when viewed from above and below, It is possible to move the hand linearly at a position that does not follow the straight line passing through the center of rotation. However, when the hand is moved linearly at a position that does not follow the straight line passing through the rotation center of the first arm portion when viewed from the vertical direction, teaching of the moving position of the hand may be complicated. is there.
  • the subject of the 4th invention is an arm which consists of a plurality of arm parts connected so that relative rotation is possible, a plurality of motors for rotating a plurality of arm parts, and a base end side of the arm is rotatable
  • an industrial robot comprising a main body connected to the arm, when viewed from the axial direction of the arm rotation, the tip end side of the arm is linear at a position that does not follow the imaginary line passing through the rotation center of the arm relative to the main body. It is an object of the present invention to provide an industrial robot capable of easily teaching the movement position on the tip side of an arm even when moving to a position.
  • the subject of 4th invention is the arm which consists of several arm parts connected so that relative rotation is possible, the several motor for rotating several arm parts, and the base end side of an arm is rotatable.
  • a control method for an industrial robot comprising a main body connected to the arm, the tip of the arm at a position not along a virtual line passing through the center of rotation of the arm relative to the main body when viewed from the axial direction of the arm rotation
  • An object of the present invention is to provide an industrial robot control method that can easily teach the movement position of the tip end side of an arm even when the side moves linearly.
  • the first invention is described in claims 1 to 6, but the industrial robot of the first invention is connected to the main body portion and the main body portion so that the base end side thereof is rotatable.
  • An arm having a first arm portion and a second arm portion whose base end side is rotatably connected to a distal end side of the first arm portion, and a pivotally connected to a distal end side of the second arm portion.
  • a hand a first motor for rotating the second arm relative to the first arm, a second motor for rotating the hand relative to the second arm, and rotation of the first motor And a second reducer for reducing the rotation of the second motor and transmitting it to the hand, and the hand and the arm are arranged in a vacuum
  • the first reducer and the second reducer are hollow reducers in which a through hole is formed at the center in the radial direction.
  • the first speed reducer and the second speed reducer are the center of rotation of the second arm part relative to the first arm part or the center of rotation of the hand relative to the second arm part, the axis center of the first speed reducer, and the second speed reducer.
  • the first joint portion that connects the first arm portion and the second arm portion, or the second joint portion that connects the second arm portion and the hand, is arranged so as to be coaxially overlapped with each other so as to coincide with the axial center of the first arm portion
  • the first motor, the second motor, the first speed reducer, and the second speed reducer are disposed in the internal space of the first arm portion or the second arm portion that is at least partly formed and formed in a hollow shape,
  • the internal space is characterized by atmospheric pressure.
  • the internal space of the first arm portion or the second arm portion formed in a hollow shape is atmospheric pressure, and the first motor, the second motor, and the second motor space are in the internal space.
  • a first reduction gear and a second reduction gear are arranged.
  • the first speed reducer and the second speed reducer arranged in the internal space overlap on the same axis so that the axial centers thereof coincide. Therefore, in the first invention, the internal space can be increased in the axial direction of the first reduction gear and the second reduction gear. That is, in the first invention, it is possible to increase the volume of air in the internal space by increasing the volume of the internal space that is at atmospheric pressure.
  • the first invention it is possible to efficiently cool the first motor and the second motor disposed in the internal space that is at atmospheric pressure.
  • the two reduction gears are arranged on the rotation center of the second arm portion with respect to the first arm portion or on the rotation center of the hand with respect to the second arm portion, It becomes possible to increase the rigidity of the joint part or the second joint part.
  • the first arm unit and the hand include a main body unit at the time of unloading the transfer object from the storage unit in which the transfer object mounted on the hand is stored and at the time of loading the transfer object into the storage unit.
  • the rotation angle of the first arm portion relative to the second arm portion is equal to the rotation angle of the hand relative to the second arm portion, the rotation direction of the first arm portion relative to the main body portion, and the rotation direction of the hand relative to the second arm portion. It is preferable to rotate so that is in the opposite direction. If comprised in this way, it will become possible to maintain the direction of the hand at the time of carrying out and carrying in of a conveyance target object. That is, with a relatively simple control, it is possible to keep the direction of the hand constant when the object to be conveyed is unloaded and loaded.
  • the first arm portion is attached to the main body portion so as to extend from the main body portion to one side in the horizontal direction, and the first arm portion has a counter extending from the main body portion to the other side in the horizontal direction.
  • a weight is attached. In this case, it is possible to reduce the load acting on the bearing that rotatably supports the first arm portion.
  • the industrial robot of 1st invention is the front end side of the main body part, the 1st arm part to which the base end side is rotatably connected with a main body part, and a 1st arm part
  • An arm having a second arm portion whose base end side is rotatably connected to the first arm portion and a third arm portion whose base end side is rotatably connected to the distal end side of the second arm portion;
  • a hand rotatably connected to the distal end of the first arm, a first motor for rotating the second arm relative to the first arm, and a third arm rotating relative to the second arm
  • a second reducer that decelerates the rotation of the two motors and transmits it to the third arm, and decelerates the rotation of the third motor
  • a hand and an arm are arranged in
  • the first arm portion is arranged so as to be coaxially overlapped so that the moving center, the rotation center of the third arm portion with respect to the second arm portion, or the rotation center of the hand with respect to the third arm portion coincides with each other.
  • At least two speed reducers arranged so as to overlap on the same axis, and among the first motor, the second motor, and the third motor connected to the at least two speed reducers At least two motors are arranged, and the internal space is at atmospheric pressure.
  • the internal space of the first arm portion, the second arm portion, or the third arm portion formed in a hollow shape is at atmospheric pressure, and the first reduction gear is provided in the internal space.
  • a motor Moreover, in 1st invention, the at least 2 reduction gear arrange
  • the present invention it is possible to increase the volume of air in the internal space by increasing the volume of the internal space that is at atmospheric pressure. Therefore, in the first invention, it is possible to efficiently cool at least two motors arranged in the internal space that is at atmospheric pressure.
  • the center of rotation of the second arm portion relative to the first arm portion the center of rotation of the third arm portion relative to the second arm portion, or the center of rotation of the hand relative to the third arm portion. Since at least two speed reducers are arranged on the top, it is possible to increase the rigidity of the first joint portion, the second joint portion, or the third joint portion.
  • an industrial robot includes a main body portion, a first arm portion whose base end side is rotatably connected to the main body portion, and a distal end side of the first arm portion.
  • An arm having a second arm portion whose base end side is rotatably connected to the first arm portion and a third arm portion whose base end side is rotatably connected to the distal end side of the second arm portion;
  • a hand rotatably connected to the distal end side of the first arm, a first motor for expanding and contracting the arm, a second motor for rotating the hand relative to the third arm portion, and rotation of the first motor.
  • the hand and the arm are disposed in a vacuum, and the first speed reducer And the second speed reducer is a hollow speed reducer in which a through hole is formed at the center in the radial direction.
  • the first speed reducer and the second speed reducer have an axial center thereof, a rotation center of the second arm part with respect to the first arm part, a rotation center of the third arm part with respect to the second arm part, or a third
  • the first joint part, the second arm part, and the third arm that are arranged so as to overlap on the same axis so that the center of rotation of the hand with respect to the arm part coincides, and that connects the first arm part and the second arm part
  • a first motor, a second motor, a first speed reducer, and a second speed reducer are arranged in the internal space of the arm portion, and the internal space is at atmospheric pressure.
  • the internal space of the first arm portion, the second arm portion or the third arm portion formed in a hollow shape is at atmospheric pressure, and the first motor and A second motor, a first speed reducer, and a second speed reducer are arranged.
  • the first speed reducer and the second speed reducer arranged in the internal space overlap on the same axis so that the axial centers thereof coincide. Therefore, in the first invention, the internal space can be increased in the axial direction of the first reduction gear and the second reduction gear. That is, in the first invention, it is possible to increase the volume of air in the internal space by increasing the volume of the internal space that is at atmospheric pressure.
  • the first invention it is possible to efficiently cool the first motor and the second motor disposed in the internal space that is at atmospheric pressure.
  • the center of rotation of the second arm portion relative to the first arm portion the center of rotation of the third arm portion relative to the second arm portion, or the center of rotation of the hand relative to the third arm portion. Since the two speed reducers are arranged on the top, the rigidity of the first joint portion, the second joint portion, or the third joint portion can be increased.
  • an industrial robot includes a main body, a first arm part whose base end side is rotatably connected to the main body part, and a distal end of the first arm part.
  • the base end side of which is pivotably connected to the side, and to the distal end side of the third arm portion and the third arm portion of which the proximal end side is pivotally connected.
  • An arm having a fourth arm portion whose base end side is rotatably connected, a hand rotatably connected to a distal end side of the fourth arm portion, and a second arm portion with respect to the first arm portion
  • a first motor for rotating the second arm a second motor for rotating the third arm with respect to the second arm, and a fourth arm for rotating with respect to the third arm.
  • a third motor, a fourth motor for rotating the hand relative to the fourth arm, and a first motor A first speed reducer that decelerates and transmits the rotation of the second motor, a second speed reducer that decelerates and transmits the rotation of the second motor to the third arm, and decelerates the rotation of the third motor.
  • the hand and the arm are disposed in a vacuum, and the first speed reducer
  • the second reducer, the third reducer, and the fourth reducer are hollow reducers in which a through hole is formed at the center in the radial direction, and the first reducer, the second reducer, the third reducer, and At least two of the fourth reduction gears have an axial center, a rotation center of the second arm portion with respect to the first arm portion, a rotation center of the third arm portion with respect to the second arm portion, a third The center of rotation of the fourth arm portion relative to the arm portion or the center of rotation of the hand relative to the fourth arm portion is the same.
  • at least two speed reducers arranged so as to overlap on the same axis, and a first motor connected to the at least two speed reducers
  • at least two of the second motor, the third motor, and the fourth motor are arranged, and the internal space is at atmospheric pressure.
  • the internal space of the first arm part, the second arm part, the third arm part, or the fourth arm part formed in a hollow shape is at atmospheric pressure.
  • At least two of the first reducer, the second reducer, the third reducer, and the fourth reducer, and a first motor, a second motor coupled to the at least two reducers, At least two motors of the third motor and the fourth motor are arranged.
  • positioned in interior space has overlapped on the same axis
  • the present invention it is possible to increase the volume of air in the internal space by increasing the volume of the internal space that is at atmospheric pressure. Therefore, in the first invention, it is possible to efficiently cool at least two motors arranged in the internal space that is at atmospheric pressure.
  • the rotation of the fourth arm on the rotation center of the second arm with respect to the first arm, the rotation of the third arm with respect to the second arm, and the rotation of the fourth arm with respect to the third arm Since at least two speed reducers are arranged on the center or on the center of rotation of the hand with respect to the fourth arm, the rigidity of the first joint, the second joint, the third joint, or the fourth joint Can be increased.
  • the industrial robot origin position return method of the second invention is a method of returning the industrial robot to the origin position.
  • This is a method for returning the home position of an industrial robot to be set, and the temporary current position coordinates of an industrial robot that is stopped in a state where the current position coordinates are unknown are set based on the state of the industrial robot.
  • the temporary current position coordinates of the industrial robot that is stopped in a state where the current position coordinates are lost are set. Therefore, it is possible to cause the industrial robot to perform an appropriate operation in the operation process based on the set temporary current position coordinates.
  • the industrial robot since the industrial robot is operated to a predetermined position in the operation process, for example, in the operation process, the industrial robot is returned to a position where the origin can be safely returned to the origin. In the operation process, the industrial robot can be safely and automatically returned to the origin position.
  • the origin position return method of the second invention when the industrial robot that is stopped in a state where the coordinates of the current position are lost is returned to the origin position by a complicated method such as manual operation by the operator. Compared to the above, it becomes possible to return the industrial robot to the origin position easily and safely.
  • the industrial robot has a hand on which the object to be transported is mounted and a plurality of arms that are rotatably connected, and the hand is rotatably connected to the tip side thereof.
  • a temporary center of rotation of the hand with respect to the arm is provided.
  • the industrial robot since the industrial robot is provided with a plurality of arm motors and hand motors, the industrial robot that has stopped in a state where the coordinates of the current position are not known can be manually operated by the operator.
  • the second invention it is possible to easily return the industrial robot to the origin position.
  • the coordinates of the temporary current position at the rotation center of the hand are set in the temporary current position setting step, the hand, the object to be transported, and the accommodating portion are prevented from interfering in the operation step. It becomes possible to operate industrial robots.
  • the industrial robot is operated in the operation process up to a position where the housing unit, the hand, and the conveyance object do not interfere with each other during the return operation of the industrial robot in the return operation process. Therefore, the industrial robot can be safely and automatically returned to the origin position in the return operation process.
  • the industrial robot is connected with a portable teaching operation terminal for teaching the operation position to the industrial robot. It is preferable that the coordinates of the temporary current position at the center of rotation of the hand are input to the teaching operation terminal to set the coordinates of the temporary current position at the center of rotation of the hand. If comprised in this way, it will become possible to set the coordinate of the temporary present position of the rotation center of a hand easily.
  • the hand moves linearly when viewed from the vertical direction that is the axial direction of rotation of the hand, and the transport object is carried into the storage part and the transport object from the storage part.
  • the industrial robot performs a linear interpolation operation so that the hand moves in the moving direction of the hand at the time of loading and unloading the object to be transported when viewed from above and below in the operation process. . If comprised in this way, in an operation
  • the cylindrical coordinate system coordinate and the orthogonal coordinate system coordinate defined in a plane orthogonal to the vertical direction that is the axial direction of the hand rotation are the vertical direction.
  • the coordinates of the temporary current position of the center of rotation of the hand when viewed from above can be set, and the hand when viewed from the top and bottom by either the coordinates of the cylindrical coordinate system or the coordinates of the orthogonal coordinate system It is preferable that the coordinates of the temporary current position at the center of rotation be set. If comprised in this way, the coordinate of the temporary present position of the rotation center of a hand when it sees from an up-down direction can be set with the coordinate of a coordinate system which is easy to operate an industrial robot in an operation
  • the industrial robot includes an operation member for operating the industrial robot in the operation process.
  • the industrial robot In the operation process, the industrial robot is operated while the operator of the industrial robot operates the operation member. It is preferable that the industrial robot is operated by a jog operation in which the industrial robot stops when the operator stops operating the operation member.
  • the amount of deviation between the temporary current position coordinates of the industrial robot set in the temporary current position setting step and the actual current position coordinates of the stopped industrial robot is large, and the operation If the operation of the industrial robot is continued as it is in the process, for example, even if the housing part and the hand interfere, by resetting the coordinates of the temporary current position while performing the jog operation, It becomes possible to prevent interference between the housing part and the hand in the operation process.
  • the industrial robot of the second invention has a hand on which the object to be transported is mounted and a plurality of arm portions that are rotatably connected, and the hand is on the tip side.
  • a rotation of the hand relative to the arm is provided.
  • the industrial robot according to the second aspect of the present invention uses the temporary current position coordinates of the hand rotation center of the industrial robot that has stopped in a state where the coordinates of the current position of the hand rotation center with respect to the arm are lost.
  • Temporary current position setting means for setting is provided. Therefore, in the second invention, by setting the temporary current position coordinates of the hand rotation center by the temporary current position setting means, the industrial robot obtains the coordinates of the temporary current position of the hand rotation center. I can grasp it. Therefore, in the second invention, it is possible to cause the industrial robot to perform an appropriate operation and return the industrial robot to the origin position.
  • the third invention is described in claims 14 to 18, but the industrial robot of the third invention comprises a plurality of arm portions connected so as to be relatively rotatable.
  • an industrial robot having an arm, a plurality of motors for rotating a plurality of arm units, a plurality of motor drivers for driving and controlling each of the plurality of motors, and a power source for supplying power to the plurality of motor drivers,
  • a charging / discharging unit that is connected to multiple motor drivers and can be charged by regenerative current generated by multiple motors, and a control execution unit that controls the multiple motor drivers.
  • the control execution unit stops the plurality of motors while controlling the plurality of motor drivers using the power supplied from the charging / discharging unit.
  • the power supply for supplying power to a plurality of motor drivers is turned off during the emergency stop. Therefore, in the third invention, it is possible to stop a plurality of motors in a relatively short time when the industrial robot is in an emergency stop, and it is possible to ensure safety in a relatively short time.
  • the control execution unit controls the motor driver using the power supplied from the charge / discharge unit that can be charged by the regenerative current generated by the plurality of motors at the time of emergency stop of the industrial robot. Multiple motors are stopped. That is, in the third invention, at the time of an emergency stop of the industrial robot, the plurality of motors are stopped while being controlled using the electric power supplied from the charge / discharge unit.
  • the industrial robot is arranged so that the posture of the arm is in a predetermined state. It becomes possible to make an emergency stop.
  • the industrial robot includes a hand rotatably connected to the distal end side of the arm, a hand motor for rotating the hand relative to the arm, and a hand for driving and controlling the hand motor.
  • the control execution unit stops the hand motor while controlling the hand motor driver using the power supplied from the charging / discharging unit during an emergency stop.
  • the industrial robot includes, for example, a main body portion in which the base end side of the arm is rotatably connected, and the base end side of the arm portion is rotatably connected to the main body portion.
  • a first motor for rotating the first arm part and a second motor for rotating the second arm part with respect to the first arm part are provided, and the first motor is driven and controlled as a motor driver.
  • a first motor driver and a second motor driver that drives and controls the second motor are provided.
  • the industrial robot includes an elevating motor for elevating the arm, an elevating motor driver for driving and controlling the elevating motor, a first brake for stopping the elevating motor, A second brake for stopping the lifting motor with a braking force larger than that of the brake, and the control execution unit controls the lifting motor driver, the first brake and the second brake, and at the time of emergency stop, After operating the brake, it is preferable to operate the second brake to stop the lifting motor. If comprised in this way, it will become possible to stop the raising / lowering motor by a 1st brake and a 2nd brake in a comparatively short time. Therefore, for example, even when an industrial robot in which the elevating motor is uncontrollable is emergency stopped, it is possible to prevent the arm from dropping.
  • the control execution unit controls the elevating motor driver so as to rotate.
  • the power charged in the charging / discharging unit may be consumed in a short time by the lifting motor driver during an emergency stop. If the power charged in the charging / discharging unit is consumed in a short time by the lifting / lowering motor driver during an emergency stop, the control execution unit may control the motor driver using the power supplied from the charging / discharging unit. There is a possibility that each of the plurality of arm portions may rotate freely and cause an unexpected accident.
  • the control execution unit operates the first brake having a small braking force to lower the rotation speed of the lifting motor, and then operates the second brake having a large braking force to operate the lifting motor. Is stopped, it becomes difficult for the elevating motor to stop suddenly, and as a result, it is possible to reduce the power of the charge / discharge unit consumed by the elevating motor driver during an emergency stop. Therefore, with this configuration, at the time of an emergency stop, the industrial robot is emergency stopped so that the posture of the arm is in a predetermined state by controlling a plurality of motors using the power supplied from the charge / discharge unit. It becomes possible.
  • a control method for an industrial robot includes an arm composed of a plurality of arm portions connected so as to be relatively rotatable and a plurality of arm portions for rotating the arm portion.
  • a plurality of motors By a plurality of motors, a plurality of motor drivers that drive and control each of the plurality of motors, a power source that supplies power to the plurality of motor drivers, and a regenerative current that is connected to the plurality of motor drivers and that is generated by the plurality of motors
  • a control method for an industrial robot comprising a chargeable / dischargeable part, wherein when the industrial robot is in an emergency stop, the power is turned off and a plurality of motor drivers are controlled by using electric power supplied from the charge / discharge part. However, a plurality of motors are stopped.
  • the power supply for supplying power to the plurality of motor drivers is turned off when the industrial robot is in an emergency stop. Therefore, in the third invention, it is possible to stop a plurality of motors in a relatively short time when the industrial robot is in an emergency stop, and it is possible to ensure safety in a relatively short time.
  • the plurality of motors are controlled while controlling the motor driver using the power supplied from the charging / discharging unit that can be charged by the regenerative current generated by the plurality of motors. Stopped.
  • the plurality of motors are stopped while being controlled using the electric power supplied from the charge / discharge unit. Therefore, according to the industrial robot control method of the third invention, even when the industrial robot includes a plurality of motors for rotating the plurality of arm portions, the posture of the arm is predetermined.
  • the industrial robot can be brought to an emergency stop so as to be in a state.
  • the fourth invention is described in claims 19 to 23, but the industrial robot of the fourth invention is provided with an arm composed of a plurality of arm portions connected so as to be relatively rotatable.
  • the control unit for controlling the industrial robot includes: Whether the industrial robot is controlled by a cylindrical coordinate system with the origin of the arm rotation center relative to the main body based on the posture and the movement direction of the arm, or with an orthogonal coordinate system with the arm rotation center as the origin It is characterized by switching whether to control an industrial robot.
  • a control method for an industrial robot includes an arm composed of a plurality of arm portions connected so as to be relatively rotatable, and a plurality of arm portions for rotating the arm portion.
  • an industrial robot control method comprising a plurality of motors and a main body portion rotatably connected to a base end side of the arm, the arm is rotated with respect to the main body portion based on the posture of the arm and the operation direction of the arm. It is characterized by switching between controlling the industrial robot in a cylindrical coordinate system with the center as the origin or controlling the industrial robot in an orthogonal coordinate system with the center of rotation of the arm as the origin.
  • the control unit controlling the industrial robot in a cylindrical coordinate system based on the arm rotation center with respect to the main body based on the arm posture and the arm movement direction? Or, it is switched whether to control the industrial robot in an orthogonal coordinate system with the rotation center of the arm as the origin.
  • the industrial robot control method according to the fourth aspect of the present invention, the industrial robot is controlled in a cylindrical coordinate system with the center of rotation of the arm relative to the main body as the origin based on the posture of the arm and the operating direction of the arm. Or whether to control the industrial robot in an orthogonal coordinate system with the rotation center of the arm as the origin.
  • the cylindrical coordinate system is used.
  • the front end side of the arm moves linearly at a position that does not follow the imaginary line passing through the center of rotation of the arm relative to the main body when viewed from the axial direction of arm rotation.
  • the coordinates of the cylindrical coordinate system are used. It is possible to teach the moving position of the arm tip side, and the arm tip side is linear at a position that does not follow the imaginary line passing through the arm rotation center when viewed from the axial direction of the arm rotation. When moving to the position, it is possible to teach the movement position on the tip side of the arm using the coordinates of the orthogonal coordinate system.
  • the cylindrical coordinate system is used when the tip end side of the arm linearly moves at a position not along the imaginary line passing through the center of rotation of the arm when viewed from the axial direction of the rotation of the arm. It is possible to teach the movement position on the distal end side of the arm using the coordinates of the orthogonal coordinate system instead of using the coordinates. As a result, in the fourth invention, even when the tip end side of the arm moves linearly at a position that does not follow the imaginary line passing through the center of rotation of the arm when viewed from the axial direction of the rotation of the arm. Thus, it is possible to easily teach the moving position on the tip side of the arm.
  • the industrial robot includes, for example, a hand rotatably connected to the distal end side of the arm and a hand motor for rotating the hand, and the base end thereof as the arm portion
  • a first arm portion whose side is rotatably connected to the main body portion, a base end side thereof is rotatably connected to a distal end side of the first arm portion, and a hand is rotatably connected to the distal end side thereof.
  • a second arm unit, and the control unit is configured to perform a first operation on an imaginary line passing through the center of rotation of the arm when viewed from the vertical direction that is the axial direction of rotation of the hand, the first arm unit, and the second arm unit.
  • the industrial robot When the center of rotation of the hand relative to the two arms moves linearly, the industrial robot is controlled by a cylindrical coordinate system, and the center of rotation of the hand is straight at a position that does not follow the virtual line when viewed from above and below.
  • the center of rotation of the hand When moving To control the industrial robot in the system.
  • the control part is in the state where the 1st arm part is not rotating with respect to a main-body part, and the 2nd arm part is not rotating with respect to a 1st arm part.
  • the industrial robot is controlled in the cylindrical coordinate system.
  • the control unit is in a state in which the second arm unit is not rotated with respect to the first arm unit and the hand is not rotated with respect to the second arm unit.
  • the industrial robot is controlled in the cylindrical coordinate system.
  • an industrial robot that has stopped in a state where the coordinates of the current position are lost cannot be easily returned to the origin position. It becomes possible to return. Further, in the industrial robot of the second invention, even if the industrial robot is stopped when the coordinates of the current position are not known, the industrial robot can be returned to the origin position by a simple method. .
  • the posture of the arm is in a predetermined state.
  • the industrial robot can be brought to an emergency stop.
  • the tip of the arm at a position that does not follow the imaginary line passing through the center of rotation of the arm relative to the main body when viewed from the axial direction of the rotation of the arm. Even when the side moves linearly, it is possible to easily teach the moving position on the tip side of the arm.
  • the tip of the arm at a position that does not follow the imaginary line passing through the center of rotation of the arm relative to the main body when viewed from the axial direction of rotation of the arm. Even when the side moves linearly, it is possible to easily teach the moving position on the tip side of the arm.
  • FIG. 1 It is a top view which shows the state in which the industrial robot concerning embodiment of this invention was integrated in the manufacturing system of the organic EL display.
  • FIG. 1 (A) is a top view
  • FIG. 2 It is a front view of the teaching operation terminal of the industrial robot shown in FIG. It is a figure for demonstrating the return process to an origin position when the industrial robot shown in FIG. 2 makes an emergency stop in the state where the coordinate of the present position is lost. It is a block diagram for demonstrating the structure of the control part relevant to the motor control of the industrial robot shown in FIG. It is a block diagram for demonstrating the structure of the control part relevant to the motor control of the industrial robot shown in FIG.
  • FIG. 1 is a plan view showing a state in which an industrial robot 1 according to an embodiment of the present invention is incorporated in an organic EL display manufacturing system 3.
  • 2A and 2B are views of the industrial robot 1 shown in FIG. 1, wherein FIG. 2A is a plan view and FIG. 2B is a side view.
  • FIG. 3 is a cross-sectional view for explaining the internal structure of the industrial robot 1 shown in FIG. 2 from the side.
  • FIG. 14 is a front view of the teaching operation terminal 19 of the industrial robot 1 shown in FIG. 2 according to the embodiment of the second invention.
  • FIG. 1 is a plan view showing a state in which an industrial robot 1 according to an embodiment of the present invention is incorporated in an organic EL display manufacturing system 3.
  • 2A and 2B are views of the industrial robot 1 shown in FIG. 1, wherein FIG. 2A is a plan view and FIG. 2B is a side view.
  • FIG. 3 is a cross-sectional view for explaining the internal structure of the industrial robot 1 shown in FIG.
  • FIG. 16 is a block diagram for illustrating a configuration of a control unit related to motor control of the industrial robot 1 shown in FIG. 2 according to an embodiment of the third invention.
  • FIG. 17 is a block diagram for explaining the configuration of the control unit 70 relating to the motor control of the industrial robot 1 shown in FIG. 2, which is an embodiment of the fourth invention.
  • the industrial robot 1 (hereinafter referred to as “robot 1”) of this embodiment uses a glass substrate 2 (hereinafter referred to as “substrate 2”) for an organic EL (organic electroluminescence) display, which is an object to be transported. It is a robot for transporting (horizontally articulated robot).
  • the robot 1 is a robot suitable for transporting a relatively large substrate 2. As shown in FIG. 1, the robot 1 is used by being incorporated in an organic EL display manufacturing system 3.
  • the manufacturing system 3 includes a transfer chamber 4 (hereinafter referred to as “chamber 4”) disposed in the center, and a plurality of process chambers 5 to 10 (hereinafter referred to as “chambers 5 to 10” disposed so as to surround the chamber 4). ")").
  • the inside of the chamber 4 and the chambers 5 to 10 are in a vacuum.
  • a part of the robot 1 is disposed inside the chamber 4.
  • a fork unit 21 (described later) constituting the robot 1 enters the chambers 5 to 10 enters the chambers 5 to 10, the robot 1 transports the substrate 2 between the chambers 5 to 10. That is, the robot 1 transports the substrate 2 in a vacuum.
  • Various devices and the like are arranged in the chambers 5 to 10, and the substrate 2 transferred by the robot 1 is accommodated.
  • various processes are performed on the substrate 2.
  • the chambers 5 to 10 in the present embodiment are storage units that store the substrate 2 that is a transfer object. A more specific configuration of the manufacturing system 3 will be described later.
  • the robot 1 includes a hand 13 on which the substrate 2 is mounted, an arm 14 to which the hand 13 is pivotally connected to a distal end side thereof, and a proximal end side of the arm 14 is rotated.
  • the main body part 15 connected so that it is possible and the raising / lowering mechanism 16 which raises / lowers the main body part 15 are provided.
  • the main body 15 and the lifting mechanism 16 are accommodated in a substantially bottomed cylindrical case body 17.
  • a flange 18 formed in a disk shape is fixed to the upper end of the case body 17.
  • a through hole in which the upper end side portion of the main body portion 15 is disposed is formed in the flange 18.
  • the robot 1 is connected to a portable teaching operation terminal (teaching pendant) 19 (see FIG. 14) for teaching the operation position to the robot 1 via a robot controller (not shown).
  • a portable teaching operation terminal such as a robot controller
  • the hand 13 and the arm 14 are arranged on the upper side of the main body 15. Further, the hand 13 and the arm 14 are disposed on the upper side of the flange 18.
  • a part of the robot 1 is disposed inside the chamber 4. Specifically, a portion of the robot 1 above the lower end surface of the flange 18 is disposed inside the chamber 4. That is, the part above the lower end surface of the flange 18 of the robot 1 is disposed in the vacuum region VR, and the hand 13 and the arm 14 are disposed in a vacuum.
  • a portion of the robot 1 below the lower end surface of the flange 18 is disposed in the atmospheric region AR (in the atmosphere).
  • the hand 13 includes a base 20 connected to the arm 14 and four forks 21 on which the substrate 2 is mounted.
  • the fork portion 21 is formed in a straight line. Of the four fork portions 21, two fork portions 21 are arranged in parallel with a predetermined distance therebetween.
  • the two fork portions 21 are fixed to the base portion 20 so as to protrude from the base portion 20 to one side in the horizontal direction.
  • the remaining two fork portions 21 are fixed to the base portion 20 so as to protrude from the base portion 20 toward the opposite side of the two fork portions 21 protruding from the base portion 20 to one side in the horizontal direction.
  • the arm 14 is composed of two arm parts, a first arm part 23 and a second arm part 24.
  • the first arm part 23 and the second arm part 24 are formed in a hollow shape.
  • the base end side of the first arm portion 23 is rotatably connected to the main body portion 15.
  • the proximal end side of the second arm portion 24 is rotatably connected to the distal end side of the first arm portion 23.
  • the hand 13 is rotatably connected to the distal end side of the second arm portion 24.
  • a connecting portion between the arm 14 and the main body portion 15 (that is, a connecting portion between the first arm portion 23 and the main body portion 15) is a joint portion 25.
  • a connecting portion between the first arm portion 23 and the second arm portion 24 is a joint portion 26.
  • a connecting portion between the arm 14 and the hand 13 (that is, a connecting portion between the second arm portion 24 and the hand 13) is a joint portion 27.
  • the distance between the rotation center of the second arm portion 24 relative to the first arm portion 23 and the rotation center of the first arm portion 23 relative to the main body portion 15 is the rotation center of the second arm portion 24 relative to the first arm portion 23.
  • the distance from the center of rotation of the hand 13 with respect to the second arm portion 24 is equal.
  • the joint part 26 is a first joint part that connects the first arm part 23 and the second arm part 24, and the joint part 27 is a second joint part that connects the second arm part 24 and the hand 13. It is.
  • the first arm portion 23 is attached to the main body portion 15 so as to extend from the main body portion 15 to one side in the horizontal direction.
  • a counterweight 28 is attached to the first arm portion 23 so as to extend from the main body portion 15 on the side opposite to the direction in which the first arm portion 23 extends (that is, the other side in the horizontal direction).
  • the second arm part 24 is disposed above the first arm part 23. Further, the hand 13 is disposed above the second arm portion 24.
  • a motor 31 for rotating the first arm portion 23 with respect to the main body portion 15 is attached to the main body portion 15.
  • the main body 15 includes a hollow rotary shaft 32 to which the proximal end side of the first arm portion 23 is fixed, a speed reducer 33 that decelerates rotation of the motor 31 and transmits it to the first arm portion 23, and a speed reducer 33.
  • a substantially cylindrical holding member 34 that holds the case body and rotatably holds the hollow rotary shaft 32 is provided.
  • a motor 31 as an arm motor for rotating the first arm portion 23 with respect to the main body portion 15 is attached to the main body portion 15.
  • the main body 15 is provided with a motor 31 as a first motor for rotating the first arm 23 with respect to the main body 15.
  • the reduction gear 33 is a hollow reduction gear in which a through hole is formed at the center in the radial direction.
  • the speed reducer 33 is arranged so that the axial center of the through hole coincides with the axial center of the hollow rotary shaft 32.
  • a motor 31 is connected to the input side of the speed reducer 33 via a pulley and a belt.
  • the lower end of the hollow rotary shaft 32 is fixed to the output side of the speed reducer 33.
  • a lower surface on the proximal end side of the first arm portion 23 is fixed to the upper end of the hollow rotary shaft 32.
  • the hollow rotary shaft 32 is disposed on the inner peripheral side of the holding member 34, and a bearing is disposed between the outer peripheral surface of the hollow rotary shaft 32 and the inner peripheral surface of the holding member 34.
  • a magnetic fluid seal 35 for preventing air from flowing into the vacuum region VR is disposed at the joint portion 25.
  • the magnetic fluid seal 35 is disposed between the outer peripheral surface of the hollow rotary shaft 32 and the inner peripheral surface of the holding member 34.
  • the joint portion 25 is provided with a bellows 36 for preventing air from flowing into the vacuum region VR.
  • a bellows 36 is disposed on the outer peripheral side of the magnetic fluid seal 35 and on the outer peripheral side of the holding member 34.
  • the lower end of the bellows 36 is fixed to the holding member 34, and the upper end of the bellows 36 is fixed to the flange 18.
  • the elevating mechanism 16 includes a screw member 38 that is arranged with the vertical direction as an axial direction, a nut member 39 that engages with the screw member 38, and a motor 40 that rotates the screw member 38.
  • the screw member 38 is rotatably attached to the bottom surface side of the case body 17.
  • the motor 40 is attached to the bottom surface side of the case body 17.
  • the screw member 38 is connected to the motor 40 via a pulley and a belt.
  • the nut member 39 is attached to the main body 15 via a predetermined bracket. In this embodiment, when the motor 40 rotates, the screw member 38 rotates, and the main body 15 moves up and down together with the nut member 39.
  • the lifting mechanism 16 includes a guide shaft for guiding the main body portion 15 in the vertical direction and a guide block that engages with the guide shaft and slides in the vertical direction.
  • the elevating mechanism 16 includes a screw member 38 arranged with the vertical direction as an axial direction, a nut member 39 engaged with the screw member 38, a motor 40 for rotating the screw member 38, and a first for stopping the motor 40.
  • a brake 41 as a brake and a brake 42 (see FIG. 16) as a second brake for stopping the motor 40 are provided.
  • the screw member 38 is rotatably attached to the bottom surface side of the case body 17.
  • the motor 40 is attached to the bottom surface side of the case body 17.
  • the screw member 38 is connected to the motor 40 via a pulley and a belt.
  • the nut member 39 is attached to the main body 15 via a predetermined bracket.
  • the motor 40 of this embodiment is a lifting motor for moving the arm 14 up and down.
  • the lifting mechanism 16 includes a guide shaft for guiding the main body portion 15 in the vertical direction and a guide block that engages with the guide shaft and slides in the vertical direction.
  • the brake 41 is attached to the lower end side of the screw member 38.
  • the brake 42 is built in the motor 40.
  • the brakes 41 and 42 are so-called non-excitation operation type brakes, and are a case body in which a coil is housed, a side plate fixed to the case body, and an armature that is arranged to be movable in the axial direction with respect to the case body. And a brake disc disposed between the side plate and the armature, and a compression coil spring that biases the armature toward the brake disc.
  • the brake disc is attached to the screw member 38, and in the brake 42, the brake disc is attached to the rotation shaft of the motor 40.
  • the brakes 41 and 42 when the coil is energized, the armature is sucked into the case body and the brake disc is released.
  • the brake disk In the brakes 41 and 42, when energization to the coil is stopped, the brake disk is sandwiched between the armature and the side plate by the biasing force of the compression coil spring, and the motor 40 is braked.
  • the braking force of the brake 42 is larger than the braking force of the brake 41.
  • the control unit of the robot 1 includes a motor driver 71 as a first motor driver for driving and controlling the motor 31, a motor driver 72 as a second motor driver for driving and controlling the motor 46, and a motor 47.
  • a motor driver 73 as a hand motor driver for driving and controlling the motor 40 and a motor driver 74 as a lifting motor driver for driving and controlling the motor 40 are provided.
  • the control unit of the robot 1 includes a delay circuit 75 for adjusting the operation timing of the brake 41 and a delay circuit 76 for adjusting the operation timing of the brake 42.
  • control unit of the robot 1 includes a power source 81 that supplies power to the motor drivers 71 to 74, a CPU (Central Processing Unit) 79 that controls the motor drivers 71 to 74, motors 31, 40, And a charge / discharge unit 80 connected to 46 and 47.
  • the CPU 79 also controls the brakes 41 and 42 via the delay circuits 75 and 76.
  • the charging / discharging unit 80 includes a relay, a diode, and a capacitor not shown.
  • the charging / discharging unit 80 can be charged by a regenerative current generated by the motors 31, 40, 46, 47. Specifically, the regenerative current generated by the motors 31, 40, 46, and 47 flows through the capacitor of the charge / discharge unit 80, so that the capacitor can be charged.
  • the teaching operation terminal 19 includes a display 70 on which various information and the like are displayed, and operation buttons 76 for performing various operations.
  • the robot 1 operates while the operator presses the operation button 76, and when the operator stops pressing the operation button 71 (that is, when the operation of the operation button 76 is stopped), the robot. Jog operation that stops 1 is possible.
  • the controller 70 for controlling the robot 1 includes a motor driver 71 for driving and controlling the motor 31 and a motor driver 72 for driving and controlling the motor 46, as shown in FIG.
  • the motor driver 73 that controls the motor 47 and the motor driver 74 that controls the motor 40 are provided.
  • the control unit 70 also includes a power source 81 that supplies power to the motor drivers 71 to 74 and a CPU (Central Processing Unit) 79 that controls the motor drivers 71 to 74.
  • a CPU Central Processing Unit
  • FIG. 4 is an enlarged view of the first arm portion 23 and the joint portion 26 shown in FIG.
  • the first arm portion 23 and the second arm portion 24 are formed in a hollow shape.
  • a motor 46 as a first motor for rotating the second arm portion 24 with respect to the first arm portion 23, and a second arm portion
  • a motor 47 as a second motor for rotating the hand 13 with respect to 24 is arranged.
  • the joint portion 26 serves as a first speed reducer 48 that decelerates the rotation of the motor 46 and transmits it to the second arm portion 24, and a second speed reducer that decelerates the rotation of the motor 47 and transmits it to the hand 13.
  • the reduction gear 49 is provided.
  • the speed reducers 48 and 49 are hollow speed reducers in which a through hole is formed at the center in the radial direction.
  • the joint portion 26 includes a hollow rotary shaft 50 and a hollow rotary shaft 51 disposed on the outer peripheral side of the hollow rotary shaft 50 and coaxially with the hollow rotary shaft 50.
  • an arm for rotating the second arm portion 24 with respect to the first arm portion 23 is provided in the internal space 45 of the first arm portion 23 formed in a hollow shape.
  • a motor 46 as a motor for use and a motor 47 as a hand motor for rotating the hand 13 with respect to the second arm portion 24 are disposed.
  • the inner space 45 of the first arm portion 23 formed in a hollow shape is provided with a second arm 24 for rotating the second arm portion 24 with respect to the first arm portion 23.
  • a motor 46 as two motors and a motor 47 as a hand motor for rotating the hand 13 with respect to the second arm portion 24 are arranged.
  • a motor for rotating the second arm portion 24 with respect to the first arm portion 23 is provided in the inner space 45 of the first arm portion 23 formed in a hollow shape. 46 and a motor 47 as a hand motor for rotating the hand 13 with respect to the second arm portion 24 are disposed.
  • a motor 46 is connected to the input side of the speed reducer 48 via pulleys 52 and 53 and a belt 54.
  • the lower end of the hollow rotary shaft 51 is fixed to the output side of the speed reducer 48.
  • the upper end of the hollow rotary shaft 51 is fixed to the lower surface on the proximal end side of the second arm portion 24.
  • the case body of the speed reducer 48 is fixed to a holding member 55 formed in a substantially cylindrical shape.
  • the holding member 55 is fixed to the first arm portion 23.
  • the holding member 55 is disposed on the outer peripheral side of the hollow rotary shaft 51.
  • a motor 47 is connected to the input side of the speed reducer 49 via pulleys 57 and 58 and a belt 59.
  • the lower end of the hollow rotary shaft 50 is fixed to the output side of the speed reducer 49.
  • a pulley 60 is fixed to the upper end of the hollow rotary shaft 50.
  • the pulley 60 is disposed inside the proximal end of the second arm portion 24 formed in a hollow shape.
  • a pulley 61 is disposed inside the distal end side of the second arm portion 24.
  • the pulley 61 is rotatably held on the distal end side of the second arm portion 24.
  • the lower surface of the base 20 of the hand 13 is fixed to the upper end surface of the pulley 61.
  • a belt 62 is bridged between the pulley 60 and the pulley 61.
  • the case body of the speed reducer 49 is fixed to a holding member 63 formed in a substantially cylindrical shape.
  • the holding member 63 is fixed to the first arm portion 23.
  • the speed reducer 48 and the speed reducer 49 are arranged so as to overlap on the same axis so that the axial center of the through hole coincides with the axial center of the hollow rotary shaft 51. That is, the speed reducer 48 and the speed reducer 49 are disposed so as to be coaxially overlapped so that the axial center thereof coincides with the rotation center of the second arm portion 24 with respect to the first arm portion 23. In this embodiment, the speed reducer 48 is disposed above the speed reducer 49.
  • the internal space 45 of the first arm portion 23 is sealed, and the pressure in the internal space 45 is atmospheric pressure.
  • the motors 46 and 47 are disposed in the internal space 45.
  • the speed reducers 48 and 49 are disposed in the internal space 45 on the distal end side of the first arm portion 23. That is, the motors 46 and 47 and the speed reducers 48 and 49 are disposed in the atmosphere.
  • a cooling pipe 64 for cooling the motor 46 is wound around the motor 46. Compressed air can be supplied to the cooling pipe 64, and the motor 46 is cooled by the compressed air passing through the inside of the cooling pipe 64. In this embodiment, since the amount of heat generated by the motor 47 is smaller than the amount of heat generated by the motor 46, no cooling pipe is wound around the motor 47.
  • the joint portion 26 is provided with magnetic fluid seals 65 and 66 for securing a sealed state of the internal space 45.
  • the magnetic fluid seals 65 and 66 that prevent the inflow of air from the internal space 45 to the vacuum region VR are disposed in the joint portion 26.
  • the magnetic fluid seal 65 is disposed between the outer peripheral surface of the hollow rotary shaft 50 and the inner peripheral surface of the hollow rotary shaft 51. It is arranged between.
  • a bearing is disposed between the outer peripheral surface of the hollow rotary shaft 50 and the inner peripheral surface of the hollow rotary shaft 51.
  • the internal space of the second arm portion 24 is in a vacuum.
  • the manufacturing system 3 includes the plurality of chambers 5 to 10 arranged so as to surround the chamber 4.
  • the manufacturing system 3 of this embodiment six chambers 5 to 10 are arranged so as to surround the chamber 4.
  • each of three directions orthogonal to each other is defined as an X direction, a Y direction, and a Z direction.
  • the robot 1 is arranged such that its vertical direction coincides with the Z direction. Therefore, in the following, the Z direction is the vertical direction.
  • the X1 direction side is the “right” side
  • the X2 direction side is the “left” side
  • the Y1 direction side is the “front” side
  • the Y2 direction side is the “rear (rear)” side.
  • the chamber 4 is formed so that the shape when viewed from above and below is a substantially octagonal shape.
  • the chambers 5 to 10 are formed so as to have a substantially rectangular shape when viewed from above and below, and the side surfaces of the chambers 5 to 10 are composed of the Y direction and the Z direction, or the Z direction and the X direction. Are arranged so as to be parallel to the ZX plane.
  • the chamber 5 is arranged so as to be connected to the left end of the chamber 4, and the chamber 6 is arranged so as to be connected to the right end of the chamber 4.
  • the chamber 7 and the chamber 8 are arranged so as to be connected to the rear end of the chamber 4.
  • the chamber 7 and the chamber 8 are adjacent in the left-right direction.
  • the chamber 7 is disposed on the left side, and the chamber 8 is disposed on the right side. Further, the chamber 9 and the chamber 10 are arranged so as to be connected to the front end of the chamber 4. The chamber 9 and the chamber 10 are adjacent in the left-right direction. In this embodiment, the chamber 9 is disposed on the left side, and the chamber 10 is disposed on the right side.
  • a virtual line parallel to the left and right direction passing through the rotation center C1 of the first arm portion 23 with respect to the main body 15 indicates the center position of the chambers 5 and 6 in the front and rear direction. It is arranged to pass.
  • the chambers 7 and 8 are arranged so that a virtual line parallel to the front-rear direction passing through the rotation center C ⁇ b> 1 passes through the center position in the left-right direction between the chambers 7 and 8. That is, the center positions of the chambers 7 and 8 in the left-right direction are offset with respect to the rotation center C1.
  • the chambers 9 and 10 are arranged such that a virtual line passing through the rotation center C1 and parallel to the front-rear direction passes through the center position in the left-right direction between the chambers 9 and 10. That is, the center positions of the chambers 9 and 10 in the left-right direction are offset with respect to the rotation center C1. Further, in the left-right direction, the chamber 7 and the chamber 9 are disposed at the same position, and the chamber 8 and the chamber 10 are disposed at the same position.
  • FIG. 5 is a diagram for explaining the movement of the industrial robot 1 when unloading the substrate 2 from the process chamber 5 shown in FIG. 1 and loading the substrate 2 into the process chamber 6.
  • FIG. 6 is a diagram for explaining the movement of the industrial robot 1 when the substrate 2 is carried into the process chamber 7 shown in FIG.
  • FIG. 7 is a diagram for explaining the movement of the industrial robot 1 when the substrate 2 is carried into the process chamber 9 shown in FIG.
  • FIG. 8 is a view for explaining the movement of the industrial robot 1 when the substrate 2 is carried into the process chamber 8 shown in FIG.
  • FIG. 9 is a view for explaining the movement of the industrial robot 1 when the substrate 2 is carried into the process chamber 10 shown in FIG.
  • the robot 1 drives the motors 31, 40, 46, 47 to transfer the substrate 2 between the chambers 5 to 10.
  • the robot 1 unloads the substrate 2 from the chamber 5 and loads the substrate 2 into the chamber 6. That is, as shown in FIG. 5A, the robot 1 extends the arm 14 and mounts the substrate 2 in the chamber 5 in a state where the fork portion 21 is parallel to the left-right direction, As shown in B), the arm 14 is contracted until the first arm portion 23 and the second arm portion 24 overlap in the vertical direction, and the substrate 2 is carried out of the chamber 5. Thereafter, the robot 1 rotates the hand 13 by 180 °, then extends the arm 14 and carries the substrate 2 into the chamber 6 as shown in FIG.
  • the robot 1 loads the substrate 2 unloaded from the chamber 5 into the chamber 7 (see FIG. 6).
  • the robot 1 first drives the motors 31, 46, 47 from the state where the arm 14 is contracted as shown in FIG. 6 (A), and the fork section as shown in FIG. 6 (B).
  • the rotation center C2 of the hand 13 with respect to the second arm portion 24 in the left-right direction and the chamber 7 in the left-right direction so that 21 is parallel to the front-rear direction and the substrate 2 is disposed on the rear end side of the hand 13
  • the hand 13, the first arm part 23, and the second arm part 24 are rotated so that their centers substantially coincide with each other.
  • the rotation center C2 linearly moves on an imaginary line parallel to the left-right direction passing through the rotation center C1.
  • the robot 1 extends the arm 14 and carries the substrate 2 into the chamber 7 as shown in FIG.
  • the rotation center C2 linearly moves on an imaginary line parallel to the front-rear direction passing through the center of the chamber 7 in the left-right direction. That is, at this time, when viewed from above and below, the rotation center C2 moves linearly at a position that does not follow the imaginary line that passes through the rotation center C1 (a position that deviates from the imaginary line that passes through the rotation center C1). To do.
  • the robot 1 carries, for example, the substrate 2 carried out of the chamber 5 into the chamber 9 (see FIG. 7).
  • the robot 1 first drives the motors 31, 46 and 47 from the contracted state of the arm 14 as shown in FIG. 7 (A), and as shown in FIG. 21 is parallel to the front-rear direction, the substrate 2 is arranged on the front end side of the hand 13, and in the left-right direction, the rotation center C2 and the center of the chamber 9 in the left-right direction substantially coincide with each other.
  • the hand 13, the first arm part 23, and the second arm part 24 are rotated.
  • the rotation center C2 linearly moves on an imaginary line parallel to the left-right direction passing through the rotation center C1.
  • the robot 1 extends the arm 14 and carries the substrate 2 into the chamber 9 as shown in FIG.
  • the rotation center C2 linearly moves on an imaginary line parallel to the front-rear direction passing through the center of the chamber 9 in the left-right direction. That is, at this time, when viewed from above and below, the rotation center C2 moves linearly at a position not along the imaginary line passing through the rotation center C1.
  • the robot 1 loads the substrate 2 unloaded from the chamber 5 into the chamber 8 (see FIG. 8).
  • the robot 1 first drives the motors 31, 46 and 47 from the contracted state of the arm 14 as shown in FIG. 8 (A), and as shown in FIG. 21 is parallel to the front-rear direction, the substrate 2 is disposed on the rear end side of the hand 13, and the center of rotation C2 and the center of the chamber 8 in the left-right direction substantially coincide with each other in the left-right direction.
  • the hand 13, the first arm part 23, and the second arm part 24 are rotated.
  • the rotation center C2 linearly moves on an imaginary line parallel to the left-right direction passing through the rotation center C1.
  • the robot 1 extends the arm 14 and carries the substrate 2 into the chamber 8 as shown in FIG.
  • the rotation center C2 moves linearly on an imaginary line parallel to the front-rear direction passing through the center of the chamber 8 in the left-right direction. That is, at this time, when viewed from above and below, the rotation center C2 moves linearly at a position not along the imaginary line passing through the rotation center C1.
  • the robot 1 loads the substrate 2 unloaded from the chamber 5 into the chamber 10 (see FIG. 9).
  • the robot 1 first drives the motors 31, 46 and 47 from the contracted state of the arm 14 as shown in FIG. 9 (A), so that the fork section as shown in FIG. 9 (B). 21 is parallel to the front-rear direction, the substrate 2 is disposed on the front end side of the hand 13, and in the left-right direction, the rotation center C2 and the center of the chamber 10 in the left-right direction substantially coincide with each other.
  • the hand 13, the first arm part 23, and the second arm part 24 are rotated.
  • the rotation center C2 linearly moves on an imaginary line parallel to the left-right direction passing through the rotation center C1.
  • the robot 1 extends the arm 14 and carries the substrate 2 into the chamber 10 as shown in FIG.
  • the rotation center C2 linearly moves on an imaginary line parallel to the front-rear direction passing through the center of the chamber 10 in the left-right direction. That is, at this time, when viewed from above and below, the rotation center C2 moves linearly at a position not along the imaginary line passing through the rotation center C1.
  • the hand 13 and the first arm part 23 have the same turning angle of the first arm part 23 with respect to the main body part 15 and the turning angle of the hand 13 with respect to the second arm part 24, and
  • the rotation direction of the first arm portion 23 with respect to the main body portion 15 and the rotation direction of the hand 13 with respect to the second arm portion 24 are reversed. That is, the motors 31 and 47 have the same rotation angle of the first arm portion 23 with respect to the main body portion 15 and the rotation angle of the hand 13 with respect to the second arm portion 24, and the first arm portion 23 with respect to the main body portion 15.
  • the rotation direction and the rotation direction of the hand 13 with respect to the second arm portion 24 rotate in the opposite direction.
  • the direction of the hand 13 is kept constant when the substrate 2 is unloaded and loaded. That is, when the substrate 2 is unloaded and loaded into the chambers 5 and 6, the direction of the hand 13 is maintained so that the fork portion 21 is parallel to the left-right direction, and when the substrate 2 is unloaded and loaded into the chambers 7 to 10, The orientation of the hand 13 is maintained so that the fork portion 21 is parallel to the front-rear direction.
  • FIG. 15 is a diagram for explaining the process of returning to the origin position when the industrial robot 1 shown in FIG. 2 is in an emergency stop with the coordinates of the current position being lost.
  • the robot 1 is in an emergency stop and the robot 1 is stopped in a state where the coordinates of the current position (current state) of the robot 1 are lost, the robot 1 is 1 is returned to the home position (reference state).
  • the robot 1 is brought to an emergency stop when the substrate 2 is unloaded or loaded into the chambers 5 and 6, when the fork portion 21 is parallel to the left and right direction and viewed from the up and down direction.
  • the motors 31, 46 and 47 are controlled so that the robot 1 stops in a state where the rotation center C2 is disposed on a virtual line parallel to the left-right direction passing through the rotation center C1.
  • the fork portion 21 is parallel to the front-rear direction and when viewed from the vertical direction
  • the motors 31, 46 and 47 are controlled so that the robot 1 stops in a state where the rotation center C2 is arranged on a virtual line parallel to the front-rear direction passing through the centers of the chambers 7 and 9.
  • the fork portion 21 is parallel to the front-rear direction and is viewed in the left-right direction when viewed from the up-down direction.
  • the motors 31, 46, 47 are controlled so that the robot 1 stops in a state where the rotation center C2 is disposed on a virtual line parallel to the front-rear direction passing through the centers of the chambers 8, 10.
  • the coordinates of the temporary current position of the robot 1 are set to the state of the robot 1.
  • Temporal current position setting step the coordinates of the temporary current position of the rotation center C2 are set. Specifically, the coordinate of the temporary current position of the rotation center C2 determined by visual confirmation by the operator who returns the robot 1 to the origin position is input to the teaching operation terminal 19, and the temporary position of the rotation center C2 is determined. Set the coordinates of the current position. That is, in the temporary current position setting step, the teaching operation terminal 19 is used to set the coordinates of the temporary current position of the rotation center C2.
  • the teaching operation terminal 19 of this embodiment is temporary current position setting means for setting the coordinates of the temporary current position of the rotation center C2.
  • the vertical direction is determined by either the coordinates of the cylindrical coordinate system defined on the plane orthogonal to the vertical direction or the coordinates of the orthogonal coordinate system defined on the plane orthogonal to the vertical direction.
  • the coordinates of the provisional current position of the rotation center C2 when viewed from above can be set, and the coordinates of the provisional current position of the rotation center C2 when viewed from the vertical direction can be set by any coordinate. Is done.
  • a cylindrical coordinate system is defined with the rotation center C1 as the origin, the distance from the rotation center C1 to the rotation center C2, the line connecting the rotation center C1 and the rotation center C2, and the rotation center C1.
  • the coordinates of the provisional current position of the rotation center C2 when viewed from above and below are set based on the angle formed with a predetermined reference line passing through.
  • the orthogonal coordinate system is defined so that the rotation center C1 is the origin, and one coordinate axis constituting the orthogonal coordinate system is parallel to the left-right direction, and the other coordinate axis is parallel to the front-rear direction.
  • the rotation center C2 Based on the distance between the rotation center C1 and the rotation center C2 in the left-right direction and the distance between the rotation center C1 and the rotation center C2 in the front-rear direction, the rotation center C2 when viewed from the up-down direction.
  • the coordinates of the tentative current position are set.
  • the robot 1 moves when the substrate 2 is unloaded or loaded into the chambers 5 and 6 arranged so that a virtual line parallel to the left-right direction passing through the rotation center C1 passes through the center position in the front-rear direction.
  • the coordinates of the provisional current position of the rotation center C2 when viewed from the vertical direction in the coordinates of the cylindrical coordinate system are set.
  • the coordinates of the Cartesian coordinate system are viewed from above and below. The coordinates of the temporary current position of the rotation center C2 at that time are set.
  • the coordinates of the temporary current position of the rotation center C2 when viewed from the vertical direction in addition to the coordinates of the temporary current position of the rotation center C2 when viewed from the vertical direction, the coordinates of the temporary current position of the rotation angle of the hand 13 with respect to the second arm portion 24 and The coordinates of the temporary current position at the height of the rotation center C2 may be set. These settings are also performed by inputting the coordinates of the temporary current position determined by visual confirmation by the operator to the teaching operation terminal 19.
  • a predetermined mark is provided on the hand 13 and the chambers 5 to 10, and when the mark on the hand 13 and the mark on the chambers 5 to 10 coincide when viewed from above and below,
  • the coordinates of the rotation center C2 are defined in advance, and when the operator visually determines the coordinates of the temporary current position of the rotation center C2, the positional relationship between the mark of the hand 13 and the marks of the chambers 5 to 10 is determined. To determine the coordinates of the temporary current position of the rotation center C2.
  • the coordinates of the rotation center C2 when the rotation center C2 is located at the end of the movable range of the rotation center C2 in the front, rear, left, and right directions are defined in advance, and the temporary current position of the rotation center C2 is visually confirmed by the operator. Is determined based on the movable range end of the rotation center C2 as a reference.
  • the robot 1 When the coordinates of the temporary current position of the rotation center C2 are set in the temporary current position setting process, the robot 1 is moved to a predetermined position (operation process). In the operation process, the robot 1 is moved to a position where the hand 13 or the substrate 2 and the chambers 5 to 10 do not interfere during the return operation of the robot 1 in the return operation process described later. For example, as shown in FIG. 10 (A), when the robot 1 is in an emergency stop state with the left end side of the hand 13 being inside the chamber 5, as shown in FIG. Then, the arm 14 is contracted so that the entire hand 13 moves to the outside of the chamber 5. Further, for example, as shown in FIGS.
  • the rear end side or the front end side of the hand 13 enters the inside of the chambers 7 to 10.
  • the robot 1 is in an emergency stop in the state of being in the state, as shown in FIG. 6B, FIG. 7B, FIG. 8B, and FIG.
  • the arm 14 is contracted so that it moves to the outside of the chambers 7 to 10.
  • the robot 1 is caused to perform a linear interpolation operation so that the hand 13 moves in the moving direction of the hand 13 when the substrate 2 is carried into and out of the chambers 5 to 10. That is, at this time, the robot 1 is caused to perform a linear interpolation operation so that the rotation center C2 moves in the moving direction of the rotation center C2 when the substrate 2 is carried into and out of the chambers 5 to 10.
  • the robot 1 is operated by a jog operation using the operation button 71 of the teaching operation terminal 19.
  • the operation button 71 of this embodiment is an operation member for operating the robot 1 in the operation process.
  • the robot 1 After operating the robot 1 in the operation process, the robot 1 is automatically returned to the origin position (return operation process). In this return operation step, the robot 1 is automatically returned to the origin position by a known method.
  • the CPU 79 When the robot 1 is in an emergency stop, the CPU 79 first operates the brake 41 (that is, stops energization of the coil of the brake 41), and after a predetermined time has elapsed since the brake 41 was operated, Is operated (that is, energization of the coil of the brake 42 is stopped), and the motor 40 is stopped. That is, the CPU 79 operates the brake 41 and then operates the brake 42 to stop the motor 40 when the robot 1 is in an emergency stop. For example, the CPU 79 operates the brake 42 after several hundred milliseconds have elapsed since the operation of the brake 41 so that the main body 15 does not fall.
  • the CPU 79 stops the motors 31, 46 and 47 while controlling the motor drivers 71 to 73 using the power supplied from the charging / discharging unit 80 when the robot 1 is in an emergency stop. That is, the CPU 79 rotates the motors 31, 46, 47 using the power stored in the charge / discharge unit 80 in advance and the power stored in the charge / discharge unit 80 by the regenerative current generated in the motors 31, 46, 47. While managing the position, the motors 31, 46, 47 are stopped.
  • the hand 13 moves linearly in the moving direction of the hand 13 when the emergency stop is applied while maintaining the orientation of the hand 13 when the emergency stop is applied (more specifically,
  • the CPU 79 stops the motors 31, 46 and 47 while controlling the motor drivers 71 to 73 so that the rotation center C2 moves linearly.
  • the CPU 79 controls the motor driver 74 so that the motor 40 does not stop more suddenly than necessary when the brakes 41 and 42 are operated during an emergency stop of the robot 1. Specifically, when the motor 40 is likely to stop more suddenly than necessary when the brakes 41 and 42 are operated, the CPU 79 causes the motor driver to rotate further in the direction of rotation of the motor 40 when an emergency stop is applied. 74 is controlled. At this time, power is supplied from the charging / discharging unit 80 to the motor driver 74.
  • the control unit 70 of the present embodiment is based on the posture of the arm 14 and the operation direction of the arm 14, and the center of rotation of the first arm unit 23 relative to the main body 15 (that is, the center of rotation of the arm 14 relative to the main body 15). It is switched whether the robot 1 is controlled in a cylindrical coordinate system having C1 as an origin or whether the robot 1 is controlled in an orthogonal coordinate system having a rotation center C1 as an origin. That is, the control unit 70 controls the motor drivers 71 to 74 in the cylindrical coordinate system based on the posture of the arm 14 and the operation direction of the arm 14, or controls the motor drivers 71 to 74 in the orthogonal coordinate system. Switch between.
  • control unit 70 moves the robot 1 in a cylindrical coordinate system when the rotation center C2 of the hand 13 moves linearly on an imaginary line passing through the rotation center C1 when viewed from above and below. Control. That is, when the rotation center C2 of the hand 13 moves linearly on an imaginary line passing through the rotation center C1 when viewed from the vertical direction, the control unit 70 moves from the rotation center C1 to the rotation center C2.
  • the robot 1 is controlled by a cylindrical coordinate system based on a distance between the rotation center C1 and the rotation center C2 and an angle formed by a predetermined reference line passing through the rotation center C1.
  • the control unit 70 controls the robot 1 in a cylindrical coordinate system.
  • the arm 14 is contracted until the first arm portion 23 and the second arm portion 24 overlap in the vertical direction (FIG. 6A, 7A, FIG. 8A, and FIG. 9A), the fork portion 21 is parallel to the front-rear direction, and the substrate 2 is disposed on the front end side or the rear end side of the hand 13.
  • the position where the rotation center C2 and the centers of the chambers 7 to 10 in the left-right direction substantially coincide FIGGS. 6B, 7B, 8B, 9).
  • the control unit 70 controls the robot 1 in the cylindrical coordinate system.
  • the control unit 70 controls the robot 1 using an orthogonal coordinate system.
  • the orthogonal coordinate system is defined so that one coordinate axis constituting the orthogonal coordinate system is parallel to the left-right direction and the other coordinate axis is parallel to the front-rear direction.
  • the control unit 70 determines the distance between the rotation center C1 and the rotation center C2 in the left-right direction and the front-rear direction.
  • the robot 1 is controlled by an orthogonal coordinate system based on the distance between the rotation center C1 and the rotation center C2.
  • the fork portion 21 is parallel to the front-rear direction and the substrate 2 is disposed on the front end side or the rear end side of the hand 13, and In the left-right direction, the position where the rotation center C2 and the centers of the chambers 7 to 10 in the left-right direction substantially coincide (FIGS. 6B, 7B, 8B, and 9B). And the position where the arm 14 extends until the fork 21 enters the chambers 7 to 10 (see FIGS. 6C, 7C, 8C, and 9C).
  • the control unit 70 controls the robot 1 in the orthogonal coordinate system.
  • control unit 70 is in a state where the first arm unit 23 is not rotated with respect to the main body unit 15 and the second arm unit 24 is not rotated with respect to the first arm unit 23.
  • the robot is controlled in a cylindrical coordinate system.
  • control unit 70 is configured so that the second arm unit 24 is not rotated with respect to the first arm unit 23 and the hand 13 is not rotated with respect to the second arm unit 24. Even when the first arm unit 23 rotates with respect to the unit 15, the robot 1 is controlled by the cylindrical coordinate system.
  • the moving position of the rotation center C2 when controlled by the cylindrical coordinate system is taught using the coordinates of the cylindrical coordinate system.
  • the movement position of the rotation center C2 when controlled in the orthogonal coordinate system is taught using the coordinates of the orthogonal coordinate system.
  • the position of the rotation center C2 when viewed from the vertical direction is the case where the robot 1 is controlled in the cylindrical coordinate system and the case where the robot 1 is controlled in the orthogonal coordinate system.
  • the height of the hand 13 and the rotation angle of the hand 13 with respect to the second arm portion 24 are controlled.
  • the internal space 45 of the first arm portion 23 formed in a hollow shape is atmospheric pressure, and the motors 46 and 47 and the speed reducers 48 and 49 are contained in the internal space 45. Is arranged. Further, in this embodiment, the speed reducer 48 and the speed reducer 49 arranged in the internal space 45 overlap on the same axis so that the axial centers thereof coincide. Therefore, in the present embodiment, it is possible to increase the thickness of the first arm portion 23 in the vertical direction that is the axial direction of the speed reducers 48 and 49.
  • the internal space 45 can be enlarged in the vertical direction, the volume of the internal space 45 in which the internal pressure is atmospheric pressure is increased, and the amount of air in the internal space 45 is increased. It becomes possible to increase. Therefore, in this embodiment, the motors 46 and 47 disposed in the internal space 45 can be efficiently cooled. As a result, in this embodiment, it is possible to prevent the motors 46 and 47 from being damaged due to heat.
  • the distance between the rotation center of the second arm portion 24 relative to the first arm portion 23 and the rotation center of the first arm portion 23 relative to the main body portion 15 is relative to the first arm portion 23.
  • the distance between the rotation center of the second arm portion 24 and the rotation center of the hand 13 with respect to the second arm portion 24 is equal, and the length of the first arm portion 23 is relatively long. Therefore, in this embodiment, it is possible to increase the volume of the internal space 45 and increase the amount of air in the internal space 45.
  • the motors 46 and 47 disposed in the internal space 45 are more It becomes possible to cool efficiently. In this embodiment, since the cooling pipe 64 is wound around the motor 46, the motor 46 can be cooled more efficiently.
  • the motors 46 and 47 and the speed reducers 48 and 49 are arranged in the internal space 45 where the internal pressure is atmospheric pressure, the hand 13 and the arm 14 are vacuumed. It is not necessary to use an expensive lubricant such as vacuum grease as a lubricant for the motors 46 and 47 and the speed reducers 48 and 49, but a lubricant such as grease used at atmospheric pressure. Should be used. Therefore, in this embodiment, the initial cost and running cost of the robot 1 can be reduced.
  • a part of the joint portion 26 is constituted by the speed reducers 48 and 49. Therefore, in this embodiment, it is possible to increase the rigidity of the joint portion 26.
  • the speed reducers 48 and 49 are hollow speed reducers, and are arranged coaxially so that the axial center thereof coincides with the rotation center of the second arm part 24 with respect to the first arm part 23. . That is, in this embodiment, two speed reducers 48 and 49 are arranged on the center of rotation of the second arm portion 24 relative to the first arm portion 23. For this reason, in this embodiment, the rigidity of the joint portion 26 can be further increased. Therefore, in this embodiment, even if the robot 1 transports a relatively large substrate 2, it is possible to prevent the joint portion 26 from being damaged.
  • the substrate 2 When the substrate 2 is transported between the chambers 5 to 10 with the direction of the hand 13 being kept constant when the substrate 2 is unloaded and loaded, as in the present embodiment of the first invention, it is relatively large. When the substrate 2 is conveyed, a large load is applied to the joint portion 26, but a large load is not applied to the joint portion 27. Therefore, in this embodiment, even if the joint portion 27 is configured by the pulley 61 or the like, the joint portion 27 is unlikely to be damaged.
  • the hand 13 and the first arm portion 23 are rotated with respect to the main body portion 15 and the hand with respect to the second arm portion 24 when the substrate 2 is unloaded and loaded.
  • the rotation angles of the first arm portion 23 with respect to the main body portion 15 and the rotation direction of the hand 13 with respect to the second arm portion 24 are opposite to each other.
  • the orientation of the hand 13 at the time of unloading and loading of the substrate 2 is kept constant. That is, in this embodiment, it is possible to keep the orientation of the hand 13 constant when the substrate 2 is unloaded and loaded with relatively simple control.
  • a counterweight 28 extending from the main body portion 15 is attached to the first arm portion 23 extending from the main body portion 15 to one side in the horizontal direction opposite to the direction in which the first arm portion 23 extends. ing. Therefore, in this embodiment, it is possible to reduce the load acting on the bearing disposed between the outer peripheral surface of the hollow rotary shaft 32 to which the first arm portion 23 is fixed and the inner peripheral surface of the holding member 34. .
  • the temporary current position coordinates of the rotation center C2 of the robot 1 that is in an emergency stop with the current position coordinates being unknown are set.
  • the robot 1 can grasp the coordinates of the temporary current position of the rotation center C2. Therefore, in the present embodiment, the robot 1 is suitable for the robot 1 while interlocking the first arm portion 23, the second arm portion 24, and the hand 13 in the operation process based on the set coordinates of the temporary current position of the rotation center C2. Can be performed.
  • the robot 1 in the operation process, can be caused to perform a linear interpolation operation so that the hand 13 moves in the moving direction of the hand 13 when the substrate 2 is carried into and out of the chambers 5 to 10. 13 and the substrate 2 and the chambers 5 to 10 can be prevented from interfering with each other.
  • the robot 1 since the robot 1 is moved to a position where the hand 13 and the substrate 2 and the chambers 5 to 10 do not interfere with each other during the return operation of the robot 1 in the operation process, the robot is moved to the origin position in the return operation process. 1 can be safely restored.
  • the coordinates of the temporary current position of the rotation center C2 determined by visual confirmation by the operator are input to the teaching operation terminal 19, and the rotation center C2 is input.
  • the coordinates of the tentative current position are set. Therefore, in this embodiment, it is possible to easily set the coordinates of the temporary current position of the rotation center C2.
  • the temporary current position coordinates of the rotation center C2 can be set by any of the coordinates of the cylindrical coordinate system or the coordinates of the orthogonal coordinate system.
  • the coordinates of the temporary current position of the rotation center C2 are set by any of the coordinates. Therefore, in this embodiment, the coordinates of the provisional current position of the rotation center C2 can be set with the coordinates of the coordinate system in which the robot 1 can be easily operated in the operation process. That is, as described above, when the substrate 2 is unloaded or loaded into the chambers 5 and 6 arranged so that the imaginary line parallel to the left-right direction passing through the rotation center C1 passes through the center position in the front-rear direction.
  • the coordinates of the temporary current position of the rotation center C2 can be set in the coordinates of the cylindrical coordinate system, and the chamber is offset from the rotation center C1 in the left-right direction.
  • the coordinates of the temporary current position of the rotation center C2 can be set by the coordinates of the orthogonal coordinate system.
  • the robot 1 is operated by a jog operation using the operation button 71 of the teaching operation terminal 19 in the operation process. For this reason, in this embodiment, the amount of deviation between the coordinates of the temporary current position of the rotation center C2 set in the temporary current position setting step and the coordinates of the actual current position of the rotation center C2 of the robot 1 that is stopped. Even if the hand 13 or the substrate 2 and the chambers 5 to 10 interfere with each other if the robot 1 continues to operate as it is in the operation process, the coordinates of the temporary current position can be obtained while performing the jog operation. By resetting, it is possible to prevent interference between the hand 13 and the substrate 2 and the chambers 5 to 10 in the operation process.
  • the power supply 81 is turned off when the robot 1 is in an emergency stop. Therefore, in this embodiment, when the robot 1 is in an emergency stop, the motors 31, 40, 46, 47 can be stopped in a relatively short time, and as a result, safety can be ensured in a relatively short time. become.
  • the CPU 79 stops the motors 31, 46 and 47 while controlling the motor drivers 71 to 73 using the power supplied from the charging / discharging unit 80. Yes. That is, in this embodiment, when the robot 1 is in an emergency stop, the motors 31, 46, and 47 are stopped while being controlled using the power supplied from the charging / discharging unit 80. Therefore, in this embodiment, a motor 46 that rotates the first arm portion 23, a motor 47 that rotates the second arm portion 24, and a motor 31 that rotates the hand 13 are provided separately.
  • the CPU 79 keeps the direction of the hand 13 when the emergency stop is applied, and moves the hand 13 linearly in the moving direction of the hand 13 when the emergency stop is applied.
  • the motors 31, 46 and 47 can be stopped while controlling the motor drivers 71 to 73. Therefore, in the present embodiment, it is possible to prevent contact between the hand 13 and the chambers 5 to 10 and contact between the arm 14 and the chambers 5 to 10 at the time of an emergency stop. Occurrence can be prevented.
  • the CPU 79 when the robot 1 is in an emergency stop, the CPU 79 operates the brake 41 and then operates the brake 42 having a braking force larger than that of the brake 41 to stop the motor 40. Therefore, in this embodiment, the motor 40 can be stopped in a relatively short time by the brakes 41 and 42. Therefore, in this embodiment, it is possible to prevent the main body portion 15 from falling even when the robot 1 in which the motor 40 is uncontrollable is emergency-stopped.
  • the brake 42 having a large braking force in order to stop the motor 40 in a shorter time, it is preferable to immediately operate the brake 42 having a large braking force at the time of emergency stop.
  • the CPU 79 moves the motor 40 in the rotation direction of the motor 40 when the emergency stop is applied so that the motor 40 does not stop more suddenly than necessary.
  • the motor driver 74 is controlled so as to further rotate, and electric power is supplied from the charging / discharging unit 80 to the motor driver 74. If the brake 42 having a large braking force is actuated immediately at the time of emergency stop, the motor 40 is likely to stop suddenly more than necessary.
  • the electric power supplied from the charging / discharging unit 80 to the motor driver 74 increases, and the electric power charged in the charging / discharging unit 80 may be consumed by the motor driver 74 in a short time.
  • the CPU 79 uses the electric power supplied from the charging / discharging unit 80 to drive the motor drivers 71-73. It becomes impossible to control, and each of the first arm part 23, the second arm part 24, and the hand 13 may rotate freely, causing an unexpected accident.
  • the CPU 79 operates the brake 41 to reduce the rotational speed of the motor 40 and then the brake 42 having a braking force larger than that of the brake 41. Since the motor 40 is stopped by operating the motor 40, it is difficult for the motor 40 to stop suddenly. As a result, it is possible to reduce the power of the charging / discharging unit 80 consumed by the motor driver 74 at the time of emergency stop. .
  • the motors 31, 46, 47 are controlled using the electric power supplied from 80 to maintain the direction of the hand 13 when an emergency stop is applied, while moving the hand 13 in the moving direction of the hand 13 when the emergency stop is applied. , The motors 31, 46, 47 can be stopped while moving linearly.
  • the orthogonal coordinate system is defined so that one coordinate axis constituting the orthogonal coordinate system is parallel to the left-right direction and the other coordinate axis is parallel to the front-rear direction, and the vertical direction
  • the rotation center C2 moves linearly at a position that does not follow the imaginary line passing through the rotation center C1 when viewed from above, the rotation center C2 passes through the centers of the chambers 7 to 10 in the left-right direction. Move linearly on an imaginary line parallel to the front-rear direction.
  • the robot 1 is controlled by the cylindrical coordinate system when the rotation center C2 moves linearly on an imaginary line passing through the rotation center C1 when viewed from above and below.
  • the robot 1 is controlled by the orthogonal coordinate system. It becomes easy to control.
  • FIG. 10 is a view for explaining a schematic configuration of an industrial robot 1 according to another embodiment of the first invention from the side.
  • the motors 46 and 47 and the speed reducers 48 and 49 are arranged in the internal space 45 of the first arm portion 23. Specifically, motors 46 and 47 and speed reducers 48 and 49 are arranged in the internal space 45 on the distal end side of the first arm portion 23, and the speed reducers 48 and 49 constitute a part of the joint portion 26. ing. In addition to this, for example, motors 46 and 47 and speed reducers 48 and 49 may be arranged in the internal space of the second arm portion 24 in which the internal pressure is atmospheric pressure. For example, motors 46 and 47 and speed reducers 48 and 49 may be disposed in the internal space on the proximal end side of the second arm portion 24.
  • the speed reducers 48 and 49 are arranged so as to be coaxially overlapped so that the axial center thereof coincides with the rotation center of the second arm portion 24 with respect to the first arm portion 23, and the joint portion 26. Part of it.
  • the internal space 45 of the first arm portion 23 may be in a vacuum.
  • motors 46 and 47 and speed reducers 48 and 49 may be arranged in the internal space on the distal end side of the second arm portion 24.
  • the speed reducer 48 and the speed reducer 49 are arranged so as to overlap on the same axis so that the center of the shaft and the center of rotation of the hand 13 with respect to the second arm portion 24 coincide with each other. Part of it.
  • the internal space of the second arm portion 24 can be increased in the vertical direction, which is the axial direction of the speed reducers 48 and 49, and therefore the internal pressure is the atmospheric pressure. It becomes possible to increase the volume of the air in the internal space of the second arm portion 24 by increasing the volume of the internal space of the two arm portion 24.
  • the motors 46 and 47 disposed in the internal space of the second arm portion 24 can be efficiently cooled.
  • the two speed reducers 48 and 49 are arranged on the center of rotation of the hand 13 with respect to the second arm portion 24, the rigidity of the joint portion 27 can be increased.
  • FIG. 11 is a plan view of an industrial robot 1 according to another embodiment of the first invention.
  • the arm 14 is composed of one first arm portion 23 and one second arm portion 24.
  • the arm 14 may be composed of one first arm portion 23 and two second arm portions 24.
  • the 1st arm part 23 is formed in the substantially V shape or linear form, and the center part becomes a base end part connected with the main-body part 15 so that rotation is possible.
  • the second arm portion 24 is rotatably connected to each of the two distal ends of the first arm portion 23, and the two distal ends of the first arm portion 23 are connected to each other.
  • a joint portion 26 is formed in each.
  • a part of the joint portion 26 is configured by the speed reducers 48 and 49 in the same manner as described above, and the first arm is provided at each of the two distal ends of the first arm portion 23.
  • Motors 46 and 47 and speed reducers 48 and 49 are arranged in the internal space 45 of the section 23.
  • the internal space 45 is at atmospheric pressure.
  • only two fork portions 21 protruding to one side in the horizontal direction are attached to the base portion 20 of the hand 13.
  • the same reference numerals are given to the same configurations as the configurations of the above-described embodiments or configurations corresponding to the configurations of the above-described embodiments.
  • FIG. 12 is a plan view of an industrial robot 1 according to another embodiment of the first invention.
  • the robot 1 includes one arm 14.
  • the robot 1 may include two arms 14 whose base end side is rotatably connected to the main body 15.
  • a part of the joint portion 26 is configured by the speed reducers 48 and 49, and the internal space of the first arm portion 23 is formed on the distal end side of the first arm portion 23.
  • motors 46 and 47 and speed reducers 48 and 49 are arranged.
  • the internal space 45 is at atmospheric pressure.
  • only two fork portions 21 protruding to one side in the horizontal direction are attached to the base portion 20 of the hand 13.
  • symbol is attached
  • FIG. 13 is a view for explaining a schematic configuration of an industrial robot 1 according to another embodiment of the first invention from the side.
  • the arm 14 is composed of two arm parts, the first arm part 23 and the second arm part 24.
  • the arm 14 may be configured by three arm portions of a first arm portion 23, a second arm portion 24, and a third arm portion 75.
  • the base end side of the first arm portion 23 is rotatably connected to the main body portion 15, and the base end side of the second arm portion 24 is connected to the distal end side of the first arm portion 23. It is connected so that it can rotate.
  • the proximal end side of the third arm portion 75 is rotatably connected to the distal end side of the second arm portion 24, and the hand 13 is rotatably connected to the distal end side of the third arm portion 75.
  • the connecting portion between the first arm portion 23 and the second arm portion 24 is a joint portion 26, and the robot 1 is connected to the first arm portion 23.
  • a motor 46 as a first motor for rotating the second arm portion 24 and a speed reducer 48 as a first speed reducer that reduces the rotation of the motor 46 and transmits it to the second arm portion 24.
  • the connecting portion between the second arm portion 24 and the third arm portion 75 is a joint portion 77, and the connecting portion between the third arm portion 75 and the hand 13 is a joint portion 78.
  • the robot 1 has a motor 87 as a second motor for rotating the third arm unit 75 with respect to the second arm unit 24 and a third for rotating the hand 13 with respect to the third arm unit 75.
  • a reduction gear 90 as a machine.
  • the speed reducers 89 and 90 are hollow speed reducers in which a through hole is formed at the center in the radial direction.
  • the joint part 26 is a first joint part
  • the joint part 77 is a second joint part
  • the joint part 78 is a third joint part.
  • the speed reducers 48, 89, 90 overlap on the same axis so that the axis center thereof coincides with the rotation center of the second arm portion 24 relative to the first arm portion 23. And a part of the joint portion 26.
  • the motors 46, 87, 88 and the speed reducers 48, 89, 90 are arranged in the internal space 45 of the first arm portion 23.
  • the internal space 45 is at atmospheric pressure.
  • the motors 46, 87, 88 and the speed reducers 48, 89, 90 may be disposed in the internal space of the second arm portion 24 that is hollow and has an internal pressure of atmospheric pressure. good.
  • the speed reducers 48, 89, 90 are arranged so as to be coaxially overlapped so that the axis center thereof and the rotation center of the third arm part 75 with respect to the second arm part 24 coincide with each other, and A part of the portion 77 may be configured.
  • the motors 46, 87, 88 and the speed reducers 48, 89, 90 are hollow and the internal space of the second arm part 24 or the third arm part 75 in which the internal pressure is atmospheric pressure. Arranged in the interior space.
  • the speed reducers 48, 89, and 90 are arranged so as to overlap on the same axis so that the center of the shaft and the center of rotation of the hand 13 with respect to the third arm portion 75 coincide with each other.
  • a part may be constituted.
  • the motors 46, 87, 88 and the speed reducers 48, 89, 90 are disposed in the internal space of the third arm portion 75 that is hollow and has an internal pressure of atmospheric pressure.
  • the speed reducer 48 is disposed so that the axis center thereof coincides with the rotation center of the second arm portion 24 with respect to the first arm portion 23 and the joint portion. 26, and the speed reducers 89 and 90 are arranged so as to overlap on the same axis so that the axial center thereof coincides with the rotation center of the third arm portion 75 with respect to the second arm portion 24.
  • a part of the joint portion 77 may be configured.
  • the motor 46 and the speed reducer 48 are disposed in the internal space 45 in which the internal pressure is atmospheric pressure, and the motors 87 and 88 and the speed reducers 89 and 90 are formed in a hollow shape and have an internal pressure.
  • the motor 46 and the speed reducer 48 have the internal space of the second arm portion 24 in which the internal pressure is atmospheric pressure (specifically, the internal space on the base end side of the second arm portion 24). ) May be arranged.
  • the motors 87 and 88 and the speed reducers 89 and 90 may be disposed in the internal space of the third arm portion 75 that is formed in a hollow shape and has an internal pressure of atmospheric pressure.
  • any two speed reducers selected from the speed reducers 48, 89, and 90 include the axis center, the rotation center of the second arm portion 24 with respect to the first arm portion 23, and the second arm portion.
  • 24, the rotation center of the third arm part 75 with respect to 24, or the rotation center of the hand 13 with respect to the third arm part 75 is arranged so as to overlap on the same axis, and the joint part 26 and the joint part 77
  • a part of the joint portion 78 may be configured.
  • two reduction gears arranged so as to be coaxially overlapped with the internal space of the first arm part 23, the second arm part 24 or the third arm part 75 in which the internal pressure is atmospheric pressure.
  • the robot 1 causes the first motor (that is, the second arm portion 24 and the third arm portion 75) to extend and contract the arm 14 in an interlocked manner.
  • a first motor for rotating the first hand a second motor for rotating the hand 13 with respect to the third arm portion 75, and a first speed reducing the rotation of the first motor and transmitting it to the arm 14.
  • a second speed reducer that decelerates the rotation of the second motor and transmits it to the hand 13.
  • the first reducer and the second reducer are hollow reducers in which a through hole is formed in the center in the radial direction, and the first reducer and the second reducer
  • the rotation center of the second arm portion 24 with respect to the first arm portion 23, the rotation center of the third arm portion 75 with respect to the second arm portion 24, or the rotation center of the hand 13 with respect to the third arm portion 75 coincides.
  • the joint portion 26, the joint portion 77, or a part of the joint portion 78 is configured so as to overlap on the same axis.
  • the first motor and the second motor are formed in the internal space of the first arm part 23, the second arm part 24 or the third arm part 75 which is formed in a hollow shape and has an internal pressure of atmospheric pressure.
  • a motor, a first speed reducer, and a second speed reducer are arranged. Even in this case, the same effect as that of the above-described embodiment can be obtained.
  • the arm 14 is composed of two arm portions, the first arm portion 23 and the second arm portion 24, but the arm is composed of four arm portions. May be.
  • the arm has a first arm portion whose base end side is rotatably connected to the main body portion 15 and a second arm portion whose base end side is rotatably connected to the distal end side of the first arm portion. And a third arm portion whose base end side is rotatably connected to the tip end side of the second arm portion, and a fourth arm portion whose base end side is rotatably connected to the tip end side of the third arm portion. It consists of and.
  • the hand 13 is rotatably connected to the distal end side of the fourth arm portion.
  • the robot 1 includes a first motor for rotating the second arm portion relative to the first arm portion, a second motor for rotating the third arm portion relative to the second arm portion, and a third A third motor for rotating the fourth arm relative to the arm, a fourth motor for rotating the hand relative to the fourth arm, and a second motor that decelerates the rotation of the first motor.
  • a first speed reducer that transmits to the arm part a second speed reducer that reduces the rotation of the second motor and transmits it to the third arm part, and a second speed reducer that transmits the rotation of the third motor to the fourth arm part.
  • 3 reduction gears, and the 4th reduction gear which decelerates rotation of the 4th motor and transmits to a hand.
  • the first reducer, the second reducer, the third reducer, and the fourth reducer are hollow reducers in which a through hole is formed at the center in the radial direction. It is. At least two of the first reducer, the second reducer, the third reducer, and the fourth reducer have an axis center, a rotation center of the second arm portion with respect to the first arm portion, The rotation center of the third arm portion with respect to the second arm portion, the rotation center of the fourth arm portion with respect to the third arm portion, or the rotation center of the hand with respect to the fourth arm portion so as to coincide with each other.
  • the object to be transported by the robot 1 is the substrate 2 for organic EL display, but the object to be transported by the robot 1 is a glass substrate for liquid crystal display. It may be a semiconductor wafer or the like.
  • the robot 1 is a robot for conveying a conveyance target object, the robot 1 may be a robot used for other uses, such as a welding robot.
  • the coordinates of the temporary current position of the rotation center C2 are input to the teaching operation terminal 19, and the coordinates of the temporary current position of the rotation center C2 are input. It is set.
  • the coordinates of the temporary current position of the rotation center C2 may be set by inputting the coordinates of the temporary current position of the rotation center C2 to the operation panel for operating the robot 1.
  • the operation panel in this case is installed, for example, in the operation room of the robot 1 where the operator is arranged.
  • the robot 1 is operated by a jog operation using the operation button 71 of the teaching operation terminal 19 in the operation process.
  • the robot 1 may be operated by a jog operation using an operation button or the like provided on the operation panel of the robot 1.
  • the robot 1 is operated by a jog operation in the operation process.
  • the robot 1 may be operated by an automatic operation that continuously operates the robot 1 in the operation process.
  • the teaching operation terminal 19 includes the operation button 71.
  • the teaching operation terminal 19 may include an operation lever instead of the operation button 71.
  • the robot 1 is operated by a jog operation using the operation lever of the teaching operation terminal 19.
  • the operation lever in this case is an operation member for operating the robot 1 in the operation process.
  • the arm 14 is composed of two arm parts, a first arm part 23 and a second arm part 24.
  • the arm 14 may be configured by three or more arm portions.
  • the same number of motors as the arm portions for rotating each of the three or more arm portions are provided.
  • the number of motors for rotating the plurality of arm portions may be smaller than the number of arm portions.
  • one hand 13 is connected to the tip side of the arm 14.
  • two hands may be connected to the distal end side of the arm 14.
  • two motors for rotating each of the two hands may be provided, or one motor for rotating the two hands together may be provided.
  • three or more hands may be connected to the distal end side of the arm 14.
  • a part of the robot 1 is disposed in a vacuum.
  • the entire robot 1 may be disposed in a vacuum, or the entire robot 1 may be disposed in the atmosphere.
  • the transport object to be transported by the robot 1 is the organic EL display substrate 2, but the transport object to be transported by the robot 1 may be a glass substrate for a liquid crystal display. However, it may be a semiconductor wafer or the like.
  • the robot 1 is a horizontal articulated robot.
  • an industrial robot to which the configuration of the present invention is applied is a vertical articulated robot such as a welding robot having an arm composed of a plurality of arm portions. There may be.
  • the hand 13 is rotatably connected to the distal end side of the arm 14, but a configuration other than the hand 13 such as an end effector may be connected to the distal end side of the arm 14.
  • the elevating mechanism 16 includes two brakes 41 and 42.
  • the brake 41 is operated and then the brake 42 is operated.
  • the motor 40 is stopped.
  • the elevating mechanism 16 may include only the brake 42 having a large braking force. In this case, when the robot 1 is in an emergency stop, the brake 42 may be immediately operated to stop the motor 40.
  • the arm 14 is composed of two arm parts, a first arm part 23 and a second arm part 24.
  • the arm 14 may be constituted by three or more arm portions.
  • the number of motors for rotating three or more arm portions is the same as the number of arm portions. That is, in this case, for example, the same number of motors as the arm portions for rotating each of the three or more arm portions are provided.
  • the number of motors may be smaller than the number of arm portions as long as two or more motors for rotating three or more arm portions are provided. That is, if two or more motors for rotating three or more arm portions are provided, a motor for rotating two or three arm portions together may be provided. good.
  • the robot 1 includes the elevating mechanism 16, but the robot 1 may not include the elevating mechanism 16. Even in this case, when the robot 1 is in an emergency stop, the CPU 79 stops the motors 31, 46 and 47 while controlling the motor drivers 71 to 73 using the power supplied from the charging / discharging unit 80.

Abstract

La présente invention concerne un robot industriel qui est disposé et utilisé dans un état de vide, des moteurs d'entraînement qui sont disposés dans l'atmosphère de l'intérieur d'un bras et qui permettent d'entraîner une main et le bras pouvant être efficacement refroidis. Le robot industriel (1) comprend les éléments suivants : un moteur (46) permettant de pivoter une seconde unité de bras (24) par rapport à une première unité de bras (23) ; un moteur (47) permettant de pivoter une main (13) par rapport à la seconde unité de bras (24) ; un mécanisme de décélération (48) permettant de décélérer la rotation du moteur (46) et de réaliser une transmission vers la seconde unité de bras (24) ; et un mécanisme de décélération (49) permettant de décélérer la rotation du moteur (47) et de réaliser une transmission vers la main (13). La main (13) et un bras (14) sont disposés dans un état de vide. Les mécanismes de décélération (48, 49) sont disposés sur le même axe de sorte que le centre de pivotement de la seconde unité de bras (24) par rapport à la première unité de bras (23) et le centre axial des mécanismes de décélération (48, 49) coïncident. Un espace interne (45) de la première unité de bras (23) qui est formé de manière à être creux est à la pression atmosphérique. Les moteurs (46, 47) et les mécanismes de décélération (48, 49) sont disposés dans l'espace interne (45).
PCT/JP2013/070160 2012-08-09 2013-07-25 Robot industriel WO2014024690A1 (fr)

Priority Applications (13)

Application Number Priority Date Filing Date Title
CN201380011432.6A CN104136174B (zh) 2012-08-09 2013-07-25 工业用机器人
KR1020167007910A KR101691775B1 (ko) 2012-08-09 2013-07-25 산업용 로봇
KR1020167007912A KR101691777B1 (ko) 2012-08-09 2013-07-25 산업용 로봇
US14/386,579 US9764461B2 (en) 2012-08-09 2013-07-25 Industrial robot
KR1020167007911A KR101691776B1 (ko) 2012-08-09 2013-07-25 산업용 로봇
KR1020147024129A KR101687463B1 (ko) 2012-08-09 2013-07-25 산업용 로봇
TW102128540A TWI581927B (zh) 2012-08-09 2013-08-08 Industrial robots
TW105114809A TWI635938B (zh) 2012-08-09 2013-08-08 Industrial robot and control method thereof
TW105114810A TWI669200B (zh) 2012-08-09 2013-08-08 Industrial robot and control method thereof
TW105114811A TWI635939B (zh) 2012-08-09 2013-08-08 Industrial robot and its origin position return method
US15/185,974 US10265845B2 (en) 2012-08-09 2016-06-17 Industrial robot
US15/185,962 US10350750B2 (en) 2012-08-09 2016-06-17 Industrial robot
US15/185,950 US10226863B2 (en) 2012-08-09 2016-06-17 Industrial robot

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
US201261681261P 2012-08-09 2012-08-09
US61/681,261 2012-08-09
JP2012247114A JP6051021B2 (ja) 2012-08-09 2012-11-09 産業用ロボットおよび産業用ロボットの制御方法
JP2012247113A JP6173678B2 (ja) 2012-08-09 2012-11-09 産業用ロボットおよび産業用ロボットの制御方法
JP2012247112A JP6173677B2 (ja) 2012-08-09 2012-11-09 産業用ロボットの原点位置復帰方法
JP2012-247114 2012-11-09
JP2012247111A JP6110636B2 (ja) 2012-08-09 2012-11-09 産業用ロボット
JP2012-247113 2012-11-09
JP2012-247111 2012-11-09
JP2012-247112 2012-11-09

Related Child Applications (4)

Application Number Title Priority Date Filing Date
US14/386,579 A-371-Of-International US9764461B2 (en) 2012-08-09 2013-07-25 Industrial robot
US15/185,974 Division US10265845B2 (en) 2012-08-09 2016-06-17 Industrial robot
US15/185,950 Division US10226863B2 (en) 2012-08-09 2016-06-17 Industrial robot
US15/185,962 Division US10350750B2 (en) 2012-08-09 2016-06-17 Industrial robot

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CN107030677A (zh) * 2017-04-26 2017-08-11 常州永盛新材料装备股份有限公司 一种空间四轴双臂机器人及其收卷轴装卸装置
US20180056506A1 (en) * 2016-08-31 2018-03-01 Seiko Epson Corporation Robot
CN112757314A (zh) * 2020-12-28 2021-05-07 河南大学 一种基于5g通信技术的深层矿洞勘测二轮机器人

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US20180056506A1 (en) * 2016-08-31 2018-03-01 Seiko Epson Corporation Robot
US10814477B2 (en) * 2016-08-31 2020-10-27 Seiko Epson Corporation Robot
CN107030677A (zh) * 2017-04-26 2017-08-11 常州永盛新材料装备股份有限公司 一种空间四轴双臂机器人及其收卷轴装卸装置
CN112757314A (zh) * 2020-12-28 2021-05-07 河南大学 一种基于5g通信技术的深层矿洞勘测二轮机器人

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