WO2014017305A1 - 漏れ検出装置およびこれを有する流体制御器 - Google Patents
漏れ検出装置およびこれを有する流体制御器 Download PDFInfo
- Publication number
- WO2014017305A1 WO2014017305A1 PCT/JP2013/068941 JP2013068941W WO2014017305A1 WO 2014017305 A1 WO2014017305 A1 WO 2014017305A1 JP 2013068941 W JP2013068941 W JP 2013068941W WO 2014017305 A1 WO2014017305 A1 WO 2014017305A1
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- WO
- WIPO (PCT)
- Prior art keywords
- leak
- fluid controller
- leak detection
- detection device
- fluid
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/24—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using infrasonic, sonic, or ultrasonic vibrations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/24—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using infrasonic, sonic, or ultrasonic vibrations
- G01M3/243—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using infrasonic, sonic, or ultrasonic vibrations for pipes
Definitions
- the present invention relates to a leak detection device for detecting a fluid leak and a fluid controller having the same.
- Patent Document 1 As a fluid controller provided with a leak detection device, one having a vibration pickup attached to the fluid controller body is known (Patent Document 1).
- Patent Document 2 a device using an ultrasonic sensor is known as a device for detecting leakage of a fluid controller.
- the thing of the said patent document 1 has the problem that the detection accuracy of a fluid leak is bad. Like patent document 2, the accuracy of leak detection improves by using an ultrasonic sensor.
- the leak detection device disclosed in Patent Document 2 detects a leak as necessary, and does not constantly monitor the leak. In order to constantly monitor, it is necessary to always attach the leak detection device to the fluid controller main body, and for that purpose, downsizing is an issue.
- An object of the present invention is to provide a leak detection device that can be downsized and always attached to a leak detection target member such as a fluid controller, and thereby can always monitor fluid leaks, and a fluid having the same It is to provide a controller.
- the leak detection device is a leak detection device for detecting a fluid leak, and is provided with a sensor holding body, a leak detection target member, and a leak port that communicates a sealed portion in the leak detection target member with the outside.
- the ultrasonic sensor held by the sensor holding body so as to face the ultrasonic wave, the ultrasonic path provided between the sensor surface of the ultrasonic sensor and the leak port, and the ultrasonic wave obtained by the ultrasonic sensor is processed And a processing circuit.
- a fluid controller comprises a fluid controller body that controls the flow of fluid, and a leak detection device that detects the leakage of fluid in the fluid controller body, and the fluid controller body includes a fluid controller body.
- a leak port is provided to communicate between the sealed portion and the outside, and the leak detection device is as described above.
- the fluid controller main body is, for example, a known diaphragm valve, and is usually provided with a leak port for leak detection. If the sealing performance in the fluid controller main body is broken due to damage to the diaphragm, fluid leaks from the leak port. Due to this leakage, ultrasonic waves (about 40 kHz) are generated, and the presence or absence of ultrasonic waves, that is, the presence or absence of leakage can be detected by the ultrasonic sensor. The processing circuit generates an alarm when the ultrasonic wave is continuously detected.
- the leak detection device is attached so as to use a leak port that is an ultrasonic wave generation location, whereby the presence or absence of leak can be accurately detected, and the leak detection device can be miniaturized.
- the downsized leak detection device can be easily attached to the main body of the fluid controller via the sensor holder, and the fluid controller thus obtained can always monitor the leak in the fluid controller. Become.
- the above-described leak detection device can be applied to any member provided with a leak port, and another example of a leak detection target member is a joint having a leak port formed on the side surface of a nut.
- the type of joint is not particularly limited, and the leak detection device uses various types of nuts provided with a leak port, such as a seal using a gasket or a method of fixing using a ferrule (ring) or the like. Applicable to any joint.
- the leak detection device of the present invention by using the leak port provided in the leak detection target member and causing the ultrasonic sensor to face the leak port, the fluid leak detection accuracy is improved. Miniaturization is possible. Accordingly, the ultrasonic sensor can be always attached to the leak detection target member via the sensor holding body, and it is possible to constantly monitor the leak in the leak detection target member.
- FIG. 1 is a partially cutaway side view showing an embodiment of a leak detection apparatus and a fluid controller having the same according to the present invention.
- FIG. 2 is a plan view of FIG.
- FIG. 3 is a front view of the fluid controller main body.
- FIG. 4 is a perspective view of a sensor holding body of the leak detection device.
- the fluid controller (1) includes a fluid controller body (leak detection target member) (2) that controls the flow of fluid (blocking and opening, flow rate adjustment, etc.), and a fluid controller. And a leak detection device (3) for detecting a fluid leak in the main body (2).
- the fluid controller main body (2) is a known diaphragm valve, and its internal configuration is omitted. However, as shown in FIG. 3, an inlet pipe joint (12) and an outlet pipe joint (13) are provided. A body (11), a substantially cylindrical bonnet (14) fitted on the upper part of the body (11), and a casing (15) attached above the bonnet (14).
- the bonnet (14) of the fluid controller main body (2) communicates the sealed portion in the fluid controller main body (2) with the outside, and is provided with a leak port (16) for detecting leakage. Yes.
- the leak detector (3) uses an ultrasonic sensor to detect leaks from the leak port (16) provided in the fluid controller body (2), and is attached to the fluid controller body (2).
- the ultrasonic sensor (22) the ultrasonic sensor (22), the ultrasonic sensor (22) held by the sensor holder (21) so as to face the leak port (16) at a predetermined interval.
- a linear ultrasonic path (23) provided between the sensor surface and the leak port (16), and a processing circuit (24) for processing the ultrasonic wave obtained by the ultrasonic sensor (22). Yes.
- the sensor holder (21) is provided in the horizontal portion (31) provided with the through hole (31 a) fitted in the bonnet (14), the bonnet (14), and the casing (15). It consists of a vertical part (32) applied from the side.
- An ultrasonic sensor (22) is provided at the lower part (32a) of the vertical part (32) of the sensor holder (21), and the upper part (32b) of the vertical part (32) of the sensor holder (21),
- a processing circuit (24) is provided.
- the sensor holder (21) can be detachably attached to the existing fluid controller main body (2).
- the sensor holder (21) is assembled by being divided into a plurality of members as necessary and coupled with screws or the like.
- the ultrasonic sensor (22) can measure the magnitude of an ultrasonic wave having a frequency of about 40 kHz.
- the sensor surface of the ultrasonic sensor (22) faces the leak port (16) through the ultrasonic path (23).
- the processing circuit (24) processes the output of the ultrasonic sensor (22) and, when the ultrasonic wave is continuously detected, determines that a leak has occurred and generates an alarm.
- the fluid controller (1) of this embodiment when the sealing performance in the fluid controller main body (2) is broken due to the breakage of the diaphragm, the fluid leaks from the leak port (16). Due to this leakage, ultrasonic waves (about 40 kHz) are generated, and the ultrasonic sensor (22) detects the presence or absence of ultrasonic waves, that is, the presence or absence of leakage. Since the leak detection device (3) is attached so as to use the leak port (16) that is an ultrasonic wave generation location, the presence or absence of leak can be detected with high accuracy. Therefore, it is possible to detect leakage without increasing the size of the ultrasonic sensor (22), and the leakage detection device (3) can be reduced in size. The downsized leak detection device (3) can be easily attached to the fluid controller main body (2) via the sensor holder (21). According to the fluid controller (1) thus obtained, it is possible to constantly monitor the leakage in the fluid controller (1).
- a diaphragm valve is exemplified as the fluid controller body (2), but the fluid controller body (2) is not limited to this, and may perform various fluid controls. As long as it has a leak port (16) for detecting a leak, the shape and the like are not limited.
- the sensor holder (21) is formed in a shape that fits the fluid controller body (2).
- the leak port (16) may be provided by post-processing at an appropriate position of the fluid controller body (2).
- nuts used in joints provided in the middle of piping are usually provided with a leak port on the side surface, and the leak detection device (3) is used for joints having such nuts. It can also be applied.
- the joint in this case includes first and second joint members having fluid passages communicating with each other, sealing means for sealing the butted portions of both joint members, and a nut for coupling the joint members together.
- a leak detection device (3) that detects leakage of fluid in the fitting body, and the nut is provided with a leak port (16) that communicates the sealed part in the fitting body with the outside.
- the leak detection device (3) includes a sensor holder (21) attached to a nut and an ultrasonic sensor (22) provided on the sensor holder (21) so as to face the leak port (16). And an ultrasonic path (23) provided between the sensor surface of the ultrasonic sensor (22) and the leak port (16), and a processing circuit for processing the ultrasonic wave obtained by the ultrasonic sensor (22) ( 24).
- the present invention it is possible to reduce the size and always attach it to a leakage detection target member such as a fluid controller. This makes it possible to constantly monitor the leakage of the fluid. Can contribute to elimination.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
Description
Claims (2)
- 流体の漏れを検出する漏れ検出装置であって、センサ保持体と、漏れ検出対象部材に設けられて漏れ検出対象部材内の密封部分と外部とを連通するリークポートに対向するようにセンサ保持体に保持された超音波センサと、超音波センサのセンサ面とリークポートとの間に設けられた超音波通路と、超音波センサで得られた超音波を処理する処理回路とを備えていることを特徴とする漏れ検出装置。
- 流体の流れを制御する流体制御器本体と、流体制御器本体内の流体の漏れを検出する漏れ検出装置とからなり、流体制御器本体に、流体制御器本体内の密封部分と外部とを連通するリークポートが設けられており、漏れ検出装置が請求項1に記載のものとされていることを特徴とする流体制御器。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020147035956A KR101710772B1 (ko) | 2012-07-23 | 2013-07-11 | 누설 검출 장치 및 이를 구비하는 유체 제어기 |
CN201380033899.0A CN104685333B (zh) | 2012-07-23 | 2013-07-11 | 泄漏检测装置以及具有该泄漏检测装置的流体控制器 |
US14/409,121 US9702781B2 (en) | 2012-07-23 | 2013-07-11 | Leakage detection device and fluid controller including same |
IL236100A IL236100A0 (en) | 2012-07-23 | 2014-12-07 | A leak detection and monitoring device that includes the aforementioned device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012162244A JP5978038B2 (ja) | 2012-07-23 | 2012-07-23 | 漏れ検出装置およびこれを有する流体制御器 |
JP2012-162244 | 2012-07-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2014017305A1 true WO2014017305A1 (ja) | 2014-01-30 |
Family
ID=49997121
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2013/068941 WO2014017305A1 (ja) | 2012-07-23 | 2013-07-11 | 漏れ検出装置およびこれを有する流体制御器 |
Country Status (7)
Country | Link |
---|---|
US (1) | US9702781B2 (ja) |
JP (1) | JP5978038B2 (ja) |
KR (1) | KR101710772B1 (ja) |
CN (1) | CN104685333B (ja) |
IL (1) | IL236100A0 (ja) |
TW (1) | TWI583935B (ja) |
WO (1) | WO2014017305A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7100364B2 (ja) * | 2017-02-20 | 2022-07-13 | 株式会社フジキン | 流体制御器の異常検知装置、異常検知システム、異常検知方法、及び流体制御器 |
CN110382934B (zh) | 2017-03-17 | 2021-09-10 | 株式会社富士金 | 流体控制设备 |
KR102402579B1 (ko) | 2017-03-17 | 2022-05-26 | 가부시키가이샤 후지킨 | 유체 제어 기기의 동작 분석 시스템, 방법, 및 컴퓨터 프로그램 |
WO2020031628A1 (ja) | 2018-08-10 | 2020-02-13 | 株式会社フジキン | 流体制御機器、流体制御機器の異常検知方法、異常検知装置、及び異常検知システム |
KR102395620B1 (ko) | 2018-08-30 | 2022-05-09 | 가부시키가이샤 후지킨 | 유체 제어 기기 |
US11879813B2 (en) * | 2020-09-24 | 2024-01-23 | Transportation Ip Holdings, Llc | Leak detection device |
WO2024101504A1 (ko) * | 2022-11-07 | 2024-05-16 | 한국자동차연구원 | 고압밸브용 가스누출 감지장치 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02291937A (ja) * | 1989-05-01 | 1990-12-03 | Kubota Corp | バルブの漏れ検出方法 |
JPH03130637A (ja) * | 1989-10-16 | 1991-06-04 | Tomoe Gijutsu Kenkyusho:Kk | バタフライ弁の漏洩検知方法及び装置 |
JP3142304B2 (ja) * | 1991-04-26 | 2001-03-07 | 清原 まさ子 | シール部破損検知機構付制御器 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS618850U (ja) | 1984-06-21 | 1986-01-20 | 石川島播磨重工業株式会社 | 弁の漏洩検出装置 |
US4823600A (en) * | 1987-11-05 | 1989-04-25 | Ue Systems, Inc. | Ultrasonic transducer and current loop transmitter |
JP3443807B2 (ja) * | 2000-02-15 | 2003-09-08 | 株式会社テイエルブイ | 超音波漏洩検出装置 |
CN2557927Y (zh) * | 2002-07-18 | 2003-06-25 | 房继祥 | 一种介质隔离插入式超声波传感器 |
JP2004108809A (ja) * | 2002-09-13 | 2004-04-08 | Nissan Motor Co Ltd | 漏れ検出機能付き超音波流量計 |
JP3868894B2 (ja) * | 2002-11-19 | 2007-01-17 | キリンビバレッジ株式会社 | ボトルキャップの密封性検査方法およびその装置 |
US20070068225A1 (en) * | 2005-09-29 | 2007-03-29 | Brown Gregory C | Leak detector for process valve |
EP1975573B1 (fr) | 2007-03-06 | 2017-10-04 | Itron Global SARL | Compteur à cellule de mesure à ultra sons de type capsule, standardisée |
DE102010040396A1 (de) * | 2010-09-08 | 2012-03-08 | Robert Bosch Gmbh | Durchflussmesser zur Erfassung einer Eigenschaft eines fluiden Mediums |
-
2012
- 2012-07-23 JP JP2012162244A patent/JP5978038B2/ja active Active
-
2013
- 2013-07-11 WO PCT/JP2013/068941 patent/WO2014017305A1/ja active Application Filing
- 2013-07-11 CN CN201380033899.0A patent/CN104685333B/zh not_active Expired - Fee Related
- 2013-07-11 US US14/409,121 patent/US9702781B2/en not_active Expired - Fee Related
- 2013-07-11 KR KR1020147035956A patent/KR101710772B1/ko active IP Right Grant
- 2013-07-19 TW TW102125859A patent/TWI583935B/zh not_active IP Right Cessation
-
2014
- 2014-12-07 IL IL236100A patent/IL236100A0/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02291937A (ja) * | 1989-05-01 | 1990-12-03 | Kubota Corp | バルブの漏れ検出方法 |
JPH03130637A (ja) * | 1989-10-16 | 1991-06-04 | Tomoe Gijutsu Kenkyusho:Kk | バタフライ弁の漏洩検知方法及び装置 |
JP3142304B2 (ja) * | 1991-04-26 | 2001-03-07 | 清原 まさ子 | シール部破損検知機構付制御器 |
Also Published As
Publication number | Publication date |
---|---|
TW201411110A (zh) | 2014-03-16 |
IL236100A0 (en) | 2015-01-29 |
CN104685333B (zh) | 2017-08-04 |
KR101710772B1 (ko) | 2017-02-27 |
US9702781B2 (en) | 2017-07-11 |
KR20150013878A (ko) | 2015-02-05 |
JP2014021029A (ja) | 2014-02-03 |
CN104685333A (zh) | 2015-06-03 |
US20150143876A1 (en) | 2015-05-28 |
JP5978038B2 (ja) | 2016-08-24 |
TWI583935B (zh) | 2017-05-21 |
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