WO2013125822A1 - Gallium nitride-based light emitting diode - Google Patents

Gallium nitride-based light emitting diode Download PDF

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Publication number
WO2013125822A1
WO2013125822A1 PCT/KR2013/001258 KR2013001258W WO2013125822A1 WO 2013125822 A1 WO2013125822 A1 WO 2013125822A1 KR 2013001258 W KR2013001258 W KR 2013001258W WO 2013125822 A1 WO2013125822 A1 WO 2013125822A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
light emitting
emitting diode
barrier layers
gallium nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2013/001258
Other languages
English (en)
French (fr)
Inventor
Seung Kyu Choi
Chae Hon Kim
Jung Whan JUNG
Ki Bum Nam
Kenji Shimoyama
Kaori Kurihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Seoul Viosys Co Ltd
Original Assignee
Mitsubishi Chemical Corp
Seoul Optodevice Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Chemical Corp, Seoul Optodevice Co Ltd filed Critical Mitsubishi Chemical Corp
Priority to JP2014558672A priority Critical patent/JP6062966B2/ja
Publication of WO2013125822A1 publication Critical patent/WO2013125822A1/en
Anticipated expiration legal-status Critical
Priority to US14/467,470 priority patent/US9853182B2/en
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
    • H10H20/812—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions within the light-emitting regions, e.g. having quantum confinement structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/815—Bodies having stress relaxation structures, e.g. buffer layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/822—Materials of the light-emitting regions
    • H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01—Manufacture or treatment
    • H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
    • H10H20/013—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials
    • H10H20/0137—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials the light-emitting regions comprising nitride materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/822—Materials of the light-emitting regions
    • H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
    • H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN

Definitions

  • the super-lattice layer having a multilayer structure may have a structure in which an InGaN layer, an AlGaN layer, and a GaN layer are repeatedly stacked in a plurality of cycles.
  • the super-lattice layer having a multilayer structure may further include a GaN layer between the InGaN layer and the AlGaN layer in each cycle.
  • FIG. 1 is a cross-sectional view of a light emitting diode (LED) according to an embodiment of the present invention.
  • FIG. 4 is a cross-sectional view of an active layer according to an embodiment of the present invention.
  • the sequence of the AlGaN layer 22 and the InGaN layer 21 may be interchanged.
  • the InGaN layer 21 has a wide band gap in comparison to a well layer in the active layer 30.
  • the AlGaN layer 22 has a wide band gap in comparison to a barrier layer in the active layer 30.
  • the InGaN layer 21 and the AlGaN layer 22 may be formed as undoped layers on which impurities are not intentionally doped, while the GaN layer 23 may be formed as a Si-doped layer.
  • the uppermost layer of the super-lattice layer 20 is the impurity-doped GaN layer 23.
  • the super-lattice layer 20 includes the AlGaN layer 22, holes in the active layer 30 can be prevented from moving toward the n type contact layer 19, thus enhancing radiative recombination rate in the active layer 30.
  • the AlGaN layer 22 may be formed to have a thickness smaller than 1 nra.
  • a cap layer may be formed between the respective well layers 33n, 33, and 33p and the barrier layers 31a and 31b positioned thereon.
  • the cap layer is formed to prevent the well layers from being damaged while the temperature of a chamber is increased to grow the barrier layers 31a and 3 lb.
  • the well layers 33n, 33, and 33p may be grown at a temperature of about 780 ° C
  • the barrier layers 31a and 31b may be grown at a temperature of about 800 ° C .
  • the p type clad layer 41 is disposed on the active layer 30 and may be made of AlGaN. Alternatively, the p type clad layer 41 may have a super-lattice structure in which InGaN and AlGaN are repeatedly stacked.
  • the p type clad layer 41 is an electron block layer, preventing electrons from moving to the p type contact layer 43, thus improving luminous efficiency.
  • the p type contact layer 43 may be made of Mg-doped GaN.
  • the p type contact layer 43 is disposed on the p type clad layer 41.
  • the transparent conductive layer 45 such as ITO or ZnO is formed on the p type contact layer 43 and is in ohmic-contact with the p type contact layer 43.
  • the second electrode 49 is electrically connected to the p type contact layer 43.
  • the second electrode 49 may be connected to the p type contact layer 43 through the transparent conductive layer 45.
  • FIG. 7 is an optical photograph for explaining a surface morphology of an epitaxial layer according to the use of an intermediate layer.
  • (a) is a surface photograph of the p type contact layer 43 taken by an optical microscope after sequentially growing the n type contact layer 19, the super-lattice layer 20, the active layer 30, the p type clad layer 41, and the p type contact layer 43 from the gallium nitride substrate 1 1 without an intermediate layer
  • (b) is a surface photograph of the p type contact layer 43 taken by an optical microscope after forming an Alo. 8 Ino.

Landscapes

  • Led Devices (AREA)
PCT/KR2013/001258 2012-02-24 2013-02-18 Gallium nitride-based light emitting diode Ceased WO2013125822A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014558672A JP6062966B2 (ja) 2012-02-24 2013-02-18 窒化ガリウム系発光ダイオード
US14/467,470 US9853182B2 (en) 2012-02-24 2014-08-25 Gallium nitride-based light emitting diode

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2012-0019011 2012-02-24
KR1020120019011A KR101843513B1 (ko) 2012-02-24 2012-02-24 질화갈륨계 발광 다이오드

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US14/467,470 Continuation US9853182B2 (en) 2012-02-24 2014-08-25 Gallium nitride-based light emitting diode

Publications (1)

Publication Number Publication Date
WO2013125822A1 true WO2013125822A1 (en) 2013-08-29

Family

ID=49005951

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2013/001258 Ceased WO2013125822A1 (en) 2012-02-24 2013-02-18 Gallium nitride-based light emitting diode

Country Status (4)

Country Link
US (1) US9853182B2 (enExample)
JP (1) JP6062966B2 (enExample)
KR (1) KR101843513B1 (enExample)
WO (1) WO2013125822A1 (enExample)

Cited By (1)

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JP2016048776A (ja) * 2014-08-25 2016-04-07 株式会社東芝 半導体発光素子及びその製造方法

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US9590140B2 (en) * 2014-07-03 2017-03-07 Sergey Suchalkin Bi-directional dual-color light emitting device and systems for use thereof
CN104701428B (zh) * 2015-03-16 2017-07-28 映瑞光电科技(上海)有限公司 一种降低led二极管电压的外延方法
CN104701432A (zh) * 2015-03-20 2015-06-10 映瑞光电科技(上海)有限公司 GaN 基LED 外延结构及其制备方法
US20170207365A1 (en) * 2016-01-20 2017-07-20 Google Inc. Layered active region light emitting diode
CN105789394A (zh) * 2016-04-20 2016-07-20 映瑞光电科技(上海)有限公司 一种GaN基LED外延结构及其制备方法
DE102016112294A1 (de) 2016-07-05 2018-01-11 Osram Opto Semiconductors Gmbh Halbleiterschichtenfolge
KR102540198B1 (ko) * 2020-05-22 2023-06-02 충칭 콘카 포토일렉트릭 테크놀로지 리서치 인스티튜트 컴퍼니 리미티드 초격자층, led 에피택셜 구조, 디스플레이 장치 및 이의 제조 방법
JP7260807B2 (ja) * 2020-12-24 2023-04-19 日亜化学工業株式会社 窒化物半導体発光素子およびその製造方法
CN114156380B (zh) * 2021-11-30 2023-09-22 华灿光电（浙江）有限公司 提高内量子效率的发光二极管外延片及其制备方法

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Also Published As

Publication number Publication date
US9853182B2 (en) 2017-12-26
JP6062966B2 (ja) 2017-01-18
US20140361247A1 (en) 2014-12-11
KR101843513B1 (ko) 2018-03-29
KR20130097390A (ko) 2013-09-03
JP2015511407A (ja) 2015-04-16

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