WO2013108804A1 - Gyroscope vibrant - Google Patents

Gyroscope vibrant Download PDF

Info

Publication number
WO2013108804A1
WO2013108804A1 PCT/JP2013/050717 JP2013050717W WO2013108804A1 WO 2013108804 A1 WO2013108804 A1 WO 2013108804A1 JP 2013050717 W JP2013050717 W JP 2013050717W WO 2013108804 A1 WO2013108804 A1 WO 2013108804A1
Authority
WO
WIPO (PCT)
Prior art keywords
detection
axis
beams
vibration
mass
Prior art date
Application number
PCT/JP2013/050717
Other languages
English (en)
Japanese (ja)
Inventor
持田洋一
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Publication of WO2013108804A1 publication Critical patent/WO2013108804A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion

Definitions

  • the present invention relates to a vibrating gyroscope that can detect angular velocities around two or three axes of an orthogonal coordinate system.
  • it is driven to vibrate (drive vibration) in the in-plane direction of the substrate that supports the vibrator, and an angular velocity acts around two axes in the substrate surface, so that an axis orthogonal to the two axes that detect the angular velocity Vibration (detection vibration) due to the Coriolis force occurs along the axis, and vibration (drive) in the in-plane direction of the support gyro that can detect angular velocities around the two axes of the Cartesian coordinate system and the support substrate
  • vibration (detection vibration) due to Coriolis force is generated along an axis orthogonal to the two axes for detecting the angular velocity.
  • the axis along the normal direction (thickness direction) of the substrate supporting the vibrating gyroscope is the Z axis of the orthogonal coordinate system
  • the two axes of the orthogonal coordinate system orthogonal to the Z axis are the X axis and the Y axis explain.
  • FIG. 11A is an XY plane plan view of the vibrating gyroscope 101 according to the first conventional example (see, for example, Patent Document 1).
  • the vibration gyro 101 includes a substrate 102, a support unit 103, drive mass units 104 to 107, a connecting beam 108, vibration generation units 109 to 112, detection units 113 to 116, detection beams 117 to 120, and displacement detection. Parts 121 to 124 and vibration monitor parts 129 to 132 are provided.
  • the substrate 102 is formed in a rectangular flat plate shape in plan view with a material such as glass, and extends horizontally along the X-axis and Y-axis directions.
  • the supporting portion 103 On the substrate 102, for example, by etching a conductive low resistance silicon substrate or the like, the supporting portion 103, the driving mass portions 104 to 107, the connecting beam 108, the detecting portions 113 to 116, and the detecting beams 117 to 116 are performed. 120 etc. are formed.
  • the support part 103 is fixed to the surface of the substrate 102.
  • driving mass portions 104 to 107, a connecting beam 108, detection portions 113 to 116, and detection beams 117 to 120 are provided in a state of floating from the substrate 102.
  • the vibration monitor units 129 to 132 detect displacements of the drive mass units 104 to 107 in the vibration direction.
  • the driving mass units 104 to 107 are opposed to the surface of the substrate 102 with a gap, and are point-symmetric with respect to the central part where the support part 103 is provided, every 90 ° with respect to the circumferential direction surrounding the central part. They are arranged at equal intervals. For this reason, the driving mass units 104 and 105 are arranged in a first driving axis direction inclined by 45 ° from the X axis (along a diagonal line passing through two corners on the side where the driving mass units 104 and 105 of the substrate 102 are arranged). And are opposed to each other across the center.
  • the driving mass units 106 and 107 are inclined by ⁇ 45 ° from the X axis in the second driving axis direction perpendicular to the first driving axis (on the side where the driving mass units 106 and 107 of the substrate 102 are arranged). Are arranged along a diagonal line passing through the two corners) and face each other across the center.
  • the drive mass units 104 to 107 are formed in a substantially square shape, and the square corner portions of the drive mass units 104 to 107 are connected to the connecting beam 108 and the drive mass units 104 to 107 are driven to vibrate. It has become a fulcrum of.
  • the connecting beam 108 is formed in a substantially rectangular elongated frame shape, and connects the corner portions of the driving mass portions 104 to 107 to each other.
  • the connecting beam 108 is adjusted so that the drive amplitudes and phases of the drive mass units 104 to 107 are the same.
  • the vibration generators 109 to 112 are constituted by a movable drive electrode formed on the outer edge side of the drive mass units 104 to 107 and a fixed drive electrode formed on the substrate 102.
  • the movable drive electrode and the fixed drive electrode are constituted by comb-like electrodes. Therefore, the vibration generating units 109 to 112 drive and vibrate the driving mass units 104 to 107, respectively, by an electrostatic force generated between the movable side driving electrode and the fixed side driving electrode. Due to the vibration generators 109 and 110, the drive mass units 104 and 105 vibrate in the second drive axis direction in mutually opposite phases. Due to the vibration generators 111 and 112, the drive mass units 106 and 107 vibrate in the first drive axis direction in opposite phases.
  • the vibration generators 109 to 112 vibrate the four drive mass units 104 to 107 in the circumferential direction surrounding the central portion in a state where the drive mass units 104 to 107 adjacent in the circumferential direction are in opposite phases. For this reason, when the drive mass units 104 and 106 approach each other, the drive mass units 105 and 107 approach each other, and the drive mass units 104 and 106 and the drive mass units 105 and 107 move away from each other. On the other hand, when the driving mass units 104 and 107 approach, the driving mass units 105 and 106 approach each other, and the driving mass units 104 and 107 and the driving mass units 105 and 106 move away from each other.
  • the detecting units 113 to 116 are respectively positioned between the driving mass units 104 to 107 and connected to the connecting beam 108.
  • the detectors 113 to 116 have a point-symmetric shape with the center portion as the center, and face the surface of the substrate 102 with a gap.
  • a midway portion in the length direction is connected to an intermediate portion of the side of the connecting beam 108, and a base end side portion is connected to the detection beams 117 to 120.
  • the detection beams 117 to 120 are connected to the support portion 103 and the base end portions of the detection portions 113 to 116, and connect the support portion 103 and the connection beam 108 via the detection portions 113 to 116. .
  • the detection beams 117 to 120 support the connecting beam 108, the driving mass units 104 to 107, and the detection units 113 to 116 in a vibrable state around two axes of the X axis and the Y axis.
  • the vibrating gyroscope 101 when an angular velocity around the X axis is applied, components around the first drive axis among the angular velocities around the X axis act on the drive mass units 104 and 105 that vibrate in the second drive axis direction. In response to this component, a Coriolis force is generated in the Z-axis direction (substrate thickness direction). At this time, a component around the second drive axis among the angular velocities around the X axis acts on the drive mass units 106 and 107 that vibrate in the first drive axis direction. Coriolis force toward (thickness direction) is generated.
  • the detection units 113 to 116 vibrate in the Z-axis direction at both ends in the Y-axis direction with the X axis passing through the center as the center. That is, the detection units 115 and 116 are displaced in the Z-axis direction of the substrate 102.
  • the angular velocity around the Y axis acts, the components around the first drive axis among the angular velocities around the Y axis act on the drive mass units 104 and 105 that vibrate in the second drive axis direction. Coriolis force is generated in the Z-axis direction (substrate thickness direction) according to the component.
  • a component around the second drive axis among the angular velocities around the Y axis acts on the drive mass units 106 and 107 that vibrate in the first drive axis direction. Coriolis force toward (thickness direction) is generated.
  • the detection units 113 to 116 vibrate in the Z-axis direction at both ends in the X-axis direction around the Y-axis passing through the center. That is, the detection units 113 and 114 are displaced in the Z-axis direction of the substrate 102.
  • the displacement detectors 121 to 124 detect that the detectors 113 to 116 are displaced in the thickness direction of the substrate 102 when the detectors 113 to 116 vibrate around the X axis and the Y axis, respectively.
  • the displacement detectors 121 to 124 are configured by a movable side detection electrode provided in the detectors 113 to 116 and a fixed side detection electrode fixed to a cover plate (not shown).
  • the cover plate is disposed above the substrate 102, and the fixed detection electrode is displaced in the thickness direction of the substrate 102 with respect to the movable detection electrode.
  • the movable side detection electrode and the fixed side detection electrode are constituted by comb-like electrodes.
  • the displacement detectors 121 to 124 when the detectors 113 to 116 are displaced in the Z-axis direction by the angular velocity around the X-axis or Y-axis, the displacement amount between the movable-side detection electrode and the fixed-side detection electrode. Detect by the change in capacitance between.
  • the vibration gyro 101 uses an electrostatic force as a driving force
  • the driving electrodes of the vibration generators 109 to 112 need to be configured by a large number of comb-like electrodes in order to obtain a desired driving force.
  • the vibration gyro 101 uses a capacitance for detecting the angular velocity, in order to obtain high sensitivity, the detection electrodes of the displacement detectors 121 to 124 need to be composed of a large number of comb-like electrodes. There is. For this reason, it is difficult to reduce the size of the vibration gyro 101.
  • the vibration gyro 101 when the detection units 113 to 116 are displaced in the Z-axis direction by the angular velocity around the X-axis or the Y-axis, the amount of displacement is determined between the movable detection electrode and the fixed detection electrode. Since detection is performed based on a change in capacitance, the fixed-side detection electrode and the movable-side detection electrode constituting the displacement detection units 121 to 124 need to be displaced in the thickness direction of the substrate 102. For this reason, a complicated manufacturing process is required to form the fixed detection electrode and the movable detection electrode.
  • FIG. 11B is a perspective view of a vibrating gyroscope 201 according to a second conventional example (for example, see Patent Document 2).
  • the vibration gyro 201 includes a base 202, detection beams 203a to 203d, and a frame 206.
  • the base 202 is located at the center of the vibration gyro 201.
  • Each of the detection beams 203a to 203d extends in a cross shape from the base portion 202.
  • One end of each of the detection beams 203 a to 203 d is connected to the base 202, and the other end is connected to the frame body 206.
  • the frame 206 has a substantially square shape in plan view, and is constituted by drive beams 205a to 205d that connect the respective corners 204a to 204d located at the apexes of the substantially square.
  • the driving beams 205a to 205d are integrally provided with masses 207a to 207d, respectively.
  • the masses 207a to 207d are constituted by a pair of auxiliary masses provided so as to sandwich the drive beams 205a to 205d in the central portions of the drive beams 205a to 205d.
  • Driving piezoelectric elements 210 to 213 are provided on the surfaces of the driving beams 205a to 205d.
  • the driving piezoelectric elements 210 to 213 are each constituted by a pair of piezoelectric elements arranged in parallel with each other along the extending direction of the driving beams 205a to 205d.
  • a driving voltage is applied to the driving piezoelectric elements 210 to 213, the driving piezoelectric elements 210 to 213 expand and contract.
  • the driving beams 205a to 205d are driven by the driving piezoelectric elements 210 to 213 so as to move toward the base 202 and away from the base 202 along the plane including the frame body 206 and the masses 207a to 207d. It is alternately displaced periodically and vibrates in the same phase.
  • Detecting piezoelectric elements 214 to 217 are provided on the surfaces of the detecting beams 203a to 203d.
  • the detection piezoelectric elements 214 to 217 are each composed of a pair of piezoelectric elements arranged in parallel with each other along the extending direction of the detection beams 203a to 203d.
  • the detection piezoelectric elements 214 to 217 detect the displacement of the detection beams 203a to 203d due to the Coriolis force generated when an angular velocity around the Z-axis direction is applied to the vibration gyro 201.
  • the masses 207a to 207d are oriented perpendicular to the vibration direction of the driving vibration.
  • Displacement (vibration) based on Coriolis force occurs in the direction parallel to the extending direction of the driving beams 205a to 205d in a stationary state.
  • the displacement (vibration) based on the Coriolis force propagates to the detection beams 203a to 203d via the drive beams 205a to 205d and the corners 204a to 204d of the frame 206, and vibrates the detection beams 203a to 203d.
  • the vibration displacement is detected by the detection piezoelectric elements 214 to 217 provided on the detection beams 203a to 203d.
  • the vibration gyro 201 since the angular velocity is detected using a piezoelectric element instead of a comb-like electrode, the vibration gyro can be downsized and can be manufactured by a simple manufacturing process.
  • the vibration gyro 201 described above cannot detect angular velocities around two axes like the vibration gyro 101, and can detect only angular velocities around one axis.
  • the detection beams 203a to 203d are displaced in the in-plane direction perpendicular to the Z axis by Coriolis force generated when an angular velocity around the Z axis direction is applied to the vibrating gyroscope 201.
  • the detection vibration is defined by the width of the detection beams 203a to 203d
  • the width of the detection beams 203a to 203d cannot be increased freely. Therefore, the area of the piezoelectric element cannot be increased in order to increase the detection sensitivity, and it is difficult to increase the detection sensitivity.
  • an object of the present invention is to detect angular velocities around two axes or three axes of a rectangular coordinate system using a piezoelectric element, which is easy to downsize and can be manufactured with a simple manufacturing process.
  • the object is to realize a vibration gyro with high angular velocity detection sensitivity.
  • the vibrating gyroscope according to the present invention is viewed in plan view so as to extend in a first direction or a second direction orthogonal to the first direction from the fixed portion, and a fixed portion located in the center in plan view.
  • the four detection beams provided in a cross shape, the four mass beams disposed between the four detection beams and arranged in point symmetry with respect to the fixed portion, the four detection beams, and 4 It is connected to the four mass parts, and is provided on the vibration transmission beam supporting the four mass parts so as to vibrate, and the vibration transmission beam, toward the circumferential direction surrounding the fixed part,
  • the piezoelectric element for a drive which vibrates four mass parts in the opposite direction to an adjacent mass part, and the piezoelectric element for a detection provided in the four detection beams are provided.
  • the vibration transmission beam includes a drive beam and a support beam
  • the drive beam has an end connected to the mass portion and is inclined at 45 ° or ⁇ 45 ° from the first direction.
  • the support beam is provided so that the end thereof is connected to the detection beam and extends in parallel with the detection beam.
  • the support beam has a U-shaped planar shape.
  • the vibration gyro described above further includes a support substrate that supports the fixed portion and a detection piezoelectric element that is provided on a part of the beam for vibration transmission and detects an angular velocity around an axis perpendicular to the support substrate. It is preferable.
  • the vibration gyro can be miniaturized and manufactured by a simple manufacturing process because it is driven not by the comb-like electrode but by the driving piezoelectric element and the angular velocity is detected by the detecting piezoelectric element. be able to.
  • the mass part is driven and vibrated in the circumferential direction in the opposite phase to the adjacent mass parts, the four detection beams arranged in the middle of the mutually adjacent mass parts hardly vibrate. .
  • the detection beam is bent in the Z-axis direction by Coriolis force, a large stress acts on the detection piezoelectric element disposed on the surface of the detection beam, and the detection signal output from the detection piezoelectric element is increased. Can do. Further, by adjusting the vibration mode in the in-plane direction of the substrate and arranging the electrode at an optimal position, the angular velocities around the two axes or the three axes of the orthogonal coordinate system can be detected separately.
  • FIG. 6 is a contour diagram schematically showing stress in the Z-axis direction when an angular velocity around the X-axis acts on the vibration gyro according to the first embodiment of the present invention.
  • FIG. 5 is a contour diagram schematically showing stress in the Y-axis direction when an angular velocity around the X-axis acts on the vibration gyro according to the first embodiment of the present invention.
  • FIG. 1 is a diagram illustrating a configuration of a vibrating gyroscope 1 according to the first embodiment of the present invention.
  • FIG. 1A is a plan view of the XY plane of the vibrating gyroscope 1.
  • FIG. 1B is an XY plane plan view in which a part of the vibrating gyroscope 1 is enlarged and displayed.
  • FIG. 1C is a cross-sectional view along the XZ plane of the vibrating gyroscope 1 at the position indicated by the alternate long and short dash line A-A ′ in FIG.
  • the vibration gyro 1 includes driving piezoelectric elements 12A1, 12A2, 12B1, 12B2, 12C1, 12C2, 12D1, and 12D2, detecting piezoelectric elements 13A, 13B, 13C, and 13D, a fixing portion 21, and detection beams 22A and 22B. 22C, 22D, drive beams 23A1, 23A2, 23B1, 23B2, 23C1, 23C2, 23D1, 23D2, connecting beams 24A1, 24A2, 24B1, 24B2, 24C1, 24C2, 24D1, 24D2, and support beams 25A1, 25A2, 25B1 , 25B2, 25C1, 25C2, 25D1, 25D2 and mass parts 26A, 26B, 26C, 26D.
  • the mass parts 26A to 26D constitute a vibrator.
  • the fixed portion 21, the detection beams 22A to 22D, the drive beams 23A1 to 23D2, the connection beams 24A1 to 24D2, the support beams 25A1 to 25D2, and the mass portions 26A to 26D are formed by, for example, etching silicon. Is formed.
  • the axis along the normal direction (thickness direction) of the fixed portion 21 will be described as the Z axis of the orthogonal coordinate system, and the two axes of the orthogonal coordinate system orthogonal to the Z axis will be described as the X axis and the Y axis.
  • the fixed portion 21 has a square shape with four sides parallel to the X axis or the Y axis, and is located in the center of the vibrating gyroscope 1 in plan view.
  • the fixing portion 21 is supported by a support substrate (not shown). Specifically, the fixing portion 21 is fixed to the surface of a support substrate (not shown). Accordingly, the detection beams 22A to 22D, the drive beams 23A1 to 23D2, the connection beams 24A1 to 24D2, the support beams 25A1 to 25D2, and the mass portions 26A to 26D are provided in a state of floating from the support substrate.
  • the support substrate is formed in a flat plate shape from ceramic, resin, silicon, glass material, or the like, and extends horizontally along the X-axis and Y-axis directions.
  • each of the detection beams 22A to 22D is connected to the vicinity of the center of each side of the fixed part 21, and a plan view is formed from the end along a direction perpendicular to each side of the fixed part 21. It is provided to extend in a cross shape.
  • the detection beam 22A is provided so as to extend from the fixed portion 21 along the Y-axis direction.
  • the detection beam 22B is provided so as to extend from the fixed portion 21 to the opposite side of the detection beam 22A along the Y-axis direction.
  • the detection beam 22C is provided so as to extend from the fixed portion 21 along the X-axis direction.
  • the detection beam 22D is provided so as to extend from the fixed portion 21 along the X-axis direction to the opposite side of the detection beam 22C.
  • the mass portions 26A to 26D are opposed to the surface of the support substrate with a gap, and are disposed between the detection beams 22A to 22D at a point-symmetrical position with respect to the center (fixed portion 21) of the vibrating gyroscope 1. ing. Further, the mass portions 26A to 26D are arranged at equal intervals from each other every 90 ° with respect to the circumferential direction surrounding the center of the vibrating gyroscope 1.
  • the mass portions 26 ⁇ / b> A and 26 ⁇ / b> C are arranged along an axis inclined by 45 ° from the X axis, and face each other with the center of the vibration gyro 1 interposed therebetween.
  • the mass portions 26B and 26D are disposed along an axis inclined by ⁇ 45 ° from the X axis, and face each other with the center of the vibrating gyroscope 1 interposed therebetween.
  • the planar shape of the mass portions 26A to 26D is a substantially U-shape in which a recess is formed on the center side of the vibrating gyroscope 1.
  • the end portions of the driving beams 23A1 and 23C2 are connected to the concave portion of the mass portion 26A.
  • the end portions of the driving beams 23B2 and 23C1 are connected to the concave portion of the mass portion 26B.
  • the end portions of the drive beams 23B1 and 23D2 are connected to the concave portion of the mass portion 26C.
  • the end portions of the driving beams 23A2 and 23D1 are connected to the concave portion of the mass portion 26D.
  • the portions where the driving beams in the concave portions of the mass portions 26A to 26D and the coupling beams 24A1 to 24D2 are connected serve as fulcrums when the mass portions 26A to 26D are driven to vibrate.
  • the drive beams 23A1 to 23D2, the connection beams 24A1 to 24D2, and the support beams 25A1 to 25D2 are connected to form a vibration transmission beam.
  • the drive beam 23A1, the connection beam 24A1, and the support beam 25A1 are connected between the mass portion 26A and the detection beam 22A.
  • the drive beam 23A2, the connection beam 24A2, and the support beam 25A2 are connected between the mass portion 26D and the detection beam 22A.
  • the drive beam 23B1, the connection beam 24B1, and the support beam 25B1 are connected between the mass portion 26C and the detection beam 22B.
  • the drive beam 23B2, the coupling beam 24B2, and the support beam 25B2 are coupled between the mass portion 26B and the detection beam 22B.
  • the drive beam 23C1, the connection beam 24C1, and the support beam 25C1 are connected between the mass portion 26B and the detection beam 22C.
  • the drive beam 23C2, the connection beam 24C2, and the support beam 25C2 are connected between the mass portion 26A and the detection beam 22C.
  • the drive beam 23D1, the connection beam 24D1, and the support beam 25D1 are connected between the mass portion 26D and the detection beam 22D.
  • the drive beam 23D2, the connection beam 24D2, and the support beam 25D2 are connected between the mass portion 26C and the detection beam 22D.
  • the driving beams 23A1 and 23C2 are provided so as to extend along an axis inclined by 45 ° from the X axis, and one end thereof is connected to the mass part 26A.
  • the drive beams 23B2 and 23C1 are provided so as to extend along an axis inclined by ⁇ 45 ° from the X axis, and one end thereof is connected to the mass part 26B.
  • the drive beams 23B1 and 23D2 are provided so as to extend along an axis inclined by 45 ° from the X axis, and one end thereof is connected to the mass portion 26C.
  • the drive beams 23A2 and 23D1 are provided so as to extend along an axis inclined by ⁇ 45 ° from the X axis, and one end thereof is connected to the mass part 26D.
  • the driving beams 23A1 to 23D2 support the mass portions 26A to 26D so that they can vibrate in the circumferential direction surrounding the center of the vibrating gyroscope 1.
  • the drive beams 23A1 to 23D2 are provided so as to extend outward from the vicinity of the center of the vibration gyro 1 and are connected to the mass parts 26A to 26D, so that the mass parts 26A to 26D pass through the center of the vibration gyro 1.
  • the fulcrum when vibrating in the surrounding circumferential direction can be in the vicinity of the connecting portion between the driving beam and the connecting beam, and the amplitude of vibration of the driving beams 23A1 to 23D2 can be increased.
  • the planar shape of the support beams 25A1 to 25D2 is U-shaped.
  • One end of the support beam 25A1 is connected to the end of the detection beam 22A on the Y-axis side, and the other end is connected to the connection beam 24A1.
  • One end of the support beam 25A2 is connected to the end of the detection beam 22A on the Y-axis side, and the other end is connected to the connection beam 24A2.
  • One end of the support beam 25B1 is connected to the end of the detection beam 22B on the Y-axis side, and the other end is connected to the connection beam 24B1.
  • One end of the support beam 25B2 is connected to the end of the detection beam 22B on the Y-axis side, and the other end is connected to the connection beam 24B2.
  • the support beam 25C1 has one end connected to the X-axis end of the detection beam 22D and the other end connected to the connection beam 24D1.
  • One end of the support beam 25D2 is connected to the X-axis end of the detection beam 22C, and the other end is connected to the connection beam 24C2.
  • the support beam 25D1 has one end connected to the X-axis end of the detection beam 22D and the other end connected to the connection beam 24D1.
  • One end of the support beam 25D2 is connected to the X-axis end of the detection beam 22D, and the other end is connected to the connection beam 24D2.
  • the configuration of the support beams 25A1 to 25D2 will be described using the support beams 25A1 and 25C2 whose configuration is enlarged and shown in FIG.
  • the support beams 25 ⁇ / b> A ⁇ b> 1 and 25 ⁇ / b> C ⁇ b> 2 include a first beam portion 31, a second beam portion 32, and a third beam portion 33.
  • One end portion of the first beam portion 31 is connected to the end portions of the detection beams 22 ⁇ / b> A and 22 ⁇ / b> C, and the other end portion is connected to the second beam portion 32.
  • the first beam portion 31 is provided so as to extend in parallel with the connected detection beams 22A and 22C.
  • the second beam portion 32 connects the first beam portion 31 and the third beam portion 33 and is provided so as to extend parallel to the X axis and the Y axis.
  • the third beam portion 33 has one end connected to the second beam 32 and the other end connected to the connecting beams 24A1 and 24C2.
  • the third beam portion 33 is provided so as to extend in parallel with the first beam portion 31. That is, the third beam portion 33 is provided so as to extend in parallel with the detection beams 22A and 22C to which the first beam portion 31 is connected.
  • the support beams 25A2, 25B1, 25B2, 25C1, 25D1, and 25D2 shown in FIG. 1A are also similar to the support beams 25A1 and 25C2, and the first beam portion 31, the second beam portion 32, 3 beam portions 33.
  • the reference numerals of the first beam portion 31, the second beam portion 32, and the third beam portion 33 are omitted.
  • the support beams 25A1 to 25D2 since the planar shape is U-shaped, the length of the beam is increased without increasing the size of the vibrating gyroscope 1.
  • the connecting beams 24A1 to 24D2 connect the driving beams 23A1 to 23D2 and the support beams 25A1 to 25D2, and are provided so as to extend in parallel with the X axis and the Y axis.
  • the driving piezoelectric elements 12A1 to 12D2 and the detecting piezoelectric elements 13A to 13D are an upper electrode, a lower electrode, and a piezoelectric element disposed between the upper electrode and the lower electrode. It has a body layer and a pad formed on the fixing portion 21.
  • the piezoelectric layer is a thin film made of any piezoelectric material such as aluminum nitride, lead zirconate titanate, potassium sodium niobate, and zinc oxide.
  • the lower electrode is connected to the ground.
  • the top electrodes of the driving piezoelectric elements 12A1, 12A2, 12B1, and 12B2 are connected to a first driving terminal (not shown), and the driving piezoelectric elements 12A1, 12A2, 12B1, and 12B2 have a predetermined resonance frequency (driving vibration). Alternating voltage) is applied.
  • the top electrodes of the driving piezoelectric elements 12C1, 12C2, 12D1, and 12D2 are connected to a second driving terminal (not shown), and the driving piezoelectric elements 12C1, 12C2, 12D1, and 12D2 include the driving piezoelectric element 12A1. , 12A2, 12B1, and 12B2 are applied with an alternating voltage whose phase is opposite to that of the alternating voltage.
  • Upper surface electrodes of the detection piezoelectric elements 13A to 13D are connected to a detection terminal (not shown).
  • the driving piezoelectric elements 12A1 to 12D2 are formed on the surfaces of the fixed portion 21, the detection beams 22A to 22D, and the support beams 25A1 to 25D2.
  • the driving piezoelectric element 12A1 includes a portion provided on the surfaces of the fixed portion 21, the detection beam 22A, and the first beam portion 31 of the support beam 25A1 so as to extend along the Y axis, and a second portion of the support beam 25A1.
  • the driving piezoelectric element 12A2 includes a portion provided on the surfaces of the fixed portion 21, the detection beam 22A, and the first beam portion 31 of the support beam 25A2 so as to extend along the Y axis, and a second portion of the support beam 25A2.
  • the driving piezoelectric element 12B1 includes a portion provided on the surfaces of the fixed portion 21, the detection beam 22B, and the first beam portion 31 of the support beam 25B1 so as to extend along the Y axis, and a second portion of the support beam 25B1.
  • the driving piezoelectric element 12B2 includes a portion provided on the surfaces of the fixed portion 21, the detection beam 22B, and the first beam portion 31 of the support beam 25B2 so as to extend along the Y axis, and a second portion of the support beam 25B2. A portion provided on the surface of the beam portion 32 so as to extend along the X-axis, and the end of the third beam portion 33 of the support beam 25B2 from the end on the second beam portion 32 side to the surface of the central portion. And a portion provided so as to extend along the axis, and is disposed on the inner peripheral side of the U-shaped support beam 25B2.
  • the driving piezoelectric element 12C1 includes a portion provided on the surfaces of the fixed portion 21, the detection beam 22C, and the first beam portion 31 of the support beam 25C1 so as to extend along the X axis, and a second portion of the support beam 25C1.
  • the driving piezoelectric element 12C2 includes a portion provided on the surfaces of the fixed portion 21, the detection beam 22C, and the first beam portion 31 of the support beam 25C2 so as to extend along the X axis, and a second portion of the support beam 25C2.
  • the driving piezoelectric element 12D1 includes a portion provided on the surfaces of the fixed portion 21, the detection beam 22D, and the first beam portion 31 of the support beam 25D1 so as to extend along the X axis, and a second portion of the support beam 25D1.
  • the driving piezoelectric element 12D2 includes a portion provided on the surfaces of the fixed portion 21, the detection beam 22D, and the first beam portion 31 of the support beam 25D2 so as to extend along the X axis, and a second portion of the support beam 25D2.
  • the detection piezoelectric elements 13A to 13D are formed on the surfaces of the fixed portion 21 and the detection beams 22A to 22D.
  • the detecting piezoelectric element 13A is provided between the driving piezoelectric elements 12A1 and 12A2 and on the surfaces of the fixed portion 21 and the detecting beam 22A so as to extend along the Y axis.
  • the detecting piezoelectric element 13B is provided between the driving piezoelectric elements 12B1 and 12B2 and on the surfaces of the fixed portion 21 and the detecting beam 22B so as to extend along the Y axis.
  • the detection piezoelectric element 13C is provided between the driving piezoelectric elements 12C1 and 12C2 and on the surfaces of the fixed portion 21 and the detection beam 22C so as to extend along the X axis.
  • the detection piezoelectric element 13D is provided between the driving piezoelectric elements 12D1 and 12D2 and on the surfaces of the fixed portion 21 and the detection beam 22D so as to extend along the X axis.
  • FIG. 2 is a contour diagram schematically showing stress in the X-axis direction generated on the surface of the vibrator in a state where the vibrating gyroscope 1 is driven to vibrate.
  • alternating voltages having opposite phases are applied to the driving piezoelectric elements 12A1, 12A2, 12B1, 12B2 and the driving piezoelectric elements 12C1, 12C2, 12D1, 12D2 from the first and second driving terminals. .
  • the driving piezoelectric elements 12A1, 12A2, 12B1, 12B2 extend in the longitudinal direction and the driving piezoelectric elements 12C1, 12C2, 12D1, 12D2 contract in the longitudinal direction, and the driving piezoelectric elements 12A1, 12A2, 12B1, 12B2 Is contracted in the longitudinal direction and the driving piezoelectric elements 12C1, 12C2, 12D1, and 12D2 are alternately extended in the longitudinal direction, and the driving piezoelectric elements 12A1 to 12D2 are deformed and vibrated.
  • the mass portions 26A to 26D are vibrated in the XY in-plane direction via the 23D2.
  • the mass portions 26A to 26D vibrate in the circumferential direction surrounding the center of the vibrating gyroscope 1 with the mass portions adjacent in the circumferential direction being in opposite phases.
  • the mass parts 26A and 26C vibrate in the opposite phase in the direction inclined 45 ° from the X axis, and the mass parts 26B and 26D vibrate in the opposite phase in the direction inclined ⁇ 45 ° from the X axis. For this reason, when the mass parts 26A and 26D approach each other, the mass parts 26B and 26C approach each other, the mass parts 26A and 26B move away from each other, and the mass parts 26C and 26D move away from each other. On the other hand, when the mass parts 26A and 26D move away from each other, the mass parts 26B and 26C move away from each other, the mass parts 26A and 26B approach each other, and the mass parts 26C and 26D approach each other.
  • the detection beams 22A to 22D that are arranged in the middle of the mass portions that are adjacent to each other in the circumferential direction and vibrate in opposite phases do not vibrate at the time of driving vibration. Unnecessary signals due to distortion generated in the detection piezoelectric elements 13A to 13D due to driving vibration can be reduced.
  • FIG. 3 is a contour diagram schematically showing stress in the Z-axis direction generated on the surface of the vibrator when an angular velocity around the X-axis acts on the vibration gyro 1 in the driving state shown in FIG. is there.
  • FIG. 4 is a contour diagram schematically showing stress in the Y-axis direction generated on the surface of the vibrator when an angular velocity around the X-axis acts on the vibration gyro 1 in the driving state shown in FIG. is there.
  • the mass portions 26A and 26D have velocity components in the Y-axis positive direction due to the drive vibration, and therefore the Coriolis in the Z-axis positive direction. Receive power.
  • the mass parts 26B and 26C have a velocity component in the negative Y-axis direction due to drive vibration, they receive Coriolis force in the negative Z-axis direction. For this reason, the mass parts 26A and 26D are displaced in the positive direction of the Z axis, and the mass parts 26B and 26C are displaced in the negative direction of the Z axis. Therefore, the entire vibration gyro 1 rotates and vibrates around the X axis.
  • the detection beam 22A connected to the mass portions 26A and 26D bends in the positive direction of the Z axis
  • the detection beam 22B connected to the mass portions 26B and 26C bends in the negative direction of the Z axis.
  • a large stress due to bending is generated in the detection beams 22A and 22B.
  • the detection piezoelectric elements 13A and 13B are provided at portions where a large stress is generated in the detection beams 22A and 22B.
  • electrical signals (detection signals) having opposite phases are generated in the detection piezoelectric element 13A provided on the detection beam 22A and the detection piezoelectric element 13B provided on the detection beam 22B. Is differentially amplified in an external differential amplifier circuit, whereby the angular velocity around the X axis can be detected.
  • the detection beam 22C receives a force in the positive Z-axis direction from the mass part 26A and receives a force in the negative Z-axis direction from the mass part 26B.
  • the detection beam 22D receives a force in the negative Z-axis direction from the mass part 26C and receives a force in the positive Z-axis direction from the mass part 26D. For this reason, the detection beams 22C and 22D hardly bend. A slight shear stress acts on the detection piezoelectric elements 13C and 13D, and the detection piezoelectric elements 13C and 13D generate a small electric signal (detection signal) having the same phase. It is removed by differential amplification in the amplifier circuit.
  • the mass portions 26A and 26B when an angular velocity around the Y-axis acts on the vibration gyro 1, the mass portions 26A and 26B have a velocity component in the positive X-axis direction due to drive vibration, and thus receive a Coriolis force in the positive Z-axis direction.
  • the mass parts 26C and 26D since the mass parts 26C and 26D have a velocity component in the negative X-axis direction due to drive vibration, they receive Coriolis force in the negative Z-axis direction. For this reason, the mass portions 26A and 26B are displaced in the Z-axis positive direction, and the mass portions 26C and 26D are displaced in the Z-axis negative direction. Therefore, the entire vibration gyro 1 rotates and vibrates around the Y axis.
  • the detection beam 22C connected to the mass portions 26A and 26B bends in the positive direction of the Z axis
  • the detection beam 22D connected to the mass portions 26C and 26D bends in the negative direction of the Z axis.
  • electrical signals detection signals
  • the detection beam 22A receives a force in the positive Z-axis direction from the mass part 26A and receives a force in the negative Z-axis direction from the mass part 26D.
  • the detection beam 22B receives a force in the negative Z-axis direction from the mass part 26B and receives a force in the positive Z-axis direction from the mass part 26C.
  • the detection beams 22A and 22B hardly bend.
  • a slight shear stress acts on the detection piezoelectric elements 13A and 13B, and the detection piezoelectric elements 13A and 13B generate minute electric signals (detection signals) having the same phase. It is removed by differential amplification in the amplifier circuit.
  • the vibrating gyroscope 1 can separately detect the angular velocity around the X axis and the angular velocity around the Y axis.
  • FIG. 5 is a perspective view of the vibrating gyroscope 1 in the state shown in FIG.
  • twisting and torque occur around the Y axis in the first beam portion 31 of the support beam 25A1 and the support beam 25A2, and the first of the support beam 25B1 and the support beam 25B2 is generated. Twist and torque are also generated around the Y-axis in the beam portion 31 of this. Therefore, not only the force in the Z-axis direction due to the displacement of the mass portions 26A to 26D but also the above torque is applied to the detection beams 22A and 22B via the support beams 25A1, 25A2, 25B1, and 25B2.
  • the mass portions 26A and 26D connected to the detection beam 22A are displaced in the same direction of the Z axis, and the mass portions 26B and 26C connected to the detection beam 22B are set in the same direction of the Z axis.
  • the support beam 25A1 and the support beam 25A2 are twisted in opposite directions, and the support beam 25B1 and the support beam 25B2 are twisted in opposite directions.
  • the torque generated in the first beam portion 31 of the support beam 25A1 and the torque generated in the first beam portion 31 of the support beam 25A2 are in opposite directions, and the torque generated in the first beam portion 31 of the support beam 25B1 and the support beam
  • the torque generated in the first beam portion 31 of 25B2 is opposite to each other.
  • the support beam 25C1 and the support beam 25C2 are twisted and torque around the X axis, and the support beam 25D1 and the support beam 25D2 are also twisted and torque around the X axis. Therefore, not only the force in the Z-axis direction due to the displacement of the mass portions 26A to 26D but also the above torque is applied to the detection beams 22C and 22D via the support beams 25C1, 25C2, 25D1, and 25D2.
  • the mass portions 26A and 26B connected to the detection beam 22C are displaced in the reverse direction of the Z axis, and the mass portions 26C and 26D connected to the detection beam 22D are displaced in the reverse direction of the Z axis, thereby supporting beams.
  • the 25C1 and the support beam 25C2 are twisted in the same direction, and the support beam 25D1 and the support beam 25D2 are twisted in the same direction.
  • the torque generated in the support beam 25C1 and the torque generated in the support beam 25C2 are in the same direction, and the torque generated in the support beam 25D1 and the torque generated in the support beam 25D2 are in the same direction.
  • the torque applied to the detection beams 22C and 22D acts so as to greatly rotate and vibrate the entire vibration gyro 1 around the X axis. Then, due to the rotational vibration of the vibration gyro 1 as a whole, stress concentrates on the fixed portion 21 side of the detection beams 22A and 22B, and the angular velocity detection sensitivity can be increased.
  • the vibrating gyroscope 1 of this embodiment is driven by the driving piezoelectric elements 12A1 to 12D2 instead of the comb-like electrodes and the angular velocity is detected by the detecting piezoelectric elements 13A to 13D. 1 can be reduced in size and can be manufactured by a simple manufacturing process. Further, since the mass parts 26A to 26D drive and vibrate in the opposite phase to the adjacent mass parts, unnecessary signals generated due to leakage of the drive vibration from the fixed part 21 and distortion of the detection piezoelectric elements 13A to 13D due to the drive vibration are generated. In addition, the angular velocities around the two axes of the orthogonal coordinate system can be separated and detected with high accuracy.
  • the detection beams 22A to 22D are bent in the Z-axis direction by Coriolis force, a large stress acts on the detection piezoelectric elements 13A to 13D arranged on the surfaces of the detection beams 22A to 22D, and the detection piezoelectric elements 13A.
  • the detection signal can be effectively extracted from 13D. Since the entire vibration gyro 1 has a vibration mode in which the detection beams 22A to 22D are swung by the torsion of the detection beams 22A to 22D, the amount of displacement in the Z-axis direction of the mass portions 26A to 26D and the detection beams 22A to 22D increases. It becomes possible to increase the detection sensitivity.
  • FIG. 6 is a diagram for explaining the configuration of a vibrating gyroscope 1A according to the second embodiment of the present invention.
  • FIG. 6A is a plan view of the XY plane of the vibrating gyroscope 1A.
  • FIG. 6B is an XY plane plan view in which a part of the vibrating gyroscope 1 is enlarged and displayed.
  • members having the same functions as those in the first embodiment are given the same reference numbers.
  • the vibrating gyroscope 1 can detect angular velocities around the two axes of the orthogonal coordinate system (angular velocity around the X axis and angular velocity around the Y axis), whereas in the second embodiment The vibrating gyro 1A can detect angular velocities about three axes (an angular velocity about the X axis, an angular velocity about the Y axis, and an angular velocity about the Z axis).
  • the vibration gyro 1A according to the present embodiment is different from the vibration gyro 1 according to the first embodiment in the beam, the mass part, the driving piezoelectric element, the detection piezoelectric element, and the like.
  • the vibration gyro 1A according to the present embodiment brings the resonance frequency of the vibration mode that vibrates in the substrate plane closer to the frequency of the drive vibration, thereby adding the angular velocity around the X axis and the angular velocity around the Y axis, An angular velocity can also be detected.
  • the vibration gyro 1A includes a driving piezoelectric element 12E1, 12E2, 12E3, 12E4, 12F1, 12F2, 12F3, 12F4, 12G1, 12G2, 12G3, 12G4, 12H1, 12H2, 12H3, 12H4, and a detection piezoelectric element.
  • the drive beams 23A1 to 23D2, the connecting beams 24A1 to 24D2, the support beams 25A1 to 25D2, and the mass portions 26A to 26D constitute a vibrator.
  • the fixed portion 21, the detection beams 22A to 22D, and the drive beams 23A1 to 23D2 are configured in the same manner as the vibration gyro 1 according to the first embodiment.
  • the extending direction of the connecting beams 24A1 to 24D2 is different from that of the vibration gyro 1 according to the first embodiment.
  • the connecting beams 24A2, 24B2, 24C1, and 24D1 are provided so as to extend along an axis inclined by 45 ° from the X axis, and the connecting beams 24A1 and 24B1.
  • 24C2 and 24D2 are provided so as to extend along an axis inclined 135 ° from the X axis.
  • the shapes of the support beams 25A1 to 25D2 are different from those of the vibration gyro 1 according to the first embodiment.
  • the vicinity of the end portions of the support beam 25A1 and the support beam 25A2 are integrated and connected to the detection beam 22A, and the ends of the support beam 25B1 and the support beam 25B2 are connected.
  • the vicinity of the part is integrated and connected to the detection beam 22B, and the vicinity of the ends of the support beam 25C1 and the support beam 25C2 is integrated and connected to the detection beam 22C.
  • the ends of the support beam 25D1 and the support beam 25D2 The vicinity of the part is integrated and connected to the detection beam 22D.
  • the driving piezoelectric elements 12E1 to 12H4 and the detecting piezoelectric elements 13A to 13H are formed in the upper electrode, the lower electrode, the piezoelectric layer disposed between the upper electrode and the lower electrode, and the fixing portion 21. Pad.
  • the lower electrode is connected to the ground via the ground electrode pad 14.
  • the top electrodes of the driving piezoelectric elements 12E1, 12E2, 12F1, 12F2, 12G1, 12G2, 12H1, 12H2 are connected to a first driving terminal (not shown), and the driving piezoelectric elements 12E1, 12E2, 12F1, 12F2, An alternating voltage having a predetermined resonance frequency (resonance frequency of drive vibration) is applied to 12G1, 12G2, 12H1, and 12H2.
  • the top electrodes of the driving piezoelectric elements 12E3, 12E4, 12F3, 12F4, 12G3, 12G4, 12H3, 12H4 are connected to a second driving terminal (not shown), and the driving piezoelectric elements 12E3, 12E4, 12F3, 12F4 , 12G3, 12G4, 12H3, and 12H4 are applied with an alternating voltage that is opposite in phase to the alternating voltage applied to the driving piezoelectric elements 12E1, 12E2, 12F1, 12F2, 12G1, 12G2, 12H1, and 12H2.
  • Upper surface electrodes of the detection piezoelectric elements 13A to 13H are connected to a detection terminal (not shown).
  • the driving piezoelectric elements 12E1, 12E2, 12F1, 12F2, 12G1, 12G2, 12H1, and 12H2 are arranged on one side of the center lines of the driving beams 23A1 to 23D2, the connecting beams 24A1 to 24D2, and the supporting beams 25A1 to 25D2. Yes.
  • the driving piezoelectric elements 12E3, 12E4, 12F3, 12F4, 12G3, 12G4, 12H3, 12H4 are arranged on the other side of the center lines of the driving beams 23A1 to 23D2, the connecting beams 24A1 to 24D2, and the support beams 25A1 to 25D2. Yes.
  • the driving piezoelectric elements to which alternating voltages having different phases are applied across the center lines of the driving beams 23A1 to 23D2, the connecting beams 24A1 to 24D2, and the supporting beams 25A1 to 25D2 are provided. Since it is disposed, it is possible to obtain twice the driving force as in the configuration of the vibrating gyroscope 1 according to the first embodiment.
  • the vibration gyro 1A includes the detection piezoelectric elements 13E to 13H in addition to the detection piezoelectric elements 13A to 13D.
  • the detecting piezoelectric elements 13A and 13B detect angular velocities around the X axis
  • the detecting piezoelectric elements 13C and 13D detect angular velocities around the Y axis
  • the detecting piezoelectric elements 13E, 13F, 13G, and 13H around the Z axis Detect angular velocity.
  • the detection piezoelectric elements 13E to 13H are formed on the fixed portion 21, the detection beams 22A to 22D, and the support beams 25A1, 25B1, 25C2, and 25D2.
  • the monitor portions 15A and 15B are formed on the fixed portion 21, the detection beams 22A and 22C, and the support beams 25A2 and 25C1.
  • the monitor portions 15A and 15B include an upper electrode, a lower electrode, a piezoelectric layer disposed between the upper electrode and the lower electrode, and a pad formed on the fixed portion 21.
  • the monitor units 15A and 15B are provided for monitoring drive vibration.
  • the monitor units 15A and 15B generate electrical signals (monitoring signals) having opposite phases, and the drive vibration can be monitored by differentially amplifying these electrical signals in an external differential amplifier circuit.
  • the dummy portions 16A and 16B are formed on the fixed portion 21, the detection beams 22A and 22C, and the support beams 25B2 and 25D1.
  • the monitor portions 15A and 15B and the dummy portions 16A and 16B have a symmetrical shape with respect to the detecting piezoelectric elements 13E to 13H and are disposed at symmetrical positions.
  • FIG. 7 is a contour diagram schematically showing the stress in the Z-axis direction generated on the surface of the vibrator in a state where the vibrating gyroscope 1A is driven and vibrated.
  • the driving piezoelectric elements 12E1, 12E2, 12F1, 12F2, 12G1, 12G2, 12H1, 12H2 and the driving piezoelectric elements 12E3, 12E4, 12F3, 12F4, 12G3, 12G4, 12H3, 12H4, Alternating voltages having opposite phases are applied from the two drive terminals. Accordingly, the driving piezoelectric elements 12E1, 12E2, 12F1, 12F2, 12G1, 12G2, 12H1, 12H2 extend in the longitudinal direction, and the driving piezoelectric elements 12E3, 12E4, 12F3, 12F4, 12G3, 12G4, 12H3, 12H4 extend in the longitudinal direction.
  • the driving piezoelectric elements 12E1, 12E2, 12F1, 12F2, 12G1, 12G2, 12H1, 12H2 contract in the longitudinal direction, and the driving piezoelectric elements 12E3, 12E4, 12F3, 12F4, 12G3, 12G4, 12H3, 12H4
  • the state extending in the longitudinal direction is alternately repeated, and the driving piezoelectric elements 12E1 to 12H4 are deformed and vibrated.
  • the frequency of the drive vibration is 29.6 kHz.
  • the mass parts 26A to 26D vibrate in the state where the mass parts adjacent in the circumferential direction are in opposite phases, like the vibration gyroscope 1 according to the first embodiment. It vibrates with respect to the circumferential direction surrounding the center of the gyro 1A. Specifically, the mass parts 26A and 26C vibrate in the opposite phase in the direction inclined 45 ° from the X axis, and the mass parts 26B and 26D vibrate in the opposite phase in the direction inclined ⁇ 45 ° from the X axis.
  • the detection beams 22A to 22D that are arranged in the middle of the mass portions that are adjacent to each other in the circumferential direction and vibrate in opposite phases do not vibrate at the time of driving vibration. Unnecessary signals due to distortion generated in the detection piezoelectric elements 13A to 13H due to drive vibration can be reduced.
  • FIG. 8 is a contour diagram schematically showing stress in the Z-axis direction generated on the surface of the vibrator when an angular velocity around the X-axis acts on the vibration gyro 1A in the driving state shown in FIG. is there.
  • FIG. 9 is a contour diagram schematically showing stress in the Z-axis direction generated on the surface of the vibrator when an angular velocity around the Y-axis acts on the vibration gyro 1A in the driving state shown in FIG. is there.
  • FIG. 10 is a contour diagram schematically showing stress in the Z-axis direction when an angular velocity around the Z-axis acts on the vibration gyro 1A in the driving state shown in FIG.
  • the mass portions 26A and 26D are subjected to Coriolis force in the positive direction of the Z axis, similarly to the vibrating gyro 1 according to the first embodiment. Accordingly, the mass portions 26B and 26C receive the Coriolis force in the negative Z-axis direction and are displaced in the negative Z-axis direction, so that the entire vibration gyro 1A rotates and vibrates around the X-axis.
  • the detection beams 22C and 22D hardly bend. A slight shear stress acts on the detection piezoelectric elements 13C and 13D, and the detection piezoelectric elements 13C and 13D generate a small electric signal (detection signal) having the same phase. It is removed by differential amplification in the amplifier circuit.
  • the mass portions 26A and 26B are subjected to Coriolis force in the positive direction of the Z axis, similarly to the vibrating gyro 1 according to the first embodiment. Accordingly, the mass portions 26C and 26D receive the Coriolis force in the negative Z-axis direction and are displaced in the negative Z-axis direction, so that the entire vibration gyro 1A rotates and vibrates around the Y-axis.
  • detection beams 22A and 22B hardly bend. A slight shear stress acts on the detection piezoelectric elements 13A and 13B, and the detection piezoelectric elements 13A and 13B generate minute electric signals (detection signals) having the same phase. It is removed by differential amplification in the amplifier circuit.
  • the mass parts 26A to 26D are moved from the center of the vibrating gyro 1A with the mass parts adjacent in the circumferential direction being in opposite phases. Vibrates in the outer circumferential direction. Specifically, the mass portions 26A and 26C receive the Coriolis force in the outer circumferential direction and are displaced in mutually opposite phases along an axis inclined by 45 ° from the X axis, and the mass portions 26B and 26D are displaced by the Coriolis force in the outer circumferential direction.
  • a detection piezoelectric element that detects an angular velocity around the Z axis may be provided. With such a configuration, the angular velocity around the Z axis can be detected with higher accuracy. In this case, a means for monitoring drive vibration is separately provided.
  • the angular velocity around the X axis, the angular velocity around the Y axis, and the angular velocity around the Z axis can be detected separately.
  • the vibration transmission beam which transmits the driving vibration from the driving piezoelectric element to the mass portion and transmits the detected vibration of the mass portion due to the Coriolis force to the detecting piezoelectric element
  • the present invention is not limited to such a configuration, and the vibration transmission beam may have other configurations.
  • the shapes of the mass portion, the detection beam, the fixed portion, and the like are not limited to the above-described configuration, and may be other shapes.
  • the arrangement positions and structures of the driving piezoelectric elements and the detection piezoelectric elements are not limited to the above-described configuration, and may be other arrangement positions and structures.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

L'invention concerne un gyroscope vibrant (1) comprenant : une section fixée (21) ; des faisceaux de détection (22A-22D) cruciformes dans une vue en plan centrée sur la section fixée (21) ; des masses (26A-26D) disposées à symétrie ponctuelle par rapport à la section fixée (21), chacune étant placée entre des faisceaux de détection contigus ; des faisceaux (23A1-23 D2, 24A1-24 D2, 25A1-25 D2) destinés à transmettre des vibrations et qui sont connectés aux faisceaux de détection (22A-22D) et aux masses (26A-26D) ; des éléments piézoélectriques d'entraînement (12A1 à D2) qui font face à la direction périphérique encerclant la section fixée (21) et font vibrer les masses (26A-26D) dans la direction inverse à partir des masses adjacentes ; et des éléments piézo-électriques de détection (13A-13D) prévus pour les faisceaux de détection (22A-22D).
PCT/JP2013/050717 2012-01-19 2013-01-17 Gyroscope vibrant WO2013108804A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012008574 2012-01-19
JP2012-008574 2012-01-19

Publications (1)

Publication Number Publication Date
WO2013108804A1 true WO2013108804A1 (fr) 2013-07-25

Family

ID=48799228

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2013/050717 WO2013108804A1 (fr) 2012-01-19 2013-01-17 Gyroscope vibrant

Country Status (1)

Country Link
WO (1) WO2013108804A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014077297A1 (fr) * 2012-11-19 2014-05-22 株式会社村田製作所 Élément de détection de vitesse angulaire
WO2015045621A1 (fr) * 2013-09-26 2015-04-02 株式会社村田製作所 Élément de détection de vitesse angulaire
JP2017506739A (ja) * 2014-01-28 2017-03-09 株式会社村田製作所 改良されたジャイロスコープ構造およびジャイロスコープ
US10371521B2 (en) 2016-05-26 2019-08-06 Honeywell International Inc. Systems and methods for a four-mass vibrating MEMS structure
EP3633316A1 (fr) * 2018-10-03 2020-04-08 Murata Manufacturing Co., Ltd. Gyroscope à axe z piézoélectrique
US10696541B2 (en) 2016-05-26 2020-06-30 Honeywell International Inc. Systems and methods for bias suppression in a non-degenerate MEMS sensor

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007108044A (ja) * 2005-10-14 2007-04-26 Nec Tokin Corp 振動ジャイロ用素子及び振動ジャイロ
JP2010002385A (ja) * 2008-06-23 2010-01-07 Hokuriku Electric Ind Co Ltd 二軸型角速度センサ
JP2010210407A (ja) * 2009-03-10 2010-09-24 Murata Mfg Co Ltd 角速度センサ
JP2010266276A (ja) * 2009-05-13 2010-11-25 Rohm Co Ltd ３軸角速度検出振動子、３軸角速度検出装置および３軸角速度検出システム
JP2011158319A (ja) * 2010-01-29 2011-08-18 Akebono Brake Ind Co Ltd 角速度センサ
JP4858662B2 (ja) * 2010-01-12 2012-01-18 ソニー株式会社 角速度センサ、電子機器及び角速度の検出方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007108044A (ja) * 2005-10-14 2007-04-26 Nec Tokin Corp 振動ジャイロ用素子及び振動ジャイロ
JP2010002385A (ja) * 2008-06-23 2010-01-07 Hokuriku Electric Ind Co Ltd 二軸型角速度センサ
JP2010210407A (ja) * 2009-03-10 2010-09-24 Murata Mfg Co Ltd 角速度センサ
JP2010266276A (ja) * 2009-05-13 2010-11-25 Rohm Co Ltd ３軸角速度検出振動子、３軸角速度検出装置および３軸角速度検出システム
JP4858662B2 (ja) * 2010-01-12 2012-01-18 ソニー株式会社 角速度センサ、電子機器及び角速度の検出方法
JP2011158319A (ja) * 2010-01-29 2011-08-18 Akebono Brake Ind Co Ltd 角速度センサ

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014077297A1 (fr) * 2012-11-19 2014-05-22 株式会社村田製作所 Élément de détection de vitesse angulaire
JP5831647B2 (ja) * 2012-11-19 2015-12-09 株式会社村田製作所 角速度検出素子
US10072930B2 (en) 2012-11-19 2018-09-11 Murata Manufacturing Co., Ltd. Angular velocity sensor
WO2015045621A1 (fr) * 2013-09-26 2015-04-02 株式会社村田製作所 Élément de détection de vitesse angulaire
US10001372B2 (en) 2013-09-26 2018-06-19 Murata Manufacturing Co., Ltd. Angular velocity detection device
JP2017506739A (ja) * 2014-01-28 2017-03-09 株式会社村田製作所 改良されたジャイロスコープ構造およびジャイロスコープ
US10371521B2 (en) 2016-05-26 2019-08-06 Honeywell International Inc. Systems and methods for a four-mass vibrating MEMS structure
US10696541B2 (en) 2016-05-26 2020-06-30 Honeywell International Inc. Systems and methods for bias suppression in a non-degenerate MEMS sensor
US11390517B2 (en) 2016-05-26 2022-07-19 Honeywell International Inc. Systems and methods for bias suppression in a non-degenerate MEMS sensor
EP3633316A1 (fr) * 2018-10-03 2020-04-08 Murata Manufacturing Co., Ltd. Gyroscope à axe z piézoélectrique
JP2020064054A (ja) * 2018-10-03 2020-04-23 株式会社村田製作所 ピエゾｚ軸ジャイロスコープ
US11280610B2 (en) 2018-10-03 2022-03-22 Murata Manufacturing Co., Ltd. Piezoelectric z-axis gyroscope

Similar Documents

Publication Publication Date Title
TWI379993B (fr)
JP5341807B2 (ja) 加速度センサ
WO2013108804A1 (fr) Gyroscope vibrant
JP4356479B2 (ja) 角速度センサ
US10001372B2 (en) Angular velocity detection device
JP2010096538A (ja) 角速度センサ
US9383205B2 (en) Vibrator and vibrating gyroscope
WO2018003692A1 (fr) Capteur de grandeur physique
JP2012149961A (ja) 振動ジャイロ
WO2010041422A1 (fr) Élément de capteur de vitesse angulaire, capteur de vitesse angulaire et unité de capteur de vitesse angulaire utilisant tous deux l'élément de capteur de vitesse angulaire, et procédé de détection de signal pour unité de capteur de vitesse angulaire
US9726492B2 (en) Angular velocity detection element
JP5831647B2 (ja) 角速度検出素子
JP6733621B2 (ja) 振動型角速度センサ
US20200263991A1 (en) Vibration type angular velocity sensor
JP2012112819A (ja) 振動ジャイロ
JP2010223622A (ja) 角速度検出装置
WO2016067543A1 (fr) Capteur de vitesse angulaire du type à vibration
JP5810685B2 (ja) 振動子および振動ジャイロ
WO2014061247A1 (fr) Capteur de vitesse angulaire
WO2019230552A1 (fr) Capteur de quantité physique
JP5471217B2 (ja) 角速度センサユニットおよびその信号検出方法
JP5849243B2 (ja) 角速度センサ素子
JP5786141B2 (ja) 角速度センサ素子
JP2017009404A (ja) 慣性力センサ
JP2012163386A (ja) 角速度センサユニットおよびその信号検出方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 13738008

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 13738008

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP