WO2013087713A2 - Vorrichtung und verfahren zum evakuieren eines raums und zum reinigen des aus dem raum abgesaugten gases - Google Patents

Vorrichtung und verfahren zum evakuieren eines raums und zum reinigen des aus dem raum abgesaugten gases Download PDF

Info

Publication number
WO2013087713A2
WO2013087713A2 PCT/EP2012/075262 EP2012075262W WO2013087713A2 WO 2013087713 A2 WO2013087713 A2 WO 2013087713A2 EP 2012075262 W EP2012075262 W EP 2012075262W WO 2013087713 A2 WO2013087713 A2 WO 2013087713A2
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum pump
gas
mbar
pressure
operating fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2012/075262
Other languages
German (de)
English (en)
French (fr)
Other versions
WO2013087713A3 (de
Inventor
Heiner KÖSTERS
Uwe Gottschlich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sterling Industry Consult GmbH
Original Assignee
Sterling Industry Consult GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sterling Industry Consult GmbH filed Critical Sterling Industry Consult GmbH
Priority to CN201280061800.3A priority Critical patent/CN104066989B/zh
Priority to KR1020147018745A priority patent/KR101935336B1/ko
Priority to US14/364,802 priority patent/US20150068399A1/en
Priority to EP12798777.4A priority patent/EP2791508B1/de
Priority to JP2014546495A priority patent/JP6138144B2/ja
Publication of WO2013087713A2 publication Critical patent/WO2013087713A2/de
Publication of WO2013087713A3 publication Critical patent/WO2013087713A3/de
Anticipated expiration legal-status Critical
Priority to US17/015,590 priority patent/US11802562B2/en
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C19/00—Rotary-piston pumps with fluid ring or the like, specially adapted for elastic fluids
    • F04C19/004—Details concerning the operating liquid, e.g. nature, separation, cooling, cleaning, control of the supply
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes

Definitions

  • Such devices can be used, for example, in deposition processes, such as CVD (Chemical Vapor Deposition) processes.
  • CVD processes are used in many areas of the industry to produce layers at reduced pressure on different substrates.
  • gaseous metal compounds in ho ⁇ hen temperatures and / or be converted ⁇ interspersed with plasma assistance to the substrate surface to the desired coating system.
  • the achievable, relatively high, gas pressures enable high growth rates and have therefore led to widespread use in all areas of vacuum coating technology.
  • a disadvantage of these high growth rates is that the deposition reactions not only on the substrate but in all areas of the coating system occur. This not only affects the process chamber walls, but also the lines and equipment between the process chamber and the exit of the exhaust gases.
  • the gaseous starting and intermediate products are generally toxic and corrosive, therefore such CVD plants are always equipped with a corresponding exhaust gas treatment.
  • Combustion device may be provided, which is preferably arranged in the intermediate line.
  • This can be a thermal combustion, that is, for example, a natural gas-fed flame, which is brought into contact with the gas.
  • catalytic combustion in which the gas is brought into contact with a heated surface of a catalytic material. Through the combustion, the foreign matter can be brought into the gas in a form in which they are received from the Troflüs ⁇ fluid.
  • the invention also relates to a method Evakuie ⁇ ren a space and to clean the room from the istsaug ⁇ th gas of entrained foreign matter. In the process, gas is sucked out of the room.
  • a process chamber of a CVD process forms the space 14 to be evacuated.
  • the input 17 of a screw vacuum pump 15 is connected to the space 14 to be evacuated.
  • a pressure reducing valve 16 is arranged, through which the pressure in the space 14 can be set higher than the pressure at the inlet 17 of the screw vacuum pump 15th
  • a pressure of 80 mbar prevails in the space 14 and a pressure of 20 mbar is present at the inlet 17 of the screw vacuum pump 15.
  • the screw vacuum pump 15 has the task of keeping the pressure at the inlet 17 constant, even if the conditions at the outlet 18 of the screw vacuum pump 15 vary.
  • With the screw vacuum pump 15, the gas is compressed to a pressure of about 120 mbar and discharged via the outlet 18.
  • an intermediate line 19 connects, which leads to a liquid ring vacuum pump 20.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Treating Waste Gases (AREA)
  • Degasification And Air Bubble Elimination (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Gas Separation By Absorption (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
PCT/EP2012/075262 2011-12-14 2012-12-12 Vorrichtung und verfahren zum evakuieren eines raums und zum reinigen des aus dem raum abgesaugten gases Ceased WO2013087713A2 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CN201280061800.3A CN104066989B (zh) 2011-12-14 2012-12-12 用于排空腔室并净化从所述腔室抽取的气体的装置和方法
KR1020147018745A KR101935336B1 (ko) 2011-12-14 2012-12-12 체임버를 배기시키고 상기 체임버로부터 추출된 기체를 정화하는 장치 및 방법
US14/364,802 US20150068399A1 (en) 2011-12-14 2012-12-12 Device and Method for Evacuating a Chamber and Purifying the Gas Extracted From Said Chamber
EP12798777.4A EP2791508B1 (de) 2011-12-14 2012-12-12 Vorrichtung und verfahren zum evakuieren eines raums und zum reinigen des aus dem raum abgesaugten gases
JP2014546495A JP6138144B2 (ja) 2011-12-14 2012-12-12 チャンバを空にして該チャンバから取り出されたガスを浄化するための装置及び方法
US17/015,590 US11802562B2 (en) 2011-12-14 2020-09-09 Device and method for evacuating a chamber and purifying the gas extracted from said chamber

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP11193573.0 2011-12-14
EP11193573 2011-12-14

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US14/364,802 A-371-Of-International US20150068399A1 (en) 2011-12-14 2012-12-12 Device and Method for Evacuating a Chamber and Purifying the Gas Extracted From Said Chamber
US17/015,590 Division US11802562B2 (en) 2011-12-14 2020-09-09 Device and method for evacuating a chamber and purifying the gas extracted from said chamber

Publications (2)

Publication Number Publication Date
WO2013087713A2 true WO2013087713A2 (de) 2013-06-20
WO2013087713A3 WO2013087713A3 (de) 2013-12-27

Family

ID=47326206

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2012/075262 Ceased WO2013087713A2 (de) 2011-12-14 2012-12-12 Vorrichtung und verfahren zum evakuieren eines raums und zum reinigen des aus dem raum abgesaugten gases

Country Status (6)

Country Link
US (2) US20150068399A1 (enExample)
EP (1) EP2791508B1 (enExample)
JP (1) JP6138144B2 (enExample)
KR (1) KR101935336B1 (enExample)
CN (1) CN104066989B (enExample)
WO (1) WO2013087713A2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2540582A (en) * 2015-07-22 2017-01-25 Edwards Ltd Apparatus for evacuating a corrosive effluent gas stream from a processing chamber
CN108344221B (zh) * 2017-12-22 2024-05-28 佛山精迅能冷链科技有限公司 一种可调控压力的真空预冷机
GB2596366B (en) * 2020-06-26 2022-11-09 Edwards Tech Vacuum Engineering Qingdao Co Ltd Liquid ring pump control
FR3112086B1 (fr) * 2020-07-09 2022-07-08 Pfeiffer Vacuum Dispositif de traitement des gaz et ligne de vide
FR3112177B1 (fr) * 2020-07-09 2022-07-08 Pfeiffer Vacuum Ligne de vide et procédé de contrôle d’une ligne de vide
CN112011785A (zh) * 2020-10-10 2020-12-01 常州艾恩希纳米镀膜科技有限公司 一种用于cvd涂层设备的废气中和系统
FR3129851A1 (fr) * 2021-12-08 2023-06-09 Pfeiffer Vacuum Ligne de vide et installation comportant la ligne de vide
US20250207256A1 (en) * 2022-02-24 2025-06-26 Ihi Bernex Ag Chemical vapor deposition apparatus

Citations (2)

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FR1129872A (fr) 1954-08-21 1957-01-28 Heraeus Gmbh W C Pompe mécanique à vide poussé du type roots
US3956072A (en) 1975-08-21 1976-05-11 Atlantic Fluidics, Inc. Vapor distillation apparatus with two disparate compressors

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FR1129872A (fr) 1954-08-21 1957-01-28 Heraeus Gmbh W C Pompe mécanique à vide poussé du type roots
US3956072A (en) 1975-08-21 1976-05-11 Atlantic Fluidics, Inc. Vapor distillation apparatus with two disparate compressors

Also Published As

Publication number Publication date
KR20140107397A (ko) 2014-09-04
CN104066989A (zh) 2014-09-24
EP2791508A2 (de) 2014-10-22
WO2013087713A3 (de) 2013-12-27
JP6138144B2 (ja) 2017-05-31
EP2791508B1 (de) 2019-03-06
JP2015500944A (ja) 2015-01-08
CN104066989B (zh) 2017-03-01
US20150068399A1 (en) 2015-03-12
KR101935336B1 (ko) 2019-01-04
US11802562B2 (en) 2023-10-31
US20200408211A1 (en) 2020-12-31

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