WO2013084373A1 - Appareil d'inspection à rayons x - Google Patents

Appareil d'inspection à rayons x Download PDF

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Publication number
WO2013084373A1
WO2013084373A1 PCT/JP2012/003227 JP2012003227W WO2013084373A1 WO 2013084373 A1 WO2013084373 A1 WO 2013084373A1 JP 2012003227 W JP2012003227 W JP 2012003227W WO 2013084373 A1 WO2013084373 A1 WO 2013084373A1
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WO
WIPO (PCT)
Prior art keywords
cover
shielding
wall
inspection apparatus
ray
Prior art date
Application number
PCT/JP2012/003227
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English (en)
Japanese (ja)
Inventor
學 伊原
翔 伊藤
Original Assignee
ヤマハ発動機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ヤマハ発動機株式会社 filed Critical ヤマハ発動機株式会社
Publication of WO2013084373A1 publication Critical patent/WO2013084373A1/fr

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/10—Safety means specially adapted therefor
    • A61B6/107—Protection against radiation, e.g. shielding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material

Definitions

  • the present invention relates to an X-ray inspection apparatus, and more particularly to an X-ray inspection apparatus provided with an exterior cover.
  • Patent Document 1 an X-ray inspection apparatus provided with an exterior cover is known (for example, see Patent Document 1).
  • Patent Document 1 discloses an X-ray inspection apparatus including an exterior cover (panel) integrally provided with an X-ray shielding member.
  • the exterior cover of this X-ray inspection apparatus has a rectangular flat surface and a standing wall-like portion provided along the outer periphery of the flat surface, and is formed in a concave shape.
  • the lead X-ray shielding member is fitted in the recess of the exterior cover, and the recess is closed by the metal plate, so that the X-ray shielding member is integrally fixed to the exterior cover (panel).
  • a box-shaped X-ray protective box is configured by combining the outer covers.
  • the front-side exterior cover (front panel) on which the X-ray shielding member is integrally provided is configured to cover a conveyance path provided so as to pass through an opening formed in the front-side exterior cover. ing.
  • Patent Document 1 since the X-ray shielding member is integrally provided on the exterior cover (panel), for example, the front exterior cover (front panel) exposed to the outside is damaged. In this case, the entire exterior cover (the entire front panel) must be replaced together with the X-ray shielding member and the metal plate. In this case, there is a problem that the X-ray shielding member provided integrally with the exterior cover (front panel) to be replaced is wasted. Further, in recent years, the design of the appearance of the apparatus tends to be regarded as important. On the other hand, in the X-ray inspection apparatus disclosed in Patent Document 1, an X-ray shielding member is integrally fitted in the exterior cover to prevent X-ray leakage. Therefore, the design of the exterior cover is limited to a simple shape such as a flat shape. For this reason, the technique described in Patent Document 1 also has a problem that the degree of freedom in external design is low.
  • the present invention has been made to solve the above-described problems, and its purpose is to prevent the X-ray shielding member from being wasted when replacing the exterior cover, and to increase the degree of freedom in external design. To provide an X-ray inspection apparatus that can be improved.
  • an X-ray inspection apparatus is provided on a base, and an X-ray source for irradiating an inspection object with X-rays and above the base including the X-ray source.
  • a shield wall that covers the region, shields X-rays, a transport path that transports the inspection object through the region covered by the shield wall, and is provided outside the shield wall, the transport And an exterior cover that covers the road. The exterior cover can be removed separately from the shielding wall while the shielding wall is mounted on a base.
  • FIG. 3 is an enlarged cross-sectional view schematically showing a region 500 in FIG. 2.
  • FIG. 3 is an enlarged cross-sectional view schematically showing a region 600 in FIG. 2.
  • FIGS. 1-10 A structure of an X-ray inspection apparatus 100 according to an embodiment of the present invention will be described with reference to FIGS.
  • An X-ray inspection apparatus 100 uses a circuit board (board P) (see FIG. 3) on which electronic components are mounted as an inspection target, and performs solder joint state inspection of electronic components on the board P.
  • This is a substrate inspection apparatus for performing various inspections.
  • the substrate P is an example of the “inspection object” in the present invention.
  • the structure of the X-ray inspection apparatus 100 according to an embodiment of the present invention will be described in detail.
  • the X-ray inspection apparatus 100 includes a base 1, a substrate transport unit 2 installed on the base 1, an X-ray source 3, an imaging unit 4, and a shielding wall 5 (whichever 2) and an exterior cover 6 provided outside the shielding wall 5 are mainly provided.
  • the shielding wall 5 is attached on the base 1 so as to cover the X-ray source 3.
  • the substrate transport unit 2 is an example of the “transport path” in the present invention.
  • a control unit 12 that controls the entire X-ray inspection apparatus 100 including the X-ray source 3, the imaging unit 4, and the substrate transport unit 2, a power supply unit 13 that supplies power, and the like are arranged.
  • a pair of support bases 11 are disposed at both ends in the X direction and extend over substantially the entire length of the base 1 in the Y direction.
  • a support beam 31 for supporting the X-ray source 3 and a support frame 52 for attaching the shielding wall 5 are installed on the pair of support bases 11.
  • the substrate transport unit 2 includes a pair of conveyors 21 extending along the X direction.
  • the pair of conveyors 21 can support the substrate P from both sides in the Y direction and transport it in the X direction.
  • the pair of conveyors 21 holds the substrate P above the base 1 (Z1 direction) by a clamping mechanism (not shown). ) Can be held (fixed) at a predetermined position.
  • the pair of conveyors 21 is installed on the base 1 via a pair of guide rails 22 extending in the X direction and a pair of guide rails 23 extending in the Y direction.
  • the pair of conveyors 21 can be moved in the X direction along the guide rail 22 by an X-axis motor and an X-axis ball screw (not shown), and Y along the guide rail 23 by a Y-axis motor and a Y-axis ball screw (not shown). It can move in the direction.
  • substrate conveyance part 2 (a pair of conveyor 21) is comprised so that a movement on the base 1 is possible in two directions (X direction and Y direction) on a horizontal surface.
  • the substrate transfer unit 2 moves the end 21a on the X1 direction side of the conveyor 21 to the carry-in entrance A, and then transfers the substrate P from the upstream transfer line 101B (see FIG. 11) provided outside.
  • the end 21b on the X2 direction side of the conveyor 21 is moved to the unloading port B so that the substrate P can be transferred to the downstream transfer line 101C (see FIG. 11).
  • substrate conveyance part 2 is comprised so that the board
  • the pair of conveyors 21 has a variable Y-direction interval in accordance with the size of the substrate P by a motor and a ball screw (not shown) and a guide rail.
  • the X-ray source 3 is arranged at a position above the substrate transport unit 2 and configured to irradiate the substrate P arranged below (Z2 direction) with X-rays. .
  • the X-ray source 3 is supported by a support beam 31, and the support beam 31 extends in the X direction and is fixed on a pair of support bases 11 at both ends.
  • the imaging unit 4 is disposed at a position below the X-ray source 3 and the substrate transport unit 2 and has a function of detecting an X-ray transmitted through the substrate P and capturing an X-ray image.
  • the imaging unit 4 is configured to be movable in the horizontal direction (X direction and Y direction in FIG. 3) by the moving mechanism 41 on the lower side of the substrate transport unit 2. Accordingly, the substrate transport unit 2 and the imaging unit 4 are moved horizontally to adjust the relative positional relationship between the X-ray source 3, the substrate P, and the imaging unit 4, so that the substrate P is not directly above, that is, from an oblique direction. It is possible to image.
  • the shielding wall 5 has a box-like shape with a substantially rectangular cross section covering the upper region (see FIG. 2) of the base 1 including the X-ray source 3.
  • the shielding wall 5 is configured to shield the X-rays by covering the periphery of the X-ray source 3 with a shielding material 50b described later in order to prevent leakage of the X-rays emitted from the X-ray source 3 to the outside. Yes.
  • a shielding material (not shown) is also provided on the upper surface of the base 1 so that the internal space surrounded by the base 1 and the shielding wall 5 is shielded from all directions.
  • the shielding wall 5 is composed of a plurality of plate-like wall members 51 (wall members 51a to 51c) attached to a support frame 52 (see FIG. 3) installed on a pair of support bases 11. That is, as shown in FIG. 2 and FIG. 4, the wall portion on both sides in the X direction (X1, X2 direction) of the shielding wall 5 is the lateral side surface portion 5a, and the wall portion on both sides in the Y direction (Y1, Y2 direction) is When the side surface portion 5b and the wall portion in the Z1 direction are the upper surface portion 5c, the lateral side surface portion 5a is constituted by a plurality of wall members 51a, the front and rear side surface portions 5b are constituted by a plurality of wall members 51b, and the upper surface portion 5c is a plurality of upper surface portions 5c. It is comprised by the wall member 51c.
  • the wall member 51 is composed of a metal plate 50a and a lead sheet-like shielding material 50b attached to the metal plate 50a with a double-sided adhesive tape or the like.
  • the shielding member 50b is disposed on the outer side (the exterior cover 6 side) with respect to the metal plate 50a.
  • the metal plate 50a and the shielding material 50b are examples of the “plate member” and the “X-ray shielding material” of the present invention, respectively.
  • the support frame 52 is configured by combining square hollow pipes, and a pair of side support frames provided on the pair of support bases 11 so as to extend upward (Z1 direction). 53 and an upper support frame 54 installed so as to hang over the pair of side support frames 53.
  • Each of the pair of side support frames 53 includes two column portions 53a extending upward from both ends of the support base 11, and an upper beam portion 53b and a lower beam portion 53c.
  • a total of four column parts 53a are arranged at the four corner positions of the base 1 as seen in a plan view.
  • the upper beam portion 53b of the side support frame 53 extends in the Y direction and is provided so as to bridge the upper ends of the two column portions 53a.
  • the lower beam portion 53c extends in the Y direction substantially parallel to the upper beam portion 53b and connects the central portions of the two column portions 53a.
  • a pair of side part support frame 53 is each formed in the wall shape extended in a Z direction and a Y direction.
  • the upper support frame 54 of the support frame 52 includes a plurality of horizontal members 54a extending in the X direction provided on the upper surface of the side support frame 53 (upper beam portion 53b), and Y connecting the horizontal members 54a to each other.
  • the roof member extends in the horizontal direction (X direction and Y direction) by the vertical member 54b extending in the direction.
  • the support frame 52 is formed to cover the X-ray source 3 and the imaging unit 4 by a pair of side support frames 53 and an upper support frame 54.
  • the wall member 51a constituting the lateral side surface portion 5a of the shielding wall 5 has an upper end attached to the support frame 52 (upper beam portion 53b) via an attachment fitting 55a, and a lower end attached to the wall member 51a. It is attached to the support base 11 via a metal fitting 55b (see FIG. 6).
  • the mounting position of the wall member 51a can be finely adjusted by the mounting brackets 55a and 55b.
  • the mounting bracket 55a has an L shape, and a long hole 551 for screwing is formed on each surface thereof.
  • the wall member 51b constituting the front and rear side surface portion 5b of the shielding wall 5 is screwed to the support frame 52 (lateral member 54a) and the base 1 via mounting brackets (not shown), respectively.
  • the wall member 51 c constituting the upper surface portion 5 c of the shielding wall 5 is screwed to the upper support frame 54 (the horizontal member 54 a and the vertical member 54 b) of the support frame 52.
  • a deformed screw such as a hex lobe screw (screw head having a hexagonal star shape) is used. This is to prevent the screws of the wall member 51 from being loosened by mistake by distinguishing the fixing screws of the wall member 51 from the fixing screws of other members.
  • these wall members 51 are arranged so as to overlap each other at the boundary (seam) with the adjacent wall member 51.
  • the boundary see FIG. 5
  • the end E1 of the wall member 51c is bent downward (Z2 direction), so that the wall The end E1 of the member 51c and the end E2 of the wall member 51a overlap each other.
  • the boundary between the wall members 51a of the lateral side surface portion 5a the boundary between the wall members 51c of the upper surface portion 5c, etc., as shown in FIG. 7, one end portion E3 is bent and the inner side of the other end portion E4.
  • the two end portions E3 and E4 overlap each other by entering.
  • a ventilation hole 5d (see FIG. 4) is formed in the upper surface part 5c of the shielding wall 5, and a ventilation fan 56 (see FIG. 8) is attached to the upper surface part 5c so as to cover the ventilation hole 5d from the inside.
  • the fan 56 is accommodated in an inner case 58 having a peripheral wall 58a surrounding the outer periphery thereof.
  • the inner case 58 is accommodated in a container-shaped outer case 57 in which an opening 57a is formed.
  • a lead shielding member 57b is affixed to the inner surface of the outer case 57.
  • a lead shielding member 58b is affixed to the outer surface of the peripheral wall 58a of the inner case 58, and the shielding member 57b of the outer case 57 and the shielding member 58b of the inner case 58 are arranged so as to overlap. Yes. For this reason, X-rays incident from below or obliquely downward toward the vent 5d are shielded by the shielding member 57b of the outer case 57, and X-rays incident substantially horizontally from the openings 57a of the outer case 57 Is shielded by the shielding member 58b. On the other hand, the air flowing from the opening 57a of the outer case 57 passes between the outer case 57 and the inner case 58, reaches the fan 56, and is exhausted to the outside through the vent 5d.
  • the exterior cover 6 has a box shape that is slightly larger than the shielding wall 5 so that the box-shaped shielding wall 5 can be accommodated therein.
  • the exterior cover 6 is not provided with a shielding material 50b (and a metal plate 50a) for shielding X-rays. Further, the exterior cover 6 is provided separately from the shielding wall 5, and as shown in FIG. 4, only the exterior cover 6 can be detached alone while the shielding wall 5 is mounted on the base 1. It is said that.
  • the exterior cover 6 includes a plurality of plate-like cover members (side cover members 61a and 61b and a top cover) attached to the first cover attaching member 62 and the second cover attaching member 63. It is constituted by a member 61c). That is, when the surface of the cover member 6 on both sides in the X direction (X1, X2 direction) is the lateral side surface 6a, the surface on both sides in the Y direction (Y1, Y2 direction) is the front and back side surface 6b, and the surface in the Z1 direction is the top surface 6c.
  • the lateral side surface 6a is constituted by a plurality of side surface cover members 61a
  • the front and rear side surfaces 6b are constituted by a plurality of side surface cover members 61b
  • the top surface 6c is constituted by a plurality of top surface cover members 61c.
  • the first and second cover mounting members 62 and 63 are disposed between the shielding wall 5 and the exterior cover 6, and the plurality of cover members (side cover members 61a and 61b and top cover member 61c) are respectively
  • the cover mounting member (62 or 63) is individually detachably mounted. As shown in FIG. 2, the exterior cover 6 is attached to the first and second cover attachment members 62 and 63 in a state of being separated from the shielding wall 5 (shielding material 50b).
  • the first cover mounting member 62 and the second cover mounting member 63 are examples of the “first member” and the “second member” in the present invention, respectively.
  • the first cover mounting member 62 is formed to extend in the X direction, and is fixed on the upper surface portion 5c of the shielding wall 5 with a screw. As shown in FIGS. 4 and 5, the first cover mounting member 62 includes a flat first mounting portion 62a and second mounting portion 62b, and a connecting portion that connects the first mounting portion 62a and the second mounting portion 62b. 62c.
  • the first attachment portion 62a of the first cover attachment member 62 is screwed to the support frame 52 (upper support frame 54) via the shielding wall 5 (wall member 51c of the upper surface portion 5c). That is, the wall member 51 c and the first cover mounting member 62 are supported by the support frame 52 by being fastened together with the support frame 52 by the bolt 65.
  • top cover member 61c which comprises the top surface 6c of the exterior cover 6 is attached to the 2nd attachment part 62b so that attachment or detachment is possible with a screw.
  • the top surface 6 c (top surface cover member 61 c) of the exterior cover 6 is fixed to the support frame 52 via the first cover mounting member 62.
  • the second mounting portion 62b is an example of the “top cover mounting portion” in the present invention.
  • the second cover mounting member 63 is a member having an L-shaped cross section (L angle) extending in the Y direction, and is attached to both ends of the first cover mounting member 62 in the X direction. .
  • the end portion E5 of the first cover mounting member 62 is formed so as to protrude on both sides in the X direction from the shielding wall 5 (upper surface portion 5c), and at the protruding portion, the second cover mounting member is formed.
  • a first portion 63a of 63 is attached to the first attachment portion 62a of the first cover attachment member 62 from the lower surface side.
  • a side cover member 61a constituting a lateral side surface (both side surfaces in the X direction) 6a of the exterior cover 6 is detachably screwed with a bolt 66 to a second portion 63b extending downward from the first portion 63a.
  • the lateral side surface 6 a (side surface cover member 61 a) of the exterior cover 6 is fixed to the support frame 52 via the second cover mounting member 63 and the first cover mounting member 62.
  • the lower end portion of the side cover member 61a is detachably screwed to a mounting bracket 64 (see FIG. 6) attached to the base 1.
  • the second portion 63b is an example of the “side cover attaching portion” in the present invention.
  • slide-type opening / closing doors 7 and 8 are provided on the front surface 100a and the rear surface 100b of the X-ray inspection apparatus 100, respectively, so that the inside of the apparatus can be opened and closed.
  • Each of these open / close doors 7 and 8 includes an exterior member 7a (8a) on the outer surface and a shielding member (not shown) that shields X-rays arranged on the inner surface side, and the exterior member 7a (8a). And the shielding member are screwed together.
  • the open / close doors 7 and 8 are configured to function as a part of the exterior cover 6 while functioning to shield X-rays further outside the shielding wall 5.
  • Each of the open / close doors 7 and 8 is configured to enter a gap between the exterior cover 6 and the shielding wall 5 (between the adjacent side cover member 61b and the wall member 51b) when opened. Yes.
  • the open / close door 7 is provided with two open / close detection switches 71 and 72 (see FIG. 4), and the open / close door 8 is provided with two open / close detection switches 81 and 82 (see FIG. 9).
  • these open / close detection switches for example, magnetic detection type non-contact switches or the like are used.
  • the open / close detection switches 71 and 81 are switches for stopping (prohibiting) X-ray irradiation from the X-ray source 3 when the opening / closing of the open / close door 7 (8) is detected.
  • the open / close detection switches 72 and 82 This is a switch for stopping (prohibiting) the operation of the movable mechanism such as the substrate transport section 2 when the opening of the open / close door 7 (8) is detected.
  • the left and right side surfaces 100c of the X-ray inspection apparatus 100 are provided with shutter portions 9 for opening and closing the carry-in port A and the carry-out port B, respectively.
  • the shutter portion 9 covers the opening 59a (see FIG. 6) of the conveyor shielding portion 59 that constitutes the lower portion of the shielding wall 5 (lateral side surface portion 5a). It is attached to the shielding part 59.
  • the conveyor shielding portion 59 includes a first side plate 591 installed on the base 1 so as to be continuous with the lateral side surface portion 5a, a second side plate 592 attached to the first side plate 591, and a second side plate 592.
  • the conveyor shielding part 59 is provided so as to surround and cover the opening 11 a (see FIG. 6) provided on the side surface of the support base 11 by the first side plate 591, the second side plate 592, and the conveyor shielding plate 593. It has been.
  • Each of the side plates 591 and 592 and the conveyor shielding plate 593 has an exterior member 59b constituting the outer surface, and a lead shielding member 59c attached to the inside of the exterior member 59b.
  • the opening 59 a is formed in a rectangular shape having a size corresponding to the pair of conveyors 21, and is provided on the conveyor shielding plate 593.
  • the substrate P can be carried in and out by the substrate transport unit 2 (the pair of conveyors 21) through the opening 59a.
  • the shutter portion 9 includes a frame-shaped base portion 91 screwed to the conveyor shielding plate 593 from the inside, and a pair of guide portions 92 (Z direction) provided at both ends of the base portion 91 in the Y direction. 93), a shutter main body 94 for closing the opening 59a, and an opening / closing mechanism 95 including an air cylinder.
  • the shutter main body 94 has an exterior member 94a constituting the outer surface, and a lead shielding member 94b attached to the inside of the exterior member 94a.
  • the opening / closing mechanism 95 is fixed to the base portion 91 via an attachment member 95a, and is configured so that the shutter main body 94 can be moved up and down.
  • the opening 59a can be opened and closed by driving the opening and closing mechanism 95 and moving the shutter main body 94 up and down along the pair of guide portions 92 (93). Therefore, an opening 6d (see FIG. 1) is also formed in the exterior cover 6, and the shutter main body 94 is exposed to the outside through the opening 6d. Further, the shutter unit 9 is provided with an open / close detection switch 96 for detecting the opening of the shutter body 94, and is configured to stop the X-ray irradiation when the opening of the shutter body 94 is detected. .
  • the X-ray inspection apparatus 100 can be used as a part of a group of apparatuses constituting a circuit board manufacturing line that manufactures a circuit board manufacturing circuit for electronic components while transporting a board by a transport line.
  • the board P is sent out from the loader 102 that holds the board P before electronic component mounting to the conveyance line 101 ⁇ / b> A, and a paste solder printing process on the board P by the printing machine 103, After a component mounting process on the substrate P by the surface mounter 104 and a reflow process in which the solder is melted by the reflow furnace 105 and the component is joined to the electrode part on the substrate P, the X-ray inspection apparatus 100 is performed. The mounted substrate P is transferred.
  • the X-ray inspection apparatus 100 images the mounted substrate P using X-rays, The solder joint state is inspected. Thereafter, the substrate P is transferred from the substrate transfer unit 2 to the transfer line 101C via the transfer outlet B, and is transferred into the optical inspection device 106. In the optical inspection device 106, visual inspection of the component mounting state using visible light is performed, and after these inspection processes are completed, the substrate P is transferred from the transfer line 101D to the unloader 107, and the manufacture of the circuit board is completed. To do.
  • the X-ray inspection apparatus 100 of the present embodiment is provided so as to cover the upper region of the base 1 including the X-ray source 3 and shields the X-rays, and the outside of the shielding wall 5. And an exterior cover 6 that covers the substrate transport unit 2.
  • the exterior cover 6 can be detached and detached from the shielding wall 5 while the shielding wall 5 is attached to the base 1.
  • the shape of the exterior cover 6 that covers the substrate transport unit 2 is not limited. Thereby, the freedom degree of the external appearance design of the X-ray inspection apparatus 100 can be improved.
  • the shielding member 50b (X-ray shielding member) is wasted when the exterior cover 6 is replaced. Can be prevented. Further, a function test of an X-ray source or the like can be performed with the exterior cover 6 removed and the shielding wall 5 exposed.
  • a cover mounting member 62 (63) for mounting the exterior cover 6 is provided between the shielding wall 5 and the exterior cover 6.
  • the exterior cover 6 can be easily attached to the cover attachment member 62 (63), and the exterior cover 6 is removed from the cover attachment member 62 (63) while the shielding wall 5 is attached to the base 1. Can be easily removed and replaced.
  • the first cover mounting member 62 is provided with the second mounting portion 62b for mounting the top cover member 61c
  • the second portion 63b for mounting the side cover member 61a is the second cover mounting member.
  • the top cover member 61c and the side cover member 61a are individually detachably attached to the second attachment portion 62b and the second portion 63b, respectively. According to such a configuration, the top cover member 61c and the side cover member 61a can be individually attached, so that the assembly work of the exterior cover 6 can be facilitated. Further, even when the exterior cover 6 is damaged and needs to be replaced, only the damaged member (for example, the side cover member 61a) can be replaced.
  • the first cover mounting member 62 and the second cover mounting member 63 can be individually provided, particularly when the X-ray inspection apparatus 100 is large, and therefore the top cover member 61c and A cover attachment member to which the side cover member 61a can be attached can be easily formed.
  • the exterior cover 6 is attached to the cover attachment member 62 (63) in a state of being separated from the shielding wall 5. According to such a configuration, since the exterior cover 6 is separated from the shielding wall 5, the lead of the shielding material 50 b of the shielding wall 5 does not adhere to the exterior cover 6, and the operator becomes lead when replacing the exterior cover 6. Contact can be suppressed.
  • the shielding wall 5 is supported by the support frame 52. For this reason, the shielding wall 5 can be easily attached to the support frame 52.
  • the first cover attachment member 62 is attached to the support frame 52 via the shielding wall 5 (upper surface portion 5c). According to such a configuration, it is not necessary to separately provide a structure for fixing the first cover mounting member 62, so that the structure of the X-ray inspection apparatus 100 can be simplified.
  • the attachment position of the first cover attachment member 62 is the thickness of the upper surface portion 5c. It will shift downward by the minute.
  • the position of the mounting hole of the bolt 66 of the second cover mounting member 63 fixed to the first cover mounting member 62 is also shifted downward by the thickness of the upper surface portion 5c, and the side cover member 61a is mounted at an appropriate position. I can't do that. For this reason, it is easy for an operator to notice that the shielding wall 5 (upper surface portion 5c) is not assembled. As a result, it is possible to prevent forgetting to assemble the shielding wall 5 (upper surface portion 5c) to the support frame 52. .
  • the wall member 51 (51a to 51c) of the shielding wall 5 is constituted by the metal plate 50a and the shielding material 50b attached to the metal plate 50a, and the shielding material 50b is formed on the metal plate 50a.
  • the shielding material 50b is formed on the metal plate 50a.
  • the plurality of wall members 51 are arranged so as to overlap each other at the boundary between the adjacent wall members 51 (51a to 51c).
  • the shielding member 50b of the wall member 51 (51a to 51c) overlaps at the boundary (seam) of the wall member 51 (51a to 51c), so that X-ray leakage is more reliably suppressed. be able to.
  • the shielding wall 5 is formed in a box shape
  • the exterior cover 6 is formed in a box shape that can accommodate the box-shaped shielding wall 5 inside.
  • the box-shaped shielding wall 5 can be accommodated inside the box-shaped outer cover 6 without being exposed to the outside.
  • a double structure of the inner box-shaped shielding wall 5 and the outer box-shaped exterior cover 6 can be formed, so that the inner shielding wall 5 does not need to consider the external appearance design, and is reliable X Lines can be shielded, and the outer exterior cover 6 can be designed specifically for appearance design.
  • the inspection object of the X-ray inspection apparatus 100 is a circuit board (substrate P). For this reason, it is possible to obtain a board inspection apparatus that can prevent the shielding material 50b (X-ray shielding member) from being wasted when the exterior cover 6 is replaced and can improve the degree of freedom in external design.
  • the present invention is not limited to this.
  • the present invention may be applied to an X-ray inspection apparatus that uses an object other than a circuit board as an inspection object.
  • the present invention is not limited to this.
  • the present invention may be applied to an X-ray inspection apparatus (substrate inspection apparatus) that is provided outside a circuit board production line and is used alone.
  • the X-ray inspection apparatus provided with only the X-ray source is shown, but the present invention is not limited to this.
  • a visible light source and an imaging unit may be further provided so that both X-ray inspection and visual inspection using visible light can be performed.
  • the exterior cover is configured by a plurality of plate-like cover members (side cover members 61a and 61b and top cover member 61c) is shown, but the present invention is not limited to this.
  • the exterior cover may be constituted by a single member.
  • the exterior cover may be configured by a front cover and a back cover obtained by dividing the exterior cover in half.
  • the shielding wall 5 may be constituted by a single member.
  • the present invention is not limited thereto.
  • the wall member 51 of the shielding wall 5 is arranged so as to overlap each other at the boundary (seam) between the adjacent wall members, but the present invention is not limited to this.
  • it is good also as a structure which covers the boundary (seam
  • you may comprise so that adjacent wall members may closely_contact
  • the present invention is not limited to this.
  • first cover mounting member 62 and the second cover mounting member 63 attached to the first cover mounting member 62 are provided, but the present invention is not limited to this.
  • the first cover mounting member 62 and the second cover mounting member 63 may be integrally formed.
  • the cover mounting member 62 is configured to be mounted on the support frame 52 via the shielding wall 5 (upper surface portion 5c).
  • the present invention is not limited to this.
  • the cover attachment member 62 and the shielding wall 5 (upper surface portion 5c) may be individually attached to the support frame 52.
  • the exterior cover 6 is provided so as to be separated from the shielding wall 5
  • the present invention is not limited to this.
  • the exterior cover and the shielding wall may be in contact with each other.
  • An X-ray inspection apparatus (100) is provided on a base (1), and includes an X-ray source (3) for irradiating an inspection object with X-rays and a base (1) including the X-ray source (3).
  • a shielding wall (5) that shields X-rays is provided so as to cover the upper region, a conveyance path (2) that conveys the inspection object through the region covered by the shielding wall (5), and a shielding wall ( 5) and an outer cover (6) that covers the conveyance path (2).
  • the exterior cover (6) can be removed separately from the shielding wall (5) while the shielding wall (5) is attached to the base (1).
  • the shape of the exterior cover that covers the conveyance path is not limited.
  • the freedom degree of the external appearance design of an X-ray inspection apparatus can be improved.
  • the X-ray inspection apparatus preferably further includes a cover attachment member that is disposed between the shielding wall (5) and the exterior cover (6) and attaches the exterior cover (6).
  • a cover attachment member that is disposed between the shielding wall (5) and the exterior cover (6) and attaches the exterior cover (6).
  • the exterior cover can be easily attached to the cover attachment member, and the exterior cover can be easily removed from the attachment member and replaced with the shielding wall attached to the base. Can do.
  • the exterior cover (6) includes a top cover member (61c) and a side cover member (61a), and the cover mounting member is a top surface for mounting the top cover member (61c).
  • the top cover member (61c) and the side cover member (61a) are respectively provided with a top cover.
  • the attachment part (62b) and the side cover attachment part (63b) are individually detachably attached. According to such a configuration, the top cover member and the side cover member can be individually attached, so that the assembly work of the exterior cover can be facilitated. Further, even when the exterior cover is damaged and needs to be replaced, only the damaged member (for example, the side cover member) can be replaced.
  • the cover mounting member preferably includes a first member (62) including a top cover mounting portion (62b) and a side cover mounting portion (63b).
  • Including a second member (63), and the second member (63) is formed separately from the first member (62) and attached to the first member (62).
  • the first member and the second member can be individually provided, particularly when the apparatus is large in size, so that the cover mounting member to which the top cover member and the side cover member can be attached is provided. It can be formed easily.
  • the exterior cover (6) is attached to the cover attaching member in a state of being separated from the shielding wall (5).
  • lead materials are generally used for X-ray shielding materials because of their high shielding performance, but from the viewpoint of accumulation of lead in the human body, the contact of workers with lead materials is reduced as much as possible. It is hoped to do.
  • the exterior cover is separated from the shielding wall, even when the shielding wall is formed of a lead material, lead does not adhere to the exterior cover, and the operator contacts the lead when replacing the exterior cover. Can be suppressed.
  • a support frame (52) for supporting the shielding wall (5) is further provided. According to such a configuration, the shielding wall can be easily attached to the support frame.
  • the cover attachment member is attached to the support frame (52) via the shielding wall (5).
  • the cover attachment member it is not necessary to separately provide a structure for fixing the cover mounting member, so that the structure of the apparatus can be simplified. Also, if you forget to attach the shielding wall to the support frame, the mounting position of the cover mounting member will shift, so the operator can easily notice that the shielding wall is not assembled, Forgetting to attach the shielding wall to the support frame can be prevented.
  • the shielding wall (5) includes a plurality of plate-like wall members (51), and the wall member (51) includes a plate member (50a) and a plate member (50a).
  • the X-ray shielding material (50b) is attached, and the X-ray shielding material (50b) is disposed on the exterior cover (6) side with respect to the plate member (50a).
  • the X-ray shielding material is arranged on the outer side (exterior cover side). Contact with lead from the inside can be suppressed.
  • the plurality of wall members (51) are arranged so as to overlap each other at the boundary between the adjacent wall members (51). According to such a configuration, even when the shielding wall is constituted by a plurality of wall members, the X-ray shielding material of the wall member overlaps at the boundary (seam) of the wall member, so that X-ray leakage is more reliably performed. Can be suppressed.
  • the shielding wall (5) has a box shape
  • the exterior cover (6) has a box shape capable of accommodating the box-shaped shielding wall (5) inside.
  • the box-shaped shielding wall can be accommodated inside the box-shaped exterior cover without exposing it to the outside.
  • a double structure of the inner box-shaped shielding wall and the outer box-shaped exterior cover can be formed, so that it is not necessary to consider the appearance design on the inner shielding wall, and reliable X-ray shielding is achieved.
  • the outer exterior cover can be designed specifically for the appearance design.
  • the inspection object is a circuit board (P). According to such a configuration, it is possible to obtain a substrate inspection apparatus that can prevent the X-ray shielding member from being wasted when the outer cover is replaced, and can improve the degree of freedom in appearance design.

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Medical Informatics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Radiology & Medical Imaging (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Biophysics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Optics & Photonics (AREA)
  • Immunology (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

L'invention concerne un appareil d'inspection à rayons X (100) comprenant : une source de rayons X (3), rayonnant des rayons X sur un substrat (P) ; une paroi de protection (5), disposée pour couvrir une région au-dessus d'une base (1), cette région comprenant la source de rayons X (3), et bloquant les rayons X ; une section de transfert de substrat (2), passant à travers la région couverte par la paroi de protection (5) et transférant le substrat (P) ; et un couvercle extérieur (6), disposé à l'extérieur de la paroi de protection (5) et couvrant la section de transfert de substrat (2). Le couvercle extérieur (6) peut être retiré par séparation de la paroi de protection (5), la paroi de protection (5) restant attachée à la base (1). Par conséquent, l'élément de protection des rayons X évite d'être gaspillé au moment du remplacement du couvercle extérieur, et le degré de liberté dans la conception de l'aspect du dispositif d'inspection à rayons X (100) peut être amélioré.
PCT/JP2012/003227 2011-12-09 2012-05-17 Appareil d'inspection à rayons x WO2013084373A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-270572 2011-12-09
JP2011270572A JP2013122404A (ja) 2011-12-09 2011-12-09 Ｘ線検査装置

Publications (1)

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WO2013084373A1 true WO2013084373A1 (fr) 2013-06-13

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JP (1) JP2013122404A (fr)
WO (1) WO2013084373A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104161541A (zh) * 2014-07-24 2014-11-26 北京东方逸腾数码医疗设备技术有限公司 医用x射线防护舱
CN109833057A (zh) * 2019-01-31 2019-06-04 常州市第二人民医院 一种新型核医学科用射线防护装置
CN110044935A (zh) * 2019-05-05 2019-07-23 浙江大学 医用辐射防护产品检测系统
CN112890852A (zh) * 2021-01-17 2021-06-04 朱祥富 一种人工智能影像科用辐射隔离装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5809951B2 (ja) * 2011-12-09 2015-11-11 ヤマハ発動機株式会社 Ｘ線検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11183405A (ja) * 1997-12-18 1999-07-09 Shimadzu Corp Ｘ線異物検査装置
JPH11183407A (ja) * 1997-12-18 1999-07-09 Shimadzu Corp Ｘ線異物検査装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5477853B2 (ja) * 2010-01-19 2014-04-23 株式会社庄内クリエート工業 ラインセンサーカメラを用いたｘ線検査装置

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
JPH11183405A (ja) * 1997-12-18 1999-07-09 Shimadzu Corp Ｘ線異物検査装置
JPH11183407A (ja) * 1997-12-18 1999-07-09 Shimadzu Corp Ｘ線異物検査装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104161541A (zh) * 2014-07-24 2014-11-26 北京东方逸腾数码医疗设备技术有限公司 医用x射线防护舱
CN109833057A (zh) * 2019-01-31 2019-06-04 常州市第二人民医院 一种新型核医学科用射线防护装置
CN110044935A (zh) * 2019-05-05 2019-07-23 浙江大学 医用辐射防护产品检测系统
CN112890852A (zh) * 2021-01-17 2021-06-04 朱祥富 一种人工智能影像科用辐射隔离装置

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