WO2013084373A1

WO2013084373A1 - X-ray inspection apparatus

Info

Publication number: WO2013084373A1
Application number: PCT/JP2012/003227
Authority: WO
Inventors: 學伊原; 翔伊藤
Original assignee: ヤマハ発動機株式会社
Priority date: 2011-12-09
Filing date: 2012-05-17
Publication date: 2013-06-13
Also published as: JP2013122404A

Abstract

An X-ray inspection apparatus (100) is provided with: an X-ray source (3), which radiates X-rays to a substrate (P); a shield wall (5), which is provided to cover a region above a base (1), said region including the X-ray source (3), and which blocks the X-rays; a substrate transfer section (2), which passes through the region covered with the shield wall (5), and which transfers the substrate (P); and an outer cover (6), which is provided outside of the shield wall (5), and covers the substrate transfer section (2). The outer cover (6) can be removed by being separated from the shield wall (5), while having the shield wall (5) remain attached to the base (1). Consequently, the X-ray shield member is prevented from being wasted at the time of replacing the outer cover, and degree of freedom in appearance design of the X-ray inspection apparatus (100) can be improved.

Description

X-ray inspection equipment

The present invention relates to an X-ray inspection apparatus, and more particularly to an X-ray inspection apparatus provided with an exterior cover.

Conventionally, an X-ray inspection apparatus provided with an exterior cover is known (for example, see Patent Document 1).

Patent Document 1 discloses an X-ray inspection apparatus including an exterior cover (panel) integrally provided with an X-ray shielding member. The exterior cover of this X-ray inspection apparatus has a rectangular flat surface and a standing wall-like portion provided along the outer periphery of the flat surface, and is formed in a concave shape. The lead X-ray shielding member is fitted in the recess of the exterior cover, and the recess is closed by the metal plate, so that the X-ray shielding member is integrally fixed to the exterior cover (panel). A box-shaped X-ray protective box is configured by combining the outer covers. In addition, the front-side exterior cover (front panel) on which the X-ray shielding member is integrally provided is configured to cover a conveyance path provided so as to pass through an opening formed in the front-side exterior cover. ing.

However, in Patent Document 1, since the X-ray shielding member is integrally provided on the exterior cover (panel), for example, the front exterior cover (front panel) exposed to the outside is damaged. In this case, the entire exterior cover (the entire front panel) must be replaced together with the X-ray shielding member and the metal plate. In this case, there is a problem that the X-ray shielding member provided integrally with the exterior cover (front panel) to be replaced is wasted. Further, in recent years, the design of the appearance of the apparatus tends to be regarded as important. On the other hand, in the X-ray inspection apparatus disclosed in Patent Document 1, an X-ray shielding member is integrally fitted in the exterior cover to prevent X-ray leakage. Therefore, the design of the exterior cover is limited to a simple shape such as a flat shape. For this reason, the technique described in Patent Document 1 also has a problem that the degree of freedom in external design is low.

JP 2009-135117 A

The present invention has been made to solve the above-described problems, and its purpose is to prevent the X-ray shielding member from being wasted when replacing the exterior cover, and to increase the degree of freedom in external design. To provide an X-ray inspection apparatus that can be improved.

In order to solve the above-described problems, an X-ray inspection apparatus according to the present invention is provided on a base, and an X-ray source for irradiating an inspection object with X-rays and above the base including the X-ray source. A shield wall that covers the region, shields X-rays, a transport path that transports the inspection object through the region covered by the shield wall, and is provided outside the shield wall, the transport And an exterior cover that covers the road. The exterior cover can be removed separately from the shielding wall while the shielding wall is mounted on a base.

It is the perspective view which showed the external appearance of the X-ray inspection apparatus by one Embodiment of this invention. It is sectional drawing which looked at the inside of the X-ray inspection apparatus by one Embodiment of this invention from the front side. It is the perspective view which showed typically the state which removed the exterior cover and shielding wall of the X-ray inspection apparatus by one Embodiment of this invention. It is the perspective view which showed typically the state which removed the exterior cover of the X-ray inspection apparatus by one Embodiment of this invention. FIG. 3 is an enlarged cross-sectional view schematically showing a region 500 in FIG. 2. FIG. 3 is an enlarged cross-sectional view schematically showing a region 600 in FIG. 2. It is the expanded sectional view which showed typically the boundary part of a wall member. It is sectional drawing which showed typically the vent hole of the shielding wall of the X-ray inspection apparatus by one Embodiment of this invention. It is the external view which looked at the X-ray inspection apparatus by one Embodiment of this invention from the rear surface side. It is a perspective view for demonstrating the shutter part of the X-ray inspection apparatus by one Embodiment of this invention. It is the figure which showed the circuit board manufacturing line using the X-ray inspection apparatus by one Embodiment of this invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

A structure of an X-ray inspection apparatus 100 according to an embodiment of the present invention will be described with reference to FIGS.

An X-ray inspection apparatus 100 according to an embodiment of the present invention uses a circuit board (board P) (see FIG. 3) on which electronic components are mounted as an inspection target, and performs solder joint state inspection of electronic components on the board P. This is a substrate inspection apparatus for performing various inspections. The substrate P is an example of the “inspection object” in the present invention. Hereinafter, the structure of the X-ray inspection apparatus 100 according to an embodiment of the present invention will be described in detail.

As shown in FIGS. 1 and 2, the X-ray inspection apparatus 100 includes a base 1, a substrate transport unit 2 installed on the base 1, an X-ray source 3, an imaging unit 4, and a shielding wall 5 (whichever 2) and an exterior cover 6 provided outside the shielding wall 5 are mainly provided. The shielding wall 5 is attached on the base 1 so as to cover the X-ray source 3. The substrate transport unit 2 is an example of the “transport path” in the present invention.

Inside the base 1, a control unit 12 that controls the entire X-ray inspection apparatus 100 including the X-ray source 3, the imaging unit 4, and the substrate transport unit 2, a power supply unit 13 that supplies power, and the like are arranged. . On the base 1, a pair of support bases 11 are disposed at both ends in the X direction and extend over substantially the entire length of the base 1 in the Y direction. As will be described later, a support beam 31 for supporting the X-ray source 3 and a support frame 52 for attaching the shielding wall 5 are installed on the pair of support bases 11.

As shown in FIGS. 2 and 3, the substrate transport unit 2 includes a pair of conveyors 21 extending along the X direction. The pair of conveyors 21 can support the substrate P from both sides in the Y direction and transport it in the X direction. At the time of substrate inspection, the pair of conveyors 21 holds the substrate P above the base 1 (Z1 direction) by a clamping mechanism (not shown). ) Can be held (fixed) at a predetermined position. The pair of conveyors 21 is installed on the base 1 via a pair of guide rails 22 extending in the X direction and a pair of guide rails 23 extending in the Y direction. The pair of conveyors 21 can be moved in the X direction along the guide rail 22 by an X-axis motor and an X-axis ball screw (not shown), and Y along the guide rail 23 by a Y-axis motor and a Y-axis ball screw (not shown). It can move in the direction. Thereby, the board | substrate conveyance part 2 (a pair of conveyor 21) is comprised so that a movement on the base 1 is possible in two directions (X direction and Y direction) on a horizontal surface.

When carrying the substrate P, the substrate transfer unit 2 moves the end 21a on the X1 direction side of the conveyor 21 to the carry-in entrance A, and then transfers the substrate P from the upstream transfer line 101B (see FIG. 11) provided outside. At the time of inheriting and unloading, the end 21b on the X2 direction side of the conveyor 21 is moved to the unloading port B so that the substrate P can be transferred to the downstream transfer line 101C (see FIG. 11). ing. Thus, the board | substrate conveyance part 2 is comprised so that the board | substrate P which is a test object may be conveyed through the internal area | region covered with the shielding wall 5. FIG. Further, the pair of conveyors 21 has a variable Y-direction interval in accordance with the size of the substrate P by a motor and a ball screw (not shown) and a guide rail.

As shown in FIG. 2, the X-ray source 3 is arranged at a position above the substrate transport unit 2 and configured to irradiate the substrate P arranged below (Z2 direction) with X-rays. . The X-ray source 3 is supported by a support beam 31, and the support beam 31 extends in the X direction and is fixed on a pair of support bases 11 at both ends.

The imaging unit 4 is disposed at a position below the X-ray source 3 and the substrate transport unit 2 and has a function of detecting an X-ray transmitted through the substrate P and capturing an X-ray image. The imaging unit 4 is configured to be movable in the horizontal direction (X direction and Y direction in FIG. 3) by the moving mechanism 41 on the lower side of the substrate transport unit 2. Accordingly, the substrate transport unit 2 and the imaging unit 4 are moved horizontally to adjust the relative positional relationship between the X-ray source 3, the substrate P, and the imaging unit 4, so that the substrate P is not directly above, that is, from an oblique direction. It is possible to image.

Here, as shown in FIG. 4, in this embodiment, the shielding wall 5 has a box-like shape with a substantially rectangular cross section covering the upper region (see FIG. 2) of the base 1 including the X-ray source 3. The shielding wall 5 is configured to shield the X-rays by covering the periphery of the X-ray source 3 with a shielding material 50b described later in order to prevent leakage of the X-rays emitted from the X-ray source 3 to the outside. Yes. A shielding material (not shown) is also provided on the upper surface of the base 1 so that the internal space surrounded by the base 1 and the shielding wall 5 is shielded from all directions.

The shielding wall 5 is composed of a plurality of plate-like wall members 51 (wall members 51a to 51c) attached to a support frame 52 (see FIG. 3) installed on a pair of support bases 11. That is, as shown in FIG. 2 and FIG. 4, the wall portion on both sides in the X direction (X1, X2 direction) of the shielding wall 5 is the lateral side surface portion 5a, and the wall portion on both sides in the Y direction (Y1, Y2 direction) is When the side surface portion 5b and the wall portion in the Z1 direction are the upper surface portion 5c, the lateral side surface portion 5a is constituted by a plurality of wall members 51a, the front and rear side surface portions 5b are constituted by a plurality of wall members 51b, and the upper surface portion 5c is a plurality of upper surface portions 5c. It is comprised by the wall member 51c.

As shown in FIG. 5, the wall member 51 is composed of a metal plate 50a and a lead sheet-like shielding material 50b attached to the metal plate 50a with a double-sided adhesive tape or the like. In the present embodiment, the shielding member 50b is disposed on the outer side (the exterior cover 6 side) with respect to the metal plate 50a. The metal plate 50a and the shielding material 50b are examples of the “plate member” and the “X-ray shielding material” of the present invention, respectively.

As shown in FIG. 3, the support frame 52 is configured by combining square hollow pipes, and a pair of side support frames provided on the pair of support bases 11 so as to extend upward (Z1 direction). 53 and an upper support frame 54 installed so as to hang over the pair of side support frames 53.

Each of the pair of side support frames 53 includes two column portions 53a extending upward from both ends of the support base 11, and an upper beam portion 53b and a lower beam portion 53c. A total of four column parts 53a are arranged at the four corner positions of the base 1 as seen in a plan view. The upper beam portion 53b of the side support frame 53 extends in the Y direction and is provided so as to bridge the upper ends of the two column portions 53a. The lower beam portion 53c extends in the Y direction substantially parallel to the upper beam portion 53b and connects the central portions of the two column portions 53a. Thereby, a pair of side part support frame 53 is each formed in the wall shape extended in a Z direction and a Y direction.

The upper support frame 54 of the support frame 52 includes a plurality of horizontal members 54a extending in the X direction provided on the upper surface of the side support frame 53 (upper beam portion 53b), and Y connecting the horizontal members 54a to each other. The roof member extends in the horizontal direction (X direction and Y direction) by the vertical member 54b extending in the direction. The support frame 52 is formed to cover the X-ray source 3 and the imaging unit 4 by a pair of side support frames 53 and an upper support frame 54.

As shown in FIGS. 2 to 5, the wall member 51a constituting the lateral side surface portion 5a of the shielding wall 5 has an upper end attached to the support frame 52 (upper beam portion 53b) via an attachment fitting 55a, and a lower end attached to the wall member 51a. It is attached to the support base 11 via a metal fitting 55b (see FIG. 6). The mounting position of the wall member 51a can be finely adjusted by the mounting

brackets

55a and 55b. For example, the mounting bracket 55a has an L shape, and a long hole 551 for screwing is formed on each surface thereof. For this reason, it is possible to finely adjust the vertical mounting position (Z direction) of the mounting bracket 55a and the wall member 51a with respect to the support frame 52 and the lateral mounting position of the wall member 51a with respect to the mounting bracket 55a. The structure for fine adjustment of the mounting position of the wall member 51a is the same for the other mounting bracket 55b.

The wall member 51b constituting the front and rear side surface portion 5b of the shielding wall 5 is screwed to the support frame 52 (lateral member 54a) and the base 1 via mounting brackets (not shown), respectively. The wall member 51 c constituting the upper surface portion 5 c of the shielding wall 5 is screwed to the upper support frame 54 (the horizontal member 54 a and the vertical member 54 b) of the support frame 52. For the attachment of the wall member 51 (51a to 51c), for example, a deformed screw such as a hex lobe screw (screw head having a hexagonal star shape) is used. This is to prevent the screws of the wall member 51 from being loosened by mistake by distinguishing the fixing screws of the wall member 51 from the fixing screws of other members.

In the present embodiment, these wall members 51 (51a to 51c) are arranged so as to overlap each other at the boundary (seam) with the adjacent wall member 51. For example, at the boundary (see FIG. 5) between the wall member 51a of the lateral side surface portion 5a and the wall member 51c of the upper surface portion 5c, the end E1 of the wall member 51c is bent downward (Z2 direction), so that the wall The end E1 of the member 51c and the end E2 of the wall member 51a overlap each other. Further, at the boundary between the wall members 51a of the lateral side surface portion 5a, the boundary between the wall members 51c of the upper surface portion 5c, etc., as shown in FIG. 7, one end portion E3 is bent and the inner side of the other end portion E4. The two end portions E3 and E4 overlap each other by entering.

A ventilation hole 5d (see FIG. 4) is formed in the upper surface part 5c of the shielding wall 5, and a ventilation fan 56 (see FIG. 8) is attached to the upper surface part 5c so as to cover the ventilation hole 5d from the inside. . The fan 56 is accommodated in an inner case 58 having a peripheral wall 58a surrounding the outer periphery thereof. The inner case 58 is accommodated in a container-shaped outer case 57 in which an opening 57a is formed. A lead shielding member 57b is affixed to the inner surface of the outer case 57. Also, a lead shielding member 58b is affixed to the outer surface of the peripheral wall 58a of the inner case 58, and the shielding member 57b of the outer case 57 and the shielding member 58b of the inner case 58 are arranged so as to overlap. Yes. For this reason, X-rays incident from below or obliquely downward toward the vent 5d are shielded by the shielding member 57b of the outer case 57, and X-rays incident substantially horizontally from the openings 57a of the outer case 57 Is shielded by the shielding member 58b. On the other hand, the air flowing from the opening 57a of the outer case 57 passes between the outer case 57 and the inner case 58, reaches the fan 56, and is exhausted to the outside through the vent 5d.

1 and 2, the exterior cover 6 has a box shape that is slightly larger than the shielding wall 5 so that the box-shaped shielding wall 5 can be accommodated therein. The exterior cover 6 is not provided with a shielding material 50b (and a metal plate 50a) for shielding X-rays. Further, the exterior cover 6 is provided separately from the shielding wall 5, and as shown in FIG. 4, only the exterior cover 6 can be detached alone while the shielding wall 5 is mounted on the base 1. It is said that.

As shown in FIGS. 1 and 2, the exterior cover 6 includes a plurality of plate-like cover members (

side cover members

61a and 61b and a top cover) attached to the first cover attaching member 62 and the second cover attaching member 63. It is constituted by a member 61c). That is, when the surface of the cover member 6 on both sides in the X direction (X1, X2 direction) is the lateral side surface 6a, the surface on both sides in the Y direction (Y1, Y2 direction) is the front and back side surface 6b, and the surface in the Z1 direction is the top surface 6c. The lateral side surface 6a is constituted by a plurality of side surface cover members 61a, the front and rear side surfaces 6b are constituted by a plurality of side surface cover members 61b, and the top surface 6c is constituted by a plurality of top surface cover members 61c.

The first and second

cover mounting members

62 and 63 are disposed between the shielding wall 5 and the exterior cover 6, and the plurality of cover members (

side cover members

61a and 61b and top cover member 61c) are respectively The cover mounting member (62 or 63) is individually detachably mounted. As shown in FIG. 2, the exterior cover 6 is attached to the first and second

cover attachment members

62 and 63 in a state of being separated from the shielding wall 5 (shielding material 50b). The first cover mounting member 62 and the second cover mounting member 63 are examples of the “first member” and the “second member” in the present invention, respectively.

Specifically, the first cover mounting member 62 is formed to extend in the X direction, and is fixed on the upper surface portion 5c of the shielding wall 5 with a screw. As shown in FIGS. 4 and 5, the first cover mounting member 62 includes a flat first mounting portion 62a and second mounting portion 62b, and a connecting portion that connects the first mounting portion 62a and the second mounting portion 62b. 62c. The first attachment portion 62a of the first cover attachment member 62 is screwed to the support frame 52 (upper support frame 54) via the shielding wall 5 (wall member 51c of the upper surface portion 5c). That is, the wall member 51 c and the first cover mounting member 62 are supported by the support frame 52 by being fastened together with the support frame 52 by the bolt 65. Moreover, the top cover member 61c which comprises the top surface 6c of the exterior cover 6 is attached to the 2nd attachment part 62b so that attachment or detachment is possible with a screw. Thereby, the top surface 6 c (top surface cover member 61 c) of the exterior cover 6 is fixed to the support frame 52 via the first cover mounting member 62. The second mounting portion 62b is an example of the “top cover mounting portion” in the present invention.

As shown in FIGS. 4 and 5, the second cover mounting member 63 is a member having an L-shaped cross section (L angle) extending in the Y direction, and is attached to both ends of the first cover mounting member 62 in the X direction. . Specifically, the end portion E5 of the first cover mounting member 62 is formed so as to protrude on both sides in the X direction from the shielding wall 5 (upper surface portion 5c), and at the protruding portion, the second cover mounting member is formed. A first portion 63a of 63 is attached to the first attachment portion 62a of the first cover attachment member 62 from the lower surface side. A side cover member 61a constituting a lateral side surface (both side surfaces in the X direction) 6a of the exterior cover 6 is detachably screwed with a bolt 66 to a second portion 63b extending downward from the first portion 63a. Thereby, the lateral side surface 6 a (side surface cover member 61 a) of the exterior cover 6 is fixed to the support frame 52 via the second cover mounting member 63 and the first cover mounting member 62. The lower end portion of the side cover member 61a is detachably screwed to a mounting bracket 64 (see FIG. 6) attached to the base 1. The second portion 63b is an example of the “side cover attaching portion” in the present invention.

As shown in FIG. 1 and FIG. 9, slide-type opening /

closing doors

7 and 8 are provided on the front surface 100a and the rear surface 100b of the X-ray inspection apparatus 100, respectively, so that the inside of the apparatus can be opened and closed. Is possible. Each of these open /

close doors

7 and 8 includes an exterior member 7a (8a) on the outer surface and a shielding member (not shown) that shields X-rays arranged on the inner surface side, and the exterior member 7a (8a). And the shielding member are screwed together. For this reason, the open /

close doors

7 and 8 are configured to function as a part of the exterior cover 6 while functioning to shield X-rays further outside the shielding wall 5. Each of the open /

close doors

7 and 8 is configured to enter a gap between the exterior cover 6 and the shielding wall 5 (between the adjacent side cover member 61b and the wall member 51b) when opened. Yes. The open / close door 7 is provided with two open / close detection switches 71 and 72 (see FIG. 4), and the open / close door 8 is provided with two open / close detection switches 81 and 82 (see FIG. 9). As these open / close detection switches (71, 72, 82 and 83), for example, magnetic detection type non-contact switches or the like are used.

The open / close detection switches 71 and 81 are switches for stopping (prohibiting) X-ray irradiation from the X-ray source 3 when the opening / closing of the open / close door 7 (8) is detected. The open / close detection switches 72 and 82 This is a switch for stopping (prohibiting) the operation of the movable mechanism such as the substrate transport section 2 when the opening of the open / close door 7 (8) is detected. Thereby, when the open / close door 7 (8) is opened at the time of maintenance, the X-ray irradiation from the X-ray source 3 and the operation of the substrate transport unit 2 and the like are prohibited.

As shown in FIG. 2, the left and right side surfaces 100c of the X-ray inspection apparatus 100 are provided with shutter portions 9 for opening and closing the carry-in port A and the carry-out port B, respectively. As shown in FIGS. 4 and 6, the shutter portion 9 covers the opening 59a (see FIG. 6) of the conveyor shielding portion 59 that constitutes the lower portion of the shielding wall 5 (lateral side surface portion 5a). It is attached to the shielding part 59. Specifically, the conveyor shielding portion 59 includes a first side plate 591 installed on the base 1 so as to be continuous with the lateral side surface portion 5a, a second side plate 592 attached to the first side plate 591, and a second side plate 592. And a conveyor shielding plate 593 attached to the side plate 592. That is, the conveyor shielding part 59 is provided so as to surround and cover the opening 11 a (see FIG. 6) provided on the side surface of the support base 11 by the first side plate 591, the second side plate 592, and the conveyor shielding plate 593. It has been. Each of the

side plates

591 and 592 and the conveyor shielding plate 593 has an exterior member 59b constituting the outer surface, and a lead shielding member 59c attached to the inside of the exterior member 59b. As shown in FIG. 10, the opening 59 a is formed in a rectangular shape having a size corresponding to the pair of conveyors 21, and is provided on the conveyor shielding plate 593. The substrate P can be carried in and out by the substrate transport unit 2 (the pair of conveyors 21) through the opening 59a.

The shutter portion 9 includes a frame-shaped base portion 91 screwed to the conveyor shielding plate 593 from the inside, and a pair of guide portions 92 (Z direction) provided at both ends of the base portion 91 in the Y direction. 93), a shutter main body 94 for closing the opening 59a, and an opening / closing mechanism 95 including an air cylinder. As shown in FIG. 6, the shutter main body 94 has an exterior member 94a constituting the outer surface, and a lead shielding member 94b attached to the inside of the exterior member 94a. As shown in FIG. 10, the opening / closing mechanism 95 is fixed to the base portion 91 via an attachment member 95a, and is configured so that the shutter main body 94 can be moved up and down. Thus, the opening 59a can be opened and closed by driving the opening and closing mechanism 95 and moving the shutter main body 94 up and down along the pair of guide portions 92 (93). Therefore, an opening 6d (see FIG. 1) is also formed in the exterior cover 6, and the shutter main body 94 is exposed to the outside through the opening 6d. Further, the shutter unit 9 is provided with an open / close detection switch 96 for detecting the opening of the shutter body 94, and is configured to stop the X-ray irradiation when the opening of the shutter body 94 is detected. .

The X-ray inspection apparatus 100 according to the present embodiment can be used as a part of a group of apparatuses constituting a circuit board manufacturing line that manufactures a circuit board manufacturing circuit for electronic components while transporting a board by a transport line.

For example, in the circuit board production line 200 shown in FIG. 11, the board P is sent out from the loader 102 that holds the board P before electronic component mounting to the conveyance line 101 </ b> A, and a paste solder printing process on the board P by the printing machine 103, After a component mounting process on the substrate P by the surface mounter 104 and a reflow process in which the solder is melted by the reflow furnace 105 and the component is joined to the electrode part on the substrate P, the X-ray inspection apparatus 100 is performed. The mounted substrate P is transferred. When the mounted substrate P is transferred from the transfer line 101B to the substrate transfer unit 2 through the carry-in entrance A, the X-ray inspection apparatus 100 images the mounted substrate P using X-rays, The solder joint state is inspected. Thereafter, the substrate P is transferred from the substrate transfer unit 2 to the transfer line 101C via the transfer outlet B, and is transferred into the optical inspection device 106. In the optical inspection device 106, visual inspection of the component mounting state using visible light is performed, and after these inspection processes are completed, the substrate P is transferred from the transfer line 101D to the unloader 107, and the manufacture of the circuit board is completed. To do.

As described above, the X-ray inspection apparatus 100 of the present embodiment is provided so as to cover the upper region of the base 1 including the X-ray source 3 and shields the X-rays, and the outside of the shielding wall 5. And an exterior cover 6 that covers the substrate transport unit 2. The exterior cover 6 can be detached and detached from the shielding wall 5 while the shielding wall 5 is attached to the base 1. Thus, since the exterior cover 6 is provided separately from the shielding wall 5 without being integrated, the shape of the exterior cover 6 that covers the substrate transport unit 2 is not limited. Thereby, the freedom degree of the external appearance design of the X-ray inspection apparatus 100 can be improved. Moreover, since only the new exterior cover 6 can be replaced with the shielding wall 5 attached when the exterior cover 6 is replaced, the shielding member 50b (X-ray shielding member) is wasted when the exterior cover 6 is replaced. Can be prevented. Further, a function test of an X-ray source or the like can be performed with the exterior cover 6 removed and the shielding wall 5 exposed.

In this embodiment, a cover mounting member 62 (63) for mounting the exterior cover 6 is provided between the shielding wall 5 and the exterior cover 6. For this reason, the exterior cover 6 can be easily attached to the cover attachment member 62 (63), and the exterior cover 6 is removed from the cover attachment member 62 (63) while the shielding wall 5 is attached to the base 1. Can be easily removed and replaced.

In the present embodiment, the first cover mounting member 62 is provided with the second mounting portion 62b for mounting the top cover member 61c, and the second portion 63b for mounting the side cover member 61a is the second cover mounting member. 63, the top cover member 61c and the side cover member 61a are individually detachably attached to the second attachment portion 62b and the second portion 63b, respectively. According to such a configuration, the top cover member 61c and the side cover member 61a can be individually attached, so that the assembly work of the exterior cover 6 can be facilitated. Further, even when the exterior cover 6 is damaged and needs to be replaced, only the damaged member (for example, the side cover member 61a) can be replaced.

Moreover, in this embodiment, as a member (cover attachment member) for attaching the exterior cover 6, the 1st cover attachment member 62 containing the 2nd attachment part 62b, the 2nd cover attachment member 63 containing the 2nd part 63b, The second cover attachment member 63 is formed separately from the first cover attachment member 62 and attached to the first cover attachment member 62. According to such a configuration, the first cover mounting member 62 and the second cover mounting member 63 can be individually provided, particularly when the X-ray inspection apparatus 100 is large, and therefore the top cover member 61c and A cover attachment member to which the side cover member 61a can be attached can be easily formed.

In this embodiment, the exterior cover 6 is attached to the cover attachment member 62 (63) in a state of being separated from the shielding wall 5. According to such a configuration, since the exterior cover 6 is separated from the shielding wall 5, the lead of the shielding material 50 b of the shielding wall 5 does not adhere to the exterior cover 6, and the operator becomes lead when replacing the exterior cover 6. Contact can be suppressed.

In the present embodiment, the shielding wall 5 is supported by the support frame 52. For this reason, the shielding wall 5 can be easily attached to the support frame 52.

Further, in the present embodiment, the first cover attachment member 62 is attached to the support frame 52 via the shielding wall 5 (upper surface portion 5c). According to such a configuration, it is not necessary to separately provide a structure for fixing the first cover mounting member 62, so that the structure of the X-ray inspection apparatus 100 can be simplified. In addition, as understood from FIG. 5, if it is forgotten to attach the shielding wall 5 (upper surface portion 5c) to the support frame 52, the attachment position of the first cover attachment member 62 is the thickness of the upper surface portion 5c. It will shift downward by the minute. Then, the position of the mounting hole of the bolt 66 of the second cover mounting member 63 fixed to the first cover mounting member 62 is also shifted downward by the thickness of the upper surface portion 5c, and the side cover member 61a is mounted at an appropriate position. I can't do that. For this reason, it is easy for an operator to notice that the shielding wall 5 (upper surface portion 5c) is not assembled. As a result, it is possible to prevent forgetting to assemble the shielding wall 5 (upper surface portion 5c) to the support frame 52. .

In the present embodiment, the wall member 51 (51a to 51c) of the shielding wall 5 is constituted by the metal plate 50a and the shielding material 50b attached to the metal plate 50a, and the shielding material 50b is formed on the metal plate 50a. On the other hand, it arrange | positions at the exterior cover 6 side. According to such a configuration, since the shielding member 50b is exposed with the exterior cover 6 removed, errors such as non-sticking of the shielding member 50b to the metal plate 50a can be prevented. Moreover, when performing maintenance inside the X-ray inspection apparatus 100 (inside the shielding wall 5), it is possible to prevent the worker from coming into contact with the lead of the shielding material 50b from the inside.

In the present embodiment, the plurality of wall members 51 (51a to 51c) are arranged so as to overlap each other at the boundary between the adjacent wall members 51 (51a to 51c). According to such a configuration, the shielding member 50b of the wall member 51 (51a to 51c) overlaps at the boundary (seam) of the wall member 51 (51a to 51c), so that X-ray leakage is more reliably suppressed. be able to.

In this embodiment, the shielding wall 5 is formed in a box shape, and the exterior cover 6 is formed in a box shape that can accommodate the box-shaped shielding wall 5 inside. According to such a configuration, the box-shaped shielding wall 5 can be accommodated inside the box-shaped outer cover 6 without being exposed to the outside. As a result, a double structure of the inner box-shaped shielding wall 5 and the outer box-shaped exterior cover 6 can be formed, so that the inner shielding wall 5 does not need to consider the external appearance design, and is reliable X Lines can be shielded, and the outer exterior cover 6 can be designed specifically for appearance design.

In this embodiment, the inspection object of the X-ray inspection apparatus 100 is a circuit board (substrate P). For this reason, it is possible to obtain a board inspection apparatus that can prevent the shielding material 50b (X-ray shielding member) from being wasted when the exterior cover 6 is replaced and can improve the degree of freedom in external design.

In addition, it should be thought that embodiment disclosed this time is an illustration and restrictive at no points. The scope of the present invention is shown not by the above description of the embodiments but by the scope of claims for patent, and further includes all modifications within the meaning and scope equivalent to the scope of claims for patent.

For example, in the above-described embodiment, the example in which the present invention is applied to the X-ray inspection apparatus (substrate inspection apparatus) 100 for inspecting the circuit board is shown, but the present invention is not limited to this. For example, the present invention may be applied to an X-ray inspection apparatus that uses an object other than a circuit board as an inspection object.

In the above embodiment, the example in which the present invention is applied to the X-ray inspection apparatus 100 constituting the circuit board production line 200 is shown, but the present invention is not limited to this. For example, the present invention may be applied to an X-ray inspection apparatus (substrate inspection apparatus) that is provided outside a circuit board production line and is used alone.

In the above embodiment, the X-ray inspection apparatus provided with only the X-ray source is shown, but the present invention is not limited to this. For example, a visible light source and an imaging unit may be further provided so that both X-ray inspection and visual inspection using visible light can be performed.

In the above embodiment, an example in which the exterior cover is configured by a plurality of plate-like cover members (

side cover members

61a and 61b and top cover member 61c) is shown, but the present invention is not limited to this. In the present invention, the exterior cover may be constituted by a single member. In addition, the exterior cover may be configured by a front cover and a back cover obtained by dividing the exterior cover in half.

Moreover, in the said embodiment, although the example which comprised the shielding wall 5 by the several wall member 51 was shown, this invention is not limited to this. In the present invention, the shielding wall may be constituted by a single member.

In the above embodiment, the example in which the shielding member 50b constituting the wall member 51 is disposed on the outer side (the exterior cover 6 side) with respect to the metal plate 50a has been described, but the present invention is not limited thereto. In this invention, you may arrange | position a shielding material inside a metal plate.

In the above embodiment, the wall member 51 of the shielding wall 5 is arranged so as to overlap each other at the boundary (seam) between the adjacent wall members, but the present invention is not limited to this. In this invention, it is good also as a structure which covers the boundary (seam | joint) of adjacent wall members with a shielding material separately, or the structure which pinches | interposes the shielding material provided separately between adjacent wall members. Moreover, you may comprise so that adjacent wall members may closely_contact | adhere without gap.

In the above embodiment, the example in which the support frame 52 that supports the shielding wall 5 is provided has been described, but the present invention is not limited to this. For example, you may install the shielding wall formed in the box shape on a base, without using a support frame.

Moreover, in the said embodiment, although the example which provided the cover attachment member 62 (63) for attaching the exterior cover 6 between the shielding wall 5 and the exterior cover 6 was shown, this invention is not limited to this. . For example, you may install a box-shaped exterior cover on a base, without using a cover attachment member.

In the above embodiment, an example in which the first cover mounting member 62 and the second cover mounting member 63 attached to the first cover mounting member 62 are provided is shown, but the present invention is not limited to this. In the present invention, the first cover mounting member 62 and the second cover mounting member 63 may be integrally formed.

In the above embodiment, the cover mounting member 62 is configured to be mounted on the support frame 52 via the shielding wall 5 (upper surface portion 5c). However, the present invention is not limited to this. In the present invention, the cover attachment member 62 and the shielding wall 5 (upper surface portion 5c) may be individually attached to the support frame 52.

In the above embodiment, the example in which the exterior cover 6 is provided so as to be separated from the shielding wall 5 is shown, but the present invention is not limited to this. In the present invention, the exterior cover and the shielding wall may be in contact with each other.

Finally, on the basis of the disclosure of the above embodiment, the characteristic configuration and operational effects related to the present invention will be described together.

An X-ray inspection apparatus (100) is provided on a base (1), and includes an X-ray source (3) for irradiating an inspection object with X-rays and a base (1) including the X-ray source (3). A shielding wall (5) that shields X-rays, is provided so as to cover the upper region, a conveyance path (2) that conveys the inspection object through the region covered by the shielding wall (5), and a shielding wall ( 5) and an outer cover (6) that covers the conveyance path (2). The exterior cover (6) can be removed separately from the shielding wall (5) while the shielding wall (5) is attached to the base (1).

According to the above configuration, since the exterior cover is provided separately from the shielding wall without being integrated, the shape of the exterior cover that covers the conveyance path is not limited. Thereby, the freedom degree of the external appearance design of an X-ray inspection apparatus can be improved. In addition, since only a new exterior cover can be replaced with the shielding wall attached while replacing the exterior cover, it is possible to prevent the X-ray shielding member from being wasted when replacing the exterior cover. In addition, it is possible to perform a function test of an X-ray source or the like with the exterior cover removed and the shielding wall exposed.

The X-ray inspection apparatus preferably further includes a cover attachment member that is disposed between the shielding wall (5) and the exterior cover (6) and attaches the exterior cover (6). According to such a configuration, the exterior cover can be easily attached to the cover attachment member, and the exterior cover can be easily removed from the attachment member and replaced with the shielding wall attached to the base. Can do.

In this case, preferably, the exterior cover (6) includes a top cover member (61c) and a side cover member (61a), and the cover mounting member is a top surface for mounting the top cover member (61c). A cover attaching portion (62b) and a side cover attaching portion (63b) for attaching the side cover member (61a). The top cover member (61c) and the side cover member (61a) are respectively provided with a top cover. The attachment part (62b) and the side cover attachment part (63b) are individually detachably attached. According to such a configuration, the top cover member and the side cover member can be individually attached, so that the assembly work of the exterior cover can be facilitated. Further, even when the exterior cover is damaged and needs to be replaced, only the damaged member (for example, the side cover member) can be replaced.

In the configuration in which the exterior cover includes a top cover member and a side cover member, the cover mounting member preferably includes a first member (62) including a top cover mounting portion (62b) and a side cover mounting portion (63b). ) Including a second member (63), and the second member (63) is formed separately from the first member (62) and attached to the first member (62). According to such a configuration, the first member and the second member can be individually provided, particularly when the apparatus is large in size, so that the cover mounting member to which the top cover member and the side cover member can be attached is provided. It can be formed easily.

In the configuration including the cover attaching member, preferably, the exterior cover (6) is attached to the cover attaching member in a state of being separated from the shielding wall (5). Here, lead materials are generally used for X-ray shielding materials because of their high shielding performance, but from the viewpoint of accumulation of lead in the human body, the contact of workers with lead materials is reduced as much as possible. It is hoped to do. According to the present invention, since the exterior cover is separated from the shielding wall, even when the shielding wall is formed of a lead material, lead does not adhere to the exterior cover, and the operator contacts the lead when replacing the exterior cover. Can be suppressed.

In the configuration including the cover mounting member, preferably, a support frame (52) for supporting the shielding wall (5) is further provided. According to such a configuration, the shielding wall can be easily attached to the support frame.

In this case, preferably, the cover attachment member is attached to the support frame (52) via the shielding wall (5). According to such a configuration, it is not necessary to separately provide a structure for fixing the cover mounting member, so that the structure of the apparatus can be simplified. Also, if you forget to attach the shielding wall to the support frame, the mounting position of the cover mounting member will shift, so the operator can easily notice that the shielding wall is not assembled, Forgetting to attach the shielding wall to the support frame can be prevented.

In the X-ray inspection apparatus, preferably, the shielding wall (5) includes a plurality of plate-like wall members (51), and the wall member (51) includes a plate member (50a) and a plate member (50a). The X-ray shielding material (50b) is attached, and the X-ray shielding material (50b) is disposed on the exterior cover (6) side with respect to the plate member (50a). According to such a configuration, since the X-ray shielding material is exposed with the exterior cover removed, it is possible to prevent non-sticking of the X-ray shielding material to the plate member. In addition, when performing maintenance inside the apparatus (inside the shielding wall), the X-ray shielding material is arranged on the outer side (exterior cover side). Contact with lead from the inside can be suppressed.

In this case, preferably, the plurality of wall members (51) are arranged so as to overlap each other at the boundary between the adjacent wall members (51). According to such a configuration, even when the shielding wall is constituted by a plurality of wall members, the X-ray shielding material of the wall member overlaps at the boundary (seam) of the wall member, so that X-ray leakage is more reliably performed. Can be suppressed.

In the X-ray inspection apparatus, preferably, the shielding wall (5) has a box shape, and the exterior cover (6) has a box shape capable of accommodating the box-shaped shielding wall (5) inside. . According to such a configuration, the box-shaped shielding wall can be accommodated inside the box-shaped exterior cover without exposing it to the outside. As a result, a double structure of the inner box-shaped shielding wall and the outer box-shaped exterior cover can be formed, so that it is not necessary to consider the appearance design on the inner shielding wall, and reliable X-ray shielding is achieved. In addition, the outer exterior cover can be designed specifically for the appearance design.

In the X-ray inspection apparatus, preferably, the inspection object is a circuit board (P). According to such a configuration, it is possible to obtain a substrate inspection apparatus that can prevent the X-ray shielding member from being wasted when the outer cover is replaced, and can improve the degree of freedom in appearance design.

Claims

An X-ray source that is provided on the base and irradiates the inspection object with X-rays;
A shielding wall provided so as to cover an upper region of the base including the X-ray source, and shielding X-rays;
A conveyance path for conveying the inspection object through the area covered by the shielding wall;
An exterior cover that is provided outside the shielding wall and covers the conveyance path;
The X-ray inspection apparatus, wherein the exterior cover is detachable from the shielding wall while the shielding wall is mounted on a base.
The X-ray inspection apparatus according to claim 1, further comprising a cover attachment member that is disposed between the shielding wall and the exterior cover and attaches the exterior cover.
The exterior cover includes a top cover member and a side cover member,
The cover attaching member includes a top cover attaching part for attaching the top cover member, and a side cover attaching part for attaching the side cover member,
The X-ray inspection apparatus according to claim 2, wherein the top surface cover member and the side surface cover member are individually detachably attached to the top surface cover attachment portion and the side surface cover attachment portion, respectively.
The cover mounting member includes a first member including the top cover mounting portion and a second member including the side cover mounting portion.
The X-ray inspection apparatus according to claim 3, wherein the second member is formed separately from the first member and attached to the first member.
The X-ray inspection apparatus according to any one of claims 2 to 4, wherein the exterior cover is attached to the cover attachment member in a state of being separated from the shielding wall.
6. The X-ray inspection apparatus according to claim 2, further comprising a support frame that supports the shielding wall.
The X-ray inspection apparatus according to claim 6, wherein the cover attaching member is attached to the support frame via the shielding wall.
The shielding wall includes a plurality of plate-like wall members,
The wall member has a plate member and an X-ray shielding material affixed to the plate member,
The X-ray inspection apparatus according to any one of claims 1 to 7, wherein the X-ray shielding material is disposed on the exterior cover side with respect to the plate member.
The X-ray inspection apparatus according to claim 8, wherein the plurality of wall members are arranged so as to overlap each other at a boundary between the adjacent wall members.
The shielding wall has a box shape,
The X-ray inspection apparatus according to any one of claims 1 to 9, wherein the exterior cover has a box shape capable of accommodating the box-shaped shielding wall therein.
11. The X-ray inspection apparatus according to claim 1, wherein the inspection object is a circuit board.