WO2013081019A1 - 真空ポンプ - Google Patents
真空ポンプ Download PDFInfo
- Publication number
- WO2013081019A1 WO2013081019A1 PCT/JP2012/080775 JP2012080775W WO2013081019A1 WO 2013081019 A1 WO2013081019 A1 WO 2013081019A1 JP 2012080775 W JP2012080775 W JP 2012080775W WO 2013081019 A1 WO2013081019 A1 WO 2013081019A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- vacuum pump
- rotating
- outermost
- rotating cylindrical
- Prior art date
Links
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
- F04D29/526—Details of the casing section radially opposing blade tips
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/10—Manufacture by removing material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/40—Organic materials
- F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/40—Organic materials
- F05D2300/44—Resins
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
- F05D2300/603—Composites; e.g. fibre-reinforced
- F05D2300/6034—Orientation of fibres, weaving, ply angle
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Moulding By Coating Moulds (AREA)
Abstract
Description
A)連続した繊維の切断、
B)異方性材料層と他の異方性材料層の歪みバランスの崩れ、
C)層の所定の部分の繊維の張力の変化
によって回転円筒が変形することもある。また、繊維を切断しなくても、ある一部の樹脂層を削り取ると、その歪みバランスが崩れ、回転円筒が変形することもある。
2 固定円筒部
3 回転円筒部
4 ヘリカル層
5 フープ層
Claims (9)
- 内周面に螺旋状のねじ溝部が設けられる固定円筒部と、該固定円筒部内に配設される回転円筒部とを備え、該回転円筒部を回転させることにより前記ねじ溝部と前記回転円筒部の外周面とで形成される螺旋状の排気流路を通じて排気を行うねじ溝ポンプ部を具備した真空ポンプであって、前記回転円筒部は、複数の繊維強化樹脂層を積層して構成されるものであり、最外の前記繊維強化樹脂層が、隣接する層より厚くなるように構成されていることを特徴とする真空ポンプ。
- 請求項1記載の真空ポンプにおいて、最外の前記繊維強化樹脂層は、隣接する層より25%以上厚くなるように構成されていることを特徴とする真空ポンプ。
- 内周面に螺旋状のねじ溝部が設けられる固定円筒部と、該固定円筒部内に配設される回転円筒部とを備え、該回転円筒部を回転させることにより前記ねじ溝部と前記回転円筒部の外周面とで形成される螺旋状の排気流路を通じて排気を行うねじ溝ポンプ部を具備した真空ポンプであって、前記回転円筒部は、複数の繊維強化樹脂層を積層して構成されるものであり、該繊維強化樹脂層には繊維をヘリカル巻して形成されるヘリカル層と繊維をフープ巻して形成されるフープ層とがあり、最外の前記フープ層が、隣接する層より厚くなるように構成されていることを特徴とする真空ポンプ。
- 請求項3記載の真空ポンプにおいて、最外の前記フープ層は、隣接する層より25%以上厚くなるように構成されていることを特徴とする真空ポンプ。
- 請求項1~4いずれか1項に記載の真空ポンプにおいて、前記回転円筒部の表面が少なくとも一部除去されていることを特徴とする真空ポンプ。
- 請求項1~5いずれか1項に記載の真空ポンプにおいて、前記回転円筒部の最外層をフープ層としたことを特徴とする真空ポンプ。
- 請求項1~6いずれか1項に記載の真空ポンプにおいて、前記回転円筒部の最内層をフープ層としたことを特徴とする真空ポンプ。
- 請求項7記載の真空ポンプにおいて、前記回転円筒部の最外層及び最内層の前記フープ層を同一厚さとしたことを特徴とする真空ポンプ。
- 請求項1~8いずれか1項に記載の真空ポンプにおいて、前記回転円筒部の最外層及び最内層以外の他の層は同一厚さに設定されていることを特徴とする真空ポンプ。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020147016249A KR101980405B1 (ko) | 2011-11-30 | 2012-11-28 | 진공 펌프 |
CN201280057028.8A CN103998789B (zh) | 2011-11-30 | 2012-11-28 | 真空泵 |
EP12854483.0A EP2787218B1 (en) | 2011-11-30 | 2012-11-28 | Vacuum pump |
US14/358,248 US9835170B2 (en) | 2011-11-30 | 2012-11-28 | Vacuum pump with fiber-reinforced resin cylinder |
JP2013547192A JP5984839B2 (ja) | 2011-11-30 | 2012-11-28 | 真空ポンプ |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011-261793 | 2011-11-30 | ||
JP2011261793 | 2011-11-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2013081019A1 true WO2013081019A1 (ja) | 2013-06-06 |
Family
ID=48535470
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2012/080775 WO2013081019A1 (ja) | 2011-11-30 | 2012-11-28 | 真空ポンプ |
Country Status (7)
Country | Link |
---|---|
US (1) | US9835170B2 (ja) |
EP (1) | EP2787218B1 (ja) |
JP (1) | JP5984839B2 (ja) |
KR (1) | KR101980405B1 (ja) |
CN (1) | CN103998789B (ja) |
TW (1) | TWI586893B (ja) |
WO (1) | WO2013081019A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014203172A1 (de) | 2014-02-21 | 2015-08-27 | Oerlikon Leybold Vacuum Gmbh | Beschichtete CFK Oberflächen von Turbomolekularpumpen |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BR112017018374B1 (pt) * | 2015-02-27 | 2022-11-22 | Pyrotek, Inc | Bomba de transferência de transbordo de material avançado |
JP6641734B2 (ja) * | 2015-06-12 | 2020-02-05 | 株式会社島津製作所 | ターボ分子ポンプ |
WO2016202870A1 (en) * | 2015-06-18 | 2016-12-22 | Nuovo Pignone Tecnologie Srl | Casing for a turbomachine |
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JP2001221186A (ja) * | 2000-02-04 | 2001-08-17 | Tokyo Electron Ltd | 軸流真空ポンプ及び処理装置 |
JP2004278512A (ja) | 2002-10-11 | 2004-10-07 | Alcatel | 複合材を用いたスカート(compositeskirt)を有するターボ/ドラッグポンプ |
JP2009108752A (ja) | 2007-10-30 | 2009-05-21 | Edwards Kk | 真空ポンプ |
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-
2012
- 2012-11-23 TW TW101143961A patent/TWI586893B/zh active
- 2012-11-28 WO PCT/JP2012/080775 patent/WO2013081019A1/ja active Application Filing
- 2012-11-28 KR KR1020147016249A patent/KR101980405B1/ko active IP Right Grant
- 2012-11-28 EP EP12854483.0A patent/EP2787218B1/en active Active
- 2012-11-28 JP JP2013547192A patent/JP5984839B2/ja active Active
- 2012-11-28 CN CN201280057028.8A patent/CN103998789B/zh active Active
- 2012-11-28 US US14/358,248 patent/US9835170B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3098139B2 (ja) * | 1993-06-17 | 2000-10-16 | 株式会社大阪真空機器製作所 | 複合分子ポンプ |
JP2001221186A (ja) * | 2000-02-04 | 2001-08-17 | Tokyo Electron Ltd | 軸流真空ポンプ及び処理装置 |
JP2004278512A (ja) | 2002-10-11 | 2004-10-07 | Alcatel | 複合材を用いたスカート(compositeskirt)を有するターボ/ドラッグポンプ |
JP2009108752A (ja) | 2007-10-30 | 2009-05-21 | Edwards Kk | 真空ポンプ |
Non-Patent Citations (1)
Title |
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See also references of EP2787218A4 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014203172A1 (de) | 2014-02-21 | 2015-08-27 | Oerlikon Leybold Vacuum Gmbh | Beschichtete CFK Oberflächen von Turbomolekularpumpen |
EP2918628A1 (de) | 2014-02-21 | 2015-09-16 | Oerlikon Leybold Vacuum GmbH | Beschichtete CFK Oberflächen von Turbomolekularpumpen |
Also Published As
Publication number | Publication date |
---|---|
TWI586893B (zh) | 2017-06-11 |
EP2787218A4 (en) | 2015-07-29 |
JPWO2013081019A1 (ja) | 2015-04-27 |
TW201323717A (zh) | 2013-06-16 |
JP5984839B2 (ja) | 2016-09-06 |
EP2787218A1 (en) | 2014-10-08 |
KR20140099493A (ko) | 2014-08-12 |
US20140294565A1 (en) | 2014-10-02 |
EP2787218B1 (en) | 2019-05-15 |
KR101980405B1 (ko) | 2019-05-20 |
CN103998789B (zh) | 2016-08-17 |
US9835170B2 (en) | 2017-12-05 |
CN103998789A (zh) | 2014-08-20 |
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