JP5984839B2 - 真空ポンプ - Google Patents
真空ポンプ Download PDFInfo
- Publication number
- JP5984839B2 JP5984839B2 JP2013547192A JP2013547192A JP5984839B2 JP 5984839 B2 JP5984839 B2 JP 5984839B2 JP 2013547192 A JP2013547192 A JP 2013547192A JP 2013547192 A JP2013547192 A JP 2013547192A JP 5984839 B2 JP5984839 B2 JP 5984839B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- vacuum pump
- rotating cylindrical
- outermost
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
- F04D29/526—Details of the casing section radially opposing blade tips
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/10—Manufacture by removing material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/40—Organic materials
- F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/40—Organic materials
- F05D2300/44—Resins
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
- F05D2300/603—Composites; e.g. fibre-reinforced
- F05D2300/6034—Orientation of fibres, weaving, ply angle
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Moulding By Coating Moulds (AREA)
Description
A)連続した繊維の切断、
B)異方性材料層と他の異方性材料層の歪みバランスの崩れ、
C)層の所定の部分の繊維の張力の変化
によって回転円筒が変形することもある。また、繊維を切断しなくても、ある一部の樹脂層を削り取ると、その歪みバランスが崩れ、回転円筒が変形することもある。
2 固定円筒部
3 回転円筒部
4 ヘリカル層
5 フープ層
Claims (9)
- 内周面に螺旋状のねじ溝部が設けられる固定円筒部と、該固定円筒部内に配設される回転円筒部とを備え、該回転円筒部を回転させることにより前記ねじ溝部と前記回転円筒部の外周面とで形成される螺旋状の排気流路を通じて排気を行うねじ溝ポンプ部を具備した真空ポンプであって、前記回転円筒部は、複数の繊維強化樹脂層を積層して構成されるものであり、最外の前記繊維強化樹脂層が、隣接する層より厚くなるように構成されていることを特徴とする真空ポンプ。
- 請求項1記載の真空ポンプにおいて、最外の前記繊維強化樹脂層は、隣接する層より25%以上厚くなるように構成されていることを特徴とする真空ポンプ。
- 内周面に螺旋状のねじ溝部が設けられる固定円筒部と、該固定円筒部内に配設される回転円筒部とを備え、該回転円筒部を回転させることにより前記ねじ溝部と前記回転円筒部の外周面とで形成される螺旋状の排気流路を通じて排気を行うねじ溝ポンプ部を具備した真空ポンプであって、前記回転円筒部は、複数の繊維強化樹脂層を積層して構成されるものであり、該繊維強化樹脂層には繊維をヘリカル巻して形成されるヘリカル層と繊維をフープ巻して形成されるフープ層とがあり、最外の前記フープ層が、隣接する層より厚くなるように構成されていることを特徴とする真空ポンプ。
- 請求項3記載の真空ポンプにおいて、最外の前記フープ層は、隣接する層より25%以上厚くなるように構成されていることを特徴とする真空ポンプ。
- 請求項1〜4いずれか1項に記載の真空ポンプにおいて、前記回転円筒部の表面が少なくとも一部除去されていることを特徴とする真空ポンプ。
- 請求項1〜5いずれか1項に記載の真空ポンプにおいて、前記回転円筒部の最外層をフープ層としたことを特徴とする真空ポンプ。
- 請求項1〜6いずれか1項に記載の真空ポンプにおいて、前記回転円筒部の最内層をフープ層としたことを特徴とする真空ポンプ。
- 請求項7記載の真空ポンプにおいて、前記回転円筒部の最外層及び最内層の前記フープ層を同一厚さとしたことを特徴とする真空ポンプ。
- 請求項1〜8いずれか1項に記載の真空ポンプにおいて、前記回転円筒部の最外層及び最内層以外の他の層は同一厚さに設定されていることを特徴とする真空ポンプ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011261793 | 2011-11-30 | ||
JP2011261793 | 2011-11-30 | ||
PCT/JP2012/080775 WO2013081019A1 (ja) | 2011-11-30 | 2012-11-28 | 真空ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2013081019A1 JPWO2013081019A1 (ja) | 2015-04-27 |
JP5984839B2 true JP5984839B2 (ja) | 2016-09-06 |
Family
ID=48535470
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013547192A Active JP5984839B2 (ja) | 2011-11-30 | 2012-11-28 | 真空ポンプ |
Country Status (7)
Country | Link |
---|---|
US (1) | US9835170B2 (ja) |
EP (1) | EP2787218B1 (ja) |
JP (1) | JP5984839B2 (ja) |
KR (1) | KR101980405B1 (ja) |
CN (1) | CN103998789B (ja) |
TW (1) | TWI586893B (ja) |
WO (1) | WO2013081019A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014203172A1 (de) | 2014-02-21 | 2015-08-27 | Oerlikon Leybold Vacuum Gmbh | Beschichtete CFK Oberflächen von Turbomolekularpumpen |
RU2712557C2 (ru) * | 2015-02-27 | 2020-01-29 | Пиротек, Инк. | Переливной перекачивающий насос из материала с улучшенными свойствами |
JP6641734B2 (ja) * | 2015-06-12 | 2020-02-05 | 株式会社島津製作所 | ターボ分子ポンプ |
US10697469B2 (en) * | 2015-06-18 | 2020-06-30 | Nuovo Pignone Srl | Casing for a turbomachine |
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US4773306A (en) * | 1986-07-08 | 1988-09-27 | Pneumo Abex Coporation | Dual tandem composite cylinder assembly including separately formed cylinder barrels |
CN1037196A (zh) * | 1988-04-26 | 1989-11-15 | 瓦西里·波里苏维奇·希洛克夫 | 分子真空泵 |
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JP2001221186A (ja) * | 2000-02-04 | 2001-08-17 | Tokyo Electron Ltd | 軸流真空ポンプ及び処理装置 |
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JP3974772B2 (ja) * | 2001-11-16 | 2007-09-12 | Bocエドワーズ株式会社 | 真空ポンプ |
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-
2012
- 2012-11-23 TW TW101143961A patent/TWI586893B/zh active
- 2012-11-28 EP EP12854483.0A patent/EP2787218B1/en active Active
- 2012-11-28 US US14/358,248 patent/US9835170B2/en active Active
- 2012-11-28 KR KR1020147016249A patent/KR101980405B1/ko active IP Right Grant
- 2012-11-28 WO PCT/JP2012/080775 patent/WO2013081019A1/ja active Application Filing
- 2012-11-28 JP JP2013547192A patent/JP5984839B2/ja active Active
- 2012-11-28 CN CN201280057028.8A patent/CN103998789B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
EP2787218B1 (en) | 2019-05-15 |
TWI586893B (zh) | 2017-06-11 |
CN103998789B (zh) | 2016-08-17 |
KR20140099493A (ko) | 2014-08-12 |
EP2787218A1 (en) | 2014-10-08 |
US9835170B2 (en) | 2017-12-05 |
US20140294565A1 (en) | 2014-10-02 |
EP2787218A4 (en) | 2015-07-29 |
JPWO2013081019A1 (ja) | 2015-04-27 |
CN103998789A (zh) | 2014-08-20 |
TW201323717A (zh) | 2013-06-16 |
KR101980405B1 (ko) | 2019-05-20 |
WO2013081019A1 (ja) | 2013-06-06 |
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