WO2013038859A1 - 発光装置 - Google Patents
発光装置 Download PDFInfo
- Publication number
- WO2013038859A1 WO2013038859A1 PCT/JP2012/070638 JP2012070638W WO2013038859A1 WO 2013038859 A1 WO2013038859 A1 WO 2013038859A1 JP 2012070638 W JP2012070638 W JP 2012070638W WO 2013038859 A1 WO2013038859 A1 WO 2013038859A1
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- WO
- WIPO (PCT)
- Prior art keywords
- lamp
- electrode
- trigger electrode
- trigger
- light emitting
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
Definitions
- the present invention relates to a light emitting device using an excimer lamp.
- a double tube structure lamp housing having an inner lamp housing and an outer lamp housing, a discharge electrode provided on the outer periphery of the outer lamp housing, and an inner lamp
- a device including a discharge electrode provided in a housing and a trigger electrode for applying a trigger voltage is known (for example, Patent Document 1).
- the trigger electrode is in contact with the main body portion of the inner lamp housing.
- the conventional light emitting device since the trigger electrode is in contact with the main body of the lamp housing, it is necessary to keep the discharge electrode away from the contact position.
- the discharge electrode since the area where the discharge electrode can be installed in the lamp housing is limited, in order to move away from the trigger electrode, the discharge electrode must be relatively small.
- the conventional light emitting device has a problem that the actual discharge area becomes smaller than the overall size of the lamp housing, and the effective light emission range cannot be secured.
- a wide discharge electrode is ensured, there is a problem that the lamp cannot be well lit due to the influence of the discharge between the trigger electrode and the discharge electrode.
- the present invention has been made to solve such a problem, and an object of the present invention is to provide a light emitting device capable of ensuring a sufficiently wide effective light emission range while enabling good lamp lighting.
- a light-emitting device is formed in a lamp housing having a discharge gas sealed therein and having a light emitting portion, a discharge electrode provided on the outer surface of the lamp housing, and the lamp housing.
- An excimer lamp including a tubular portion that protrudes outward from the lamp housing and extends, a power supply portion that supplies power to the discharge electrode, a lamp support portion that supports the excimer lamp, and a voltage that triggers the excimer lamp
- a trigger electrode that supplies power, a trigger power supply unit that supplies power to the trigger electrode, an excimer lamp, a power supply unit, a lamp support unit, a trigger electrode, and an external housing that houses the trigger power supply unit. Point contact with the outer surface of the part.
- the excimer lamp includes the lamp housing in which the discharge electrode is provided on the outer surface.
- the excimer lamp includes a tubular portion that protrudes outward from the lamp housing. Since the tubular portion extends outward from the lamp housing, it is possible to ensure a sufficient distance from the discharge electrode of the lamp housing.
- the trigger electrode is in point contact with the outer surface of such a tubular section. That is, regardless of the shape and size of the discharge electrode provided in the lamp housing, the trigger electrode contact portion can be sufficiently separated from the discharge electrode.
- the discharge between the trigger electrode and the discharge electrode can be prevented, so that the lamp can be well lit, while the discharge electrode can be provided in a sufficient range in the lamp housing.
- point contact the electric field is concentrated, and the lamp can be lit better. As described above, a satisfactory lamp can be lit and a sufficiently wide effective light emission range can be secured.
- the trigger electrode may extend in a direction intersecting with the extending direction of the tubular portion, and may make point contact with the outer surface of the tubular portion at the tip portion. With such a configuration, it is possible to reliably make point contact with the outer surface of the tubular portion at the tip portion of the trigger electrode.
- the wall thickness of the tubular portion may be smaller than the wall thickness of the lamp housing.
- the discharge starting ability can be increased by reducing the wall thickness of the tubular portion.
- high strength for example, physical strength against pressure and discharge resistance
- the trigger electrode may be in point contact with the outer surface of the tubular portion on the lamp support portion side. With such a configuration, the trigger electrode can come into contact with the tubular portion at the same time that the excimer lamp is installed on the lamp support portion. Thereby, a trigger electrode can be made to contact a tubular part reliably.
- the lamp housing may be supported on one end side by the lamp support portion, the tubular portion may be formed on one end side of the lamp housing, and the lamp support portion may have a groove portion that accommodates the tubular portion. .
- the lamp housing is supported by the lamp support portion, and at the same time, the tubular portion is housed in the groove portion and protected.
- the state where the trigger electrode and the tubular portion are in point contact can be stably maintained.
- the lamp support part may have a through hole at the bottom of the groove part, and the trigger electrode may protrude from the through hole.
- the trigger electrode reliably makes point contact with the tubular portion at a portion protruding from the through hole, and is protected by the through hole at a portion surrounded by the through hole. Thereby, the state where the trigger electrode and the tubular portion are in point contact can be stably maintained.
- the light emitting device may further include a trigger electrode support portion that supports the trigger electrode, and the trigger electrode support portion may include a pressing member that presses the trigger electrode against the tubular portion. Thereby, the trigger electrode pressed by the pressing member can make point contact with the tubular portion firmly.
- the external housing includes a bottom surface portion that fixes the lamp support portion, and a lid portion that is disposed at a position facing the bottom surface portion.
- the lid portion faces the bottom surface portion, and the lamp housing.
- the excimer lamp includes a frame-shaped portion of the lid portion and a lamp support portion, and a frame-shaped portion facing the outer edge of the body, and an opening that is surrounded by the frame-shaped portion and exposes the light emitting portion. It may be held by being pinched. With such a structure, the excimer lamp can be fixed so as to be pressed from above by closing the lid. Thereby, the tubular portion can be reliably brought into point contact with the trigger electrode.
- the external housing includes a bottom surface portion that fixes the lamp support portion, and a cover portion that is disposed at a position facing the bottom surface portion.
- the cover portion faces the bottom surface portion, and the lamp housing.
- a frame-shaped portion facing the outer edge of the body, an opening surrounded by the frame-shaped portion and exposing the light emitting portion, and a side wall extending from the outer edge of the frame-shaped portion toward the bottom surface.
- the excimer lamp may be held by being sandwiched between the frame-like portion of the cover portion and the lamp support portion. With such a structure, the excimer lamp can be fixed so as to be pressed from above by closing the cover portion. Thereby, the tubular portion can be reliably brought into point contact with the trigger electrode.
- FIG. 1 is a perspective view of a light emitting device according to an embodiment of the present invention.
- FIG. 2 is an exploded perspective view of the light emitting device shown in FIG. 3 is a cross-sectional view taken along line III-III shown in FIG.
- FIG. 4 is an enlarged view showing configurations of the excimer lamp and the lamp support portion.
- FIG. 5 is a partial cross-sectional view of the lamp support portion and the lamp housing as viewed from the short side direction. 6 is a cross-sectional view taken along the line VI-VI shown in FIG. 5, and is an enlarged cross-sectional view in which the vicinity of the tubular portion is enlarged.
- FIG. 1 is a perspective view of a light emitting device according to an embodiment of the present invention.
- FIG. 2 is an exploded perspective view of the light emitting device shown in FIG. 3 is a cross-sectional view taken along line III-III shown in FIG.
- FIG. 4 is an enlarged view showing configurations of the excimer lamp and the lamp support
- FIG. 7 is a conceptual diagram for comparing the light emitting device according to the present embodiment and the light emitting device according to the comparative example.
- FIG. 8 is a conceptual diagram of a light emitting device according to a comparative example.
- FIG. 9 is a graph showing a voltage application state and a lamp lighting state.
- FIG. 10 is a perspective view showing a light emitting device according to a modification.
- FIG. 1 is a perspective view of a light emitting device according to an embodiment of the present invention.
- the light emitting device 100 accommodates a rectangular flat excimer lamp 1 in a rectangular parallelepiped external housing 4 and a rectangular opening at the center of an upper lid (lid portion) 8 of the external housing 4.
- the portion 8 a is formed to expose the exit surface of the excimer lamp 1.
- the light emitting device 100 is a device capable of emitting light by applying a high frequency voltage to a discharge gas sealed in the internal space of the excimer lamp 1 and taking out generated light from the opening 8a.
- An exhaust port 14 for discharging air taken in from a plurality of intake ports (not shown) is provided on the side wall on one end side in the longitudinal direction of the housing 4 in order to cool the internal space of the external housing 4.
- FIG. 2 is an exploded perspective view of the light emitting device shown in FIG. 3 is a cross-sectional view taken along line III-III shown in FIG.
- FIG. 4 is an enlarged view showing configurations of the excimer lamp and the lamp support portion.
- FIG. 3 is shown in a deformed state in order to easily understand the positional relationship between the components.
- the excimer lamp 1 includes a lamp housing 2 formed in a rectangular flat plate shape from a dielectric material transparent to emitted light, and a tubular portion formed in the lamp housing 2.
- a mesh-shaped light passing electrode (discharge electrode, light emitting portion) 30 formed over substantially the entire front surface 2b of the lamp housing 2, and the back surface 2c of the lamp housing 2 facing the back surface 2c.
- the light passing electrode 30 is configured by forming a mesh-like electrode in an inner region of an electrode formed in a rectangular ring shape along the outer peripheral edge of the front surface 2b.
- the back electrode 3 and the light passing electrode 30 of the excimer lamp 1 are opposed to each other through an internal space filled with a discharge gas.
- the light passing electrode 30 is set to the ground potential (ground potential), and a high frequency voltage is applied between the back electrode 3 and the light passing electrode 30 to cause the discharge gas in the internal space to emit light, and the generated light is emitted from the lamp housing. 2 can be emitted from the front surface 2b side.
- the high frequency voltage is an alternating voltage having a frequency of 1 MHz or more.
- a flat lamp housing 2 of the excimer lamp 1 is formed to have a rectangular flat plate-like front substrate 22, the same material and the same shape as the front substrate 22, and opposed to the front substrate 22 at a predetermined interval.
- the rear substrate 23 is provided. When viewed from the thickness direction, the four outer edges of the front substrate 22 and the four outer edges of the back substrate 23 are arranged to coincide with each other.
- the “thickness direction” indicates a direction in which the front substrate 22 and the rear substrate 23 face each other, that is, a direction perpendicular to the front surface 2b and the back surface 2c.
- an inner space 28 formed by connecting the four outer peripheral edges of the front substrate 22 and the rear substrate 23 with a rectangular annular peripheral wall 24 is sealed, and airtightness is maintained.
- the peripheral wall 24 includes a pair of side walls that connect the pair of long edges of the front substrate 22 and the pair of long edges of the back substrate 23 over the entire length in the longitudinal direction, and a pair of short edges of the front substrate 22.
- a pair of side walls that join and connect the edge and the pair of short edges of the back substrate 23 over the entire length in the width (short) direction are configured.
- the four side walls constituting the peripheral wall 24 are erected so as to be perpendicular to the substrates 22 and 23, respectively.
- the wall thicknesses of the front substrate 22, the rear substrate 23, and the peripheral wall 24 are all the same.
- the outer surface of the front substrate 22 constitutes the front surface 2 b of the lamp housing 2.
- the outer surface of the back substrate 23 constitutes the back surface 2 c of the lamp housing 2.
- a part of the lamp housing 2 on one end 2d side is supported by a lamp support part 11A described later, and a part on the other end 2e side is supported by a lamp support part 11B described later.
- a tubular portion 20 used for exhausting the internal space 28 and enclosing a discharge gas at the time of manufacture is formed on the peripheral wall 24 on the one end 2d side in the longitudinal direction of the lamp housing 2.
- the tubular portion 20 is formed at the center position in the width direction and the thickness direction of the lamp housing 2.
- the tubular portion 20 protrudes outward from the peripheral wall 24 of the lamp housing 2, and extends in the same direction as the extending direction (longitudinal direction) of the lamp housing 2.
- the tubular portion 20 extends horizontally with axiality while maintaining a predetermined inner diameter and outer diameter so that the outer peripheral surface 20a forms a cylindrical surface, and the distal end portion 20b is sealed.
- the tip tube formed in the normal excimer lamp is unavoidably formed in manufacturing, it is sealed in a state of slightly protruding from the lamp housing 2 so as to be as short as possible. And a sufficient length is not secured. That is, a cylindrical surface that extends straight is not formed on the outer surface of the tip tube, and in many cases, the tip tube does not have a shape that can realize good point contact with the trigger electrode 40. Further, the distance between the outer surface and the light passing electrode 30 or the back electrode 3 is not sufficiently secured.
- the tubular portion 20 of the present embodiment has the same function as that of the conventional tip tube at the time of manufacture, but has a sufficient length by extending unlike the conventional tip tube. Accordingly, it is possible to ensure an outer surface shape suitable for point contact with the trigger electrode 40 and to be sufficiently separated from the light passing electrode 30 and the back electrode 3 (a distance that is not affected by discharge). ) Can be secured.
- the light passing electrode 30 formed on the front surface 2b of the lamp housing 2 is formed of a metal film, and is formed on almost the entire surface except for the outer edge portion of the front surface 2b. More specifically, the light passing electrode 30 includes an annular portion formed in a rectangular ring shape along the outer edge portion of the front surface 2b, and a mesh portion formed in a net shape in an inner region of the annular portion. Since the light passing electrode 30 is formed in a net shape over substantially the entire front surface 2b, the light generated in the internal space can be emitted from the front surface 2b.
- the light passing electrode 30 itself may be made of a translucent material so that light can be emitted.
- the light passing electrode 30 is electrically connected to the ground electrode of the external housing 4.
- the material of the lamp housing 2 and the tubular portion 20 is preferably synthetic quartz glass or fused silica glass.
- a rare gas such as xenon or a mixed gas of a rare gas and a halogen gas is preferably used as the discharge gas sealed in the internal space 28, for example.
- the gas pressure of the discharge gas is preferably 50 to 100 kPa.
- the size of the lamp housing 2 is 45 to 55 mm in the lateral direction, 490 to 510 mm in the longitudinal direction, and 8 to 10 mm in the thickness direction.
- the wall thickness of the lamp housing 2 is preferably larger than the wall thickness of the tubular portion 20.
- the wall thickness of the lamp housing 2 is 1.5 to 2 mm
- the wall thickness of the tubular portion 20 (tube wall thickness) is 0.5 to 1 mm.
- a rectangular ring-shaped frame made of a conductive material, for example, a stainless steel thin plate so as to cover the outer peripheral edge of the front surface 2b and the rectangular annular outer peripheral edge of the light passing electrode 30.
- a thin plate (feeding part) 26 is arranged.
- the frame-shaped thin plate 26 has an outer periphery that has substantially the same shape as the outer periphery of the front surface 2 b of the lamp housing 2, and an inner periphery that has substantially the same shape as the rectangular annular edge of the light passing electrode 30.
- the frame-like thin plate 26 may be joined to the lamp housing 2 by brazing or the like.
- the frame-shaped thin plate 26 functions as a power feeding unit that feeds power to the light passing electrode 30 provided in the excimer lamp 1.
- the back electrode 3 on the back surface 2 c side of the lamp housing 2 functions as an electrode of the excimer lamp 1, and is provided separately from the excimer lamp 1.
- the back electrode 3 is configured by an aluminum rectangular flat plate having substantially the same shape as the rectangular annular outer peripheral edge of the light passing electrode 30. Therefore, problems such as electrode peeling are unlikely to occur.
- the back electrode 3 is disposed in contact with the back surface 2 c so as to face the back surface 2 c of the lamp housing 2.
- the back electrode 3 is provided with a power supply unit 15 for supplying power to the back electrode 3.
- the power feeding portion 15 is formed by bending an electrode piece provided on the outer edge portion of the back electrode 3 downward.
- the power supply unit 15 is connected to a high-frequency power source via wiring.
- the front surface 3a serving as a contact surface with the lamp housing 2 is mirror-finished so as to reflect light generated inside the lamp housing 2 toward the front surface 2b.
- the electrode layer / reflecting mirror may be formed directly on the back surface 2c of the lamp housing 2 by vapor deposition of metal such as aluminum.
- the back electrode 3 may be used as a power supply member for supplying power to the electrode layer, or a separate power supply member may be provided in place of the back electrode 3.
- a region sandwiched between the light passing electrode 30 and the back electrode 3 is a discharge region to which a high frequency voltage is applied.
- the external housing 4 is a rectangular parallelepiped box that houses the excimer lamp 1, the frame-like thin plate 26, the lamp support portions 11A and 11B, the rod-like support portion 12, the trigger electrode 40, and the trigger transformer 50.
- the external housing 4 includes a bottom rectangular case 6 whose upper surface side is opened, and an upper lid (lid portion) 8 that covers the opened upper surface of the case 6.
- the case 6 and the upper lid 8 are made of a conductive material, and for example, a material such as aluminum or stainless steel can be adopted.
- the case 6 includes a bottom surface portion 6a that faces the upper lid 8, and side surface portions 6b that extend upward from the four outer edges of the bottom surface portion 6a.
- the upper lid 8 has a frame-shaped portion 8b facing the bottom surface portion 6a and facing the outer edge of the lamp housing 2, and an opening 8a surrounded by the frame-shaped portion 8b and exposing the light passing electrode 30.
- the opening 8a is formed in a substantially rectangular shape at a central position of the frame-shaped portion 8b and in a region facing the excimer lamp 1.
- the case 6 and the upper lid 8 are fixed by inserting the screw 29 into the through hole 8c and the screw hole 6d.
- a step surface 8d is provided on the inner edge on the lower surface side of the frame-shaped portion 8b, that is, around the opening 8a (see FIG. 3).
- the four outer edges of the stepped surface 8d are set slightly larger than the housed frame-like thin plate 26 and the four outer edges of the lamp housing 2 when viewed from above. Thereby, the frame-shaped thin plate 26 and the lamp housing 2 are accommodated, and the positioning when the upper lid 8 is fixed is facilitated.
- lamp support portions 11A and 11B and a rod-like support portion 12 are provided on the bottom surface portion 6a.
- the lamp support portions 11A and 11B are provided on both ends of the bottom surface portion 6a in the longitudinal direction, and have a function of supporting the excimer lamp 1 and positioning in the planar direction.
- the lamp support portion 11A supports the lamp housing 2 (and the back electrode 3) on the one end 2d side.
- the lamp support portion 11B supports the lamp housing 2 (and the back electrode 3) on the other end 2e side.
- the lamp support portions 11A and 11B are configured by standing upright substantially rectangular parallelepiped insulating members (for example, ceramics) that extend in the width direction of the excimer lamp 1 on both ends of the bottom surface portion 6a.
- the distance between the side surfaces of the lamp support portions 11A and 11B facing each other is slightly wider than the length of the excimer lamp 1 in the longitudinal direction.
- the detailed configuration of the lamp support portions 11A and 11B will be described later.
- the rod-like support portions 12 are provided at a plurality of locations at predetermined intervals on the bottom surface portion 6a, and have a function of supporting the excimer lamp 1 from below.
- the rod-like support portion 12 is provided so as to be separated from the lamp support portions 11A and 11B at a predetermined interval in the plane direction.
- the rod-like support portion 12 extends vertically from the bottom surface portion 6a toward the upper back electrode 3, and supports the excimer lamp 1 so as to be separated from the bottom surface portion 6a.
- the rod-like support portion 12 is formed of an insulator such as ceramics, and the upper end portion thereof is preferably reduced in diameter and tapered. Therefore, since the area of the tip portion of the rod-like support portion 12 can be made extremely small with respect to the entire area of the back surface of the back electrode 3, the rod-like support portion 12 supports the back electrode 3 substantially in point contact. be able to.
- a pair of rod-like support portions 12 are arranged at regular intervals along the longitudinal direction between the lamp support portion 11A and the lamp support portion 11B.
- FIG. 5 is a partial cross-sectional view of the lamp support portion and the lamp housing as viewed from the short side direction.
- 6 is a cross-sectional view taken along the line VI-VI shown in FIG. 5, and is an enlarged cross-sectional view in which the vicinity of the tubular portion is enlarged.
- FIG. 5 shows only the lamp support portion 11A, the excimer lamp 1, the trigger electrode 40, and the trigger transformer 50.
- FIG. 5 shows a cross section of only the lamp support portion 11A.
- the lamp support portion 11 ⁇ / b> A is formed in a substantially rectangular parallelepiped shape extending along the short side direction of the lamp housing 2.
- a rectangular cutout extending in the long side direction is provided at one edge of the long side of the lamp support 11A so as to leave a part of both ends in the long side.
- the notch is formed on the upper side of the facing surface 11c facing the other lamp support portion 11B.
- the step surface 11a is formed perpendicular to the facing surface 11c, and the notch surface 11b is formed parallel to the facing surface 11c.
- the notch surface 11b is formed so as to face the back surface 11m, which is the surface opposite to the facing surface 11c.
- the step surface 11 a can function as a mounting surface for mounting the excimer lamp 1, and the notch surface 11 b can function as a stopper surface for positioning the excimer lamp 1 in the longitudinal direction.
- One end side of the back electrode 3 is disposed on the step surface 11 a, and the one end 2 d side of the lamp housing 2 is disposed via the back electrode 3.
- the interval between the inner side surfaces of the remaining portions 11d and 11e on both ends in the longitudinal direction of the notch portion is substantially the same as the length in the width direction of the lamp housing 2, these remaining portions 11d and 11e are It can function as a stopper for positioning the excimer lamp 1 in the width direction.
- the upper surface 11 f of the lamp support portion 11 ⁇ / b> A is formed at a position lower than the upper end surface 6 c of the side surface portion 6 b of the case 6. Further, the upper surface 11f is formed at a position lower than the front surface 2b of the lamp housing 2 in a state of being supported by the lamp support portion 11A (see FIG. 3).
- the lamp support portion 11B on the other end 2e side also has a step surface 11a, a notch surface 11b, remaining portions 11d and 11e, and an upper surface 11f having the same configuration as the lamp support portion 11A.
- the lamp support portion 11 ⁇ / b> A has a groove portion 61 that accommodates the tubular portion 20 of the lamp housing 2.
- the groove portion 61 is a U-shaped groove extending from the notch surface 11b toward the rear surface 11m.
- the groove 61 extends so as to be perpendicular to the notch surface 11b and the back surface 11m.
- the groove 61 has a U-shape that opens upward, opens at the upper surface 11f, and is curved to draw a semicircle on the lower side.
- the U-shaped groove portion 61 forms a U-shape that is symmetrical with respect to the left and right lines via a center line in the width direction of the groove.
- the groove portion 61 includes a pair of planar side portions 62 extending vertically downward from the upper surface 11f, and a semi-cylindrical bottom portion 63 that protrudes downward so as to connect the lower ends of the pair of planes.
- the lowermost end 63 a of the bottom 63 is formed on the center line in the width direction of the groove 61.
- the lowermost end 63a draws a straight line extending so as to be perpendicular to the notch surface 11b and the back surface 11m.
- an inner space 64 for accommodating the trigger transformer 50 is formed in a region below the step surface 11a of the lamp support portion 11A.
- the internal space 64 is formed at a position below the groove 61.
- the internal space 64 has a substantially rectangular parallelepiped shape in accordance with the shape of the trigger transformer 50, and opens at the facing surface 11c and the bottom surface of the lamp support portion 11A.
- a through hole 66 extending downward from the groove 61 and opening in the internal space 64 is formed in the bottom 63 of the groove 61.
- the through-hole 66 has a circular shape whose center is disposed on the lowermost end portion 63 a, extends vertically into the internal space, and opens at the upper surface 64 a of the internal space 64.
- the trigger electrode 40 extending in the vertical direction in the through hole 66 is disposed in the through hole 66 of the lamp support portion 11A.
- a trigger transformer (trigger power supply unit, trigger electrode support unit) 50 is accommodated in the internal space 64 of the lamp support unit 11A.
- the trigger electrode 40 has a function of applying a trigger voltage serving as a trigger to the excimer lamp 1.
- the trigger electrode 40 is in point contact with the outer peripheral surface 20 a of the tubular portion 20 in the excimer lamp 1 and applies a trigger voltage to the tubular portion 20.
- the trigger transformer 50 has a function of supplying power to the trigger electrode 40.
- the trigger transformer 50 also has a function of supporting the trigger electrode 40.
- the trigger transformer 50 includes a trigger electrode support cylinder (trigger electrode support portion) 51 extending upward together with the trigger electrode 40 so as to surround the trigger electrode 40 extending from the upper surface 50a.
- the trigger transformer 50 is arranged such that the upper surface 50a faces or contacts the upper surface 64a of the internal space 64 and the side surface 50b faces or contacts the side surface 64b of the internal space 64.
- a wiring 53 is connected to a portion of the side surface of the trigger transformer 50 exposed from the facing surface 11c of the lamp support portion 11A.
- a bar-like or needle-like trigger electrode 40 extends upward from the upper surface 50a of the trigger transformer 50.
- the trigger electrode 40 has an outer diameter of about 0.5 to 2 mm.
- the trigger electrode 40 may have a tapered tip.
- the trigger electrode 40 extends through the through-hole 66 and has an upper end extending above the lowermost end portion 63a.
- the trigger electrode 40 has a part on the upper end side protruding into the groove 61.
- the trigger electrode 40 is preferably arranged such that a central axis CL ⁇ b> 2 extending in the vertical direction coincides with the central axis of the through-hole 66 and intersects the lowermost end 63 a of the groove 61 perpendicularly.
- the trigger electrode 40 is supported around the trigger electrode 40 inside the through hole 66 by the trigger electrode support cylinder 51.
- a spring probe is used as the trigger electrode support cylinder 51, and the trigger electrode support cylinder 51 includes a spring material (pressing member) 52 that allows the trigger electrode 40 to move elastically in the vertical direction.
- the trigger electrode 40 is elastically moved downward by being pressed by the tubular portion 20 by the spring material 52, and simultaneously applies a pressing force to the tubular portion 20. Therefore, the spring material 52 can function as a pressing member that presses the trigger electrode against the tubular portion 20.
- the one end 2d side of the back surface 2c of the lamp housing 2 of the excimer lamp 1 is disposed on the step surface 11a of the lamp support portion 11A via the back electrode 3. Further, the tubular portion 20 extending from the one end 2 d side of the lamp housing 2 is disposed in the groove portion 61.
- the tubular portion 20 is perpendicular to the notch surface 11 b and is disposed at the center position in the width direction of the groove portion 61. That is, the tubular portion 20 is disposed such that the central axis CL ⁇ b> 1 (perpendicular to the peripheral wall 24 of the one end 2 d of the lamp housing 2) coincides with the central line in the width direction of the groove 61.
- the central axis CL ⁇ b> 1 overlaps the center line in the width direction of the groove 61.
- the central axis CL ⁇ b> 1 also overlaps with a straight line drawn by the lowermost end portion 63 a of the bottom portion 63.
- the straight line drawn by the lowermost end part 20 c of the outer peripheral surface 20 a of the tubular part 20 also overlaps with the straight line drawn by the lowermost end part 63 a of the bottom part 63.
- the straight lines of the central axis CL1 and the lowermost end 20c are parallel to the side 62 and the bottom 63 of the groove 61.
- the peripheral surface wall 24 on the one end 2d side of the lamp housing 2 is separated from the notch surface 11b and is not in contact. Thereby, the creeping discharge in the said part can be suppressed.
- tip part 20b of the tubular part 20 are spaced apart from the bottom part 63 and the side part 62, and are not contacted.
- the tubular portion 20 is separated from the bottom portion 63 and is not in contact with the tubular portion 20, thereby preventing the tubular portion 20 from being stressed.
- the tubular part 20, the bottom part 63, and the side part 62 are contacting, creeping discharge between the trigger electrode 40 and a discharge electrode may generate
- the effect of electric field concentration due to the point contact of the trigger electrode 40 with the tubular portion 20 can be further enhanced.
- the effect of the present invention can be obtained even if the tubular portion 20 is in contact with either or both of the bottom portion 63 and the side portion 62.
- the tubular portion 20 is accommodated in the groove portion 61 and a part thereof does not protrude outside the groove portion 61.
- the tip portion 20b of the tubular portion 20 does not protrude outward from the back surface 11m of the lamp support portion 11A. That is, it is preferable that the back surface 11m and the tip 20b are separated from each other by a dimension T1 as shown in FIG.
- the outer peripheral surface 20a of the tubular part 20 does not protrude upward from the upper surface 11f of the lamp support part 11A. That is, it is preferable that the upper surface 11f and the uppermost end portion of the tubular portion 20 are separated from each other by the dimension T2 as shown in FIG.
- the tubular portion 20 when the tubular portion 20 protrudes from the groove portion 61, the operator's finger and the tubular portion 20 may come into contact with each other and be damaged during the replacement of the lamp housing 2 or other parts. .
- the influence of stress at the time of contact is great. Therefore, such a breakage can be prevented by adopting a configuration in which the tubular portion 20 is accommodated in the groove portion 61.
- the effect of the present invention can be obtained even if the tubular portion 20 protrudes from either or both of the back surface 11m and the top surface 11f.
- the trigger electrode 40 extends in a direction intersecting (here, orthogonal to) the extending direction of the tubular portion 20 (the direction in which the central axis CL1 extends), and is in point contact with the outer surface of the tubular portion 20 at the distal end portion 41. is doing.
- the trigger electrode 40 is in point contact with the outer peripheral surface 20a in the region of the tubular portion 20 on the lamp support portion 11A side, that is, the lower half region of the tubular portion 20.
- the trigger electrode 40 makes point contact so as to be perpendicular to the outer peripheral surface 20a at the contact point.
- the central axis CL2 of the trigger electrode 40 intersects perpendicularly at the central axis CL1 and P1 of the tubular portion 20.
- the trigger electrode 40 intersects perpendicularly
- the tangent line TL with respect to the contact point P2 is drawn on the outer circle of the cross section of the tubular portion 20, the tangent line TL and the central axis CL2 of the trigger electrode 40 are perpendicular to each other (see FIG. 6).
- the outer peripheral surface 20a (here, the straight line drawn by the lowermost end portion 20c) in the vertical cross section and the central axis CL2 of the trigger electrode 40 are perpendicular to each other. (See FIG. 5).
- the trigger electrode 40 can be firmly in contact with the tubular portion 20. Note that the above-described relationship does not have to be strictly satisfied, and it is allowed that the position is shifted within a range of manufacturing errors of components and work installation errors.
- the trigger electrode 40 Before the lamp housing 2 is installed (state shown in FIG. 4), the trigger electrode 40 is not subjected to a force from above.
- the amount of protrusion of the trigger electrode 40 at this time (the distance between the tip 41 and the lowest end 63a) is the difference between the lowest end 20c and the lowest end 63a of the tubular part 20 when the lamp housing 2 is installed. Greater than the distance between. Accordingly, when the lamp housing 2 is installed, the trigger electrode 40 is elastically moved downward by being pushed by the outer peripheral surface 20a of the tubular portion 20. As described above, the trigger electrode 40 is elastically moved, so that an excessive stress is not applied to the tubular portion 20. At the same time, since the trigger electrode 40 can be pressed against the tubular portion 20 (in a range where stress that may cause damage) is not applied, the trigger electrode 40 and the tubular portion 20 can be brought into firm contact.
- the position of the contact point P2 in the extending direction of the tubular part 20, that is, the arrangement position of the trigger electrode 40 is preferably close to the center position in the extending direction of the tubular part 20. That is, the contact point P2 is preferably disposed at a position separated from the distal end portion 20b of the tubular portion 20 and at a position separated from the proximal end (end portion on the peripheral wall 24 side) of the tubular portion 20. In the region close to the tip portion 20b, the outer surface of the tubular portion 20 is rounded into a spherical shape due to a slight deformation during sealing, so that the trigger electrode 40 may be misaligned and cannot be point-contacted satisfactorily. There is. In a region near the base end (a range within about 10 mm from the peripheral wall 24), there is a possibility that a discharge occurs between the trigger electrode 40 and the discharge electrode.
- the upper surface 50a of the trigger transformer 50 and the upper surface 64a of the internal space 64 of the lamp support portion 11A may be in close contact with each other or may not be in contact with each other.
- the side surface 50b of the trigger transformer 50 and the side surface 64b of the internal space 64 of the lamp support portion 11A may be in close contact with each other or may not be in contact with each other.
- the inner diameter of the inner peripheral surface of the through hole 66 is set larger than the outer diameter of the trigger electrode 40 and the trigger electrode support cylinder 51 so that they are not in contact with each other. Thereby, creeping discharge can be prevented.
- a light emitting device 200 according to a comparative example will be described with reference to FIG.
- the trigger electrode 40 and the discharge electrode here, the back electrode 3, but when the trigger electrode 40 is brought into contact with the front surface 2 b side, the same relationship is established with the light passing electrode 30) 3 are close to each other
- the trigger electrode 40 is in contact with the back surface 2 c of the main body of the lamp housing 2. Therefore, it is necessary to keep the edge of the discharge electrode 3 away from the contact position.
- the discharge electrode 3 must be relatively small.
- the light emitting device 200 has a problem that the actual discharge area becomes smaller than the overall size of the lamp housing 2 and the effective light emission range cannot be secured.
- the excimer lamp 1 includes the lamp housing 2 in which the light passing electrode 30 is formed on the front surface 2b and the back electrode 3 is disposed on the back surface 2c. Yes.
- the excimer lamp 1 includes a tubular portion 20 that protrudes outward from the lamp housing 2 and extends. Since the tubular portion 20 extends outward from the lamp housing 2, it is possible to ensure a sufficient distance from the discharge electrodes (the light passing electrode 30 and the back electrode 3) of the lamp housing 2.
- the trigger electrode 40 is in point contact with the outer surface of the tubular portion 20.
- the contact point P ⁇ b> 2 of the trigger electrode 40 can be sufficiently separated from the discharge electrodes 3 and 30.
- the lamp can be well lit by preventing the discharge between the trigger electrode 40 and the discharge electrodes 3 and 30, while the lamp housing 2 is sufficient.
- the discharge electrodes 3 and 30 can be provided in such a range. Therefore, the effective light emission range can be secured to the maximum with respect to the size of the lamp housing 2. Furthermore, by using point contact, the electric field is concentrated, and the lamp can be lit better.
- the trigger electrode 40 extends in a direction intersecting (here, orthogonal) to the extending direction of the tubular portion 20, and is in point contact with the outer peripheral surface 20 a of the tubular portion 20 at the tip portion 41. With such a configuration, the tip portion 41 of the trigger electrode 40 can reliably make point contact with the outer surface of the tubular portion 20.
- the wall thickness of the tubular portion 20 is smaller than the wall thickness of the lamp housing 2.
- the wall thickness of the tubular portion 20 is set to be smaller than the wall thickness of the lamp housing 2 at least at the contact point P2 with the trigger electrode 40. That is, the vicinity of the root of the tubular portion 20 is made smaller than the wall thickness of the lamp housing 2 at the contact point P2 even though the wall thickness of the lamp housing 2 is equal to the wall thickness in order to ensure the strength.
- the trigger electrode 40 is in point contact with the outer peripheral surface 20a of the tubular portion 20 on the lamp support portion 11A side.
- the excimer lamp 1 is installed on the lamp support portion 11 ⁇ / b> A, and at the same time, the trigger electrode 40 protruding from the bottom portion 63 of the groove portion 61 can contact the tubular portion 20. Thereby, the trigger electrode 40 can be made to contact the tubular part 20 reliably.
- the lamp housing 2 is supported by the lamp support portion 11A on the one end 2d side.
- the tubular portion 20 is formed on the one end 2 d side of the lamp housing 2.
- the lamp support portion 11 ⁇ / b> A has a groove portion 61 that accommodates the tubular portion 20.
- the lamp support portion 11 ⁇ / b> A has a through hole 66 in the bottom portion 63 of the groove portion 61.
- the trigger electrode 40 protrudes upward from the through hole 66. With such a configuration, the trigger electrode 40 reliably makes point contact with the tubular portion 20 at a portion protruding from the through hole 66, and is protected by the through hole 66 at a portion surrounded by the through hole 66. Thereby, the state where the trigger electrode 40 and the tubular portion 20 are in point contact can be stably maintained.
- the trigger electrode 40 is supported by a trigger transformer 50 and a trigger electrode support cylinder 51.
- the trigger transformer 50 includes a spring material 52 that presses the trigger electrode 40 against the tubular portion 20. Thereby, the trigger electrode 40 pressed by the spring material 52 can make point contact with the tubular portion 20 firmly.
- the excimer lamp 1 is held by being sandwiched between the frame-like portion 8b of the upper lid 8 and the lamp support portions 11A and 11B. With such a structure, the excimer lamp 1 can be fixed so as to be pressed from above by closing the upper lid 8. Thereby, the tubular portion 20 can be reliably brought into point contact with the trigger electrode 40.
- an excimer lamp having the following configuration was used. That is, synthetic quartz glass is used as the material of the lamp housing 2 and the tubular portion 20, the size of the lamp housing is 50 mm ⁇ 500 mm ⁇ 9 mm, the wall thickness is 1.8 mm, and the length of the tubular portion 20 is 20 mm. And a wall thickness set to 0.75 mm (outer diameter 6 mm, inner diameter 4.5 mm). Also, 66.7 kPa of xenon was sealed in the internal space 28 as a discharge gas. Further, the trigger electrode 40 having an outer diameter of 0.7 mm was used, and the tip portion 41 made point contact with the tubular portion 20.
- a voltage of about 3 kVp-p is applied from the lighting power source to the back electrode 3 and the light passing electrode 30, and a voltage of about 20 kVp-p is applied from the trigger transformer 50 to the trigger electrode 40.
- Application was performed at a repetition frequency of 20 Hz for 2 seconds. This confirmed that the excimer lamp 1 was lit.
- the present invention is not limited to the embodiment described above.
- the external casing is not limited to the configuration of the above-described embodiment.
- the outer casing 4 of the light emitting device 400 includes a cover portion 408 having a side wall portion 8e that extends downward from the four outer edges of the frame-like portion 8b toward the bottom surface portion 6a. ing.
- the through-hole 8c is formed not in the outer edge part of the frame-shaped part 8b but in the side wall part 8e.
- the screw hole 6d on the case 6 side is formed not on the upper end surface 6c of the side surface portion 6b but on the upper edge portion of the side surface portion 6b.
- the through hole 8c and the screw hole 6d are formed at positions corresponding to each other, and are formed in the horizontal direction.
- the excimer lamp 1 is rectangular, but the shape is not particularly limited. As the shape of the excimer lamp 1 is changed, the structure of the external housing or the support structure is changed. For example, the excimer lamp may have a disk shape.
- the shape of the tubular portion 20 is not limited to the above, and may be appropriately changed.
- the outer peripheral surface 20a may be a polygonal cylindrical surface instead of a cylindrical surface.
- the installation position of the tubular portion 20 is not limited to that described above, and may be appropriately changed.
- the position of the lamp housing 2 in the short direction may be appropriately moved.
- the wall thickness of the tubular portion 20 is not limited to the above, and may be changed as appropriate.
- the wall thickness may be changed depending on the location.
- the direction in which the tubular portion 20 extends is not limited to that described above, and may be slightly inclined, for example.
- the trigger electrode is vertically point-contacted at the lowermost end portion of the tubular portion.
- the contact angle, contact position, and contact mode are not particularly limited, and various modifications are possible.
- the trigger electrode extends so as to be orthogonal to the extending direction of the tubular portion (the central axis CL1), the trigger electrode may extend with an inclination.
- the trigger electrode is in contact with the tangent of the tubular portion at the contact point perpendicularly, but may be in contact with the tangent so as to be inclined.
- the trigger electrode extends upward from the bottom of the groove, but may extend laterally from a side surface or the like.
- the trigger electrode or the trigger electrode extends straight from the upper side of the tubular portion, but a bent electrode or a bent electrode may be used.
- the shape of the groove portion of the lamp support portion is not limited to that of the above-described embodiment, and any shape groove portion may be used.
- the groove portion may not be provided (for example, the upper surface of the lamp support portion itself is set lower than the tubular portion, and the trigger electrode protrudes from the upper surface), and the trigger transformer and the trigger electrode are provided inside the lamp support portion.
- the trigger transformer and the trigger electrode may be arranged at a position independent of the lamp support portion.
- the present invention can be used for a light-emitting device using an excimer lamp.
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Arrangements Of Lighting Devices For Vehicle Interiors, Mounting And Supporting Thereof, Circuits Therefore (AREA)
Abstract
Description
上述の実施形態と同様な構成を有する発光装置において、エキシマランプとして次の構成のものを用いた。すなわち、ランプ筐体2及び管状部20の材質として合成石英ガラスを用い、ランプ筐体のサイズを50mm×500mm×9mmとすると共に壁厚を1.8mmとし、管状部20の長さを20mmとすると共に壁厚を0.75mm(外径6mm、内径4.5mm)に設定したものを採用した。また、内部空間28に放電用ガスとしてキセノンを66.7kPa封入した。また、トリガ電極40として、外径0.7mmのものを用い、先端部41で管状部20と点接触させた。このような発光装置において、図9に示すように点灯電源から背面電極3及び光通過電極30に3kVp-p程度の電圧を印加し、トリガトランス50からトリガ電極40に20kVp-p程度の電圧を20Hzの繰り返し周波数で2秒間印加した。これによって、エキシマランプ1が点灯することが確認された。
Claims (9)
- 内部に放電用ガスが封入され、光出射部を有するランプ筐体と、
前記ランプ筐体の外表面上に設けられた放電電極と、
前記ランプ筐体に形成され、当該ランプ筐体から外側へ向かって突出すると共に延在する管状部と、を備えるエキシマランプと、
前記放電電極へ給電する給電部と、
前記エキシマランプを支持するランプ支持部と、
前記エキシマランプへトリガとなる電圧を印加するトリガ電極と、
前記トリガ電極へ給電するトリガ給電部と、
前記エキシマランプ、前記給電部、前記ランプ支持部、前記トリガ電極、及び前記トリガ給電部を収容する外部筐体と、を備え、
前記トリガ電極は、前記管状部の外表面と点接触する、発光装置。 - 前記トリガ電極は、前記管状部の延在方向と交差する方向に延び、先端部で前記管状部の前記外表面と点接触する、請求項1記載の発光装置。
- 前記管状部の壁厚は、前記ランプ筐体の壁厚より小さい、請求項1又は2記載の発光装置。
- 前記トリガ電極は、前記ランプ支持部側において前記管状部の前記外表面と点接触する、請求項1~3のいずれか一項記載の発光装置。
- 前記ランプ筐体は、一端側で前記ランプ支持部に支持され、
前記管状部は、前記ランプ筐体の前記一端側に形成され、
前記ランプ支持部は、前記管状部を収容する溝部を有する、請求項1~4のいずれか一項記載の発光装置。 - 前記ランプ支持部は、前記溝部の底部に貫通孔を有し、
前記トリガ電極は、前記貫通孔から突出している、請求項5記載の発光装置。 - 前記トリガ電極を支持するトリガ電極支持部を更に備え、
前記トリガ電極支持部は、前記管状部に対して前記トリガ電極を押圧する押圧部材を有する、請求項1~6のいずれか一項記載の発光装置。 - 前記外部筐体は、前記ランプ支持部を固定する底面部と、当該底面部と対向する位置に配置される蓋部と、を備え、
前記蓋部は、
前記底面部と対向すると共に、前記ランプ筐体の外縁部と対向する枠状部と、
当該枠状部に囲まれると共に前記光出射部を露出させる開口部と、を有し、
前記エキシマランプは、前記蓋部の前記枠状部と前記ランプ支持部とで挟まれることによって保持される、請求項1~7のいずれか一項記載の発光装置。 - 前記外部筐体は、前記ランプ支持部を固定する底面部と、当該底面部と対向する位置に配置されるカバー部と、を備え、
前記カバー部は、
前記底面部と対向すると共に、前記ランプ筐体の外縁部と対向する枠状部と、
当該枠状部に囲まれると共に前記光出射部を露出させる開口部と、
前記枠状部の外縁部から前記底面部側へ向かって延びる側壁部と、を有し、
前記エキシマランプは、前記カバー部の前記枠状部と前記ランプ支持部とで挟まれることによって保持される、請求項1~7のいずれか一項記載の発光装置。
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CN201280044715.6A CN103828017B (zh) | 2011-09-13 | 2012-08-13 | 发光装置 |
KR1020137035141A KR101873615B1 (ko) | 2011-09-13 | 2012-08-13 | 발광장치 |
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JP2011199593A JP5898891B2 (ja) | 2011-09-13 | 2011-09-13 | 発光装置 |
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KR (1) | KR101873615B1 (ja) |
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JP2016186924A (ja) * | 2015-03-27 | 2016-10-27 | 株式会社Gsユアサ | 放電ランプ |
US20220392760A1 (en) * | 2021-06-07 | 2022-12-08 | Unilam Co., Ltd. | Light irradiation device |
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CN110797254A (zh) * | 2019-10-30 | 2020-02-14 | 深圳市嘉光科技有限公司 | 一种单面发均匀平行光的长方形准分子灯 |
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- 2012-08-13 WO PCT/JP2012/070638 patent/WO2013038859A1/ja active Application Filing
- 2012-08-13 CN CN201280044715.6A patent/CN103828017B/zh not_active Expired - Fee Related
- 2012-08-13 KR KR1020137035141A patent/KR101873615B1/ko active IP Right Grant
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Publication number | Publication date |
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CN103828017B (zh) | 2016-03-30 |
TWI566270B (zh) | 2017-01-11 |
JP5898891B2 (ja) | 2016-04-06 |
TW201312624A (zh) | 2013-03-16 |
KR101873615B1 (ko) | 2018-07-02 |
JP2013062128A (ja) | 2013-04-04 |
KR20140060469A (ko) | 2014-05-20 |
CN103828017A (zh) | 2014-05-28 |
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