WO2012176991A2 - 직접 냉각 스크루식 진공펌프 - Google Patents

직접 냉각 스크루식 진공펌프 Download PDF

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Publication number
WO2012176991A2
WO2012176991A2 PCT/KR2012/004141 KR2012004141W WO2012176991A2 WO 2012176991 A2 WO2012176991 A2 WO 2012176991A2 KR 2012004141 W KR2012004141 W KR 2012004141W WO 2012176991 A2 WO2012176991 A2 WO 2012176991A2
Authority
WO
WIPO (PCT)
Prior art keywords
rotor
cooling
shaft
vacuum pump
lubricating oil
Prior art date
Application number
PCT/KR2012/004141
Other languages
English (en)
French (fr)
Korean (ko)
Other versions
WO2012176991A3 (ko
Inventor
서인우
Original Assignee
(주)에스백
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)에스백 filed Critical (주)에스백
Priority to CN201280030392.5A priority Critical patent/CN103688059B/zh
Publication of WO2012176991A2 publication Critical patent/WO2012176991A2/ko
Publication of WO2012176991A3 publication Critical patent/WO2012176991A3/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F04C2240/51—Bearings for cantilever assemblies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/60—Shafts
    • F04C2240/603—Shafts with internal channels for fluid distribution, e.g. hollow shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F04C29/0071—Couplings between rotors and input or output shafts acting by interengaging or mating parts, i.e. positive coupling of rotor and shaft

Definitions

  • the present invention relates to a screw-type vacuum pump that directly cools the inside of a rotor of a vacuum pump. More specifically, the cooling water for cooling the inside of the rotor flows through an injection pipe and an discharge pipe formed on a rotating shaft, and thus inside the rotor. It cools the generated heat efficiently, and the lubricating oil is supplied to the bearing through the screw thread formed on the rotor shaft for efficient cooling and lubrication, and the simple structure that the rotor is supported on the rotating fixed shaft and rotates by the bearing inserted in the rotor It relates to a phosphorus vacuum pump.
  • Vacuum pump is a device for increasing the degree of vacuum in the container by sucking and compressing the gas molecules in the sealed container to the atmosphere, there are various methods such as reciprocating, rotary, sealing, diffusion depending on the method of suction compression, the present invention
  • the related screw type is a type of rotary vacuum pump that has a rotor (rotator) attached to the rotating shaft to push the gas while rotating to increase the degree of vacuum.
  • Patent Document 1 is a conventional technique for cooling the rotor proposed in Patent Document 1 (Korean Patent Publication No. 0811360, 2008.03.10.), Wherein the screw 10 is an exhaust side shaft portion 11 and an exhaust side of a hollow body.
  • the non-hollow intake side shaft portion which is connected to the hollow portion of the shaft portion 11 is provided with a multi-stage compression conveying screw portion provided with a cooling hollow portion, a compression conveying screw portion, followed by a suction screw portion and a suction screw portion to determine a suction capacity.
  • the coolant pipe 51 is provided in the exhaust side shaft part 11, and it cools the screw 10 directly.
  • Patent Document 1 is excellent in cooling effect, but the cooling water pipe is installed on the rotating shaft, there is a risk of leakage of the cooling water at the connection between the fixed cooling water injection pipe and the rotating shaft, and the water tank is formed on the discharge side. Has the disadvantage of being complicated and large.
  • Patent Document 2 is a technique for cooling the rotor presented in Patent Document 2 (Korean Patent Publication No. 0517788, 2005.09.30.),
  • the rotating device is composed of a screw rotor (5) and a shaft (6), the shaft (6) ) Is formed hollow and integrally formed with the rotor, and a floating rotor bearing with two bearings 7, 8 spaced apart from each other on the shaft 6 is outside the cavity 31 of the rotor 5,
  • the cooling pipe 33 which penetrates the shaft of the said cylinder supplies the coolant, It is characterized by the above-mentioned.
  • Patent Literature 2 is excellent in cooling effect, like Patent Literature 1, a cooling water pipe is installed on the rotating shaft, so there is a risk of cooling water leakage at the connection portion between the fixed cooling water injection pipe and the rotating shaft. There is a problem that the device is complicated and large.
  • the present invention proposes to solve the problems of the prior art raised above, by installing the inlet and outlet of the cooling water in the rotation fixed shaft together to increase the stability of the pump against cooling water leakage and screw type cooling efficiently as a simple structure It is intended to provide a cooling structure of a vacuum pump.
  • a rotor for producing a vacuum a rotor shaft for rotating the rotor by transmitting the rotation of the motor to the gear and a rotation fixing to support the rotation of the rotor
  • It includes a shaft, the rotor is formed inside the hollow to form a cooling unit and the cooling water injection tube is inserted, the injection pipe for injecting the cooling water and the discharge pipe for discharging the heat exchanged cooling water is fixed to the upper part of the rotating fixed shaft
  • the outer peripheral surface of the rotation fixed shaft is characterized in that for supporting the rotation of the rotor by the inner ring of the bearing inserted into the rotor.
  • the coolant injection pipe and the discharge pipe is formed on the same line in the upper portion of the rotor housing, characterized in that the rotation fixed shaft is fixed to the rotor housing.
  • the rotor cooling housing further comprises a cooling jacket for circulating the cooling water and the intermediate cooling jacket for circulating the cooling water in the connection portion between the rotor and the rotor shaft.
  • a female screw is formed in an internal concave portion of the lower end of the rotor shaft and is fitted into a fixing pin.
  • the lubricant of the lubricating oil cylinder is along the screw thread of the lower end of the rotor shaft. Flows up and communicates with the screw thread to supply lubricating oil through the lubricating oil passage through the lubricating oil passage formed inside the rotor shaft, the lubricant flows along the outer circumference of the rotor shaft and supplies lubricant to the bearings and the rotor shaft gear to cool the frictional heat.
  • a lubricating oil supply device for preventing wear.
  • the cooling structure of the direct cooling vacuum pump according to the present invention has a cooling water injection pipe 131 and the cooling water discharge pipe 132 is fixedly installed together on the rotation fixed shaft 130, and the conventional technology that the cooling water is discharged along the rotating portion In contrast, the cooling water is not leaked by parts such as rotating bearings, so that it can be stably operated, and since it is directly discharged to the discharge pipe, there is no need for a bucket for discharge, so the cooling efficiency is excellent and the size of the pump can be reduced in size and reduced.
  • the direct cooling vacuum pump according to the present invention is easy to manufacture because the rotor 110 is supported by the rotating fixed shaft 130 on the inside by the bearing 141 and is simple to rotate.
  • the lubricating oil supply device of the direct cooling vacuum pump is automatically supplied to the parts that are difficult to supply the lubricating oil by using the rotational force of the rotor shaft, thereby extending the service life of the vacuum pump and stably maintaining the pump.
  • FIG. 1 is a cross-sectional view of a direct cooling vacuum pump according to the prior art.
  • FIG. 2 is a cross-sectional view of a direct cooling vacuum pump according to the prior art.
  • FIG 3 is a cross-sectional view of a direct cooling vacuum pump according to an embodiment of the present invention.
  • FIG. 4 is an enlarged cross-sectional view of the cooling structure of FIG. 3.
  • FIG. 5 is an enlarged cross-sectional view of the lubricant supply device of FIG. 3.
  • FIG. 3 is a cross-sectional view of a direct cooling screw type vacuum pump according to the present invention, a pair of rotors 110 for producing a vacuum, the rotor shaft 120 to rotate the rotor 110 by connecting the rotation of the motor with gears ) And a rotation fixing shaft 130 supporting the rotation of the rotor 110.
  • the rotor 110 is formed in a hollow to form a cooling unit, and a cooling water injection tube 131 is inserted and installed in the upper portion of the rotation fixed shaft 130.
  • Discharge pipe 132 is discharged is formed in the same, the outer circumferential surface of the rotation fixing shaft 130 supports the rotation of the rotor 110 by the inner ring of the bearing 141 inserted into the rotor 110.
  • Bearing seals 142 are formed above and below the bearing 141 to prevent leakage of lubricant and cooling water.
  • the motor shaft gear 151 is rotated by a motor generating a rotational force and transmitted to the driving shaft connecting gear 152.
  • the motor rotational force is transmitted to the rotor shaft 120 while the rotor shaft gear 153, which is a driven gear engaged with the drive shaft connecting gear 152, is rotated, and the rotor 110 connected to the rotor shaft 120 rotates so that the inlet (not shown) is rotated.
  • the gas is compressed into a discharge port (not shown) to create a vacuum.
  • Compression heat and frictional heat generated in the rotor 110 during operation of the vacuum pump is installed in the rotor by the cooling unit 133 to circulate and cool the cooling water in addition to the housing cooling jacket 172 in the rotor housing 170 by installing The cooling water is circulated to increase the cooling efficiency.
  • an intermediate cooling jacket for receiving cooling water at an intermediate connection between the rotor 110 and the rotor shaft 120 that the cooling range of the cooling unit 133 in the rotor and the cooling jacket 172 in the housing 170 is not within the cooling range. 171 may be formed, and cooling water may be circulated and cooled.
  • the intermediate cooling jacket 171 may be formed of a casting, or the casing may be manufactured and assembled separately.
  • FIG. 4 is an enlarged view of a portion A (cooling structure) of FIG. 3 and shows a characteristic configuration of the present invention.
  • the cooling water injection pipe 131 and the cooling water discharge pipe 132 are fixedly installed together on the rotation fixed shaft 130, unlike the conventional technology in which the cooling water is discharged along the rotating part.
  • the injection pipe 131 and the discharge pipe 132 are formed in the same line on the outside of the rotor housing 170, and the rotating fixed shaft 130 is fixed to the rotor housing 170, so that the cooling water rotates the bearing 141 It is possible to operate stably because it is not leaked by parts such as), and since it is directly discharged to the discharge pipe 132, it does not need a bucket for discharge, thereby reducing the size of the pump and miniaturization.
  • Still another feature of the present invention is that the rotor 110 is supported by the rotating fixed shaft 130 on the inside by the bearing 141, so the structure is simple.
  • the rotating shaft of the conventional pump is supported by the bearing to the outer housing is complicated in structure.
  • Another cooling method according to the present invention is to automatically supply lubricating oil using the rotation of the rotor shaft 120 to effectively cool friction members such as bearings, gears, and seals. Since the friction member is installed inside the housing, it is very difficult to supply lubricant directly.
  • FIG. 5 is an enlarged view of a portion B (lubricating oil supply device) of FIG. 3, and includes a female screw 163 formed at an inner concave portion of the lower end of the rotor shaft 120 and assembled with a fixing pin 162.
  • the rotor shaft 120 is fixed in structure. When the rotor shaft 120 rotates, the lubricating oil of the lubricating oil barrel 161 flows in and rises along the thread 163 of the lower end of the rotor shaft located on the side wall surface of the fixing pin.
  • lubricating oil When lubricating oil is supplied through the lubricating oil passage 164 formed in the rotor shaft 120 in communication with the 163 through the lubricating oil spray 165, the lubricating oil flows along the outer circumferential surface of the rotor shaft and the bearing 141 and the rotor shaft. Lubricant is supplied to the gear 153 or the like to cool the frictional heat of the friction member and reduce wear. Impurity removal nets 167 may be additionally installed at the lower end of the rotor shaft 120 to prevent the inflow of impurities.
  • the lubricating oil supply device can maintain the pump in a stable manner by automatically supplying a rotational force to a portion where it is difficult to directly supply lubricating oil.
  • the present invention can be applied to a direct cooling vacuum pump.
  • the present invention can be applied to a direct cooling vacuum pump that is simple in structure, easy to manufacture and excellent in cooling efficiency, and can be miniaturized by reducing the size of the pump.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
PCT/KR2012/004141 2011-06-20 2012-05-24 직접 냉각 스크루식 진공펌프 WO2012176991A2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201280030392.5A CN103688059B (zh) 2011-06-20 2012-05-24 直接冷却螺旋式真空泵

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2011-0059472 2011-06-20
KR1020110059472A KR101064152B1 (ko) 2011-06-20 2011-06-20 직접 냉각 스크루식 진공펌프

Publications (2)

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WO2012176991A2 true WO2012176991A2 (ko) 2012-12-27
WO2012176991A3 WO2012176991A3 (ko) 2013-02-14

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PCT/KR2012/004141 WO2012176991A2 (ko) 2011-06-20 2012-05-24 직접 냉각 스크루식 진공펌프

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Country Link
KR (1) KR101064152B1 (zh)
CN (1) CN103688059B (zh)
WO (1) WO2012176991A2 (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3018349A3 (en) * 2014-10-31 2016-07-27 Ingersoll-Rand Company Rotary screw compressor
WO2018151319A1 (ja) * 2017-02-20 2018-08-23 ダイキン工業株式会社 スクリュー圧縮機
CN115324894A (zh) * 2022-09-09 2022-11-11 山东凯恩真空技术有限公司 一种耐腐蚀结构螺杆真空泵

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101240019B1 (ko) 2012-12-05 2013-03-06 임정문 스크류 펌프
CN106762668B (zh) * 2017-03-07 2018-06-22 北京艾岗科技有限公司 一种立式真空泵自循环润滑冷却系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01237388A (ja) * 1988-03-18 1989-09-21 Hitachi Ltd 無給油式回転圧縮機のロータ冷却装置
JPH05149287A (ja) * 1991-11-26 1993-06-15 Hitachi Ltd パツケージ形スクリユー圧縮機
JP2003518588A (ja) * 1999-12-27 2003-06-10 ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング 冷却式のスクリュ型真空ポンプ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19745616A1 (de) * 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Gekühlte Schraubenvakuumpumpe
CN1399076A (zh) * 2001-07-27 2003-02-26 大晃机械工业株式会社 真空泵

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01237388A (ja) * 1988-03-18 1989-09-21 Hitachi Ltd 無給油式回転圧縮機のロータ冷却装置
JPH05149287A (ja) * 1991-11-26 1993-06-15 Hitachi Ltd パツケージ形スクリユー圧縮機
JP2003518588A (ja) * 1999-12-27 2003-06-10 ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング 冷却式のスクリュ型真空ポンプ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3018349A3 (en) * 2014-10-31 2016-07-27 Ingersoll-Rand Company Rotary screw compressor
US11359632B2 (en) 2014-10-31 2022-06-14 Ingersoll-Rand Industrial U.S., Inc. Rotary screw compressor rotor having work extraction mechanism
WO2018151319A1 (ja) * 2017-02-20 2018-08-23 ダイキン工業株式会社 スクリュー圧縮機
CN115324894A (zh) * 2022-09-09 2022-11-11 山东凯恩真空技术有限公司 一种耐腐蚀结构螺杆真空泵

Also Published As

Publication number Publication date
CN103688059A (zh) 2014-03-26
CN103688059B (zh) 2016-01-27
KR101064152B1 (ko) 2011-09-15
WO2012176991A3 (ko) 2013-02-14

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