WO2012098837A1 - Inspection socket - Google Patents

Inspection socket Download PDF

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Publication number
WO2012098837A1
WO2012098837A1 PCT/JP2012/000138 JP2012000138W WO2012098837A1 WO 2012098837 A1 WO2012098837 A1 WO 2012098837A1 JP 2012000138 W JP2012000138 W JP 2012000138W WO 2012098837 A1 WO2012098837 A1 WO 2012098837A1
Authority
WO
WIPO (PCT)
Prior art keywords
contact
contact terminal
solder ball
inspection socket
land
Prior art date
Application number
PCT/JP2012/000138
Other languages
French (fr)
Japanese (ja)
Inventor
智昭 足立
古澤 昌之
Original Assignee
ユニテクノ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ユニテクノ株式会社 filed Critical ユニテクノ株式会社
Priority to JP2012553600A priority Critical patent/JP5865846B2/en
Publication of WO2012098837A1 publication Critical patent/WO2012098837A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716Elastic
    • G01R1/06722Spring-loaded
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733Geometry aspects
    • G01R1/06738Geometry aspects related to tip portion
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02Contact members
    • H01R13/22Contacts for co-operating by abutting
    • H01R13/24Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2407Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means

Definitions

  • the present invention relates to, for example, a test socket used when testing the electrical characteristics of a semiconductor integrated circuit.
  • IC semiconductor integrated circuits
  • functional tests and burn-in tests are performed to confirm that the IC has a predetermined performance before mounting on a printed circuit board or the like. It is common to do.
  • connection terminal arrangement of the IC differs depending on the type of IC, so between the IC and the IC tester It is common to arrange test sockets and printed circuit boards on which the IC is mounted.
  • the conventional inspection socket has a configuration as shown in FIG. 6, for example, as disclosed in Patent Document 1. That is, the conventional inspection socket 100 has a housing 101, an IC mounting portion 102, and a contact probe 110. In the IC mounting unit 102, the resin package 121 of the IC 120 is disposed.
  • the contact probe 110 has a contact portion 111 contacting the solder ball 122 of the IC 120, a contact portion 112 contacting the land 131 of the printed circuit board 130, and a spring 113 pressing the contact portions 111 and 112 against each other.
  • the inspection socket 100 can electrically connect the solder ball 122 to an IC tester (not shown) via the printed circuit board 130 in a state where a load is applied to the resin package 121.
  • test socket has been proposed that is provided with a contact probe configured to sandwich a solder ball and can reduce the load applied to the IC (see, for example, Patent Document 2).
  • the inspection socket described in Patent Document 2 has a configuration as shown in FIG. 7 (a). That is, the inspection socket 200 includes a housing 201, an IC mounting portion 202, a slider 203, a terminal alignment plate 204, and a contact probe 210.
  • the slider 203 has a pressing bar 205.
  • the contact probe 210 has a pair of contact portions 211 and 212 contacting the solder balls 221 of the IC 220 and a contact portion 213 soldered to the land 231 of the printed circuit board 230.
  • FIG. 7B and 7C are enlarged views in the vicinity of the solder ball 221, and FIG. 7B shows a state when the IC 220 is mounted on the inspection socket 200, and FIG. 7C is a slider. It shows the state after the IC mounting portion 202 and the pressing bar 205 move with the movement of 203.
  • the inspection socket 200 has a configuration in which the contact portions 211 and 212 of the contact probe 210 sandwich the solder ball 221 by the movement of the slider 203, the spring 113 described in Patent Document 1 becomes unnecessary and the load applied to the IC 220 Can be reduced.
  • one end of the contact probe is soldered to the printed circuit board, so, for example, the wiring inside the IC is the same even if the arrangement configuration of the solder ball is the same. If not identical, it is necessary to manufacture individual inspection sockets for each IC or to melt the solder of the printed circuit board and replace it with another printed circuit board, making it difficult to cope with a wide variety of ICs. There was a problem.
  • the present invention has been made to solve the conventional problems, and it is an object of the present invention to provide a test socket capable of supporting a wide variety of ICs while reducing the load applied to the ICs.
  • the inspection socket according to the present invention is an inspection socket for electrically connecting a solder ball provided on an object to be inspected and a land provided on a printed circuit board, the contact terminal contacting the side surface of the solder ball, and A contact terminal holding portion for holding a contact terminal, a land contact terminal in contact with the land, and one end in contact with the contact terminal holding portion and the other end in contact with the land contact terminal
  • An elastic body that expands and contracts between each other, and a switching unit that switches between a contact state in which the contact terminal contacts the side surface of the solder ball and a separation state in which the contact terminal separates from the side surface of the solder ball doing.
  • the inspection socket of the present invention is provided with switching means for switching between the contact state in which the contact terminal contacts the side surface of the solder ball and the separation state in which the contact terminal separates from the side surface of the solder ball. It can be reduced.
  • the inspection socket of the present invention is provided with land contact terminals in contact with lands provided on the surface of the printed circuit board, so that the printed circuit board on which the desired electric circuit is formed is arranged.
  • the land contact terminals By bringing the land contact terminals into contact with the lands, it is possible to cope with various ICs.
  • the inspection socket in the present embodiment can reduce the load applied to the IC and can cope with various ICs.
  • the inspection socket of the present invention further includes a housing that accommodates the contact terminal holding portion, the land contact terminal, and the elastic body,
  • the switching means has a through hole for housing the tip of the solder ball and the contact terminal inside, is slidably disposed on the upper surface of the housing, and is an inspection object mounting portion on which the inspection object is mounted. It has a certain configuration.
  • the inspection socket of the present invention can cope with various ICs while reducing the load applied to the IC by switching between the contact state and the separation state by the switching means for mounting the object to be inspected.
  • a casing for accommodating the contact terminal holding portion, the land contact terminal, and the elastic body, and a through hole for receiving the solder ball and the tip of the contact terminal therein are bored.
  • the inspection socket of the present invention can cope with various ICs while reducing the load applied to the IC by switching between the contact state and the separation state.
  • the inspection object mounting portion has a configuration having an engagement portion at the upper end portion of the through hole and engaged with the root portion of the solder ball in the contact state.
  • the inspection socket of the present invention can reliably contact the contact terminal with the solder ball and prevent the IC from rising in the contact state.
  • the inspection socket of the present invention is configured such that the contact terminal has a hook-like tip that contacts the side surface of the solder ball.
  • the inspection socket of the present invention can reliably contact the contact terminal with the solder ball and prevent the IC from rising in the contact state.
  • the present invention can provide a test socket that has the effect of reducing the load applied to the IC and being compatible with a wide variety of ICs.
  • the inspection socket 1 in the present embodiment includes a contact probe 10, a housing 21, and an IC mounting unit 30.
  • the contact probe 10 is made of a metal material, and includes a contact terminal 11, a contact terminal holder 12, a land contact terminal 13 and a spring 14.
  • the root portion of the contact terminal 11 is inserted into a hole formed in the contact terminal holding portion 12 and is caulked and fixed to the contact terminal holding portion 12 by a conductive adhesive or soldering. Further, as shown in the enlarged view, the contact terminal 11 has a tip 11a formed in a bowl shape.
  • the shape of the contact terminal 11 is made into square pole, it may be cylindrical shape, for example. Further, the tip of the contact terminal 11 may be formed in a straight line instead of a bowl shape.
  • both may be integral structure.
  • the land contact terminals 13 are in contact with lands 51 provided on the printed circuit board 50.
  • One end of the spring 14 is in contact with the contact terminal holding portion 12 and the other end is in contact with the land contact terminal 13 so that the spring 14 expands and contracts between one end and the other end.
  • the spring 14 constitutes an elastic body according to the present invention.
  • the housing 21 includes a slide surface 21 b on which the IC mounting portion 30 slides, and a through hole 21 a for holding the contact probe 10 is bored.
  • a holding plate 22 is attached to the bottom of the housing 21 to hold the step of the land contact terminal 13 at the periphery of the through hole.
  • the holding plate 22 is fixed to the housing 21 by a screw 23.
  • IC mounting portion 30 is configured to be slidable in the direction shown in the figure, has IC mounting surface 31 on which IC 40 is mounted, and through holes 32 for receiving solder balls 41 of IC 40 and tip portions of contact terminals 11 are perforated. It is done.
  • the IC mounting unit 30 constitutes switching means according to the present invention.
  • the through holes 32 have a shape (deep grinding shape) in which two large and small circular through holes are connected, and a through hole 32 a covering the periphery of the side surface of the solder ball 41; And a through hole 32 b covering the tip of the contact terminal 11.
  • the IC 40 After being mounted on the IC mounting surface 31 of the IC mounting unit 30, the IC 40 is configured to be fixed by a fixing unit (not shown).
  • the state shown in FIG. 2A is obtained. That is, the solder balls 41 of the IC 40 are accommodated in the through holes 32a, the contact terminals 11 are upright in the through holes 32b, and the solder balls 41 and the contact terminals 11 are in a separated state.
  • the land contact terminal 13 is in contact with the land 51 of the printed circuit board 50 in a state of being pressed by the spring 14.
  • the solder ball 41 contacts the inner wall of the through hole 32a and is pushed to the contact terminal 11 side, as shown in FIG. It will be in the contact state which contacts the terminal 11.
  • the IC mounting unit 30 in the contact state is moved in the left direction, it returns to the separated state.
  • FIG. 2C is an enlarged view of the vicinity of the solder ball 41, in which the contact terminal 11 in a state before contacting the side surface of the solder ball 41 is shown by a broken line and in a state of contacting the side surface of the solder ball 41.
  • the contact terminal 11 is shown by a solid line.
  • the IC mounting unit 30 can make the side surface of the solder ball 41 reliably contact the contact terminal 11 by moving in the right direction.
  • the inspection socket 1 electrically connects the solder balls 41 and the lands 51.
  • FIG. 3 is an enlarged view of the vicinity of the solder ball 41 as in the case of FIG. 2C described above, and the IC mounting portion 30 is in contact with the root portion side of the solder ball 41 (IC mounting surface 31 side). ) On the inner wall of the through hole 32a.
  • the inspection socket 1 in the present embodiment since the IC mounting portion 30 that brings the contact terminals 11 into contact with the side surfaces of the solder balls 41 is provided, the load applied to the IC can be reduced.
  • the inspection socket 1 in the present embodiment since the land contact terminal 13 in contact with the land 51 provided on the surface of the printed circuit board 50 is provided, the printed circuit board on which the desired electric circuit is formed is disposed. Then, by bringing the land contact terminals 13 into contact with the lands of the printed circuit board, it can be made compatible with a wide variety of ICs.
  • the inspection socket 1 in the present embodiment can reduce the load applied to the IC and can cope with various ICs.
  • the inspection socket 1 in the present embodiment can also achieve the following effects as compared with the conventional inspection socket 200 shown in FIG.
  • the conventional inspection socket 200 if the contact of the contact probe 210 is deteriorated due to use, the contact probe 210 must be discarded together with the printed circuit board 230 because the contact probe 210 can not be replaced.
  • the inspection socket 1 in the present embodiment since the contact probe 10 can be easily replaced, it is not necessary to discard the printed circuit board 50 even when the contact of the contact probe 10 is deteriorated due to use.
  • the inspection socket 2 in the present embodiment includes a contact probe 10, a housing 21, an IC mounting portion 60, and a slider 70.
  • symbol is attached
  • the IC mounting portion 60 includes an IC mounting surface 61 for mounting the IC 40, a through hole 62 for housing the solder ball 41 of the IC 40 and the tip of the contact terminal 11, and a through hole 63 for penetrating the slider 70.
  • the IC mounting unit 60 is fixed to the housing 21 by screws.
  • the through hole 62 has a shape (deep grinding shape) in which two large and small circular through holes are connected, and a through hole 62a covering the periphery of the side surface of the solder ball 41; And a through hole 62 b covering the tip of the contact terminal 11.
  • the IC 40 After being mounted on the IC mounting surface 61, the IC 40 is configured to be fixed by a fixing portion (not shown).
  • the slider 70 is configured to be slidable in the illustrated direction, and includes a contact terminal through hole 71 through which the tip of the contact terminal 11 passes.
  • the slider 70 constitutes switching means according to the present invention.
  • the slider 70 is slid in the right direction in advance, and the contact terminal 11 is pressed by the inner wall of the contact terminal through hole 71 so that the contact terminal 11 is warped.
  • the state shown in FIG. 6A is obtained. That is, the solder ball 41 of the IC 40 is accommodated in the through hole 62a, and the contact terminal 11 is in a separated state separated from the solder ball 41 in the through hole 62b.
  • the contact terminal 11 is released from the pressing state by the inner wall of the contact terminal through hole 71 and contacts the solder ball 41, as shown in FIG. It will be in a contact state.
  • the slider 70 is configured to switch between the contact state in which the contact terminal 11 contacts the side surface of the solder ball 41 and the separation state in which the contact terminal 11 is separated from the solder ball 41.
  • the load applied to the IC can be reduced.
  • the inspection socket 2 in the present embodiment since the land contact terminal 13 in contact with the land 51 provided on the surface of the printed circuit board 50 is provided, the printed circuit board on which the desired electric circuit is formed is disposed. By doing this, it is possible to cope with a wide variety of ICs.
  • the inspection socket 2 in the present embodiment can reduce the load applied to the IC and can cope with various ICs.
  • the slider 70 is in the separated state when the contact terminal 11 is pressed and in the contact state when the contact terminal 11 is opened, but the present invention is not limited to this.
  • the slider 70 may be in the contact state when the contact terminal 11 is pressed, and may be in the separation state when the contact terminal 11 is opened.
  • the test socket according to the present invention has the effect of reducing the load applied to the IC and being compatible with a wide variety of ICs, and is used when testing the electrical characteristics of a semiconductor integrated circuit. Is useful as an inspection socket and the like.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Connecting Device With Holders (AREA)

Abstract

[Problem] To provide an inspection socket, which reduces load applied to ICs, and which can be applied to various kinds of ICs. [Solution] An inspection socket (1) is provided with a contact probe (10), a housing (21), and an IC mounting section (30), and the contact probe (10) is provided with a contact terminal (11) in contact with the side surface of a solder ball (41), a contact terminal holding section (12), which holds the contact terminal (11), and a land contact terminal (13) in contact with a land (51) that is provided on a printed substrate (50). The IC mounting section (30) is provided with the IC mounting surface (31) having an IC (40) mounted thereon, and has formed therein a through hole (32) that houses the solder ball (41) of the IC (40) and the leading edge portion of the contact terminal (11), and the IC mounting section (30) has a configuration of performing switching by moving on the housing (21), said switching being performed between a contact state wherein the contact terminal (11) is in contact with the side surface of the solder ball (41), and a separated state wherein the contact terminal (11) is separated from the side surface of the solder ball (41).

Description

検査ソケットInspection socket
 本発明は、例えば、半導体集積回路の電気的特性を検査する際に用いられる検査ソケットに関する。 The present invention relates to, for example, a test socket used when testing the electrical characteristics of a semiconductor integrated circuit.
 現代では半導体集積回路(以下ICと記す)は種々の産業分野で広く適用されているが、プリント基板等に実装する前にICが所定の性能を有することを確認するために機能試験およびバーンイン試験を行うことが一般的である。 At present, semiconductor integrated circuits (hereinafter referred to as IC) are widely applied in various industrial fields, but functional tests and burn-in tests are performed to confirm that the IC has a predetermined performance before mounting on a printed circuit board or the like. It is common to do.
 機能試験およびバーンイン試験を行うためにはICをICテスタに電気的に接続することが必要となるが、ICの接続端子配列はICの型式により相違するため、ICとICテスタとの間にはICを装着する検査ソケットおよびプリント基板を配置することが普通である。 Although it is necessary to electrically connect the IC to the IC tester in order to perform the functional test and the burn-in test, the connection terminal arrangement of the IC differs depending on the type of IC, so between the IC and the IC tester It is common to arrange test sockets and printed circuit boards on which the IC is mounted.
 従来の検査ソケットは、例えば、特許文献1に開示されているように、図6に示すような構成を有する。すなわち、従来の検査ソケット100は、筐体101、IC搭載部102、コンタクトプローブ110を有する。IC搭載部102には、IC120の樹脂パッケージ121が配置される。コンタクトプローブ110は、IC120の半田ボール122に接触する接触部111、プリント基板130のランド131に接触する接触部112、接触部111と112とを互いに押圧するばね113を有する。この構成により、検査ソケット100は、樹脂パッケージ121に荷重が加えられた状態で、プリント基板130を介し、半田ボール122をICテスタ(図示省略)に電気的に接続することができる。 The conventional inspection socket has a configuration as shown in FIG. 6, for example, as disclosed in Patent Document 1. That is, the conventional inspection socket 100 has a housing 101, an IC mounting portion 102, and a contact probe 110. In the IC mounting unit 102, the resin package 121 of the IC 120 is disposed. The contact probe 110 has a contact portion 111 contacting the solder ball 122 of the IC 120, a contact portion 112 contacting the land 131 of the printed circuit board 130, and a spring 113 pressing the contact portions 111 and 112 against each other. With this configuration, the inspection socket 100 can electrically connect the solder ball 122 to an IC tester (not shown) via the printed circuit board 130 in a state where a load is applied to the resin package 121.
 ところで、近年では、検査対象のICも多様化され、樹脂パッケージが薄型化されたICや、ベアチップのまま実装されたICも登場している。この種のICは、衝撃に非常に弱くダメージを受け易いことから、従来の樹脂パッケージのものと比べて小さな荷重で押圧することが求められている。またパッケージ上面に各種チップが実装される場合など、押さえられる部分が限定されてしまう。 By the way, in recent years, ICs to be inspected have been diversified, and ICs in which resin packages have been thinned and ICs in which bare chips have been mounted have appeared. Since this type of IC is very weak in impact and susceptible to damage, it is required to press with a smaller load than that of the conventional resin package. In addition, when various chips are mounted on the upper surface of the package, the portion to be pressed is limited.
 しかしながら、特許文献1記載のものでは、コンタクトプローブのばねの反発力によって電気的接続を確保する構成となっているので、ICの荷重を低減することが困難であった。具体的には、特許文献1記載のものでは、例えば、半田ボール1個当たりの荷重を30グラムとすると、1000個の半田ボールが配列されたICでは総荷重が30キログラムとなって近年のICの検査に用いることは望ましくなかった。 However, in the configuration described in Patent Document 1, it is difficult to reduce the load of the IC because the electrical connection is secured by the repulsive force of the spring of the contact probe. Specifically, in the case described in Patent Document 1, for example, assuming that a load per solder ball is 30 grams, in an IC in which 1000 solder balls are arrayed, the total load is 30 kilograms, and the recent IC It was not desirable to use it for the examination of
 そこで、半田ボールを挟み込む構成のコンタクトプローブを備え、ICに加える荷重を低減可能な検査ソケットが提案されている(例えば、特許文献2参照)。 Therefore, a test socket has been proposed that is provided with a contact probe configured to sandwich a solder ball and can reduce the load applied to the IC (see, for example, Patent Document 2).
 特許文献2記載の検査ソケットは、図7(a)に示すような構成を有する。すなわち、検査ソケット200は、筐体201、IC搭載部202、スライダ203、端子整列板204、コンタクトプローブ210を有する。スライダ203は、押圧バー205を有する。コンタクトプローブ210は、IC220の半田ボール221に接触する一対の接触部211および212、プリント基板230のランド231に半田付けされる接触部213を有する。 The inspection socket described in Patent Document 2 has a configuration as shown in FIG. 7 (a). That is, the inspection socket 200 includes a housing 201, an IC mounting portion 202, a slider 203, a terminal alignment plate 204, and a contact probe 210. The slider 203 has a pressing bar 205. The contact probe 210 has a pair of contact portions 211 and 212 contacting the solder balls 221 of the IC 220 and a contact portion 213 soldered to the land 231 of the printed circuit board 230.
 図7(b)および(c)は、半田ボール221近傍の拡大図であって、図7(b)は検査ソケット200にIC220が装着されたときの状態を示し、図7(c)はスライダ203の移動とともにIC搭載部202および押圧バー205が移動した後の状態を示している。図示のように、検査ソケット200は、スライダ203の移動によってコンタクトプローブ210の接触部211および212が半田ボール221を挟み込む構成を有するので、特許文献1記載のばね113が不要となり、IC220に加える荷重を低減することができる。 7B and 7C are enlarged views in the vicinity of the solder ball 221, and FIG. 7B shows a state when the IC 220 is mounted on the inspection socket 200, and FIG. 7C is a slider. It shows the state after the IC mounting portion 202 and the pressing bar 205 move with the movement of 203. As illustrated, since the inspection socket 200 has a configuration in which the contact portions 211 and 212 of the contact probe 210 sandwich the solder ball 221 by the movement of the slider 203, the spring 113 described in Patent Document 1 becomes unnecessary and the load applied to the IC 220 Can be reduced.
特開2008-39456号公報JP 2008-39456A 特開2008-77988号公報JP 2008-77988 A
 しかしながら、特許文献2記載の検査ソケットでは、コンタクトプローブの一端がプリント基板に半田付けされる構成となっているので、例えば、半田ボールの配置構成が同一のICであってもIC内部の配線が同一でない場合は、ICごとに個別の検査ソケットを製作するか、プリント基板の半田を溶かして別のプリント基板と交換するかしなければならず、多種多様なICには対応が困難であるという課題があった。 However, in the inspection socket described in Patent Document 2, one end of the contact probe is soldered to the printed circuit board, so, for example, the wiring inside the IC is the same even if the arrangement configuration of the solder ball is the same. If not identical, it is necessary to manufacture individual inspection sockets for each IC or to melt the solder of the printed circuit board and replace it with another printed circuit board, making it difficult to cope with a wide variety of ICs. There was a problem.
 本発明は、従来の課題を解決するためになされたものであり、ICに加える荷重を低減するとともに多種多様なICに対応可能な検査ソケットを提供することを目的とする。 The present invention has been made to solve the conventional problems, and it is an object of the present invention to provide a test socket capable of supporting a wide variety of ICs while reducing the load applied to the ICs.
 本発明の検査ソケットは、被検査体に設けられた半田ボールとプリント基板に設けられたランドとを電気的に接続する検査ソケットであって、前記半田ボールの側面に接触する接触端子と、前記接触端子を保持する接触端子保持部と、前記ランドに接触するランド接触端子と、一端が前記接触端子保持部に接触し他端が前記ランド接触端子に接触して前記一端と前記他端との間で伸縮する弾性体と、前記接触端子が前記半田ボールの側面に接触する接触状態と前記接触端子が前記半田ボールの側面から離隔する離隔状態とを切り替える切替手段と、を備えた構成を有している。 The inspection socket according to the present invention is an inspection socket for electrically connecting a solder ball provided on an object to be inspected and a land provided on a printed circuit board, the contact terminal contacting the side surface of the solder ball, and A contact terminal holding portion for holding a contact terminal, a land contact terminal in contact with the land, and one end in contact with the contact terminal holding portion and the other end in contact with the land contact terminal An elastic body that expands and contracts between each other, and a switching unit that switches between a contact state in which the contact terminal contacts the side surface of the solder ball and a separation state in which the contact terminal separates from the side surface of the solder ball doing.
 この構成により、本発明の検査ソケットは、接触端子が半田ボールの側面に接触する接触状態と接触端子が半田ボールの側面から離隔する離隔状態とを切り替える切替手段を備えるので、ICに加える荷重を低減することができる。 With this configuration, the inspection socket of the present invention is provided with switching means for switching between the contact state in which the contact terminal contacts the side surface of the solder ball and the separation state in which the contact terminal separates from the side surface of the solder ball. It can be reduced.
 また、この構成により、本発明の検査ソケットは、プリント基板の表面に設けられたランドに接触するランド接触端子を備えるので、所望の電気回路が形成されたプリント基板を配置して、そのプリント基板のランドにランド接触端子を接触させることにより、多種多様なICに対応させることができる。 Further, according to this configuration, the inspection socket of the present invention is provided with land contact terminals in contact with lands provided on the surface of the printed circuit board, so that the printed circuit board on which the desired electric circuit is formed is arranged. By bringing the land contact terminals into contact with the lands, it is possible to cope with various ICs.
 したがって、本実施形態における検査ソケットは、ICに加える荷重を低減するとともに多種多様なICに対応することができる。 Therefore, the inspection socket in the present embodiment can reduce the load applied to the IC and can cope with various ICs.
 また、本発明の検査ソケットは、前記接触端子保持部、前記ランド接触端子、および前記弾性体を収容する筐体をさらに備え、
 前記切替手段は、前記半田ボールおよび前記接触端子の先端部を内部に収納する貫通孔が穿孔され、前記筐体上面に滑動可能に配置され、前記被検査体を搭載する被検査体搭載部である構成を有している。
In addition, the inspection socket of the present invention further includes a housing that accommodates the contact terminal holding portion, the land contact terminal, and the elastic body,
The switching means has a through hole for housing the tip of the solder ball and the contact terminal inside, is slidably disposed on the upper surface of the housing, and is an inspection object mounting portion on which the inspection object is mounted. It has a certain configuration.
 この構成により、本発明の検査ソケットは、被検査体を搭載する切替手段が接触状態と離隔状態とを切り替えることにより、ICに加える荷重を低減するとともに多種多様なICに対応することができる。 With this configuration, the inspection socket of the present invention can cope with various ICs while reducing the load applied to the IC by switching between the contact state and the separation state by the switching means for mounting the object to be inspected.
 さらに、本発明の検査ソケットは、前記接触端子保持部、前記ランド接触端子、および前記弾性体を収容する筐体と、前記半田ボールおよび前記接触端子の先端部を内部に収納する貫通孔が穿孔され、前記筐体上面に固定され、前記被検査体を搭載する被検査体搭載部と、をさらに備え、前記切替手段は、前記被検査体搭載部と前記筐体との間に滑動自在に配置され、前記接触端子が貫通する接触端子貫通孔が穿孔されたスライダである構成を有している。 Furthermore, in the inspection socket of the present invention, a casing for accommodating the contact terminal holding portion, the land contact terminal, and the elastic body, and a through hole for receiving the solder ball and the tip of the contact terminal therein are bored. A test object mounting portion fixed to the upper surface of the housing and carrying the test object, and the switching means is slidably movable between the test object mounting portion and the housing It has a structure which is arrange | positioned and is a slider by which the contact terminal through-hole which the said contact terminal penetrates was pierced.
 この構成により、本発明の検査ソケットは、切替手段が、接触状態と離隔状態とを切り替えることにより、ICに加える荷重を低減するとともに多種多様なICに対応することができる。 With this configuration, the inspection socket of the present invention can cope with various ICs while reducing the load applied to the IC by switching between the contact state and the separation state.
 さらに、本発明の検査ソケットは、前記被検査体搭載部は、前記貫通孔の上端部に前記接触状態において前記半田ボールの根元部と係合する係合部を有する構成を有している。 Further, in the inspection socket of the present invention, the inspection object mounting portion has a configuration having an engagement portion at the upper end portion of the through hole and engaged with the root portion of the solder ball in the contact state.
 この構成により、本発明の検査ソケットは、接触端子を半田ボールに確実に接触させるとともに、接触状態におけるICの浮き上がりを防止することができる。 According to this configuration, the inspection socket of the present invention can reliably contact the contact terminal with the solder ball and prevent the IC from rising in the contact state.
 さらに、本発明の検査ソケットは、前記接触端子が、前記半田ボールの側面に接触する鉤状の先端を有する構成を有している。 Furthermore, the inspection socket of the present invention is configured such that the contact terminal has a hook-like tip that contacts the side surface of the solder ball.
 この構成により、本発明の検査ソケットは、接触端子を半田ボールに確実に接触させるとともに、接触状態におけるICの浮き上がりを防止することができる。 According to this configuration, the inspection socket of the present invention can reliably contact the contact terminal with the solder ball and prevent the IC from rising in the contact state.
 本発明は、ICに加える荷重を低減するとともに多種多様なICに対応することができるという効果を有する検査ソケットを提供することができるものである。 The present invention can provide a test socket that has the effect of reducing the load applied to the IC and being compatible with a wide variety of ICs.
本発明に係る検査ソケットの第1実施形態における構成断面図である。It is a structure sectional view in a 1st embodiment of the inspection socket concerning the present invention. 本発明に係る検査ソケットの第1実施形態における動作説明の断面図である。It is a sectional view of the operation explanation in a 1st embodiment of the inspection socket concerning the present invention. 本発明に係る検査ソケットの第1実施形態におけるIC搭載部の他の態様の構成断面図である。It is a structure sectional view of other modes of IC mounting part in a 1st embodiment of the inspection socket concerning the present invention. 本発明に係る検査ソケットの第2実施形態における構成断面図である。It is a structure sectional view in a 2nd embodiment of the inspection socket concerning the present invention. 本発明に係る検査ソケットの第2実施形態における動作説明の断面図である。It is sectional drawing of the operation | movement description in 2nd Embodiment of the inspection socket which concerns on this invention. 従来の検査ソケットの構成断面図である。It is structure sectional drawing of the conventional test | inspection socket. 従来の検査ソケットの構成断面図である。It is structure sectional drawing of the conventional test | inspection socket.
 以下、本発明の実施形態について図面を用いて説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
 (第1実施形態)
 まず、本実施形態における検査ソケットの構成について説明する。
First Embodiment
First, the configuration of the inspection socket in the present embodiment will be described.
 図1に示すように、本実施形態における検査ソケット1は、コンタクトプローブ10、筐体21、IC搭載部30を備える。 As shown in FIG. 1, the inspection socket 1 in the present embodiment includes a contact probe 10, a housing 21, and an IC mounting unit 30.
 コンタクトプローブ10は、金属材料で構成されており、接触端子11、接触端子保持部12、ランド接触端子13およびばね14を備える。 The contact probe 10 is made of a metal material, and includes a contact terminal 11, a contact terminal holder 12, a land contact terminal 13 and a spring 14.
 接触端子11は、その根元部が接触端子保持部12に形成された穴に挿入され、かしめ、導電性の接着剤、または半田付けにより接触端子保持部12に固定されるようになっている。また、拡大図に示すように、接触端子11は、鉤状に形成された先端11aを有する。なお、本実施形態では、接触端子11の形状を四角柱としているが、例えば円柱状であってもよい。また、接触端子11の先端が鉤状ではなく、直線的に形成されていてもよい。また、接触端子11と接触端子保持部12とを別体として相互に固定する構造としているが、両者は一体構造であってもよい。 The root portion of the contact terminal 11 is inserted into a hole formed in the contact terminal holding portion 12 and is caulked and fixed to the contact terminal holding portion 12 by a conductive adhesive or soldering. Further, as shown in the enlarged view, the contact terminal 11 has a tip 11a formed in a bowl shape. In addition, in this embodiment, although the shape of the contact terminal 11 is made into square pole, it may be cylindrical shape, for example. Further, the tip of the contact terminal 11 may be formed in a straight line instead of a bowl shape. Moreover, although it is set as the structure which mutually fixes the contact terminal 11 and the contact terminal holding part 12 as another body, both may be integral structure.
 ランド接触端子13は、プリント基板50に設けられたランド51に接触するようになっている。ばね14は、その一端が接触端子保持部12に接触し他端がランド接触端子13に接触して一端と他端との間で伸縮するようになっている。ここで、ばね14は、本発明に係る弾性体を構成する。 The land contact terminals 13 are in contact with lands 51 provided on the printed circuit board 50. One end of the spring 14 is in contact with the contact terminal holding portion 12 and the other end is in contact with the land contact terminal 13 so that the spring 14 expands and contracts between one end and the other end. Here, the spring 14 constitutes an elastic body according to the present invention.
 筐体21は、IC搭載部30がスライドするスライド面21bを備え、コンタクトプローブ10を保持する貫通孔21aが穿孔されている。筐体21の底面には、ランド接触端子13の段部を貫通孔の周縁で保持する保持板22が取り付けられている。保持板22は、ねじ23によって筐体21に固定されている。 The housing 21 includes a slide surface 21 b on which the IC mounting portion 30 slides, and a through hole 21 a for holding the contact probe 10 is bored. A holding plate 22 is attached to the bottom of the housing 21 to hold the step of the land contact terminal 13 at the periphery of the through hole. The holding plate 22 is fixed to the housing 21 by a screw 23.
 IC搭載部30は、図示の方向にスライドできる構成となっており、IC40が搭載されるIC搭載面31を備え、IC40の半田ボール41および接触端子11の先端部を収納する貫通孔32が穿孔されている。このIC搭載部30は、本発明に係る切替手段を構成する。 IC mounting portion 30 is configured to be slidable in the direction shown in the figure, has IC mounting surface 31 on which IC 40 is mounted, and through holes 32 for receiving solder balls 41 of IC 40 and tip portions of contact terminals 11 are perforated. It is done. The IC mounting unit 30 constitutes switching means according to the present invention.
 IC搭載面31の平面図に示すように、貫通孔32は、大小2つの円形状の貫通孔が連結した形状(達磨形状)を有し、半田ボール41の側面周囲を覆う貫通孔32aと、接触端子11の先端部を覆う貫通孔32bと、で構成されている。 As shown in the plan view of the IC mounting surface 31, the through holes 32 have a shape (deep grinding shape) in which two large and small circular through holes are connected, and a through hole 32 a covering the periphery of the side surface of the solder ball 41; And a through hole 32 b covering the tip of the contact terminal 11.
 IC40は、IC搭載部30のIC搭載面31に搭載された後、図示しない固定部によって固定される構成となっている。 After being mounted on the IC mounting surface 31 of the IC mounting unit 30, the IC 40 is configured to be fixed by a fixing unit (not shown).
 次に、本実施形態における検査ソケット1の動作について図2を用いて説明する。 Next, the operation of the inspection socket 1 in the present embodiment will be described with reference to FIG.
 IC搭載部30のIC搭載面31上にIC40が搭載されると、図2(a)に示す状態となる。すなわち、IC40の半田ボール41は貫通孔32aに収納され、接触端子11は貫通孔32b内で直立した状態であり、半田ボール41と接触端子11とが離隔状態にある。一方、ランド接触端子13は、ばね14によって押圧された状態でプリント基板50のランド51に接触している。 When the IC 40 is mounted on the IC mounting surface 31 of the IC mounting unit 30, the state shown in FIG. 2A is obtained. That is, the solder balls 41 of the IC 40 are accommodated in the through holes 32a, the contact terminals 11 are upright in the through holes 32b, and the solder balls 41 and the contact terminals 11 are in a separated state. On the other hand, the land contact terminal 13 is in contact with the land 51 of the printed circuit board 50 in a state of being pressed by the spring 14.
 次に、IC搭載部30を右方向にスライドさせていくと、半田ボール41は、貫通孔32aの内壁に接触して接触端子11側に押され、図2(b)に示すように、接触端子11に接触する接触状態となる。なお、接触状態にあるIC搭載部30を左方向に移動すると離隔状態に戻る。 Next, when the IC mounting portion 30 is slid in the right direction, the solder ball 41 contacts the inner wall of the through hole 32a and is pushed to the contact terminal 11 side, as shown in FIG. It will be in the contact state which contacts the terminal 11. When the IC mounting unit 30 in the contact state is moved in the left direction, it returns to the separated state.
 図2(c)は、半田ボール41の近傍を拡大した図であって、半田ボール41の側面に接触する前の状態の接触端子11を破線で示し、半田ボール41の側面に接触した状態の接触端子11を実線で示している。図示のように、IC搭載部30は、右方向に移動することにより半田ボール41の側面を接触端子11に確実に接触させることができる。その結果、検査ソケット1は、半田ボール41とランド51とを電気的に接続することとなる。 FIG. 2C is an enlarged view of the vicinity of the solder ball 41, in which the contact terminal 11 in a state before contacting the side surface of the solder ball 41 is shown by a broken line and in a state of contacting the side surface of the solder ball 41. The contact terminal 11 is shown by a solid line. As illustrated, the IC mounting unit 30 can make the side surface of the solder ball 41 reliably contact the contact terminal 11 by moving in the right direction. As a result, the inspection socket 1 electrically connects the solder balls 41 and the lands 51.
 次に、IC搭載部30の他の態様を説明する。図3は、前述の図2(c)と同様に、半田ボール41の近傍を拡大した図であって、IC搭載部30は、接触状態において半田ボール41の根元部側(IC搭載面31側)に係合する係合部33を貫通孔32aの内壁に有する。この構成により、検査ソケット1は、接触状態において接触端子11と係合部33とが半田ボール41を挟み込む状態となり、接触端子11を半田ボール41に確実に接触させるとともに、接触状態におけるIC40の浮き上がりを防止することができる。 Next, another aspect of the IC mounting unit 30 will be described. FIG. 3 is an enlarged view of the vicinity of the solder ball 41 as in the case of FIG. 2C described above, and the IC mounting portion 30 is in contact with the root portion side of the solder ball 41 (IC mounting surface 31 side). ) On the inner wall of the through hole 32a. With this configuration, in the inspection socket 1, the contact terminal 11 and the engaging portion 33 sandwich the solder ball 41 in the contact state, and the contact terminal 11 is reliably brought into contact with the solder ball 41. Can be prevented.
 以上のように、本実施形態における検査ソケット1によれば、接触端子11を半田ボール41の側面に接触させるIC搭載部30を備える構成としたので、ICに加える荷重を低減することができる。 As described above, according to the inspection socket 1 in the present embodiment, since the IC mounting portion 30 that brings the contact terminals 11 into contact with the side surfaces of the solder balls 41 is provided, the load applied to the IC can be reduced.
 また、本実施形態における検査ソケット1によれば、プリント基板50の表面に設けられたランド51に接触するランド接触端子13を備える構成としたので、所望の電気回路が形成されたプリント基板を配置して、そのプリント基板のランドにランド接触端子13を接触させることにより、多種多様なICに対応させることができる。 Further, according to the inspection socket 1 in the present embodiment, since the land contact terminal 13 in contact with the land 51 provided on the surface of the printed circuit board 50 is provided, the printed circuit board on which the desired electric circuit is formed is disposed. Then, by bringing the land contact terminals 13 into contact with the lands of the printed circuit board, it can be made compatible with a wide variety of ICs.
 したがって、本実施形態における検査ソケット1は、ICに加える荷重を低減するとともに多種多様なICに対応することができる。 Therefore, the inspection socket 1 in the present embodiment can reduce the load applied to the IC and can cope with various ICs.
 また、本実施形態における検査ソケット1は、図7に示した従来の検査ソケット200と比較すると次のような効果も得られる。従来の検査ソケット200では、コンタクトプローブ210の接点が使用により劣化した場合、コンタクトプローブ210の交換作業ができないため、コンタクトプローブ210をプリント基板230ごと廃棄しなければならない。これに対し、本実施形態における検査ソケット1では、容易にコンタクトプローブ10の交換作業ができるため、コンタクトプローブ10の接点が使用により劣化した場合でもプリント基板50を廃棄する必要がない。 In addition, the inspection socket 1 in the present embodiment can also achieve the following effects as compared with the conventional inspection socket 200 shown in FIG. In the conventional inspection socket 200, if the contact of the contact probe 210 is deteriorated due to use, the contact probe 210 must be discarded together with the printed circuit board 230 because the contact probe 210 can not be replaced. On the other hand, in the inspection socket 1 in the present embodiment, since the contact probe 10 can be easily replaced, it is not necessary to discard the printed circuit board 50 even when the contact of the contact probe 10 is deteriorated due to use.
 (第2実施形態)
 まず、本実施形態における検査ソケットの構成について説明する。
Second Embodiment
First, the configuration of the inspection socket in the present embodiment will be described.
 図4に示すように、本実施形態における検査ソケット2は、コンタクトプローブ10、筐体21、IC搭載部60、スライダ70を備える。なお、検査ソケット2において、第1実施形態における検査ソケット1(図1参照)と同様な構成には同一の符号を付し、その説明は省略する。 As shown in FIG. 4, the inspection socket 2 in the present embodiment includes a contact probe 10, a housing 21, an IC mounting portion 60, and a slider 70. In addition, in the inspection socket 2, the same code | symbol is attached | subjected to the structure similar to the inspection socket 1 (refer FIG. 1) in 1st Embodiment, and the description is abbreviate | omitted.
 IC搭載部60は、IC40を搭載するIC搭載面61と、IC40の半田ボール41および接触端子11の先端部を収納する貫通孔62と、スライダ70を貫通させる貫通孔63と、を備える。このIC搭載部60は、筐体21にねじで固定されている。 The IC mounting portion 60 includes an IC mounting surface 61 for mounting the IC 40, a through hole 62 for housing the solder ball 41 of the IC 40 and the tip of the contact terminal 11, and a through hole 63 for penetrating the slider 70. The IC mounting unit 60 is fixed to the housing 21 by screws.
 IC搭載面61の平面図に示すように、貫通孔62は、大小2つの円形状の貫通孔が連結した形状(達磨形状)を有し、半田ボール41の側面周囲を覆う貫通孔62aと、接触端子11の先端部を覆う貫通孔62bと、で構成されている。 As shown in the plan view of the IC mounting surface 61, the through hole 62 has a shape (deep grinding shape) in which two large and small circular through holes are connected, and a through hole 62a covering the periphery of the side surface of the solder ball 41; And a through hole 62 b covering the tip of the contact terminal 11.
 IC40は、IC搭載面61上に搭載された後、図示しない固定部によって固定される構成となっている。 After being mounted on the IC mounting surface 61, the IC 40 is configured to be fixed by a fixing portion (not shown).
 スライダ70は、図示の方向にスライドできる構成となっており、接触端子11の先端部を貫通させる接触端子貫通孔71を備える。このスライダ70は、本発明に係る切替手段を構成する。 The slider 70 is configured to be slidable in the illustrated direction, and includes a contact terminal through hole 71 through which the tip of the contact terminal 11 passes. The slider 70 constitutes switching means according to the present invention.
 次に、本実施形態における検査ソケット2の動作について図5を用いて説明する。 Next, the operation of the inspection socket 2 in the present embodiment will be described with reference to FIG.
 IC搭載面61上にIC40が搭載される前に、予めスライダ70を右方向にスライドさせ、接触端子貫通孔71の内壁で接触端子11を押圧して、接触端子11を反らせた状態としておく。次に、IC搭載面61上にIC40が搭載されると、図6(a)に示す状態となる。すなわち、IC40の半田ボール41は貫通孔62aに収納され、接触端子11は貫通孔62b内で半田ボール41から離隔した離隔状態にある。 Before the IC 40 is mounted on the IC mounting surface 61, the slider 70 is slid in the right direction in advance, and the contact terminal 11 is pressed by the inner wall of the contact terminal through hole 71 so that the contact terminal 11 is warped. Next, when the IC 40 is mounted on the IC mounting surface 61, the state shown in FIG. 6A is obtained. That is, the solder ball 41 of the IC 40 is accommodated in the through hole 62a, and the contact terminal 11 is in a separated state separated from the solder ball 41 in the through hole 62b.
 次に、スライダ70を左方向にスライドさせていくと、接触端子11は、図2(b)に示すように、接触端子貫通孔71の内壁による押圧状態から開放され、半田ボール41に接触する接触状態となる。 Next, when the slider 70 is slid in the left direction, the contact terminal 11 is released from the pressing state by the inner wall of the contact terminal through hole 71 and contacts the solder ball 41, as shown in FIG. It will be in a contact state.
 以上のように、本実施形態における検査ソケット2によれば、接触端子11を半田ボール41の側面に接触させる接触状態と半田ボール41から離隔させる離隔状態を切り替えるスライダ70を備える構成としたので、ICに加える荷重を低減することができる。 As described above, according to the inspection socket 2 in the present embodiment, the slider 70 is configured to switch between the contact state in which the contact terminal 11 contacts the side surface of the solder ball 41 and the separation state in which the contact terminal 11 is separated from the solder ball 41. The load applied to the IC can be reduced.
 また、本実施形態における検査ソケット2によれば、プリント基板50の表面に設けられたランド51に接触するランド接触端子13を備える構成としたので、所望の電気回路が形成されたプリント基板を配置することにより、多種多様なICに対応させることができる。 Further, according to the inspection socket 2 in the present embodiment, since the land contact terminal 13 in contact with the land 51 provided on the surface of the printed circuit board 50 is provided, the printed circuit board on which the desired electric circuit is formed is disposed. By doing this, it is possible to cope with a wide variety of ICs.
 したがって、本実施形態における検査ソケット2は、ICに加える荷重を低減するとともに多種多様なICに対応することができる。 Therefore, the inspection socket 2 in the present embodiment can reduce the load applied to the IC and can cope with various ICs.
 なお、前述の実施形態において、スライダ70が、接触端子11を押圧したとき離隔状態とし、接触端子11を開放したとき接触状態とする構成としたが、本発明はこれに限定されるものではなく、スライダ70が、接触端子11を押圧したとき接触状態とし、接触端子11を開放したとき離隔状態とする構成としてもよい。 In the above embodiment, the slider 70 is in the separated state when the contact terminal 11 is pressed and in the contact state when the contact terminal 11 is opened, but the present invention is not limited to this. The slider 70 may be in the contact state when the contact terminal 11 is pressed, and may be in the separation state when the contact terminal 11 is opened.
 以上のように、本発明に係る検査ソケットは、ICに加える荷重を低減するとともに多種多様なICに対応することができるという効果を有し、半導体集積回路の電気的特性を検査する際に用いられる検査ソケット等として有用である。 As described above, the test socket according to the present invention has the effect of reducing the load applied to the IC and being compatible with a wide variety of ICs, and is used when testing the electrical characteristics of a semiconductor integrated circuit. Is useful as an inspection socket and the like.
 1、2 検査ソケット
 10 コンタクトプローブ
 11 接触端子
 11a 先端
 12 接触端子保持部
 13 ランド接触端子
 14 ばね(弾性体)
 21 筐体
 21a 貫通孔
 21b スライド面
 22 保持板
 30、60 IC搭載部
 31、61 IC搭載面
 32(32a、32b) 貫通孔
 33 係合部
 40 IC
 41 半田ボール
 50 プリント基板
 51 ランド
 70 スライダ
 62(62a、62b) 貫通孔
 63 貫通孔
 71 接触端子貫通孔
1, 2 inspection socket 10 contact probe 11 contact terminal 11a tip 12 contact terminal holder 13 land contact terminal 14 spring (elastic body)
21 housing 21a through hole 21b slide surface 22 holding plate 30, 60 IC mounting portion 31, 61 IC mounting surface 32 (32a, 32b) through hole 33 engaging portion 40 IC
41 solder ball 50 printed circuit board 51 land 70 slider 62 (62a, 62b) through hole 63 through hole 71 contact terminal through hole

Claims (5)

  1. 被検査体に設けられた半田ボールとプリント基板に設けられたランドとを電気的に接続する検査ソケットであって、
     前記半田ボールの側面に接触する接触端子と、前記接触端子を保持する接触端子保持部と、前記ランドに接触するランド接触端子と、一端が前記接触端子保持部に接触し他端が前記ランド接触端子に接触して前記一端と前記他端との間で伸縮する弾性体と、前記接触端子が前記半田ボールの側面に接触する接触状態と前記接触端子が前記半田ボールの側面から離隔する離隔状態とを切り替える切替手段と、を備えた検査ソケット。
    An inspection socket for electrically connecting a solder ball provided on an object to be inspected and a land provided on a printed circuit board,
    A contact terminal in contact with the side surface of the solder ball, a contact terminal holding portion for holding the contact terminal, a land contact terminal in contact with the land, one end contacts the contact terminal holding portion, and the other end is the land contact An elastic body that contacts a terminal and expands and contracts between the one end and the other end, a contact state in which the contact terminal contacts the side surface of the solder ball, and a separation state in which the contact terminal separates from the side surface of the solder ball And a switching means for switching between the inspection socket and the inspection socket.
  2. 前記接触端子保持部、前記ランド接触端子、および前記弾性体を収容する筐体をさらに備え、
     前記切替手段は、前記半田ボールおよび前記接触端子の先端部を内部に収納する貫通孔が穿孔され、前記筐体上面に滑動可能に配置され、前記被検査体を搭載する被検査体搭載部である請求項1に記載の検査ソケット。
    It further comprises a housing for housing the contact terminal holding portion, the land contact terminal, and the elastic body,
    The switching means has a through hole for housing the tip of the solder ball and the contact terminal inside, is slidably disposed on the upper surface of the housing, and is an inspection object mounting portion on which the inspection object is mounted. The inspection socket according to claim 1.
  3. 前記接触端子保持部、前記ランド接触端子、および前記弾性体を収容する筐体と、前記半田ボールおよび前記接触端子の先端部を内部に収納する貫通孔が穿孔され、前記筐体上面に固定され、前記被検査体を搭載する被検査体搭載部と、をさらに備え、
     前記切替手段は、前記被検査体搭載部と前記筐体との間に滑動可能に配置され、前記接触端子が貫通する接触端子貫通孔が穿孔されたスライダである請求項1に記載の検査ソケット。
    A casing for accommodating the contact terminal holding portion, the land contact terminal, and the elastic body, and a through hole for accommodating the tip of the solder ball and the contact terminal therein, and fixed on the upper surface of the casing An inspection object mounting unit on which the inspection object is mounted;
    The inspection socket according to claim 1, wherein the switching means is a slider which is slidably disposed between the inspection object mounting portion and the housing, and in which a contact terminal through hole through which the contact terminal passes is bored. .
  4. 前記被検査体搭載部は、前記貫通孔の上端部に前記接触状態において前記半田ボールの根元部と係合する係合部を有する請求項2または請求項3に記載の検査ソケット。 The inspection socket according to claim 2 or 3, wherein the inspection object mounting portion has an engagement portion which engages with a root portion of the solder ball in the contact state at an upper end portion of the through hole.
  5. 前記接触端子は、前記半田ボールの側面に接触する鉤状の先端を有する請求項1から請求項4までのいずれか1項に記載の検査ソケット。 The inspection socket according to any one of claims 1 to 4, wherein the contact terminal has a hook-like tip that contacts a side surface of the solder ball.
PCT/JP2012/000138 2011-01-19 2012-01-12 Inspection socket WO2012098837A1 (en)

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CN107843750A (en) * 2016-09-20 2018-03-27 中华精测科技股份有限公司 Bolt type probe
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Publication number Priority date Publication date Assignee Title
TWI514686B (en) * 2013-01-28 2015-12-21 Hon Hai Prec Ind Co Ltd Electrical connector and contacts thereof
CN107843750A (en) * 2016-09-20 2018-03-27 中华精测科技股份有限公司 Bolt type probe
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CN107843750B (en) * 2016-09-20 2020-05-01 中华精测科技股份有限公司 Bolt type probe
WO2019159349A1 (en) * 2018-02-19 2019-08-22 ユニテクノ株式会社 Contact probe and inspection socket provided with same
JPWO2019159349A1 (en) * 2018-02-19 2021-02-04 ユニテクノ株式会社 Contact probe and inspection socket with it
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