WO2012091535A1 - Inserts en céramique à base d'alumine renforcée par de la zircone avec ajout d'oxydes métalliques nanoparticulaires à titre d'additifs - Google Patents

Inserts en céramique à base d'alumine renforcée par de la zircone avec ajout d'oxydes métalliques nanoparticulaires à titre d'additifs Download PDF

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Publication number
WO2012091535A1
WO2012091535A1 PCT/MY2010/000330 MY2010000330W WO2012091535A1 WO 2012091535 A1 WO2012091535 A1 WO 2012091535A1 MY 2010000330 W MY2010000330 W MY 2010000330W WO 2012091535 A1 WO2012091535 A1 WO 2012091535A1
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WO
WIPO (PCT)
Prior art keywords
cutting insert
zta
nano metal
alumina
cutting
Prior art date
Application number
PCT/MY2010/000330
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English (en)
Inventor
Arifin Ahmad ZAINAL
Maran Ratnam MANI
Mohamad HASMALIZA
Zahirani Ahmad Azhar AHMAD
Original Assignee
Universiti Sains Malaysia
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to PCT/MY2010/000330 priority Critical patent/WO2012091535A1/fr
Priority to MYPI2010006353A priority patent/MY158139A/en
Publication of WO2012091535A1 publication Critical patent/WO2012091535A1/fr

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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C04B35/111Fine ceramics
    • C04B35/117Composites
    • C04B35/119Composites with zirconium oxide
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/148Composition of the cutting inserts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B2224/00Materials of tools or workpieces composed of a compound including a metal
    • B23B2224/04Aluminium oxide
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B2226/00Materials of tools or workpieces not comprising a metal
    • B23B2226/27Composites
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3206Magnesium oxides or oxide-forming salts thereof
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3225Yttrium oxide or oxide-forming salts thereof
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3244Zirconium oxides, zirconates, hafnium oxides, hafnates, or oxide-forming salts thereof
    • C04B2235/3246Stabilised zirconias, e.g. YSZ or cerium stabilised zirconia
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6562Heating rate
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6565Cooling rate
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/94Products characterised by their shape
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance

Definitions

  • the present invention relates to ceramic cutting inserts.
  • the present invention relates to ceramic cutting inserts having Zirconia-Toughened- Alumina (ZTA) and method of fabricating the same.
  • ZTA Zirconia-Toughened- Alumina
  • Ceramic tools have a high resistant to heat and wear. It can be used as a cutting tool for machineries, especially as a tool to cut metal that are extremely hard. Such cutting tools are often used in lathe machineries, whereby it is a machine tool that spins a workpiece.
  • the cutting tool better known as a cutting insert in the lathe machineries, functions as a tool that removes material from the workpiece. The capability of the machine and the finishing of the workpiece rely strongly on the performance of the cutting insert. Cutting inserts with superior mechanical properties operates longer and are capable of cutting harder materials.
  • ZTA Zirconia Toughened Alumina
  • AI2O3 Aluminum Oxide
  • YSZ or Y ⁇ Os-ZrOa YSZ or Y ⁇ Os-ZrOa
  • ZTA has an improved hardness and toughness making it a suitable material for cutting inserts, as hardness and toughness are imperative in the cutting inserts application.
  • the making of ceramic materials and manufacturing of the product goes through a series of processes that may vary due to the type of application needed. One basic process required in producing ceramic composites is the sintering process.
  • Sintering is a method used for making objects from powder. It is generally used to manufacture ceramic products. The materials are heated in a sintering furnace below its melting point till all the particles adhere together. The main purpose of sintering is to increase the strength of the material by bonding the particles together. Sintering of ceramic materials reduces the pores that occur when the particles are bonded together.
  • One such sintering additive is the Magnesium Oxide (MgO), as it greatly affects the ceramic material by addition in a very small amount MgO reduces the sintering temperature and grain size of alumina. The addition of small amounts of the MgO together with alumina allows the alumina to sinter to near theoretical density.
  • MgO Magnesium Oxide
  • a cutting insert for cutting machinery comprising a Zirconia Toughened Alumina (ZTA) having a nano metal oxide additive.
  • ZTA Zirconia Toughened Alumina
  • the ZTA comprises of 99.99 wt% - 97.0 wt% and
  • nano metal oxide additive 0.01 wt% - 3.0wt% of nano metal oxide additive.
  • the additive may also be nano-sized Magnesium Oxide.
  • the ZTA comprises a mixture of 80 wt % of alumina and 20 wt % of Yttria Stabilized Zirconia.
  • the cutting insert may be shaped into a square shape, an orthogonal shape, a triangle shape or a semi-orthogonal shape.
  • a method of fabricating cutting insert comprises mixing alumina together with Yttria Stabilized Zirconia (YSZ) and nano metal oxide additives; compacting the mixture in a compaction mold of a desired shape; sintering the compacted mixture for a predetermined period; and machining the sintered mixture to form the cutting insert.
  • YSZ Yttria Stabilized Zirconia
  • the alumina is mixed with YSZ in ethanol for round eight hours.
  • the method may further comprises drying up ethanol.
  • the sintering process is taken place under about 1600 degree Celsius for around four hours.
  • FIG. 1 is a flow chart of the method to fabricate ZTA-nano metal oxides ceramic cutting inserts
  • FIG. 2 is a graph that shows a sintering profile for the ZTA-nano metal oxides ceramic cutting inserts
  • FIG. 3 illustrates the various types of shapes available to fabricate the
  • FIG. 4 shows the parameters and values of a cutting condition of a test taking place as illustrated in FIG. 5;
  • FIG. 5 is a graph of the test that compares the flank wear limit of the present invention and its prior art
  • FIG. 6 illustrates the dimensions of the ZTA-nano metal oxides ceramic cutting insert
  • FIG. 7 shows the various mechanical properties and values of the newly fabricated ZTA-nano metal oxides ceramic cutting insert.
  • FIG. 1 shows a process 100 for fabricating a ZTA-nano metal oxides ceramic cutting insert 150 in accordance with an embodiment of the present invention.
  • the fabrication of the ZTA-nano metal oxides ceramic cutting insert 150 includes mixing compositions at step 102; compacting the mixture at step 104; sintering the particles at step 106, and fabricating the sintered material to at step 108.
  • the process 100 is carried out to form the cutting insert 150 comprises aluminum oxide (also referred to as "Alumina") 152, Yttria Stabilized Zirconia (YSZ or Y 2 0 3 -Zr0 2 ) 154 and nano metal oxides 156.
  • Al oxide also referred to as "Alumina”
  • the alumina 152, YSZ 154 and nano metal oxides 156 are mixed at a desired amount. Subsequently, at step 104, the mixture is being pressed into a desired shape of the cutting insert 150 through a compaction mold (not shown). At step 106, the compacted mixture is undergone the sintering process. MgO, for example, can be used as an additive, but others additives may also be desired. The selection of additives is well known in the art, and is therefore not discussed herewith. [0023] Still referring to FIG. 1, the alumina 152 is the main material involved in the fabrication of the ZTA-nano metal oxides ceramic cutting insert 150.
  • YSZ 154 is a zirconium oxide based ceramic with an addition of yttrium oxide. It has a chemical formula of Y 2 C>3-Zr0 2 and is added to the alumina 152 as reinforcement. YSZ 154 also has properties that demonstrate hardness. When the YSZ 154 is mixed with alumina 152, the material offers improved mechanical properties, namely hardness and toughness, as compared to a pure YSZ cutting insert or a pure alumina cutting insert.
  • the ZTA may consists of 80 wt % of AI2O3 and 20 wt % of YSZ.
  • the weight percentage of the ZTA in the ZTA- nano metal oxides ceramic cutting insert is desired to be in the range of 97.0 wt% - 99.99 wt%.
  • the weight percentage of the nano metal oxides in the ZTA-nano metal oxides ceramic cutting insert 150 is in the range of 0.01wt% - 3.0wt%.
  • the nano metal oxide 156 is used as an additive in the present invention to further improve the properties of the cutting insert 150.
  • the process 100 aims to fabricate the ZTA-nano metal oxides ceramic cutting insert 150 that comprise the alumina 152, the YSZ 154 and the nano metal oxides 156.
  • the alumina 152, the YSZ 154 and the nano metal oxides 156 are wet mixed in ethanol for a period of around eight (8) hours. This ensures that the mixture is homogenous, i.e. the substance will be uniform in composition even when its volume has been divided. Subsequently, the mixture is dried up in an oven at around 80°C to remove the ethanol.
  • the mixture goes through the compaction process, whereby it is pressed into a desire shape of the cutting insert 150 with an aid of a compaction mould and a hydraulic hand press.
  • FIG. 3(a)-(d) exemplifies various desired shapes of the cutting insert 150.
  • the pressure used in the compaction process is around 200MPa to form the desired shape.
  • the compacted mixture is sintered in an electric furnace at about 1600°C for a period of around four (4) hours.
  • the sintered mixture is under through the machining process to form the ZTA-nano metal oxides ceramic cutting insert 150.
  • the sintering process 106 is catered for decreasing the pores between the various materials.
  • the additions of the nano metal oxides 156 further fills up the porous found in ZTA composites resulting a far superior type of ceramic cutting insert 150.
  • FIG. 2 is a graph that shows a sintering profile 200 of the sintering process at step 106 of FIG. 1 for fabricating the ZTA-nano metal oxides ceramic cutting inserts 150 in accordance with one embodiment of the present invention.
  • the sintering process is carried out on the compacted mixture in an electric furnace.
  • the electric furnace first increases the heat at a rate 5°C/minute until the temperature reaches about 1600°C. Then the compacted mixture is being soaked under 1600°C for about 4 hours. Thereafter, the electric furnace is being cooled down at a 5°C/minute to complete the sintering process.
  • FIGs. 3(a)-(d) illustrate the various embodiments of the fabricated ZTA-nano metal oxides ceramic cutting insert 150 of the present invention.
  • the respective shapes of the ZTA-nano metal oxides ceramic cutting inserts 150 includes: (a) an orthogonal shaped cutting insert, (b) a square shaped cutting insert, (c) a triangle shaped cutting insert and (d) a semi-orthogonal shaped cutting insert.
  • the exemplified cutting inserts are suitable for carrying out cutting operation for a lathe machine for example.
  • FIG. 4 shows table listing out various parameters and values of a cutting test with one of the aforesaid ZTA-nano metal oxides ceramic cutting insert cutting inserts 150 and cutting inserts that made by pure Alumina and conventional ZTA respectively.
  • the cutting test aims to determine the performance of these material by measure their Flank wear (V b , mm) in time.
  • the cutting speed is being set at 540RPM
  • the cutting depth is being set at 0.4mm
  • the feed rate is being set at 0.2mm/rev
  • the cutting length is being set at 40mm to cut a stainless steel 316L grade workpiece without any lubricant used.
  • the cutting depth is the depth that the cutting insert is in contact with the workpiece.
  • the feed rate is established to produce the surface finish required on the workpiece.
  • the cutting test determines which material used would reach a Flank wear limit, which is set at around 0.3mm.
  • the ZTA-nano metal oxides ceramic cutting insert 150 out performed the pure alumina and conventional ZTA, where the pure alumina and the conventional ZTA took around one (1) minutes and around two (2) minutes respectively to reach the Flank wear limit, whilst the ZTA-nano metal oxides ceramic cutting insert 150 took around 4 minutes before reaching the Flank wear limit.
  • FIG. 6 is a table listed out dimensions of the ZTA-nano metal oxides ceramic cutting inserts 150 in accordance with one embodiment of the present invention.
  • the ZTA-nano metal oxide ceramic cutting insert 150 is fabricated into a size with a length of 18.0mm, a width of 15.5mm, a thickness of 8.0 and a weight of 4.0g. It is important to recognize that the dimensions of a cutting insert is determined based on the required specification of a particular machine and the type of cutting required.
  • FIG. 7 shows various mechanical properties and values of the fabricated
  • the cutting insert 150 in this embodiment has a hardness of 1740 kg/mm 2 , a fracture toughness of 4-8 MPa.m 1 2 , an elastic modulus of 310GPa, a density of 4.1 g/cm 3 and the maximum operating temperature of 1500°C.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Composite Materials (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Compositions Of Oxide Ceramics (AREA)

Abstract

Cette invention concerne un insert de coupe pour machines à couper comprenant une alumine renforcée par de la zircone (ZTA) contenant un additif d'oxyde métallique nanoparticulaire. Un procédé de fabrication d'un insert de coupe selon l'invention est également décrit. Le procédé comprend le mélange de l'alumine avec une zircone stabilisée par de l'oxyde d'yttrium (YSZ) et des additifs de type oxyde métallique nanoparticulaire ; le compactage du mélange dans un moule à compacter présentant une forme souhaitée ; le frittage du mélange compacté pendant une période prédéterminée ; et l'usinage du mélange fritté pour former l'insert de coupe.
PCT/MY2010/000330 2010-12-27 2010-12-27 Inserts en céramique à base d'alumine renforcée par de la zircone avec ajout d'oxydes métalliques nanoparticulaires à titre d'additifs WO2012091535A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/MY2010/000330 WO2012091535A1 (fr) 2010-12-27 2010-12-27 Inserts en céramique à base d'alumine renforcée par de la zircone avec ajout d'oxydes métalliques nanoparticulaires à titre d'additifs
MYPI2010006353A MY158139A (en) 2010-12-27 2010-12-30 Zirconia-toughened-alumina ceramic cutting inserts with the addition of nano particle metal oxides as additives

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/MY2010/000330 WO2012091535A1 (fr) 2010-12-27 2010-12-27 Inserts en céramique à base d'alumine renforcée par de la zircone avec ajout d'oxydes métalliques nanoparticulaires à titre d'additifs

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WO2012091535A1 true WO2012091535A1 (fr) 2012-07-05

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3014000A1 (fr) * 2013-11-29 2015-06-05 Diamonde Procede de fabrication et de reparation d'un outil de coupe
US10369633B2 (en) * 2015-04-22 2019-08-06 Diamonde Cutting tool for machining abrasive materials, notably wood-based materials
CN112589094A (zh) * 2020-12-11 2021-04-02 西安交通大学 一种重力浸渗复合衬板的高通量制备方法
CN112589095A (zh) * 2020-12-11 2021-04-02 西安交通大学 一种重力浸渗铁基复合材料预制体的高通量制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0214291B1 (fr) * 1985-03-07 1992-04-15 Nippon Soda Co., Ltd. Zircone frittee et procede de production
US5185215A (en) * 1986-08-01 1993-02-09 International Business Machines Corporation Zirconia toughening of glass-ceramic materials
US20020010070A1 (en) * 2000-04-25 2002-01-24 Bernard Cales Zirconia-toughened alumina biocomponent having high resistance to low temperature degradation and method for preparing same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0214291B1 (fr) * 1985-03-07 1992-04-15 Nippon Soda Co., Ltd. Zircone frittee et procede de production
US5185215A (en) * 1986-08-01 1993-02-09 International Business Machines Corporation Zirconia toughening of glass-ceramic materials
US20020010070A1 (en) * 2000-04-25 2002-01-24 Bernard Cales Zirconia-toughened alumina biocomponent having high resistance to low temperature degradation and method for preparing same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3014000A1 (fr) * 2013-11-29 2015-06-05 Diamonde Procede de fabrication et de reparation d'un outil de coupe
US10369633B2 (en) * 2015-04-22 2019-08-06 Diamonde Cutting tool for machining abrasive materials, notably wood-based materials
CN112589094A (zh) * 2020-12-11 2021-04-02 西安交通大学 一种重力浸渗复合衬板的高通量制备方法
CN112589095A (zh) * 2020-12-11 2021-04-02 西安交通大学 一种重力浸渗铁基复合材料预制体的高通量制备方法
CN112589094B (zh) * 2020-12-11 2022-04-22 西安交通大学 一种重力浸渗复合衬板的高通量制备方法

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Publication number Publication date
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