WO2012074228A3 - 질화물 반도체 소자 및 그 제조방법 - Google Patents

질화물 반도체 소자 및 그 제조방법 Download PDF

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Publication number
WO2012074228A3
WO2012074228A3 PCT/KR2011/008710 KR2011008710W WO2012074228A3 WO 2012074228 A3 WO2012074228 A3 WO 2012074228A3 KR 2011008710 W KR2011008710 W KR 2011008710W WO 2012074228 A3 WO2012074228 A3 WO 2012074228A3
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WIPO (PCT)
Prior art keywords
semiconductor device
nitride semiconductor
manufacturing same
semiconductor
growing
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PCT/KR2011/008710
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English (en)
French (fr)
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WO2012074228A2 (ko
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음영신
장태훈
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엘지전자 주식회사
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Application filed by 엘지전자 주식회사 filed Critical 엘지전자 주식회사
Priority to US13/991,070 priority Critical patent/US20130248878A1/en
Publication of WO2012074228A2 publication Critical patent/WO2012074228A2/ko
Publication of WO2012074228A3 publication Critical patent/WO2012074228A3/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
    • H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/73—Bipolar junction transistors
    • H01L29/737—Hetero-junction transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
    • H01L29/802—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with heterojunction gate, e.g. transistors with semiconductor layer acting as gate insulating layer, MIS-like transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66431—Unipolar field-effect transistors with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/73—Bipolar junction transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
    • H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
    • H01L29/7787—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT with wide bandgap charge-carrier supplying layer, e.g. direct single heterostructure MODFET
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
    • H01L29/2003—Nitride compounds

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

질화물 반도체 소자 및 그 제조방법이 개시된다. 본 발명의 질화물 반도체 소자는, 기판 위에 제1반도체로 이루어지는 버퍼층을 성장하고, 상기 제1반도체와는 상이한 제2반도체로 이루어지는 제1장벽층을 성장하고, 리세스를 형성하고자 하는 부분에 산화막층을 형성하고, 상기 제2반도체로 이루어지는 제2장벽층을 성장하고, 상기 산화막층을 제거하여 리세스를 형성하고, 상기 리세스에 게이트 전극을 형성하여 제조한다.
PCT/KR2011/008710 2010-12-02 2011-11-15 질화물 반도체 소자 및 그 제조방법 WO2012074228A2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US13/991,070 US20130248878A1 (en) 2010-12-02 2011-11-15 Method for manufacturing nitride semiconductor device and the same manufactured thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020100121733A KR20120060303A (ko) 2010-12-02 2010-12-02 질화물 반도체 소자의 제조 방법 및 이에 의해 제조된 질화물 반도체 소자
KR10-2010-0121733 2010-12-02

Publications (2)

Publication Number Publication Date
WO2012074228A2 WO2012074228A2 (ko) 2012-06-07
WO2012074228A3 true WO2012074228A3 (ko) 2012-07-26

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Country Status (3)

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US (1) US20130248878A1 (ko)
KR (1) KR20120060303A (ko)
WO (1) WO2012074228A2 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102316224B1 (ko) * 2015-07-21 2021-10-26 한국전자통신연구원 브릿지 다이오드 및 그 제조방법
US10068976B2 (en) * 2016-07-21 2018-09-04 Taiwan Semiconductor Manufacturing Co., Ltd. Enhancement mode field-effect transistor with a gate dielectric layer recessed on a composite barrier layer for high static performance
JP6720775B2 (ja) * 2016-08-25 2020-07-08 富士通株式会社 化合物半導体装置、及び化合物半導体装置の製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050139868A1 (en) * 2003-12-24 2005-06-30 Matsushita Electric Industrial Co., Ltd. Field effect transistor and method of manufacturing the same
JP2006261642A (ja) * 2005-02-17 2006-09-28 Matsushita Electric Ind Co Ltd 電界効果トランジスタおよびその製造方法
JP2007035905A (ja) * 2005-07-27 2007-02-08 Toshiba Corp 窒化物半導体素子
KR20090029897A (ko) * 2007-09-19 2009-03-24 전자부품연구원 고전자 이동도 트랜지스터 및 그 제조방법
KR20100034921A (ko) * 2008-09-25 2010-04-02 전자부품연구원 노멀 오프 특성을 갖는 질화물계 고전자 이동도 트랜지스터및 그 제조방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4220683B2 (ja) * 2001-03-27 2009-02-04 パナソニック株式会社 半導体装置
WO2003015174A2 (en) * 2001-08-07 2003-02-20 Jan Kuzmik High electron mobility devices
JP5179023B2 (ja) * 2006-05-31 2013-04-10 パナソニック株式会社 電界効果トランジスタ
US8633470B2 (en) * 2009-12-23 2014-01-21 Intel Corporation Techniques and configurations to impart strain to integrated circuit devices
JP2013048212A (ja) * 2011-07-28 2013-03-07 Sony Corp 半導体装置および半導体装置の製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050139868A1 (en) * 2003-12-24 2005-06-30 Matsushita Electric Industrial Co., Ltd. Field effect transistor and method of manufacturing the same
JP2006261642A (ja) * 2005-02-17 2006-09-28 Matsushita Electric Ind Co Ltd 電界効果トランジスタおよびその製造方法
JP2007035905A (ja) * 2005-07-27 2007-02-08 Toshiba Corp 窒化物半導体素子
KR20090029897A (ko) * 2007-09-19 2009-03-24 전자부품연구원 고전자 이동도 트랜지스터 및 그 제조방법
KR20100034921A (ko) * 2008-09-25 2010-04-02 전자부품연구원 노멀 오프 특성을 갖는 질화물계 고전자 이동도 트랜지스터및 그 제조방법

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Publication number Publication date
US20130248878A1 (en) 2013-09-26
WO2012074228A2 (ko) 2012-06-07
KR20120060303A (ko) 2012-06-12

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