WO2012057284A1 - Dispositif de mesure de forme en trois dimensions, procédé de mesure de forme en trois dimensions, procédé de fabrication de structure et système de fabrication de structure - Google Patents

Dispositif de mesure de forme en trois dimensions, procédé de mesure de forme en trois dimensions, procédé de fabrication de structure et système de fabrication de structure Download PDF

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Publication number
WO2012057284A1
WO2012057284A1 PCT/JP2011/074856 JP2011074856W WO2012057284A1 WO 2012057284 A1 WO2012057284 A1 WO 2012057284A1 JP 2011074856 W JP2011074856 W JP 2011074856W WO 2012057284 A1 WO2012057284 A1 WO 2012057284A1
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WO
WIPO (PCT)
Prior art keywords
unit
measurement
measurement object
dimensional shape
coordinates
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Application number
PCT/JP2011/074856
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English (en)
Japanese (ja)
Inventor
青木　洋
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株式会社ニコン
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Publication date
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Publication of WO2012057284A1 publication Critical patent/WO2012057284A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern

Definitions

  • FIG. 1 is a perspective view showing a mechanical configuration of the three-dimensional shape measuring apparatus according to the first embodiment.
  • the three-dimensional shape measuring apparatus includes a stage 12 on which a measurement object 11 such as an industrial product or a part is placed, and a projection unit 13 and an imaging unit 14 fixed to each other.
  • the optical axis of the imaging unit 14 is perpendicular to the reference plane of the stage 12. It is possible to make the optical axis of the projection unit 13 vertical instead of making the optical axis of the imaging unit 14 vertical, but here it is assumed that the optical axis of the imaging unit 14 is vertical.
  • this image is referred to as a “stripe image”.
  • the acquisition of the fringe image is repeated while shifting the phase of the sine lattice pattern, information for making the surface shape data D of the test surface known is gathered.
  • a main light source 21 that is a light source of the projection unit 13 is connected to the projection unit 13. Since the main light source 21 is used for pattern projection type surface shape measurement, for example, a general light source such as an LED, a halogen lamp, or a metal halide lamp can be applied. The light emitted from the main light source 21 is introduced into the illumination element 22 through the optical fiber 21 '. Although an example in which the optical fiber 21 ′ is used is shown here, a small light source such as an LED may be arranged at a position indicated by reference numeral 22 in FIG. 1 without using the optical fiber. Moreover, although the illumination element 22 is illustrated as one element, the illumination element 22 may be configured by an illumination optical system including a plurality of optical elements. In that case, for example, an illumination optical system using a fly-eye lens, a rod integrator, or the like for performing uniform illumination is provided.
  • the data extraction unit 31 is an area determined by the imaging optical system 25 of the measurement unit 20 in the light intensity change data generated for each distance from the measurement unit 20 to the measurement object 11 and is in focus. Data in the effective area that is the area is extracted. The data extraction unit 31 outputs the data in the extracted effective area to the coordinate measurement unit 32.
  • the data in the effective area may be any data as long as it is within the depth of field. Further, a person may determine an area to be extracted from the generated light intensity change data as an effective area.
  • FIG. 4 is a flowchart showing the flow of processing by the three-dimensional shape measuring apparatus 1 in the first embodiment.
  • the projection unit 13 converts light incident from the main light source into a fringe pattern, and irradiates the measurement object with the converted fringe pattern (step S101).
  • the imaging unit 14 images light reflected from the measurement object (step S102).
  • the AD conversion unit 19 acquires the light intensity change data by converting the analog voltage value of each pixel input from the imaging unit 14 into light intensity change data indicating the luminance value of each pixel (step) S103).
  • the data extraction unit 31 extracts effective area data corresponding to the depth of field from the light intensity change data (step S104).
  • the coordinate measuring unit 32 calculates the coordinates of the effective area from the extracted data of the effective area (step S105).
  • the control unit 101 determines whether or not the distance from the measurement unit 20 to the measurement object 11 is captured at all predetermined distances (step S106).
  • the 3D shape measuring apparatus 1 calculates the coordinates from the light intensity change data of the effective area every time the distance from the measuring unit 20 to the measuring object 11 is changed, so that the measuring object is accurately obtained for each effective area.
  • the coordinates of the object 11 can be calculated. Since the three-dimensional shape measuring apparatus 1 calculates the coordinates of the entire measurement object 11 by connecting the highly accurate coordinates measured in each measurement zone, it is possible to measure each position of the entire measurement object with high accuracy. it can.
  • the data extraction unit 31b extracts effective area data from the light intensity change data input from the AD conversion unit 19, and outputs the extracted effective area data to the coordinate measurement unit 32b.
  • the coordinate measuring unit 32b calculates coordinates from the extracted effective area data, and stores the calculated coordinates in the storage unit 16b as the first coordinate.
  • the control unit 101b sets the calculated inclination as the inclination of the measurement object at a certain coordinate.
  • the control unit 101b calculates the gradient of the measurement object at each coordinate by performing the above process on all the calculated coordinates.
  • the control unit 101b calculates, for each effective area determined for each height of the measuring unit 20, a maximum change rate that is the maximum value of the change rate in the vertical direction in the effective area.
  • control unit 101b determines whether or not the calculated maximum change rate exceeds a predetermined threshold value. When the predetermined threshold value is exceeded, the control unit 101b reads the exposure condition corresponding to the maximum change rate from the storage unit 16b. The control unit 101b controls the image sensor 26 and the diaphragm unit 27 so as to change to the read exposure condition when the region where the maximum change rate exceeds the predetermined threshold is imaged again.
  • the three-dimensional shape measuring apparatus 1b once measures the coordinates of the entire measurement object 11, and then again measures the coordinates of the measurement zone in which the maximum change rate is greater than a predetermined threshold. Not limited to. When the three-dimensional shape measuring apparatus 1b measures the coordinates of the measurement object 11 and determines that the maximum rate of change in the vertical direction is larger than a predetermined threshold value, the exposure condition is changed to control the imaging. Also good.
  • Three-dimensional shape measuring device 20 Measuring unit 21 Main light source (light source unit) 23 Pattern formation part (stripe pattern generation part) 14 Imaging unit 30 Focus position changing unit 31 Data extracting unit 32 Coordinate measuring unit 101 Control unit 200 Structure manufacturing system 210 Design device 220 Molding device 230 Control device (inspection device) 240 Repair device

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  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention vise à mesurer une forme en trois dimensions d'un objet à mesurer avec une bonne précision. A cet effet, selon l'invention, une unité de mesure (20) obtient, en prenant de façon répétée des images d'un objet à mesurer tout en changeant une phase d'un motif en bandes avec lequel un objet à mesurer (11) est irradié, des données de changements d'intensité lumineuse à partir de positions sur l'objet à mesurer (11), une unité de changement de position de focalisation (30) change une position de focalisation lors de la prise des images par l'unité de mesure (20), une unité de commande (101) commande l'unité de mesure (20) et l'unité de changement de position de focalisation (30) de façon à obtenir les données des changements d'intensité lumineuse à chaque fois qu'une position de focalisation est changée, et une unité de mesure de coordonnées (32) mesure les coordonnées de positions sur l'objet à mesurer (11) sur la base des données des changements d'intensité lumineuse des positions de focalisation respectives.
PCT/JP2011/074856 2010-10-27 2011-10-27 Dispositif de mesure de forme en trois dimensions, procédé de mesure de forme en trois dimensions, procédé de fabrication de structure et système de fabrication de structure WO2012057284A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-240346 2010-10-27
JP2010240346A JP2014013144A (ja) 2010-10-27 2010-10-27 三次元形状測定装置、三次元形状測定方法、構造物の製造方法および構造物製造システム

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WO2012057284A1 true WO2012057284A1 (fr) 2012-05-03

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PCT/JP2011/074856 WO2012057284A1 (fr) 2010-10-27 2011-10-27 Dispositif de mesure de forme en trois dimensions, procédé de mesure de forme en trois dimensions, procédé de fabrication de structure et système de fabrication de structure

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JP (1) JP2014013144A (fr)
WO (1) WO2012057284A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014181478A1 (fr) * 2013-05-10 2014-11-13 株式会社ニコン Dispositif a rayons x et procede de fabrication de structure
JP2017015545A (ja) * 2015-06-30 2017-01-19 キヤノン株式会社 計測装置、および物品製造方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6234253B2 (ja) * 2014-01-31 2017-11-22 株式会社キーエンス 画像検査装置、画像検査方法及び画像検査プログラム並びにコンピュータで読み取り可能な記録媒体
JP6230434B2 (ja) * 2014-01-31 2017-11-15 株式会社キーエンス 画像検査装置、画像検査方法及び画像検査プログラム並びにコンピュータで読み取り可能な記録媒体
JP6691837B2 (ja) * 2016-06-27 2020-05-13 株式会社キーエンス 測定装置
JP6691838B2 (ja) 2016-06-27 2020-05-13 株式会社キーエンス 測定装置
DE102017000908A1 (de) * 2017-02-01 2018-09-13 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum Bestimmen der Belichtungszeit für eine 3D-Aufnahme
JP6916627B2 (ja) * 2017-02-08 2021-08-11 キヤノン株式会社 撮像装置およびその制御方法
TWI697656B (zh) 2017-12-20 2020-07-01 日商新川股份有限公司 線形狀檢查裝置以及線形狀檢查方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10141933A (ja) * 1996-11-11 1998-05-29 Kao Corp 平坦度の測定方法および測定装置
JP2001221621A (ja) * 2000-12-20 2001-08-17 Minolta Co Ltd ３次元形状測定装置
JP2006023178A (ja) * 2004-07-07 2006-01-26 Olympus Corp ３次元計測方法及び装置
JP2009180708A (ja) * 2008-02-01 2009-08-13 Nikon Corp 形状測定方法及び形状測定装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10141933A (ja) * 1996-11-11 1998-05-29 Kao Corp 平坦度の測定方法および測定装置
JP2001221621A (ja) * 2000-12-20 2001-08-17 Minolta Co Ltd ３次元形状測定装置
JP2006023178A (ja) * 2004-07-07 2006-01-26 Olympus Corp ３次元計測方法及び装置
JP2009180708A (ja) * 2008-02-01 2009-08-13 Nikon Corp 形状測定方法及び形状測定装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014181478A1 (fr) * 2013-05-10 2014-11-13 株式会社ニコン Dispositif a rayons x et procede de fabrication de structure
US10393678B2 (en) 2013-05-10 2019-08-27 Nikon Corporation X-ray device and manufacturing method of structure
JP2017015545A (ja) * 2015-06-30 2017-01-19 キヤノン株式会社 計測装置、および物品製造方法

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