WO2012057106A1 - スパッタリングターゲット-バッキングプレート接合体及びその製造方法 - Google Patents
スパッタリングターゲット-バッキングプレート接合体及びその製造方法 Download PDFInfo
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- WO2012057106A1 WO2012057106A1 PCT/JP2011/074487 JP2011074487W WO2012057106A1 WO 2012057106 A1 WO2012057106 A1 WO 2012057106A1 JP 2011074487 W JP2011074487 W JP 2011074487W WO 2012057106 A1 WO2012057106 A1 WO 2012057106A1
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- backing plate
- target
- sputtering
- plate assembly
- alloy
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3426—Material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
Definitions
- the present invention relates to a sputtering target-backing plate assembly used when titanium (Ti) is used as a sputtering target material.
- Ti titanium
- the present invention relates to a sputtering target-backing plate assembly capable of absorbing and a method for manufacturing the same.
- a sputtering target of titanium (Ti) is required for MRAM.
- the target is usually bonded to the backing plate and sputtered at high power to increase production efficiency.
- the problems with sputtering at this high power are the strength and cooling capacity of the backing plate itself and the backing plate. This is the bonding strength with the target.
- Patent Document 1 when joining a target material of Al or Al alloy and a backing plate, Ag or Ag alloy is used as an insert material, and after these are inserted, solid phase diffusion is performed (Patent Document 1). See). Further, there is a technique (see Patent Document 2) in which concentric concavities and convexities are formed on the joining surface between the sputtering target and the backing plate and joined together by HIP, hot pressing, or solid phase diffusion joining. is there.
- Patent Document 3 when joining a target material having a melting point of 1000 ° C. or higher and a backing plate, a technique of solid phase diffusion bonding via an insert material (Al, Cu, Ni and alloys thereof) having a melting point lower than that of the target ( Patent Document 3). Further, there is a method in which copper fine powder is interposed between a sputtering target and a backing plate and bonding is performed at a low temperature (see Patent Document 4).
- Patent Document 7 describes a technique in which diffusion bonding is performed with an aluminum or aluminum alloy plate insert having a thickness of 0.8 mm or more in a tantalum or tungsten-copper alloy backing plate assembly.
- Patent Document 8 describes a technique for diffusion bonding using a diffusion bonding assembly of a high-purity cobalt and a copper alloy backing plate through an insert material of aluminum or aluminum alloy plate having a thickness of 0.8 mm or more. ing.
- Patent Document 9 describes a sputtering target in which a backing plate material 4 composed of a plurality of metal layers 2 and 3 and a target material 5 are integrally joined by diffusion bonding or welding. Further, in Patent Document 10, when a target and a backing plate are joined by solid phase diffusion bonding via an insert material, both or one surface is flattened so as to have a roughness Ra of 0.01 to 3.0 ⁇ m. The application is described.
- Patent Document 11 describes a bonding method in which an elastomer resin is used when a target and a backing plate are bonded, and a metal mesh is interposed in the resin.
- Patent Document 12 describes sputtering with copper, aluminum, or an alloy foil thereof sandwiched between a target and a backing plate.
- JP-A-6-172993 Japanese Patent No. 4017198 JP-A-6-108246 JP 55-152109 A Japanese Patent Laid-Open No. 4-131374 JP-A-6-25839 Japanese Patent No. 3905301 Japanese Patent No. 3905295 JP 2001-295040 A JP 2000-239838 A JP 2006-33603 A Japanese Patent Laid-Open No. 11-189870
- the present invention relates to a sputtering target-backing plate assembly used when titanium (Ti) is used as a sputtering target material, in particular, to increase the bonding strength with the backing plate in order to increase the sputtering efficiency.
- the problem is to solve the problems associated with the selection of a backing plate that fits it.
- a sputtering target-backing plate assembly in which a Cu—Cr alloy backing plate is joined to a Ti target, and a layer made of a strain absorbing material is interposed at the interface between the Ti target and the Cu—Cr alloy backing plate.
- a sputtering target-backing plate assembly characterized by being bonded.
- the difference between the maximum value of displacement from the flat when sputtering is turned on and the maximum value of displacement from the flat when sputtering is turned off is 1 mm or less.
- Sputtering target-backing plate assembly 3) The sputtering target-backing plate assembly according to 1) or 2) above, wherein the bonding strength at the bonding interface of the target-backing plate assembly is 3 kgf / mm 2 or more.
- the present invention provides a strain-absorbing material at the interface between a target material and a backing plate when a sputtering target-backing plate assembly is formed by bonding a backing plate made of a Cu—Cr alloy to a target material made of Ti. In this way, the distortion of the interface between the target and the backing plate at the time of sputtering is absorbed to suppress the deformation of the target. It has a great effect of enabling a film, reducing the defect rate, and increasing production efficiency.
- a voltage is applied to both the target side as the cathode and the substrate side as the anode, and the target material is knocked out by impact on the target by Ar ions, and the method of coating the substrate by its flight
- a so-called self-sputtering coating method in which atoms sputtered from a target are ionized and further sputtered is already known as a sputtering method.
- the sputtering target is bonded to the backing plate, and the backing plate is cooled to prevent an abnormal temperature rise of the target, thereby enabling stable sputtering.
- the sputtering power tends to be increased so as to increase the production efficiency and enable high-speed sputtering.
- the backing plate and the sputtering target rarely use the same material.
- the backing plate is a material having good thermal conductivity and a material having a certain strength.
- the backing plate is cooled in the sputtering apparatus, and the thermal shock applied to the target is absorbed through the backing plate.
- there is a limit to the cooling Particularly problematic is peeling or deformation of the target due to a difference in thermal expansion between the target and the backing plate.
- the target is subject to erosion, resulting in irregularities in the shape, but when sputtering is performed at a high power, thermal stress generated mainly by heat during sputtering is concentrated mainly in the recess, causing the target to deform, resulting in uniformity. Deterioration occurs, or arcing with the shield occurs, and abnormal particles are generated. In an extreme case, plasma generation stops.
- it is possible to take measures such as increasing the strength of the backing plate or reducing the thermal stress by changing the material but there is a problem of compatibility with Ti as the target material. So far, no suitable solution has been found.
- the sputtering target-backing plate assembly of the present invention is a sputtering target-backing plate assembly in which a backing plate made of a Cu—Cr alloy is joined to a target material made of Ti, and an interface between the target material and the backing plate. Are joined through a layer (insert) made of Al or an alloy containing Al as a main component.
- a layer (insert) made of Al or an alloy containing Al as a main component For the Cu—Cr alloy as the backing plate, an alloy containing 0.7 to 1.2 wt% of Cr is used. This Cu—Cr alloy is a material having high strength and high thermal conductivity.
- Al or an alloy containing Al as a main component used when joining Ti and Cu—Cr alloy absorbs deformation of the target, and the joined target and backing plate plate This has an excellent effect that peeling does not occur when the assembly is processed and during sputtering. This is an inherent problem when the target material is Ti and the backing plate is a Cu—Cr alloy.
- the Al layer or the alloy layer containing Al as a main component is not diffusion-bonded to both the target and the backing plate, and no defect is generated on both. This is necessary to suppress deformation and increase the bonding strength.
- the adhesive strength at the joint interface can be 3 kgf / mm 2 or more.
- the present invention can provide such a sputtering target-backing plate assembly.
- a layer made of Ni, Zn, Ag, Cu, Cr, Sn, or an alloy containing these as a main component can be given.
- the Al layer, the Ni layer, or the Ag layer is described.
- a layer made of an alloy containing Al, Ni, Ag as a main component, Zn, Cu, Cr, Sn, or an alloy containing these as a main component can be used. It has been confirmed that the same effect can be obtained.
- the most efficient method is to interpose an alloy plate containing Al or Al as a main component, and press this at 400 to 550 ° C. It can be manufactured by applying a pressure of 1450 kg / cm 2 .
- other forming means may be used as long as Al or Al alloy can be interposed between the Ti target and the Cu—Cr alloy backing plate in a predetermined thickness.
- physical vapor deposition such as sputtering, chemical vapor deposition, and plating can also be performed.
- a target material made of Ti is required to have a high purity Ti of 4N5 or more, and is optimal as a sputtering target-backing plate assembly made of Ti.
- the layer made of Al or an alloy containing Al as a main component preferably has a thickness of 1 mm or more and 6 mm or less. This has been confirmed in many experiments, but a large amount of coating may hinder the transfer of heat to the backing plate, and a large amount of coating is not preferable from the viewpoint of production efficiency. Further, when the thickness is small, a good strain absorption effect cannot be obtained, and sufficient bonding strength cannot be obtained.
- the surface of the backing plate made of a Cu—Cr alloy can be roughly processed by a lathe in advance before joining, thereby further increasing the joining strength.
- the layer made of Al or an alloy containing Al as a main component can use Al as shown in the following examples.
- Al an Al alloy containing 50 wt% or more
- an Al alloy composed of Cr: 20 wt% and the balance Al can be used.
- Example 1 Next, Example 1 will be described.
- 4N5 (99.995 wt% excluding gas components) high-purity titanium was used as a target material (thickness 0.45 inch, 15.654 inch ⁇ ).
- the backing plate the above-described Cu—Cr alloy (thickness 0.5 inch, 15.654 inch ⁇ ) was used.
- an aluminum (Al) plate (insert) having a thickness of 2 mm was interposed at the bonding interface between the Ti target and the backing plate to obtain a test piece. After the surfaces of these targets and the backing plate were cleaned, they were sealed in a vacuum vessel and HIPed at 300 ° C. and a pressure of 1450 kg / cm 2 for a holding time of 1 hr.
- Example 1 the thickness of the Al coating layer at the interface is 2 mm. However, when the Al layer has a thickness of 1 mm or more and 6 mm or less, any of them obtains suitable adhesive strength. It was possible.
- the sputtering target-backing plate assembly of this example in which the target and the backing plate were joined with an Al plate (Al insert material) interposed at the interface was attached to the sputtering apparatus, and various measurements were performed.
- the measurement results are shown in Table 1.
- the sputtering target-backing plate assembly was attached to the sputtering apparatus (the outer periphery of the backing plate was fixed), and cooling water was flowed by applying water pressure from the back surface of the backing plate.
- the displacement amount in this case is the displacement amount when the sputtering target-backing plate assembly is attached to the sputtering apparatus, that is, from the flat state.
- the maximum value of the displacement from the flat state at the time of sputtering OFF was 3.066 mm.
- the maximum value of the displacement from the flat state in sputtering-on was 3.379 mm. These are all average values measured by repeating the above 15 times ON and OFF. And the difference between these Max values was 0.313 mm, and was very small. Note that the maximum value of the displacement when the sputtering was turned off for a long time was 3.307 mm. It shows in Table 1 for reference.
- the fact that the difference between the Max values due to repeated on and off can be reduced means that the distortion of the interface between the target and the backing plate during sputtering is absorbed to suppress the deformation of the target. Even in sputtering with power, uniform film formation is possible, the defect rate is reduced, and the production efficiency can be increased.
- the Max value of displacement from the flat when water cooling and water pressure are removed is 0.1458 mm
- the Max value of displacement from the flat state when the target fixing screw is removed is -0.04945 mm.
- Example 1 An aluminum plate having a thickness of 2 mm was used as the aluminum insert material. However, if the thickness was 1 mm or more and 6 mm or less, the same effect as Example 1 could be obtained.
- Example 2 Next, Example 2 will be described.
- 4N5 (99.995 wt% excluding gas components) high-purity titanium was used as a target material (thickness 0.45 inch, 15.654 inch ⁇ ).
- the backing plate the above-described Cu—Cr alloy (thickness 0.5 inch, 15.654 inch ⁇ ) was used.
- a nickel (Ni) plate (insert) having a thickness of 2 mm was interposed at the bonding interface between the Ti target and the backing plate to obtain a test piece. After the surfaces of these targets and the backing plate were cleaned, they were sealed in a vacuum vessel and HIPed at 300 ° C. and a pressure of 1450 kg / cm 2 for a holding time of 1 hr.
- the adhesive strength was in the range of 3 to 5 kg / mm 2 , and good adhesive strength was obtained. In any sample location, it was possible to achieve a bonding strength of 3 kgf / mm 2 or more, which is a preferable condition of the present invention.
- the thickness of the Ni coating layer at the interface is 2 mm. However, when the layer made of Ni has a thickness of 1 mm or more and 6 mm or less, any suitable adhesive strength is obtained. It was possible.
- the sputtering target-backing plate assembly of this example in which the target and the backing plate were joined with an Ni plate (Ni insert material) interposed at the interface was attached to the sputtering apparatus, and various measurements were performed.
- the measurement results are shown in Table 1.
- the sputtering target-backing plate assembly was attached to the sputtering apparatus (the outer periphery of the backing plate was fixed), and cooling water was flowed by applying water pressure from the back surface of the backing plate.
- the displacement amount in this case is the displacement amount when the sputtering target-backing plate assembly is attached to the sputtering apparatus, that is, from the flat state.
- the maximum value of displacement from the flat state at the time of the sputtering OFF was 3.073 mm.
- the maximum value of the displacement from the flat state in sputtering-on was 3.387 mm. These are all average values measured by repeating the above 15 times ON and OFF. And the difference between these Max values was 0.314 mm, and was very small.
- the maximum value of displacement when sputtering was turned off for a long time was 3.315 mm. It shows in Table 1 for reference.
- the fact that the difference between the Max values due to repeated on and off can be reduced means that the distortion of the interface between the target and the backing plate during sputtering is absorbed to suppress the deformation of the target. Even in sputtering with power, uniform film formation is possible, the defect rate is reduced, and the production efficiency can be increased.
- the Max value of the displacement from the flat when the water cooling and the water pressure are removed is 0.1467 mm
- the Max value of the displacement from the flat state when the target fixing screw is removed is -0.04987 mm. (Minus is a reverse warp, that is, a phenomenon in which the center is slightly recessed).
- Example 2 The temperature at sputtering off was 90.92 ° C., and the temperature at sputtering ON was 408.5 ° C. The difference between the temperature at sputtering off and the temperature at sputtering on was 316.5 ° C.
- a nickel plate having a thickness of 2 mm was used as the nickel insert material. However, if the thickness was 1 mm or more and 6 mm or less, the same effect as in Example 2 could be obtained.
- Example 3 Next, Example 3 will be described.
- 4N5 (99.995 wt% excluding gas components) high-purity titanium was used as a target material (thickness 0.45 inch, 15.654 inch ⁇ ).
- the backing plate the above-described Cu—Cr alloy (thickness 0.5 inch, 15.654 inch ⁇ ) was used.
- the silver (Ag) board (insert) of thickness 2mm was interposed in the joining interface of Ti target and a backing plate, and it was set as the test piece. After the surfaces of these targets and the backing plate were cleaned, they were sealed in a vacuum vessel and HIPed at 300 ° C. and a pressure of 1450 kg / cm 2 for a holding time of 1 hr.
- Example 3 the thickness of the Ag coating layer at the interface is 2 mm. However, when the Ni layer has a thickness of 1 mm or more and 6 mm or less, any suitable adhesive strength is obtained. It was possible.
- the sputtering target-backing plate assembly of this example in which the target and the backing plate were joined with an Ag plate (Ag insert material) interposed at the interface was attached to the sputtering apparatus, and various measurements were performed.
- the measurement results are shown in Table 1.
- the sputtering target-backing plate assembly was attached to the sputtering apparatus (the outer periphery of the backing plate was fixed), and cooling water was flowed by applying water pressure from the back surface of the backing plate.
- the displacement amount in this case is the displacement amount when the sputtering target-backing plate assembly is attached to the sputtering apparatus, that is, from the flat state.
- the Max value of the displacement from the flat state at the time of the sputtering OFF was 3.059 mm.
- the maximum value of the displacement from the flat state in sputtering-on was 3.372 mm. These are all average values measured by repeating the above 15 times ON and OFF. And the difference between these Max values was 0.313 mm, and was very small. Note that the maximum value of the displacement when sputtering was turned off for a long time was 3.299 mm. It shows in Table 1 for reference.
- the fact that the difference between the Max values due to repeated on and off can be reduced means that the distortion of the interface between the target and the backing plate during sputtering is absorbed to suppress the deformation of the target. Even in sputtering with power, uniform film formation is possible, the defect rate is reduced, and the production efficiency can be increased.
- the Max value of displacement from the flat when water cooling and water pressure are removed is 0.1451 mm
- the Max value of displacement from the flat state when the target fixing screw is removed is -0.04921 mm.
- Example 3 a silver plate having a thickness of 2 mm was used as the silver insert material. However, if the thickness was 1 mm or more and 6 mm or less, the same effect as Example 2 could be obtained.
- Comparative Example 1 Comparative Example 1
- 4N5 (99.995 wt% excluding gas components) high-purity titanium was used as a target material (thickness 0.45 inch, 15.654 inch ⁇ ).
- the backing plate the above-described Cu—Cr alloy (thickness 0.5 inch, 15.654 inch ⁇ ) was used. However, no insert was interposed between the Ti target and the backing plate. This test piece was used. After cleaning the surfaces of these targets and the backing plate, they were sealed in a vacuum vessel and subjected to HIP at a temperature of 300 ° C. and a pressure of 1450 kg / cm 2 for a holding time of 1 hr.
- one sample of the sputtering target-backing plate assembly was sampled at the center, two at the 1 / 2R portion, and two at the outer peripheral portion to prepare a tensile test piece. Tensile tests were performed using these samplings. The result of this tensile test was carried out. As a result, the adhesive strength was in the range of 1 to 2 kg / mm 2 and the adhesive strength was poor. In any sample location, it was not possible to achieve a bonding strength of 3 kgf / mm 2 or more, which is a preferable condition of the present invention.
- the sputtering target-backing plate assembly of the comparative example was attached to a sputtering apparatus, and various measurements similar to those in Example 1 were performed. The measurement results are shown in Table 1.
- the sputtering target-backing plate assembly was attached to the sputtering apparatus (the outer periphery of the backing plate was fixed), and cooling water was flowed by applying water pressure from the back surface of the backing plate.
- the displacement amount in this case is the displacement amount when the sputtering target-backing plate assembly is attached to the sputtering apparatus, that is, from the flat state.
- the Max value of the displacement from the flat state at the time of the sputtering OFF was 0.9565 mm as described above.
- the maximum value of the displacement from the flat state when sputtering was turned on was 2.676 mm. These are all average values measured by repeating the above 15 times ON and OFF. The difference between these Max values was 1.7195 mm, and the difference increased, being 5 to 6 times that of the example.
- the amount of displacement between the sputter OFF and the sputter ON is large.
- the large difference between the Max values due to repeated ON and OFF is because the strain at the interface between the target and the backing plate during sputtering cannot be absorbed and the deformation of the target cannot be suppressed.
- uniform film formation cannot be obtained, resulting in an increase in the defect rate and a decrease in production efficiency.
- the maximum value of displacement when sputtering was turned off for a long time was 0.3491 mm. It shows in Table 1 for reference. Thereafter (after sputtering), the Max value of the displacement from the flat when the water cooling and the water pressure are removed is 0.04566 mm, and the Max value of the displacement from the flat state when the target fixing screw is removed is ⁇ 0.04628 mm. (Minus is a reverse warp, that is, a phenomenon in which the center is slightly recessed). The temperature at sputtering off was 90.87 ° C., and the temperature at sputtering ON was 406.4 ° C. And the difference of the temperature in sputtering off and the temperature in sputtering on became 315.5 degreeC.
- Comparative Example 2 Comparative Example 2
- 4N5 (99.995 wt% excluding gas components) high-purity titanium was used as a target material (thickness 0.45 inch, 15.654 inch ⁇ ).
- the backing plate the above-described Cu—Cr alloy (thickness 0.5 inch, 15.654 inch ⁇ ) was used.
- tantalum (Ta) plate insert
- a tantalum (Ta) plate having a thickness of 2 mm was interposed at the bonding interface between the Ti target and the backing plate to obtain a test piece.
- these targets and the backing plate were cleaned, they were sealed in a vacuum vessel and HIPed at 500 ° C. and a pressure of 1450 kg / cm 2 for a holding time of 1 hr.
- one sample of the sputtering target-backing plate assembly was sampled at the center, two at the 1 / 2R portion, and two at the outer peripheral portion to prepare a tensile test piece. Tensile tests were performed using these samplings. The result of this tensile test was carried out. As a result, the adhesive strength was in the range of 7 to 10 kg / mm 2 and the adhesive strength was poor. In any sample location, it was possible to achieve a bonding strength of 3 kgf / mm 2 or more, which is a preferable condition of the present invention.
- the sputtering target-backing plate assembly of the comparative example was attached to a sputtering apparatus, and various measurements similar to those in Example 1 were performed. The measurement results are shown in Table 1.
- the sputtering target-backing plate assembly was attached to the sputtering apparatus (the outer periphery of the backing plate was fixed), and cooling water was flowed by applying water pressure from the back surface of the backing plate.
- the displacement amount in this case is the displacement amount when the sputtering target-backing plate assembly is attached to the sputtering apparatus, that is, from the flat state.
- the Max value of the displacement from the flat state at the time of the sputtering OFF was 0.8946 mm as described above.
- the maximum value of displacement from the flat state when sputtering was turned on was 2.571 mm. These are all average values measured by repeating the above 15 times ON and OFF. And the difference between these Max values was 1.6764 mm, and the difference increased, which was 5 to 6 times that of the example.
- the amount of deformation at the time of sputtering in Comparative Example 2 is slightly smaller than that in Example 1, but this is considered because the sputtering target and the backing plate are diffusion-bonded and firmly bonded.
- the amount of displacement between the sputter OFF and the sputter ON is large.
- the large difference between the Max values due to repeated ON and OFF is because the strain at the interface between the target and the backing plate during sputtering cannot be absorbed and the deformation of the target cannot be suppressed.
- uniform film formation cannot be obtained, resulting in an increase in the defect rate and a decrease in production efficiency.
- the maximum value of the displacement when the sputtering was turned off for a long time was 0.2982 mm. It shows in Table 1 for reference. Thereafter (after sputtering), the Max value of the displacement from the flat when the water cooling and the water pressure are removed is 0.04161 mm, and the Max value of the displacement from the flat state when the target fixing screw is removed is -0.04584 mm. (Minus is a reverse warp, that is, a phenomenon in which the center is slightly recessed). The temperature at sputtering off was 90.99 ° C., and the temperature at sputtering ON was 406.7 ° C. The difference between the temperature at sputtering off and the temperature at sputtering on was 315.7 ° C.
- the target material is Ti and the backing plate is a special material such as a Cu—Cr alloy
- the deformation of the target is suppressed by absorbing the strain at the interface between the target and the backing plate during sputtering. can do.
- uniform film formation can be achieved, and the defective rate can be reduced and production efficiency can be increased.
- a target material made of Ti and a backing plate made of a Cu—Cr alloy are bonded to an interface via a layer made of Ni, Zn, Ag, Cu, Al, Cr, Sn, or an alloy containing these as a main component.
- the sputter target-backing plate assembly absorbs strain at the interface between the target and the backing plate during sputtering and suppresses deformation of the target despite the fact that the target is a special material called Ti, thereby achieving high power. Also in sputtering, there is a great effect that uniform film formation is possible, the defect rate is reduced, and the production efficiency can be increased. In addition, there is no defect at the interface with the copper alloy backing plate with high strength and high thermal conductivity, and since the bonding strength is high, high power sputtering is possible and production efficiency can be increased. Therefore, it is extremely effective in the industry.
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Abstract
Description
また、スパッタリングターゲットとバッキングプレートとの接合面に、同心円状の凹凸を形成し、相互に嵌合した状態で、HIP、ホットプレス、固相拡散接合法によって接合する技術(特許文献2参照)がある。
また、スパッタリングターゲットとバッキングプレートとの間に銅の微粉を介在させ、低温で接合する方法(特許文献4参照)がある。
また、特許文献8には、高純度コバルトと銅合金製バッキングプレートとの拡散接合組立体で、厚さ0.8mm以上のアルミニウム又はアルミニウム合金板のインサート材を介して拡散接合する技術が記載されている。
また、特許文献10には、ターゲットとバッキングプレートをインサート材を介して固相拡散接合する際に、双方又は片方の面を、粗さRa0.01~3.0μmとなるように平坦化処理を施すことが記載されている。
また、特許文献12には、ターゲットとバッキングプレートの間に、銅、アルミニウム又はこれらの合金箔を、挟んでスパッタリングすることが記載されている。
1)Tiターゲットに、Cu-Cr合金製バッキングプレートを接合したスパッタリングターゲット-バッキングプレート接合体であって、TiターゲットとCu-Cr合金製バッキングプレートとの界面に歪吸収材料からなる層を介して接合されていることを特徴とするスパッタリングターゲット-バッキングプレート接合体。
2)スパッタリングをオンにした場合のフラットからの変位の最大値とスパッタリングをオフにした場合のフラットからの変位の最大値との差が1mm以下であることを特徴とする上記1)に記載のスパッタリングターゲット-バッキングプレート接合体。
3)ターゲット-バッキングプレート接合体の接合界面の接着強度が、3kgf/mm2以上であることを特徴とする上記1)又は2)記載のスパッタリングターゲット-バッキングプレート接合体。
5)前記歪吸収材料からなる層が、厚さ1mm以上、6mm以下であることを特徴とする上記1)~4)のいずれか一項に記載のスパッタリングターゲット-バッキングプレート接合体。
6)Cu-Cr合金製バッキングプレート表面が、接合前に予め旋盤で粗加工された面であることを特徴とする上記1)~5)のいずれか一項に記載のスパッタリングターゲット-バッキングプレート接合体。
7)Tiターゲットが、4N5以上の高純度Tiからなることを特徴とする上記1)~9)のいずれか一項に記載のスパッタリングターゲット-バッキングプレート接合体。
9)ターゲット-バッキングプレート接合体の接合界面を拡散させずに、接着強度を3kgf/mm2以上とすることを特徴とする上記11)記載のスパッタリングターゲット-バッキングプレート接合体の製造方法。
多くの場合、スパッタリングターゲットはバッキングプレートに接合し、かつ該バッキングプレートを冷却して、ターゲットの異常な温度上昇を防止し、安定したスパッタリングが可能なように構成されている。
さらに、スパッタリング装置の中で、バッキングプレートを冷却し、このバッキングプレートを介してターゲットにかかる熱衝撃を吸収させている。しかし、その冷却にも限界がある。特に問題となるのは、ターゲットとバッキングプレートとの熱膨張の差異による剥離又はターゲットの変形である。
このような問題の解決のため、バッキングプレートの強度を高める、あるいは材質を変更して熱応力を軽減させる等の対策をとることが考えられるが、ターゲットの材質であるTiとの適合性の問題があり、これまで適切な解決方法が見出されていなかった。
これは、ターゲット材がTiであり、バッキングプレートがCu-Cr合金である場合の固有の問題であることが分かる。このAl層又はAlを主成分とする合金層は、ターゲット及びバッキングプレート双方に拡散接合しておらず、双方に欠陥が発生することがない。これは変形を抑制し、接合強度を高めるために必要なことである。
Al層又はAl合金層の代替品として、Ni、Zn、Ag、Cu、Cr、Sn又はこれらを主成分とする合金からなる層を挙げることができる。実施例にはAl層又はNi層又はAg層について説明しているが、Al、Ni、Agを主成分とする合金、Zn、Cu、Cr、Sn又はこれらを主成分とする合金からなる層でも同等の効果が得られることを確認している。
前記Al又はAlを主成分とする合金からなる層は、下記実施例に示すようにAlを使用できるが、Alを主成分とする合金については、例えば、Al:50wt%以上含有するAl合金、具体的にはCr:20wt%、残部AlからなるAl合金を使用することができる。
次に、実施例1を説明する。テストピースとしては、4N5(ガス成分を除き、99.995wt%)の高純度チタンをターゲット材(厚さ0.45インチ、15.654インチφ)とした。バッキングプレートとしては、上記Cu-Cr合金(厚さ0.5インチ、15.654インチφ)を用いた。
すなわち、TiターゲットとCu-Cr合金バッキングプレートとの界面にAlを被覆し場合、このスパッタリングターゲット-バッキングプレート接合体を、切断、切削する加工の工程で、これらの界面から剥離を生ずることは全く無かった。
この引張試験の結果、接着強度は、3~6kg/mm2の範囲となり良好な接着強度が得られた。いずれのサンプル箇所においても、本願発明の好適な条件である3kgf/mm2以上の接合強度を達成することができた。
本実施例1では、界面のAl被覆層の厚さは、2mmとしたものであるが、Alからなる層が、厚さ1mm以上、6mm以下である場合において、いずれも好適な接着強度をえることが可能であった。
このスパッタリングターゲット-バッキングプレート接合体をスパッタリング装置に取り付け(バッキングプレートの外周を固定)、該バッキングプレートの背面から水圧をかけて冷却水を流した。
以上の実施例1については、アルミインサート材は、2mm厚みを有するアルミニウム板を用いたが、厚さ1mm以上、6mm以下であれば、実施例1と同等の効果を得ることができた。
次に、実施例2を説明する。テストピースとしては、4N5(ガス成分を除き、99.995wt%)の高純度チタンをターゲット材(厚さ0.45インチ、15.654インチφ)とした。バッキングプレートとしては、上記Cu-Cr合金(厚さ0.5インチ、15.654インチφ)を用いた。
すなわち、TiターゲットとCu-Cr合金バッキングプレートとの界面にNiを被覆し場合、このスパッタリングターゲット-バッキングプレート接合体を、切断、切削する加工の工程で、これらの界面から剥離を生ずることは全く無かった。
この引張試験の結果、接着強度は、3~5kg/mm2の範囲となり良好な接着強度が得られた。いずれのサンプル箇所においても、本願発明の好適な条件である3kgf/mm2以上の接合強度を達成することができた。
本実施例2では、界面のNi被覆層の厚さは、2mmとしたものであるが、Niからなる層が、厚さ1mm以上、6mm以下である場合において、いずれも好適な接着強度をえることが可能であった。
このスパッタリングターゲット-バッキングプレート接合体をスパッタリング装置に取り付け(バッキングプレートの外周を固定)、該バッキングプレートの背面から水圧をかけて冷却水を流した。
以上の実施例2については、ニッケルインサート材は、2mm厚みを有するニッケル板を用いたが、厚さ1mm以上、6mm以下であれば、実施例2と同等の効果を得ることができた。
次に、実施例3を説明する。テストピースとしては、4N5(ガス成分を除き、99.995wt%)の高純度チタンをターゲット材(厚さ0.45インチ、15.654インチφ)とした。バッキングプレートとしては、上記Cu-Cr合金(厚さ0.5インチ、15.654インチφ)を用いた。
すなわち、TiターゲットとCu-Cr合金バッキングプレートとの界面にAgを被覆し場合、このスパッタリングターゲット-バッキングプレート接合体を、切断、切削する加工の工程で、これらの界面から剥離を生ずることは全く無かった。
この引張試験の結果、接着強度は、7~10kg/mm2の範囲となり良好な接着強度が得られた。いずれのサンプル箇所においても、本願発明の好適な条件である3kgf/mm2以上の接合強度を達成することができた。
本実施例3では、界面のAg被覆層の厚さは、2mmとしたものであるが、Niからなる層が、厚さ1mm以上、6mm以下である場合において、いずれも好適な接着強度を得ることが可能であった。
このスパッタリングターゲット-バッキングプレート接合体をスパッタリング装置に取り付け(バッキングプレートの外周を固定)、該バッキングプレートの背面から水圧をかけて冷却水を流した。
以上の実施例3については、銀インサート材は、2mm厚みを有する銀板を用いたが、厚さ1mm以上、6mm以下であれば、実施例2と同等の効果を得ることができた。
次に、比較例1を説明する。テストピースとしては、4N5(ガス成分を除き、99.995wt%)の高純度チタンをターゲット材(厚さ0.45インチ、15.654インチφ)とした。バッキングプレートとしては、上記Cu-Cr合金(厚さ0.5インチ、15.654インチφ)を用いた。但し、Tiターゲットとバッキングプレートとの間にインサートは介在させなかった。このテストピースとした。
これらのターゲットとバッキングプレートの表面を清浄した後、真空容器に封入し、温度300°C、圧力1450kg/cm2で、保持時間1hr、HIPした。
この引張試験の結果を実施した。この結果、接着強度は、1~2kg/mm2の範囲となり接着強度は不良となった。いずれのサンプル箇所においても、本願発明の好適な条件である3kgf/mm2以上の接合強度を達成することはできなかった。
この測定結果を表1に示す。このスパッタリングターゲット-バッキングプレート接合体をスパッタリング装置に取り付け(バッキングプレートの外周を固定)、該バッキングプレートの背面から水圧をかけて冷却水を流した。
なお、この場合の変位量は、スパッタリングターゲット-バッキングプレート接合体をスパッタリング装置に取り付け時、すなわちフラット状態からの変位量である。
その後(スパッタリング後)に、水冷、水圧を取り除いたときのフラットからの変位のMax値は0.04566mm、ターゲットの固定ネジを取り除いたときの、フラット状態からの変位のMax値は-0.04628mmであった(マイナスは逆反り、すなわち中央がやや凹む現象である)。
また、スパッタリングオフにおける温度は90.87°C、スパッタリングONにおける温度は406.4°Cであった。そして、スパッタリングオフにおける温度とスパッタリングオンにおける温度の差異は315.5°Cとなった。
次に、比較例2を説明する。テストピースとしては、4N5(ガス成分を除き、99.995wt%)の高純度チタンをターゲット材(厚さ0.45インチ、15.654インチφ)とした。バッキングプレートとしては、上記Cu-Cr合金(厚さ0.5インチ、15.654インチφ)を用いた。
この引張試験の結果を実施した。この結果、接着強度は、7~10kg/mm2の範囲となり接着強度は不良となった。いずれのサンプル箇所においても、本願発明の好適な条件である3kgf/mm2以上の接合強度を達成することができた。
この測定結果を表1に示す。このスパッタリングターゲット-バッキングプレート接合体をスパッタリング装置に取り付け(バッキングプレートの外周を固定)、該バッキングプレートの背面から水圧をかけて冷却水を流した。
なお、この場合の変位量は、スパッタリングターゲット-バッキングプレート接合体をスパッタリング装置に取り付け時、すなわちフラット状態からの変位量である。
比較例2のスパッタリング時の変形量は、実施例1に比べてやや少ないが、これはスパッタリングターゲットとバッキングプレートが拡散接合し、強固に接合されているためと考えられる。
その後(スパッタリング後)に、水冷、水圧を取り除いたときのフラットからの変位のMax値は0.04161mm、ターゲットの固定ネジを取り除いたときの、フラット状態からの変位のMax値は-0.04584mmであった(マイナスは逆反り、すなわち中央がやや凹む現象である)。
また、スパッタリングオフにおける温度は90.99°C、スパッタリングONにおける温度は406.7°Cであった。そして、スパッタリングオフにおける温度とスパッタリングオンにおける温度の差異は315.7°Cとなった。
Claims (9)
- Tiターゲットに、Cu-Cr合金製バッキングプレートを接合したスパッタリングターゲット-バッキングプレート接合体であって、TiターゲットとCu-Cr合金製バッキングプレートとの界面に歪吸収材料からなる層を介して接合されていることを特徴とするスパッタリングターゲット-バッキングプレート接合体。
- スパッタリングをオンにした場合のフラットからの変位の最大値とスパッタリングをオフにした場合のフラットからの変位の最大値との差が1mm以下であることを特徴とする請求項1記載のスパッタリングターゲット-バッキングプレート接合体。
- ターゲット-バッキングプレート接合体の接合界面の接着強度が、3kgf/mm2以上であることを特徴とする請求項1又は2に記載のスパッタリングターゲット-バッキングプレート接合体。
- 前記歪吸収材料がNi、Zn、Ag、Cu、Al、Cr、Sn又はこれらを主成分とする合金であることを特徴とする請求項1~3のいずれか一項に記載のスパッタリングターゲット-バッキングプレート接合体。
- 前記歪吸収材料からなる層が、厚さ1mm以上、6mm以下であることを特徴とする請求項1~4のいずれか一項に記載のスパッタリングターゲット-バッキングプレート接合体。
- Cu-Cr合金製バッキングプレート表面が、接合前に予め旋盤で粗加工された面であることを特徴とする請求項1~5のいずれか一項に記載のスパッタリングターゲット-バッキングプレート接合体。
- Tiターゲットが、4N5以上の高純度Tiからなることを特徴とする請求項1~6のいずれか一項に記載のスパッタリングターゲット-バッキングプレート接合体。
- TiターゲットとCu-Cr合金製バッキングプレートを接合するスパッタリングターゲット-バッキングプレート接合体の製造方法であって、該ターゲット材とバッキングプレートとの界面に、厚さ1mm以上、6mm以下のAl若しくはAlを主成分とする合金からなる層を介在させ、温度400~550°Cで接合することを特徴とするスパッタリングターゲット-バッキングプレート接合体の製造方法。
- ターゲット-バッキングプレート接合体の接合界面を拡散させずに、接着強度を3kgf/mm2以上とすることを特徴とする請求項8記載のスパッタリングターゲット-バッキングプレート接合体の製造方法。
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- 2011-10-25 JP JP2012540860A patent/JP5694360B2/ja active Active
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JPWO2014007151A1 (ja) * | 2012-07-04 | 2016-06-02 | Jx金属株式会社 | スパッタリングターゲット |
CN112589099A (zh) * | 2020-12-15 | 2021-04-02 | 江苏应用元素科技有限公司 | 一种降低多弧铬靶生产成本的方法 |
Also Published As
Publication number | Publication date |
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JPWO2012057106A1 (ja) | 2014-05-12 |
US10006117B2 (en) | 2018-06-26 |
SG189977A1 (en) | 2013-06-28 |
JP5694360B2 (ja) | 2015-04-01 |
US20130220805A1 (en) | 2013-08-29 |
TW201219584A (en) | 2012-05-16 |
TWI504767B (zh) | 2015-10-21 |
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