WO2012035758A1 - Positionneur à plusieurs degrés de liberté, et procédé correspondant - Google Patents

Positionneur à plusieurs degrés de liberté, et procédé correspondant Download PDF

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Publication number
WO2012035758A1
WO2012035758A1 PCT/JP2011/005142 JP2011005142W WO2012035758A1 WO 2012035758 A1 WO2012035758 A1 WO 2012035758A1 JP 2011005142 W JP2011005142 W JP 2011005142W WO 2012035758 A1 WO2012035758 A1 WO 2012035758A1
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WO
WIPO (PCT)
Prior art keywords
degree
driving force
end plate
current
freedom positioning
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Application number
PCT/JP2011/005142
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English (en)
Japanese (ja)
Inventor
良知 塩手
高志 津村
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株式会社山武
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Publication date
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Publication of WO2012035758A1 publication Critical patent/WO2012035758A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1615—Programme controls characterised by special kind of manipulator, e.g. planar, scara, gantry, cantilever, space, closed chain, passive/active joints and tendon driven manipulators
    • B25J9/1623—Parallel manipulator, Stewart platform, links are attached to a common base and to a common platform, plate which is moved parallel to the base
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B25J17/0208—Compliance devices
    • B25J17/0216—Compliance devices comprising a stewart mechanism
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0008—Balancing devices
    • B25J19/0012—Balancing devices using fluidic devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/003—Programme-controlled manipulators having parallel kinematics
    • B25J9/0063—Programme-controlled manipulators having parallel kinematics with kinematics chains having an universal joint at the base
    • B25J9/0069—Programme-controlled manipulators having parallel kinematics with kinematics chains having an universal joint at the base with kinematics chains of the type universal-prismatic-universal

Definitions

  • the present invention relates to a multi-degree-of-freedom positioning device and a multi-degree-of-freedom positioning method using a parallel mechanism mechanism.
  • a micro robot hand is used when performing operations such as supply of semiconductor parts and MEMS (Micro Electro Mechanical Systems) parts and precision mounting.
  • the position and orientation of the micro robot hand are controlled by a multi-degree-of-freedom positioning device using a parallel mechanism mechanism.
  • a base plate and an end plate which is the final output, are connected in parallel by a plurality of links, and a tool or jig for a micro robot hand is attached to the surface of the end plate.
  • Each link is operated by an actuator such as a rotary motor or a linear motor to control the position / posture of the end plate.
  • the multi-degree-of-freedom positioning device configured in this way has (1) large generated force, (2) high rigidity, (3) high-speed operation, and (4) a high degree of freedom can be realized in a compact manner (5 ) Easy control, (6) Good positioning accuracy.
  • Patent Document 1 there is an actuator configured to add a driving force by an air cylinder to a driving force by a linear motor for an actuator that needs to operate at a high load (see, for example, Patent Document 1).
  • Patent Document 1 when the actuator disclosed in Patent Document 1 is applied to a multi-degree-of-freedom positioning device, it is necessary to provide an air cylinder for each link, which complicates the mechanical structure and piping and is not practical. There was a problem.
  • An object of the present invention is to provide a multi-degree-of-freedom positioning device and a multi-degree-of-freedom positioning method capable of suppressing heat generation due to a driving current and ensuring a sufficient driving force when performing work.
  • a multi-degree-of-freedom positioning device includes a plurality of links connected between a base plate and an end plate, an actuator attached to each link and operating the links, and a connection between the base plate and the end plate. And a gravity compensator that supports the weight of the object attached to the end plate and the end plate in a steady position.
  • the multi-degree-of-freedom positioning method includes a position measuring step for measuring the tip position of the own device, and a thrust generated by the gravity compensation device based on the tip position of the own device measured in the position measuring step.
  • a thrust correction calculation step for calculating a thrust correction value for correcting any balance between the weight and the weight, a driving force conversion calculation step for calculating the driving force of the actuator based on the thrust correction value calculated in the thrust correction calculation step,
  • a drive current calculation step for converting the driving force of the actuator calculated in the force conversion calculation step into a current instruction value, a drive current generation step for generating a drive current according to the current instruction value converted in the drive current calculation step, and a drive current A drive step for driving the link to operate according to the drive current generated in the generation step. It is intended to.
  • a plurality of links connected between the base plate and the end plate, an actuator attached to each link and operating the link, and connected between the base plate and the end plate,
  • a position measurement step for measuring the tip position of the own device and a thrust correction for correcting any balance between the thrust generated by the gravity compensation device and the weight based on the tip position of the own device measured in the position measurement step.
  • a thrust correction calculation step for calculating the value a driving force conversion calculation step for calculating the driving force of the actuator based on the thrust correction value calculated in the thrust correction calculation step, and a driving force of the actuator calculated in the driving force conversion calculation step
  • Drive current calculation step for converting the current into a current instruction value, a drive current generation step for generating a drive current according to the current instruction value converted in the drive current calculation step, and a drive according to the drive current generated in the drive current generation step
  • the driving step for operating the link, the end plate is in a steady position. Even if there is a difference between the thrust generated by the gravity compensation device and the weight of the end plate and the object attached to the end plate, it is easy to correct the drive current supplied to each actuator. It can be corrected.
  • FIG. 1 is a schematic diagram showing the configuration of a multi-degree-of-freedom positioning device 1 according to Embodiment 1 of the present invention.
  • a parallel mechanism mechanism used in the multi-degree-of-freedom positioning device 1 a case where the Stewart Platform type in which a plurality of links are linearly moved is shown.
  • the multi-degree-of-freedom positioning device 1 is used for a robot hand, for example, and includes a base plate 2, a plurality of links 3, an end plate 4, and a gravity compensation device 5, as shown in FIG.
  • the base plate 2 is a base for the multi-degree-of-freedom positioning device 1 and is installed horizontally.
  • the link 3 is connected to a predetermined position between the base plate 2 and the end plate 4 via universal joints 3a at both ends.
  • a linear motor (actuator) 6 is attached to each link 3.
  • the linear motor 6 is driven according to a drive current from a current control unit 15 to be described later, and moves the corresponding link 3 linearly.
  • the end plate 4 is controlled to a predetermined position and posture.
  • FIG. 1 shows a case where six links 3 are provided in the multi-degree-of-freedom positioning device 1, the number of links 3 can be appropriately changed according to the degrees of freedom.
  • the end plate 4 has a tool or jig for a robot hand (not shown) attached to the surface of the end plate 4.
  • the gravity compensator 5 supports the end plate 4 at the steady position and the weight of the tool or jig attached to the end plate 4 (hereinafter referred to as the weight of the jig or the like). Etc.
  • the gravity compensator 5 is connected between the center of the base plate 2 and the center of the end plate 4 via universal joints 5a at both ends.
  • the thrust generated by the gravity compensation device 5 is set in advance so as to balance the weight of the jig or the like when the end plate 4 is in the steady position.
  • FIG. 2 is a diagram illustrating a dynamic model of multi-degree-of-freedom positioning device 1 according to Embodiment 1 of the present invention.
  • a viscosity matrix (n ⁇ n), and a stiffness matrix (n ⁇ n) (n is a degree of freedom of the multi-degree-of-freedom positioning device 1)
  • fa is a driving force generated by the multi-degree-of-freedom positioning device 1
  • fd Is an external force (gravity, contact force, etc.).
  • the inertia matrix Ma, the viscosity matrix Da, and the rigidity matrix Ka represent the inertia, viscosity, and rigidity of the link 3 and the linear motor 6 in the orthogonal coordinates of the tip position of the multi-degree-of-freedom positioning device 1.
  • fa ⁇ Mcr ′′ ⁇ Dcr′ ⁇ Kcr + fc (2)
  • Mc, Dc, and Kc are feedback gains of acceleration, speed, and position, respectively, and parameters that are arbitrarily determined.
  • the external force fd is expressed as the following equation (3).
  • fd Mvr ′′ + Dvr ′ + Kvr ⁇ fc (3)
  • Mv, Dv, and Kv are impedances of the dynamic model represented by the following equations (4) to (6).
  • Mv Ma + Mc (4)
  • Dv Da + Dc (5)
  • Kv Ka + Kc (6)
  • the impedance (Mv, Dv, Kv) that determines the response of the mechanical system to the external force fd can be determined. That is, the impedance of the mechanical system can be controlled, and position control and compliance control can be performed.
  • the control system The compliance set value set in step 1 is used as the estimated value.
  • the estimated value ⁇ fd> of the external force is expressed as the following equation (8).
  • ⁇ Fd> ⁇ Ma> r ′′ + ⁇ Da> r ′ + ⁇ Ka> r ⁇ fa (8)
  • ⁇ Ma> is an estimated value of the inertia matrix
  • ⁇ Da> is an estimated value of the viscosity matrix
  • ⁇ Ka> is an estimated value of the stiffness matrix.
  • FIG. 3 is a block diagram showing the configuration of the control system of multi-degree-of-freedom positioning apparatus 1 according to Embodiment 1 of the present invention.
  • the control system of the multi-degree-of-freedom positioning device 1 includes a position sensor 7, a coordinate conversion calculation unit 8, a subtracter 9, an impedance control calculation unit 10, a thrust correction calculation unit 11, an adder 12, and a driving force.
  • the conversion calculation unit 13, the drive current calculation unit 14, the current control unit 15, and the external force estimation calculation unit 16 are configured.
  • the position sensor 7 is attached to each linear motor 6 and measures the tip position (displacement) of the linear motor 6.
  • the position sensor 7 for example, an proximity sensor, a strain cage, a linear encoder, or the like is used.
  • the coordinate transformation calculation unit 8 calculates the apparatus position using the above equations (9) to (11) based on the tip position of each linear motor 6 measured by the position sensor 7.
  • the position sensor 7 and the coordinate transformation calculation unit 8 correspond to the measurement unit of the present invention.
  • the measuring unit is configured to calculate the device position based on the tip position of each linear motor 6. However, when the position sensor can be attached to the end plate 4, the device position is directly measured. You may do it.
  • the subtracter 9 subtracts the device position calculated by the coordinate conversion calculation unit 8 from the target value input from the host controller (robot controller).
  • the impedance control calculation unit 10 calculates the driving force to be generated by the multi-degree-of-freedom positioning device 1 using the above equation (2) based on the difference value calculated by the subtracter 9 and the parameter information. is there.
  • the parameter information is information necessary for the calculation according to the above equation (2), and is a force fc necessary for the work and parameters Mc, Dc, and Kc representing the feedback gain.
  • the thrust correction calculation unit 11 corrects a thrust correction value (driving force) that corrects any balance between the thrust generated by the gravity compensation device 5 and the weight of the jig or the like, which occurs when the end plate 4 moves from the steady position. Is calculated.
  • the thrust correction calculation unit 11 calculates a thrust correction value using the following equation (13) based on the device position calculated by the coordinate conversion calculation unit 8.
  • Thrust correction value xyz component of gravity compensator thrust-weight of jig (13)
  • the gravity compensator thrust is a thrust generated by the gravity compensator 5 and is calculated from the cylinder diameter and the supply air pressure when an air cylinder is used. Further, when a spring mechanism is used, it is calculated from the displacement of the spring based on the device position and the spring constant.
  • the xyz component of the gravity compensation device thrust is calculated from the gravity compensation device thrust and the device position.
  • the adder 12 adds the driving force calculated by the impedance control calculation unit 10 and the thrust correction value calculated by the thrust correction calculation unit 11.
  • the driving force conversion calculation unit 13 calculates the driving force for each linear motor 6 using the above equation (12) based on the driving force added by the adder 12.
  • the driving force calculated by the impedance control calculation unit 10 and the thrust correction calculation unit 11 is a driving force that should be generated by the multi-degree-of-freedom positioning device 1, that is, a driving force at work coordinates (coordinates of the device position). Therefore, the driving force conversion calculation unit 13 converts the driving force at the work coordinates into a driving force for each linear motor 6.
  • the drive current calculation unit 14 converts the drive force for each linear motor 6 calculated by the drive force conversion calculation unit 13 into a current instruction value indicating a current value for driving the linear motor 6.
  • the current control unit 15 generates a drive current according to the current instruction value for each linear motor 6 converted by the drive current calculation unit 14. Thus, the linear motor 6 is driven according to the drive current supplied from the current control unit 15 to operate the link 3.
  • the external force estimation calculation unit 16 is a device position calculated by the coordinate conversion calculation unit 8, a driving force calculated by the impedance control calculation unit 10, an inertia matrix estimated value ⁇ Ma> set in the control system, and a viscosity matrix estimation. Based on the value ⁇ Da> and the estimated value ⁇ Ka> of the stiffness matrix, the estimated external force value ⁇ fd> is calculated using the above equation (8).
  • FIG. 4 is a flowchart showing the operation of the control system of multi-degree-of-freedom positioning apparatus 1 according to Embodiment 1 of the present invention.
  • the measurement unit measures the device position (step ST41, position measurement step).
  • each position sensor 7 measures the tip position of each linear motor 6.
  • the coordinate conversion calculation unit 8 calculates the apparatus position using the above equations (9) to (11) based on the tip position of each linear motor 6 measured by each position sensor 7.
  • the device position signal indicating the device position calculated by the coordinate transformation calculation unit 8 is supplied to the subtracter 9, the thrust correction calculation unit 11, and the external force estimation calculation unit 16.
  • the subtracter 9 subtracts the device position calculated by the coordinate transformation calculation unit 8 from the target value input from the host controller (robot controller) (step ST42).
  • the difference value signal indicating the difference value calculated by the subtracter 9 is supplied to the impedance control calculation unit 10.
  • the impedance control calculation unit 10 calculates the driving force to be generated by the multi-degree-of-freedom positioning device 1 using the above equation (2) based on the difference value calculated by the subtracter 9 and the parameter information. (Step ST43).
  • the device driving force signal indicating the driving force calculated by the impedance control calculation unit 10 is supplied to the adder 12 and the external force estimation calculation unit 16.
  • the thrust correction calculation unit 11 uses the above equation (13) based on the device position calculated by the coordinate conversion calculation unit 8, and calculates the thrust generated by the gravity compensation device 5 and the weight of the jig, etc.
  • a thrust correction value for correcting any of these balances is calculated (step ST44, thrust correction calculation step).
  • the thrust correction value is 0 because the thrust generated by the gravity compensation device 5 is balanced with the weight of the jig or the like.
  • the end plate 4 moves from the steady position, the thrust and the weight are not balanced, and thus a thrust correction value for correcting this deviation is calculated.
  • a thrust correction signal indicating the thrust correction value calculated by the thrust correction calculation unit 11 is supplied to the adder 12.
  • the adder 12 adds the driving force calculated by the impedance control calculation unit 10 and the thrust correction value calculated by the thrust correction calculation unit 11 (step ST45).
  • the added driving force signal indicating the driving force added by the adder 12 is supplied to the driving force conversion calculation unit 13.
  • the driving force conversion calculation unit 13 calculates the driving force for each linear motor 6 based on the driving force added by the adder 12 using the above equation (12) (step ST46, driving force conversion calculation). Step). An actuator driving force signal indicating the driving force for each linear motor 6 calculated by the driving force conversion calculating unit 13 is supplied to the driving current calculating unit 14.
  • the drive current calculation unit 14 converts the drive force for each linear motor 6 calculated by the drive force conversion calculation unit 13 into a current instruction value indicating the value of the current that drives the linear motor 6 (step ST47, drive). Current calculation step).
  • the current command value signal indicating the current command value converted by the drive current calculation unit 14 is supplied to the corresponding linear motor 6.
  • the conversion from the driving force to the current instruction value may be performed based on a predetermined formula, or a conversion table in which the driving force and the current instruction value are associated with each other in advance is created. A table may be used.
  • the current control unit 15 generates a drive current corresponding to the current instruction value converted by the drive current calculation unit 14 (step ST48, drive current generation step).
  • the drive current generated by the current control unit 15 is supplied to the corresponding linear motor 6.
  • the linear motor 6 is driven according to the drive current generated by the current control unit 15 to operate the link 3 (step ST49, drive step). Thereby, the end plate 4 is controlled to a predetermined position and posture.
  • the external force estimation calculation unit 16 includes the device position calculated by the coordinate conversion calculation unit 8, the driving force calculated by the impedance control calculation unit 10, the estimated value ⁇ Ma> of the inertia matrix set in the control system, the viscosity matrix Based on the estimated value ⁇ Da> and the estimated value ⁇ Ka> of the stiffness matrix, the external force estimated value ⁇ fd> is calculated using the above equation (8) (step ST50).
  • the external force estimation value signal indicating the external force estimation value ⁇ fd> calculated by the external force estimation calculation unit 16 is supplied to the host controller.
  • the host controller detects the work state from the estimated external force value calculated by the external force estimation calculation unit 16, confirms the work result, and determines the operation of the robot.
  • the gravity compensator 5 is connected between the center of the base plate 2 and the center of the end plate 4 so that the weight of the jig or the like at the steady position is supported by the gravity compensator 5. Since configured, this weight can be supported with a simple configuration. Further, when the end plate 4 is in the steady position, it is not necessary to support this weight by the linear motor 6, and thus heat generation due to the drive current can be suppressed. In addition, it is possible to ensure a sufficient driving force when performing operations such as component supply and assembly.
  • each linear motor 6 has Since the configuration is such that the supplied drive current is corrected, the deviation can be easily corrected.
  • the base plate 2 is described as being horizontally installed. However, when the base plate 2 is tilted, the calculation is performed in consideration of the tilt angle. It is possible to apply.
  • the error due to the universal joint 5a has been described without any particular mention. However, by calculating the thrust correction value in consideration of the error due to the universal joint 5a, more accurate control can be performed. It can be performed.
  • the multi-degree-of-freedom positioning device and the multi-degree-of-freedom positioning method according to the present invention can support the weight of the end plate and the object attached to the end plate at a steady position with a simple configuration, and the end plate is stationary. In the case of position, since it is not necessary to support the weight with an actuator, heat generation due to driving current can be suppressed, and sufficient driving force can be secured when performing work, so a parallel mechanism mechanism was used. It is suitable for use in a multi-degree-of-freedom positioning device and a multi-degree-of-freedom positioning method.

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Orthopedic Medicine & Surgery (AREA)
  • Manipulator (AREA)
  • Transmission Devices (AREA)
  • Control Of Linear Motors (AREA)

Abstract

La présente invention concerne un dispositif, qui est capable de supporter le poids d'un gabarit ou d'un outil et d'une platine d'extrémité grâce à une configuration simple, qui évite le dégagement de chaleur résultant d'un courant d'entraînement, et qui garantit la puissance motrice pendant l'exécution du travail. Ce dispositif comporte: une pluralité de bielles (3) qui relient entre elles une platine de base (2) et une platine d'extrémité (4); un actionneur (6) qui est fixé à chaque bielle (3) et qui entraîne chaque bielle (3); et un compensateur de gravité (5), qui est monté entre la platine de base (2) et la platine d'extrémité (4), et qui supporte, non seulement le poids de la platine d'extrémité (4) en position stationnaire, mais aussi le poids d'un objet fixé à la platine d'extrémité (4).
PCT/JP2011/005142 2010-09-16 2011-09-13 Positionneur à plusieurs degrés de liberté, et procédé correspondant WO2012035758A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010208017A JP2012061564A (ja) 2010-09-16 2010-09-16 多自由度位置決め装置および多自由度位置決め方法
JP2010-208017 2010-09-16

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015534909A (ja) * 2012-11-14 2015-12-07 コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ 六脚システム
CN110202545A (zh) * 2019-06-21 2019-09-06 中国科学院自动化研究所 一种辅助驱动单元及含该单元的六自由度并联机构
CN114310844A (zh) * 2021-12-17 2022-04-12 中国计量科学研究院 一种用于精密作业的计量集成并联机器人装置
CN114406729A (zh) * 2022-02-21 2022-04-29 复旦大学 一种大转角五自由度并联机构

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JP7002928B2 (ja) * 2017-11-27 2022-01-20 アズビル株式会社 位置決め装置
JP7175212B2 (ja) * 2019-02-07 2022-11-18 Ntn株式会社 重力補償機構付パラレルリンク作動装置
KR102190455B1 (ko) * 2019-07-02 2020-12-11 재단법인대구경북과학기술원 로봇 관절 장치
KR102380237B1 (ko) * 2020-04-14 2022-03-31 한국기계연구원 능동 구동이 가능한 로봇용 툴 결합 장치
CN112847307B (zh) * 2020-12-31 2022-05-17 伯朗特机器人股份有限公司 六轴机器人的反力逆解方法和六轴机器人

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JP2006055973A (ja) * 2004-08-23 2006-03-02 Atsuo Takanishi 自重支持装置及びそれを備えた２足歩行ロボット並びにその制御構造
WO2011114723A1 (fr) * 2010-03-17 2011-09-22 パナソニック株式会社 Robot à biellettes parallèles et procédé d'instruction d'un robot à biellettes parallèles

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JP2000079586A (ja) * 1998-07-07 2000-03-21 Kajima Corp 重量物のハンドリング機構
JP2000120824A (ja) * 1998-10-16 2000-04-28 Seiko Seiki Co Ltd パラレルリンク機構
JP2002027732A (ja) * 2000-07-06 2002-01-25 Shinko Electric Co Ltd リニアアクチュエータ
JP2006055973A (ja) * 2004-08-23 2006-03-02 Atsuo Takanishi 自重支持装置及びそれを備えた２足歩行ロボット並びにその制御構造
WO2011114723A1 (fr) * 2010-03-17 2011-09-22 パナソニック株式会社 Robot à biellettes parallèles et procédé d'instruction d'un robot à biellettes parallèles

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015534909A (ja) * 2012-11-14 2015-12-07 コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ 六脚システム
CN110202545A (zh) * 2019-06-21 2019-09-06 中国科学院自动化研究所 一种辅助驱动单元及含该单元的六自由度并联机构
CN114310844A (zh) * 2021-12-17 2022-04-12 中国计量科学研究院 一种用于精密作业的计量集成并联机器人装置
CN114406729A (zh) * 2022-02-21 2022-04-29 复旦大学 一种大转角五自由度并联机构
CN114406729B (zh) * 2022-02-21 2024-01-26 复旦大学 一种大转角五自由度并联机构

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