WO2012002219A1 - 照射装置 - Google Patents

照射装置 Download PDF

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Publication number
WO2012002219A1
WO2012002219A1 PCT/JP2011/064269 JP2011064269W WO2012002219A1 WO 2012002219 A1 WO2012002219 A1 WO 2012002219A1 JP 2011064269 W JP2011064269 W JP 2011064269W WO 2012002219 A1 WO2012002219 A1 WO 2012002219A1
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WO
WIPO (PCT)
Prior art keywords
mirror
light
fly
eye lens
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2011/064269
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English (en)
French (fr)
Japanese (ja)
Inventor
一吉 山田
小川　大輔
哲国 森川
雅寛 酒井
木村　克己
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwasaki Electric Co Ltd
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Iwasaki Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwasaki Electric Co Ltd filed Critical Iwasaki Electric Co Ltd
Publication of WO2012002219A1 publication Critical patent/WO2012002219A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
    • G01N17/002—Test chambers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S8/00—Lighting devices intended for fixed installation
    • F21S8/006—Solar simulators, e.g. for testing photovoltaic panels
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source

Definitions

  • the present invention relates to a technology that enables irradiation with highly parallel light.
  • a light (hereinafter, referred to as pseudo-sunlight) that reproduces the emission spectrum of natural sunlight for performance measurement of various solar energy utilization devices represented by solar cells and accelerated deterioration tests is a target of the solar energy utilization devices.
  • a pseudo-sunlight irradiation apparatus also referred to as a solar simulator
  • irradiating an irradiation surface see, for example, Patent Document 1.
  • FIG. 5 is a schematic view showing a general optical arrangement of the pseudo-sunlight irradiation apparatus.
  • a straight tube lamp 101 is used as a light source.
  • the anode 101A side needs to be on the upper side, so that the reflecting mirror 102 is usually configured to emit the light flux to the upper side .
  • the sample table 103 on which the sample to be tested is placed is horizontally installed, the light path from the lamp 101 to the sample table 103 is a so-called gated shape (U-shaped downward open).
  • the optical path including the collimation lens 104 and the fly's eye lens 105 is designed such that the parallelism of the light beam at the sample table 103 is ⁇ 1 ° or less when the optical path is gated, the optical path There is a problem that a large useless space is generated inside, and the entire simulated sunlight irradiating apparatus becomes larger than necessary.
  • the collimation lens when a transmission lens such as a collimation lens 104 is used as a collimation optical component that generates parallel light to be irradiated to the sample table 103, when irradiating a large area irradiation area, the collimation lens is a pair of irradiation areas It is necessary to cover the corner length. Therefore, for example, in the case where the irradiation area is a 200 mm square area, the diameter of the collimation lens 104 is approximately 300 mm or more, and there is a problem that not only the enlargement of the optical element is caused but also the manufacturing cost is increased.
  • a collimation reflector may be used as a collimation optical component incorporated in a telescope or measurement instrument.
  • a parabolic mirror is usually used for a collimation reflector in this field, it is time-consuming and expensive to make a parabolic mirror.
  • the present invention has been made in view of the above-described circumstances, and it is an object of the present invention to provide an irradiation device capable of irradiating irradiation light with high parallelism while reducing the size of the device and suppressing the cost of the device.
  • the present invention provides a lamp for emitting light, a condensing reflector for condensing light of the lamp, a fly-eye lens on which a light flux from the condensing reflector is incident, and the fly
  • an irradiation apparatus provided with a collimation optical system for collimating a light flux that has passed through an eye lens and irradiating the irradiated surface with the light flux, a first mirror that reflects the light flux of the focusing reflecting mirror at an acute angle and the first mirror And a second mirror for reflecting the light beam at an acute angle
  • a spherical mirror is provided in the collimation optical system
  • the fly eye lens is disposed in an optical path between the first mirror and the second mirror
  • the second mirror It is characterized in that the spherical mirror reflects the reflected light flux toward the irradiation surface in parallel with the optical axis of
  • the present invention is characterized in that, in the above-mentioned irradiation apparatus, a light flux is incident from the second mirror to the spherical mirror at an incident angle ⁇ 1 in the range of 8 ° to 30 ° with respect to the optical axis of the spherical mirror.
  • the fly-eye lens is irradiated on each of the space between the second mirror and the luminous flux of the reflected light of the spherical mirror and the space between the fly-eye lens and the second mirror.
  • a light shielding plate for shielding stray light directed to the surface is provided.
  • a stop having a diameter smaller than that of the light beam emitted from the fly-eye lens is provided on the light-exit side of the fly eye lens
  • the radius r of the aperture where R is the radius of curvature of r ⁇ R ⁇ tan ( ⁇ / 2) It is characterized by
  • the spread angle ⁇ 2 of the light beam emitted from the fly's eye lens is an absolute value ⁇ of the parallelism ⁇ ⁇ of the irradiation area on the irradiation surface. 2) ⁇ 10 ⁇ ⁇ relationship is satisfied.
  • the first mirror that reflects the light flux of the condensing reflector at an acute angle and the second mirror that reflects the light flux reflected by the first mirror at an acute angle are provided, and a spherical mirror is provided in the collimation optical system.
  • the light path from the condensing reflector to the irradiation surface is M-shaped, and the space between the condensing reflector and the irradiation surface is used as an optical path, and the device can be miniaturized even if it is miniaturized. A long light path can be secured to obtain parallelism. Furthermore, since the collimation optical system is configured to be provided with a spherical mirror, the cost can be reduced because the collimation optical system does not become large in size even when the area of the irradiation surface is wide and it is easy to make as compared to a parabolic mirror. Can.
  • FIG. 1 is a view showing an appearance configuration of a simulated sunlight irradiating apparatus according to an embodiment of the present invention.
  • FIG. 2 is a side view which shows the side of a pseudo sunlight irradiation apparatus with an internal structure.
  • FIG. 3 is a view schematically showing an optical arrangement of the pseudo-sunlight irradiation apparatus.
  • FIG. 4 is a view schematically showing the configuration of the fly's eye lens.
  • FIG. 5 is a view showing an optical arrangement of a conventional simulated sunlight irradiating apparatus.
  • FIG. 1 is a perspective view of the appearance configuration of the simulated sunlight irradiation device 1 according to the present embodiment
  • FIG. 2 is a side view showing the side surface of the simulated sunlight irradiation device 1 together with the internal configuration.
  • the pseudo-sunlight irradiation device 1 has a box-shaped casing 2 having a substantially rectangular shape in side view, and a rectangular plate-shaped stage 3 on which the casing 2 is mounted.
  • a caster 4 which is a wheel for moving the apparatus is provided on the bottom surface of the stage 3, and a hanging metal fitting 5 for lifting and moving the apparatus is provided on the top surface of the housing 2. Further, on the side surface of the housing 2, there are provided open / close doors 6A to 6C for maintaining the inside and a vent 7 for ventilation. Further, a blower fan 8 for introducing cooling air to the inside is provided on the back side of the housing 2. Further, the housing 2 has a shape in which one end of the stage 3 is notched to expose, and the exposed surface of the stage 3 is configured as a sample mounting surface (irradiated surface) 9 on which the sample is to be mounted. The simulated sunlight S is irradiated perpendicularly to the sample mounting surface 9.
  • FIG. 3 is a view schematically showing an optical arrangement of the pseudo-sunlight irradiation apparatus 1.
  • the simulated sunlight irradiating apparatus 1 has a lamp 10 capable of generating simulated sunlight and an elliptical reflecting mirror 11 serving as a condensing reflecting mirror for condensing light of the lamp 10 as shown in FIGS. 2 and 3.
  • the lamp 10 has broad spectrum characteristics in the entire wavelength range, and for example, a xenon lamp or a halogen lamp may be used, but in the present embodiment, a xenon lamp is used.
  • the elliptical reflecting mirror 11 is disposed such that the optical axis K1 is vertically upward, and is inserted and disposed with the lamp 10 standing upright with the anode 10A upwards coaxially with the optical axis K1 of the elliptical reflecting mirror 11 It is done.
  • the lamp 10 and the elliptical reflector 11 are directly air cooled by the blower fan 8.
  • the fly's eye lens 13 is a transmission type integrator optical system, and cancels out the uneven illuminance and uneven color of the light emitted from the device light source 12.
  • the collimation optical system 14 collimates the light flux that has passed through the fly's eye lens 13 and irradiates it onto the sample mounting surface 9.
  • a spherical mirror 16 which is a reflection type optical system is used for the collimation optical system 14.
  • the sample mounting surface 9 has an area in which the irradiation area of the pseudo-sunlight S is at least 150 mm square, a collimation optical system is used for the collimation optical system, thereby providing a collimation optical system.
  • the cost can be reduced. Furthermore, since the spherical mirror 16 is used instead of the elliptical reflecting mirror as the reflection type collimation optical system 14, the production is easy and the cost can be further reduced.
  • the optical path from the apparatus light source 12 to the sample mounting surface 9 is formed in M shape. That is, on the optical axis K1 of the elliptical reflecting mirror 11, a first mirror 20 for reflecting the light flux of the elliptical reflecting mirror 11 at an acute angle ⁇ (FIG. 3) is provided, and of the reflected light reflected by the first mirror 20 A second mirror 22 is provided on the light path L1 and reflects the light flux of the reflected light at an acute angle ⁇ (FIG. 3).
  • the spherical mirror 16 is disposed on the optical path L2 of the reflected light reflected by the second mirror 22, and the fly-eye lens 13 is disposed on the optical path L2 between the first mirror 20 and the second mirror 22. Furthermore, the spherical mirror 16 is disposed such that the simulated sunlight S is reflected along the optical path L3 parallel to the optical axis K1 of the device light source 12.
  • the optical path from the device light source 12 to the sample mounting surface 9 is formed in an M shape, and the space between the device light source 12 and the sample mounting surface 9 is effectively used as an optical path.
  • the fly is made while making the simulated sunlight irradiating device 1 compact. Irregularities in illuminance and color can be sufficiently canceled by the eye lens 13. Further, the parallelism of the simulated sunlight S on the sample mounting surface 9 can be sufficiently increased.
  • a dielectric that converts the spectral characteristics of the light emitted from the device light source 12 into the spectral characteristics of sunlight between the device light source 12 and the fly's eye lens 13 A wavelength conversion filter composed of a multilayer film and a light reduction filter for adjusting the amount of light are arranged.
  • the reflected light of the second mirror 22 is on the optical axis K2 connecting the spherical center (not shown) of the spherical mirror 16 and the mirror apex 30 of the spherical mirror 16.
  • the optical axis of the reflected light of the spherical mirror 16 (quasi sunlight S) are not located, the optical axis of the reflected light of these second mirrors 22 and the reflected light of the spherical mirror 16 (quasi sunlight S)
  • the optical axis of each of the optical systems is an off-axis optical system symmetrically disposed with respect to the optical axis K2.
  • off-axis aberrations (coma aberration, non-focus aberration, distortion aberration, etc.) occur in addition to normal spherical aberration, and the parallelism of the artificial sunlight S is deteriorated as it is.
  • the parallelism of the simulated sunlight S is increased as follows. That is, the spherical mirror 16 and the second mirror 22 are disposed such that the incident angle ⁇ 1 of the reflected light from the second mirror 22 to the spherical mirror 16 (reflection angle of the reflected light of the spherical mirror 16) is in the range of 8 ° to 30 °. doing. More specifically, when the incident angle ⁇ 1 becomes 30 ° or more, the disturbance of the luminous flux of the artificial sunlight S due to the aberration becomes large, and in particular, the direction in which the luminous flux is bent by the reflection at the spherical mirror 16 (arrow X direction in FIG.
  • the parallelism of the luminous flux of the simulated sunlight S is ⁇ 1 ° in the X direction, exceeding ⁇ 1 ° in the Y direction, and conversely, ⁇ 1 ° in the Y direction, in the X direction If it exceeds ⁇ 1 °, the in-plane parallelism of the sample mounting surface 9 can not be ⁇ 1 ° or less.
  • the incident angle ⁇ 1 becomes 8 ° or less
  • the reflected light of the second mirror 22 and the reflected light of the spherical mirror 16 come too close, and the second mirror 22 enters the light flux of the reflected light of the spherical mirror 16
  • a shadow is generated on the mounting surface 9.
  • the incident angle ⁇ 1 of the reflected light is set to 8 ° to 30 °
  • the occurrence of aberration can be suppressed and the parallelism can be made ⁇ 1 ° or less.
  • the second mirror 22 and the sample mounting surface 9 can be brought close to each other as far as possible without causing a shadow on the sample mounting surface 9. Very compact.
  • a light shielding plate 40 for shielding stray light to the sample mounting surface 9 is disposed between the second mirror 22 and the light flux of the reflected light (simulated sunlight S) of the spherical mirror 16.
  • the light shielding plate 40 is disposed adjacent to the second mirror 22 at substantially the same height position, and the upper end 40A extends to the vicinity of the reflected light beam, and the stray light C1 to the sample mounting surface 9 is maximized It is shielded from light.
  • the fly-eye lens 13 in order to prevent stray light C2 which is largely deviated from the optical path L2 and emitted toward the sample mounting surface 9 after being ejected from the fly-eye lens 13, it is also provided between the fly-eye lens 13 and the second mirror 22 (more precisely Between the light emitted from the fly's eye lens 13 and the light reflected from the second mirror 22), and the light shielding plate 42 is disposed.
  • the lower end portion 42A of the light shielding plate 42 extends to the vicinity of the exit light beam of the fly's eye lens 13, whereby the stray light C2 largely deviates from the fly's eye lens 13 toward the sample mounting surface 9 It is shielded from light.
  • the stop 50 for narrowing the luminous flux of the emitted light is provided on the exit side of the fly eye lens 13, and this stop 50 makes parallel on the sample mounting surface 9.
  • the light rays Q1 and Q2 in the outer peripheral portion, which cause the deterioration of the degree, and the light rays which go around the outside of the fly eye lens 13, are cut to prevent the deterioration of the parallelism.
  • the fly-eye lens 13 has an exit surface formed in a rectangular shape in plan view.
  • the stop 50 is configured to narrow the exited light flux of the fly's eye lens 13 with an opening having a radius r smaller than the radius D of the inscribed circle 52 inscribed in the exit surface of the fly's eye lens 13. Cut the light rays Q1 and Q2.
  • the inscribed circle 52 is an inscribed circle of the cross section of the exit light beam at that position.
  • the radius r of the diaphragm 50 is expressed by the following equation (1) It is set to. r ⁇ R ⁇ tan ( ⁇ / 2) (1)
  • the radius r of the diaphragm 50 has the maximum size (R ⁇ tan ( ⁇ / 2)) if the collimation optical system 14 has substantially no aberration, but the spherical mirror 16 has a large aberration. Therefore, a smaller value is set. Further, the parallelism becomes higher as the radius r is smaller, but the utilization efficiency of the light having a condensed diameter is deteriorated. Therefore, it is preferable to determine the radius r in consideration of the utilization efficiency.
  • each of the light beams Q1 and Q2 in the outer peripheral portion reflected by the spherical mirror 16 has the property of traveling in different directions with respect to the light beam Q3 on the optical axis.
  • the divergence angle ⁇ 2 (FIG.
  • the inside of the housing 2 is divided into upper and lower two stages of the lower space 61 and the upper space 62, the starter 63 in the lower space 61, and the optical axis adjustment mechanism 64 of the device light source 12. And other electrical parts and mechanical parts.
  • the above-described various optical components in which the optical path from the device light source 12 to the sample mounting surface 9 is configured in an M shape are disposed.
  • a configuration in which the light emitted from the device light source 12 is directly incident on the fly's eye lens 13 without using the first mirror 20 (a configuration in which the optical path is N-shaped) can be considered. Since 12 is arrange
  • the upper stage side space 62 between the fly eye lens 13 and the second mirror 22, there is a partition wall 67 communicating on the lower end side while partitioning the upper stage side space 62 to the left and right.
  • the partition wall 67 functions as the light shielding plate 42.
  • the bottom surface 68 of the upper side space 62 extends just above the sample mounting surface 9, and an emission opening 69 for passing the reflected light beam (simulated sunlight S) of the spherical mirror 16 is provided at the extended portion. There is.
  • stray light generated inside the housing 2 is transmitted to the sample mounting surface 9 by extending the bottom surface 68 right above the sample mounting surface 9 and extracting light only from the emission opening 69. It is suppressed to reach.
  • the optical path from the device light source 12 to the sample mounting surface 9 is determined by the device light source 12, the first mirror 20, the second mirror 22, and the spherical mirror 16 of the collimation optical system 14. It was configured in an M shape. With this configuration, the space between the device light source 12 and the sample mounting surface 9 is used as an optical path, and a long optical path for obtaining sufficient parallelism is ensured even if the simulated solar light irradiation device 1 is miniaturized. can do.
  • the collimation optical system 14 is not upsized even if the area of the sample mounting surface 9 is large, and it is easier to make as compared to the parabolic mirror. Therefore, the manufacturing cost can be reduced.
  • the second mirror 22 causes the light beam to be incident on the optical axis K2 of the spherical mirror 16 at an incident angle ⁇ 1 in the range of 8 ° to 30 °. did.
  • this configuration it is possible to suppress the occurrence of aberration and make the degree of parallelism ⁇ 1 ° or less while providing the spherical mirror 16 inexpensive and easy to manufacture as the collimation optical system 14.
  • the incident angle ⁇ 1 to 8 ° the second mirror 22 and the sample mounting surface 9 can be brought close to each other as far as possible without causing a shadow on the sample mounting surface 9. Can be miniaturized.
  • the sample is placed from the fly eye lens 13 between the second mirror 22 and the luminous flux of the reflected light of the spherical mirror 16 and between the fly eye lens 13 and the second mirror 22.
  • Light shielding plates 40 and 42 are provided to shield stray light toward the surface 9. With this configuration, stray light to the sample mounting surface 9 can be prevented, and uneven illuminance on the sample mounting surface 9 can be prevented.
  • the stop 50 having a diameter smaller than the exited light flux of the fly's eye lens 13 is provided, and the parallelism of the light flux on the sample mounting surface 9 is ⁇ ⁇ °, Assuming that the radius of curvature of the spherical mirror 16 is R, the radius r of the diaphragm 50 is given by r ⁇ R ⁇ tan ( ⁇ / 2) It was set as According to this configuration, the parallelism of the light flux on the sample mounting surface 9 can be made ⁇ ° or less.
  • the spread angle ⁇ 2 of the light beam emitted from the fly's eye lens 13 is the absolute value ⁇ of the parallelism ⁇ ⁇ ° in the diagonal direction of the irradiation area on the sample mounting surface 9 ( ⁇ 2 / 2) ⁇ 10 ⁇ ⁇ ⁇ ⁇ ⁇ was satisfied
  • the parallelism in the arbitrary direction on the sample mounting surface 9 can be made ⁇ ° or less.
  • the embodiment described above shows only one aspect of the present invention, and any modification and application can be made without departing from the scope of the present invention.
  • the pseudo-sunlight irradiation device is illustrated as an example of the irradiation device, but the present invention is not limited to this, and the irradiation device in any field where irradiation of light with high parallelism to the irradiation surface is required
  • the present invention can be provided.
  • simulated sunlight irradiation device 2 case 9 sample mounting surface (irradiation surface) 10, 101 Lamps 11 Elliptical Reflectors (Condensing Reflectors) 12 apparatus light source 13, 105 fly eye lens 14 collimation optical system 16 spherical mirror 20 first mirror 22 second mirror 40, 42 light shielding plate 52 inscribed circle 103 specimen stage 104 collimation lens C1, C2 stray light K1, K2 optical axis L1 to L3 Light path Q1 to Q3 Ray S Pseudo-sunlight r Radius ⁇ 1 Incident angle ⁇ 2 Spreading angle

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
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  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
PCT/JP2011/064269 2010-06-29 2011-06-22 照射装置 Ceased WO2012002219A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-148327 2010-06-29
JP2010148327A JP2012013459A (ja) 2010-06-29 2010-06-29 照射装置

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140133125A1 (en) * 2012-11-14 2014-05-15 Universita' Degli Studi Dell' Insubria Artificial lighting system for simulating a natural lighting
EP2708807A3 (en) * 2012-09-13 2016-02-17 All Real Technology Co., Ltd. Apparatus for simulating sunlight
CN105822957A (zh) * 2016-05-20 2016-08-03 北华航天工业学院 一种360度向心扫描式太阳模拟器

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JP5928033B2 (ja) * 2012-03-15 2016-06-01 岩崎電気株式会社 光照射装置
JP6089603B2 (ja) * 2012-11-06 2017-03-08 岩崎電気株式会社 疑似太陽光照射装置
KR101452225B1 (ko) * 2013-05-21 2014-10-23 한국건설기술연구원 태양광 시뮬레이터
CN106704898B (zh) * 2015-08-10 2019-11-15 南京理工大学 一种空间结构式太阳模拟器的光路结构
CN108594412B (zh) * 2018-06-14 2020-12-29 苏州大学 一种太阳模拟器
WO2022244702A1 (ja) * 2021-05-17 2022-11-24 凸版印刷株式会社 耐候性試験装置、及び耐候性試験方法
JP7201120B2 (ja) * 2021-05-17 2023-01-10 凸版印刷株式会社 耐候性試験装置、及び耐候性試験方法

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JPS57204425A (en) * 1981-06-11 1982-12-15 Hakko:Kk Artificial light source device with variable intensity
JPH07234181A (ja) * 1994-02-22 1995-09-05 Suga Test Instr Co Ltd 分光照射装置
JPH11258971A (ja) * 1998-01-06 1999-09-24 Sony Corp ホログラフィックステレオグラム作成装置
JP2005099117A (ja) * 2003-09-22 2005-04-14 Dainippon Printing Co Ltd 露光方法及びその方法で用いられる基板のアライメント方法
JP2008194863A (ja) * 2007-02-09 2008-08-28 Mitsubishi Rayon Co Ltd 成形体およびその製造方法
JP2009218009A (ja) * 2008-03-07 2009-09-24 Eko Instruments Trading Co Ltd 光量制御装置、ソーラーシミュレータ

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57204425A (en) * 1981-06-11 1982-12-15 Hakko:Kk Artificial light source device with variable intensity
JPH07234181A (ja) * 1994-02-22 1995-09-05 Suga Test Instr Co Ltd 分光照射装置
JPH11258971A (ja) * 1998-01-06 1999-09-24 Sony Corp ホログラフィックステレオグラム作成装置
JP2005099117A (ja) * 2003-09-22 2005-04-14 Dainippon Printing Co Ltd 露光方法及びその方法で用いられる基板のアライメント方法
JP2008194863A (ja) * 2007-02-09 2008-08-28 Mitsubishi Rayon Co Ltd 成形体およびその製造方法
JP2009218009A (ja) * 2008-03-07 2009-09-24 Eko Instruments Trading Co Ltd 光量制御装置、ソーラーシミュレータ

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2708807A3 (en) * 2012-09-13 2016-02-17 All Real Technology Co., Ltd. Apparatus for simulating sunlight
US20140133125A1 (en) * 2012-11-14 2014-05-15 Universita' Degli Studi Dell' Insubria Artificial lighting system for simulating a natural lighting
US20160281960A1 (en) * 2012-11-14 2016-09-29 Coelux S.R.L. Artificial lighting system for simulating a natural lighting
US10077884B2 (en) * 2012-11-14 2018-09-18 Coelux S.R.L. Artificial lighting system for simulating natural lighting
US10775021B2 (en) * 2012-11-14 2020-09-15 Coelux S.R.L. Artificial lighting system for simulating a natural lighting
CN105822957A (zh) * 2016-05-20 2016-08-03 北华航天工业学院 一种360度向心扫描式太阳模拟器

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