WO2011145880A3 - 전자재료용 세정액 조성물 - Google Patents

전자재료용 세정액 조성물 Download PDF

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Publication number
WO2011145880A3
WO2011145880A3 PCT/KR2011/003673 KR2011003673W WO2011145880A3 WO 2011145880 A3 WO2011145880 A3 WO 2011145880A3 KR 2011003673 W KR2011003673 W KR 2011003673W WO 2011145880 A3 WO2011145880 A3 WO 2011145880A3
Authority
WO
WIPO (PCT)
Prior art keywords
cleaning solution
solution composition
electronic material
compound
water
Prior art date
Application number
PCT/KR2011/003673
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English (en)
French (fr)
Other versions
WO2011145880A2 (ko
Inventor
방순홍
윤효중
홍헌표
김병묵
Original Assignee
동우 화인켐 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 동우 화인켐 주식회사 filed Critical 동우 화인켐 주식회사
Priority to CN201180018645.2A priority Critical patent/CN102834500B/zh
Publication of WO2011145880A2 publication Critical patent/WO2011145880A2/ko
Publication of WO2011145880A3 publication Critical patent/WO2011145880A3/ko

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16—Organic compounds
    • C11D3/37—Polymers
    • C11D3/3746—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
    • C11D3/3757—(Co)polymerised carboxylic acids, -anhydrides, -esters in solid and liquid compositions
    • C11D3/3765—(Co)polymerised carboxylic acids, -anhydrides, -esters in solid and liquid compositions in liquid compositions
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/02—Inorganic compounds
    • C11D7/04—Water-soluble compounds
    • C11D7/06—Hydroxides
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C11D7/3218—Alkanolamines or alkanolimines
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C11D7/3281—Heterocyclic compounds
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/36—Organic compounds containing phosphorus
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces
    • C11D2111/22—Electronic devices, e.g. PCBs or semiconductors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Detergent Compositions (AREA)

Abstract

본 발명은, 조성물 총 중량에 대하여, 염기성 화합물 0.05 내지 20중량%, 수용성 극성유기용매 0.1 내지 40중량%, 유기인산 화합물 0.01 내지 10중량%, 폴리카르복실산계 공중합체 0.01 내지 10중량%, 알칸올아민염 0.001 내지 10중량%, 아졸계 화합물 0.001 내지 10중량% 및 잔량의 물을 포함하는 것을 특징으로 하는 세정액 조성물에 관한 것이다.
PCT/KR2011/003673 2010-05-19 2011-05-18 전자재료용 세정액 조성물 WO2011145880A2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201180018645.2A CN102834500B (zh) 2010-05-19 2011-05-18 用于电子材料的清洁液组合物

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020100046886A KR101799591B1 (ko) 2010-05-19 2010-05-19 전자재료용 세정액 조성물
KR10-2010-0046886 2010-05-19

Publications (2)

Publication Number Publication Date
WO2011145880A2 WO2011145880A2 (ko) 2011-11-24
WO2011145880A3 true WO2011145880A3 (ko) 2012-04-19

Family

ID=44992215

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/003673 WO2011145880A2 (ko) 2010-05-19 2011-05-18 전자재료용 세정액 조성물

Country Status (4)

Country Link
KR (1) KR101799591B1 (ko)
CN (1) CN102834500B (ko)
TW (1) TWI500762B (ko)
WO (1) WO2011145880A2 (ko)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101880305B1 (ko) * 2011-12-16 2018-07-20 동우 화인켐 주식회사 전자재료용 세정액 조성물
KR101880306B1 (ko) * 2011-12-19 2018-07-20 동우 화인켐 주식회사 전자재료용 세정액 조성물
KR101956388B1 (ko) * 2013-03-27 2019-03-08 동우 화인켐 주식회사 사파이어 웨이퍼 세정제 조성물
CN103773630A (zh) * 2013-12-31 2014-05-07 遂宁市广天电子有限公司 一种新型快干型洗网水
CN105368611B (zh) * 2014-08-06 2018-12-07 东友精细化工有限公司 清洁组合物
KR102153087B1 (ko) * 2016-09-29 2020-09-07 주식회사 엘지화학 디스플레이 장치의 기판 세정용 조성물 및 이를 이용한 디스플레이 장치의 제조방법
CN109055026B (zh) * 2018-07-26 2020-10-23 广州华望汽车电子有限公司 一种用于选择性波峰焊喷嘴的保养清洗剂及保养清洗方法
JP2020094152A (ja) * 2018-12-14 2020-06-18 メルク、パテント、ゲゼルシャフト、ミット、ベシュレンクテル、ハフツングＭｅｒｃｋ Ｐａｔｅｎｔ ＧｍｂＨ 基板洗浄液、これを用いる洗浄された基板の製造方法およびデバイスの製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100503231B1 (ko) * 2002-10-22 2005-07-22 주식회사 엘지화학 반도체 및 ｔｆｔ-ｌｃｄ용 세정제 조성물
KR20060127098A (ko) * 2004-02-09 2006-12-11 미쓰비시 가가꾸 가부시키가이샤 반도체 디바이스용 기판 세정액 및 세정방법
KR20080038161A (ko) * 2005-07-21 2008-05-02 가오가부시끼가이샤 박리제 조성물

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3516446B2 (ja) * 2002-04-26 2004-04-05 東京応化工業株式会社 ホトレジスト剥離方法
JP4267359B2 (ja) 2002-04-26 2009-05-27 花王株式会社 レジスト用剥離剤組成物
JP4175540B2 (ja) * 2002-11-13 2008-11-05 花王株式会社 半導体基板製造工程用組成物
CN101373340B (zh) * 2007-08-23 2013-07-10 安集微电子（上海）有限公司 一种光刻胶清洗剂
CN101398638A (zh) * 2007-09-29 2009-04-01 安集微电子（上海）有限公司 一种光刻胶清洗剂
CN101614971B (zh) * 2008-06-27 2013-06-12 安集微电子（上海）有限公司 一种光刻胶清洗剂

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100503231B1 (ko) * 2002-10-22 2005-07-22 주식회사 엘지화학 반도체 및 ｔｆｔ-ｌｃｄ용 세정제 조성물
KR20060127098A (ko) * 2004-02-09 2006-12-11 미쓰비시 가가꾸 가부시키가이샤 반도체 디바이스용 기판 세정액 및 세정방법
KR20080038161A (ko) * 2005-07-21 2008-05-02 가오가부시끼가이샤 박리제 조성물

Also Published As

Publication number Publication date
CN102834500B (zh) 2015-12-02
KR101799591B1 (ko) 2017-12-20
KR20110127421A (ko) 2011-11-25
WO2011145880A2 (ko) 2011-11-24
TWI500762B (zh) 2015-09-21
TW201200592A (en) 2012-01-01
CN102834500A (zh) 2012-12-19

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