WO2011080852A1

WO2011080852A1 - Method and apparatus for manufacturing liquid crystal display panel

Info

Publication number: WO2011080852A1
Application number: PCT/JP2010/005491
Authority: WO
Inventors: 谷川真
Original assignee: シャープ株式会社
Priority date: 2009-12-28
Filing date: 2010-09-07
Publication date: 2011-07-07

Abstract

Disclosed is an apparatus for manufacturing a liquid crystal display panel wherein a polymer having a predetermined structure is formed in a liquid crystal layer (53) by radiating light to the panel (50a) to be processed, on the basis of PSA technologies. The apparatus is provided with a light radiation section (2) or the like that radiates light to stages (51, 52), which are provided on a supporting section (1), and which can apply a voltage to the liquid crystal layer (53), and the panel (50a) attached to the stages (51, 52). A plurality of UV-B fluorescent tubes (21), each of which has a wavelength peak within a range of 300-400 nm and emits light having a wavelength of 300 nm or more, are used as light sources for the light radiation section (2).

Description

Manufacturing method and manufacturing apparatus for liquid crystal display panel

The present invention relates to a method and an apparatus for manufacturing a liquid crystal display panel, and more particularly to a technique (PSA: Polymer Sustained Alignment) for stabilizing the molecular alignment of liquid crystal.

PSA is a technique used to improve the response speed and contrast of a liquid crystal display panel (see, for example, Patent Document 1). In PSA, for example, a polymer layer having a predetermined structure is formed through the following process.

A voltage is applied to the liquid crystal layer containing the liquid crystal material and the photopolymerizable monomer to tilt the liquid crystal molecules to a predetermined pretilt angle. In this state, the liquid crystal layer is irradiated with ultraviolet rays to polymerize the monomer on the alignment film surface, thereby giving a pretilt angle to the liquid crystal material and fixing the alignment. Subsequently, the monomer is polymerized by irradiating ultraviolet rays without applying a voltage, and the monomer in the liquid crystal layer is removed.

Thus, by giving a pretilt angle to the liquid crystal material and fixing the alignment, the alignment operation of the liquid crystal molecules is stabilized, and the response speed and contrast of the liquid crystal display panel can be improved. Conventionally, a series of these processes in PSA is performed using a dedicated manufacturing apparatus equipped with a high-pressure mercury lamp, such as a short arc type or a long arc type.

Regarding the present invention, a high-efficiency ultraviolet irradiation apparatus capable of saving energy and reducing the equipment capacity is known (Patent Document 2). This ultraviolet irradiation apparatus is intended for a roll sheet and uses a fluorescent lamp having an emission spectrum peak between 320 and 380 nm.

JP 2009-53544 A JP-A-5-305259

However, when the series of PSA processes described above are performed using a conventional manufacturing apparatus, there are problems in equipment cost, running cost, installation space, and the like. FIG. 16 shows an example of a short arc type manufacturing apparatus, and FIG. 17 shows an example of a long arc type manufacturing apparatus. In these drawings, 101 is a high-pressure mercury lamp, and 102 is a substrate to be processed.

As shown in FIG. 16, in the case of a short arc type manufacturing apparatus, a complicated optical system mechanism in which a plurality of

mirrors

103, 103,... And a fly-eye lens 104 are combined is necessary. Moreover, it is unsuitable for enlargement. The lamp cost required per 1 KW of a mercury lamp is high, and the running cost is high. Furthermore, when an auxiliary machine is included, a large space is required for installing the manufacturing apparatus, which makes it difficult for the manufacturing apparatus to be installed in a clean room.

As shown in FIG. 17, in the case of a long arc type manufacturing apparatus, a plurality of

mercury lamps

101, 101,... Therefore, the mechanism of the optical system is simple compared to the short arc type, and it is inexpensive and can be increased in size. However, the power consumption is enormous, requiring heat countermeasures and high running costs. Structurally, it is not suitable for downsizing, and it is also disadvantageous in terms of installation space.

In the case of the ultraviolet irradiation apparatus of the cited document 2, when it is applied to PSA, the processing capacity becomes 1/10 or less as compared with the conventional manufacturing apparatus, and thus the productivity is remarkably reduced.

Therefore, an object of the present invention is to provide an apparatus for manufacturing a liquid crystal display panel which is excellent in equipment cost and running cost and is advantageous for downsizing.

The above object can be realized by the manufacturing apparatus shown in this embodiment. Specifically, the manufacturing apparatus of the present embodiment includes a liquid crystal layer including a liquid crystal molecule and a polymer that stabilizes the alignment of the liquid crystal molecule between a pair of substrates, and irradiates the processing target panel with light. An apparatus for manufacturing a liquid crystal display panel in which the polymer is formed, and is provided with a support part and the support part. The panel to be processed is detachably attached to the liquid crystal layer so that a voltage is applied to the liquid crystal layer. And at least one stage that can be applied, and a light irradiation unit that is provided on the support unit and that irradiates light to the processing target panel attached to the stage. The light source of the light irradiation unit includes 300 A plurality of ultraviolet fluorescent tubes having a wavelength peak at ˜400 nm and emitting light with a wavelength of 300 nm or more are used.

According to the manufacturing apparatus having such a configuration, the ultraviolet irradiation process based on the PSA technique can be appropriately and efficiently performed. In addition, by using a predetermined ultraviolet fluorescent tube, the equipment cost and running cost can be suppressed as compared with the conventional manufacturing apparatus, and the installation space can be reduced.

A UV sensor that is provided on the support unit and detects light emitted from the light irradiation unit; and an illuminance control device that is electrically connected to the UV sensor and the plurality of ultraviolet fluorescent tubes. The plurality of ultraviolet fluorescent tubes are arranged side by side in close proximity to each other so as to face the processing target panel attached to the stage, and the illuminance control device performs the light irradiation based on the detection value of the UV sensor. It is preferable that the illuminance of light emitted from the unit is adjusted.

By doing so, each ultraviolet fluorescent tube can be dimmed based on the detection value detected by the UV sensor, so that the illuminance distribution of the ultraviolet rays applied to the processing target panel can be kept uniform.

Further, the light irradiation unit accommodates the plurality of ultraviolet fluorescent tubes, covers a part of the support unit, opens to the cover unit, allows the stage to enter and exit, and the opening A shutter that opens and closes the unit, and the support unit is provided with a plurality of the stages, each of the plurality of stages and the light irradiation unit are provided to be relatively slidable, At least any one of the stages can be configured to enter and exit the cover portion through the opening.

In that case, it is possible to prevent the ultraviolet rays from leaking outside by closing the shutter during the ultraviolet irradiation treatment. And while the ultraviolet irradiation process is performed in any stage, the liquid crystal display panel manufactured in the other stage can be removed or the process target panel to be manufactured next can be attached continuously. A liquid crystal display panel can be manufactured. Therefore, work efficiency can be increased and productivity can be improved.

It is preferable that the plurality of ultraviolet fluorescent tubes be provided so as to be able to swing relative to the stage.

Then, the illuminance distribution can be made even more uniform and a highly accurate liquid crystal display panel can be manufactured.

Further, the above object can be realized by the manufacturing method shown in the present embodiment. Specifically, the manufacturing method according to the present embodiment is a method for manufacturing a liquid crystal display panel in which a liquid crystal layer containing a polymer that stabilizes the alignment of liquid crystal molecules is provided between a pair of substrates. A voltage is applied to the liquid crystal material with respect to the processing target panel in which the liquid crystal material containing the monomer is filled in the gap between them, and the liquid crystal material is irradiated with light in this state to polymerize a part of the monomer. Including a first irradiation forming step and a second irradiation step of irradiating the liquid crystal material with light without applying a voltage to the liquid crystal material, and the light irradiated in the first irradiation step and the second irradiation step. In addition, ultraviolet light having a wavelength peak at 300 to 400 nm and having a wavelength of 300 nm or more is used.

That is, the manufacturing method of the present embodiment relates to an ultraviolet irradiation process using the PSA technique, and appropriate and efficient processing can be realized by using predetermined ultraviolet rays for the ultraviolet irradiation. Equipment costs and running costs can be reduced compared with conventional manufacturing methods, and the installation space can be reduced.

Specifically, using a manufacturing apparatus including a plurality of stages as described above, including a mounting step of attaching a plurality of the processing target panels to any one of the plurality of stages, at least one of the above It is preferable that the mounting process is performed on any other processing target panel while the first irradiation process and the second irradiation process are performed on the processing target panel.

As described above, by performing the mounting operation using the time during which the ultraviolet irradiation is performed, the work efficiency can be improved and the productivity can be improved.

Further, in the first irradiation step and the second irradiation step, it is preferable to perform a process of irradiating the light while swinging a light source.

By doing so, the illuminance distribution can be made uniform, and a highly accurate liquid crystal display panel can be manufactured.

As described above, according to the present invention, it is possible to provide an apparatus for manufacturing a liquid crystal display panel, which is superior in equipment cost and running cost as compared with the prior art, and is advantageous for downsizing.

FIG. 1 is a schematic view showing a partial cross section of the liquid crystal display panel according to the present embodiment. FIG. 2 is a schematic perspective view of the manufacturing apparatus of the present embodiment. FIG. 3 is a schematic view of the inside of the manufacturing apparatus of the present embodiment as viewed from the front. FIG. 4 is a schematic diagram of the stage. (A) is a plan view, (b) is a front view, and (c) is a right side view. FIG. 5 is a schematic view of the light irradiation unit as seen from above. FIG. 6 is a schematic cross-sectional view taken along the line II in FIG. FIG. 7 is a schematic cross-sectional view taken along the line II-II in FIG. FIG. 8 is a diagram showing a spectrum of an ultraviolet fluorescent tube (UV-B fluorescent tube). FIG. 9 is a diagram for explaining the arrangement of the ultraviolet fluorescent tubes. FIG. 10 is a diagram for explaining the function of the illuminance control device. FIG. 11 is a diagram illustrating a result of comparing the power consumption and the like of the example and each comparative example. FIG. 12 is a schematic view showing a modification of the manufacturing apparatus. FIGS. 13A to 13C are views for explaining a manufacturing method in a modification of the manufacturing apparatus. FIG. 14 is a diagram showing a spectrum of a narrow band tube. FIG. 15 is a diagram showing a spectrum of black light. FIG. 16 is a schematic diagram showing a conventional short arc type manufacturing apparatus. FIG. 17 is a schematic diagram showing a conventional long arc type manufacturing apparatus.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the following description is merely illustrative in nature and does not limit the present invention, its application, or its use.

(LCD panel)
In FIG. 1, the liquid crystal display panel 50 manufactured by the manufacturing apparatus and manufacturing method of this embodiment is shown. The liquid crystal display panel 50 is a base of a liquid crystal display, a liquid crystal television, or the like (liquid crystal display device) used for mobile devices such as PCs and mobile phones. The liquid crystal display panel 50 has a rectangular plate-like appearance, and includes a pair of substrates including a first substrate 51 and a second substrate 52, and a liquid crystal layer 53 provided therebetween.

The first substrate 51 includes a first glass substrate 51a, a color filter 51b, a first electrode 51c, a first alignment film 51d, and the like. The color filter 51b, the first electrode 51c, and the first alignment film 51d are provided so as to be laminated on one surface of the first glass substrate 51a in this order. The second substrate 52 includes a second glass substrate 52a, a second electrode 52b, a second alignment film 52c, and the like. The second electrode 52b and the second alignment film 52c are provided so as to be laminated on one side of the second glass substrate 52a in this order.

The first substrate 51 and the second substrate 52 are opposed to each other with a slight gap 54 sealed around the first alignment film 51d and the second alignment film 52c. A liquid crystal layer 53 is provided in the gap 54 between the first substrate 51 and the second substrate 52. The liquid crystal layer 53 contains not only a liquid crystal material and the like, but also a polymer that stabilizes the alignment of liquid crystal molecules. This polymer has a structure that stabilizes the alignment of liquid crystal molecules in the vicinity of the first alignment film 51d and the second alignment film 52c.

This polymer is formed by using the PSA technique and is usually formed by irradiating ultraviolet rays with a dedicated manufacturing apparatus. That is, the gap 54 between the first substrate 51 and the second substrate 52 is filled with a mixture of a liquid crystal material, a monomer, and other chemicals, and the liquid crystal display panel 50 (processing target panel 50a) in a state where no polymer is formed. In other words, the monomer is polymerized by irradiating ultraviolet rays under predetermined conditions to form a polymer.

(Manufacturing equipment)
2 and 3 show the manufacturing apparatus of this embodiment. This manufacturing apparatus is an apparatus used in a process of forming a polymer based on the PSA technique, and is configured to appropriately and efficiently perform ultraviolet irradiation processing on the processing target panel 50a. The manufacturing apparatus includes a support unit 1, a light irradiation unit 2, an illuminance control device 3, a temperature control device 4, and the like, so that the two

processing target panels

50 a and 50 a can be processed continuously.

The support portion 1 has a rectangular box-like appearance that is long to the left and right in FIGS. A transport path 10 extending in the longitudinal direction is formed on the upper surface of the support portion 1, and a plate-like first stage 11 and second stage 12 (both are simply referred to as a stage 11 (12)) on the transport path 10. Say) is installed. The light irradiation unit 2 is installed at approximately the center in the longitudinal direction of the upper surface of the support unit 1 so as to straddle the conveyance path 10. The upper area of the light irradiation unit 2 is formed to be slightly larger than the upper area of the stage 11 (12). In the left and right portions of the light irradiating unit 2 in the support unit 1, an exchange unit 1 a having an upper area slightly larger than the upper area of the stage 11 (12) is provided. Each exchange unit 1a is provided with a backlight 13 that illuminates the upper surface of each exchange unit 1a.

FIG. 4 shows the first stage 11. The stage 11 (12) has a rectangular plate-like appearance in accordance with the shape of the liquid crystal display panel 50. The upper surface of the stage 11 (12) is formed to be slightly larger than the processing target panel 50a. On the upper surface, there is provided an attachment portion 11a that can position and fix the processing target panel 50a with a clamp or the like.

A group of probes 11b arranged in a row is provided on both side portions of the attachment portion 11a in the longitudinal direction. A group of these probes 11b is electrically connected to the first electrode 51c and the second electrode 52b of the processing target panel 50a attached to the attachment portion 11a. A group of these probes 11b is electrically connected to a voltage application unit 5 capable of supplying a controlled voltage (see FIG. 3), and appropriately in the thickness direction with respect to the liquid crystal layer 53 of the processing target panel 50a. It is set so that a voltage can be applied.

A UV sensor 14 is provided at one end of the short side of the stage 11 (12). The UV sensor 14 is supported by the stage 11 (12) so as to be able to slide and move between both ends of the end portion of the stage 11 (12) as indicated by an arrow line. Although details will be described later, the UV sensor 14 detects the illuminance of ultraviolet rays emitted from the light irradiation unit 2. The UV sensor 14 is electrically connected to the illuminance control device 3, and the detection value obtained by the UV sensor 14 is continuously input to the illuminance control device 3.

The structure of the second stage 12 is the same as that of the first stage 11. The first stage 11 and the second stage 12 are installed symmetrically with respect to the support portion 1. Specifically, the first stage 11 and the second stage 12 are arranged on the left side of the support unit 1 with the end portions of the UV sensor 14 facing each other, and the second stage 12 is It is arranged on the right side of the support part 1. The first stage 11 and the second stage 12 are slidable along the conveyance path 10. The first stage 11 and the second stage 12 are controlled to be transported by a transport device (not shown). By performing a predetermined operation, the first stage 11 and the second stage 12 alternate between the exchange unit 1a and the light irradiation unit 2, respectively. To do.

5 to 7 show details of the light irradiation unit 2. This light irradiation part 2 is provided in order to irradiate the process target panel 50a with ultraviolet rays under a predetermined condition to form a polymer. The light irradiation unit 2 includes a plurality of ultraviolet fluorescent tubes 21 and a cover unit 22 as a light source, a shutter 23, a punching plate 24, a reflection plate 25, a quartz plate 26, and the like. The plurality of ultraviolet fluorescent tubes 21, the punching plate 24, the reflection plate 25, and the quartz plate 26 are accommodated in the cover portion 22.

The cover part 22 has a rectangular box-like appearance, and its lower surface is open. The long side of the cover part 22 is arranged in parallel with the long side of the support part 1 and is fixed to the support part 1 so as to cover the upper surface of the support part 1. Opening portions 22a through which the stage 11 (12) can enter and exit are respectively opened along the edges in the lower portions of the end walls across the conveying path 10 in the cover portion 22. Each of the

openings

22a and 22a is provided with a shutter 23, and each opening 22a can be opened and closed.

A plurality of

air inlets

22b, 22b,... Arranged in a line along the edge are opened on each side of the long side on the upper surface of the cover portion 22. A punching plate 24 in which a large number of holes are formed on the entire surface is provided on the upper side of the cover portion 22 with a gap between the cover portion 22 and the upper wall. A reflection plate 25 is installed below the punching plate 24. The reflection plate 25 is composed of a plurality of

partial reflection plates

25a, 25a,. The partial reflectors 25a are arranged side by side with a gap therebetween, with the long side parallel to the short side of the cover portion 22. A plurality of

ultraviolet fluorescent tubes

21, 21,... Serving as a light source are installed below the reflecting plate 25.

The ultraviolet fluorescent tube 21 has a wavelength peak at 300 to 400 nm and emits ultraviolet light having a wavelength of 300 nm or more. Specifically, in this embodiment, what is called a UV-B fluorescent tube is used. Various types of UV-B fluorescent tubes 21 are commercially available and can be easily obtained. As shown in FIG. 8, the UV-B fluorescent tube 21 of the present embodiment has a wavelength peak in the range of about 313 nm and 300 to 320 nm and emits ultraviolet rays having a wavelength of 300 nm or more.

The UV-B fluorescent tube 21 is of a thin tube diameter type such as 15 to 28 mm so that high illuminance can be secured stably. The respective UV-B fluorescent tubes 21 are arranged so as to be lined up close to each other with both ends thereof directed toward the long side of the cover portion 22. A group of UV-

B fluorescent tubes

21, 21,... (Also referred to as UV-B

fluorescent tube groups

21, 21,...) Are closely packed and have a rectangular plate-like appearance. The UV-B

fluorescent tube groups

21, 21,... Are arranged in a layered manner, and are composed of a first layer group 21a and a second layer group 21b disposed above the first layer group 21a.

Specifically, as shown in FIG. 9, each UV-B fluorescent tube 21 in the first layer group 21a and each UV-B fluorescent tube 21 in the second layer group 21b are both tubes of the UV-B fluorescent tube 21. They are adjacent to each other with a gap 21c having the same size as the diameter. Then, the UV-B fluorescence of the first layer group 21a and the second layer group 21b is so arranged that the gap 21c of the first layer group 21a and the UV-B fluorescent tubes 21 of the second layer group 21b overlap each other. The pipe | tube 21 is arrange | positioned in the state shifted laterally. By doing so, the arrangement density of the UV-B fluorescent tubes 21 can be increased, and the intensity and uniformity of the illuminance on the processing target panel 50a can be improved.

The area of the irradiation region of the light source formed by these UV-B fluorescent tubes 21 is set to be at least larger than the upper area of the processing target panel 50a (see FIG. 5). Specifically, a UV-B fluorescent tube 21 that is 50 to 200 mm longer than the short side of the processing target panel 50a is used. The UV-B fluorescent tubes 21 positioned at the ends of the UV-B

fluorescent tube groups

21, 21,... Protrude 2 to 4 outside the respective edges in the longitudinal direction of the processing target panel 50a. Is set to A quartz plate 26 is disposed below the plurality of ultraviolet fluorescent tubes 21.

The peripheral edge of the quartz plate 26 is attached to the inner wall surface of the cover part 22, and the cover part 22 is vertically divided. The quartz plate 26 has a function of preventing temperature rise of the processing target panel 50a and preventing dust from adhering to the processing target panel 50a. As the quartz plate 26, it is preferable to use a quartz plate having a transmittance of 98% or more with respect to ultraviolet rays emitted from the UV-B fluorescent tube 21. In order to improve the illuminance uniformity, fine irregularities may be formed on the surface of the quartz plate 26, and the quartz plate 26 may also be used as a scattering plate.

The temperature control device 4 includes a cover portion 22 and a cold air circulation unit 41. Specifically, one exhaust port 22 c is formed in the approximate center of the upper surface of the cover portion 22, and this exhaust port 22 c is connected to the air intake port 41 a of the cold air circulation unit 41 through the duct 42. The cold air outlet 41 b of the cold air circulation unit 41 is connected to each intake port 22 b of the cover portion 22 via a duct 42. The cold air circulation unit 41 has a function of taking in air from the air inlet 41a and releasing the temperature-controlled cold air from the cold air outlet 41b.

Therefore, during the operation of the manufacturing apparatus, cold air is supplied from the cold air circulation unit 41 to the inside of the cover portion 22 through each intake port 22b. Cold air flows from the electrode portions at both ends of each UV-B fluorescent tube 21 along the surface of the fluorescent tube, and exchanges heat with each UV-B fluorescent tube 21. Therefore, each UV-B fluorescent tube 21 can be cooled uniformly and efficiently. The hot air generated by heat exchange with each UV-B fluorescent tube 21 is rectified by the punching plate 24 through the gap between the reflecting plates 25 and then exhausted from the exhaust port 22c. The exhausted hot air is sent to the cold air circulation unit 41, cooled and circulated and supplied.

Thus, during operation of the manufacturing apparatus, each UV-B fluorescent tube 21 is controlled by the temperature control device 4 so as to be held at a temperature at which the luminous efficiency is highest.

The illuminance control device 3 is provided in order to control the intensity and uniformity of the illuminance of ultraviolet irradiation on the processing target panel 50a. The illuminance control device 3 is electrically connected to the UV sensor 14 and the plurality of UV-B fluorescent tubes 21, and the illuminance of light irradiated from the light irradiation unit 2 based on the detection value input from the UV sensor 14. Adjust automatically.

Since the light source of the light irradiation unit 2 is formed by a plurality of UV-B fluorescent tubes 21, variations in illuminance occur in the irradiation region due to differences in performance and arrangement of the individual UV-B fluorescent tubes 21 To do. For example, each UV-B fluorescent tube 21 in the second layer group 21b is located farther from the processing target panel 50a than each UV-B fluorescent tube 21 in the first layer group 21a, so that the illuminance tends to be small. Therefore, in this manufacturing apparatus, the illuminance is measured and adjusted for each UV-B fluorescent tube 21 so that the illuminance in the irradiation region can be kept uniform.

As indicated by an arrow line in FIG. 10, the UV sensor 14 provided on each stage 11 (12) is moved to the stage 11 (12) when the stage 11 (12) is transported from the replacement unit 1a to the light irradiation unit 2. The UV-B fluorescent tube 21 is scanned one by one while repeatedly sliding between the two ends of (). The UV sensor 14 outputs the detection value thus obtained to the illuminance control device 3. The illuminance control device 3 dimmes each UV-B fluorescent tube 21 based on the detection value input from the UV sensor 14. In this way, for example, the illuminance distribution in the irradiation region can be uniformly controlled so as to be within ± 5%.

The transport device, the illuminance control device 3, the temperature control device 4 and the like can input and change setting conditions by operating a predetermined input unit, and by operating a predetermined operation unit, Automatic operation can be performed so that a series of ultraviolet irradiation processes can be appropriately performed.

(Production method)
Next, a method for manufacturing the liquid crystal display panel 50 using the manufacturing apparatus described above will be described. In the normal state (initial state) manufacturing apparatus, each stage 11 (12) is located in the replacement part 1a. During the operation of the manufacturing apparatus, the illuminance control device 3 and the temperature control device 4 are in an automatic operation state, and each UV-B fluorescent tube 21 is maintained in an optimal light emission state. Under normal conditions, the shutter 23 is closed to prevent the ultraviolet rays from leaking from the cover portion 22.

For example, one processing target panel 50 a is attached to the attachment portion 11 a of the first stage 11. When the predetermined operation unit is operated, the first stage 11 is transported to the light irradiation unit 2. The shutter 23 on the first stage 11 side is opened, and a part of the first stage 11 enters the cover portion 22. At this time, it is preferable to set the illuminance control device 3 so as to reduce the illuminance of each UV-B fluorescent tube 21 in order to ensure safety.

When a part of the first stage 11 enters the inside of the cover part 22 and reaches the irradiation region, the UV sensor 14 scans for each UV-B fluorescent tube 21 to detect illuminance. Each UV-B fluorescent tube 21 is dimmed based on the detected value, and the illuminance distribution in the irradiation region is uniformly controlled. When the entire first stage 11 enters the cover portion 22, the shutter 23 is closed and the first stage 11 is set at a predetermined position inside the cover portion 22.

In this state, the ultraviolet irradiation process based on the PSA technique is automatically performed on the processing target panel 50a attached to the first stage 11. That is, a predetermined voltage is applied to the liquid crystal material from both sides of the liquid crystal layer 53 through the probe 11 b of the first stage 11. In this state, the liquid crystal material is irradiated with ultraviolet rays having a predetermined illuminance, a part of the monomer located in the vicinity of the alignment films 51d and 52c is polymerized, and liquid crystal molecules having a predetermined pretilt angle are fixed (first irradiation step). ). The irradiation time in this step is, for example, about 10 minutes.

Subsequently, the application of voltage is stopped, and in this state, the liquid crystal material is irradiated with ultraviolet rays having a predetermined illuminance to polymerize the remainder of the monomer, thereby reducing the concentration of the remaining monomer (second irradiation step). The irradiation time in this step is, for example, about 2 hours. By doing so, a polymer having a predetermined structure that stabilizes the alignment of liquid crystal molecules is formed in the liquid crystal layer 53, and the liquid crystal display panel 50 can be manufactured. After the irradiation, the first stage 11 is transported from the light irradiation unit 2 to the exchange unit 1a and returns to the initial state. Thereafter, the liquid crystal display panel 50 may be removed from the first stage 11.

In the case of the manufacturing apparatus of the present embodiment, for example, the liquid crystal display panel 50 manufactured previously is replaced with the second stage 12 while the first stage 11 is positioned inside the light irradiation unit 2 and the above-described steps are performed. And the next processing target panel 50a is attached to the second stage 12 (attachment process). If it does so, the 2nd stage 12 can be conveyed from the exchange part 1a to the light irradiation part 2 simultaneously with the 1st stage 11 being conveyed from the light irradiation part 2 to the exchange part 1a, or immediately after that. Therefore, it can process efficiently and can improve processing capacity.

(Example)
FIG. 11 shows a case of using the manufacturing apparatus according to the present embodiment (Example), a case of using a conventional short arc type manufacturing apparatus (Comparative Example 1), and a case of using a conventional long arc type manufacturing apparatus (Comparison). The result of having compared power consumption etc. on the same conditions as Example 2) is shown.

As shown in the figure, the power consumption was 4.7 times in Comparative Example 1 and 21.9 times in Comparative Example 2 with respect to the Example, and the power consumption of the Example was the smallest. Further, the lamp cost was 6.6 times in Comparative Example 1 and 1.9 times in Comparative Example 2 with respect to the example, and the lamp cost of the Example was the lowest. The running cost was 6.2 times in Comparative Example 1 and 5.6 times in Comparative Example 2 with respect to the example, and the running cost of the Example was the lowest.

Therefore, the manufacturing apparatus according to the present embodiment can realize very inexpensive equipment costs and running costs as compared with conventional manufacturing apparatuses of short arc type and long arc type.

Furthermore, the area required for installation of the manufacturing equipment including auxiliary machines is 1.8 times in Comparative Example 1 and 1.5 times in Comparative Example 2 with respect to the Example, and the installation space of the Example is the most. It was small. For example, the presence of the lamp house in Comparative Example 1 and the presence of a large cooling device in Comparative Example 2 affected the increase in installation area.

Therefore, the manufacturing apparatus of the present embodiment can reduce the installation area and effectively utilize the limited space in the clean room, compared to the conventional manufacturing apparatus of the short arc type or the long arc type. Become.

(Modification)
FIG. 12 shows a modification of the manufacturing apparatus. This manufacturing apparatus is further downsized than the above-described manufacturing apparatus. This manufacturing apparatus is different from the above-described manufacturing apparatus in that the first stage 11 and the second stage 12 are fixed to the support unit 1 and the light irradiation unit 2 moves. In the following description, differences from the manufacturing apparatus described above will be described in detail, and the same members and configurations will be denoted by the same reference numerals and description thereof will be omitted.

The support unit 1 of the manufacturing apparatus is configured such that only the left and right replacement parts 1a in the manufacturing apparatus described above are connected. The first stage 11 and the second stage 12 are respectively fixed to the upper surface of the part corresponding to the left and right replacement parts 1a and are adjacent to each other. The light irradiation unit 2 is supported so as to be slidable along the longitudinal direction of the support unit 1. The light irradiation unit 2 is configured to go back and forth between a first irradiation position positioned on the first stage 11 and a second irradiation position positioned on the second stage 12. .

The light irradiating unit 2 of the present manufacturing apparatus includes a light source unit 27 including a UV-B

fluorescent tube group

21, 21,... The light source unit 27 is supported by the cover unit 22 so as to be swingable in a direction parallel to the respective stages 11 (12). The manufacturing apparatus is provided with a rocking device (not shown), and the light source unit 27 is controlled to constantly rock by the rocking device when irradiated with ultraviolet rays. As described above, by swinging the light source unit 27, variation in illuminance distribution can be reduced, and uniformity of illuminance can be improved. Of course, this double structure may also be provided in the previous manufacturing apparatus.

The temperature control device 4 of the present manufacturing apparatus includes a plurality of fan filter units 45 provided in the upper part of the cover portion 22 and a temperature adjustment unit that keeps the temperature of the light source unit 27 constant in cooperation with the fan filter units 45. 46, connected between them, and constituted by

ducts

42 and 42 for circulating cool air and hot air.

Referring to FIG. 13, a manufacturing method using the present manufacturing apparatus will be described. For example, as shown to (a) of the figure, the light irradiation part 2 is located in the 2nd irradiation position, and the ultraviolet irradiation process was performed with respect to the process target panel 50a attached to the 2nd stage 12. FIG. . In the meantime, since there is no light irradiation part 2 on the 1st stage 11, the other process target panel 50a is attached to the attachment part 11a of the 1st stage 11. FIG.

Then, when the ultraviolet irradiation process on the second stage 12 side is completed, the light irradiation unit 2 moves to the first stage 11 side, as shown in FIG. During movement, the light source unit 27 is not oscillated, and the UV sensor 14 scans each UV-B fluorescent tube 21 to detect the illuminance, and the UV-B fluorescent tube 21 is adjusted based on the detected value. Light is done.

When the light irradiation unit 2 is positioned at the first irradiation position, the ultraviolet irradiation process is performed on the processing target panel 50a attached to the first stage 11 this time. In the meantime, since there is no light irradiation part 2 on the 2nd stage 12, the manufactured liquid crystal display panel 50 is removed from the attachment part 11a of the 2nd stage 12, and another process target panel 50a is attached. Thereafter, the liquid crystal display panel 50 can be efficiently manufactured by repeating the same operation.

According to the manufacturing apparatus of this modification, the installation space can be further reduced as compared with the manufacturing apparatus described above. Specifically, when the installation area of the manufacturing apparatus described above is 1, the installation area of the manufacturing apparatus of this modification may be 0.75. Therefore, the limited space in the clean room can be used more effectively.

Note that the manufacturing apparatus and the like according to the present invention are not limited to the above-described embodiment, but also include various other configurations.

For example, the ultraviolet fluorescent tube 21 is not limited to the UV-B fluorescent tube 21 but may be a narrow band tube (narrow band UV-B tube) or a black light. FIG. 14 shows a narrow band tube spectrum, and FIG. 15 shows a black light spectrum.

However, since the black light irradiates ultraviolet rays having relatively long wavelengths having peaks at 334 nm and 356 nm, the narrow band fluorescent tube or the UB-V fluorescent tube 21 that emits ultraviolet rays having a shorter wavelength is preferable. In the case of a narrow band tube, since the tube diameter is larger than that of the UV-B fluorescent tube 21, the UV-B fluorescent tube 21 is more advantageous in that the arrangement density can be easily increased. Further, the UV-B fluorescent tube 21 can have a length exceeding 3000 mm, which is advantageous in that it can be applied to a 10th generation substrate.

The manufacturing apparatus may be configured to increase the number of stages 11 (12) to continuously process three or more processing target panels 50a.

The scanning of the UV sensor 14 may be performed periodically at the start-up of the manufacturing apparatus or during continuous operation, without being performed for each ultraviolet irradiation process.

DESCRIPTION OF SYMBOLS 1 Support part 2 Light irradiation part 3 Illuminance control apparatus 4 Temperature control apparatus 5 Voltage application unit 10 Conveyance path 11 1st stage 12 2nd stage 14 UV sensor 21 Ultraviolet fluorescent tube 22 Cover part 22a Opening part 23 Shutter 41 Cold wind circulation unit 50 Liquid crystal display panel 50a Process target panel 51 First substrate 51c First electrode 52 Second substrate 52b Second electrode 53 Liquid crystal layer 54 Gap

Claims

A liquid crystal display panel having a liquid crystal layer containing a liquid crystal molecule and a polymer that stabilizes the alignment of the liquid crystal molecule between a pair of substrates, and the polymer is formed by irradiating light on the panel to be processed Manufacturing equipment,
A support part;
At least one stage provided on the support portion, to which the panel to be processed is detachably attached and capable of applying a voltage to the liquid crystal layer;
A light irradiation unit that is provided in the support unit and irradiates light to the processing target panel attached to the stage;
With
A manufacturing apparatus in which a plurality of ultraviolet fluorescent tubes that have a wavelength peak at 300 to 400 nm and emit light having a wavelength of 300 nm or more are used as a light source of the light irradiation unit.
The manufacturing apparatus according to claim 1,
A UV sensor that is provided on the support and detects light emitted from the light irradiation unit;
An illuminance control device electrically connected to the UV sensor and the plurality of ultraviolet fluorescent tubes;
Further comprising
The plurality of ultraviolet fluorescent tubes are arranged side by side close to each other so as to face the processing target panel attached to the stage,
The manufacturing apparatus in which the illuminance control device adjusts the illuminance of light emitted from the light irradiation unit based on a detection value of the UV sensor.
In the manufacturing apparatus according to claim 1 or 2,
The light irradiator is
A cover portion that houses the plurality of ultraviolet fluorescent tubes and covers a part of the support portion;
An opening that opens to the cover and allows the stage to enter and exit;
A shutter that opens and closes the opening;
Have
The support unit is provided with a plurality of the stages,
Each of the plurality of stages and the light irradiation unit are provided to be relatively slidable,
A manufacturing apparatus in which at least one of the stages enters and exits the cover through the opening.
The manufacturing apparatus according to any one of claims 1 to 3,
The manufacturing apparatus in which the plurality of ultraviolet fluorescent tubes are provided so as to be swingable relative to the stage.
A liquid crystal display panel manufacturing method in which a liquid crystal layer containing a polymer that stabilizes alignment of liquid crystal molecules is provided between a pair of substrates,
A voltage is applied to the liquid crystal material with respect to a processing target panel in which a liquid crystal material containing a monomer is filled in a gap between a pair of substrates, and light is applied to the liquid crystal material in this state, and a part of the monomer A first irradiation forming step of polymerizing
A second irradiation step of irradiating the liquid crystal material with light without applying a voltage to the liquid crystal material;
Including
A production method in which the light irradiated in the first irradiation step and the second irradiation step uses ultraviolet light having a wavelength peak at 300 to 400 nm and having a wavelength of 300 nm or more.
In the manufacturing method of Claim 5,
The manufacturing apparatus according to claim 3 is used,
An attachment step of attaching a plurality of the processing target panels to any of the plurality of stages,
A manufacturing method in which the attachment step is performed on any other processing target panel while the first irradiation step and the second irradiation step are performed on at least one of the processing target panels.
In the manufacturing method of Claim 5 or Claim 6,
A manufacturing method in which, in the first irradiation step and the second irradiation step, a process of irradiating the light while swinging a light source is performed.