TWI713094B - Ultraviolet ray irradiation apparatus and ultraviolet ray irradiation method - Google Patents

Abstract

The present invention relates to an ultraviolet irradiation device and an ultraviolet irradiation method. The subject of the present invention is to improve the life of the pipe that discharges the heat of the irradiation unit. The ultraviolet irradiation device according to the embodiment includes: an irradiation part capable of irradiating ultraviolet rays to a substrate; an exhaust part having a pipe capable of dissipating heat from the irradiation part; and a moving part, the moving part The irradiation unit and the pipe can be moved synchronously.

Description

Ultraviolet irradiation device and ultraviolet irradiation method

The present invention relates to an ultraviolet irradiation device and an ultraviolet irradiation method.

Fine patterns such as wiring patterns and electrode patterns are formed on glass substrates constituting display panels such as liquid crystal displays. For example, such a pattern can be formed by a method such as photolithography. The photoetching method includes the following processes: a process of coating a resist film on a glass substrate, a process of exposing the resist film, a process of developing the exposed resist film, and irradiation of ultraviolet rays to the developed resist film Iso-light process (cure process).

The above-mentioned curing process can be performed by an ultraviolet irradiation device that irradiates ultraviolet rays to the substrate. For example, Patent Document 1 discloses a configuration including a belt conveying mechanism that conveys a substrate in a horizontal direction, and an ultraviolet irradiation mechanism that irradiates the substrate with ultraviolet rays.

Patent Document 2 discloses a configuration including a substrate holder that holds a substrate, an ultraviolet generation source that irradiates ultraviolet rays to the substrate, and a reflector that changes the irradiation direction of ultraviolet rays emitted from the ultraviolet generation source.

[Prior technical literature] Patent literature

Patent Document 1: Japanese Patent Application Laid-Open No. 4-97515

Patent Document 2: Japanese Patent Application Publication No. 2006-114848

However, in the case of an ultraviolet irradiation device, it is generally considered to move the irradiation part that irradiates the substrate with ultraviolet rays. The irradiating part is connected with a pipe which discharges the heat of an irradiating part. However, with such a configuration, since the pipe is stretched to follow the movement of the irradiating portion when the irradiating portion is moved, an excessive load may be applied to the pipe. Therefore, there is a problem in improving the life of the pipe.

In view of the above-mentioned circumstances, an object of the present invention is to provide an ultraviolet irradiation device and an ultraviolet irradiation method that can increase the life of a pipe that discharges the heat of the irradiation unit.

The ultraviolet irradiation device in one aspect of the present invention includes: an irradiation part capable of irradiating ultraviolet rays to the substrate; an exhaust part having a pipe capable of dissipating heat from the irradiation part; and A moving part capable of synchronously moving the irradiation part and the pipe.

According to the above configuration, the irradiation part and the pipe can be moved synchronously, and therefore, the pipe is not stretched to follow the movement of the irradiation part. In other words, even when moving the irradiator, it is possible to prevent excessive Load. This can increase the life of the pipe.

In the above ultraviolet irradiation device, the exhaust part may further include an exhaust box, which is movably connected to the pipe and extends along the moving direction of the irradiation part, and has An exhaust port that can exhaust heat from the pipe.

According to the above configuration, the pipe can be moved along the longitudinal direction of the exhaust box (which extends along the moving direction of the irradiated portion) while discharging heat from the pipe from the exhaust port. As a result, the pipe can be moved stably, and a hot exhaust passage from the pipe to the exhaust port can be secured.

In the above-mentioned ultraviolet irradiation device, the exhaust part may further include a sheet that extends along the moving direction of the irradiation part, covers the internal space of the exhaust box, and can follow The movement of the pipe moves.

According to the above configuration, the internal space of the exhaust box is covered by the sheet material that moves in accordance with the movement of the pipe. Therefore, it is possible to suppress the heat from the pipe from leaking to the outside. Therefore, it is possible to maintain the efficiency of discharging heat from the piping with a simple configuration using a sheet.

In the above-mentioned ultraviolet irradiation device, the sheet may extend from the connection part of the pipe and the exhaust box to one side and the other side in a manner along the moving direction of the irradiation part, and be connected in a form The ring-shaped method is integrated by the same member.

According to the above-mentioned configuration, the sheet formed in a ring shape can be rotated in the circumferential direction. Therefore, compared with the case where the sheet is formed to extend linearly from the connecting portion to one side and the other side, it is possible to reduce the number of sheets that move with the movement of the pipe. The movement trajectory. Therefore, the device can be miniaturized.

In the above-mentioned ultraviolet irradiation device, the sheet may include a first sheet and a second sheet, and the first sheet may extend from the piping to the exhaust gas along the movement direction of the irradiation unit. The connecting part of the box extends to one side, and the second sheet extends from the connecting part to the other side, and can move synchronously with the first sheet.

According to the above configuration, the second sheet can be moved synchronously with the first sheet, and therefore, the pipe can be moved more stably.

In the ultraviolet irradiation device described above, the sheet may be arranged along the outer periphery of the exhaust box so as to surround the internal space.

According to the above configuration, the movement trajectory of the sheet material that moves with the movement of the pipe can be reduced as much as possible, and therefore, the device can be effectively miniaturized.

In the above ultraviolet irradiation device, the sheet may be a resin sheet.

According to the above-mentioned structure, compared with the case where the sheet is a metal sheet, weight reduction can be achieved. Therefore, the sheet can be moved smoothly with the movement of the pipe. In addition, since oxidation resistance can be exerted, deterioration of components can be suppressed and the life of the sheet can be improved.

In the ultraviolet irradiation device described above, the exhaust portion may further include a tensioner that can adjust the tension of the sheet.

According to the above configuration, when the sheet material moves with the movement of the pipe, it is possible to suppress the sheet material from being excessively stretched or excessively bent. Therefore, the pipe can be moved more stably.

In the above-mentioned ultraviolet irradiation device, the exhaust part may further include a guide plate extending along the moving direction of the irradiation part. The sheet material is stretched and guided, and a through hole is formed through which heat from the pipe can pass.

According to the above configuration, when the sheet material moves along with the movement of the pipe, the heat from the pipe can be discharged from the exhaust port through the through hole of the guide plate while guiding the sheet material. Therefore, the pipe can be moved more stably, and a hot exhaust passage from the pipe to the exhaust port can be secured.

In the above-mentioned ultraviolet irradiation device, the opening area of the through hole at the connecting portion of the pipe and the exhaust box in the guide plate may be greater than the area of the exhaust port.

According to the above configuration, the flow rate of the exhaust gas can be maintained constant before and after the heat (exhaust gas) from the pipe passes through the through hole. Therefore, the temperature of the irradiated part can be maintained constant. Thereby, the illuminance distribution of the ultraviolet rays irradiated from the irradiation unit can be made uniform.

In the ultraviolet irradiation device described above, a plurality of the through holes may be regularly arranged in the guide plate so as to be along the moving direction of the irradiation section.

According to the above configuration, the opening area of the through hole at the connection portion of the pipe and the exhaust box can always be kept constant while the irradiation unit and the pipe are moved synchronously. As a result, the flow rate of exhaust gas can be maintained constant while the irradiation unit and the pipe are moved synchronously, and therefore, the temperature of the irradiation unit can be maintained constant. Therefore, it is possible to make the illuminance distribution of the ultraviolet rays irradiated from the irradiation part uniform at all times.

In the above-mentioned ultraviolet irradiation device, the exhaust portion may further include a flow rate adjustment portion that can be adjusted based on the temperature of the irradiation portion. To reduce the flow rate of gas passing through at least a part of the pipe and the exhaust box.

According to the above configuration, the flow rate of exhaust gas can be adjusted to suit the temperature of the irradiation unit, and therefore, the illuminance distribution of the ultraviolet rays irradiated from the irradiation unit can be made more uniform.

In the above-mentioned ultraviolet irradiation device, the moving part may include a common driving source, and the common driving source can move the irradiation part and the pipe synchronously.

According to the above-mentioned configuration, the irradiation unit and the pipe can be moved in a unified manner. Therefore, compared with the case where the irradiation unit and the pipe are moved independently, the device configuration can be simplified.

The above-mentioned ultraviolet irradiation device may further include a housing section capable of housing the substrate in a sealed space, the irradiation section, the exhaust section, and the moving section are provided outside the housing section, and the moving The part causes the irradiation part and the pipe to move synchronously outside the housing part.

According to the above configuration, the substrate in the receiving section can be irradiated with ultraviolet rays while moving the irradiation section and the piping outside the receiving section while the substrate is stationary inside the receiving section with a closed space. Therefore, there is no need to consider accompanying substrates. The movement produces particles. In addition, since the irradiation unit and the piping are moved outside the accommodating section, even if particles are generated accompanying the movement of the irradiating section and the piping, by making the accommodating section a closed space, it is possible to prevent the particles from entering the accommodating section. Therefore, the generation of particles in the accommodating portion can be suppressed, and the substrate can be kept clean.

In addition, by moving the irradiating part and the arrangement while the substrate is stationary Therefore, even if a substrate with a plan view size larger than that of the irradiation part and piping is used, compared with the case where the substrate is moved while the irradiation part and the piping are stationary, the space required for irradiating the substrate with ultraviolet rays can be saved, which can reduce Small setting area (footprint).

In addition, by forming the substrate in a stationary state in the accommodating part, the accommodating part only needs to ensure a accommodating space for the substrate. Therefore, compared with the case where the substrate is moved in the accommodating part, the volume of the accommodating part can be reduced. It is easy to manage the oxygen concentration and dew point in the storage area. In addition, the consumption of nitrogen used when adjusting the oxygen concentration in the storage portion can be reduced.

The ultraviolet irradiation method in one aspect of the present invention is an ultraviolet irradiation method using the following ultraviolet irradiation device, the ultraviolet irradiation device comprising: an irradiation section capable of irradiating ultraviolet rays to the substrate; and an exhaust section, The exhaust part has a pipe capable of discharging heat from the irradiation part, and the ultraviolet irradiation method includes a moving step of synchronously moving the irradiation part and the pipe.

According to the above method, the irradiation part and the pipe can be moved synchronously, and therefore, the pipe is not stretched so as to follow the movement of the irradiation part. That is, even when the irradiation unit is moved, it is possible to suppress the application of excessive load to the pipe. Therefore, the life of the pipe can be increased.

The ultraviolet irradiation method described above may further include a flow rate adjustment step that adjusts the flow rate of the gas passing through at least a part of the pipe and the exhaust box based on the temperature of the irradiating part, the exhaust box The piping is connected in a movable manner and extends along the moving direction of the irradiating part, and has the ability to discharge from the piping The hot exhaust port.

According to the above method, the flow rate of the exhaust gas can be adjusted to suit the temperature of the irradiation unit, and therefore, the illuminance distribution of the ultraviolet rays irradiated from the irradiation unit can be made more uniform.

The above-mentioned ultraviolet irradiation method may further include a housing section capable of housing the substrate in a closed space, the irradiation section and the exhaust section are provided outside the housing section, and the moving step causes the irradiation The part and the pipe move synchronously outside the receiving part.

According to the above method, the substrate in the receiving section can be irradiated with ultraviolet rays while moving the irradiation section and the piping outside the receiving section while the substrate is stationary inside the receiving section with a closed space. Therefore, there is no need to consider accompanying substrates. The movement produces particles. In addition, since the irradiation unit and the piping are moved outside the accommodating section, even if particles are generated accompanying the movement of the irradiating section and the piping, by making the accommodating section a closed space, it is possible to prevent the particles from entering the accommodating section. Therefore, the generation of particles in the accommodating portion can be suppressed, and the substrate can be kept clean.

In addition, by moving the irradiation part and the pipe while the substrate is stationary, even if a substrate with a plan view size larger than the irradiation part and the pipe is used, compared to the case of moving the substrate while the irradiation part and the pipe are stationary. It is also possible to save the space required when irradiating ultraviolet rays to the substrate and to reduce the occupied space.

In addition, by forming the substrate in a stationary state in the accommodating part, the accommodating part only needs to ensure a accommodating space for the substrate. Therefore, compared with the case where the substrate is moved in the accommodating part, the volume of the accommodating part can be reduced. It is easy to manage the oxygen concentration and dew point in the storage area. In addition, the consumption of nitrogen used when adjusting the oxygen concentration in the storage portion can be reduced.

According to the present invention, it is possible to provide an ultraviolet irradiation device and an ultraviolet irradiation method that can increase the life of a pipe that discharges heat from an irradiation unit.

1‧‧‧Ultraviolet radiation device

10‧‧‧Substrate

11‧‧‧Heating mechanism

2‧‧‧ Chamber (Containment Department)

20‧‧‧Top plate

20h‧‧‧Opening

21‧‧‧ Zhoubi

21a‧‧‧PCB loading and unloading exit

22‧‧‧Bottom plate

23‧‧‧Transmission Department

25‧‧‧Lifting mechanism

25a‧‧‧Lift pin

25b‧‧‧Drive source

3‧‧‧Working table

31‧‧‧Bracket

31a‧‧‧wheel

4‧‧‧ Irradiation unit

4a‧‧‧irradiated surface

40‧‧‧ Irradiation Department

41‧‧‧Condensing component

5‧‧‧Transportation mechanism (moving department)

50‧‧‧Guide (drive source)

51‧‧‧Guide

52‧‧‧Slider

53‧‧‧Pedestal

54‧‧‧Door frame

54a‧‧‧doorpost

54b‧‧‧Connecting part

54c‧‧‧Retention Department

6‧‧‧Exhaust

60‧‧‧Piping

61‧‧‧Exhaust Box

61a‧‧‧First bottom wall

61b‧‧‧Second bottom wall

61c‧‧‧Wall

61d‧‧‧Guide Wall

61e‧‧‧The first next door

61f‧‧‧Second next door

61s‧‧‧Internal space

62‧‧‧Cable support member

63h‧‧‧Exhaust port

64‧‧‧Guide Board

64h‧‧‧through hole

65‧‧‧Moving part (connecting part)

65a‧‧‧Base

65b‧‧‧Main body

65c‧‧‧Connecting part

68‧‧‧Flow control section

7‧‧‧Gas Supply Department

70‧‧‧Sheet

70a‧‧‧One end

70b‧‧‧The other end

71~76‧‧‧The first roll ~ the sixth roll

77‧‧‧First cover

78‧‧‧Second cover

79‧‧‧Tensioner

8‧‧‧Control Department

170A‧‧‧First sheet

170B‧‧‧Second sheet

S1‧‧‧Exhaust area

S2‧‧‧The opening area of the through hole

[Fig. 1] is a perspective view of the ultraviolet irradiation device in the embodiment.

[Fig. 2] is a plan view of the ultraviolet irradiation device in the embodiment.

[FIG. 3] is a side view of the ultraviolet irradiation device in the embodiment including the III-III cross-sectional view of FIG. 2.

[Figure 4] is a perspective view of the exhaust part in the embodiment.

[Figure 5] is a plan view of the exhaust part in the embodiment.

[Fig. 6] is a side view of the exhaust portion in the embodiment including the VI-VI cross section of Fig. 5.

[Fig. 7] is a cross-sectional view taken along the line VII-VII in Fig. 5.

[Fig. 8] is a cross-sectional view taken along the line VIII-VIII in Fig. 6.

[Fig. 9] is a side view showing a modification of the exhaust part in the embodiment.

[Fig. 10] is a side view showing another modification of the exhaust portion in the embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, an XYZ rectangular coordinate system is set, and the positional relationship of each member will be described with reference to the XYZ rectangular coordinate system. Let the predetermined direction in the horizontal plane be the X direction, the direction perpendicular to the X direction in the horizontal plane be the Y direction, and the directions perpendicular to the X direction and the Y direction (that is, the vertical direction) are the Z direction.

<Ultraviolet Irradiation Device>

Fig. 1 is a perspective view of an ultraviolet irradiation device 1 in an embodiment. FIG. 2 is a plan view of the ultraviolet irradiation device 1 in the embodiment. Fig. 3 is a side view of the ultraviolet irradiation device in the embodiment including the III-III cross-sectional view of Fig. 2.

As shown in FIGS. 1 to 3, the ultraviolet irradiation device 1 is a device that irradiates the substrate 10 with ultraviolet rays. The ultraviolet irradiation device 1 has a chamber 2 (receiving part), a stage 3, an irradiation unit 4, a transport mechanism 5 (moving part), an exhaust part 6, a gas supply part 7, and a control part 8. The control unit 8 collectively controls the components of the ultraviolet irradiation device 1.

<Chamber>

The chamber 2 accommodates the substrate 10 subjected to ultraviolet irradiation processing. The chamber 2 is formed in a box shape and becomes a rectangular shape in a plan view. Specifically, the chamber 2 is formed by the following elements: a top plate 20 that covers the top of the substrate 10 and is in the shape of a rectangular plate; and a peripheral wall 21 that covers the peripheral wall 21 in a surrounding manner The side surface of the substrate 10 is in the shape of a rectangular frame; and a bottom plate 22 that covers the bottom of the substrate 10. On the −Y direction side of the peripheral wall 21, a substrate carrying-in and carrying-out port 21 a is provided for carrying the substrate 10 into and out of the chamber 2.

For example, the top plate 20, the peripheral wall 21, and the bottom plate 22 are formed of a light shielding member that shields ultraviolet rays. This can prevent ultraviolet rays from permeating to the outside of the chamber 2 when the substrate 10 in the chamber 2 is irradiated with ultraviolet rays.

The chamber 2 is configured to be able to accommodate the substrate 10 in a closed space. For example, by seamlessly connecting the connecting portions of the top plate 20, the peripheral wall 21, and the bottom plate 22 by welding or the like, the airtightness in the chamber 2 can be improved. For example, a decompression mechanism (not shown) such as a pump mechanism may be provided in the chamber 2. Thereby, the substrate 10 can be housed in a state where the pressure in the chamber 2 is reduced.

As shown in FIG. 3, a heating mechanism 11 for heating the substrate 10 may be provided in the chamber 2. The heating mechanism 11 has a rectangular plate shape with a plan view size substantially the same as that of the substrate 10 and is arranged to support the substrate 10 from below. The heating mechanism 11 is installed on the table 3. The heating mechanism 11 includes a heater and the like (not shown).

As shown in FIG. 2, a transmissive part 23 that can transmit ultraviolet rays is provided on the ceiling 20 of the chamber 2. The transmissive part 23 constitutes a part of the top plate 20. The transmission part 23 is formed in a rectangular plate shape smaller than the top plate 20 in a plan view. The transmissive part 23 is attached to a rectangular opening 20h that opens the top plate 20 in the thickness direction. For example, quartz, heat-resistant glass, resin sheet, resin film, etc. are used for the transmission part 23.

The size of the transmissive part 23 is set to be larger than the size of the substrate 10. by Therefore, when the substrate 10 is irradiated with ultraviolet rays, the ultraviolet rays can be prevented from being blocked by the light-shielding portion (parts other than the transmissive portion 23) of the top plate 20, and therefore, the entire upper surface of the substrate 10 can be uniformly irradiated with ultraviolet rays.

It should be noted that the size of the opening 20h can be set to a size that allows the substrate 10 to be inserted and taken out. In addition, the transmissive portion 23 may be detachably fitted into the opening 20h. Thus, when the transmissive part 23 is fitted into the opening 20h, the inside of the chamber 2 can be made a sealed space. When the transmissive part 23 is detached from the opening 20h, the substrate 10 can be put into the chamber 2 or from the cavity Take out from room 2.

<Workbench>

The workbench 3 supports the chamber 2 and the transport mechanism 5 by the upper surface. The table 3 is formed in a plate shape having a thickness in the Z direction.

The workbench 3 is supported by a bracket 31 from below.

The bracket 31 is formed by combining a plurality of prisms such as steel materials into a lattice shape.

It should be noted that a plurality of wheels 31a are rotatably attached to the lower end of the bracket 31. Thereby, the holder 31 can be moved freely in the XY plane.

<Lifting mechanism>

As shown in FIG. 3, below the chamber 2, a lifting mechanism 25 is provided, and the lifting mechanism 25 can move the substrate 10 in the Z direction. A plurality of lift pins 25 a are provided on the lift mechanism 25. Multiple lift pins The tip of 25a (the end on the +Z side) is arranged in the same plane parallel to the XY plane.

The top ends of the plurality of lift pins 25a are provided so as to be able to pass through the table 3, the bottom plate 22, and the heating mechanism 11.

Specifically, a plurality of insertion holes 3a are formed in the table 3, and the plurality of insertion holes 3a open the table 3 in the thickness direction. A plurality of insertion holes 22a are formed in the bottom plate 22, and the plurality of insertion holes 22a are located at positions overlapping the respective insertion holes 3a in a plan view, and the bottom plate 22 is opened in the thickness direction. A plurality of insertion holes 11 a are formed in the heating mechanism 11, and the plurality of insertion holes 11 a are located at positions overlapping the respective insertion holes 22 a in a plan view, and the heating mechanism 11 is opened in the thickness direction. The tips of the plurality of lift pins 25a are provided so as to be able to abut and move away from the lower surface of the substrate 10 via the insertion holes 3a, 22a, and 11a. Therefore, the top ends of the plurality of lift pins 25a support the substrate 10 in a manner parallel to the XY plane.

The lifting mechanism 25 supports the substrate 10 accommodated in the chamber 2 and moves it in the Z direction in the chamber 2. In FIG. 3, the tips of the plurality of lift pins 25a abut the lower surface of the substrate 10 via the insertion holes 3a, 22a, 11a, and the substrate 10 is raised, thereby showing that the substrate 10 is removed from the heating mechanism 11 The state of leaving.

It should be noted that, in the elevating mechanism 25, a drive source 25b is arranged outside the chamber 2, and the drive source 25b raises and lowers the plurality of elevating pins 25a. Therefore, even if particles are generated as the driving source 25b is driven, by making the chamber 2 a closed space, it is possible to prevent the particles from entering the chamber 2.

<Irradiation Unit>

The irradiation unit 4 is provided outside the chamber 2. The irradiation unit 4 has an irradiation unit 40 and a condensing member 41.

The irradiation unit 40 is configured to be able to irradiate the substrate 10 with ultraviolet rays such as i-rays.

Here, "ultraviolet rays" means light whose lower limit of the wavelength range is about 1 nm and the upper limit of the short wavelength end of visible rays.

For example, the irradiation unit 40 uses a metal halide lamp.

It should be noted that the irradiation unit 40 is not limited to this, and a high-pressure mercury lamp or an LED lamp may be used. In addition, for the irradiation unit 40, multiple types of the above-mentioned lamps may be combined.

For example, a filter may be provided on the lower surface of the irradiating part 40, and the filter may block components having a wavelength below 300 nm. As a result, the wavelength of the ultraviolet rays emitted through the filter becomes 300 nm or more, and therefore, it is possible to suppress an excessive increase in the temperature of the substrate 10 due to the irradiation of ultraviolet rays.

The condensing member 41 condenses the ultraviolet rays emitted from the irradiation unit 40 onto the substrate 10. By condensing the ultraviolet rays on the substrate 10, it is possible to suppress the ultraviolet rays emitted from the irradiation section 40 from diffusing to the outside of the substrate 10, and therefore, the illuminance can be improved.

<Transportation mechanism>

As shown in FIGS. 1 and 2, the transport mechanism 5 is provided outside the chamber 2. The transport mechanism 5 moves the irradiation unit 4 outside the chamber 2 so that the substrate 10 accommodated in the chamber 2 is irradiated with ultraviolet rays from the outside of the chamber 2. The transport mechanism 5 has a guide 50, a base 53 and a door frame 54. The transport mechanism 5 is configured to be able to move the irradiation unit 40 and the pipe 60 of the exhaust unit 6 in synchronization.

The guide 50 has a pair of guide rails 51 and a slider 52. For example, the guide 50 uses a linear motor driver. The guide part 50 is a common driving source that can move the irradiating part 40 and the pipe 60 of the exhaust part 6 in synchronization. The guide unit 50 corresponds to the “drive source” described in the request.

The pair of guide rails 51 extend in the X direction that is the movement direction of the irradiation unit 4 (the movement direction of the irradiation unit 40) so as to sandwich the chamber 2 from the −Y direction side and the +Y direction side.

The slider 52 is configured to be slidable along the pair of guide rails 51.

The base 53 is provided at the four corners of the table 3, and a plurality of bases 53 are provided (for example, one at each of the four corners in this embodiment, a total of four). Each base 53 supports both ends of the pair of rails 51 in the X direction.

The door frame 54 is formed in a door shape so as to straddle the chamber 2 in the Y direction, and is provided to be movable along a pair of guide rails 51. The door frame 54 has a pair of door pillar portions 54a extending in the Z direction, and a connecting portion 54b extending in the Y direction to connect the pair of door pillar portions 54a. A slider 52 is attached to the lower end of each door pillar portion 54a of the door frame 54.

As shown in FIG. 3, in the inside of the connection part 54b of the door-shaped frame 54, the holding part 54c which holds the irradiation unit 4 is provided. The holding portion 54c forms a recessed portion recessed upward from the lower surface of the middle portion of the door frame 54 in the Y direction. The portion of the irradiation unit 4 other than the irradiation surface 4 a (lower surface) is surrounded by the recess of the holding portion 54 c and covered by the wall portion of the door frame 54. For example, the door frame 54 is formed of a light shielding member that shields ultraviolet rays. As a result, from the irradiation list When the element 4 is irradiated with ultraviolet rays, it is possible to prevent the ultraviolet rays from spreading to the side surface of the door frame 54 and to irradiate the ultraviolet rays downward (the substrate 10 in the chamber 2).

As shown in Fig. 2, in the X direction, the length L1 of each guide rail 51 is longer than the length L2 of the chamber 2 (L1>L2). In this embodiment, in the X direction, the length L1 of each guide rail 51 is greater than the length L2 of the chamber 2 and the double length (2×L3) of the door frame 54 plus the length (L2+2×L3) Longer. As a result, in a plan view, the irradiation unit 4 can be moved from a region beyond the −X direction end of the chamber 2 to a region beyond the +X direction end of the chamber 2.

<Gas supply part>

A gas supply part 7 is provided in the chamber 2, and the gas supply part 7 can adjust the state of the internal atmosphere of the chamber 2. The gas supply unit 7 supplies inert gases such as nitrogen (N ₂ ), helium (He), and argon (Ar) as dry gas.

The gas supply part 7 can adjust the dew point of the internal atmosphere of the chamber 2 and the water concentration in the chamber 2 can be adjusted.

For example, the gas supply unit 7 adjusts the supply of dry gas to adjust the dew point of the internal atmosphere of the chamber 2 to -80°C (moisture concentration is 0.54 ppm by mass) and -5°C (moisture concentration is 4000 ppm by mass) Under the benchmark) below.

For example, in the atmosphere at the time of curing a prepattern after exposure of the resist film, by setting the dew point to be below the ideal upper limit as described above, the curing of the pattern can be facilitated. On the other hand, by making Setting the dew point above the ideal lower limit can improve the workability of the operating device.

In addition, the gas supply unit 7 can also adjust the oxygen concentration of the internal atmosphere of the chamber 2. The lower the oxygen concentration (based on quality) of the internal atmosphere of the chamber 2, the better. Specifically, it is preferable that the oxygen concentration of the internal atmosphere of the chamber 2 be 1000 ppm or less, and it is more preferable that the oxygen concentration of the internal atmosphere of the chamber 2 be 500 ppm or less.

For example, in the atmosphere at the time of curing the pre-pattern after exposure of the resist film, by setting the oxygen concentration to be the ideal upper limit or less as described above, the pattern can be easily cured.

<Exhaust part>

FIG. 4 is a perspective view of the exhaust part 6 in the embodiment. FIG. 5 is a plan view of the exhaust part 6 in the embodiment. FIG. 6 is a side view of the exhaust part 6 in the embodiment including the VI-VI cross section of FIG. 5. Fig. 7 is a cross-sectional view taken along the line VII-VII in Fig. 5. Fig. 8 is a cross-sectional view taken along the line VIII-VIII in Fig. 6. It should be noted that in FIGS. 5 and 8, for convenience of description, illustration of the sheet 70 is omitted.

As shown in FIG. 1, the exhaust part 6 is provided outside the chamber 2. The exhaust part 6 is arranged on the +Y direction side of the table 3. The exhaust part 6 has a pipe 60 capable of discharging the heat of the irradiation unit 4 (irradiation part 40) and an exhaust box 61 that is movably connected to the pipe 60.

Although not shown in the figure, a cooling part capable of cooling the irradiation unit 4 is provided outside the chamber 2. For example, the cooling part is installed on the door frame 54 The side wall part (doorpost part 54a). For example, the cooling part uses a blower. Thereby, the hot gas generated by the irradiation unit 4 can be discharged to the outside via the exhaust portion 6 (specifically, the pipe 60 and the exhaust box 61).

<Piping>

As shown in FIGS. 1 and 4, the pipe 60 is a cylindrical member that spans between the side wall portion (door pillar portion 54a) on the +Y direction side of the door frame 54 and the movable portion 65 described later extend. The pipe 60 is bent in an L shape. One end portion 60a (end portion on the -Y direction side) of the pipe 60 is fixed to the side wall portion (doorpost portion 54a) of the door frame 54 on the +Y direction side. The other end 60b (end on the −Z direction side) of the pipe 60 is fixed to the movable portion 65 described later. Thereby, the pipe 60 can move in the X direction outside the chamber 2 together with the irradiation unit 40.

It should be noted that one end portion 60 a of the pipe 60 is detachably connected to the side wall portion on the +Y direction side of the door frame 54. As a result, the maintainability of the one end 60a of the pipe 60 can be improved.

<Exhaust Box>

L1)。 As shown in FIGS. 2 and 4, the exhaust box 61 extends in the X direction which is the movement direction of the irradiation unit 4 (the movement direction of the irradiation unit 40 ). The exhaust box 61 has an exhaust port 63h that can discharge heat from the pipe 60 to the outside. In the X direction, the length L4 of the exhaust box 61 is substantially the same as the length L1 of each guide rail 51 (L4

L1).

As shown in Figures 5 to 7, the exhaust box 61 has a first bottom wall 61a, a Two bottom walls 61b, a pair of side walls 61c, a pair of guide walls 61d, a first partition wall 61e, and a second partition wall 61f.

The first bottom wall 61a has a thickness in the Z direction and extends in the X direction.

The second bottom wall 61b is arranged at a position closer to the -Z direction side than the first bottom wall 61a, and has substantially the same shape as the first bottom wall 61a.

The pair of side walls 61c have a thickness in the Y direction and extend in the X direction, and are erected in the +Z direction from both ends of the second bottom wall 61b in the Y direction to separate the first bottom wall 61a and the second bottom wall 61b The ends are connected in the Y direction and then further extend in the +Z direction.

The pair of guide walls 61d has a thickness in the Z direction, extends in the X direction, and protrudes inward between the upper ends of the pair of side walls 61c in the Y direction.

The first partition wall 61e has a thickness in the X direction, and is arranged so as to straddle between the end portions on the +X direction side of the first bottom wall 61a and the pair of side walls 61c. That is, the first partition wall 61e seals the internal space 61s of the exhaust box 61 from the +X direction side.

The second partition wall 61f faces the first partition wall 61e so as to be separated by an interval of the length L4 (see FIG. 2) of the exhaust box 61 in the X direction. The second partition wall 61f has substantially the same shape as the first partition wall 61e, and is arranged so as to straddle between the first bottom wall 61a and the end portions on the -X direction side of the pair of side walls 61c. That is, the second partition wall 61f seals the internal space 61s of the exhaust box 61 from the -X direction side.

It should be noted that the internal space 61s of the exhaust box 61 is composed of the first A space surrounded by a bottom wall 61a, a pair of side walls 61c, a first partition wall 61e, a second partition wall 61f, and a guide plate 64 described later.

As shown in FIGS. 6 and 7, between the first bottom wall 61 a and the second bottom wall 61 b, a bottom wall side space 61 t in which the sheet material 70 can be moved in the X direction is formed. The interval of the bottom wall side space 61 t in the Z direction is larger than the thickness of the sheet 70. That is, the interval of the bottom wall side space 61t in the Z direction is set to a size that enables the sheet 70 to smoothly move between the first bottom wall 61a and the second bottom wall 61b.

As shown in FIGS. 5 and 6, the pair of guide walls 61d supports the movable portion 65 (which supports the pipe 60) in a slidable manner. The distance between the pair of guide walls 61d in the Y direction is greater than the length in the Y direction of the formation area of the through hole 64h formed in the guide plate 64 described later.

A cylindrical exhaust pipe 63 forming an exhaust port 63h is fixed to the wall portion on the +Y direction side of the pair of side walls 61c. The exhaust pipe 63 communicates with the internal space 61 s of the exhaust box 61.

As shown in FIG. 4, a cable support member 62 is provided in the lower part of the exhaust box 61. For example, the cable support member 62 is CABLE BEAR (registered trademark). Cables (cables) such as power cords (not shown) are guided to the cable support member 62. Thereby, the exhaust part 6 can be driven in the state which bent the cable.

<Sheet>

As shown in FIGS. 4 and 6, the exhaust portion 6 further has a sheet 70 covering the internal space 61 s of the exhaust box 61. Sheet 70 along The writing is extended in the X direction of the movement direction of the irradiation unit 4 (the movement direction of the irradiation unit 40). The sheet 70 is configured to be able to move with the movement of the pipe 60.

Specifically, the sheet 70 moves from the movable part 65 which is the connection part of the piping 60 and the exhaust box 61 to one side along the X direction, which is the moving direction of the irradiation unit 4 (the moving direction of the irradiation part 40). The (-X direction side) and the other side (+X direction side) extend, and are connected in a ring shape and are integrally formed by the same member. The sheet 70 is arranged along the outer periphery of the exhaust box 61 so as to surround the internal space 61s. For example, the sheet 70 is a resin sheet.

As shown in FIGS. 5 and 6, the exhaust portion 6 has a plurality of (for example, six in this embodiment) rolls (specifically, a first roll 71, a second roll 72, The third roller 73, the fourth roller 74, the fifth roller 75, and the sixth roller 76). The sheet 70 is wound on two rollers (specifically, the first roller 71 and the second roller 72) on the +X direction side of the exhaust box 61. The sheet 70 is wound on four rollers (specifically, the third roller 73, the fourth roller 74, the fifth roller 75, and the sixth roller 76) on the −X direction side of the exhaust box 61.

The exhaust part 6 further has a first cover 77 and a second cover 78.

The first cover 77 covers the first roller 71 and the second roller 72, and rotatably supports the first roller 71 and the second roller 72. The first cover 77 is formed in a box shape that is open toward the -X direction side, and is detachably attached to each wall of the exhaust box 61 (specifically, the second bottom wall 61b, the pair of side walls 61c, and the pair of guide The end of the wall 61d) on the +X direction side. Thus, the maintenance of the inside of the first cover 77 (for example, the first roller 71 and the second roller 72) can be improved. Sex.

The second cover 78 covers the third roller 73, the fourth roller 74, the fifth roller 75, and the sixth roller 76, and rotatably supports the third roller 73, the fourth roller 74, the fifth roller 75, and the sixth roller 76 . The second cover 78 is formed in a box shape that opens to the +X direction side, and is detachably attached to each wall of the exhaust box 61 (specifically, the second bottom wall 61b, the pair of side walls 61c, and the pair of guide The end of the wall 61d) on the -X direction side. Thereby, the maintainability of the inside of the second cover 78 (for example, the third roller 73, the fourth roller 74, the fifth roller 75, and the sixth roller 76) can be improved.

<Tensioner>

The exhaust part 6 further has a tensioner 79 that can adjust the tension of the sheet 70. The tensioner 79 is arranged on both sides of the second cover 78 in the Y direction. The tensioner 79 can move the fifth roller 75 located between the fourth roller 74 and the sixth roller 76 closer to and away from the fourth roller 74 and the sixth roller 76 arranged at intervals in the X direction. For example, when the fifth roller 75 is brought close to the fourth roller 74 and the sixth roller 76, the tension of the sheet 70 can be weakened. On the other hand, when the fifth roller 75 is moved away from the fourth roller 74 and the sixth roller 76, the tension of the sheet 70 can be increased.

<movable part>

As shown in FIGS. 5 and 6, the movable portion 65 has a base portion 65a, a main body portion 65b, a connecting portion 65c, and a pair of guide pieces 65d.

As shown in FIG. 6, the base portion 65a is arranged on a guide plate 64 described later And the guide wall 61d. The base portion 65a has a thickness in the Z direction and has a rectangular frame shape in a plan view. That is, a through hole 65h (which allows heat from the pipe 60 to pass through) is formed in the base portion 65a so as to open in the Z direction. The through hole 65h communicates with the internal space 61s of the exhaust box 61 via the through hole 64h of the guide plate 64.

The main body portion 65b is connected to the peripheral portion of the through hole 65h in the base portion 65a. In the cross-sectional view of FIG. 6, the main body portion 65b has a cylindrical shape extending in the Z direction so that the opening area becomes smaller toward the +Z direction side.

The connecting portion 65c has a cylindrical shape extending in the +Z direction from the main body portion 65b. The other end 60b of the pipe 60 is detachably connected to the connecting portion 65c (see FIG. 4). Thereby, the maintainability of the other end 60b of the pipe 60 and the connection part 65c can be improved.

The pair of guide pieces 65d extend from the main body portion 65b to both sides in the Y direction, and extend in the X direction so as to follow the guide wall 61d. The pair of guide pieces 65d are arranged so as to sandwich the guide wall 61d between them and both ends of the base portion 65a in the Y direction.

A first locking portion 66 is provided at an end portion on the +X direction side of the base portion 65a, and the first locking portion 66 detachably locks one end portion 70a of the sheet 70. A second lock portion 67 is provided at the end portion on the −X direction side of the base portion 65a, and the second lock portion 67 detachably locks the other end portion 70b of the sheet 70.

Hereinafter, an example of the arrangement method of the sheet 70 will be described. First, the one end 70a of the sheet 70 is locked to the end on the +X direction side of the base portion 65a via the first locking portion 66. Then, the 70 rolls of sheets are hung on The first roller 71 and the second roller 72. Then, after the sheet 70 is passed through the bottom wall side space 61t from the other end portion 70b side, it is wound around the third roller 73, the fourth roller 74, the fifth roller 75, and the sixth roller 76. Then, the other end 70b of the sheet 70 is locked to the end of the base portion 65a in the −X direction via the second locking portion 67. Then, the tension of the sheet 70 is adjusted by the tensioner 79. In the above manner, the sheet 70 is connected in a ring shape via the movable portion 65, and is arranged to surround the internal space 61s.

<Guide Board>

As shown in FIG. 6, the exhaust portion 6 further has a guide plate 64 that guides the sheet 70. The guide plate 64 has a thickness in the Z direction, and extends in the X direction which is the moving direction of the irradiation unit 4 (the moving direction of the irradiation section 40). The guide plate 64 has a through hole 64h through which heat from the pipe 60 can pass.

As shown in FIG. 5, in a plan view, the through hole 64h is formed in a circular shape. A plurality of through holes 64 h are regularly arranged in the guide plate 64 along the X direction and the Y direction, which are the moving direction of the irradiation unit 4 (the moving direction of the irradiation unit 40 ). For example, the guide plate 64 is punching rmetal.

As shown in FIGS. 6 and 8, the opening area S2 of the through hole 64h at the connecting portion (that is, the movable portion 65) between the pipe 60 and the exhaust box 61 in the guide plate 64 is greater than the area S1 of the exhaust port 63h. Here, the opening area S2 of the through hole 64h refers to the through hole 64h that is only exposed from the through hole 65h in a plan view among the through holes 64h formed in the entire guide plate 64 The opening area. The area S1 of the exhaust port 63h refers to the opening area of the exhaust pipe 63.

It should be noted that, for convenience of description, the illustration of a pair of guide pieces 65d and the like is omitted in FIG. 8.

<Flow control section>

As shown in FIG. 4, the exhaust part 6 further has a flow rate adjustment part 68 which can adjust the flow rate of the gas which passes through at least a part of the pipe 60 based on the temperature of the irradiation part 40 (refer FIG. 1). The flow rate adjustment unit 68 is provided on the pipe 60. For example, the flow rate adjustment unit 68 is a flow rate adjustment valve.

<Ultraviolet radiation method>

Next, the ultraviolet irradiation method in this embodiment will be explained. In this embodiment, the above-mentioned ultraviolet irradiation device 1 is used to irradiate the substrate 10 with ultraviolet rays. The operations performed by each part of the ultraviolet irradiation device 1 can be controlled by the control unit 8.

The ultraviolet irradiation method in this embodiment includes a storing step, an irradiation step, and a moving step.

In the storing step, the chamber 2 stores the substrate 10 in a closed space. For example, the substrate 10 is transported into the chamber 2 through the substrate carry-in/out port 21a, and then the substrate carry-in/out port 21a is closed, and the chamber 2 is hermetically sealed.

In the irradiation step, the irradiation unit 4 irradiates the substrate 10 with ultraviolet rays.

In the moving step, the transport mechanism 5 makes the irradiation unit 4 outside the chamber 2 The part moves so that the substrate 10 contained in the chamber 2 is irradiated with ultraviolet rays from the outside of the chamber 2.

In the moving step, the irradiation unit 4 and the pipe 60 are moved synchronously. In the moving step, the irradiation unit 4 is moved outside the chamber 2 so that the substrate 10 inside the chamber 2 is irradiated with ultraviolet rays through the transmission part 23. As described above, since the pipe 60 is attached to the side wall of the door frame 54 on the +Y direction side, the pipe 60 is moved outside the chamber 2 together with the irradiation unit 4 in the moving step.

In the moving step, the irradiation unit 4 is moved back and forth between the -X direction end (one end) and the +X direction end (the other end) of the pair of rails 51. For example, in the plan view of FIG. 3, the irradiation unit 4 is reciprocated from an area exceeding the −X direction end of the chamber 2 to an area exceeding the +X direction end of the chamber 2.

The ultraviolet irradiation method in this embodiment further includes a flow adjustment step.

In the flow rate adjustment step, the flow rate adjustment unit 68 adjusts the flow rate of the gas passing through at least a part of the pipe 60 based on the temperature of the irradiation unit 40.

It should be noted that the ultraviolet irradiation method in this embodiment further includes a gas supply step.

In the gas supply step, the gas supply part 7 adjusts the dew point of the internal atmosphere of the chamber 2. In addition, in the gas supply step, the gas supply unit 7 adjusts the oxygen concentration of the internal atmosphere of the chamber 2.

As described above, according to this embodiment, the irradiation unit and the pipe 60 can be moved synchronously. Therefore, the pipe 60 does not follow the movement of the irradiation unit 40. Be stretched in a moving way. That is, even when the irradiation unit 40 is moved, it is possible to suppress the application of an excessive load to the pipe 60. Thereby, the life of the pipe 60 can be improved.

In addition, the exhaust section 6 further includes an exhaust box 61 that is movably connected to the pipe 60 and extends along the moving direction of the irradiating section 40, and has an exhaust box that can discharge from the pipe 60. With the hot exhaust port 63h, the pipe 60 can be moved along the longitudinal direction of the exhaust box 61 (which extends along the moving direction of the irradiation unit 40), and the exhaust from the pipe 60 can be discharged from the exhaust port 63h. heat. Therefore, the pipe 60 can be moved stably, and a hot exhaust passage from the pipe 60 to the exhaust port 63h can be secured.

In addition, the exhaust portion 6 further includes a sheet 70 that extends along the moving direction of the irradiating portion 40, covers the internal space 61s of the exhaust box 61, and can move along with the movement of the pipe 60. Due to the movement, the internal space 61s of the exhaust box 61 is covered by the sheet 70 that moves with the movement of the pipe 60, and therefore, the heat from the pipe 60 can be prevented from leaking to the outside. Thereby, the efficiency of discharging heat from the pipe 60 can be maintained by a simple configuration using the sheet 70.

In addition, the sheet 70 extends to one side and the other side from the movable portion 65 which is a connecting portion of the pipe 60 and the exhaust box 61 along the moving direction of the irradiating portion 40, and is connected in a ring shape. By integrally forming the same member, the sheet 70 formed in a ring shape can be rotated in the circumferential direction. Therefore, compared with the case where the sheet 70 is formed to extend linearly from the movable portion 65 to one side and the other side, the movement along the piping 60 can be reduced. The moving trajectory of the moving sheet 70. Therefore, the device can be miniaturized.

In addition, the sheet material 70 is arranged along the outer periphery of the exhaust box 61 so as to surround the internal space 61s, and thereby, the movement trajectory of the sheet material 70 that moves with the movement of the pipe 60 can be reduced as much as possible. , Can effectively miniaturize the device.

In addition, by making the sheet 70 a resin sheet 70, the following effects are obtained. Compared with the case where the sheet 70 is a metal sheet 70, weight reduction can be achieved. Therefore, the sheet 70 can be smoothly moved along with the movement of the pipe 60. In addition, since oxidation resistance can be exerted, it is possible to suppress the deterioration of components and increase the life of the sheet 70.

In addition, the exhaust portion 6 further includes a tensioner 79 that can adjust the tension of the sheet 70, thereby preventing the sheet 70 from being damaged when the sheet 70 moves with the movement of the pipe 60 Excessive stretching, or excessive bending. Therefore, the pipe 60 can be moved more stably.

In addition, the exhaust portion 6 further includes a guide plate 64 that extends along the moving direction of the irradiating portion 40, guides the sheet 70, and is formed with a through hole through which heat from the pipe 60 can pass. 64h, when the sheet 70 moves with the movement of the pipe 60, the heat from the pipe 60 can be discharged from the exhaust port 63h through the through hole 64h of the guide plate 64 while guiding the sheet 70. Therefore, the pipe 60 can be moved more stably, and a hot exhaust passage from the pipe 60 to the exhaust port 63h can be secured.

In addition, by using the guide plate 64 as the piping 60 and the exhaust box The opening area S2 of the through hole 64h at the movable portion 65 of the connecting portion of 61 is greater than the area of the exhaust port 63h, so that the flow rate of exhaust gas before and after the heat (exhaust gas) from the pipe 60 passes through the through hole 64h Since it is maintained constant, the temperature of the irradiation part 40 can be maintained constant. Thereby, the illuminance distribution of the ultraviolet rays irradiated from the irradiation unit 40 can be made uniform.

In addition, by regularly arranging a plurality of through holes 64h in the guide plate 64 along the moving direction of the irradiation unit 40, the irradiation unit 40 and the piping 60 can be moved simultaneously as the piping 60 and the row The opening area S2 of the through hole 64h in the movable portion 65 of the connecting portion of the air box 61 is always maintained constant. As a result, the flow rate of exhaust gas can be maintained constant while the irradiation unit 40 and the pipe 60 are moved synchronously, and therefore, the temperature of the irradiation unit 40 can be maintained constant. Therefore, the illuminance distribution of the ultraviolet rays irradiated from the irradiation unit 40 can be made uniform at all times.

In addition, the exhaust section 6 further includes a flow rate adjustment section 68 that can adjust the flow rate of the gas passing through at least a part of the pipe 60 based on the temperature of the irradiation section 40, thereby being able to adapt to the irradiation section 40 The method of adjusting the temperature of the exhaust gas can adjust the flow rate of the exhaust gas, so that the illuminance distribution of the ultraviolet rays irradiated from the irradiation unit 40 can be made more uniform.

In addition, the transport mechanism 5 includes the guide part 50 as a common driving source that can move the irradiation part 40 and the pipe 60 synchronously. This allows the irradiation part 40 and the pipe 60 to move together. Therefore, it is compatible with the irradiation part 40 and the pipe 60. Compared with the case of moving independently, the device configuration can be simplified.

In addition, the ultraviolet irradiation device 1 is further capable of being installed in a confined space In the chamber 2 accommodating the substrate 10, the irradiation section 40, the exhaust section 6, and the transport mechanism 5 are installed outside the chamber 2. The transport mechanism 5 moves the irradiation section 40 and the piping 60 synchronously outside the chamber 2, thereby The following effects are obtained.

Since the substrate 10 can be irradiated with ultraviolet rays to the substrate 10 inside the chamber 2 while moving the irradiation unit 40 and the pipe 60 outside the chamber 2 while the substrate 10 is stationary inside the chamber 2 having a closed space, there is no need Consider the generation of particles accompanying the movement of the substrate 10. In addition, since the irradiation unit 40 and the pipe 60 are moved outside the chamber 2, even if particles are generated along with the movement of the irradiation unit 40 and the pipe 60, by making the chamber 2 a closed space, it is possible to prevent particle intrusion. To the chamber 2. Therefore, the generation of particles in the chamber 2 can be suppressed, and the substrate 10 can be kept clean.

In addition, by moving the irradiation section 40 and the pipe 60 while the substrate 10 is stationary, even if the substrate 10 whose plan view size is larger than that of the irradiation section 40 and the pipe 60 is used, the irradiation section 40 and the pipe 60 are stationary. Compared with the case where the substrate 10 is moved downward, the space required for irradiating the substrate 10 with ultraviolet rays can be saved, and the occupied space can be reduced.

In addition, by forming the substrate 10 in a stationary state in the chamber 2, it is only necessary to ensure a storage space for the substrate 10 in the chamber 2. Therefore, compared with the case where the substrate 10 is moved in the chamber 2, The volume of the chamber 2 can be reduced, and the management of the oxygen concentration and dew point in the chamber 2 will be easier. In addition, the consumption of nitrogen used when adjusting the oxygen concentration in the chamber 2 can be reduced.

In addition, by providing the transmissive part 23 that can transmit ultraviolet rays in the chamber 2, the simple structure using the transmissive part 23 allows The part 23 irradiates the substrate 10 with ultraviolet rays.

In addition, by making the chamber 2 include a top plate 20 covering the upper part of the substrate 10, and providing a transmissive part 23 on the top plate 20, the simple structure of providing a transmissive part 23 on the top plate 20 of the chamber 2 can be utilized through the transmissive part. 23 irradiates the substrate 10 with ultraviolet rays. In addition, by providing the transmissive part 23 in a part of the chamber 2, the maintainability of the transmissive part 23 can be improved compared to the case where the transmissive part is provided in the entire chamber 2.

In addition, the transport mechanism 5 includes a pair of guide rails 51 (guide portions 50) and a door-shaped frame 54 that extends along the moving direction of the irradiation unit 4 in a manner of sandwiching the chamber 2. The door-shaped frame 54 It is formed in a door shape so as to span the chamber 2 and is provided to be movable along a pair of guide rails 51. The door frame 54 is provided with a holding portion 54c for holding the irradiation unit 4, which is similar to a general guide rail. Compared with the case of moving the irradiation unit 4, the door-shaped frame 54 having high rigidity can be used to move the irradiation unit 4 along the pair of guide rails 51, so that the irradiation unit 4 can be moved stably.

In addition, by providing a cooling part (not shown) capable of cooling the irradiation unit 4 outside the chamber 2, the irradiation unit 4 can be cooled. Therefore, the irradiation unit 4 can be continuously driven even when the substrate 10 is continuously irradiated with ultraviolet rays, etc. In the case of this, the irradiation unit 4 can also be suppressed from overheating.

In addition, by providing a gas supply unit 7 capable of adjusting the oxygen concentration and dew point of the internal atmosphere of the chamber 2 in the chamber 2, the oxygen concentration of the internal atmosphere of the chamber 2 can be adjusted to a predetermined concentration. , The substrate 10 can be irradiated with ultraviolet rays under the condition of a predetermined oxygen concentration. In addition, the dew point of the internal atmosphere of the chamber 2 can be adjusted to a predetermined dew point, therefore, The substrate 10 can be irradiated with ultraviolet rays under a predetermined dew point condition.

In addition, in the moving step, by reciprocating the irradiation unit 4 between the -X direction end (one end) and the +X direction end (the other end) of the pair of rails 51, the irradiation unit 4 is in the pair of rails 51 Compared with the case where the one end of the substrate 10 moves in only one direction with the other end, even when the substrate 10 is repeatedly irradiated with ultraviolet rays, the irradiation can be performed smoothly and efficiently. In addition, since it is sufficient to provide one irradiation unit 4, the device configuration can be simplified.

(Modification)

Next, a modification example of the embodiment will be described using FIGS. 9 and 10.

Fig. 9 is a side view showing a modification of the exhaust portion in the embodiment. It should be noted that the illustrations of the walls of the exhaust box 61, the guide plate 64, and the like are omitted in FIG. 9.

As shown in FIG. 9, this modification is particularly different from the embodiment in that the sheet 170 has a first sheet 170A and a second sheet 170B. In FIG. 9, the same reference numerals are given to the same configurations as the embodiment, and detailed descriptions thereof are omitted.

As shown in FIG. 9, the first sheet 170A extends to one side (+X direction side) from the movable portion 65 that is a connection portion between the pipe 60 and the exhaust box 61 along the moving direction of the irradiation portion 40. One end of the first sheet 170A is wound around the first driving roller 171. The other end of the first sheet 170A is locked in the +X direction of the base portion 65a via the first locking portion 66 The end of the side.

The second sheet 170B extends from the movable portion 65 to the other side (−X direction side) along the movement direction of the irradiation portion 40. The second sheet 170B is configured to be able to move in synchronization with the first sheet 170A. One end of the second sheet 170B is wound around the second driving roller 172. The other end of the second sheet 170B is locked to the end on the −X direction side of the base portion 65 a via the second locking portion 67.

The first drive roller 171 is configured to be rotatable around a first drive shaft 171a extending in the Y direction. The second drive roller 172 is configured to be rotatable around a second drive shaft 172a extending in the Y direction. In FIG. 9, by rotating the first driving roller 171 in the direction of arrow J1, and rotating the second driving roller 172 in the direction of arrow J2, it is shown that the first sheet 170A and the second sheet 170B are in -X The state of synchronous movement in the direction (the direction of arrow K).

According to this modification, the second sheet 170B can be moved synchronously with the first sheet 170A, and therefore, the pipe 60 (see FIG. 1) can be moved more stably.

Fig. 10 is a side view showing another modified example of the exhaust portion in the embodiment. It should be noted that, in FIG. 10, illustrations of the walls and the like of the exhaust box 61 are omitted.

As shown in FIG. 10, compared with the embodiment, this modification is particularly different in the following point: the sheet 70 is configured to be able to move along the direction of movement of the irradiation unit 40 while being wound on a pair of conveying rollers 180 Way to move. In FIG. 10, the same symbols are attached to the same components as in the embodiment, and are omitted. The detailed description is omitted.

The pair of conveyance rollers 180 are configured to be movable in the X direction while being spaced apart in the X direction. In a portion surrounded by the pair of conveying rollers 180, the sheet 70, and the guide plate 64, a penetration portion 180h (which is a space through which heat from the pipe 60 can pass) is formed. The penetration portion 180h communicates with the internal space 61s (see FIG. 6) of the exhaust box 61 via the penetration hole 64h of the guide plate 64.

For example, by keeping the pair of conveying rollers 180 at a constant interval, the flow rate of the gas passing through the penetration portion 180h can always be kept constant. On the other hand, by increasing or decreasing the interval between the pair of conveying rollers 180, the flow rate of the gas passing through the penetration portion 180h can be adjusted.

It should be noted that the various shapes, combinations, etc. of the constituent members shown in the above examples are just examples, and various changes can be made according to design requirements and the like.

For example, in the above embodiment, one chamber 2 is provided, but it is not limited to this, and two or more chambers 2 may be provided.

In addition, in the above-mentioned embodiment, the planar view shape of the through-hole 64h of the guide plate 64 was described as an example, but it is not limited to this. For example, the through hole 64h of the guide plate 64 may have an elliptical shape in plan view, or a polygonal shape such as a triangle or a quadrilateral. In addition, an example in which the guide plate 64 is a punched metal has been described, but the present invention is not limited to this, and it may be a member having a ladder shape in a plan view. That is, as for the shape of the guide plate 64, various shapes can be adopted according to a design method.

In addition, in the above-mentioned embodiment, the flow rate adjusting unit 68 is configured as The example in which the flow rate of the gas passing through at least a part of the pipe 60 can be adjusted has been described, but it is not limited to this. For example, the flow rate adjustment unit 68 may be configured to be able to adjust the flow rate of the gas passing through at least a part of the exhaust box 61. That is, the flow rate adjustment unit 68 may be configured to be able to adjust the flow rate of the gas passing through at least a part of the pipe 60 and the exhaust box 61.

In addition, in the above-mentioned embodiment, an example in which the exhaust part 6 is applied to the ultraviolet irradiation device 1 has been described, but it is not limited to this. For example, the exhaust unit 6 may be applied to other devices such as a nozzle drying device.

It should be noted that each of the constituent elements described above as the embodiment or its modification can be appropriately combined within a range that does not deviate from the gist of the present invention, and it is also possible not to use a combination of multiple configurations as appropriate Some of the elements constitute the elements.

1‧‧‧Ultraviolet radiation device

10‧‧‧Substrate

2‧‧‧ Chamber (Containment Department)

20‧‧‧Top plate

20h‧‧‧Opening

21‧‧‧ Zhoubi

21a‧‧‧PCB loading and unloading exit

22‧‧‧Bottom plate

23‧‧‧Transmission Department

25‧‧‧Lifting mechanism

25a‧‧‧Lift pin

25b‧‧‧Drive source

3‧‧‧Working table

31‧‧‧Bracket

31a‧‧‧wheel

4‧‧‧ Irradiation unit

4a‧‧‧irradiated surface

40‧‧‧ Irradiation Department

41‧‧‧Condensing component

5‧‧‧Transportation mechanism (moving department)

50‧‧‧Guide (drive source)

51‧‧‧Guide

52‧‧‧Slider

53‧‧‧Pedestal

54‧‧‧Door frame

54a‧‧‧doorpost

54b‧‧‧Connecting part

54c‧‧‧Retention Department

6‧‧‧Exhaust

60‧‧‧Piping

61‧‧‧Exhaust Box

7‧‧‧Gas Supply Department

8‧‧‧Control Department

Claims (15)

An ultraviolet irradiation device includes: an irradiation part capable of irradiating ultraviolet rays to a substrate; an exhaust part having a pipe capable of discharging heat of the irradiation part; and a moving part capable of synchronizing the irradiation part and the pipe The exhaust section further includes an exhaust box, the exhaust box is movably connected to the piping, and extends along the moving direction of the irradiation section, and has the ability to discharge from the The hot exhaust port of the piping. An ultraviolet irradiation device includes: an irradiation part capable of irradiating ultraviolet rays to a substrate; an exhaust part having a pipe capable of discharging heat of the irradiation part; and a moving part capable of synchronizing the irradiation part and the pipe The ultraviolet irradiation device further includes a receiving portion capable of accommodating the substrate in a closed space, and the irradiation portion, the exhaust portion, and the moving portion are provided outside the receiving portion The moving part moves the irradiating part and the pipe synchronously outside the receiving part. The ultraviolet irradiation device according to claim 1 or 2, wherein the exhaust portion further includes an exhaust box and a sheet, and the exhaust box is movably connected to the piping and runs along the The irradiating part extends in a moving direction, and has an exhaust port that can discharge heat from the pipe; the sheet is extended in a moving direction of the irradiating part It extends and covers the internal space of the exhaust box, and can move with the movement of the pipe. The ultraviolet irradiation device according to claim 3, wherein the sheet material is along the moving direction of the irradiation part, from the connection part of the pipe and the exhaust box to one side and the other One side extends, and is formed into a single body by the same member in a ring-like manner. The ultraviolet irradiation device according to claim 3, wherein the sheet material includes a first sheet material and a second sheet material, and the first sheet material is along the moving direction of the irradiation section, The second sheet extends from the connecting portion of the pipe and the exhaust box to one side; the second sheet extends from the connecting portion to the other side, and can move in synchronization with the first sheet. The ultraviolet irradiation device according to claim 4, wherein the sheet is arranged along the outer circumference of the exhaust box so as to surround the internal space. The ultraviolet irradiation device according to claim 3, wherein the sheet is a resin sheet. The ultraviolet irradiation device according to claim 3, wherein the exhaust part further includes a tensioner, and the tensioner can adjust the tension of the sheet. The ultraviolet irradiation device according to claim 3, wherein the exhaust part further includes a guide plate that extends along the moving direction of the irradiation part and guides the sheet, Furthermore, a through hole is formed through which heat from the pipe can pass. The ultraviolet irradiation device according to claim 9, wherein the opening area of the through hole in the guide plate at the connection portion of the pipe and the exhaust box is the area of the exhaust port the above. The ultraviolet irradiation device according to claim 9, wherein a plurality of the through holes are regularly arranged in the guide plate so as to be along the moving direction of the irradiation part. The ultraviolet irradiation device according to claim 1 or 2, wherein the exhaust section further includes an exhaust box and a flow rate adjustment section, and the exhaust box is movably connected to the piping and runs along The irradiating part extends in a moving direction and has an exhaust port capable of discharging heat from the pipe; the flow rate adjusting part is capable of adjusting from the piping and the pipe according to the temperature of the irradiating part The flow rate of the gas passing through at least a part of the exhaust box. The ultraviolet irradiation device according to claim 1 or 2, wherein the moving part includes a common driving source, and the common driving source is capable of moving the irradiation part and the pipe synchronously. An ultraviolet irradiation method is an ultraviolet irradiation method using the following ultraviolet irradiation device, the ultraviolet irradiation device including: an irradiation section capable of irradiating ultraviolet rays to a substrate; and an exhaust section having a pipe capable of dissipating heat from the irradiation section , The ultraviolet irradiation method includes a moving step of synchronously moving the irradiation part and the pipe; further including a flow adjustment step, The flow rate adjustment step is to adjust the flow rate of the gas passing through at least a part of the exhaust box in accordance with the temperature of the irradiating part. It is movably connected and extends along the moving direction of the irradiating part, and can dissipate heat from the pipe. An ultraviolet irradiation method is an ultraviolet irradiation method using the following ultraviolet irradiation device, the ultraviolet irradiation device including: an irradiation section capable of irradiating ultraviolet rays to a substrate; and an exhaust section having a pipe capable of dissipating heat from the irradiation section The ultraviolet irradiation method includes a moving step of synchronously moving the irradiation part and the pipe; further comprising a receiving part capable of accommodating the substrate in a closed space, the irradiation part and the exhaust part, It is provided on the outside of the housing part, and the moving step is to move the irradiation part and the pipe synchronously outside the housing part.

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