JPH10197699A - Device for hardening ultraviolet ray - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a ultraviolet-ray hardening device which prevents a substrate from warping by precluding the temperature difference on the substrate due to the uneven irradiation of ultraviolet rays in order not to degrade the manufacturing yield and the quality of products. SOLUTION: A ultraviolet-ray hardening device is equipped with a base 1 loaded with a substrate 2, a carry drive mechanism 4 to carry the base 1 along a guide part 3 and an ultraviolet-ray emitting unit 5 to irradiate the substrate 2 placed on the base 1 with ultraviolet rays. Many vacuum suction holes 11 communicating with an inside vacuum chamber are provided all over the substrate-loading surface of the base 1, and a temperature control pipe is laid inside the entire surface loaded with the substrate 2. The inside vacuum chamber and the temperature control pipe are connected to a vacuum exhaust device 8 and a heat exchanger 10 respectively. The substrate 2 placed on the surface of the base 1 is vacuum-sucked to the surface loaded with the substrate 2 by many vacuum suction holes 11 , whereby the temperature difference in the substrate 2 is reduced by the cooling water flowing through the temperature control pipe.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultraviolet curing apparatus, and more particularly to an ultraviolet curing apparatus used for applying a protective film to a color filter substrate and then irradiating the applied protective film with ultraviolet rays to cure the applied protective film. .

[0002]

2. Description of the Related Art Generally, when manufacturing a color filter used in a liquid crystal display device, a plasma display device, or the like, first, a color filter pattern of three colors is provided on a glass substrate by using a forming means such as etching. A color filter substrate is prepared, and then a protective film is applied on the color filter pattern of the color filter substrate. Then, the protective film applied to the color filter substrate is irradiated with ultraviolet rays using an ultraviolet curing device, thereby protecting the color filter substrate. Is used in the production process of ultraviolet curing.

Here, a known ultraviolet curing device for irradiating the protective film with ultraviolet light includes a transportable substrate mounting table on which a color filter substrate is mounted on a substrate mounting surface, and a three-point supporting roller transporter for supporting the substrate mounting table. A transport drive mechanism for appropriately transporting by a unit, and an ultraviolet light emitting unit including an ultraviolet light emitting lamp that is disposed above the three-point support roller transport unit and irradiates the color filter substrate mounted on the substrate mounting table with ultraviolet light. A slit plate disposed near the ultraviolet light emitting unit and setting an irradiation area of ultraviolet light emitted by the ultraviolet light emitting lamp.

[0004] The operation of the known ultraviolet curing apparatus is as follows.
It is transported to one end side of the point support roller transport unit, and the color filter substrate coated with the protective film is placed on the substrate mounting table at the transport position, and then the transport drive mechanism is driven to place the color filter substrate. Transported from one end to the other end of the three-point support roller transport section, and when transporting the substrate mounting table, the substrate mounting table on which the color filter substrate is mounted passes directly below the ultraviolet light emitting unit. When irradiating the protective film of the color filter substrate with ultraviolet light emitted from an ultraviolet light emitting lamp, the protective film is cured by light. Subsequently, the substrate mounting table on which the color filter substrate is mounted is transported by a three-point support roller. When the substrate is transported to the other end of the unit, the color filter substrate mounted on the substrate mounting table is detached from the substrate mounting table, and finally, the transport driving function is driven to empty the empty substrate mounting table. Point support roller transfer Back to the initial state is conveyed from the other end parts to the one end side, below, and executes repeatedly the operation similar to the above-described operation.

In this case, as a means for holding the color filter substrate mounted on the substrate mounting table, a mechanical means for mechanically holding down the color filter substrate using a holding member or the like is usually used.

[0006]

By the way, the above-mentioned known ultraviolet curing apparatus is characterized in that when the substrate mounting table on which the color filter substrate is mounted passes directly below the ultraviolet light emitting unit along the three-point supporting roller transporting section, When the protective film applied to the color filter substrate is irradiated with ultraviolet light emitted from the ultraviolet light emitting lamp, and the protective film is photo-cured by the ultraviolet light, the ultraviolet light emitted from the ultraviolet light emitting lamp is uniformly applied to the entire surface of the color filter substrate. This is difficult, and in particular, if the color filter substrate is large, it is more difficult to uniformly irradiate the entire surface. If the entire surface of the color filter substrate is not uniformly irradiated with the ultraviolet light, a considerable temperature difference occurs between a portion irradiated with a large amount of ultraviolet light and a portion irradiated with a small amount of ultraviolet light on the color filter substrate. In such a case, the color filter substrate must be treated as a defective product, since the partial warpage cannot be eliminated.

As described above, the known ultraviolet curing apparatus eliminates the occurrence of warpage of the color filter substrate due to uneven irradiation of the ultraviolet light when the protective film applied to the color filter substrate is photocured by the ultraviolet light. In particular, when the size of the color filter substrate becomes large, it is more difficult to eliminate the occurrence of the warpage. In addition to this problem, the production yield of the color filter is reduced. However, there is a problem that the product quality is deteriorated.

The present invention solves all of these problems. It is an object of the present invention to eliminate the occurrence of substrate warpage by eliminating the temperature difference on the substrate due to the non-uniform irradiation of ultraviolet rays, and to reduce the production yield and product yield. An object of the present invention is to provide an ultraviolet curing device that does not lower the quality.

[0009]

In order to achieve the above-mentioned object, an ultraviolet curing apparatus according to the present invention comprises a plurality of vacuum suction devices communicating with an internal vacuum chamber over the entire surface of a substrate mounting table on which a substrate is mounted. In addition to the means for providing a hole for use, a means for arranging a temperature adjusting pipe inside the entire surface of the substrate mounting surface, a means for connecting the internal vacuum chamber to a vacuum exhaust device, and a means for connecting the temperature adjusting pipe to a heat exchanger.

According to the above means, the substrate on the substrate mounting surface of the substrate mounting table is mounted on a number of vacuum suction holes communicating with the internal vacuum chamber evacuated by the vacuum evacuation device. In addition to vacuum suction so as to maintain a flat state through the holes, a cooling liquid maintained at a constant temperature by a heat exchange device is passed through a temperature adjusting pipe laid inside the entire surface of the substrate mounting surface, and the substrate is mounted. Since the temperature of the mounting surface, that is, the temperature of the substrate is maintained in a uniform state over the entire surface, even if the irradiation amount of the ultraviolet light becomes non-uniform in a part of the substrate and a temperature difference on the substrate occurs, By setting the mounting surface at a constant temperature, the temperature difference on the substrate does not increase, and the substrate does not warp due to the irradiation of ultraviolet rays.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In an embodiment of the present invention, an ultraviolet curing apparatus includes a substrate mounting table, a transport drive source for transporting the substrate mounting table along a guide portion, and a substrate mounted on the substrate mounting table. An ultraviolet light emitting unit for irradiating ultraviolet rays to the substrate mounting table, and a plurality of vacuum suction holes communicating with the internal vacuum chamber are provided over the entire surface of the substrate mounting table, and inside the entire surface of the substrate mounting surface. A temperature adjusting pipe is laid, the internal vacuum chamber is connected to a vacuum exhaust device, and the temperature adjusting pipe is connected to a heat exchange device.

In one embodiment of the present invention, the ultraviolet light emitting unit has a slit plate disposed near the ultraviolet light emitting unit for setting an irradiation area of the ultraviolet light emitted from the ultraviolet light emitting unit.

In a preferred embodiment of the present invention, the substrate mounted on the substrate mounting table is a color filter substrate coated with a protective film.

According to the embodiments of the present invention, when a substrate is mounted on the substrate mounting surface of the substrate mounting table, the substrate is provided with a large number of vacuums communicated with the internal vacuum chamber evacuated by the vacuum exhaust device. On the suction hole, not only the vacuum suction is performed while maintaining the flat state through the vacuum suction hole, but also the temperature at which the cooling liquid maintained at a constant temperature by the heat exchange device is laid inside the entire surface of the substrate mounting surface. By flowing through the adjustment pipe, the temperature of the substrate mounting surface, that is, the temperature of the substrate closely adhered to the substrate mounting surface is maintained at a uniform temperature over the entire surface. Even if the amount becomes non-uniform in one part of the substrate compared to the other part, and thus a temperature difference occurs on the substrate, the temperature difference on the substrate is not particularly large in one part compared to the other part. , By UV irradiation No longer be warp occurs,
As a result, the production yield of the color filters and the product quality are not reduced.

[0015]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a partially exploded perspective view showing an embodiment of an ultraviolet curing apparatus according to the present invention. FIGS. 2A and 2B are used in the ultraviolet curing apparatus shown in FIG. 1A is a top view, FIG. 1B is a cross-sectional view taken along the line AA ′ of FIG.
1 shows an example of processing a color filter substrate as a substrate.

In FIGS. 1 and 2 (a) and 2 (b),
1 denotes a substrate mounting table, 1 ₁ the vacuum suction holes, 1 ₂ the vacuum chamber 1 ₃ is a temperature adjusting pipe, 1 ₄ packing member,
1 ₅ substrate mounting surface, 1 ₆ the guide member, 2 a color filter substrate, 3 is a linear guide unit, 3 ₁ a pair of guide members, the conveyance drive mechanism 4, 4 ₁ AC servomotor, 4 ₂
The feed rod, 4 ₃ bar receiving portion, 5 the ultraviolet light-emitting unit,
5 ₁ ultraviolet light emitting lamps, 5 ₂ light reflector, 5 ₃ lamp driver, 6 slit plate, the evacuation pipe 7, 8 evacuator, the plumbing pipes 9, 9 ₁ water supply pipe,
9 ₂ drainage pipe, 10 is a heat exchanger.

[0018] Then, the substrate table 1 is provided with a packing member 1 ₄ inside the vacuum chamber 1 ₂ sealed by an internal vacuum chamber 1 ₂ and the substrate mounting surface 1 ₅ over substantially the entire surface of the substrate mounting surface 1 ₅ number of vacuum suction holes 1 _1, the substrate mounting surface 1 ₅ temperature which is bent staggered shape inside of the vacuum chamber 1 ₂ above the substrate mounting surface 1 ₅ over substantially the entire surface of communicating between and the adjustment pipe 1 _3, and a guide member 1 ₆ disposed under the substrate mounting table 1. The color filter substrate 2 is a color filter substrate in which three color filter patterns are formed on a glass substrate by etching or the like and a protective film is applied on the surface thereof, and the applied protective film is in an undried state. in is placed on the substrate mounting surface 1 ₅ of the substrate mounting table 1. Linear guide unit 3 is made of a pair of guide members 3 ₁ disposed in parallel, the guide member 1 ₆ disposed under the substrate table 1 is slidably coupled to the pair of guide members 3 _1, guiding along a pair of guide body 3 ₁ during transport of the substrate mounting table 1. Transport drive mechanism 4 includes an AC servo motor 4 _1, a gear mechanism coupled to the AC servomotor 4 ₁ (not shown), and the feed rod 4 ₂ having one end to the gear mechanism is rotatably connected to the feed rod 4 and a _second bar receiving portion 4 ₃ which is coupled to an end, the feed rod 4 ₂ the mounting substrate table 1
Passed threaded in the lower part, the mounting table 1 the substrate during the feed rod 4 ₂ pivoting
And it is configured so that to transport along the pair of guide members 3 _1.

Further, ultraviolet light-emitting unit 5 includes an ultraviolet light emitting lamp 5 ₁ that emits ultraviolet rays, ultraviolet lamps 5
A light reflector 5 ₂ covering the other portion except a lower portion of the _1,
And a lamp driving unit _3, an ultraviolet fluorescent lamp 5 ₁ is arranged substantially directly above portion of the intermediate of the pair of guide body 3 _1. Slit plate 6, a slit portion at a position corresponding to the lower portion of the ultraviolet light emitting lamp 5 ₁ has a (no reference numeral), an ultraviolet light emitting in ultraviolet lamps 5 ₁ irradiates downwardly through the slit portion. Evacuation pipe 7 has one end coupled to the vacuum chamber 1 ₂ of the substrate table 1, and the other end is coupled to a vacuum exhaust system 8. Cooling water through flow pipe 9 is made of a water supply pipe 9 ₁ and drain pipe 9 ₂ Prefecture, water supply pipes 9
₁ has one end coupled to one end of the temperature control pipes 1 ₃ of the substrate table 1 and the other end is coupled to a preparative heat exchanger 10, the drain pipe 9 _2, another end temperature adjusting pipe 1 ₃ The other end is connected to the heat exchange device 10.

FIGS. 3 (a), 3 (b) and 3 (c) are schematic cross-sectional views sequentially showing the moving state of the substrate mounting table 1 for explaining the operation of the ultraviolet curing apparatus shown in FIG. 5A shows a state before irradiation of the color filter substrate 2 with ultraviolet light, FIG. 5B shows a state before irradiation of the color filter substrate 2 with ultraviolet light, and FIG. Respectively are shown.

Here, the operation of the ultraviolet curing apparatus of this embodiment will be described with reference to FIGS. 1, 2A and 2B, and 3A to 3C. .

In the pre-process, a color filter pattern of three colors is formed on a glass substrate, and then a protective film is applied to the surface of the color filter pattern of three colors to form a color filter substrate 2. As described below, the processing by the ultraviolet curing device of this embodiment is performed.

[0023] First, as shown in FIG. 3 (a), it sends a substrate mounting table 1 bar 4 ₂ on one end side (AC servo motor 4 ₁ side)
Is carried to, coated protective film is placed on the color filter substrate 2 of the undried state to the substrate mounting surface 1 ₅ of the substrate mounting table 1.

[0024] The color filter substrate 2 immediately after being placed in surface 1 ₅ the mounting substrate (immediately before the case may be), to operate the vacuum exhaust device 8 and the heat exchanger 10. Then, by the operation of the vacuum exhaust system 8, the vacuum chamber 1 ₂ of the substrate table 1 through the evacuation pipe 7 is evacuated, the vacuum chamber 1
_{As 2} becomes vacuum, a large number of vacuum suction holes 1 ₁
By vacuum suction to the substrate mounting surface 1 ₅ of the color filter substrate 2 by, the entire surface of the color filter substrate 2 is in close contact to the surface 1 ₅ the mounting substrate. Further, by the operation of the heat exchanger 10, after the cooling water of a constant temperature flows through the temperature control pipes 1 ₃ through the water supply pipe 9 ₁ from the heat exchanger device 10,
Since the drain pipe 9 ₂ heat exchange function to return to the heat exchange device 10 acts through, the temperature of the substrate mounting surface 1 ₅ is substantially equal state to a temperature of the cooling water of constant temperature.

Next, the AC servomotor 4 ₁ is driven,
And feed rod 4 ₂ rotated through a gear mechanism coupled to the AC servo motor 4 _1, the substrate table 1 are communicated threadedly feed rod 4 ₂ a pair of guide members 3 ₁ of the linear guide unit 3 is guided, the other end from one end of the feed rod 4 ₂ (rod receiving portion 4 ₃
Side).

[0026] Then, as shown in FIG. 3 (b), when the substrate table 1 is transported to the vicinity of the ultraviolet light emitting unit 5, the ultraviolet light emitting lamp 5 by the driving of the lamp driving unit 5 _3
1 emits light. The ultraviolet light obtained at this time is irradiated on the color filter substrate 2 being conveyed together with the substrate mounting table 1 through the slit portion of the slit plate 6, and the undried protective film is dried by the heat generated when the ultraviolet light is irradiated. The irradiation of the ultraviolet rays is continued until the color filter substrate 2 being transported together with the substrate mounting table 1 is separated from the vicinity of the ultraviolet light emitting unit 5.

[0027] Then, the conveyed from one end to the other end of the substrate table 1 is the feed rod 4 _2, 3 (c), the other end of the substrate mounting table 1 is the feed rod 4 ₂ When you reach the side,
The operation of the evacuation device 8 and the heat exchange device 10 is stopped. At this time, the operation stop of the evacuation device 8, the vacuum suction is stopped to the substrate mounting surface 1 ₅ of the color filter substrate 2, and to easily disengage the color filter substrate 2 from above surface 1 ₅ the mounting substrate in addition, the operation stop of the heat exchanger 10, and stop the supply of cooling water to the temperature control pipes 1 _3.

[0028] Thereafter, a color filter substrate 2 which protective film was dried removed from over the mounting table 1 substrate, together with the processing of the next step is performed, re-drives the AC servo motor 4 _1,
Conveying empty substrate table 1 sends the rod 4 ₂ at the other side to the one end, return the substrate table 1 in the first position, the operation is repeatedly performed.

In general, in this type of ultraviolet curing apparatus, when irradiating the entire surface of the color filter substrate 2 with ultraviolet light, the irradiation amount of one part is inevitably non-uniform as compared with the irradiation amount of the other parts. Although a temperature difference occurs between a part of the substrate 2 and another part,
According to the ultraviolet curing apparatus of the present embodiment, when placing the color filter substrate 2 on the substrate mounting surface 1 of the substrate table 1, and vacuum suction by numerous vacuum suction holes 1 _1, the color filter substrate 2 together they are arranged in close contact surface 1 ₅ the mounting substrate, and supply of the cooling water of a constant temperature in the temperature-controlling pipe 1 _3, while the substrate table 1 is being transported, the substrate mounting surface 1 ₅
The entire surface over the substrate mounting surface 1 ₅ of the temperature, i.e., since the temperature of the color filter substrate 2 which is arranged in close contact substrate mounting surface 1 ₅ is at a constant temperature, the temperature difference nonuniformly based in irradiation amount of ultraviolet rays Can be made extremely small, and in combination with the close contact arrangement of the color filter substrate 2 on the substrate mounting surface ₁₅ , it is possible to prevent partial warpage of the color filter substrate 2 from occurring, As a result, the production yield of the color filters and the product quality are not reduced.

In this embodiment, an example has been described in which the substrate is a color filter substrate and the object to be irradiated with ultraviolet light is the drying of the applied protective film. However, the substrate according to the present invention is a color filter substrate. The substrate is not limited to a substrate, and may be another substrate similar to a color filter substrate.The object to be irradiated with ultraviolet light according to the present invention is not limited to the case where the applied protective film is dried, and is similar to the protective film. Of course, other undried films may be dried.

[0031]

As described above, according to the present invention, when a substrate is mounted on the substrate mounting surface of the substrate mounting table, the substrate communicates with the internal vacuum chamber on the substrate mounting surface of the substrate mounting table. Vacuum suction is performed in the direction of the substrate mounting surface by the large number of vacuum suction holes, and the substrate is mounted so as to maintain a flat state on the substrate mounting surface, and the temperature is laid inside the entire surface of the substrate mounting surface. The temperature of the substrate mounting surface and the temperature of the substrate mounted on it are maintained at a constant temperature over the entire surface of the substrate by cooling water at a constant temperature flowing through the pipe. Even if it is partially non-uniform, a large difference in the temperature difference on the substrate does not occur, and there is an effect that warpage due to the temperature difference on the substrate can be eliminated.

Further, according to the present invention, in addition to the above-mentioned effects, there is also an effect that the production yield of the color filter is not lowered and the product quality is not lowered since the substrate is not warped.

[Brief description of the drawings]

FIG. 1 is a partially exploded perspective view showing an embodiment of an ultraviolet curing device according to the present invention.

FIG. 2 is a configuration diagram illustrating an example of a substrate mounting table used in the ultraviolet curing device illustrated in FIG.

FIG. 3 is a schematic cross-sectional configuration diagram sequentially illustrating a moving state of a substrate mounting table for explaining an operation of the ultraviolet curing device illustrated in FIG. 1;

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Substrate mounting base 1 ₁ Vacuum suction hole 1 ₂ Internal vacuum chamber 1 ₃ Temperature adjustment pipe 1 ₄ Packing member 1 ₅ Substrate mounting surface 1 ₆ Guide member 2 Color filter substrate 3 Linear guide part 3 ₁ Pair of guide bodies 4 Transport drive mechanism 4 ₁ AC servo motor 4 ₂ Feed rod 4 ₃ Rod receiving part 5 Ultraviolet light emitting unit 5 ₁ Ultraviolet light emitting lamp 5 ₂ Reflector 5 ₃ Lamp drive part 6 Slit plate 7 Vacuum exhaust pipe 8 Vacuum exhaust device 9 Water supply / drainage pipe 9 ₁ Water supply pipe 9 ₂ Drainage pipe 10 Heat exchange device

Claims (3)

[Claims] 1. An ultraviolet curing device comprising: a substrate mounting table; a transfer driving mechanism configured to transfer the substrate mounting table along a guide portion; and an ultraviolet light emitting unit configured to irradiate ultraviolet light to a substrate mounted on the substrate mounting table. In the apparatus, a large number of vacuum suction holes communicating with an internal vacuum chamber are provided over the entire substrate mounting surface of the substrate mounting table, and a temperature adjusting pipe is laid inside the entire surface of the substrate mounting surface, and the internal vacuum is provided. An ultraviolet curing device, wherein the chamber is connected to a vacuum exhaust device, and the temperature adjusting pipe is connected to a heat exchange device. 2. The ultraviolet curing device according to claim 1, wherein a slit plate for setting an irradiation area of the ultraviolet light emitted from the ultraviolet light emitting unit is disposed near the ultraviolet light emitting unit. 3. The ultraviolet curing device according to claim 1, wherein the substrate mounted on the substrate mounting table is a color filter substrate coated with a protective film.