KR102115460B1 - Light irradiation apparatus - Google Patents

Abstract

An object of the present invention is to provide a light irradiating device in which adhesion of a foreign substance to a light emitting side surface of a member provided in a light exit opening is suppressed.
The light irradiation device 1 accommodates the reflector 5 and the light source 4 in the housing 3 of the light irradiator 2, and is provided with a light transmissive member in the light exit opening 3A of the housing 3 , It is configured to be provided with an air curtain mechanism 60 on the light exit side of this member, and it is suppressed that foreign matter adheres to the member provided in the light exit opening 3A.

Description

LIGHT IRRADIATION APPARATUS

The present invention relates to a light irradiation device having a reflector and a light source in the housing.

Background Art Conventionally, a light irradiating device that houses a reflector and a light source in a housing of a light irradiator and irradiates direct light from the light source and reflection from the reflector is known (for example, see Patent Document 1). In this light irradiation device, a polarizer unit is provided in the light exit opening, and gas supply means for supplying gas between the reflector and the polarizer unit in the housing is provided, thereby making the foreign matter in the housing by making a positive pressure between the reflector and the polarizer unit. It prevents intrusion.

Japanese Patent Application No. 5056991

However, in the above-described conventional configuration, since gas is supplied to the inside of the light exit opening in the housing, entry of foreign matter into the housing can be prevented, but the lower surface (light exit) of the member (polarizer unit) provided in the light exit opening Foreign matter may adhere to the side).

This invention is made | formed in view of the above-mentioned circumstances, and aims at providing the light irradiation apparatus which suppressed the adhesion of the foreign material to the surface of the light exit side of the member provided in the light exit opening.

In order to achieve the above object, the light irradiation device of the present invention accommodates a reflector and a light source in a housing of a light irradiator, a light-transmitting member in the light exit opening of the housing, and air on the light exit side of the member It is characterized by having a curtain mechanism.

In the above-described configuration, the air curtain mechanism may form an air curtain in a short direction of the light exit opening.

In the above-described configuration, the air curtain mechanism may form an air curtain perpendicular to the long direction of the light source.

In the above-described configuration, the air curtain mechanism may blow air substantially parallel to the member to form an air curtain over the entire light exit opening.

In the above-described configuration, a polarizer unit may be provided in the light output opening of the housing, and the air curtain mechanism may be provided on the light output side of the polarizer unit.

In the above-described configuration, a light transmitting member may be provided on the light output side of the polarizer unit, and the air curtain mechanism may be provided on the light output side of the light transmission member.

In the above-described configuration, a light transmitting member and a polarizer unit may be sequentially provided in the light exit opening of the housing, and the air curtain mechanism may be provided on the light exit side of the polarizer unit.

In the above-described configuration, the air curtain mechanism may be provided with a blow nozzle for blowing air and an exhaust nozzle for discharging air blown from the blow nozzle.

According to the present invention, since the air curtain mechanism is provided in the light exit opening of the housing housing the reflector and the light source, it is possible to suppress foreign matter from adhering to the light exit side surface of the member provided in the light exit opening.

1 is a front view showing an optical alignment device according to a first embodiment of the present invention.
Fig. 2 is an enlarged view of the light irradiator of Fig. 1;
3 is a view showing the configuration of a polarizer unit, (A) is a plan view, (B) is a view seen from the side section.
4 is a front view showing an optical alignment device according to a second embodiment of the present invention.
5 is a front view showing an optical alignment device according to a third embodiment of the present invention.
6 is a front view showing an optical alignment device according to a modification of the present invention.
7 is a front view showing an optical alignment device according to another modification of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1 is a front view showing an optical alignment device according to this embodiment. FIG. 2 is an enlarged view of the light irradiator of FIG. 1. 3 is a view showing the configuration of a polarizer unit, FIG. 3 (A) is a plan view, and FIG. 3 (B) is a view seen from a side cross section.

The photo-alignment apparatus 1 is a photoirradiation apparatus which irradiates polarized light to the photo-alignment film of a plate-shaped or band-shaped photo-alignment object (work) W, as shown in Figs.

The photo-alignment device 1 is provided with a light irradiator 2 directly irradiating polarized light. In the optical orientation of the photo-alignment object W, the photo-alignment object W is conveyed along the direct-direction X by a transport mechanism (not shown), passes directly under the light irradiator 2, and when this passes, polarized light To expose the photo-alignment film. In the present embodiment, the photo-alignment object W is formed in a rectangular shape when viewed in a plane, so that the short direction of the photo-alignment object W is conveyed to coincide with the linear direction X.

The light irradiator 2 includes a lamp 4 and a reflector 5 as light sources in a housing 3 having a light emitting opening 3A on its lower surface, and a polarizer unit 10 at the light emitting opening 3A. It is equipped with.

The housing 3 is supported by an irradiator mounting stand (not shown) at an upper position spaced a predetermined distance from the light alignment object W. The lamp 4 is a discharge lamp, and an ultraviolet lamp having a straight tube (rod shape) extending at least equal to the length in the long direction of the object W is used. The reflector 5 is an elliptical cross-section, and also a cylindrical concave reflector extending along the long direction of the lamp 4, condensing the light of the lamp 4 to take the polarizer unit 10 from the light exit opening 3A. Investigate.

The light exit opening 3A is a rectangular opening when viewed from a plane formed immediately below the lamp 4 and is formed so that the long direction coincides with the long direction of the lamp 4.

A plate-shaped transparent body 6 formed of a light-transmitting member having no filter characteristics (wavelength selection characteristics) such as, for example, a quartz plate is provided in the light exit opening 3A, and light is emitted by the transparent body 6 The opening 3A is closed.

Further, inside the light exit opening 3A, a wavelength selection filter 7 for selecting a wavelength of transmitted light is provided, and the light irradiator 2 is irradiated with light of a desired wavelength by the wavelength selection filter 7 It is.

These transparent bodies 6 and the wavelength selection filter 7 constitute the light transmitting member of this embodiment. In addition, although the wavelength selection filter 7 is provided in this embodiment, when the light of a desired wavelength can be emitted from the lamp 4 itself, the wavelength selection filter 7 may be omitted.

The polarizer unit 10 is disposed between the transparent body 6 and the photo-alignment object W to polarize the light irradiated to the photo-alignment object W. When the polarized light is irradiated to the photo-alignment film of the photo-alignment object W, the photo-alignment film is oriented.

The polarizer unit 10 includes a plurality of unit polarizer units 12 and a frame 14 for aligning the unit polarizer units 12 in a lateral arrangement, as shown in FIG. 3. The frame 14 is a plate-shaped frame body in which each unit polarizer unit 12 is connected in series. The unit polarizer unit 12 is provided with a wire grid polarizer (polarizer) 16 formed in a substantially rectangular plate shape.

In this embodiment, each unit polarizer unit 12 supports the wire grid polarizer 16 so that the wire direction A is parallel to the linear direction X, and the direction orthogonal to the wire direction A and the wire grid polarizer 16 The arrangement direction B of is made to coincide.

The wire grid polarizer 16 is a type of linear polarizer, and a grid is formed on the surface of the substrate. As described above, since the lamp 4 has a rod shape, light of various angles enters the wire grid polarizer 16, but the wire grid polarizer 16 is linearly polarized and transmits even when light is incident at an angle.

The wire grid polarizer 16 is supported by the unit polarizer unit 12 so that the direction of the polarization axis C1 can be finely adjusted by rotating in the plane using the normal direction as the rotation axis. That is, the plurality of wire grid polarizers 16 are arranged with a gap from each other so that the direction of the polarization axis C1 can be finely adjusted. For all unit polarizer units 12, the polarization axis C1 of the wire grid polarizer 16 is finely adjusted to be aligned in a predetermined irradiation reference direction, so that the polarization axis C1 is highly accurate over the entire length of the polarizer unit 10 in the long axis direction. Aligned polarized light is obtained, and high-quality light alignment is enabled. The wire grid polarizer 16 having the polarization axis C1 adjusted is fixedly arranged on the frame 14 by fixing the upper and lower ends of the unit polarizer unit 12 to the frame 14 by screws (fixing means) 19.

The transparent body 6, the wavelength selection filter 7, and the polarizer unit 10 constitute the light transmissive member of the present embodiment.

In addition, the photo-alignment device 1, as shown in Figs. 1 and 2, the cooling unit 20 for cooling the lamp 4, the reflector 5, the wavelength selection filter 7 and the polarizer unit 10 It is equipped with. The cooling unit 20 is provided with a heat source cooling path 30 for cooling the lamp 4 and the reflector 5 and a polarizer cooling path 40 for cooling the polarizer unit 10, respectively. .

Each of the heat source cooling path 30 and the polarizer cooling path 40 includes blowers 21 and 21 for blowing cooling wind, coolers 22 and 22 for cooling the cooling wind, dust contained in the cooling wind, and the like. Filters 23 and 23 for removing foreign matter are provided. The blower 21 is arranged on the upstream side of the cooler 22. Thereby, it is possible to prevent the cooling air cooled by the cooler 22 from being reheated to the heat source of the blower 21. In this embodiment, a blower for the blower 21, a water-cooled radiator for the cooler 22, and a HEPA (High Efficiency Particulate Air) filter for the filter 23 are used, but the blower 21, the cooler 22, and the filter (23) is not limited to these configurations.

In the heat source cooling path 30, the blower 21, the cooler 22, and the filter 23 are housed in a cooling unit case 20A provided outside the housing 3. In the present embodiment, the cooling unit case 20A is spaced apart from the housing 3 above the housing 3, but the arrangement position of the cooling unit case 20A is not limited to this. The chamber 24 is provided in the cooling unit case 20A, and the air outlet 21A of the blower 21 and the inlet 24A of the chamber 24 are connected by a duct 25. The chamber 24 extends in diameter from the inlet 24A toward the downstream side, and a cooler 22 is disposed on the upstream side of the chamber 24 and a filter 23 is disposed on the downstream side. The outlet 24B of the chamber 24 and the housing 3 are connected by a duct 26, and the inlet 21B of the blower 21 and the housing 3 are connected by a duct 27.

In the housing 3, a partition wall 31 surrounding the side of the lamp 4 and the reflector 5 is provided with a gap δ1 from the housing 3. The partition wall 31 has an opening 31A exposing the lamp 4 and the reflector 5 downwards at the bottom, and has a ventilation hole 31B at the top.

The duct 26 is connected to the housing 3 at a position corresponding to the gap δ1 outside the partition 31, and the duct 27 is a housing 3 at a position corresponding to the space R inside the partition 31. It is connected to.

These blowers 21, ducts 25, chambers 24 (coolers 22, filters 23), ducts 26, clearance δ1 outside the partition walls 31, and the space inside the partition walls 31 The R and the duct 27 constitute a heat source cooling path 30.

In the heat source cooling path 30, the cooling wind (air) blown from the blower 21 flows into the chamber 24 through the duct 25, cools by the cooler 22, and foreign matter is passed through the filter 23. Is removed. By the filter 23, the cooling air is dehumidified so that the dew point is about -50 ° C to -90 ° C or less, and foreign matter is removed to become high dew point air (clean dry air). Cooling air with clean dry air is supplied into the housing 3 through the duct 26.

In the housing 3, the cooling wind flows through the gap δ2 between the partition 31 and the transparent body 6 through the gap δ1 between the partition 31 and the housing 3, inside the reflector 5 and the reflector It is outside of (5) and flows into the space R in the partition wall 31 to cool the lamp 4 and the reflector 5. The cooling wind whose temperature has increased by cooling the lamp 4 and the reflector 5 is from the through hole 5A formed in the upper part of the reflector 5, and from the outside of the reflector 5 to the space R in the partition wall 31 After flowing, it is sucked into the blower 21 through the duct 27 and cooled again. As such, the cooling wind circulates through the heat source cooling path 30.

Also in the polarizer cooling path 40, in the cooling unit case 20A, a blower 21, a cooler 22 disposed in the chamber 24, and a filter 23 are disposed, and the blower port of the blower 21 ( 21A) and the inlet 24A of the chamber 24 are connected by a duct 25.

Further, the outlet 24B of the chamber 24 and the housing 3 are connected by a duct 28, and the inlet 21B of the blower 21 and the housing 3 are connected by a duct 29.

The duct 28 is provided with a light exit opening 3A of the housing 3, more specifically, an extension 28A extending over the length of the polarizer unit 10 in the long direction, and a diameter reduction from the extension 28A. The diameter reduction part 28B to be provided is provided. The diameter reduction portion 28B is connected to the outlet 24B of the chamber 24, and the extension portion 28A is connected to the housing 3. Similarly, the duct 29 is formed from the light emitting opening 3A of the housing 3, more specifically, the extension 29A extending over the length of the polarizer unit 10 in the long direction, and the extension 29A. A diameter reducing portion 29B for reducing the diameter is provided. The diameter reduction portion 29B is connected to the suction port 21B of the blower 21, and the extension portion 29A is connected to the housing 3. The extension portion 28A and the extension portion 29A are supported by the housing 3 through plate-shaped support members 28C and 29C.

The polarizer unit 10 is provided with a transparent body 6 and a space S at a position facing the light exit opening 3A on the outside of the housing 3, and the frame 14 is attached to the polarizer unit holder 8. It is fixed. The ducts 28 and 29 are connected between the housing 3 and the polarizer unit holder 8. The duct 28 is connected to one end side in the linear motion direction X, and the duct 29 is connected to the other end side in the linear motion direction X.

Space S and duct 29 between these blowers 21, duct 25, chamber 24 (cooler 22, filter 23), duct 28, transparent body 6 and polarizer unit 10 ) Constitutes the polarizer cooling path 40. That is, this polarizer cooling path 40 constitutes a spatial cooling path for cooling the space S between the transparent body 6 and the polarizer unit 10.

In the polarizer cooling path 40, the cooling air blown from the blower 21 flows into the chamber 24 through the duct 25, is cooled by the cooler 22, and foreign matter is removed by the filter 23, It enters the space S between the transparent body 6 and the polarizer unit 10 through the duct 28 to cool the polarizer unit 10. At this time, the cooling wind flowing into the space S flows perpendicular to the long direction of the lamp 4. The cooling wind whose temperature is increased by cooling the polarizer unit 10 is sucked into the blower 21 through the duct 29 and cooled again. As such, the cooling wind circulates through the polarizer cooling path 40.

In addition, since the polarizer cooling path 40 is completely independent of the heat source cooling path 30, by controlling the temperature of the cooling wind flowing through the heat source cooling path 30 and the polarizer cooling path 40, respectively, the lamp 4 and the polarizer The units 10 can be individually cooled.

At this time, by controlling the blowers 21 and 21 individually, the wind speed of the cooling wind of the heat source cooling path 30 is set relatively slowly, and the wind speed of the cooling wind of the polarizer cooling path 40 is set relatively quickly, so that the light source 4 is relatively It is possible to cool at a high temperature and cool the polarizer unit 10 at a relatively low temperature. Thereby, the lamp 4 and the polarizer unit 10 can be cooled appropriately.

In addition, the duct 28 for supplying cooling air to the space S between the transparent body 6 and the polarizer unit 10 and the duct 29 for discharging the cooling wind from the space S are long lengths of the polarizer unit 10 Since it extends over, it can cool substantially evenly across the polarizer unit 10.

However, outgas may be generated from the alignment film during the processing of the photo-alignment object W (during irradiation). In addition, in the environment in which the photo-alignment device 1 is disposed, foreign substances such as paper powder are also present. When a foreign material such as this outgas is mixed or attached to the wire grid polarizer 16, the polarization characteristics of the wire grid polarizer 16 are changed to adversely affect it.

Therefore, in the present embodiment, the optical alignment device 1 is provided with a static pressure mechanism 50 that makes the space S between the transparent body 6 and the polarizer unit 10 a static pressure. More specifically, a flow rate adjusting means 51 composed of, for example, a damper is provided in the duct 29 connecting the inlet 21B of the blower 21 and the housing 3. By using the flow rate adjusting means 51 to throttle the flow rate of the cooling wind flowing through the duct 29 located downstream of the space S, the space S between the transparent body 6 and the polarizer unit 10 can be set to a static pressure. .

When the space S becomes positive pressure, since cooling air is blown out from the gap of the polarizer unit 10, foreign matter from the gap of the polarizer unit 10 can be prevented from entering the polarizer cooling path 40. Thereby, it is possible to reliably prevent foreign matter from adhering to or invading the polarizer unit 10.

Examples of the gap between the polarizer units 10 include a gap between the frame 14 of the polarizer unit 10 and the polarizer unit holder 8, a gap between the plurality of wire grid polarizers 16, and the like. . Therefore, without forming a means for airtightly closing these gaps, it is possible to reliably prevent foreign matter from entering the polarizer cooling path 40, thereby reducing the number of parts of the optical alignment device 100, simplifying the manufacturing process. Can be.

In addition, an inlet port 52 for introducing air from the outside is formed in the duct 29. Since air is introduced from the outside by the amount of air blown from the gap of the polarizer unit 10 through the inlet port 52, it is possible to prevent the polarizer cooling path 40 from becoming excessively negative, and the blower 21 Can drive efficiently. In the present embodiment, the introduction port 52 is formed downstream of the flow control means 51, but the introduction port 52 can be formed at any position as long as it is upstream of the cooler 22 and the filter 23. .

These flow rate adjusting means 51 and the introduction port 52 constitute the static pressure mechanism 50 of this embodiment.

Further, the optical alignment device 1 is provided with an air curtain mechanism 60 for forming the air curtain AC as shown in Figs. The air curtain mechanism 60 includes an air supply port 61 through which high-pressure air is supplied, a blow nozzle 62 for blowing the supplied air, an exhaust nozzle 63 for exhausting the blown air, and air. A blower (blower) 64 to be provided is provided. The air supplied to the air supply port 61 is dehumidified so that the dew point is about -50 ° C to -90 ° C or less, and the foreign matter is removed, so that it is low dew point highly clean air (clean dry air). Moreover, if it is equivalent low dew point high degree of cleanliness and transmits ultraviolet rays, gases other than clean dry air, for example, an inert gas such as nitrogen may be used. The air supplied to the blow nozzle 62 may be supplied from a facility of a factory that installs the optical alignment device 1, or may be supplied from a separately installed air generating means (eg, a cylinder).

The blow nozzle 62 extends along the long direction of the lamp 4, and is provided with one blower port 62A. This tuyere 62A spans the length of the light exit opening 3A of the housing 3 in the long direction, and more specifically, is formed over the length of the polarizer unit 10 in the long direction. In addition, the blower port 62A is arranged to blow air substantially parallel to the polarizer unit 10.

The exhaust nozzle 63 extends along the long direction of the lamp 4 and is provided with one inlet 63A facing the blow nozzle 62. That is, the suction port 63A is formed over the light exit opening 3A, and more specifically, the length of the polarizer unit 10 in the long direction. The outlet of the exhaust nozzle 63 is connected via a blower 64 and a duct 65.

In this embodiment, the blower openings 62A and the exhaust nozzles 63 are provided one by one, but the blower openings 62A and the exhaust nozzles 63 are provided at a length in the long direction of the light exit opening 3A of the housing 3. It may be worn, and more specifically, a plurality of polarizer units 10 may be formed over the length of the long direction. These blow nozzles 62 and exhaust nozzles 63 may be fixed to the housing 3 or may be fixed to an irradiator mounting stand (not shown) supporting the housing 3. In addition, although the blower is used for the blower 64 in this embodiment, the blower 21 is not limited to these structures.

The air supplied to the blow nozzle 62 is located below the light exit opening 3A, more specifically below the polarizer unit 10, from the blower 62A formed over the light exit opening 3A. It flows perpendicular to the long direction of 4). Thereby, the air curtain AC is formed below the light exit opening 3A. The blown air is sucked from the suction port 63A of the exhaust nozzle 63, is drawn into the blower 64 through the duct 65, and is discharged as a factory exhaust from the blower 64.

Thus, by providing the air curtain mechanism 60 which forms the air curtain AC in the light exit opening 3A of the housing 3, the air curtain AC is formed in the light exit opening 3A, so that the light The foreign material may be blown off before the foreign material is attached to the member installed in the exit opening 3A. Thereby, it is possible to prevent foreign matter from adhering to the lower surface (the surface on the light output side) of the member provided in the light output opening 3A. In addition, since the blower opening 62A of the blow nozzle 62 is formed over the length of the light output opening 3A, the air curtain AC is formed over the entire light output opening 3A, so the light output opening 3A ), It is possible to reliably prevent foreign matters from adhering to the member provided in), and thus it is possible to prevent a decrease in the amount of light.

In addition, since the air curtain mechanism 60 forms the air curtain AC in the short direction of the light exit opening 3A and the lamp 4, air in the long direction of the light exit opening 3A and the lamp 4 Compared to the case of forming the curtain AC, the flow rate of air can be reduced. Therefore, the facility burden of the factory supplying air can be reduced, and the need to separately install the pressurizing means is eliminated, and the ability of the blower 64 can be reduced, so that the blower 64 can be miniaturized.

In particular, in this embodiment, the polarizer unit 10 is provided in the light exit opening 3A. When a foreign substance adheres to the polarizer unit 10, in the portion where the foreign substance adheres, the transmittance of ultraviolet light decreases, and the illuminance of the polarized light irradiated to the object W is lowered. In this embodiment, since the air curtain mechanism 60 is provided at the exit (light emission side) of the polarizer unit 10, the air curtain AC is formed below the polarizer unit 10, so that the It is possible to prevent foreign matter from adhering to the lower surface, and suppress the decrease in polarization characteristics and light amount.

In addition, since the flow of air is formed below the polarizer unit 10, the flow of the air can cool the polarizer unit 10 more effectively.

As described above, according to the present embodiment, the reflector 5 and the lamp 4 are housed in the housing 3 of the light irradiator 2, and the air curtain mechanism is provided in the light exit opening 3A of the housing 3. It was set as the structure provided with (60). With this configuration, it is possible to suppress foreign matter from adhering to the lower surface of the member (in this embodiment, the polarizer unit 10) provided in the light exit opening 3A.

Further, according to the present embodiment, the air curtain mechanism 60 is configured to form the air curtain AC in the short direction of the light exit opening 3A. This configuration makes it possible to shorten the length of wind flow of the air curtain AC, so that the flow rate of air can be reduced compared to the case where the air curtain AC is formed in the long direction of the light exit opening 3A. have.

Further, according to the present embodiment, the air curtain mechanism 60 is configured to form an air curtain AC perpendicular to the long direction of the lamp 4. This configuration makes it possible to shorten the length of wind flow of the air curtain AC, so that the flow rate of air can be reduced compared to the case where the air curtain AC is formed in the long direction of the lamp 4.

In addition, according to the present embodiment, the light emitting opening 3A of the housing 3 is provided with a polarizer unit 10, and the light emitting side of the polarizer unit 10 is provided with an air curtain mechanism 60. Did. With this configuration, since the air curtain AC is formed between the light alignment object W and the polarizer unit 10 facing the light alignment object W, it is possible to suppress foreign matter from adhering to the lower surface of the polarization unit 10. have.

<Second Embodiment>

In the first embodiment, the polarizer unit 10 is provided opposite to the light alignment object W. In the second embodiment, a transparent body (light transmitting member) 70 is provided on the light exit side of the polarizer unit 10. . In addition, in 2nd Embodiment, the same code | symbol is attached | subjected to the same part as 1st Embodiment, and the description is abbreviate | omitted.

4 is a front view showing the optical alignment device 100 according to the second embodiment, and is a view showing an enlarged circumference of the polarizer unit 10.

The light alignment device 100 includes a light irradiator 2, a polarizer unit 10, and a cooling unit 20, and as shown in FIG. 4, a transparent body (light transmitting member) 70 and air An air curtain mechanism 160 for forming the curtain AC is provided.

The transparent body 70 is, for example, a plate-shaped light transmitting member that does not have filter characteristics (wavelength selection characteristics) such as a quartz plate. The transparent body 70 is provided on the light emission side of the polarizer unit 10, and the polarizer unit 10 is covered by the transparent body 70. Specifically, the polarizer unit holder 8 is formed with a rectangular frame body 8A when viewed from a plane below the polarizer unit 10, and a transparent body 70 is supported within the frame body 8A. . Thereby, the space T divided by the polarizer unit 10 and the transparent body 70 is formed in the polarizer unit holder 8.

The air curtain mechanism 160 is provided with an air supply port 61 through which high-pressure air is supplied, and a blow nozzle 162 for blowing the supplied air. The air supply port 61 is fixed to the polarizer unit holder 8, and a blow nozzle 162 is provided on the polarizer unit holder 8.

The blow nozzle 162 is provided with a pair of nozzle bodies 162A, and these pair of nozzle bodies 162A are arranged on both sides of the transparent body 70 and extend along the long direction of the lamp 4. . The air supply ports 61 are connected to the pair of nozzle bodies 162A, respectively.

In addition, the blow nozzle 162 extends upward from the nozzle body 162A to the transparent body 70 (blowing port) 162B, and extends downward from the nozzle body 162A to the transparent body 70. It has a ventilation port (ventilation port) 162C. The blowing ports 162B and 162C face each other, spanning the length of the light exit opening 3A of the housing 3 in the long direction, and more specifically, are formed over the length of the transparent body 70 in the long direction. In addition, the blowing ports 162B and 162C extend perpendicular to the long direction of the lamp 4 so as to blow air approximately parallel to the transparent body 70.

In addition, the blow nozzle 162 is the middle of the transparent body 70 (polarizer unit 10) in the direction in which the air blown from the blowing port 162B is orthogonal to the long direction of the lamp 4 (in this embodiment) , Approximately in the middle). At this time, by supplying the air of the same pressure to each of the air supply ports 61, by making the path in the blow nozzle 162 the same on both sides, it can be joined in the center approximately.

Further, in the present embodiment, the air supply ports 61 are provided in each of the pair of nozzle bodies 162A, but when the pair of nozzle bodies 162A are in communication, one air supply port 61 may be provided. . In addition, although each of the blowing ports 162B and 162C is installed in each nozzle body 162A, the blowing ports 162B and 162C span the length of the light exit opening 3A of the housing 3 in the long direction, and more Specifically, a plurality of polarizer units 10 may be provided over the length in the long direction.

The air supplied to the blow nozzle 162 sets the space T between the polarizer unit 10 and the transparent body 70 from the blowing port 162B provided over the light exit opening 3A, and the long direction of the lamp 4 Flows orthogonally against. Thereby, the air curtain AC is formed below the polarizer unit 10. As described above, since the flow of air is formed below the polarizer unit 10, the flow of the air can cool the polarizer unit 10 more effectively.

In addition, since the space T becomes a static pressure, air is blown outward from the gap between the transparent body 70 and the polarizer unit holder 8 (hereinafter referred to as the gap of the transparent body 70), so that the transparent body 70 and the polarizer unit It is possible to prevent foreign matter from entering the space T from the gap of the fixing table 8. Thereby, it is possible to reliably prevent foreign matter from adhering to or invading the polarizer unit 10. In this way, it is possible to reliably prevent intrusion of foreign matter into the space T and the polarizer cooling path 40 without forming a means for hermetically closing the gap of the transparent body 70 and the gap of the polarizer unit 10. As a result, the number of parts of the optical alignment device 1 can be reduced, and the manufacturing process can be simplified.

The air supplied to the blow nozzle 162 flows downward from the blower port 162C provided over the light exit opening 3A so as to be perpendicular to the long direction of the lamp 4. Thereby, since the air curtain AC is formed below the transparent body 70, the foreign substance can be blown off before the foreign substance adheres to the transparent body 70, so that it is on the lower surface of the transparent body 70 (on the light emission side). It can prevent foreign matter from adhering.

In addition, since the air blown from the blowing port 162B is configured to join in the middle of the transparent body 70, the flow rate of the air can be reduced, so that the burden on equipment in the factory supplying air can be reduced. In addition, there is no need to separately install a pressing means.

As described above, according to the present embodiment, since the transparent body 70, which is a light transmitting member, is provided at the exit of the polarizer unit 10, foreign matter from entering or adhering to the polarizer unit 10 can be suppressed. In addition, since the air curtain mechanism 60 is provided at the outlet of the transparent body 70, since the air curtain AC is formed between the light-oriented object W and the transparent object 70 facing the light-oriented object W, the transparent body 70 ), It is possible to suppress foreign matter from adhering to the lower surface.

Moreover, according to this embodiment, the transparent object 70 and the polarizer unit 10 are provided in order from the exit side to the light exit opening 3A of the housing 3, and the air curtain mechanism is provided at the exit of the polarizer unit 10. It was set as the structure provided with (60). Also in this configuration, since the transparent body 70 is provided at the outlet of the polarizer unit 10, foreign matter from entering or adhering to the polarizer unit 10 can be suppressed. In addition, since the air curtain AC is formed in the space T between the transparent body 70 and the polarizer unit 10, the polarizer unit 10 can be cooled more effectively by the flow of air in the air curtain AC. . In addition, by forming the air curtain AC in the space T, since the space T becomes a static pressure, cooling air can be blown out from the gap of the transparent body 70, so that foreign matter can be prevented from entering the space T. .

Further, in the present embodiment, the air curtain AC is formed in the space T, but the air curtain AC in the space T may be omitted.

<Third embodiment>

In the second embodiment, the polarizer unit 10 is provided, but in the third embodiment, the polarizer unit 10 is omitted. In addition, in 3rd embodiment, the same code | symbol is attached | subjected to the same part as 1st embodiment, and description is abbreviate | omitted.

5 is a front view showing the optical alignment device 200 according to the third embodiment.

The light alignment device 200 includes a light irradiator 2, a cooling unit 220 and an air curtain mechanism 60. The cooling unit 220 is configured similarly to the cooling unit 20 of the first embodiment, except that the polarizer cooling path 40 is not provided.

That is, the light alignment device 200 is provided with a transparent body 6 as a light transmitting member in the light exit opening 3A of the housing 3 and an air curtain mechanism 60 at the outlet of the transparent body 6. Was done. With this configuration, since the air curtain AC is formed between the photo-alignment object W and the transparent body 6 facing the photo-alignment object W, it is possible to suppress foreign matter from adhering to the lower surface of the transparent body 6.

However, it is needless to say that the above-described embodiment is one embodiment of the present invention, and can be appropriately changed without departing from the spirit of the present invention.

For example, in the above-described first and second embodiments, in the polarizer cooling path 40, the static pressure mechanism 50 is connected to the inlet 21B of the blower 21 and the duct 29 connecting the housing 3. Although installed, the inlet 21B of the blower 21 and the housing 3 may be simply connected to the duct 29, as in the light irradiation apparatus 300 shown in FIG. 6.

In the above-described embodiment, the air curtain AC is formed by blowing air from the blow nozzle 62 and exhausting air from the exhaust nozzle 63. However, the configuration for forming the air curtain AC is It is not limited to this. For example, the air curtain AC may be formed by exhausting air from the exhaust nozzle 63 without blowing air from the blow nozzle 62. In addition, as shown in FIG. 7, the air curtain AC may be formed by omitting the blow nozzle 62 and exhausting air from the exhaust nozzle 63.

In addition, although the light source was demonstrated as the lamp 4 which emits ultraviolet light in the above-mentioned embodiment, the light source is not limited to this.

In addition, although the transparent body 6, the wavelength selection filter 7, and the transparent body 70 were provided as light transmitting members in the above-described embodiment, the light transmitting members are not limited to these.

Further, in the above-described embodiment, the polarizer unit 10 is composed of a plurality of wire grid polarizers 16, but one wire grid polarizer 16 may be used.

In addition, although the wire grid polarizer 16 was used as a polarizer in the above-described embodiment, the polarizer may be, for example, a polarizer using a vapor-deposited film.

In the above-described embodiment, the blowers 21, the coolers 22, and the filters 23 are arranged in an order from the upstream, but the arrangement order of these can be arbitrarily changed.

Further, in the above-described embodiment, in order to individually control the temperature of the cooling wind flowing through the heat source cooling path 30 and the polarizer cooling path 40, the blowers 21 and 21 are individually controlled, but the coolers 22 and 22 are used. The cooling temperature by may be set to another temperature.

In addition, although the heat source cooling path 30 and the polarizer cooling path 40 were completely independent in the above-described embodiment, a part of the heat source cooling path 30 and the polarizer cooling path 40, for example, a blower 21, At least one of the cooler 22 and the filter 23 may be common.

In addition, in the above-described embodiment, the cooling air of the heat source cooling path 30 and the polarizer cooling path 40 was circulated, but the cooling wind is not necessarily circulated.

1, 100, 200, 300: light alignment device (light irradiation device)
2: Light irradiator
3: Housing
3A: light exit opening
4: Lamp (light source)
5: reflector
10: polarizer unit
60, 160: air curtain mechanism
70: transparent body (without light transmission)
AC: Air curtain

Claims (8)

A reflector and a light source are housed in a housing of the light irradiator, a polarizer unit is provided in a light output opening of the housing, an air curtain mechanism is provided on a light output side of the polarizer unit, and the air curtain mechanism is configured to And an air curtain is formed on the light output side to blow air parallel to the polarizer unit to form an air curtain over the entire light output opening. The optical alignment device according to claim 1, wherein the air curtain mechanism has a blow nozzle for blowing air and an exhaust nozzle for discharging air blown from the blow nozzle. The light alignment device according to claim 1 or 2, wherein the air curtain mechanism forms an air curtain in a short direction of the light exit opening. The optical alignment device according to claim 1 or 2, wherein the air curtain mechanism forms an air curtain orthogonal to the long direction of the light source. The optical alignment device according to claim 1 or 2, wherein a light transmitting member is provided on the light output side of the polarizer unit, and the air curtain mechanism is provided on the light output side of the light transmission member. The method according to claim 1 or 2, characterized in that the light emitting opening of the housing is provided with a light transmitting member and the polarizer unit in order, and the air curtain mechanism is provided on the light output side of the polarizer unit. Optical orientation device. delete delete

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