WO2011025305A3 - 신규한 폴리아믹산, 폴리이미드, 이를 포함하는 감광성 수지 조성물 및 이로부터 제조된 드라이 필름 - Google Patents

신규한 폴리아믹산, 폴리이미드, 이를 포함하는 감광성 수지 조성물 및 이로부터 제조된 드라이 필름 Download PDF

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WO2011025305A3
WO2011025305A3 PCT/KR2010/005793 KR2010005793W WO2011025305A3 WO 2011025305 A3 WO2011025305 A3 WO 2011025305A3 KR 2010005793 W KR2010005793 W KR 2010005793W WO 2011025305 A3 WO2011025305 A3 WO 2011025305A3
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composition
photosensitive resin
polyamic acid
dry film
film produced
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PCT/KR2010/005793
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English (en)
French (fr)
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WO2011025305A2 (ko
Inventor
이광주
경유진
고주은
송헌식
심정진
김희정
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주식회사 엘지화학
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Priority to JP2011549083A priority Critical patent/JP2012516927A/ja
Priority to CN2010800133145A priority patent/CN102361913B/zh
Publication of WO2011025305A2 publication Critical patent/WO2011025305A2/ko
Publication of WO2011025305A3 publication Critical patent/WO2011025305A3/ko

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/037Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyamides or polyimides
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0047Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0387Polyamides or polyimides
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0002Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Materials For Photolithography (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Paints Or Removers (AREA)
  • Polymerisation Methods In General (AREA)

Abstract

본 발명은 열중합성 또는 광중합성 관능기를 포함하는 신규한 폴리아믹산, 고해상도의 패턴 형성이 가능하고 알칼리계 수용액에 의한 현상성이 우수하며 가요성, 밀착성, 용접 내열성, PCT (Pressure cooker test) 내성이 우수한 경화 도막을 제공할 수 있는 감광성 수지 조성물 및 이로부터 제조된 드라이 필름에 관한 것이다.
PCT/KR2010/005793 2009-08-28 2010-08-27 신규한 폴리아믹산, 폴리이미드, 이를 포함하는 감광성 수지 조성물 및 이로부터 제조된 드라이 필름 WO2011025305A2 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011549083A JP2012516927A (ja) 2009-08-28 2010-08-27 新規なポリアミック酸、ポリイミド、これを含む感光性樹脂組成物およびこれから製造されたドライフィルム
CN2010800133145A CN102361913B (zh) 2009-08-28 2010-08-27 聚酰胺酸、聚酰亚胺、包含其的感光树脂组合物以及由其制备的干燥膜

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR20090080606 2009-08-28
KR10-2009-0080606 2009-08-28
KR10-2010-0046602 2010-05-18
KR1020100046602A KR101010036B1 (ko) 2009-08-28 2010-05-18 신규한 폴리아믹산, 이를 포함하는 감광성 수지 조성물 및 이로부터 제조된 드라이 필름

Publications (2)

Publication Number Publication Date
WO2011025305A2 WO2011025305A2 (ko) 2011-03-03
WO2011025305A3 true WO2011025305A3 (ko) 2011-07-14

Family

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PCT/KR2010/005793 WO2011025305A2 (ko) 2009-08-28 2010-08-27 신규한 폴리아믹산, 폴리이미드, 이를 포함하는 감광성 수지 조성물 및 이로부터 제조된 드라이 필름

Country Status (6)

Country Link
US (2) US20110200939A1 (ko)
JP (1) JP2012516927A (ko)
KR (1) KR101010036B1 (ko)
CN (1) CN102361913B (ko)
TW (1) TW201116554A (ko)
WO (1) WO2011025305A2 (ko)

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JP5878621B2 (ja) 2011-03-18 2016-03-08 エルジー・ケム・リミテッド 新規なポリアミック酸、感光性樹脂組成物、ドライフィルムおよび回路基板
WO2013165211A1 (ko) * 2012-05-03 2013-11-07 주식회사 엘지화학 신규한 폴리아믹산, 감광성 수지 조성물, 드라이 필름 및 회로 기판
US9410017B2 (en) 2012-05-03 2016-08-09 Lg Chem, Ltd. Poly-amic acid, photo-sensitive resin composition, dry film, and circuit board
KR101545724B1 (ko) * 2012-08-01 2015-08-19 주식회사 엘지화학 광경화성 및 열경화성을 갖는 수지 조성물과, 드라이 필름 솔더 레지스트
WO2014021590A1 (ko) * 2012-08-01 2014-02-06 주식회사 엘지화학 광경화성 및 열경화성을 갖는 수지 조성물과, 드라이 필름 솔더 레지스트
JP2014218651A (ja) * 2013-04-08 2014-11-20 Jnc株式会社 熱硬化性組成物
CN105408417B (zh) * 2013-07-25 2017-08-25 捷恩智株式会社 热硬化性树脂组合物、硬化膜、带硬化膜的基板以及电子零件
JP6572770B2 (ja) * 2013-10-09 2019-09-11 日立化成デュポンマイクロシステムズ株式会社 ポリイミド前駆体を含む樹脂組成物、及びそれを用いた硬化膜の製造方法
JP6462983B2 (ja) * 2014-01-28 2019-01-30 太陽インキ製造株式会社 感光性熱硬化性樹脂組成物およびフレキシブルプリント配線板
US10719016B2 (en) 2015-08-21 2020-07-21 Asahi Kasei Kabushiki Kaisha Photosensitive resin composition, polyimide production method, and semiconductor device
KR102147108B1 (ko) * 2016-06-02 2020-08-25 후지필름 가부시키가이샤 적층체의 제조 방법, 반도체 소자의 제조 방법 및 적층체
WO2018097625A2 (ko) 2016-11-28 2018-05-31 주식회사 엘지화학 액정 배향막, 이의 제조방법 및 이를 이용한 액정표시소자
KR102066549B1 (ko) * 2016-12-01 2020-01-15 삼성에스디아이 주식회사 감광성 수지 조성물, 이를 이용한 블랙 화소 격벽층 및 디스플레이 장치
US10264586B2 (en) * 2016-12-09 2019-04-16 At&T Mobility Ii Llc Cloud-based packet controller and methods for use therewith
KR102087261B1 (ko) 2017-02-16 2020-03-10 삼성에스디아이 주식회사 감광성 수지 조성물, 이를 이용한 블랙 화소 격벽층 및 디스플레이 장치
US20180259850A1 (en) * 2017-03-10 2018-09-13 Tokyo Ohka Kogyo Co., Ltd. Method for forming patterned cured film, photosensitive composition, dry film, and method for producing plated shaped article
CN106990673B (zh) * 2017-04-20 2021-06-11 浙江福斯特新材料研究院有限公司 一种透明、感光性聚酰亚胺树脂组合物
TWI635359B (zh) * 2017-06-02 2018-09-11 律勝科技股份有限公司 感光性聚醯亞胺樹脂組合物及應用其之覆蓋膜的製造方法
KR102065718B1 (ko) 2017-10-17 2020-02-11 주식회사 엘지화학 액정 배향막 및 이를 이용한 액정표시소자
CN110515269B (zh) * 2018-05-22 2022-12-20 臻鼎科技股份有限公司 感光树脂组合物及其制备方法、高分子膜及覆铜板
WO2020184424A1 (ja) * 2019-03-08 2020-09-17 日産化学株式会社 液晶配向処理剤、液晶配向膜及び液晶表示素子
CN110804181B (zh) * 2019-11-06 2021-04-20 中山大学 一种透明光敏聚酰亚胺树脂、聚酰亚胺薄膜及其制备方法
JP7332076B1 (ja) 2022-03-18 2023-08-23 日産化学株式会社 絶縁膜形成用感光性樹脂組成物

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Also Published As

Publication number Publication date
US20120012366A1 (en) 2012-01-19
CN102361913B (zh) 2013-11-13
TW201116554A (en) 2011-05-16
US20110200939A1 (en) 2011-08-18
CN102361913A (zh) 2012-02-22
JP2012516927A (ja) 2012-07-26
KR101010036B1 (ko) 2011-01-21
WO2011025305A2 (ko) 2011-03-03

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