WO2011024539A1 - Dispositif à dilatation utilisant un nanotube en carbone et procédé pour sa fabrication - Google Patents

Dispositif à dilatation utilisant un nanotube en carbone et procédé pour sa fabrication Download PDF

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WO2011024539A1
WO2011024539A1 PCT/JP2010/060042 JP2010060042W WO2011024539A1 WO 2011024539 A1 WO2011024539 A1 WO 2011024539A1 JP 2010060042 W JP2010060042 W JP 2010060042W WO 2011024539 A1 WO2011024539 A1 WO 2011024539A1
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cnt film
oriented
film structure
expansion
contraction
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PCT/JP2010/060042
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English (en)
Japanese (ja)
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健郎 山田
賢治 畠
裕平 早水
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独立行政法人産業技術総合研究所
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/32—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring the deformation in a solid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/043—Monosilane
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10773—Halogenated silanes obtained by disproportionation and molecular rearrangement of halogenated silanes

Definitions

  • the present invention relates to an expansion device configured from an oriented carbon nanotube film structure (hereinafter, referred to as an oriented CNT film structure) disposed on an expandable base material, and a method for producing the same.
  • an oriented carbon nanotube film structure hereinafter, referred to as an oriented CNT film structure
  • Stretching devices that detect stretching are mainly made of metal or semiconductor. These expansion and contraction devices detect expansion and contraction from the change in resistance when metal and semiconductor expand and contract (strain), and measure the amount of expansion and contraction. Compared with elastic materials such as rubber, semiconductors and metals have an extremely small amount of deformation that can be essentially expanded and contracted, and in elastic deformation that can measure strain repeatedly, the amount of expansion or contraction (strain amount) that can be measured is about 5% It is. If the material is plastically deformed, it is possible to measure an elongation of about 30%, but since the material deforms irreversibly due to the plastic deformation, the expansion and contraction can be measured only once.
  • the expansion and contraction apparatus capable of detecting expansion and contraction according to the prior art does not use a sufficiently expandable member such as metal or semiconductor, so that the expansion and contraction that can be repeatedly detected is limited to about 5%.
  • the present invention provides an expansion device capable of repeatedly detecting expansion and contraction much larger than that of the prior art.
  • the term “elastic” means that the material does not break even if it receives expansion and contraction, and the property of stretching and shrinking means that the material is more elastic than the elastic material. Indicates a low degree.
  • an oriented CNT film structure comprising a plurality of CNTs arranged on a stretchable substrate and oriented in a predetermined direction is provided, and the oriented CNT film structure is fractured by elongation.
  • An elastic device is provided which is formed by forming a crack band.
  • the cracked zone may have a crosslinked structure of at least one CNT.
  • the at least one CNT constituting the cross-linked structure may be disposed to be inclined with respect to the expansion and contraction direction.
  • the cracked bands may be arranged in a mesh after reaching a predetermined elongation.
  • the oriented CNT film structure may be densified.
  • the plurality of CNTs may be pasted and arranged on the stretchable base material without warping.
  • the oriented CNT film structure may have a Hermann's orientation coefficient of 0 or more, preferably 0.3 or more and 1 or less.
  • the oriented CNT film structure may have a weight density of 0.1 to 1.5 g / cm 3 and / or have a thickness of 10 nm to 100 ⁇ m.
  • an aligned CNT film structure including a plurality of CNTs arranged on a stretchable base material and oriented in a predetermined direction, and the aligned CNT film structure are fractured by elongation. And forming a fissure zone, and a member for supplying an expansion and contraction force for supplying an expansion and contraction force to the oriented CNT film structure.
  • the elastic force supply member may be a fixture for attaching to the elastic drive device.
  • the expansion and contraction device may include a detection device that detects expansion and contraction.
  • the oriented CNT film structure is provided with an oriented CNT film structure provided on a stretchable base material and including a plurality of CNTs oriented in a predetermined direction, and the stretched CNT film structure
  • An expansion and contraction drive device is provided that includes an expansion and contraction device in which a crack is generated to form a crack band, and a drive device that drives the expansion and contraction device.
  • a stretching apparatus comprising an oriented CNT film structure, which detects a structural change in the oriented CNT film structure (the degree of stretching of the CNT), it is remarkable compared to the conventional method. It is possible to provide an expansion device capable of repeatedly detecting large expansion and contraction exceeding 200%. In addition, it can be applied to human skin using this stretch device to realize a stretch device that detects human movement, etc., and it can be fully expected to be used in new industries.
  • FIG. 5 is a schematic view illustrating a process of making the CNT microfilm structure of the present invention according to one embodiment. It is a figure which shows the crack band generation
  • FIG. 6 illustrates the operating characteristics of the telescopic device with sensing device of the present invention according to one embodiment. It is a figure which shows the oriented CNT film arrangement
  • FIG. 2 is a view showing the shape of the base material of Example 1;
  • FIG. 7 is a view showing an example of a manufacturing process of the expansion and contraction device of Example 1.
  • FIG. 5 is a schematic view showing a method of manufacturing a base material of Example 1; FIG.
  • FIG. 2 is a schematic view showing the shape of a molded substrate of Example 1;
  • FIG. 2 is a schematic view showing the shape of a molded substrate of Example 1;
  • FIG. 2 is a schematic view showing the shape of a molded substrate of Example 1;
  • FIG. 2 is a schematic view showing the shape of a molded substrate of Example 1;
  • FIG. 5 is a schematic view showing a CNT mounting method of Example 1.
  • FIG. 7 is a schematic view of a stretching apparatus using the CNT microfilm structure of Example 2.
  • FIG. 10 is a schematic view of an extension and contraction device including a detection device provided in a rigid area according to a third embodiment.
  • FIG. 14 is a diagram showing a process of manufacturing a detection device of Example 3.
  • FIG. 14 is a schematic view of an expansion and contraction device including the detection device having elasticity according to a fourth embodiment.
  • FIG. 14 is a diagram showing a process of manufacturing a detection device of Example 4.
  • FIG. 18 is a schematic view of a telescopic device provided with a rigid telescopic force supply unit according to a fifth embodiment.
  • FIG. 18 is a schematic view of an expansion and contraction apparatus including an expansion and contraction power supply portion having elasticity according to a sixth embodiment.
  • the expansion-contraction apparatus with the member for expansion-contraction force supply of Example 7. The example of a motion detection by the expansion-contraction apparatus with the member for expansion-contraction force supply of Example 7.
  • FIG. 21 is a view showing the method of manufacturing the extension and contraction drive device of the tenth embodiment.
  • FIG. 21 is a view showing a manufacturing process of a member for supplying and receiving an expansion and contraction force of Example 10.
  • FIG. 21 is a view showing the manufacturing process of the stretchable detection device of the tenth embodiment.
  • Stretching device 2 Base material 3 Oriented CNT film structure 4 Stretching force supply member 5 Detection device 6 Orientation direction of CNT 7 Crack band 8 CNT crosslinked body 9 Drive device 10 Stretching drive device 11 Hard substrate 12 Rigidity area 13 Stretching area 14 Conductive paste 15 Conductive film 16 Stretchable electrode 17 Wiring 18 Adhesion layer 19 Sealing material 20 Oriented CNT film structure 21 Base material 22 Electronic circuit 23 Intermediate layer 24 Gap 50 CNT micro film structure 51 Oriented CNT film structure 52 Resist film 53 Resist mask 60 Stretching device of Example 2 70 Stretching device of Example 3 75 Sensing device 80 Stretching device of Example 4 85 Sensing device 90 Stretching device of Example 5 94 Stretching force supply member 95 Adhesive 96 Glass 96 Substrate 100 Stretching device 104 of Example 6 Stretching force supply member 105 Adhesive 106 Rubber sheet 110 Stretching device 114 of the seventh embodiment Stretching force supply member 120 Stretching device 124 of the eighth embodiment Stretching force
  • FIG. 1 is a schematic view of the telescopic device of the present invention according to the first embodiment.
  • the telescopic device herein refers to a telescopic device.
  • the expansion / contraction apparatus 1 of the present invention is characterized in that it comprises an oriented CNT film structure 3 disposed on an expandable base material 2 and including a plurality of carbon nanotubes (CNTs) oriented in a predetermined direction.
  • the stretching device 1 may be provided with a stretching force supply member 4 which is a member for supplying a stretching force to the oriented CNT film structure 3.
  • a detection device 5 may be provided that detects expansion and contraction by measuring a structural change of the aligned CNT film structure 3.
  • the present invention also provides an expansion / contraction drive device 10 provided with the above-mentioned expansion / contraction device 1 and further comprising a drive device for driving the expansion / contraction device 1 (FIG. 2).
  • the expansion / contraction device 1 provided with such an oriented CNT film structure 3 and the expansion / contraction drive device 10 not only can detect large expansion and contraction but also can be used repeatedly, and show performance far superior to that of the conventional expansion and contraction device.
  • the base material in the present invention is stretchable in at least one direction and only needs to be able to arrange the oriented CNT film structure 3, and does not depend on the shape, the material, and the mounting method.
  • the material may be stretchable as long as it can be, for example, resin, rubber, an elastic body, and the like.
  • materials with very high stretchability such as polydimethylsiloxane (PDMS) are preferred because large stretch can be detected.
  • PDMS polydimethylsiloxane
  • the substrate 2 itself does not have electrical conductivity.
  • the shape of the substrate is particularly preferably a three-dimensional shape such as a plate-like rectangular solid that does not cause stress concentration due to expansion and contraction, but is not limited thereto.
  • the shape of the substrate made of the oriented CNT film structure 20 and the base 21 may be a flat surface (FIG. 3A), a curved surface (FIG. 3B) or a flexible one (FIG. 3C).
  • the thickness of the substrate There is no limitation on the thickness of the substrate.
  • the entire surface of the substrate 21 does not have to be covered with the oriented CNT film structure 20.
  • the oriented CNT film structure 20 is patterned (FIG. 3 (d)), the substrate surface is partially exposed (FIG. 3 (e)), and the electronic circuit 22 is formed (FIG. 3 (d)).
  • Fig. 3 (f) can be considered.
  • the oriented CNT film structure 20 does not have to be mounted in direct contact with the substrate 21, and an intermediate layer 23 may be provided between the substrate and the substrate for the purpose of improving adhesiveness (FIG. g)).
  • a gap 24 may be provided as an intermediate layer (FIG. 3 (h)).
  • CNT film refers to an aggregate of a plurality of CNTs grown from a growth substrate, which is obtained by exfoliating the aligned CNT aggregate from the growth substrate.
  • a stretch device excellent in stretchability can be obtained.
  • the above-mentioned CNT film is defined as an oriented CNT film.
  • the shape and form of the oriented CNT film may be arranged on the above-described expandable and expandable base material, as long as the densification step can be carried out, and may be, for example, a thin plate, a sheet, a foil or a ribbon.
  • the density of the oriented CNT film is in the range of 0.01 g / cm 3 or more and 0.1 g / cm 3 or less, when the oriented CNT film is removed from the growth substrate, it does not break apart, and will be described later.
  • the density is so low that it can be densified, which is preferable.
  • the oriented CNT film can be produced by a known chemical vapor synthesis method. This is obtained by forming a catalyst layer on a growth substrate and subjecting the catalyst to chemical vapor deposition (CVD) of a plurality of CNTs. An oriented CNT film is obtained by growing a plurality of CNTs oriented in a certain direction from a catalyst patterned on a growth substrate using the method described in Japanese Patent Application No. 2009-001586 and Japanese Patent Application No. 2006-527894. Be The properties of the oriented CNT film produced by the method described in Japanese Patent Application No. 2009-001586 and Japanese Patent Application No.
  • 2006-527894 depend on the details of the manufacturing conditions, but a single-layer CNT content of 99% (two layers) as a typical value CNT, ratio of the number of single-walled CNTs to multi-walled CNTs, and the synthesized aligned single-walled CNTs are observed with a transmission electron microscope to obtain from images), density: 0.03 g / cm 3 , G / D ratio: 2 .5 to 40, BET-specific surface area: 1150 m 2 / g, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99.9%, absolute purity 98%, Hermann's orientation coefficient 0.3 to 0.7 It is.
  • the oriented CNT film structure refers to a structure of CNTs which can be disposed on a stretchable base material and which is filled with a plurality of CNTs at a high density. Such an oriented CNT film structure can be obtained by removing the oriented CNT film from the growth substrate, arranging it on another stretchable substrate, and performing a densification treatment.
  • a film-like oriented CNT film structure whose position and orientation are controlled, arranged on a substrate without curling and uniform in thickness is preferable because control of structural change during expansion and contraction is easy.
  • the state in which the position of the aligned CNT film structure is controlled refers to a state in which the aligned CNT film structure is disposed in a desired region on the base material.
  • a state in which the orientation of the aligned CNT film structure is controlled refers to a state in which the alignment directions of the aligned CNT film structure are aligned within an acceptable range.
  • a state in which the oriented CNT film structure does not warp refers to a state in which the aligned CNT film structure is in a desired region on the substrate and each CNT of the oriented CNT film is within the vertical tolerance.
  • one region may be formed on the base material, or a plurality of regions may be formed, and furthermore, the regions may be formed to be separated from each other.
  • the plurality of CNTs constituting the aligned CNT film structure are such that adjacent CNTs are strongly coupled to each other by the van der Waals force, and the weight density of the CNTs in the aligned CNT film structure is generally 0.1 to It is 1.5 g / cm 3 , more preferably 0.2 to 1.5 g / cm 3 .
  • the weight density of CNTs in the aligned CNT film structure is equal to or more than the above lower limit, the CNTs are uniformly filled without gaps, and the aligned CNT film structure exhibits a rigid appearance as a solid, Sometimes the required structural changes described below will be obtained.
  • the weight density of the CNTs in the oriented CNT film structure is generally preferably as large as possible, but the upper limit value thereof is about 1.5 g / cm 3 because of the limitation in production.
  • the degree of orientation of the aligned CNT film structure can be evaluated by Herman's orientation factor.
  • the Hermann's orientation coefficient is preferably 0 or more, more preferably 0.3 or more and 1 or less.
  • the Hermann's orientation coefficient of at least one orientation region is in the range of 0 or more and 1 or less, a crack band is suitably generated in the oriented CNT film structure during expansion and contraction.
  • the Hermann's orientation coefficient of at least one orientation region is in the range of 0.3 or more and 1 or less, and the orientation direction is at an angle close to 90 degrees with respect to the direction of expansion and contraction, concentration of strain on CNTs It is possible to obtain an oriented CNT film structure which is not broken even when it is relaxed and subjected to large expansion and contraction.
  • the thickness of the oriented CNT film structure can be arbitrarily set to a desired value according to the needs of the stretching apparatus.
  • the thickness of the oriented CNT film structure is 10 nm or more, the integrity as a film can be maintained, and the disposing step and the densification step can be performed.
  • the upper limit of the film thickness is not particularly limited, but when it is used for such a stretching device, about 100 ⁇ m is preferable in order to have both stretchability and flexibility.
  • the stretchable region of the aligned CNT film structure is preferably as uniform as possible.
  • the crack band is easily generated uniformly in the expansion and contraction region at the time of expansion and contraction, and is easily developed into a network-like crack band. In this way, it is possible to obtain an aligned CNT film structure which does not break even when subjected to large expansion and contraction.
  • the CNTs constituting the CNT layer may be single-walled CNTs or multi-walled CNTs. Which type of CNT is to be used can be determined according to the required properties of the oriented CNT film structure. For example, when high conductivity, flexibility, etc. are required, single-walled CNTs can be used. It can be used, and multilayer CNT can be used when rigidity, metallic properties and the like are important.
  • the CNT micro film structure refers to an oriented CNT film structure patterned and processed.
  • the patterning is suitable for disposing the aligned CNT film structure in a desired region on the substrate, which makes it possible to manufacture an expansion device exhibiting desired performance with good controllability.
  • a resist is applied on the oriented CNT film structure, an arbitrary pattern is drawn on the resist by lithography, and the oriented CNT film structure is formed using the resist as a mask It becomes easy to etch unnecessary parts and form circuits or devices of any shape. That is, according to this, application of known patterning technology and etching technology becomes possible, and it becomes possible to strictly control the shape and manufacture an oriented CNT film structure having desired characteristics.
  • a resist film 52 is applied to the oriented CNT film structure 51.
  • any resist such as an electron beam resist, a photoresist, etc. can be used as long as it can form a shape, and even if it has a low etching selectivity with respect to CNT, it can be selected It is sufficient to form a resist sufficiently thicker than the oriented CNT film structure 51 to a ratio or more.
  • drawing for example, electron beam drawing or photolithography
  • drawing for example, electron beam drawing or photolithography
  • the drawn resist is developed to form a resist mask 53 on the oriented CNT film structure 51 (FIG. 4C).
  • the aligned CNT film structure 51 is etched, and the resist mask 53 is used to process the aligned CNT film structure 51 into a desired shape (FIG. 4 (d)).
  • the resist mask 53 is removed to obtain a CNT micro film structure 50 having a desired shape (FIG. 4 (e)).
  • the oriented CNT film structure when the oriented CNT film structure is patterned, it is necessary to consider the following. (1) Even in the case of a highly densified oriented CNT film, it may not be possible to uniformly apply, for example, a silica-based resist HSQ (hydrogen silsesquioxane) (FOX 16: manufactured by Dow Corning), which can obtain an etching selectivity. Also, it may be difficult to obtain repeatability of the HSQ resist. (2) It is desirable that a microfilm structure composed of oriented CNT films different in orientation can be built in one substrate.
  • HSQ hydrogen silsesquioxane
  • diluted polymethyl methacrylate (PMMA) or a resist (ZEP520A / made by Nippon Zeon Co., Ltd.) is applied and solidified to form an oriented CNT film structure.
  • PMMA polymethyl methacrylate
  • ZP520A a resist
  • RIE reactive ion etching
  • the object deforms when it is distorted by the stretching force.
  • the oriented CNT film structure 3 which has not been stretched at first has no cracks or cracks. (FIG. 5 (a)).
  • the stretched first pass is a plurality of fissures between densely packed CNTs in the region in which the CNTs are oriented. Will occur.
  • each cleft rapidly becomes band-shaped and longitudinally elongated along the orientation direction of the CNTs.
  • the clefts start to fuse one after another (FIG. 5 (c)).
  • the CNTs are fibrous materials, as shown in FIG. 5 (d), the CNTs at the cleft boundaries remain in the form of cross-linking of the fused cleft when the clefts fuse.
  • Such clefts, including cross-linking CNTs, are referred to herein as cracked bands.
  • crosslinked CNTs refer to CNTs that bridge crack bands.
  • An oriented CNT film structure that can be present as a continuous structure while absorbing elongation by generating a crack band having a CNT cross-linked structure without breaking even under a large elongation is realized for the first time in the present invention It is a material that exhibits an innovative stretch function.
  • the density of the CNTs in the crack or crack 7 is extremely low compared to the density of the CNTs in the aligned CNT structure 8.
  • the CNTs are densely packed.
  • the crack band provided with the CNT cross-linked structure 8 (CNT cross-linked body), which has a low density of CNTs, absorbs stretching deformation.
  • the large elongation is absorbed by increasing the crack band comprising the CNT cross-linked structure 8 where the density of the CNTs is low.
  • the aligned CNT film structure By separating the aligned CNT film structure into such a high density region and a low density region, it is possible to obtain an aligned CNT film structure which is not broken, broken or peeled even if it is repeatedly subjected to large expansion and contraction.
  • the mechanism by which the crack band having the CNT cross-linked structure is generated is not clear at present, the following factors are presumed to be important.
  • CNT is a one-dimensional fibrous substance is important in that when the fissures are fused, the interface becomes fibrous and crosslinks the crack band.
  • the interaction between the CNTs causes a break and largely develops to prevent the tearing of the aligned CNT film structure.
  • the cracked zone having the CNT cross-linked structure can be realized only by controlling the complicated relation of various structural and characteristic factors.
  • the oriented CNT film structure When the oriented CNT film structure is disposed on a stretchable base material and stretched, there is a problem that the oriented CNT film structure is easily broken. Then, in order to solve this subject, this inventor repeated the earnest device described below.
  • the oriented CNT film structure one in which a plurality of CNTs are oriented in a predetermined direction in at least a partial region of the oriented CNT film structure was used. As a result, many cracks are generated in the aligned CNT film structure without strain concentration and fracture of the aligned CNT film structure when subjected to tension, and their fusion leads to a crack band. There has occurred.
  • the orientation direction 6 (the orientation direction of the CNTs) of at least one orientation region of the oriented CNT film structure 3 is at an angle close to 90 degrees (see FIG. 6) or 90 degrees with respect to the direction of expansion and contraction
  • the densification step and arrangement step were devised to control the position and orientation of the aligned CNT film structure.
  • a crack is more likely to occur, and at the same time, distortion is prevented from concentrating on the CNT itself.
  • peeling of the aligned CNT film structure 3 from the base material 2 was prevented at the time of expansion and contraction.
  • the thickness of the film of the aligned CNT film structure was 10 nm or more and 100 ⁇ m or less. If the film is too thin, production of the aligned CNT film structure becomes extremely difficult, and if the film thickness is 100 ⁇ m or more, the aligned CNT film structure becomes solid and loses flexibility, and breakage easily occurs. If the thickness of the film of the oriented CNT film structure is 10 nm or more and 100 ⁇ m or less, the arrangement step, the densification step, etc. described in detail below can be carried out, it is hard to break, crack band is suitably generated, orientation A CNT film structure could be obtained.
  • the density of the aligned CNT film structure is in the range of 0.01 g / cm 3 or more and 0.1 g / cm 3 or less, the CNTs are uniformly filled without gaps and the aligned CNT film structure is solid. It had a rigid appearance, and a crack band occurred during expansion and contraction.
  • FIG. 10 is a photograph of the oriented CNT film structure of the stretching device undergoing various stretching.
  • the CNTs in the oriented CNT film structure are oriented in the vertical direction of the figure.
  • the size of the figure is 60 ⁇ m per side, and the numerical value at the upper left of each figure indicates the expansion rate.
  • the cracked band includes a plurality of cross-linked CNTs inclined with respect to the cracked band, so that the aligned CNT film structure does not break even when it is stretched.
  • the crack band 7 is generated from this trace, and as the elongation is increased, the crack band 7 becomes large as shown from the lower left figure to the lower right figure in FIG. However, basically, the density and number did not increase so much.
  • the width of the crack band 7 (see FIG. 12A) and the high density of the oriented CNT film structure 3 not including the crack band (crack) 7
  • the change with the extension of the width of the region was measured and plotted on the right of FIG. 12 (b).
  • the width of the high density region of the oriented CNT film structure 3 hardly changes.
  • the width of the cracked zone 7 increases in proportion to the elongation. As the width of the crack band 7 increases, it can be seen that the crack band 7 absorbs elongation.
  • the crack band is generated, grown and contracted reversibly in the second expansion and contraction.
  • the telescopic device according to the invention can be used repeatedly with large telescopic.
  • the detection device in the present specification is a device that detects the expansion and contraction of the expansion and contraction device.
  • the detection device may be appropriately selected as long as it can detect the expansion and contraction of the expansion and contraction device, regardless of the structure, the shape, and the material, and may be disposed in non-contact with the expansion and contraction device.
  • a device may be used that detects expansion and contraction by attaching two electrodes to the aligned CNT film structure and detecting a change in resistance of the aligned CNT film structure whose structure has changed due to expansion and contraction.
  • it may be an optical device which detects the structural change of the aligned CNT film structure by the change of the transmittance.
  • the detection device When the detection device is disposed on the expandable base material of the expansion and contraction device, the base material expands and contracts, so the detection device is deformed to change the detection value, or the detection device itself is destroyed, or the detection device Has a problem that it peels from the substrate.
  • the following two solutions have been provided by the present invention.
  • Solution 1 A rigid area where expansion and contraction were suppressed was provided, and a detection device was installed in that area. In this way, when the expansion and contraction device expands and contracts, the detection device is not affected by the expansion and contraction, and the above problem can be solved.
  • a detection device including two electrodes was attached to the oriented CNT film structure, and a stretching device was manufactured to detect a change in resistance of the oriented CNT film structure due to stretching.
  • a glass which is a hard substrate was bonded with an adhesive to the surface of the stretchable substrate on which the oriented CNT film structure is disposed and the opposite surface. In this way, a rigid area was formed that does not expand and contract. Such rigid zones were formed in two separate areas.
  • the adhesion layer is necessary to strongly attach the stretchable electrode described later to the stretchable base, and without it, the stretchable electrode was easily peeled off from the base.
  • a metal wire (lead wire) was disposed on the adhesion layer, and an aligned CNT film structure was formed thereon.
  • conductive CNT rubber paste which is a material having stretchability and conductivity, was applied onto the adhesion layer so as to cover the metal wiring, to form a stretchable electrode.
  • the conductive rubber paste was manufactured using the method described in Non-patent document (Nature Materials, 8 (6), 494-499 (2009)).
  • the stretchable electrode was covered with PDMS encapsulant. This PDMS sealing material has an effect of reducing the stress generated in the detection device at the time of expansion and contraction.
  • the detection device manufactured by the above method was able to accurately and repeatedly, repeatedly and repeatedly detect the resistance change due to the structural change of the aligned CNT film structure generated when the expansion and contraction device expands and contracts.
  • This expansion and contraction device was attached to an expansion and contraction driving device that generates expansion and contraction force between two surfaces, and the resistance change rate of the expansion and contraction device with respect to expansion and contraction was measured by a detection device. Specifically, the resistance change of the aligned CNT film structure due to the generation of the crack band in the aligned CNT film structure and the change of the structure due to the growth along with the elongation is detected. As shown by the aligned CNT in FIG. 13 (a), the measurable resistance change rate is shown for the extension of 250% or more. This is because the stretch device can measure the stretch without breaking in the oriented CNT film structure even when stretched to about 250%.
  • a strain gauge which is an existing expansion / contraction measurement element, is attached to an expansion / contraction driving device that generates expansion / contraction force between two surfaces, and resistance change rate against expansion / contraction (resistance change from initial resistance value / initial resistance The value X100) was measured.
  • a linear resistance change rate was shown for strain amounts up to about 5%. Above 5%, the rate of change in resistance rises sharply, suggesting that the strain gauge is broken.
  • the degree of change in resistance differs between the area with a small expansion rate and the area with a large expansion rate.
  • the monotonous increase in resistance with respect to expansion means that the amount of expansion and contraction of large expansion and contraction can be quantitatively evaluated using this expansion and contraction device.
  • the telescopic device with a detecting device manufactured by the method of the third embodiment is attached to a telescopic drive device that generates telescopic force between two surfaces, and the second telescoping is repeated up to 500 times. Rate of resistance change at the time of Even after repeated large expansion and contraction, the resistance change associated with the expansion and contraction is very reproducible, and the aligned CNT film structure is not broken. Thereby, it is understood that the expansion and contraction device according to the present invention can repeatedly detect large expansion and contraction.
  • the member for supplying the stretching force in the present specification is a member for supplying the stretching force to the oriented CNT film structure.
  • the expansion / contraction force supply member 4 can also be used as a fixture for attaching to the drive device 9, in which case the expansion / contraction force generated by the drive device 9 is efficiently supplied to the expansion / contraction device 1.
  • the member for supplying the expansion and contraction force can be appropriately selected regardless of the structure, the shape, and the material as long as the expansion and contraction force can be supplied to the oriented CNT film structure of the expansion and contraction device.
  • a member harder than the stretchable substrate bonded to the stretchable substrate may be used as the stretch force supply member.
  • the member for supplying the expansion and contraction force may be made of, for example, a rigid material such as a plate-like or rod-like metal or glass, or may be bonded to the expandable base using an adhesive or the like.
  • a member for providing a stretching force having such rigidity can be pinched and pulled, so that a uniform and controlled stretching force can be provided to a desired area of the stretching device.
  • the member for supplying the expansion and contraction force may be an expandable member different from the base on which the oriented CNT film structure is disposed.
  • a bandage, a net tights, etc. can be illustrated, for example.
  • an adhesive may be used to adhere a bandage or net tights to the back of the stretchable substrate.
  • the oriented CNT film structure is disposed on the surface of the stretchable substrate.
  • Use of a stretchable adhesive, such as a PDMS adhesive is preferable because it can prevent peeling between the plaster / net tights and the stretchable substrate.
  • An expansion device using a bandage as a member for supplying expansion force can be attached to any object such as a human body, and can detect deformation, displacement, and movement of the object.
  • a person using an expansion device using net tights as an expansion force supply member can wear it as clothes.
  • the telescopic drive device is a device provided with a telescopic device and a drive device for driving the telescopic device.
  • the drive device can be appropriately selected regardless of the structure, the shape, and the material, as long as it can expand and contract the expansion device by applying expansion and contraction force to the expansion and contraction device. For example, when an expansion device is connected between two objects displaced by an appropriate driving force, the distance between the two objects can be measured by measuring the amount of expansion and contraction of the expansion device with a detection device.
  • two objects are driving devices.
  • a drive device a machine provided with movable parts, such as a robot and a machining apparatus provided with an arm and a joint, can be exemplified.
  • the entire device including the telescopic device is defined as a telescopic drive device. If necessary, in order to efficiently supply expansion and contraction force to the expansion and contraction device, an expansion and contraction force supply member may be used.
  • the stretchable base material 2 is manufactured in advance using a known method (base material manufacturing process).
  • the substrate may be any stretchable substrate on which the oriented CNT film can be placed.
  • an oriented CNT film is produced in advance (oriented CNT film production step).
  • the growth substrate used to produce the oriented CNT film is made of a non-stretchable material because it is exposed to high temperatures.
  • the oriented CNT film manufactured on the substrate for growth is removed from the substrate for growth, and it is disposed by pasting it on a substrate capable of stretching (oriented CNT film placement step) to perform a densification treatment
  • the aligned CNT film structure 3 is manufactured (densification step).
  • the detection apparatus 5 for detecting expansion-contraction is manufactured (detection apparatus manufacturing process).
  • membrane structure 3 through the base material 2 is manufactured (member for manufacturing elastic member supply process).
  • the expansion-contraction drive device 10 which is provided with the expansion-contraction device 1 manufactured in this way and is equipped with the drive device 9 which drives the expansion-contraction device 1 may be manufactured (extension-contraction drive device manufacturing process).
  • the oriented CNT film disposing step the oriented CNT film synthesized on the growth substrate is removed from the growth substrate, and the oriented CNT film is pasted and disposed on another stretchable substrate. It is.
  • the oriented CNT film removing step may be any method as long as the oriented CNT film can be removed from the growth substrate to the extent that the desired shape and properties are not significantly impaired. Specifically, an oriented CNT film formed on a growth substrate is held by tweezers and directly removed, or a synthetic resin membrane is attached to the tip of the tweezers, and the oriented CNT film is attached to the membrane.
  • the method of picking and removing can be realized by the practitioner appropriately selecting according to the situation (FIG. 14).
  • the taken out oriented CNT film is pasted and arranged on the stretchable base material 2, and the oriented CNT film is exposed to a liquid, but the operator can select this process as appropriate depending on the situation. There are several ways to achieve this.
  • the oriented CNT film removed in the removing step is moved onto the stretchable substrate 2 on which the liquid has been dropped in advance and released from the tweezers. Then, the aligned CNT film is aligned at an arbitrary position in the liquid with tweezers with a membrane.
  • oriented CNT film may be pasted and disposed on a stretchable substrate.
  • oriented CNT films may be exposed to liquid as a place other than the stretchable base (FIG. 16).
  • a liquid which exposes the oriented CNT film it is preferable to use one which has affinity for CNT and which has no component remaining after evaporation.
  • a liquid for example, water, alcohols (isopropyl alcohol, ethanol, methanol), acetones (acetone), hexane, toluene, cyclohexane, DMF (dimethylformamide) and the like can be used.
  • the time for exposure to the liquid may be a time sufficient for the whole to be uniformly wet without bubbles remaining inside the oriented CNT film.
  • the oriented CNT film in a state of being exposed to the liquid and placed on the surface of the expandable substrate 2 is densified, and is adhered to the surface of the expandable substrate 2
  • the aligned CNT film structure 3 is formed.
  • This step is typically performed by drying the liquid-oriented oriented CNT film.
  • Methods of drying the oriented CNT film include, for example, natural drying in air at room temperature, natural drying in a nitrogen atmosphere at room temperature, vacuum drying, natural drying in the presence of an inert gas such as argon, and such atmosphere conditions. And the like can be used.
  • the orientation of the oriented CNT film structure 3 thus obtained is not impaired even by densification as compared to the oriented CNT film.
  • the oriented CNT film In the densification treatment (densification step), the oriented CNT film is immersed in a liquid having an affinity to CNTs, and the evaporation of the liquid immersed between the CNTs in the CNT aggregate and the surface tension of the liquid accordingly It is a method of inducing aggregation of CNTs in a CNT assembly to improve the number density of the CNT assembly.
  • densification treatment of the oriented CNT film causes the liquid to soak or adhere to the CNT aggregate to dry, densification proceeds. This phenomenon is considered to occur when the adjacent CNTs stick to each other due to surface tension when the liquid attached to the individual CNTs evaporates.
  • the shrinkage direction of the oriented CNT film is defined in one dimension on the direction perpendicular to the substrate . This is not only that the migration of individual CNTs along the surface of the substrate is limited by the adhesion between the oriented CNT film and the substrate, but the evaporation of the liquid made from the side of the oriented CNT film is exclusively high By generating surface tension in the longitudinal direction. As a result, the oriented CNT film is uniformly densified only in the thickness direction, and therefore, the bulk-like CNT aggregate vertically grown from the growth substrate shrinks into an island when densifying treatment is performed. Problem does not occur.
  • the above densification step is a method in which the oriented CNT film is exposed to liquid and then dried, but the mechanism by which the oriented CNT film shrinks in the densification step is the liquid that has entered between the CNTs as described above It is presumed that the surface tension of the CNTs attracts each other, and the stuck state of the CNTs is maintained even after the liquid is evaporated. Therefore, the densification step may be any method as long as it generates surface tension between CNTs, and for example, a method using high temperature steam can be applied.
  • the thickness of the oriented CNT film was reduced to 100 ⁇ m or less, and the intensity of the illumination of the microscope used for observation was changed from the maximum to the minimum before the drying. This is presumed to be that the dried state of the oriented CNT film is controlled by adjusting the illuminance of the stereomicroscope, and curling can be suppressed.
  • the oriented CNT film gripped with tweezers is transferred to the needle tip of the manipulator with a needle, and with the manipulator with a needle as well, the manipulator is controlled at a desired position and in a desired orientation. While placing, pressing with a manipulator, then, the solution used for densification can be dropped and densification can be performed.
  • the tip whose position can be controlled may be a needle-like or rod-like tip having a height such as tungsten, or a flexible tip such as a resin.
  • an endable jig such as tweezers may be used as the tip.
  • methanol as a solution for densification, in particular.
  • a plurality of oriented CNT films may be stacked and densified to form a CNT layer of a desired thickness.
  • an oriented CNT film structure having a target density can be obtained by one oriented CNT film, and in the latter case, a plurality of oriented CNT films are laminated in the same orientation direction.
  • Example 1 Telescopic Device
  • the expansion device according to the present invention and the method for producing the same will be described in more detail by way of specific examples, but the present invention is not limited to these examples.
  • the telescopic device according to the invention will be described with reference to FIG.
  • the stretching device 1 includes an oriented CNT film structure 3 disposed on a stretchable substrate 2 and including a plurality of CNTs oriented in a predetermined direction.
  • the manufactured stretch device 1 has a uniform thickness of 1 mm, and a thickness of 600 nm and a size of 1 mm (length: height of oriented CNT film) on a plate-like PDMS stretchable base material 2 shown in FIG. Orientation) ⁇ 30 mm (width) oriented CNT film structure 3 is disposed.
  • the CNTs constituting the oriented CNT film structure 3 were oriented uniformly with a Herman coefficient of 0.7 throughout the entire surface.
  • the oriented CNT film structure 3 had a density of 0.5 g / cm 3 and a BET specific surface area of 1150 m 2 / g. G / D ratio: 2.5 to 40, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99.9%, absolute purity 98% as typical values of CNTs constituting the oriented CNT film structure 3 Met.
  • these values were made the same as the characteristics of the oriented CNT film used for manufacture.
  • Such an oriented CNT film structure 3 was manufactured using a plurality of oriented CNT films having a size of height (length) 1 mm, thickness 6 ⁇ m, and width 18 mm.
  • the oriented CNT film was disposed by providing an overlapping portion of about 1 mm, and was densified to obtain an oriented CNT film structure 3.
  • the oriented CNT film has a single-walled CNT content of 99% as a typical value (bi-layer CNT, the ratio of the number of single-walled CNTs to multi-walled CNTs, and the aligned single-walled CNT aggregate is observed with a transmission electron microscope. Determined from the image), density: 0.03 g / cm 3 , G / D ratio: 2.5 to 40, BET-specific surface area: 1150 m 2 / g, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99 .9%, absolute purity 98%, Hermann's orientation coefficient 0.7.
  • the stretch device 1 including the oriented CNT film structure 3 on the stretchable base material 2 obtained in this way is not broken even by a large stretch of 250%, and can be repeatedly used 500 times or more, and the conventional stretch device Show a performance that greatly surpasses.
  • the stretchable base material 2 is manufactured in advance using a known method (base material manufacturing process).
  • the substrate 2 may be any stretchable substrate on which the oriented CNT film can be disposed.
  • an oriented CNT film is produced in advance (oriented CNT film production step).
  • the oriented CNT film is preferably grown from a catalyst placed on a growth substrate, but any method that can produce an oriented CNT film of a desired shape and shape can be used appropriately.
  • the growth substrate used to produce the oriented CNT film is made of a non-stretchable material because it is exposed to high temperatures.
  • the oriented CNT film manufactured on the substrate for growth is removed from the substrate for growth, and it is disposed by pasting it on the stretchable substrate 2 (oriented CNT film placement step), and densification treatment By doing this, the aligned CNT film structure 3 is manufactured (densification step).
  • the oriented CNT film disposing step and the densification step may be performed sequentially or simultaneously.
  • the densification step may be performed before the oriented CNT film placement step. At this time, it is important to control the characteristics that the oriented CNT film structure 3 is disposed on the substrate 2 in a state where its position and orientation are controlled and is not warped.
  • the detection apparatus 5 for detecting expansion-contraction is manufactured (detection apparatus manufacturing process). Specifically, for example, two electrodes are manufactured in the oriented CNT film structure 3, and when it is expanded and contracted, a change in resistance value is detected based on a structural change of the oriented CNT film structure 3. Furthermore, as necessary, a stretchable force supplying member 4 for supplying a stretchable force (distortion) to the stretchable base material 2 and the oriented CNT film structure 3 may be manufactured. As an expansion / contraction force supplying member, for example, it is possible to fix the both ends of the elastic base with a rigid base such as a glass plate which does not have rigid elasticity.
  • the manufacturing process and procedure for obtaining the expansion and contraction device of the present invention are not limited to the above-mentioned example, and some steps may be omitted or the order may be changed as needed.
  • the detection device manufacturing process and the elastic force supplying member manufacturing process may be performed in an appropriate order or at the same time, and may be performed after or before the substrate manufacturing process, and then the oriented CNT film arranging process may be performed. You may go later.
  • the defoaming step was carried out according to the following procedure.
  • the precursor of the substrate (PDMS) was prepared by stirring in vacuo.
  • the used silt pot 184 was divided into an unreacted liquid and a catalyst liquid, and 30 g of the unreacted liquid and 3 g of the catalyst liquid were placed in a Teflon (registered trademark) container.
  • a vacuum stirrer vacuum mixer Awatori Neritaro ARV-200, manufactured by Shinky Co., Ltd.
  • defoaming stirring was carried out in a vacuum together with a Teflon (registered trademark) container containing both solutions of a sill pot.
  • the plate-like forming process was performed according to the following procedure.
  • the defoamed and prepared precursor was dropped onto a glass plate having a side of 30 cm and a thickness of 4.8 mm, which is a flat plate with minimal distortion (upper left in FIG. 19).
  • a glass plate having a side of 30 cm and a thickness of 4.8 mm, which is a flat plate with minimal distortion (upper left in FIG. 19).
  • When dripping a precursor it dripped from the container directly on the glass plate. Moreover, when dripping, it does not carry out with a spatula etc. in order to cause mixing of the bubble in a base material.
  • the plate is distorted, distortion of the plate appears on the main surface of the substrate formed by the contact surface of the substrate and the plate, so that uniform distortion is generated on the main surface of the substrate when the substrate is stretched It becomes difficult.
  • Spacing materials were placed at the four corners of the dropped surface of the plate onto which the precursor was dropped (lower glass plate).
  • spacing material four silicon rubber plates with a thickness of 1 mm are prepared in the shape of 28 to 30 cm long and 0.8 to 1 cm wide strips, with the long sides of the strips extending along the sides. Placed in ( Figure 19 upper right)
  • the spacing material may be placed on the four sides in this manner, or may be placed at four corners with different shapes.
  • the thickness of the base material obtained can be changed from 0.5 mm to about 10 mm by changing the thickness of the spacing material.
  • the same effect as this glass plate can be obtained by using a plate having the same smoothness as the sufficient weight. It is also possible to create a substrate having a thickness of 0.5 mm or less by adding weight to a glass plate placed on top.
  • the precursor While the precursor is crushed, it is left for several hours to several days until the precursor solidifies (gels). Although it depends on the type of PDMS, in the case of PDMS used in this example, it is placed at room temperature for about one or two days.
  • the peeling process was performed in the following procedures. After completion of the plate-like forming step, the glass plate (upper glass plate) or lower glass plate obtained by crushing the base material is peeled off from the base material (bottom in FIG. 19) in order to use the base material. Next, the remaining lower or upper glass plate is peeled off, and the substrate having a uniform film thickness is taken out (FIG. 19, lower right). Immediately after peeling, the surface and both surfaces of the substrate formed of the glass substrate are covered with aluminum foil. By this, the contamination of the base material can be prevented, and a clean elastic surface can be maintained.
  • the molding process was performed according to the following procedure.
  • the substrate having a uniform film thickness is processed into a dog-bone type shown in FIG. 20 in which stress concentration does not occur due to the shape of the substrate, or a plate-like rectangular solid shown in FIG. 21, FIG. 22 and FIG.
  • Processing is performed with the aluminum foil attached in the peeling step.
  • the forming process may use a known technique, and may be performed by scissors, mechanical processing, or laser cutting.
  • the oriented CNT film can be produced by a known chemical vapor synthesis method. It produces a catalyst on a substrate and causes the catalyst to chemical vapor deposition (CVD) multiple CNTs.
  • CVD chemical vapor deposition
  • a plurality of CNTs oriented in a predetermined direction were grown from the catalyst patterned on the substrate using the method described in Japanese Patent Application No. 2009-001586 and the like.
  • the oriented CNT film used in this example has a shape of height 1 mm, thickness 6 ⁇ m, and width 18 mm.
  • the properties of the oriented CNT film which is an oriented aggregate of single-walled CNT obtained by this production method, depend on the details of the production conditions, but under the production conditions described in Example 1 of Japanese Patent Application No. 2009-001586, the typical value is
  • the single-walled CNT content is 99% (bilayer CNT, the ratio of the number of single-walled CNT to multi-walled CNT, and the synthesized aligned CNT aggregate is observed with a transmission electron microscope and determined from an image), density: 0 .03 g / cm 3 , G / D ratio: 2.5 to 40, BET-specific surface area: 1150 m 2 / g, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99.9%, absolute purity 98% Hermann's orientation coefficient is 0.3 to 0.7.
  • the oriented CNT film produced under such conditions maintained its integrity even after peeling from the substrate.
  • an oriented CNT film manufactured in advance by the above method is set so as to be within the field of view of a stereomicroscope for every synthesized substrate, and the oriented CNT film is a group for synthesis while observing with a microscope Removed from the material. Removal of the oriented CNT film from the synthesis substrate was performed directly with tweezers while observing with a microscope.
  • the oriented CNT film taken out in the taking-out step is moved onto the stretchable substrate 2 on which the liquid has been dropped in advance and released from the tweezers, and then the oriented CNT film is put in the liquid with the tweezers with a membrane.
  • the method of aligning to an arbitrary position was used (FIG. 18). At this time, the amount of liquid to be dropped is about 1 to 5 drops with a Pasteur pipette.
  • the oriented CNT film structure 3 may be wrinkled. Therefore, the solution is placed on the base material 2 used for densification, and the oriented CNT film, the tweezers handling the oriented CNT film, and the membrane handling the oriented CNT film are sufficiently immersed in the solution and observed with a stereomicroscope. , I did not cause bubbles. Isopropyl alcohol was used as a liquid for exposing the oriented CNT film. Thus, the position and orientation direction of the oriented CNT film were controlled and disposed on the substrate 2.
  • an angle between the central axis of the base shown in FIG. 17 which is the expansion and contraction direction of the base 2 and the direction in which the CNTs of the oriented CNT film are oriented is 90 degrees.
  • the oriented CNT film was placed along the central axis. As a result, cracked bodies, CNT cross-linked bodies and the like were uniformly generated, and even if the base material was greatly elongated, the aligned CNT film structure did not break.
  • a large oriented CNT film structure may be produced by using the step of stacking and arranging oriented CNT films described below. In this way, expansion and contraction in a large area can be detected.
  • the oriented CNT film was exposed to a liquid and dried to densify it to obtain an oriented CNT film structure.
  • the arrangement of the oriented CNT film and the densification may be performed simultaneously.
  • the solution is dried from the periphery of the oriented CNT film, only a part of the oriented CNT film may be densified to be in close contact with the substrate as an oriented CNT film structure. In that case, it becomes difficult to arrange the oriented CNT film at an arbitrary position or to obtain a desired orientation direction. Therefore, the solution was dried and the placement of the oriented CNT film was completed before the densification step was completed.
  • isopropyl alcohol or methanol was used as a solution. Isopropyl alcohol and methanol easily penetrated between the CNTs in the oriented CNT film, and the entire oriented CNT film was uniformly densified.
  • a part of the oriented CNT film may be warped on the substrate surface.
  • illumination is applied when the oriented CNT film is dried, and when the oriented CNT film is viewed, the illumination is weakened to control evaporation of the solution, thereby speeding up the densification process. Control the backlash.
  • the solution was dropped to the previously arranged oriented CNT film to perform densification.
  • the overlapping arrangement was performed according to the following procedure. First, about 1 to 5 drops of isopropyl alcohol were dropped by a Pasteur pipette in advance so as to cover the overlapping region of the aligned CNT film structure 3 disposed on the substrate 2 by the above method.
  • a further advantage of the oriented CNT film lay-up process is that the oriented CNT film structure may be ruptured and the stretcher that has broken can also repair the fracture.
  • the upper limit of the weight density of the aligned CNT film structure that can be controlled in the present invention is not limited to 0.54 g / cm 3 used in this example. Although not specified herein, in principle, it is possible to achieve a wider range of weight density by controlling the diameter of the CNTs. Assuming that all CNTs have equal diameters and that the densification step will close-pack all CNTs, the CNT density after densification may increase as the diameter size of the CNTs decreases. It can be easily calculated.
  • the average diameter of the CNTs in the oriented CNT film structure used in each of the above-described examples is about 2.8 nm, but the weight density when the CNTs are closely packed in this case is about 0.78 g / cm 3 . is there.
  • Non-patent literature (Ya-Qiong Xu, et al, Vertical Array Growth of Small Diameter Single-Walled Carbon Nanotubes, J. Am. Chem. Soc., 128 (20), 6560-6561, 2006) It has been found that it is possible to make the diameter of the CNTs smaller (about 1.0 nm) by using the technique reported in the above. From this, it is thought that it is possible to increase the weight density up to about 1.5 g / cm 3 by reducing the diameter of the CNT, and a stretching device using the oriented CNT film structure of the above density It is considered to be easy to manufacture because the manufacturing method is identical.
  • the thickness of the oriented CNT film structure By controlling the original thickness and height of the oriented CNT film, it was possible to control the thickness of the oriented CNT film structure from 100 nm to 100 ⁇ m. Since the compression rate in the densification treatment is about 10, it suffices to roughly synthesize an oriented CNT film having a thickness 10 times that of the oriented CNT film structure.
  • the thickness of the oriented CNT film is controlled by patterning the catalyst using known semiconductor microfabrication techniques. Therefore, the thickness can be controlled by the accuracy and resolution of known semiconductor microfabrication techniques.
  • the catalyst When the thickness of the aligned CNT film structure is 100 nm, the catalyst may be patterned to a thickness of about 500 nm to 1 ⁇ m of the approximately aligned CNT film structure.
  • the stretchable device could be suitably manufactured from the aligned CNT film structure having a thickness of 100 nm to 100 ⁇ m obtained in this manner.
  • the aligned CNT film structure may contain a partially isotropic structure to the extent that the function is not impaired.
  • the FFT (Fast Fourier Transform) image was calculated based on the SEM image of the observed aligned CNT film structure. Although these FFT images differ in degree depending on the magnification and location of the SEM image, each exhibited anisotropy. This indicates that the CNTs of the oriented CNT film structure are oriented.
  • the Hermann's orientation factor F was calculated using this intensity profile, and a value of 0.7 was obtained, indicating that the CNTs in the oriented CNT film structure were oriented.
  • the stretching device using the CNT microfilm structure according to the present invention will be described in more detail by way of specific examples, but the present invention is not limited to these examples.
  • the telescopic device according to the invention will be described with reference to FIG.
  • the stretching device 60 includes a CNT microfilm structure 50 disposed on the stretchable substrate 2 and including a plurality of CNTs oriented in a predetermined direction.
  • the manufactured expansion device 60 has a uniform thickness of 1 mm, and on the plate-like PDMS elastic base 2 shown in the shape diagram 17, a thickness of 600 nm, a size of 0.8 mm (length: oriented CNT The film is constructed by arranging a CNT microfilm structure 50 of film height) ⁇ 250 mm (width).
  • the CNTs constituting the CNT microfilm structure 50 were uniformly oriented with an orientation with a Hermann coefficient of 0.7 throughout the entire surface.
  • the CNT micromembrane structure 50 had a density of 0.5 g / cm 3 and a BET specific surface area of 1150 m 2 / g.
  • G / D ratio 2.5 to 40
  • average outer diameter 2.5 nm
  • half-width 2 nm carbon purity 99.9%
  • absolute purity 98% as a typical value of CNT constituting the micro-membrane structure 3 Met.
  • Such a CNT micro membrane structure 50 was manufactured using a plurality of oriented CNT films having a size of height (length) 1 mm, thickness 6 ⁇ m, and width 18 mm.
  • the aligned CNT film was arranged by providing an overlapping portion of about 1 mm, densified, and then patterned into a desired shape to obtain a CNT microfilm structure 50.
  • the oriented CNT film has a single-walled CNT content of 99% as a typical value (bi-layer CNT, the number ratio of single-walled CNT to multi-walled CNT), and the synthesized aligned single-walled CNT aggregate is observed with a transmission electron microscope Density: 0.03 g / cm 3 , G / D ratio: 2.5 to 40, BET-specific surface area: 1150 m 2 / g, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99. 9% absolute purity 98% Herman's orientation coefficient 0.7.
  • the stretch device 60 provided with the CNT microfilm structure 50 on the stretchable substrate 2 thus obtained is not broken even by a large stretch of 250%, and can be repeatedly used 500 times or more, and the conventional stretch Demonstrates the ability to overwhelm the device.
  • the oriented CNT film structure is patterned by lithography to obtain an oriented CNT film structure having a desired shape. You can get it. Since the height and length of the oriented CNT film constituting the oriented CNT film structure depend on the synthesis conditions and the like, it is difficult to synthesize an oriented CNT film of a desired height (length) strictly. By etching the unnecessary part of the oriented CNT film structure by the method of this embodiment, it is possible to easily obtain an oriented CNT film structure having a desired shape with the precision of the microfabrication technology, and to obtain desired characteristics. There is a remarkable effect in manufacturing the telescopic device which it has.
  • auxiliary resist layer may be any material as long as it has a function of suppressing penetration of the second main resist layer into the aligned CNT film structure and can be etched equally to the aligned CNT film structure, for example, ZEP-520A or AZP-1357 may be used.
  • the dilution liquid may be anything as long as it can dilute the resist used as the sub resist layer, and the dilution amount is not limited as long as the second main resist can be drawn, the dilution amount, the coating method, and the baking conditions.
  • FOX 16 As the second main resist, FOX 16 was further applied, and spin coating was performed at 4500 rpm for 1 minute to form a 360 nm resist layer.
  • a predetermined pattern is drawn on the resist layer with an electron beam drawing apparatus (CABL 8000 / Crestech), which is developed with an aqueous solution of tetramethylammonium hydroxide (2.38% ZTMA-100) to obtain a mask of FOX16. It formed.
  • CABL 8000 / Crestech an electron beam drawing apparatus
  • tetramethylammonium hydroxide 2.38% ZTMA-100
  • reactive ion etching apparatus which (RIE-200L / Samco), firstly, the supply O 2 (10sccm, 80W, 10Pa , 7min) and, then, O 2 and Ar (10sccm, 80W, 10Pa, 3min) and Then, the exposed portion from the mask of the first sub resist layer and the aligned CNT film structure, that is, the unnecessary portion was removed.
  • O 2 10sccm, 80W, 10Pa , 7min
  • Ar oxygen
  • CNT fluff was removed cleanly and sharp edges were obtained.
  • the second main resist layer is removed using buffered hydrofluoric acid (110-BHF (4.7% HF, 36.2% NH 4 F, 59.1% H 2 O) / Morita Chemical Industries) And after rinsing with pure water, the first sub-resist layer is removed with a stripping solution (PG / microchem), and the desired shape is obtained by washing with IPA (isopropyl alcohol) and naturally drying. A telescopic device 60 provided with the CNT microstructure 50 was obtained.
  • buffered hydrofluoric acid 110-BHF (4.7% HF, 36.2% NH 4 F, 59.1% H 2 O) / Morita Chemical Industries
  • Example 3 Telescopic device provided with detection device provided in rigid area
  • the telescopic device including the detection device according to the present invention will be described in more detail by way of specific examples, but the present invention is not limited to these examples.
  • a telescopic device 70 provided with a detection device according to the invention will be described with reference to FIG.
  • the stretching device 70 includes an oriented CNT film structure 3 disposed on a stretchable substrate 2 and including a plurality of CNTs oriented in a predetermined direction.
  • a hard substrate 11 made of glass is adhered to two places on the back side where the oriented CNT film structure 3 of the substrate is disposed.
  • the hard substrate 11 also serves as an elastic force supply member which is a member for supplying the elastic force to the oriented CNT film structure 3. Since the hard substrate 11 does not expand or contract, a rigid area 12 which does not expand or contract is formed on the base material 2.
  • the detection device is disposed on the rigid area 12 on the surface on which the oriented CNT film structure 3 is disposed, and comprises a conductive paste 14 and a conductive film 15.
  • Such a detection device 70 is electrically connected to the oriented CNT film structure 3 and separated from each other by two to be attached to the rigid area 12, thereby detecting a change in resistance of the oriented CNT film structure 3 due to expansion and contraction. , The expansion and contraction device 70 which detects expansion and contraction was obtained.
  • the manufactured stretch device 70 has a uniform thickness of 1 mm, and a thickness of 600 nm and a size of 1 mm (length: height of an oriented CNT film) on a plate-like PDMS stretchable base shown in shape FIG. ) ⁇ 30 mm (width) oriented CNT film structure is disposed.
  • the CNTs constituting the oriented CNT film structure 3 were oriented uniformly with a Herman coefficient of 0.7 throughout the entire surface.
  • the oriented CNT film structure 3 had a density of 0.5 g / cm 3 and a BET specific surface area of 1150 m 2 / g.
  • CNTs constituting the oriented CNT film structure 3 have a G / D ratio of 2.5 to 40, an average outer diameter of 2.5 nm, a half width of 2 nm, a carbon purity of 99.9% and an absolute purity of 98. %Met. These values were assumed to be the same as the properties of the oriented CNT film used for the production.
  • Such an oriented CNT film structure 3 was manufactured using a plurality of oriented CNT films having a size of height (length) 1 mm, thickness 6 ⁇ m, and width 18 mm.
  • the oriented CNT film was disposed by providing an overlapping portion of about 1 mm and densified to obtain an oriented CNT film structure.
  • the oriented CNT film has a single-walled CNT content of 99% as a typical value (bi-layer CNT, the number ratio of single-walled CNT to multi-walled CNT), and the synthesized aligned single-walled CNT aggregate is observed with a transmission electron microscope Density: 0.03 g / cm 3 , G / D ratio: 2.5 to 40, BET-specific surface area: 1150 m 2 / g, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99. 9% absolute purity 98% Herman's orientation coefficient 0.7.
  • the detection device is configured of a silver paste, an aluminum foil, and a lead wire provided on the base shown in FIG. 20 with a rigid region that does not expand or contract and in the rigid region electrically connected to the aligned CNT film structure.
  • a detection device is provided.
  • a method of producing an extension device with a detection device will be described. After producing the extension device including the oriented CNT film structure or the CNT micro film structure by the method of Example 1 or Example 2, the detection device Manufactured.
  • the sensing device had to be in stable contact with the oriented CNT film structure of the stretching device.
  • the stable contact with the oriented CNT film structure refers to a state in which the change in resistance of the detection device is sufficiently smaller than the change in resistance of the expansion device at the time of expansion or contraction of the expansion device. It refers to the condition that does not cause dissociation at the junction of the device.
  • the elastic device was provided with the rigid area which does not expand-contract, and the detection apparatus was manufactured on it.
  • a step of providing a non-stretchable rigid area on the stretchable device manufactured by the method of Examples 1 and 2 and manufacturing the detection device thereon will be described in detail with reference to FIG.
  • a rigid area in which expansion and contraction were suppressed was provided on the rigid area 12 of the expansion and contraction device 70, and the detection device 75 was installed in the area.
  • the rigid area 12 was formed in the area shown in FIG. 20 so that expansion and contraction did not occur in the elastic force supply member described in the fifth embodiment. This solves the problem that the detection device 75 is deformed to change the detection value, the detection device 75 itself is destroyed, or the detection device 75 is peeled off from the base material 2.
  • the conductive paste 14 is made of the oriented CNT film structure 3. It apply
  • a silver paste was applied to the rigid region on the base of FIG. 20 from above the oriented CNT film structure disposed, to form a silver paste layer having a thickness of about 0.5 mm. The silver paste was applied onto the oriented CNT film structure 3 in the rigid area 12 with a spatula, and spread evenly with a spatula to form a uniform thickness.
  • aluminum foil was placed on the aluminum foil to construct a contact in order to have good conductivity and to facilitate connection with another measuring instrument such as a resistance meter. The aluminum foil and the resistance meter were connected using lead wires.
  • the telescopic device 70 provided with the detection device 75 having the rigid area 12 obtained in this way can not only detect as much as 250% expansion and contraction, but can be repeatedly used 500 times or more, and can It shows the performance that greatly hesitates.
  • Example 4 Telescopic device provided with a sensing device having telescopicity
  • FIG. 4 Another embodiment of a telescopic device with a detector according to the invention and a method of manufacturing the same will be described in detail.
  • a telescopic device 80 with a detector according to the invention will be described with reference to FIG.
  • the stretching device 80 includes an oriented CNT film structure 3 disposed on a stretchable substrate 2 and including a plurality of CNTs oriented in a predetermined direction.
  • the expansion and contraction device 80 includes a detection device 85 that detects expansion and contraction by measuring the structural change of the aligned CNT film structure 3.
  • the detection device 85 is composed of the oriented CNT film structure 3 and the adhesion layer 18 for improving the adhesion of the stretchable electrode to the base, the stretchable electrode 16, and the sealing material 19, and has stretchability.
  • Such a detection device 80 is electrically connected to the oriented CNT film structure 3 and separated by two and attached, and the expansion and contraction is detected by detecting the resistance change of the oriented CNT film structure 3 due to the expansion and contraction.
  • the telescopic device 80 was obtained.
  • Such an expansion and contraction device 80 including the stretchable detection device 85 greatly expands the application range to which the device can be applied because the entire expansion and contraction device has elasticity, which is very important in industrial application.
  • the substrate 2 has a thickness of 1 mm (length: 600 nm, size: 1 mm) on the plate-like PDMS stretchable substrate 2 shown in shape 21 with a uniform thickness of 1 mm according to the method of Example 1. Height of oriented CNT film) ⁇ 30 mm (width) manufactured.
  • the oriented CNT film structure 3 was disposed at the position shown in FIG. 28 on the substrate 2 by the method of Example 1.
  • the CNTs constituting the oriented CNT film structure 3 were oriented uniformly with a Herman coefficient of 0.7 throughout the entire surface.
  • the oriented CNT film structure 3 had a density of 0.5 g / cm 3 and a BET specific surface area of 1150 m 2 / g.
  • CNTs constituting an oriented CNT film structure have a G / D ratio of 2.5 to 40, an average outer diameter of 2.5 nm, a half width of 2 nm, a carbon purity of 99.9% and an absolute purity of 98%. Met. These values were assumed to be the same as the properties of the oriented CNT film used for the production.
  • Such an oriented CNT film structure 3 was manufactured using a plurality of oriented CNT films having a size of height (length) 1 mm, thickness 6 ⁇ m, and width 18 mm.
  • the oriented CNT film was disposed by providing an overlapping portion of about 1 mm, and was densified to obtain an oriented CNT film structure 3.
  • the oriented CNT film has a single-walled CNT content of 99% as a typical value (bi-layer CNT, the ratio of the number of single-walled CNT to multi-walled CNT), and the aligned single-walled CNT aggregate was observed with a transmission electron microscope Determined from the image), density: 0.03 g / cm 3 , G / D ratio: 2.5 to 40, BET-specific surface area: 1150 m 2 / g, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99 .9%, absolute purity 98%, Hermann's orientation coefficient 0.7.
  • the method of producing the stretchable device 80 provided with the stretchable detection device 85 will be described in part of the detection device 85 after manufacturing on the stretchable base material 2 provided with the shape of FIG. After providing an adhesion layer 18 and then arranging the oriented CNT film structure 3 or the CNT microfilm structure 50 on the substrate 2 by the method of Example 1 or Example 2, the detection device 85 is manufactured. did.
  • the sensing device had to be in stable contact with the oriented CNT film structure of the stretching device.
  • the stable contact with the oriented CNT film structure refers to a state in which the change in resistance of the detection device is sufficiently smaller than the change in resistance of the expansion device at the time of expansion or contraction of the expansion device. It refers to the condition that does not cause dissociation at the junction of the device.
  • the extensible detection device 85 was manufactured.
  • the stretchable detection device 85 is configured using the stretchable electrode 16.
  • the stretchable electrode 16 has stretchability and conductivity, and further, the change in resistance of the stretchable electrode itself against expansion and contraction, and the change in contact resistance with the object to be installed are compared to the change in resistance of the aligned CNT film structure 3. Point to small things.
  • the stretchable detection device 85 using such stretchable electrodes 16 when the stretch device 80 stretches, the detection device itself stretches, so that the above problem can be solved without being affected by the stretch.
  • the sputtering method is performed on the adhesion area of 7 to 10 mm from both ends of the central axis of the base shown in FIG. Then, titanium 3 nm, gold 100 nm, titanium 3 nm, and so on were continuously formed to produce an adhesion layer 18.
  • Continuous film formation refers to performing the next film formation without opening to the atmosphere after one film formation is completed in the sputtering method.
  • CFS-4EP-LL / manufactured by Shibaura Mechatronics Inc. was used as a sputtering apparatus used in the present sputtering method.
  • one of the aluminum foil covering the substrate is removed in advance to form a film formation surface.
  • the adhesion layer 18 is necessary for strongly adhering the stretchable electrode 16 described later to the stretchable base material 2. Without this, the stretchable electrode 16 was easily peeled from the base material 2.
  • the aligned CNT film structure 3 is manufactured along the central axis, on one surface from the adhesion region to the other adhesion region 18 and on the surface with the adhesion layer 18 by the method of Example 1 or Example 2. did.
  • the conductive CNT rubber paste which becomes the stretchable electrode 16 so as to cover the oriented CNT film structure 3 on both adhesion layers, is about 1 mm thick from the outer periphery of the adhesion layer 18 Use a spatula to drip, spread and spread the paste so that it is in the range of about 1 mm.
  • the metal wiring (lead wire) 17 was inserted into the coated conductive CNT rubber paste, and the conductive CNT rubber paste was again dropped so as to be about 1 mm, and was spread and applied.
  • the applied conductive paste was solidified to produce a stretchable electrode 16.
  • the conductive CNT rubber paste used here was manufactured by using the method described in Non-patent document (Nature Materials, 8 (6), 494-499 (2009)) and setting the amount of CNT to rubber to 4.8%.
  • a PDMS adhesive agent of a one-component silicone sealant SH 780 (manufactured by Toray Dow Corning Co., Ltd.) is used as the sealing material 19 and a boundary line between the stretchable electrode 16 and the substrate 2 and an aligned CNT film structure 3
  • a sealing material 19 covers the non-portion and the boundary between the stretchable electrode 16 and the metal wiring 17.
  • the sealing material 19 is made to have a thickness of about 1 mm, and the entire area of the adhesion layer 18 is coated except for the portion where the oriented CNT film structure 3 is not covered by the stretchable electrode 16. Since the sealing material 19 used here has one day of drying, the sealing was completed in one day after sealing.
  • the sealing material 19 has an effect of reducing stress generated in the stretchable electrode 16 at the time of expansion and contraction of the stretch device 80 and suppressing peeling of the stretchable electrode 16 from the base material 2.
  • the expansion and contraction device 80 provided with the detection device 85 having elasticity and elasticity thus obtained can not only detect an expansion and contraction as large as 250%, but can be repeatedly used 500 times or more, making the conventional expansion and contraction device large It shows the excessive performance.
  • Example 5 Telescopic device provided with a rigid telescopic power supply portion
  • the telescopic device having the rigid telescopic power supply part according to the present invention and the method of manufacturing the same will be described in detail.
  • a telescopic device comprising a rigid telescopic power supply according to the invention will be described with reference to FIG.
  • the stretching device 90 includes an oriented CNT film structure 3 disposed on a stretchable substrate 2 and including a plurality of CNTs oriented in a predetermined direction. In two places on the back side where the aligned CNT film structure 3 of the base material 2 is disposed, members for expansion / contraction force supply 94 composed of a hard substrate are firmly adhered to the base material 2 with an adhesive 95.
  • the stretching force supply member 94 can be easily fixed and pulled, and is used to supply the stretching force to the oriented CNT film structure 3.
  • the telescopic device 90 does not function by itself, and is used by being attached to a telescopic drive device that generates telescopic movement.
  • the expansion / contraction force supply member 94 By using the expansion / contraction force supply member 94, the expansion / contraction device 90 can be installed in the expansion / contraction drive device, and the expansion / contraction force can be supplied to the expansion / contraction device 90. Therefore, in the two or more separated rigid areas on the base material 2, the member for hard expansion / contraction force supply 94 is provided, and the expansion / contraction force is supplied from the expansion / contraction drive device.
  • the manufactured stretch device 90 has a uniform thickness of 1 mm, and a thickness of 600 nm and a size of 1 mm (length: height of an oriented CNT film) on a plate-like PDMS stretchable base shown in shape FIG. ) ⁇ 30 mm (width) oriented CNT film structure is disposed.
  • the CNTs constituting the oriented CNT film structure 3 were oriented uniformly with a Herman coefficient of 0.7 throughout the entire surface.
  • the oriented CNT film structure 3 had a density of 0.5 g / cm 3 and a BET specific surface area of 1150 m 2 / g. G / D ratio: 2.5 to 40, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99.9%, absolute purity 98% as typical values of CNTs constituting the oriented CNT film structure 3 Met. These values were assumed to be the same as the properties of the oriented CNT film used for the production.
  • Such an oriented CNT film structure 3 was manufactured using a plurality of oriented CNT films having a size of height (length) 1 mm, thickness 6 ⁇ m, and width 18 mm.
  • the oriented CNT film was disposed by providing an overlapping portion of about 1 mm, and was densified to obtain an oriented CNT film structure 3.
  • the oriented CNT film has a single-walled CNT content of 99% as a typical value (bi-layer CNT, the number ratio of single-walled CNT to multi-walled CNT), and the synthesized aligned single-walled CNT aggregate is observed with a transmission electron microscope Density: 0.03 g / cm 3 , G / D ratio: 2.5 to 40, BET-specific surface area: 1150 m 2 / g, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99. 9% absolute purity 98% Herman's orientation coefficient 0.7.
  • the method for producing the expansion device 90 including the rigid expansion power supply portion 94 will be described.
  • the method includes the oriented CNT film structure 3 or the CNT microfilm structure 50 according to the method of the first embodiment or the second embodiment.
  • a rigid telescopic power supply portion 94 was manufactured.
  • a rigid stretch power supply portion 94 is manufactured, and then the oriented CNT film structure 3 or the CNT microfilm structure 50 is manufactured by the method of Example 1 or Example 2. May be manufactured.
  • a method of manufacturing the hard stretch force supply member 94 in two or more spaced rigid regions 12 on the substrate 2 will be described in detail with reference to FIG.
  • the expansion and contraction device 90 is sandwiched between the two separated rigid areas 12 for suppressing expansion and contraction and the rigid areas 12 to supply the expansion force.
  • Divide into stretchable areas 13 An adhesive 95 is used to fix a hard substrate on the back surface of the oriented CNT film structure-arranged surface of each rigid area 12 of the expansion device. Thereby, the rigid area 12 which suppressed expansion-contraction to the expansion-contraction apparatus was manufactured.
  • one of the aluminum foil covering the base material 2 is used, using the shape described in FIG. 17 of the base material manufactured in Example 1.
  • PDMS adhesive 95 one-component silicone sealant SH780 / made by Toray Dow Corning Co., Ltd.
  • a glass substrate 96 having a length of about 30 to 40 mm and a width of 26 mm and a thickness of about 1 to 1.2 mm is applied to the entire surface of the adhesive 95 on the rigid area 12 and the sides of the glass substrate 96 and the base 2.
  • the two rigid zones 12 were manufactured by bonding so that the central axes were parallel.
  • this adhesive 95 was used, adhesion took place one day after contact, since adhesion took one day.
  • the distance between the glass substrates 96 in the two regions formed in the rigid region 12 was 4 mm, and the stretchable region 13 was determined.
  • These components including the glass substrate 96 and the PDMS adhesive 95 are used as a member 94 for supplying and retracting force.
  • the expansion / contraction force supply member 94 By forming the expansion / contraction force supply member 94 in this manner, it is possible to adjust the expansion / contraction area to a desired position.
  • the thickness of the glass substrate 96 is 1 mm or less, when the stretching force is supplied, a crack or the like occurs in the stretching force supply member 94, and the extension force can not be supplied.
  • the telescopic device 90 provided with the rigid telescopic power supply part 94 obtained in this manner is not broken even by a large elongation of 250%, and can be repeatedly used 500 times or more, and the performance over the conventional telescopic device Indicates
  • Example 6 A telescopic device provided with a telescopic power supply part having telescopic properties Another embodiment of the telescopic device with telescopic power supply part according to the present invention and its manufacturing method will be described in detail. A telescopic device with a telescopic power supply according to the invention will now be described with reference to FIG.
  • the stretching apparatus 100 includes an oriented CNT film structure 3 disposed on a stretchable substrate 2 and including a plurality of CNTs oriented in a predetermined direction. On the back side on which the aligned CNT film structure 3 of the base material is disposed, an expansion / contraction force supplying member 104 made of a stretchable rubber sheet or the like is adhered to the base material 2 with an adhesive.
  • the expansion and contraction device 100 does not function by itself and is attached to an expansion and contraction drive device that generates expansion and contraction.
  • the use of the expandable and contractible force supply member 104 makes it easy to install the extendable device 100 on the extendable drive device, and the expandable force generated by the extendable drive device can be efficiently supplied to the extendable device 100.
  • the stretch device manufactured has a uniform thickness of 1 mm, a thickness of 600 nm and a size of 1 mm (length: height of the oriented CNT film) on the plate-like PDMS stretchable base material 2 shown in FIG.
  • An oriented CNT film structure 3 of ⁇ 30 mm (width) is disposed.
  • the CNTs constituting the oriented CNT film structure 3 were oriented uniformly with a Herman coefficient of 0.7 throughout the entire surface.
  • the oriented CNT film structure 3 had a density of 0.5 g / cm 3 and a BET specific surface area of 1150 m 2 / g.
  • the CNTs constituting the oriented CNT film structure typically have a G / D ratio of 2.5 to 40, an average outer diameter of 2.5 nm, a half width of 2 nm, a carbon purity of 99.9% and an absolute purity of 98%. there were. These values were assumed to be the same as the properties of the oriented CNT film used for the production.
  • Such an oriented CNT film structure 3 was manufactured using a plurality of oriented CNT films having a size of height (length) 1 mm, thickness 6 ⁇ m, and width 18 mm.
  • the oriented CNT film was disposed by providing an overlapping portion of about 1 mm, and was densified to obtain an oriented CNT film structure 3.
  • the oriented CNT film has a single-walled CNT content of 99% as a typical value (bi-layer CNT, the number ratio of single-walled CNT to multi-walled CNT), and the synthesized aligned single-walled CNT aggregate is observed with a transmission electron microscope Density: 0.03 g / cm 3 , G / D ratio: 2.5 to 40, BET-specific surface area: 1150 m 2 / g, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99. 9% absolute purity 98% Herman's orientation coefficient 0.7.
  • the method of producing the expansion device 100 having the expansion / contraction force supplying part 104 having elasticity is described in the method of Example 1 or Example 2, and the expansion and contraction including the oriented CNT film structure 3 or the CNT microfilm structure 50.
  • the stretchable force supplying portion 104 having elasticity was manufactured.
  • the stretch power supply portion 104 having elasticity is manufactured, and thereafter, the oriented CNT film structure 3 or the CNT microfilm structure 50 is manufactured by the method of Example 1 or Example 2. May be manufactured.
  • the expansion device 100 including the expansion / contraction force supplying portion 104 having elasticity is described in detail with reference to FIG.
  • the expansion and contraction force of the expansion and contraction drive device is supplied to the expansion and contraction device 100 through the expansion and contraction force supplying member 104. Therefore, a stretchable member 104 is prepared, and a stretchable rubber sheet 106 is used to stretch a portion or the entire surface of the rear surface of the oriented CNT film structure 3 of the stretch device 100. It adheres with the PDMS adhesive 105 which has both adhesion and adhesiveness.
  • the rubber sheet 106 and the adhesive 105 were used in combination as the stretching force supply member 104.
  • PDMS adhesive 105 one-component silicone sealant SH 780 / Toray Dow Corning Co., Ltd.
  • SH 780 One-component silicone sealant SH 780 / Toray Dow Corning Co., Ltd.
  • a rubber sheet 106 larger than the base shown in FIG. 21 is prepared, and the base 2 is placed on the rubber sheet 106 such that the surface of the adhesive 105 is in contact with the rubber sheet 106.
  • the entire base material 2 is pressed with a fingertip so as to sufficiently adhere, and the PDMS adhesive 105 is dried every other day.
  • the adhesive 105 does not have stretchability, when the member 104 for extending and contracting force expands and contracts, a crack occurs in the adhesive surface, and it becomes difficult to uniformly transmit the member 104 and the extension and contraction to the expanding and contracting device 100 uniformly.
  • the stretch device 100 having the stretchability thus obtained is not broken even at a high elongation of 250%, can be repeatedly used 500 times or more, and exhibits performance far superior to that of the conventional stretch device.
  • Example 7 Telescopic device with member for telescopic force supply
  • a telescopic device with a telescopic power supply part according to the present invention and a method of manufacturing the same will be described in detail, in which another embodiment of Example 6 in which a glove is used as a telescopic power supply member.
  • a data glove stretching apparatus according to the present invention will be described with reference to FIGS.
  • a stretchable nitrile rubber glove (clean nol / nitrile glove / made by As One Corp.) was used as the stretch power supply member 114.
  • a telescopic device 110 including the manufactured elastic sensing device 85 was placed on the glove by the method of Example 6.
  • the expansion / contraction device for observing the movement of the human hand or the movement of the robot's hand that moves in the same manner as the movement of the human hand can be manufactured by the expansion / contraction force supply member 114. .
  • Example 8 Telescopic device with telescopic force supply member
  • An extension device with an extension power supply part according to the present invention and a method of manufacturing the same will be described in detail in another embodiment of Example 6 in which a bandage is used as a member for extension power supply.
  • the plaster expansion and contraction apparatus according to the present invention will be described with reference to FIG.
  • the elastic force supplying member 124 is manufactured by the method of Example 4 on a surface not having the adhesive strength of the adhesive plaster using a bandage (made by Bandaid / Johnson End Johnson Co., Ltd.) having an adhesive strength and an expansion force.
  • the stretchable detection device 85 was bonded by the method of Example 6 so that the adhesive surface was in contact and the substrate 2 was contained in the bandage.
  • the shape of the used base material 2 is shown in FIG.
  • the existing strain measuring element has to be firmly attached to the object to be measured, which is not easy to use. In addition, they were not well suited to observing large changes in the body, such as human breathing changes.
  • the stretch apparatus 120 since the bandage has adhesiveness and stretchability, it can be stuck to any object with good adhesion, and the stretch can be detected.
  • Example 9 Telescopic device with member for telescopic power supply
  • An extension / contraction device with an extension / contraction force supplying portion according to the present invention and a method of manufacturing the same will be described in detail in another embodiment of Example 6 in which a stocking is used as an extension / contraction force supplying member.
  • a stocking device according to the invention will be described with reference to FIG.
  • the stretching device 130 was installed in this stocking using a PDMS adhesive having both elasticity and adhesiveness.
  • a PDMS adhesive having both elasticity and adhesiveness.
  • a commercially available stocking having stretchability was used as the stretching force supply member 134.
  • the stretching device 130 provided with the stretchable sensing device 137 manufactured by the method of Example 4 was bonded to the stocking by the method of Example 6 at the joint of the knee of the stocking. When the person wears and moves this stocking device, as shown in FIG. 37, the movement of the human could be detected accurately and precisely.
  • the extension device 130 is manufactured by the method of Example 1 or Example 2 using the base material of FIG.
  • a PDMS adhesive (one component silicone sealant SH780 / made by Toray Dow Corning Co., Ltd.) is applied to the back of the substrate 2 in a thickness of about 0.1 to 0.5 mm.
  • the tape attached to the prepared stocking 134 is peeled off, and the base material 2 is placed so that the stretchable axis indicated by these tapes and the central axis of the base material 2 are aligned.
  • the center of the central axis of the base material 2 is positioned between the two tapes used as a mark on the stocking 134.
  • the base 2 and the stocking 134 hold the whole base 2 with a fingertip so that the base 2 is sufficiently adhered, and the PDMS adhesive is dried every other day to manufacture the stretch device 130.
  • the above problem can be solved by using not only a stocking but also tights that can be in close contact with the lower body, tights that can be in close contact with the upper body, a bodysuit that is in close contact with the body, and swimwear You get
  • Example 10 Telescopic drive: twisting device
  • the telescopic drive device capable of detecting the twist according to the present invention and the method of manufacturing the same will be described in more detail by way of specific examples given below, but the present invention is limited to these examples. is not.
  • the telescopic drive device 140 includes a telescopic device 141 and a drive device 142.
  • the stretching device 141 includes an oriented CNT film structure 3 including a stretchable rod-like stretchable base material 143 and a plurality of CNTs oriented in a predetermined direction and wound therearound.
  • the stretching device 141 is provided at both ends of the rod-like base material 143 with a stretching force supply member 144 which is a member for supplying stretching force to the aligned CNT film structure 3.
  • the stretch device 141 is electrically connected to both ends of the rod-like base material 143 and the aligned CNT film structure 3, and detects the change in the resistance of the aligned CNT film structure 3 to detect the stretch.
  • a device 147 is provided.
  • the driving device 142 includes an expansion force supply member 144 provided at both ends of the rod-like base material 143, a component 145 for fixing the expansion force supply member 144 at one end, and an expansion and contraction at the other end
  • the power supply member 144 is provided with a rotating part 146 that rotates a desired angle in a plane perpendicular to the rod-like substrate 143. By rotating the rotating part 146, the stretching force supply member 144 at the other end can be rotated by a desired angle, and a desired twist can be supplied to the base material 143 and the oriented CNT film structure 3.
  • the base material 143 subjected to the twist and the oriented CNT film structure 3 are supplied with a stretching force to stretch.
  • the CNTs constituting the oriented CNT film structure 3 used in the extension and contraction drive device 140 were uniformly oriented with an orientation degree of Herman coefficient of 0.7 over the entire surface.
  • the oriented CNT film structure 3 had a density of 0.5 g / cm 3 and a BET specific surface area of 1150 m 2 / g. G / D ratio: 2.5 to 40, average outer diameter: 2.5 nm, half width 2 nm, carbon purity 99.9%, absolute purity 98% as typical values of CNTs constituting the oriented CNT film structure 3 Met. These values were assumed to be the same as the properties of the oriented CNT film used for the production.
  • Such an oriented CNT film structure 3 was manufactured using a plurality of oriented CNT films having a size of height (length) 1 mm, thickness 6 ⁇ m, and width 18 mm.
  • the oriented CNT film was disposed by providing an overlapping portion of about 1 mm, and was densified to obtain an oriented CNT film structure 3.
  • the oriented CNT film used in the extension drive device 140 has a single-walled CNT content of 99% as a typical value (bi-layer CNT, the ratio of the number of single-walled CNT to multi-walled CNT, The density is 0.03 g / cm 3 , the G / D ratio is 2.5 to 40, the BET specific surface area is 1150 m 2 / g, the average outer diameter is 2.5 nm. The half width is 2 nm, the carbon purity is 99.9%, the absolute purity is 98%, and the Herman's orientation coefficient is 0.7. Details of the method of manufacturing an extension and contraction drive device according to the present invention will be specifically described below with reference to FIG.
  • the aligned CNT film structure 3 or the CNT microfilm structure 50 was disposed on the planar transfer substrate 148 by the method of the first embodiment.
  • the obtained aligned CNT film structure 3 or CNT micro film structure 50 was transferred in advance to a rod-like stretchable base 143 manufactured using a known method.
  • an elastic force supply member for applying expansion and contraction to the aligned CNT film structure 3 was manufactured through the base material 143 (elastic force supply member manufacturing process), and then a detection device 147 for detecting expansion and contraction was manufactured ( Detector manufacturing process).
  • the drive device 142 which drives the expansion-contraction device 141 was manufactured (the expansion-contraction drive device manufacturing process).
  • the manufacturing process and procedure for obtaining the telescopic drive device 140 of the present invention are not limited to the above-described example, and some steps may be omitted or the order may be changed as needed.
  • the detection device manufacturing process, the member manufacturing process for expansion / contraction force supply, and the drive apparatus manufacturing process may be performed in an appropriate order or at the same time, or may be performed after or before the substrate manufacturing process.
  • a CNT film disposing step may be performed.
  • the extension drive device capable of detecting the twist. It consists of a base material manufacturing process, an oriented CNT film structure manufacturing process, a member manufacturing process of elastic force supply, and a detector manufacturing process.
  • the base material 143 in the present invention may be any one having twistability in at least one direction and on which the oriented CNT film structure 3 can be disposed.
  • the material should be twistable. They are used, preferably in a shape and material that achieves a uniform twist. Therefore, as a shape that achieves uniform twist, it is formed into a rod shape having a uniform diameter, and as a material that achieves large elongation, a silipot 184 (made by Toray Dow Corning Co., Ltd.) that is polydimethylsiloxane (PDMS) is adopted. did.
  • the base material 143 itself does not have electrical conductivity, and PDMS is also preferable in that respect.
  • the base material manufacturing process which has these shapes and materials passes through the defoaming process shown in Example 1, and consists of a rod forming process shown below.
  • the prepared precursor is exposed to one end of a tube with an inner diameter of 3 mm made of Teflon (registered trademark) for substrate processing.
  • the other end of the tube is connected to a vacuum pump and vacuum is applied to draw the precursor into the tube.
  • the vacuum pump and plug in using the M3 screw When fully retracted, disconnect the vacuum pump and plug in using the M3 screw.
  • the tube end inserted into the precursor is removed from the precursor and similarly stoppered using an M3 screw. After sealing both ends, it is left for one day until the precursor solidifies.
  • the stopper is removed and a tube is cut from one end to expose a portion of the substrate so as not to damage the substrate.
  • the exposed part is gripped with tweezers or the like, and the substrate is pulled out from the tube and taken out.
  • the taken-out base material was cut into a rod-like base material 2 with a length of about 5 to 8 cm using scissors.
  • silicone rubber when silicone rubber is used for the tube for base material processing, it reacts with PDMS which is a component of a base material, and it becomes difficult to take out a rod-like base material from a tube.
  • an axis giving rotational symmetry to the substrate is taken as a central axis of the substrate.
  • the oriented CNT film structure production process is the process for producing the oriented CNT film produced in the oriented CNT film production process of Example 1, and the oriented CNT film arrangement process shown below and the oriented CNT film high density process are shown in FIG.
  • the same process as in Example 1 was performed on the substrate 148, and the process of stacking and arranging oriented CNT films was performed.
  • the transfer substrate 148 is a substrate capable of producing the oriented CNT film structure 3 without warping and capable of transferring the produced oriented CNT film structure 3 to the base material 2.
  • the characteristics of the oriented CNT film structure 3 similar to Example 1 were obtained by these steps.
  • the aligned CNT film structure 3 was manufactured on the rod-like base material 143 by the aligned CNT film structure transfer step.
  • the oriented CNT film disposing step is a step of removing the oriented CNT film synthesized on the growth substrate from the growth substrate, and adhering and placing the oriented CNT film on another transfer substrate 148.
  • the transfer substrate 148 is a substrate of a material that can be produced on the base material 143 without curling and can transfer the produced aligned CNT film structure 3 to the base material 143. anything is fine. In this example, a Teflon (registered trademark) plate of 20 cm long, 20 cm wide, and 1 mm thick was used as the transfer substrate 148.
  • an oriented CNT film manufactured in advance by the above method is set so as to be within the field of view of a stereomicroscope for every synthesized substrate, and the oriented CNT film is a group for synthesis while observing with a microscope Removed from the material. The removal of the oriented CNT film from the synthesis substrate was directly removed with tweezers while observing with a microscope.
  • the taken-out oriented CNT film as the oriented CNT film structure 3 in the expansion device 141, it is necessary to control the orientation direction of the taken-out oriented CNT film, place it on the substrate 143, and expose it to liquid. there were. Therefore, the oriented CNT film taken out in the taking-out step is moved onto the stretchable substrate 143 on which the liquid has been dropped in advance and released from the tweezers, and then the oriented CNT film is put in the liquid with the tweezers with a membrane. The method of aligning to an arbitrary position was used (FIG. 24).
  • the oriented CNT film, the tweezers handling the oriented CNT film, and the membrane handling the oriented CNT film are sufficiently immersed in a solution placed on a substrate used for densification, and observed with a stereomicroscope to generate bubbles.
  • I did not. Isopropyl alcohol was used as a liquid for exposing the oriented CNT film.
  • a large oriented CNT film may be manufactured in advance in the above-mentioned oriented CNT film manufacturing process, or the overlapping arrangement process of the oriented CNT film shown below may be used.
  • the alignment direction of the CNTs is made along the diagonal of the transfer substrate 148 so that the size is about 10 cm. Then, 5 to 10-fold orientation of the aligned CNT film was performed to prepare an oriented CNT film structure.
  • Oriented CNT film densification process By exposing the liquid to the liquid on the transfer substrate 148 for arranging the aligned CNT film structure 3 in the above-described aligned CNT film arranging step, the dried aligned CNT film to which the liquid is attached allows high density of the aligned CNT film Process is conducted.
  • the oriented CNT film disposing step described above is performed in this densifying step before the solution is dried from the periphery of the oriented CNT film exposed to the solution, and the orientation direction is aligned at an arbitrary position.
  • a part of the oriented CNT film may be densified to be in close contact with the transfer substrate as an oriented CNT film structure, in which case, It becomes difficult to arrange the oriented CNT film at an arbitrary position or to align the orientation direction.
  • the solution spontaneously evaporates in air at room temperature and the oriented CNT film can not move, observe the oriented CNT film surface, and allow the solution to air dry until the surface of the CNT is visible to densify the oriented CNT film .
  • isopropyl alcohol was used as the solution, which facilitates the penetration between CNTs in the oriented CNT film and also facilitates the evaporation for densification.
  • a part of the oriented CNT film may be warped and densified on the substrate surface.
  • the solution may be changed to another solution such as methanol, or the solution may be illuminated when the oriented CNT film is dried to weaken the illumination when the surface of the CNT is viewed when the oriented CNT film is dried. Drying and evaporation were controlled to prevent curling on the surface of the substrate.
  • isopropyl alcohol or methanol was used as the solution, which facilitates the penetration between CNTs in the oriented CNT film and also facilitates the evaporation for densification.
  • the arrangement and densification of the oriented CNT film may be performed simultaneously, or the solution is subsequently dropped onto the previously arranged oriented CNT film, and this is accompanied by the penetration and evaporation of the solution in the oriented CNT film. Only densification may be performed.
  • the end of the oriented CNT film structure produced in the oriented CNT film disposing step and the oriented CNT film densifying step on the transfer substrate is brought into contact with the end of the rod-like substrate. From there, as shown in FIG. 39, the rod-like base material 143 is slowly rolled parallel to the side of the transfer substrate 148 to visually check that the oriented CNT film structure 3 is wound on the rod-like base material 143. The oriented CNT film structure 3 is wound and transferred. The rod-like base material 143 is rotated until the oriented CNT film structure 3 is wound and reached to the first end of the rod-like base material 143 where the oriented CNT film structure 3 is in contact and the other end. The membrane structure 3 is transferred. The telescopic device 141 is manufactured in this manner.
  • the driving device 142 applies a uniform twist to the expansion and contraction device 141, so that the central axis of the base material 143 is along the vertical direction as shown in FIG. 40 so that the expansion and contraction device 141 is not affected by gravity. Manufacture 142. Further, in order to grip both ends of the central axis of the base material 143 of the expansion and contraction device 141 described below, the swage lock 149 which is a gripping mechanism can be fixed on the upper side and the lower side of the drive device 142 as shown in the left view of FIG. Let's do it.
  • the lower side of the driving device 142 has a twisting rotation mechanism that rotates a desired angle in a plane perpendicular to the rod-like substrate 143.
  • the swage lock is made of stainless steel which is a conductive metal.
  • the stretching force supply member 144 at the other end can be rotated by a desired angle, and a desired twist can be supplied to the base material 143 and the oriented CNT film structure 3.
  • the base material 143 and the oriented CNT film structure 3 subjected to the twisting are supplied with a stretching force to stretch.
  • a region of about 10 mm from two end surfaces of the expansion and contraction device 141 is a rigid region, and is gripped by a pipe gripping tool 149 that fixes a metal pipe or a flexible tube.
  • the rod-like base material 143 is fixed to the holding tool 149 with the PDMS adhesive 150 having elasticity and adhesiveness.
  • a female swage lock manufactured by Nippon Swagelok Co., Ltd.
  • a PDMS adhesive 150 one component silicone sealant SH780 / manufactured by Toray Dow Corning Co., Ltd.
  • the telescopic device 141 prepared above is inserted into the swage lock 149 hole containing the PDMS adhesive 150.
  • the telescoping device 141 inserted into the swage lock 149 together with the adhesive 150 is closed so that the pipe is normally fixed by the swage lock 149 and the PDMS adhesive 150 is dried every other day.
  • the central axis of the rod-like base material 143 is dried along the vertical direction.
  • the swage lock 149 is set on the top of the drive unit 142, and the expansion and contraction unit 141 is suspended vertically.
  • the swage lock 149 is fixed to the lower side of the drive unit 142, and the PDMS adhesive 150 is inserted into the hole in the swage lock 149 as described above.
  • the drive unit 142 is operated to insert the lower side of the telescopic unit 141 into the hole of the swage lock 149 prepared on the lower side of the drive unit.
  • the PDMS adhesive 150 is allowed to dry, closing normally with a swage lock 149 to secure the pipe for one day. After drying, it becomes an expansion and contraction drive device 140.
  • the stretching device is detached from the holding tool, that is, the driving apparatus due to the twist.
  • a stretchable PDMS Siliconpot 184 / made by Toray Dow Corning Co., Ltd.
  • the stretch device is also detached from the holding tool, that is, the drive device.
  • Detector manufacturing process As a detection device, two electrodes are attached to an oriented CNT film structure, and a resistance change of the oriented CNT film structure whose structure is changed due to the generation of a crack band having a CNT crosslinked structure due to twisting is detected. Show an apparatus for detecting expansion and contraction. When the detection device is disposed on the twistable substrate of the expansion and contraction device, the substrate is twisted, so the detection device is deformed to change the detection value, the detection device itself is destroyed, or the detection device is based There was a problem of peeling from the material. In order to solve these problems, the sensing device had to be in stable contact with the oriented CNT film structure of the stretching device.
  • the stable contact with the oriented CNT film structure means a state in which the change in resistance of the detection device is sufficiently smaller than the change in resistance of the expansion device at the time of expansion or contraction of the expansion device. Point at which no dissociation occurs at the junction of In order to solve such a subject, since the process which manufactures an extensible detection device was carried out, it explains in full detail below.
  • the problem that the detection device is deformed and the detection value changes, the detection device itself is destroyed, or the detection device peels off from the base material is solved by manufacturing the stretchable detection device capable of expanding and contracting.
  • the steps of manufacturing the stretchable sensing device in the stretchable device will be described in detail with reference to FIGS.
  • the stretchable sensing device 147 is configured using stretchable electrodes.
  • the stretchable electrode 16 has stretchability, twistability and conductivity, and further, the change in resistance of the stretchable electrode itself against stretching and twisting and the change in contact resistance with the object to be installed can be obtained by the oriented CNT film structure 3 It refers to something smaller than the change in resistance.
  • the stretchable detection device 147 using such a stretchable electrode 16 is not affected by the twist because the detection device itself is also twisted when the stretch device 141 is twisted, and the above problem can be solved.
  • the conductive CNT rubber paste 14 to be the expansion and contraction electrode 16 is about 1 mm thick from the aligned CNT film structure 3 disposed in the expansion and contraction device
  • the exposed part of the swage lock 149 of the drive unit 142 (the part not covered with the PDMS adhesive 150) is extended and coated with a spatula, as shown in the left frame of FIG.
  • the conductive CNT rubber paste was manufactured using the method described in Non-patent document (Nature Materials, 8 (6), 494-499 (2009)) and the amount of CNT to rubber was 4.8%. After drying the paste of conductive CNT rubber, a wire (lead wire) 17 having a margin of about 30 cm in length was fixed to the fixed upper and lower swage locks 149.
  • the electric wire 17 is wound around the drive unit 142, thereby avoiding the stress applied to the electric wire 17.
  • the two electric wires 17 fixed to the swage lock 149 were connected to a detection device 147 for detecting a change in resistance of the aligned CNT film structure 3 due to a twist, to manufacture a detection device 147.
  • a solidifying conductive paste 14 such as silver paste is used instead of the conductive CNT rubber paste, the electrode is broken due to the twist. Therefore, a conductive CNT rubber paste, which has stretchability, twistability, conductivity, and a small change in resistance to twist, was used as a detection device.
  • the resistance value change rate (dR / R) when twisting the telescopic drive device 140 thus manufactured, which detects a twist, at a desired angle, is shown in the right view of FIG.
  • the resistance increased monotonically with respect to the twist, and a twist of 360 degrees could be detected. This result means that a large twist can be quantitatively detected using the extension drive device 140.
  • Comparative Example 1 An Example Using an Unoriented Oriented CNT Film Structure
  • CNTs were produced by known chemical vapor synthesis. It produces a catalyst on a substrate and causes the catalyst to chemical vapor deposition (CVD) multiple CNTs.
  • the CNTs may be produced by growing a plurality of CNTs oriented in a certain direction from a catalyst deposited on a substrate using the method described in Japanese Patent Application No. 2009-001586, Japanese Patent Application No. 2006-527894, etc. .
  • the CNT thus produced was dispersed in ethanol, and the CNT was filtered from the dispersion using filter paper. What was filtered from the dispersion was peeled off from the filter paper to prepare an unoriented oriented CNT film structure.

Abstract

L'invention vise à pallier les carences des dispositifs à dilatation conventionnels selon la technique antérieure, qui ne sont capables de détecter la dilatation et la contraction de façon répétée que jusqu’à environ 5%, lesdits dispositifs n’ayant pour ainsi dire pas employé d’éléments capables de se dilater suffisamment, comme des métaux et des semiconducteurs. La présente invention concerne un dispositif à dilatation capable de détecter de façon répétée une dilatation et une contraction nettement plus importantes que celles détectées par les dispositifs conventionnels. Plus précisément, l'invention concerne un dispositif à dilatation comportant une structure en film de nanotubes en carbone (Carbon NanoTubes, CNT) orientés comprenant une pluralité de CNT orientés dans une direction prédéterminée et disposés sur un support extensible. La structure en film de CNT orientés comprend des bandes de fissures formées de fissures générées par la dilatation.
PCT/JP2010/060042 2009-08-25 2010-06-14 Dispositif à dilatation utilisant un nanotube en carbone et procédé pour sa fabrication WO2011024539A1 (fr)

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