JP6142387B2 - 歪みセンサ及びその製造方法 - Google Patents
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- FVLMDTCQEQACLK-UHFFFAOYSA-N aminoaluminum Chemical compound [Al]N FVLMDTCQEQACLK-UHFFFAOYSA-N 0.000 description 1
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
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Description
柔軟性を有する基板と、
この基板の表面側に積層され、一方向に配向する複数のCNT繊維からなるCNT膜と、
このCNT膜の端部に配設される一対の電極と
を備えた歪みセンサであって、
前記基板が、
基材層と、
この基材層の表面に積層され、前記CNT膜の裏面側の一部領域が含浸したCNT含浸層と
を備えることを特徴とする。
柔軟性を有する基板と、
この基板の表面側に積層され、一方向に配向する複数のCNT繊維からなるCNT膜と、
このCNT膜の端部に配設される一対の電極と
を備えた歪みセンサの製造方法であって、
前記基板の有する基材層の表面にCNT含浸層の形成材料を積層する工程と、
前記CNT含浸層形成材料の内部に複数のCNT膜の裏面側の一部領域を配置する工程と、
前記CNT膜の配置後にCNT含浸層形成材料を硬化させてCNT含浸層を得る工程と
を有することを特徴とする。
図1の歪みセンサ1は、基板2と、この基板2の表面側に設けられ、一方向に配向する複数のCNT繊維8からなるCNT膜4と、このCNT膜4の、前記CNT繊維8の配向方向とは異なる方向Aの両端に配設される一対の電極3と、前記CNT膜4を保護する保護部5とを主に備える。
歪みセンサ1の製造方法としては、特に限定されないが、例えば以下の製造工程で製造することができる。
本発明の歪みセンサは前記実施形態に限定されるものではない。例えば本発明は、図6に示す歪みセンサ101のように、電極3をCNT繊維8の配向方向(方向A)の両端に配設してもよい。この歪みセンサ101は、一対の電極3が離れる方向(方向A)へ歪みが加わった場合に、CNT繊維8に長手方向の変形(伸縮)が起こり、抵抗変化を得ることができる。なお、このように歪みの感知方向がCNT繊維8の配向方向である歪みセンサ101の場合、保護層5をCNT膜4に含浸させることが好ましく、CNT膜4におけるCNT繊維8の密度は第一実施形態よりも小さくてもよい。また、CNT繊維8は複数の束となって存在する傾向にあり、CNT膜4のおける複数の束の隙間に保護層5が含浸することで、CNT繊維8の強度を高め、CNT繊維8の配向方向の歪みにより切断することを防止することができる。
2 基板
2a 基材層
2b CNT含浸層
3 電極
4 CNT膜
5 保護部
6 導電層
8 CNT繊維
9 CNT単繊維
10、10a、10b 連結部
11 開裂可能な部分
12 マスキングテープ
13 支持具
Claims (3)
- 柔軟性を有する基板と、
この基板の表面側に積層され、一方向に配向する複数のCNT繊維からなるCNT膜と、
このCNT膜の端部に配設される一対の電極と
を備えた歪みセンサであって、
前記基板が、
基材層と、
この基材層の表面に積層され、前記CNT膜の裏面側の一部領域が含浸したCNT含浸層と
を備えることを特徴とする歪みセンサ。 - 前記CNT含浸層の形成材料が、CNT膜を構成するCNT繊維とのカップリング剤又はCNT繊維に対する吸着性を有する分散剤を含有する請求項1に記載の歪みセンサ。
- 柔軟性を有する基板と、
この基板の表面側に積層され、一方向に配向する複数のCNT繊維からなるCNT膜と、
このCNT膜の端部に配設される一対の電極と
を備えた歪みセンサの製造方法であって、
前記基板の有する基材層の表面にCNT含浸層の形成材料を積層する工程と、
前記CNT含浸層形成材料の内部にCNT膜の裏面側の一部領域を配置する工程と、
前記CNT膜の配置後にCNT含浸層形成材料を硬化させてCNT含浸層を得る工程と
を有することを特徴とする歪みセンサの製造方法。
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JP6142387B2 true JP6142387B2 (ja) | 2017-06-07 |
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JP6469484B2 (ja) * | 2015-03-13 | 2019-02-13 | セイコーインスツル株式会社 | ひずみセンサ |
JP6597318B2 (ja) * | 2016-01-06 | 2019-10-30 | ヤマハ株式会社 | 歪みセンサ素子 |
JP6772472B2 (ja) * | 2016-02-03 | 2020-10-21 | 株式会社ニコン | 配置方法及び配置装置、並びに、デバイス製造方法及びデバイス製造方法 |
CN106580256B (zh) * | 2016-12-15 | 2019-06-18 | 清华大学 | 一种柔性压力传感器及其制备方法 |
CN110081808A (zh) * | 2018-01-26 | 2019-08-02 | 北京纳米能源与系统研究所 | 双功能柔性传感器及其制备方法、可穿戴设备 |
WO2022140890A1 (zh) * | 2020-12-28 | 2022-07-07 | 深圳烯湾科技有限公司 | 复合碳纳米管膜、其制备方法及层状发热器件 |
CN114087976B (zh) * | 2021-11-25 | 2023-04-07 | 中国科学院长春应用化学研究所 | 一种柔性大应变传感器及其制备方法 |
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US8778116B2 (en) * | 2007-12-07 | 2014-07-15 | Meijyo Nano Carbon Co., Ltd. | Method for producing carbon nanotube-containing conductor |
CN101480858B (zh) * | 2008-01-11 | 2014-12-10 | 清华大学 | 碳纳米管复合材料及其制备方法 |
JP5397896B2 (ja) * | 2009-08-25 | 2014-01-22 | 独立行政法人産業技術総合研究所 | カーボンナノチューブを用いた伸縮装置、伸縮駆動装置およびcnt膜構造体 |
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