WO2011024528A1 - Pompe à vide et organe utilisé pour pompe à vide - Google Patents

Pompe à vide et organe utilisé pour pompe à vide Download PDF

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Publication number
WO2011024528A1
WO2011024528A1 PCT/JP2010/059186 JP2010059186W WO2011024528A1 WO 2011024528 A1 WO2011024528 A1 WO 2011024528A1 JP 2010059186 W JP2010059186 W JP 2010059186W WO 2011024528 A1 WO2011024528 A1 WO 2011024528A1
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WO
WIPO (PCT)
Prior art keywords
rotating body
vacuum pump
gas discharge
discharge passage
gas
Prior art date
Application number
PCT/JP2010/059186
Other languages
English (en)
Japanese (ja)
Inventor
好伸 大立
靖 前島
勉 高阿田
三輪田　透
Original Assignee
エドワーズ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エドワーズ株式会社 filed Critical エドワーズ株式会社
Priority to JP2011528686A priority Critical patent/JP5785494B2/ja
Priority to KR1020117027310A priority patent/KR101784016B1/ko
Priority to US13/381,239 priority patent/US20120141254A1/en
Priority to CN201080036516.1A priority patent/CN102483069B/zh
Priority to EP10811581.7A priority patent/EP2472120B1/fr
Publication of WO2011024528A1 publication Critical patent/WO2011024528A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693—Details or arrangements of the wiring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/426—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for liquid pumps
    • F04D29/428—Discharge tongues
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the present invention relates to a vacuum pump such as a turbo molecular pump that performs exhaust processing of a vacuum vessel such as a process chamber used in a semiconductor manufacturing apparatus, and more specifically, improves exhaust performance that deteriorates depending on an installation position of an exhaust port or a connector, or a vacuum
  • the present invention relates to a technology for downsizing a pump.
  • FIG. 9 shows an example of such a composite airfoil pump.
  • the composite airfoil pump 200 includes a cylindrical casing 20 having a suction port 10 for sucking gas from a chamber (not shown) formed in the upper portion thereof, and a plurality of rotating blades provided in a rotating body 30 inside the casing 20.
  • the base 70 the exhaust port 90 for exhausting the gas exhausted from the upstream side with the intake port to the outside on the downstream side, and the connector 100 which is externally connected to the controller for controlling this pump And a back cover 110 covering the bottom.
  • the rotating body 30 is supported in a non-contact manner and controlled in position by being magnetically levitated by radial bearings 34 and 36 and a thrust bearing 38.
  • the rotating body 30 is rotationally driven at a high speed by a driving motor 60.
  • the turbo molecular pump has a back pressure dependency in which the pump performance is affected by the pressure on the back pressure side (exhaust port side). Therefore, in the composite airfoil pump, by increasing the diameter of the thread groove 80 or increasing the axial length of the thread groove 80, the back pressure is increased while maintaining the pressure on the inlet side at a low pressure. As a result, the performance of the pump has been improved.
  • the composite airfoil pump needs to be designed within the constraints on installation.
  • Patent Document 1 discloses a technique for preventing a reduction in exhaust performance due to a reduction in the opening area inside the pump of the exhaust port due to a longer thread groove. That is, if the rotary part of the pump closes a part of the opening inside the pump at the exhaust port from the inside, the exhaust performance is lowered. This is because when the opening is reduced, the conductance is lowered and the flow to the exhaust port is hindered.
  • the process gas of dry etching equipment is generally highly corrosive, so the presence or absence of corrosion on the gas flow path surface of the screw stator and housing, and the removal of surface coatings such as plating applied to prevent corrosion It is necessary to visually check for the presence or absence of any defects and repair them if any. If there is an invisible part on the gas flow path surface, the reaction product remains or corrodes in this part, and the use of the vacuum pump is resumed in an unrepaired state. When corrosion progresses and the strength of the screw stator and the housing deteriorates, and the rotor breaks as described above, these may be broken and gas leakage may occur. Even in the U-shaped groove as in the prior art, by reducing the depth of the groove, it is possible to reduce the portion that cannot be seen, but in this case, sufficient opening area to make the groove shallower There was a problem that it could not be secured.
  • the turbo molecular pump is provided with a connector that functions to connect to the controller for supplying power to the motor and the magnetic bearing and inputting / outputting signals.
  • the hole through which the connector wiring passes is completely isolated from the exhaust passage. This is connected to the exhaust flow path with a hole, and if gas flows to the connector side, it may cause deterioration of exhaust performance and corrosion of the connector part, possibly causing failure and causing serious problems to the pump. Because there is. If the height position of the lower end of the thread groove is lower than the height position of the connector wiring through hole, the opening area of the connector wiring through hole must be reduced, and the motor or magnetic The wiring work from the bearing to the connector becomes difficult. Therefore, lengthening the thread groove has a problem that the height of the vacuum pump has to be increased in the connector as well as the exhaust port. In the above conventional technology, such a problem related to the connector has not been considered.
  • the first object of the present invention is to reduce the deterioration of the exhaust performance that accompanies when the thread groove is extended or disposed further downward in the pump for the purpose of reducing the height of the vacuum pump or the like. It is to provide a vacuum pump that can.
  • the second object of the present invention is to facilitate the work of the connector wiring, which is lowered when the thread groove is made longer or disposed downward in the pump for the purpose of reducing the height of the vacuum pump or the like. It is to provide a vacuum pump with improved performance.
  • the air intake, the motor, the rotating body that is rotationally driven by the motor, the stator that is arranged to face the rotating body, and the gas sucked through the air intake are discharged.
  • a gas discharge passage communicating with the space downstream of the rotating body and the exhaust port in the gas flow path, the rotating body being in the radial direction of the rotating body of the gas discharging passage A vacuum pump extending to an inner peripheral side, wherein a gas discharge passage forming member that forms the gas discharge passage is formed at an upper edge and an obliquely upper side at an opening edge on the downstream space side of the gas discharge passage. Or at least one of the lower side and the diagonally lower side, there is no invisible part.
  • the gas discharge passage forming member is the stator.
  • a casing is provided that covers an outer peripheral side of the rotating body and / or the stator, and the gas discharge passage forming member is the casing.
  • the invention according to claim 4 is the invention according to claim 1, further comprising a housing or a base member that supports the stator, wherein the gas discharge passage forming member is the housing or the base member.
  • the invention according to claim 5 is the invention according to claim 1, further comprising an exhaust port member that forms the exhaust port and extends into the vacuum pump, wherein the gas discharge passage forming member is the exhaust port member. It is characterized by being.
  • the invention according to claim 6 is characterized in that, in the invention according to any one of claims 1 to 5, the smear portion of the opening edge portion has a sumi R shape for reducing stress concentration. .
  • an air inlet, a motor, a rotating body that is rotationally driven by the motor, a stator that is disposed to face the rotating body, and a gas sucked through the air inlet are discharged.
  • a gas discharge passage communicating with the space downstream of the rotating body and the exhaust port in the gas flow path, the rotating body being in the radial direction of the rotating body of the gas discharging passage
  • It is a vacuum pump extending to the inner peripheral side, characterized in that the smear portion of the opening edge portion on the downstream space side of the gas discharge passage has a sumi-R shape that reduces stress concentration. Even if the R dimension of the Sumi R shape is only 0.1 mm, the effect of reducing stress concentration can be obtained. If this R dimension is further increased, a greater reduction effect can be obtained.
  • the invention according to claim 8 is the invention according to any one of claims 1 to 7, further comprising a connector to which a controller for controlling the rotation of the rotating body is connected, and the housing or the base member is provided.
  • a substantially coaxial hole that is substantially coaxial with the rotation center axis of the rotating body, a conductive wire insertion hole through which a conductive wire connecting the connector and the motor is inserted, and the substantially coaxial hole and the conductive wire insertion hole. It is characterized in that a groove is provided for communicating.
  • the controller may be connected directly to the connector or may be connected via a cable.
  • an air inlet a motor, a rotating body that is rotationally driven by the motor, a stator that is disposed to face the rotating body, a housing or a base member that supports the stator,
  • a vacuum pump comprising a connector to which a controller for controlling the rotation of the rotating body is connected, the housing or the base member having a substantially coaxial hole that is substantially coaxial with a rotation center axis of the rotating body;
  • a conductive wire insertion hole through which a conductive wire connecting the connector and the motor is inserted, and a groove communicating the substantially coaxial hole and the conductive wire insertion hole are provided.
  • the invention according to the eighth or ninth aspect at least one of the substantially coaxial hole, the conductive wire insertion hole, and the edge of the groove has a quad-R shape, and the conductive wire is Damage caused by contact with the edge is reduced.
  • the invention according to claim 11 is the invention according to any one of claims 8 to 10, wherein the outer peripheral side end of the groove is the inner periphery of the conductive wire insertion hole in the radial direction of the rotating body. It exists in the outer peripheral side from the side end.
  • an air inlet, a motor, a rotating body that is rotationally driven by the motor, a stator that is disposed to face the rotating body, and a gas that is sucked through the air inlet are discharged.
  • a gas exhaust passage that communicates the space downstream of the rotating body and the exhaust port in the gas flow path, the gas exhaust passage.
  • the screw groove portion of the vacuum pump when extended or disposed further downward in the pump, it is possible to reduce the deterioration of the pump exhaust performance that accompanies it. Moreover, in this invention, when a thread groove part is long or arrange
  • FIGS. 1 to 8. 1 and 2 are longitudinal sectional views showing the structure of a composite airfoil pump to which the present invention is applied.
  • FIG. 1 shows an example in which an exhaust port is provided in a threaded spacer 45 as a stator
  • FIG. 2 shows an example in which an exhaust port is provided in a base 70 as a base member.
  • the same members as those in FIG. 1 to FIG. 8 the same members as those in FIG.
  • the rotary blade cylindrical portion 50 or the threaded spacer 45 as a rotating body has a cylindrical hole 45a or 70a as a gas discharge passage communicating with the space S downstream of the rotary blade cylindrical portion 50 and the exhaust port 90.
  • the present invention relates to a technique for improving the exhaust performance of a vacuum pump that has been lowered by closing an opening on the space S side of the vacuum pump.
  • a threaded spacer 45 in FIG. 1 and a base 70 in FIG. 2 have a cylindrical hole 45a or 70a. Forming.
  • the threaded spacer 45 has an invisible portion when the opening edge 130 on the space S side of the cylindrical hole 45a is viewed from at least one of the lower side and the diagonally lower side. Form so that there is no.
  • the base 70 does not have an invisible portion when the opening edge 130 on the space S side of the cylindrical hole 70a is viewed from at least one of the upper side and the diagonally upper side. To form.
  • FIG. 5 is a view for explaining an invisible portion, taking as an example a case where a cylindrical hole 45a is formed in the threaded spacer 45 as a gas discharge passage.
  • a cylindrical hole 45a is formed in the threaded spacer 45 as a gas discharge passage.
  • the opening edge 130 is formed at the opening edge 130, and the threaded spacer 45 is disposed at least one of the lower side and the diagonally lower side. It is formed so that there is no invisible part when viewed from above.
  • the threaded spacer 45 When the threaded spacer 45 is viewed from at least one of the lower side and the diagonally lower side, there is nothing that obstructs the field of view as in the cross-hatched portion of FIG. 5, so that the entire portion of the opening edge 130 can be seen. . Such a state is defined as having no invisible portion in the present invention.
  • the opening edge 130 does not have an invisible portion when the base 70 is viewed from at least one of the upper side and the diagonally upper side. To form. Also in this case, when the base 70 is viewed from at least one of the upper side and the diagonally upper side, there is nothing that obstructs the field of view like the cross-hatched portion in FIG. be able to.
  • FIG. 6 shows the threaded spacer 45
  • FIG. 7 shows the base 70, respectively.
  • the intake port side when these are incorporated into the composite airfoil pump is the upper side
  • the bottom side of the pump is the lower side.
  • the C side of the center line CC ′ is the upper side
  • the C ′ side is the lower side.
  • the C side of the straight line forming an angle ⁇ of less than 90 degrees with the center line CC ′ is defined as an obliquely upward side
  • the C ′ side is defined as an obliquely downward side.
  • the opening edge 130 does not have an invisible portion when the threaded spacer 45 is viewed from at least one of the lower side and the oblique lower side. It means that it is included in at least one of the visible portion of the opening edge portion 130 when viewed from the obliquely lower side and the visible portion of the opening edge portion 130 when viewed from the obliquely lower side.
  • the fact that there is no invisible portion when the base 70 is viewed from at least one of the sides means that any portion of the opening edge 130 is obliquely above the visible portion of the opening edge 130 when viewed from the upper side. It means that it is included in at least one of the visible portions of the opening edge portion 130 when viewed from the side.
  • the outside of the exhaust port 90 is connected to an auxiliary pump having a normal suction force via a pipe.
  • FIGS. 3A and 4A show an example in which this conventional U-shaped groove is formed.
  • the smear portion of the opening edge 130 is not formed into a sumi-R shape as shown in these drawings.
  • the cylindrical shape and its hollow part are usually machined by lathe.
  • a cutting tool bite
  • the shape of the opening edge portion 130 according to this embodiment it is only necessary to cut so as to dig a hole coaxial with the outer peripheral surface of the cylinder in the direction of the center axis of the cylinder.
  • the smear portion of the opening edge portion 130 on the space S side of the cylindrical hole 45a is formed in an R shape to reduce stress concentration.
  • a vacuum pump particularly a turbo molecular pump
  • the rotating blade 32 and the rotating blade cylindrical portion 50 rotate at high speed during operation, and a large centrifugal force acts on itself.
  • the material strength is increased due to temperature rise and corrosion due to friction with gas and the like. When it drops, it cannot withstand the centrifugal force and breaks down.
  • the rotor blade cylindrical portion 50 breaks during high-speed rotation, it is often divided into three or four parts, and the divided cylindrical portion collides with the threaded spacer 45, and the threaded spacer 45 or this threaded A force acts on the base 70 via the spacer 45.
  • the rotating blade 32 and the rotating blade cylindrical portion 50 are normally rotated at a rotational speed of 10,000 rpm or more, and when broken, the rotational energy is released, so that the force acting on the threaded spacer 45 and the base 70 is extremely low. It will be big. In response to this force, a large stress is generated in the threaded spacer 45 and the base 70.
  • the U-shaped groove of the prior art has two smear parts, but there is only one smear part and there are few stress concentration points, so there is a possibility that more gas leakage will occur. Can be reduced.
  • Fig.3 (a) and Fig.4 (a) it is good also considering the S-shaped part of the U-shaped groove
  • FIG. 8 is a view of the base 70 as seen from the back cover 110 side.
  • a hole for connector wiring 120 as a conductive wire insertion hole is drilled in the base 70 from the outer peripheral side, a blind hole is processed to the outer peripheral side in the radial direction of the rotor blade cylindrical portion 50.
  • a groove 102 is provided from the bottom so that the connector wiring hole 120 and the hole 101 that is substantially coaxial with the rotation center axis of the rotor blade cylindrical portion 50 communicate with each other.
  • FIG. 8 is a view of the base 70 as seen from the back cover 110 side.
  • the connector wiring hole 120 was not a straight through-hole processing up to the hole 101, but a blind hole processing up to the outer peripheral side of the rotary blade cylindrical portion 50. This is to avoid interference between the connector wiring hole 120 and the rotor blade cylindrical portion 50 or the space S for the gas flow path below it.
  • the connector wiring hole 120 interferes with and communicates with the gas flow space S, gas flows into the connector wiring hole 120 and corrodes the connector.
  • the CAD formed in the connector wiring hole 120 and the groove 102 has a CAD-R shape, so that the conductive wire connecting the connector 100 and the motor or magnetic bearing is not easily damaged. can do.
  • the pump outer peripheral side o of the groove 102 is outside the pump inner peripheral end i of the connector wiring hole 120. This is because a larger penetration area from the groove 102 to the connector 100 can be secured by increasing the distance L between the two ends o and i. According to this embodiment, if the depth of the groove 102 is reduced within a range in which the minimum penetration area necessary for the wiring of the conductive wire can be ensured, the rotor blade cylindrical portion 50 and the space S for the gas flow path below the rotor blade cylindrical portion 50 are further lowered. It becomes possible to arrange in.
  • the wiring of the conductive wire to the connector 100 is also a groove having a shape in which the lower wall of the inner peripheral side portion of the connector wiring hole 120 is deleted, so that the wiring is easy, and as a result, the pump manufacturing time is shortened. Can contribute. Accordingly, the rotor blade cylindrical portion 50 and the space S for the gas flow path below the rotor blade cylindrical portion 50 can be extended or arranged further downward without interfering with the connector wiring hole 120. Become. Further, the height position of the connector 100 can be provided at a position higher than that of the conventional pump. As a result of these, the height dimension of the vacuum pump can be further reduced. Further, according to this embodiment, the processing shape of the base 70 can be simplified and the manufacturing cost can be reduced without greatly changing the structure from the conventional pump.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

La présente invention se rapporte à une pompe à vide conçue d’une manière telle que, même si une section rotative ferme l’ouverture intérieure d’une sortie d’évacuation de gaz suite à une réduction de la hauteur de la pompe à vide, l’éventualité d’une réduction des performances d’évacuation de gaz et l’éventualité d’une fuite de gaz en cas de rupture du corps rotatif sont réduites et l’acheminement de fils de sortie d’un connecteur est facilité. Le bord d’ouverture intérieure d’un chemin d’évacuation de gaz pour relier une sortie d’évacuation de gaz et l’espace en aval d’un corps rotatif est formé de sorte que le bord d’ouverture intérieure ne soit pas visuellement caché lorsqu’un élément de formation de chemin d’évacuation de gaz est vu depuis le côté supérieur et l côté obliquement supérieur, ou depuis le côté inférieur et le côté obliquement inférieur. Les coins du bord d’ouverture sont arrondis pour réduire la concentration de tension. De plus, une rainure pour relier un trou d’acheminement de fil de sortie et un trou dans une partie centrale est disposée dans une base, et les coins de la rainure sont arrondis.
PCT/JP2010/059186 2009-08-28 2010-05-31 Pompe à vide et organe utilisé pour pompe à vide WO2011024528A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2011528686A JP5785494B2 (ja) 2009-08-28 2010-05-31 真空ポンプ及び真空ポンプに使用される部材
KR1020117027310A KR101784016B1 (ko) 2009-08-28 2010-05-31 진공 펌프 및 진공 펌프에 사용되는 부재
US13/381,239 US20120141254A1 (en) 2009-08-28 2010-05-31 Vacuum pump and member used for vacuum pump
CN201080036516.1A CN102483069B (zh) 2009-08-28 2010-05-31 真空泵以及真空泵中使用的部件
EP10811581.7A EP2472120B1 (fr) 2009-08-28 2010-05-31 Pompe à vide et organe utilisé pour pompe à vide

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009-198274 2009-08-28
JP2009198274 2009-08-28

Publications (1)

Publication Number Publication Date
WO2011024528A1 true WO2011024528A1 (fr) 2011-03-03

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Application Number Title Priority Date Filing Date
PCT/JP2010/059186 WO2011024528A1 (fr) 2009-08-28 2010-05-31 Pompe à vide et organe utilisé pour pompe à vide

Country Status (6)

Country Link
US (1) US20120141254A1 (fr)
EP (1) EP2472120B1 (fr)
JP (2) JP5785494B2 (fr)
KR (1) KR101784016B1 (fr)
CN (1) CN102483069B (fr)
WO (1) WO2011024528A1 (fr)

Cited By (2)

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JP2015124616A (ja) * 2013-12-25 2015-07-06 株式会社島津製作所 真空ポンプ
JP2018096336A (ja) * 2016-12-16 2018-06-21 エドワーズ株式会社 真空ポンプとこれに用いられるステータコラムとその製造方法

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JP6948147B2 (ja) 2017-04-18 2021-10-13 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる磁気軸受部およびシャフト
JP7289627B2 (ja) * 2018-10-31 2023-06-12 エドワーズ株式会社 真空ポンプ、保護網及び接触部品
JP7456394B2 (ja) * 2021-01-22 2024-03-27 株式会社島津製作所 真空ポンプ

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JP2015124616A (ja) * 2013-12-25 2015-07-06 株式会社島津製作所 真空ポンプ
US10132329B2 (en) 2013-12-25 2018-11-20 Shimadzu Corporation Vacuum pump
JP2018096336A (ja) * 2016-12-16 2018-06-21 エドワーズ株式会社 真空ポンプとこれに用いられるステータコラムとその製造方法
WO2018110467A1 (fr) * 2016-12-16 2018-06-21 エドワーズ株式会社 Pompe à vide, colonne de stator utilisée en son sein, et son procédé de fabrication
CN109996964A (zh) * 2016-12-16 2019-07-09 埃地沃兹日本有限公司 真空泵、用于其的定子柱及其制造方法
CN109996964B (zh) * 2016-12-16 2022-01-14 埃地沃兹日本有限公司 真空泵、用于其的定子柱及其制造方法

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CN102483069B (zh) 2016-09-07
KR20120061770A (ko) 2012-06-13
JP5689546B2 (ja) 2015-03-25
JP5785494B2 (ja) 2015-09-30
CN102483069A (zh) 2012-05-30
EP2472120B1 (fr) 2022-11-30
JP2014080981A (ja) 2014-05-08
EP2472120A1 (fr) 2012-07-04
US20120141254A1 (en) 2012-06-07
EP2472120A4 (fr) 2017-08-02
JPWO2011024528A1 (ja) 2013-01-24

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