WO2010137424A1 - 薬液供給システムおよびそれに用いる薬液用容器 - Google Patents

薬液供給システムおよびそれに用いる薬液用容器 Download PDF

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Publication number
WO2010137424A1
WO2010137424A1 PCT/JP2010/056911 JP2010056911W WO2010137424A1 WO 2010137424 A1 WO2010137424 A1 WO 2010137424A1 JP 2010056911 W JP2010056911 W JP 2010056911W WO 2010137424 A1 WO2010137424 A1 WO 2010137424A1
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WO
WIPO (PCT)
Prior art keywords
container
chemical solution
liquid
sealing member
inner cap
Prior art date
Application number
PCT/JP2010/056911
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
宏和 田仲
Original Assignee
Ａｚエレクトロニックマテリアルズ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ａｚエレクトロニックマテリアルズ株式会社 filed Critical Ａｚエレクトロニックマテリアルズ株式会社
Priority to CN2010800229665A priority Critical patent/CN102448851A/zh
Priority to JP2011515953A priority patent/JP5450617B2/ja
Publication of WO2010137424A1 publication Critical patent/WO2010137424A1/ja

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D51/00—Closures not otherwise provided for
    • B65D51/18—Arrangements of closures with protective outer cap-like covers or of two or more co-operating closures
    • B65D51/20—Caps, lids, or covers co-operating with an inner closure arranged to be opened by piercing, cutting, or tearing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D83/00—Containers or packages with special means for dispensing contents
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61J—CONTAINERS SPECIALLY ADAPTED FOR MEDICAL OR PHARMACEUTICAL PURPOSES; DEVICES OR METHODS SPECIALLY ADAPTED FOR BRINGING PHARMACEUTICAL PRODUCTS INTO PARTICULAR PHYSICAL OR ADMINISTERING FORMS; DEVICES FOR ADMINISTERING FOOD OR MEDICINES ORALLY; BABY COMFORTERS; DEVICES FOR RECEIVING SPITTLE
    • A61J1/00—Containers specially adapted for medical or pharmaceutical purposes
    • A61J1/14—Details; Accessories therefor
    • A61J1/20—Arrangements for transferring or mixing fluids, e.g. from vial to syringe
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D51/00—Closures not otherwise provided for
    • B65D51/16—Closures not otherwise provided for with means for venting air or gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D51/00—Closures not otherwise provided for
    • B65D51/18—Arrangements of closures with protective outer cap-like covers or of two or more co-operating closures
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61J—CONTAINERS SPECIALLY ADAPTED FOR MEDICAL OR PHARMACEUTICAL PURPOSES; DEVICES OR METHODS SPECIALLY ADAPTED FOR BRINGING PHARMACEUTICAL PRODUCTS INTO PARTICULAR PHYSICAL OR ADMINISTERING FORMS; DEVICES FOR ADMINISTERING FOOD OR MEDICINES ORALLY; BABY COMFORTERS; DEVICES FOR RECEIVING SPITTLE
    • A61J1/00—Containers specially adapted for medical or pharmaceutical purposes
    • A61J1/14—Details; Accessories therefor
    • A61J1/20—Arrangements for transferring or mixing fluids, e.g. from vial to syringe
    • A61J1/2003—Accessories used in combination with means for transfer or mixing of fluids, e.g. for activating fluid flow, separating fluids, filtering fluid or venting
    • A61J1/202—Separating means
    • A61J1/2027—Separating means having frangible parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2251/00—Details relating to container closures
    • B65D2251/0003—Two or more closures
    • B65D2251/0006—Upper closure
    • B65D2251/0015—Upper closure of the 41-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2251/00—Details relating to container closures
    • B65D2251/0003—Two or more closures
    • B65D2251/0068—Lower closure
    • B65D2251/0093—Membrane

Definitions

  • the present invention relates to a liquid medicine feeding device.
  • the present invention relates to a one-way type container for storing, transporting, and distributing fluids such as chemicals for electronics industry, and a liquid medicine feeding device using the same.
  • chemicals used in the manufacture of semiconductor materials are stored and transported in chemical containers, and are opened and used in manufacturing plants.
  • the method of using such a chemical container is roughly divided into a method of repeatedly using the same container called a link method and a method of using a new container each time called a one-way method.
  • the one-way method is preferable particularly when the purity of the chemical is important.
  • a double-retractable container in which both of the above-mentioned methods are combined and the inner container directly in contact with the chemical is a one-way method is also used.
  • Such a double storage type container generally uses a bag made of a flexible film made of an inert material as an inner container.
  • the inner container is disposed in the outer container, and the chemical solution is filled in the inner container.
  • the container is used, that is, after the chemical solution is discharged from the inner container, the inner container is removed from the outer container and discarded, and a new inner container is attached to the outer container. In this way, it is regenerated as a chemical solution container, and the chemical solution is filled in the inner container again.
  • a one-way type container generally includes a resin container formed of a molded chemical-resistant synthetic resin and a double container in which a molded chemical-resistant synthetic resin inner container is surrounded by a metal outer container.
  • a composite container having a structure. Resin containers are relatively widely used because they can be manufactured at low cost and can be easily discarded after use.
  • a composite container for example, a liquid chemical pail can has been developed that can be manufactured at low cost, and after use, a metal and a synthetic resin can be easily separated, disassembled, and discarded (see, for example, Patent Document 2).
  • the conventional chemical container is opened by removing the lid of the container when the liquid feeding tube is inserted, so that the time for the chemical liquid in the container to come into contact with air is relatively long, and when the liquid feeding tube is inserted, Since the chemical solution is agitated, there is relatively much contact between the chemical solution and air. For this reason, there has been a tendency that the chemical solution is greatly deteriorated due to air contact such as oxidation.
  • any conventional chemical solution container cannot be confirmed by the user of the chemical solution before use even if the cap of the container is opened accidentally or intentionally during transportation.
  • oxygen may be supplied into the container and the chemical solution inside may deteriorate due to oxidation or the like, but it is not easy to check whether the chemical has deteriorated during use.
  • the object of the present invention is to provide a liquid chemical feed tube that can be manufactured at low cost, can be confirmed to be unopened when the container is used, and can reduce the chance of contact between the chemical and air when the container is replaced. And providing its supply container.
  • the chemical solution supply system includes: A chemical solution supply system for supplying the chemical solution from a chemical solution container filled with a chemical solution, wherein the chemical solution container includes: A container body having an opening; A hollow cylindrical inner cap body that fits inside the opening, a liquid delivery tube having a liquid passage extending from the inner hollow part of the inner cap body to the vicinity of the inner bottom of the container body, and the inner cap body.
  • An inner cap member having a sealing member for sealing the outer opening end, the sealing member capable of irreversibly opening the outer opening end by breaking or removing the sealing member;
  • a connection plug comprising a liquid feed pipe and a gas introduction pipe is connected to the inner cap member, and at this time, a header provided at an end of the liquid feed tube in an inner hollow portion of the inner cap body The tip of the liquid feeding pipe inserted by breaking or removing the sealing member is connected to the part, (A) Gas is introduced into the container body from the gas introduction pipe through the guide hole provided in the inner cap member and penetrating from the inner hollow portion of the inner cap body into the container body.
  • the chemical solution is pushed out and supplied from the inside of the container body via the liquid supply tube and the liquid supply pipe, or (b) the liquid supply pipe and the liquid supply The chemical solution is sucked and supplied from within the container main body via a tube.
  • the chemical solution container comprises: A container body having an opening; A hollow cylindrical inner cap body that fits inside the opening, a liquid delivery tube having a liquid passage extending from the inner hollow part of the inner cap body to the vicinity of the inner bottom of the container body, and the inner cap body.
  • An inner cap member having a sealing member for sealing the outer opening end, the sealing member capable of irreversibly opening the outer opening end by breaking or removing the sealing member; Comprising: When connecting a plug having a liquid feeding pipe and a gas introduction pipe to the inner cap member in order to discharge the chemical solution filled in the container body, the inner cap body has an inner hollow portion.
  • a header portion connectable to the tip of the liquid feeding pipe inserted by breaking or removing the sealing member is provided, and the inner cap member is connected to the gas introduction pipe. It has a guide hole for allowing the inflowing gas to pass through the container.
  • the liquid supply tube is used in the chemical liquid supply system, and the liquid supply tube is a foreign object when the container after the internal chemical liquid is used is switched to the next new container. Or they are not contaminated by impurities and they are not brought into the container.
  • handling is better than a conventional chemical solution container or a chemical solution supply system.
  • the chemical solution container according to the present invention can be used as a one-way type container, and it is not necessary to clean the container body or the liquid supply tube by discarding it after use including the liquid supply tube installed inside. . Moreover, the refilling of the bag to an outer side container which was required with the composite container which has the conventional double structure is also unnecessary. Furthermore, in consideration of the improvement in yield of the final product due to the reduction of chemical contamination as described above, a comprehensive economical chemical supply system can be achieved.
  • connection plug used for the chemical
  • 3 is a graph showing the average number of fine particles in the photoresist composition in Example 1 and Comparative Example 1.
  • FIG. 1 is a side view of a chemical solution container 3 according to the present invention.
  • the container body 5 includes an opening 6, the inside is filled with a chemical solution 12, and the opening is sealed with an outer container cap 10. That is, the appearance is the same as that of a conventional general chemical solution container.
  • the material of the container main body and the outer container cap can be arbitrarily selected from resin, metal, or the like, and a handle or the like can be provided to improve handling.
  • the chemical solution container according to the present invention is characterized by its internal structure.
  • a schematic cross-sectional view of the internal structure is as shown in FIG.
  • a male screw 6 a for assembling the outer container cap 10 is cut outside the opening of the container body 5.
  • the assembly of the outer cap does not necessarily have a screw structure.
  • a fitting structure can be used.
  • the male screw 6a can also be used for fixing a connection plug described later. It is preferable to have.
  • an inner cap member 20 is assembled inside the opening.
  • the structure of the inner cap member 20 is as shown in FIG.
  • the hollow cylindrical inner cap body 7 is a cylindrical member that fits inside the opening 6 of the container body.
  • a liquid feeding tube 8 is provided that reaches from the inner hollow part of the inner cap body to the bottom of the container body.
  • a header part 8a to which a liquid feeding pipe to be described later is joined is provided.
  • the header portion 8a can be provided with a taper structure as shown in FIG. 3 in order to facilitate the joining of the liquid feeding pipe and improve the adhesion of the joining portion to prevent liquid leakage and gas leakage.
  • a coupling or O-ring for improving the adhesion can be provided. Since the material of the liquid feeding tube is immersed in the chemical solution in the container body, a material having high resistance to the chemical solution is selected according to the type of the chemical solution.
  • polyolefin resins such as polyethylene, polypropylene, polybutylene, and copolymers thereof
  • polyester resins such as polyethylene terephthalate, and polybutylene terephthalate
  • fluorine-containing resins such as tetrafluoroethylene, Tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer, tetrafluoroethylene-ethylene copolymer, ethylene trifluoride chloride, polyvinylidene fluoride, polyvinyl fluoride, and ethylene trifluoride-ethylene copolymer Used.
  • the liquid feeding tube may be high in rigidity or soft.
  • the length of the liquid feeding tube is generally set to the length near the bottom of the container body. This is because if it is short, the amount of the chemical solution remaining in the main body will increase.
  • the end of the liquid delivery tube is long enough to contact the bottom, it may be difficult to discharge the chemical solution from the end of the liquid delivery tube. In such a case, the chemical solution can be easily discharged by providing a hole in the side surface of the end portion of the liquid feeding tube.
  • a soft liquid feeding tube can also be used, in such a case, it is possible to reduce the remaining amount of the chemical liquid at the time of discharge by lengthening the liquid feeding tube so as to contact the bottom of the container body.
  • the end of the inner cap body on the side where the liquid feeding tube is not provided, that is, the outer opening end of the inner cap body is sealed with a sealing member 7a.
  • the sealing member can open the outer opening end irreversibly by breaking or removing the sealing member.
  • “the opening end can be opened irreversibly” means that when the opening end is opened, the sealing material is broken or deformed and cannot be returned to the state before being opened substantially.
  • a preferable example of such a sealing material is a film-shaped sealing material made of a film such as a resin. In order to open the opening by adhering or welding a film such as resin to the opening, it is necessary to cut or remove the film, and it is virtually impossible to return it to its original state. is there.
  • This film-like sealing member substantially functions as a lid for a chemical solution container when the chemical solution is stored or transported.
  • the outer container cap 10 described above is attached to the opening during transportation and storage, and this outer container cap also has a function of protecting the film-like sealing member.
  • the film-like sealing member is broken or removed when a connection plug, which will be described later, is connected during the supply of the chemical solution, and the end of the liquid feeding pipe can be introduced into the inner hollow portion of the inner cap member. That is, for example, the film-like sealing member can be broken by penetrating the tip of a connecting plug processed into a sharp shape, or can be broken by a blade or the like, or peeled off and removed. .
  • the end of the liquid feeding pipe is introduced into the opening that is opened when the film-shaped sealing member is broken or removed, and is coupled to the liquid feeding tube.
  • the material for such a film-shaped sealing member is preferably selected from a relatively flexible resin. Specifically, this material can be selected from those listed as the materials for the liquid feeding tube. More specifically, polyethylene or polypropylene is a preferable material because it is inexpensive and can be easily broken or removed when connecting the connection plug.
  • This film-like sealing member is fixed to the inner cap body by, for example, an adhesive or heat welding.
  • the shape of the film-shaped sealing member is not particularly limited, and may be any shape as necessary.
  • An example of the shape of such a film-shaped sealing member is as shown in FIG.
  • the film-like sealing member 7a may have a uniform thickness, a linear thin portion, so-called notch 11, is provided in the film so that the film can be easily broken when the connection plug is connected. be able to.
  • the shape of the notch 11 is not particularly limited, and may be provided radially on the film surface (FIG. 4A) or may be an arc shape (FIG. 4B).
  • the cross-sectional shape of the notch is preferably V-shaped, but may be semicircular or rectangular.
  • the tab 12 when peeling a film-shaped sealing member at the time of use, in order to make peeling easy, the tab 12 can be provided and it can also make it easy for an operator to grasp (FIG.4 (c)).
  • the film-shaped sealing member may be larger than the outer diameter of the opening, and the entire outer peripheral portion may be a tab (FIG. 4D).
  • the sealing member is not limited to a film-like one, and can be any shape.
  • a conceptual cross-sectional view of one embodiment of such a sealing member is shown in FIG.
  • a cap-shaped sealing member 10a that fits inside the inner cap body is shown.
  • the cap-shaped sealing member 10a has a truncated cone shape having a trapezoidal cross section. That is, the outer peripheral diameter of the cap-shaped sealing member 10a is larger as it is closer to the bottom surface.
  • a groove structure corresponding to the outer shape of the cap-shaped sealing member 10a is formed on the inner wall of the inner cap body 7 so as to be fitted to each other.
  • the cap-shaped sealing member can be formed of an elastic material and fixed to the inner cap body by fitting.
  • the bottom surface of the cap-shaped sealing member 10a may be in contact with the header portion 8a.
  • the cap-shaped sealing member is provided with the tab 10b and the notch 10c, and the tab 10b is pulled up so that the cap member can be easily removed or destroyed during use.
  • the cap member is preferably formed so as to be broken along.
  • the notch is formed linearly on the bottom surface of the cap-shaped sealing member, and the tab 10b is formed at the notch end portion of the bottom surface.
  • the tab may be provided not only on the bottom surface of the film-shaped sealing member but also on the inner side surface or the upper portion, and the notch may be circular instead of linear.
  • the cap-shaped sealing member shown in FIG. 5 is one of preferred embodiments, but other cap-shaped members can be used.
  • the rim 10d is formed on the outer periphery of the cap-shaped sealing member (FIG. 5C), and the inner cap member is fixed by being fitted into a groove provided on the inner periphery of the inner cap body. It can be fixed by being adhered or heat-welded to.
  • the stopper 10e can also be formed in the upper surface outer periphery of a cap-shaped sealing member (FIG.5 (d)). This stopper 10e contacts the surface of the upper surface rim portion of the inner cap body and contributes to fixing the cap-shaped sealing member. If necessary, the stopper portion can be bonded or heat-welded to the inner cap body.
  • a cap-shaped sealing material that fits over the upper surface rim portion of the inner cap body or the outside of the opening, covers the opening, and seals the container can also be used.
  • these cap-shaped members can be fixed without using adhesion or heat welding. This is preferable because the member is irreversibly deformed or broken.
  • bonding it is also possible to use a seal or the like that cannot be reattached because the adhesive strength is reduced once it is peeled off.
  • the inner cap member is provided with a guide hole 9 penetrating from the inner hollow portion of the cap main body into the container main body when the inner cap member is fitted to the container main body.
  • the guide hole 9 is (a) for allowing a gas introduced from a gas introduction pipe to be described later to pass through the container body to increase the pressure in the container body, thereby discharging the chemical solution in the container body, or (B) When a chemical liquid in the container body is sucked by a pump or the like provided outside through a liquid supply pipe and a liquid supply tube, which will be described later, external air flows into the container through any guide hole. The negative pressure generated in the container by suction is adjusted.
  • the inner cap member 20 having such a structure is fitted into the opening 6 of the container body 5.
  • the inner cap member 20 can be provided with a stopper 7b for preventing the inner cap member 20 from falling off from the opening 6.
  • the inner cap member 20 can be fixed to the opening 6 with an adhesive or the like.
  • the inner cap member 20 is generally attached to the opening 6 after the container body 5 is filled with the chemical solution.
  • the chemical liquid is filled, and then the film-like sealing member can be thermally welded to the inner cap body 7.
  • FIG. 1 An overall conceptual diagram of such a chemical solution supply system is as shown in FIG.
  • the gas is introduced into the container body from the gas introduction pipe, through the guide hole provided in the inner cap member and penetrating from the inner hollow portion of the inner cap body into the container body. Due to the pressure of the gas, the chemical solution is pushed out from the inside of the container body and supplied via the liquid supply tube and the liquid supply pipe.
  • a connection plug 31 is coupled to the chemical liquid container 3.
  • a gas introduction pipe 32 and a liquid feed pipe 33 are coupled to the connection plug 31.
  • the gas introduction pipe is connected to, for example, the gas tank 4, and by opening the valve 41, gas is introduced into the container main body, and the chemical liquid in the container main body is pushed out by the pressure of the gas, and the liquid supply tube 8 and the liquid supply tube 8 are supplied. It is supplied to the outside of the chemical solution container through the liquid pipe 33.
  • connection plug 31 is provided with a liquid feed pipe 33 and a gas introduction pipe 32.
  • the tip 33a of the liquid feed pipe 33 is shaped to be connectable to the header 8a of the inner cap member.
  • the gas introduction pipe 32 can also have a sharp shape so as to penetrate the film-like sealing member as shown in FIG.
  • the gas introduction pipe 32 does not necessarily have to penetrate to the inside of the inner cap body 7, and the connection plug 31 may have a simple opening. This is because the gas introduced from the gas introduction pipe can flow into the container through a tear formed when the liquid feed pipe penetrates. Further, when the film-like sealing member is removed, there is no obstacle when gas is introduced from the gas introduction pipe.
  • FIG. 8 is a conceptual cross-sectional view showing a state in which the connection cap 31 is connected to the inner cap member 8.
  • the distal end portion 33a of the liquid feeding pipe 33 is connected to the header portion 8a of the liquid feeding tube 8, and is assembled to the male screw 6a of the opening 6 by a connection plug fixing screw 30 in order to fix in this state.
  • the film-shaped sealing member of the inner cap body 7 is broken by the penetration of the liquid feeding pipe 33.
  • the film-shaped sealing member may be peeled off in advance.
  • the gas introduced from the gas introduction pipe 32 is introduced into the container body through the guide hole 9, and the chemical solution is supplied by the pressure through the liquid feed tube 8 and the liquid feed pipe 33. Supplied from the main body to the outside.
  • the supplied chemical solution is temporarily stored in the receiving container 1, for example, and is measured and used by an appropriate measuring means.
  • a gas tank that generally contains an inert gas is connected to the gas introduction pipe.
  • inert gas for example, nitrogen etc.
  • air can be used. In such a case, air can be introduced into the container using a pump or the like.
  • gas is introduced into the container, and the chemical liquid in the container is discharged by the pressure.
  • the chemical liquid is sucked from the container main body via the liquid feeding pipe and the liquid feeding tube.
  • a pump is installed in the middle of the liquid supply pipe to suck the chemical liquid in the container, or the receiving container that receives the discharged chemical liquid and the liquid supply pipe connected thereto are sealed, and the inside of the receiving container is depressurized.
  • medical solution in a container can be aspirated.
  • the guide hole has a function of allowing the outside air to flow into the container via the gas introduction pipe and adjusting the pressure in the container body.
  • Example 1 A pail can (manufactured by Japan Pale Co., Ltd.) having an internal volume of 20 liters and having high density polyethylene blow-molded with clean air as an inner bag was prepared. This pail can was used as it was purchased without washing.
  • the photoresist composition was filtered and filled into this pail, and an inner cap member and an outer container cap having a liquid feeding tube with a film-like sealing member as shown in FIG. 2 were installed and sealed.
  • This film sealing member was provided with a radial notch 11 on the film surface as shown in FIG. In this way, ten containers enclosing the photoresist composition were prepared.
  • Example 1 In the same manner as in Example 1, the pail can was filled with the photoresist composition by filtration, and the inner cap and the outer container cap previously installed in the pail can were installed and sealed. In this way, ten containers enclosing the photoresist composition were prepared.
  • Example 2 Ten prepared containers were allowed to stand at room temperature (about 25 ° C.) for 1 hour in the same manner as in Example 1. Then, after removing the outer container cap and the inner stopper of the first container, a connector with a liquid feeding tube was attached to the container, and the inside of the container was pressurized to collect a photoresist composition. Subsequently, the same connector with a liquid feeding tube was continuously used without washing, and the photoresist composition was collected sequentially from all the containers.
  • the number of fine particles in the photoresist composition collected in Evaluation Example 1 and Comparative Example 1 was measured using a particle counter. For each composition, the number of fine particles exceeding 0.23 ⁇ m and the average number of fine particles exceeding 0.3 ⁇ m were measured. The obtained results were as shown in Table 1 and FIG.
  • the average number of fine particles corresponding to “container number 0” in the table means the average number of fine particles measured for the photoresist composition immediately after filling the container and before sealing.
  • the number of fine particles in the photoresist composition is increased by continuously using the same connector with a liquid feeding tube, whereas in the present invention, the same liquid feeding tube is continuously used.
  • the number of fine particles did not increase even when piping was used.
  • the chemical solution can be stably supplied by using the chemical solution supply system of the present invention.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Pharmacology & Pharmacy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Closures For Containers (AREA)
  • Packages (AREA)
  • Containers And Packaging Bodies Having A Special Means To Remove Contents (AREA)
  • Safety Valves (AREA)
PCT/JP2010/056911 2009-05-29 2010-04-19 薬液供給システムおよびそれに用いる薬液用容器 WO2010137424A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN2010800229665A CN102448851A (zh) 2009-05-29 2010-04-19 化学品溶液供给系统和其所采用的化学品溶液用容器
JP2011515953A JP5450617B2 (ja) 2009-05-29 2010-04-19 薬液供給システムおよびそれに用いる薬液用容器

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JP2009-131149 2009-05-29
JP2009131149 2009-05-29

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JP (1) JP5450617B2 (zh)
KR (1) KR101635727B1 (zh)
CN (1) CN102448851A (zh)
TW (1) TWI488783B (zh)
WO (1) WO2010137424A1 (zh)

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