WO2010134491A1

WO2010134491A1 - Cassette

Info

Publication number: WO2010134491A1
Application number: PCT/JP2010/058293
Authority: WO
Inventors: 章男松山; 資有光; 浩幸島田; 貴行湊
Original assignee: シャープ株式会社; 淀川ヒューテック株式会社
Priority date: 2009-05-20
Filing date: 2010-05-17
Publication date: 2010-11-25
Also published as: JPWO2010134491A1; CN102428552A

Abstract

A structure for a cassette enables the bottom face to be easily opened and closed. A cassette (100) for containing a substrate (40), comprising a cassette body (10) in which the substrate (40) is disposed, a cassette opening (12) which is formed in a side face of the cassette body (10), a bottom face opening (14) which is formed in the bottom face of the cassette body (10), a bottom plate (20) which closes the bottom face opening (14), supporting bars (30) which support the lower surface of the bottom plate (20), and a bottom plate pressing section (22) which presses the upper surface of the peripheral edge of the bottom plate (20) which is supported by the supporting bars (30).

Description

cassette

The present invention relates to a cassette for storing a substrate, and more particularly to a cassette for storing a thin substrate (for example, a glass substrate) used in a method for manufacturing a flat panel display (for example, a liquid crystal panel).

This application claims priority based on Japanese Patent Application No. 2009-121567 filed on May 20, 2009, the entire contents of which are incorporated herein by reference. .

A liquid crystal panel, which is a component of a liquid crystal display device, has a structure in which a pair of glass substrates are opposed to each other with a predetermined gap secured. With the increase in size and mass production of liquid crystal panels, glass substrates for liquid crystal panels are becoming larger year by year. Such a next-generation large-sized liquid crystal glass substrate transport system uses a storage cassette for storing liquid crystal glass substrates in multiple stages (for example, Patent Documents 1 to 3). *

The storage cassette storing the glass substrate is used for transporting and storing the glass substrate from the mounting portion of the liquid crystal panel manufacturing apparatus to the mounting portion of another manufacturing apparatus in the manufacturing process in the clean room. The storage cassette is also used for transporting and storing a glass substrate between a placement unit of a liquid crystal panel manufacturing apparatus and a storage unit of a cassette storage. *

The atmosphere in the clean room has sufficient air cleanliness, but foreign substances such as dust scattered from the operator and floor surface when transporting and storing the storage cassette adhere to the substrate surface, and organics during substrate processing A mist such as gas may float in the clean room and adhere to the substrate surface. If the substrate is processed with foreign matter or mist attached, the quality of the liquid crystal panel may be deteriorated. For this reason, the glass substrate is transported and stored in a state where it is shielded in the storage cassette so that no foreign matter adheres.

JP-A-9-115997 JP 2005-142480 A JP 2005-145628 A

Along with the recent increase in the size of glass substrates, the shelf-type storage cassette has a small area for supporting the glass substrate. The substrate may be distorted. Therefore, such a storage cassette cannot be used for a large glass substrate. *

Therefore, recently, when storing and transporting a large glass substrate, in order to suppress such distortion, a wire cassette in which wires are arranged in multiple stages in parallel with the inner wall of the storage cassette may be used. . *

However, when a glass substrate is stored and transported using a wire cassette, there is an opening for inserting a roller conveyor on the lower surface of the wire cassette, and thus sealing is not ensured. When a wire cassette containing a glass substrate is always placed in a clean room, there is little problem that the bottom surface of the wire cassette is not sealed, but in terms of transporting the glass substrate, it is always only in the clean room. In some cases, a wire cassette cannot be used. Under such circumstances, a structure that can easily seal the opening at the bottom of the wire cassette can provide great technical value. *

This invention is made | formed in view of this point, The main objective is to provide the cassette structure which can seal a bottom face simply.

The cassette according to the present invention is a cassette for storing a substrate, a cassette main body portion in which the substrate is disposed, a cassette opening formed on a side surface of the cassette main body portion, in which the substrate is taken in and out, and the cassette A bottom opening formed on the bottom surface of the main body, a bottom plate that closes the bottom opening, a support rod that supports the bottom surface of the bottom plate, and a bottom plate that holds down the top surface of the peripheral edge of the bottom plate supported by the replacement rod A holding part.

In a preferred embodiment, the support rod is disposed on a pedestal located below the bottom opening.

In a preferred embodiment, a sealing member that seals a gap between the bottom plate pressing portion and the bottom plate is formed.

In a preferred embodiment, the sealing member is a resilient member formed on the lower surface of the bottom surface pressing portion.

In a preferred embodiment, the bottom surface pressing portion is formed so as to go around the inner wall of the cassette body portion.

In a preferred embodiment, a plurality of the support rods are provided, and an elevating arm for raising and lowering the cassette body is inserted in a space between the support rods in a lower region of the bottom plate.

In a preferred embodiment, a plurality of wires are arranged inside the cassette body, the substrate is a glass substrate, the glass substrate is supported by the wires, and is formed in the bottom opening. The substrate transfer device for moving the glass substrate is inserted.

According to the cassette of the present invention, the bottom surface opening formed on the bottom surface of the cassette body, the bottom plate that closes the bottom surface opening, the support rod that supports the bottom surface of the bottom plate, and the bottom plate presser that presses the top surface of the peripheral edge of the bottom plate The cassette structure that can easily seal and open the bottom surface can be provided.

It is a perspective view of the wire cassette 100 which concerns on embodiment of this invention. It is sectional drawing which shows the side structure of the wire cassette 100 which concerns on embodiment of this invention. FIG. 4 is an enlarged view of the periphery of the bottom plate pressing portion 22 including the sealing member 24 and the bottom plate 20. (A) And (b) is a perspective view which shows the periphery of the baseplate pressing part 22, respectively. It is sectional drawing explaining the step which open | releases the bottom face opening part 14 of the wire cassette 100. FIG. It is sectional drawing explaining the step which conveys the cassette main-body part 10 in a sealed state. It is sectional drawing explaining the step which conveys the cassette main-body part 10 in a sealed state. It is sectional drawing for demonstrating the step which carries the board | substrate 40 out of the wire cassette 100. FIG. It is sectional drawing for demonstrating the step which carries the board | substrate 40 out of the wire cassette 100. FIG. It is sectional drawing of the wire cassette 1100 of a comparative example. It is sectional drawing of the wire cassette 1200 of a comparative example. It is sectional drawing which shows the side surface structure of the modification of the wire cassette.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following drawings, components having substantially the same function are denoted by the same reference numerals for the sake of brevity. In addition, this invention is not limited to the following embodiment. *

First, the wire cassette 100 which concerns on embodiment of this invention is demonstrated, referring FIGS. 1-4. *

FIG. 1 is a perspective view schematically showing the overall configuration of the wire cassette 100 of the present embodiment. The wire cassette 100 of the present embodiment is a storage cassette that can store the substrate 40 by supporting the substrate 40 with a wire. In FIG. 1, the wire is not shown. An arrow 50 indicates the direction of gravity (vertical direction). *

The board | substrate 40 of this embodiment is a glass substrate for liquid crystal panels, for example. The glass substrate 40 may be a mother glass before being cut out to the dimensions of the liquid crystal panel, or may be a glass having the size of the liquid crystal panel after being cut out. Further, the glass substrate 40 may be an array substrate on which a thin film transistor (TFT) is manufactured (or a product in the middle of manufacturing), or a CF substrate on which a color filter (CF) is formed (or a device in the middle of manufacturing thereof). ).

The substrate 40 may be another thin plate such as a wafer in addition to a glass substrate. In addition, it is not limited to the liquid crystal panel substrate 40, but a thin substrate for manufacturing a PDP, an organic EL panel, and other flat panel displays (not limited to glass, but in a sheet form that can be stored in a wire cassette ). *

The wire cassette 100 of the present embodiment includes a cassette body 10, a cassette opening 12 formed on the side surface of the cassette body 10, a bottom opening 14 formed on the bottom surface of the cassette body 10, and a bottom opening. 14 and a bottom plate 20 that closes 14. A substrate 40 can be disposed inside the cassette body 10. Further, the substrate 40 can be taken in and out from the cassette opening 12. Note that a panel (not shown) for closing the opening can be disposed in the cassette opening 12. *

A bottom plate 20 that closes the bottom opening 14 is provided at the bottom of the cassette body 10. Below the bottom plate 20, a replacement rod 30 that supports the lower surface of the bottom plate 20 is disposed. Further, the upper surface of the peripheral portion of the bottom plate 20 supported by the refill rod 30 is pressed by a bottom plate pressing portion 22 formed on the inner wall of the cassette main body portion 10. Although not shown in FIG. 1, a sealing member (24) that closes the gap is provided between the bottom plate pressing portion 22 and the bottom plate 20. *

FIG. 2 is a cross-sectional view schematically showing a side configuration of the wire cassette 100 of the present embodiment. In the example shown in FIG. 2, wires 60 that support the substrate 40 are arranged inside the cassette body 10. Specifically, one substrate 40 is supported by a plurality of wires 60, and the plurality of wires 60 are arranged in multiple stages. By arranging the wires 60 in multiple stages, the glass substrates 40 can be accommodated in multiple stages inside the cassette body 10. *

In this example, four stages of substrates 40 are accommodated, but the number of substrates 40 accommodated corresponds to the number of stages of the wires 60, and the number of stages can be set as appropriate. The wire 60 is stretched between opposing wall surfaces (inner walls) inside the cassette body 10 and supports the substrate 40 with the tension. *

A roller conveyor (not shown) for taking in and out the substrate 40 is inserted into the bottom opening 14 formed on the bottom surface of the cassette body 10. The roller conveyor has a function of contacting the substrate 40 from between the wires 60 and discharging the substrate 40 from the cassette opening 12. The bottom opening 14 is provided with a bottom plate 20 that closes the opening. In addition, as a board | substrate conveyance apparatus for paying out the board | substrate 40 from the cassette main-body part 10, the air floating conveyor which has the structure which can float and move the board | substrate 40 with air other than a roller conveyor is used, for example. You can also. *

The replacement rod 30 is a rod-shaped member extending from the ground. The tip of the support rod 30 supports the bottom plate 20, and the base of the support rod 30 is fixed to the ground side. A plurality of support rods 30 are provided to stably support the bottom plate 20. In one example, the support rods 30 are arranged in a matrix in a lower region of the bottom plate 20. In addition, as long as the bottom plate 20 can be supported appropriately, the arrangement of the replacement rods 30 may be not only uniform but also unequal. *

In the present embodiment, the support rod 30 is disposed on a mounting table 32 positioned below the bottom opening 14. The pedestal 32 is, for example, a pedestal for a wire cassette installed in a manufacturing factory or a loading platform for a transport vehicle that transports the wire cassette. A recess 33 is formed in the mounting table 32 of the present embodiment, and the support rod 30 extends in the vertical direction from the bottom surface 34A. That is, the height of the support rod 30 is determined corresponding to the height at which the bottom surface of the bottom plate pressing portion 22 is positioned (or the height at which the sealing member 24 is positioned) with reference to the concave bottom surface 34A of the mounting base 32. . Further, the lower end 15 of the cassette body 10 is placed on the upper surface 34B of the mounting table 32 where the recess 33 is not located. *

The filling rod 30 is made of, for example, a metal material. Moreover, the shape of the holding rod 30 is a cylinder, for example, and the diameter is about 10 mm, for example. However, the shape of the support rod 30 is not limited, and may be another shape (for example, a prism) as long as the bottom plate 20 can be appropriately supported. The tip of the filling rod 30 can be rounded so as not to damage the bottom surface of the bottom plate 20, or an interference material such as resin may be attached. In addition, although the thing when the dimension of the glass substrate 40 for liquid crystal panels assumes the case where it is about 3 m x 3 m is shown as an example here, each dimension can be suitably changed according to conditions. *

Further, the bottom plate 20 is pressed by a bottom plate pressing portion 22 provided on the inner wall of the cassette body 10. A sealing member 24 that closes the gap between the bottom plate pressing portion 22 and the bottom plate 20 is formed. In the configuration of the present embodiment, the sealing member 24 is formed on the lower surface of the bottom plate pressing portion 22, but the sealing member 24 may be formed on the upper surface of the bottom plate 20. *

FIG. 3 is an enlarged view of the periphery of the bottom plate pressing portion 22 including the sealing member 24 and the bottom plate 20. As shown in FIG. 3, the bottom plate 20 is pushed up from below by the support rod 30, and is received by the bottom plate pressing portion 22 through the sealing member 24. The distortion caused by pushing up the support rod 30 is absorbed by the sealing member 24, thereby closing the gap between the bottom plate pressing portion 22 and the bottom plate 20. The sealing member 24 is preferably a cushioning elastic member (for example, rubber, resin, elastomer). *

Further, the sealing member 24 may not be formed as a member independent of the bottom plate pressing portion 22 as long as the gap between the bottom plate pressing portion 22 and the bottom plate 20 can be closed. For example, the sealing member 24 may exist as a coating member coated so as to cover at least the bottom surface of the bottom plate pressing portion 22. Further, the sealing member 24 may exist as a coating portion that covers at least the upper surface of the peripheral edge of the bottom plate 20. The peripheral portion of the bottom plate 20 is a region located below the bottom plate pressing portion 22. *

FIG. 4A is an enlarged perspective view of a part of the bottom plate pressing portion 22. The bottom plate pressing portion 22 extends from the inner wall 10a of the cassette body 10 toward the center. The bottom plate pressing portion 22 is made of, for example, a metal, and may be made of the same material as a part of the material of the cassette body 10 in one example. In the example shown in FIG. 4A, the width W1 of the bottom plate pressing portion 22 is about 50 mm to 60 mm, and the thickness T1 of the bottom plate pressing portion 22 is about 2 mm to 3 mm. *

A sealing member 24 is formed on a part of the lower surface of the bottom plate pressing portion 22. In this example, the sealing member 24 is a strip-like elongated linear member. For example, the sealing member 24 has a rectangular cross section. The width W2 of the sealing member 24 is about 20 mm, and the thickness T2 of the sealing member 24 is about 5 mm. The cross section of the sealing member 24 is not limited to a rectangle, and may be substantially semicircular (semicircular, semielliptical, semielliptical) as long as the gap between the bottom plate pressing portion 22 and the bottom plate 20 can be closed. It may be trapezoidal. *

In the illustrated example, the sealing member 24 is formed on the inner side of the center of the lower surface of the bottom plate pressing portion 22 (a half of the width W1). It may be formed at the center position, or may be formed on the outer side (inner wall 10a side) than the center position of the bottom plate pressing portion 22. It is also possible to form the sealing member 24 on the entire lower surface of the bottom plate pressing portion 22 (or almost the entire surface). *

The bottom plate pressing portion 22 of the present embodiment is formed so as to go around the inner wall 10 a of the cassette body 10. In this example, the strip-shaped elongate sealing member 24 is also formed so as to make one round. Therefore, as shown in FIG. 4B, when the bottom plate 20 is pressed against the lower surface of the bottom plate pressing portion 22 via the sealing member 24, the bottom opening 14 can be closed by the bottom plate 20, and in addition, the sealing member 24 can close the gap between the bottom plate pressing portion 22 and the bottom plate 20. Thus, the structure of this embodiment can block the inside of the cassette body 10 and the outside air (air). *

In the example shown in FIG. 4B, the bottom plate 20 is made of metal (for example, aluminum). In one example, the material of the part (and / or the bottom plate pressing portion 22) of the cassette body 10 is used. You may be comprised from the same material. The thickness T3 of the bottom plate 20 is, for example, about 2 mm to 3 mm. In addition, when the deflection | deviation which generate | occur | produces in the baseplate 20 is large, a reinforcing material (for example, L-shaped angle) may be provided in at least one part (for example, parts other than the peripheral area | region of the baseplate 20) of the baseplate 20. Is possible. *

In the configuration of the present embodiment, the bottom plate 20 is pressed against the sealing member 24 of the bottom plate pressing portion 22, but the bottom plate 20 and the sealing member 24 are not integrated with each other by bonding or the like. Specifically, the bottom plate 20 is fixed by a force acting below the bottom plate pressing portion 22 based on the weight of the cassette body portion 10 and a force acting above the replacement rod 30 extending from the ground (mounting base 32) side. Only. Therefore, when the cassette body 10 is lifted upward, the bottom plate 20 remains placed on the support rod 30. Therefore, the bottom opening 14 of the cassette body 10 is easily opened. become.

The cassette body 10 of the present embodiment has a box shape. For example, the side part of the cassette body 10 can be made with a frame structure, and the surface part of the cassette body 10 can be made with a panel structure. In that case, the frame structure portion may be made of metal (for example, aluminum, iron, stainless steel, etc.), and the panel structure portion may be made of a resin plate, a metal plate (for example, aluminum plate), or the like. *

In the configuration example shown in FIGS. 1 and 2, the skeleton of the cassette body 10 has a frame structure, and the side surface (left surface / right surface) 11A and the upper surface 11B of the cassette body 10 have a panel structure (for example, Metal plate). In this example, the cassette opening 12 is formed on the front surface of the cassette body 10, but may be formed on the rear surface in addition to the front surface. When the cassette opening 12 is formed on both the front surface and the rear surface of the cassette body 10, the substrate 40 can be taken in and out from both the front and rear. *

Note that it is not always necessary to provide a panel on all of the side surfaces of the cassette body 10 other than the cassette opening 12. For example, even in a configuration in which the bottom plate 20 is provided in a form in which there is no panel on the side surface of the cassette body 10, air (dust) rolls up when the cassette transport vehicle carrying the cassette body 10 travels. The effect which suppresses is acquired. *

The cassette opening 12 formed on the side surface of the cassette body 10 can be provided with a closing plate for closing the opening. As long as the cassette opening 12 can be closed, the closing plate can take various configurations. In addition, as described above, even when the closing plate is not provided, the effect obtained by providing the bottom plate 20 of the present embodiment can be obtained. *

Next, the step of removing the bottom plate 20 from the wire cassette 100 of the present embodiment and opening the bottom opening 14 will be described with reference to FIG. *

First, the cassette body 10 is raised from the state shown in FIG. Since the bottom plate 20 is not integrated with the cassette body 10 (particularly, the bottom plate holding portion 22 and the sealing member 24), the bottom plate 20 is detached from the bottom opening 14 as shown in FIG. The part 14 changes from the sealed state to the open state. The cassette body 10 can be raised by, for example, a separately installed lifting device. *

Next, the step of transporting the wire cassette 100 while leaving the bottom plate 20 substantially in the bottom opening 14 of the cassette body 10 will be described with reference to FIGS. 6 and 7. *

First, as shown in FIG. 6, a lifting arm 35 that lifts and lowers the cassette body 10 is inserted into a space 37 below the bottom plate 20 and between the support rods 30. In FIG. 1, an arm insertion opening 31 for inserting the elevating arm 35 is formed in the lower part of the cassette body 10. Depending on the configuration of the wire cassette 100, such an arm insertion opening 31 is formed. Can be provided as appropriate. *

Next, as shown in FIG. 7, when the elevating arm 35 is raised while supporting the lower end 15 of the cassette body 10 with the elevating arm 35, the bottom plate 20 moves away from the holding rod 30, and the bottom plate 20 is opened to the bottom opening. The cassette body 10 can be raised with 14 being substantially closed. In addition, when the lifting arm 35 is configured to be movable in the horizontal direction (front / rear / left / right), the cassette body 10 is moved horizontally in the state where the lifting arm 35 is substantially closed by the bottom plate 20. Can also be transported. *

If the cassette body 10 lifted up by the elevating arm 35 is placed on the table 32 on which the replacement rod 30 is formed, the cassette body 10 can be stored in a state of being closed by the bottom plate 20. The structure or number of the raising / lowering arm 35 should just be what can raise / lower or convey the cassette main-body part 10 stably. The space 37 between the support rods 30 (the space between the support rods 30) may be wide or narrow as long as there is a space in which the lifting arm 35 can be inserted. *

Next, the step of carrying out the substrate 40 from the wire cassette 100 of this embodiment will be described with reference to FIGS. *

As shown in FIG. 8, the cassette body 10 is moved downward with the bottom opening 14 opened, and the roller conveyor 61 is inserted into the bottom opening 14. The cassette body 10 can be fixed and the roller conveyor 61 can be moved upward to be inserted into the bottom opening 14. In the present embodiment, the roller conveyor 61 is exemplified as the substrate transfer device. However, the present invention is not limited to this, and other devices (for example, an air levitation conveyor) may be used. *

Next, as shown in FIG. 9, the roller conveyor 61 is raised and passed between the wires 60, the roller conveyor 61 and the substrate 40 are brought into contact with each other, and then the substrate 40 is lifted by the roller conveyor 61. Next, in a state where the substrate 40 and the wire 60 are separated, the roller portion of the roller conveyor 61 is rotated to move the substrate 40 in the horizontal direction. As a result, the substrate 40 is paid out from the cassette opening 12 and moves onto the transfer device 64 located outside the wire cassette 100. Thereafter, the substrate 40 is subjected to a necessary process or stored in a necessary place. *

When the payout of the lowermost substrate 40 is completed, the payout of the upper substrate 40 is then executed. Specifically, the roller conveyor 61 is further raised, passed between the wires 60, the roller portion of the roller conveyor 61 is rotated, and the substrate 40 (second substrate 40 from the bottom) is removed from the cassette opening 12. Pay out. This process is sequentially repeated to complete the dispensing of the substrates 40 at all stages. *

According to the wire cassette 100 of the present embodiment, the bottom opening 14 formed on the bottom surface of the cassette body 10, the bottom plate 20 that closes the bottom opening 14, the replacement rod 30 that supports the bottom surface of the bottom plate 20, and the bottom plate 20. Since the bottom plate pressing portion 22 and the sealing member 24 for pressing the upper surface of the peripheral edge portion of the wire cassette structure are provided, a wire cassette structure capable of easily sealing and opening the bottom surface opening portion 14 can be realized.

If the bottom opening 14 can be sealed and opened with such a simple structure, the bottom opening 14 is sealed with the bottom plate 20 as needed, even if the wire cassette 100 is not always placed in a clean room. The wire cassette 100 can be moved out of the clean room. Thereby, it becomes easy to transport and store the substrate 40 outside the clean room, and it is possible to greatly reduce the equipment cost of a factory (for example, a liquid crystal panel manufacturing factory) for the clean room. *

Here, the wire cassette 100 of this embodiment and the other wire cassette (comparative example) are compared and examined. In addition to the configuration in which the bottom opening 14 is closed by the bottom plate 20 in the present embodiment, the following can also be considered. *

FIG. 10 shows a wire cassette 1100 (comparative example) including a bottom cover 120 having a sliding structure including a sliding portion 125. In the wire cassette 1100 shown in FIG. 10, the cassette opening 112 in which the substrate 40 is taken in and out is covered with the front cover 115. *

A slide structure (sliding portion) 125 is provided in the bottom opening 114 of the cassette body 110. The bottom cover 120 that closes the bottom opening 114 performs a horizontal operation (arrow 54) while sliding on the slide structure 125. In this case, the slide structure 125 becomes a dust generation source in the vicinity of the inside of the cassette body 110 in which the substrate 40 is stored. Therefore, this is not suitable for use in a clean room. *

FIG. 11 shows a wire cassette 1200 in which the bottom cover 121 has a door opening / closing structure 127. In the case of the wire cassette 1100 having the door opening / closing structure 127 shown in FIG. 11, it is necessary to secure a rotation space (56) for opening and closing the bottom cover 121, and therefore a cassette that requires a large occupation area. End up. Therefore, with this configuration, the wire cassette does not have an opening / closing structure with a small occupation area. *

As described above, as compared with the wire cassette 100 of the present embodiment, both the

wire cassettes

1100 and 1200 have drawbacks, and it is difficult to solve the drawbacks due to the structure. On the other hand, the wire cassette 100 of this embodiment can avoid such a fault. Further, in the

wire cassettes

1100 and 1200 of the comparative example, an original mechanism (125, 127) must be attached to open and close the bottom cover (120, 121), whereas in the wire cassette 100 of the present embodiment, Even without attaching such a unique mechanism, the bottom opening 14 of the cassette body 10 can be easily opened and closed by the raising and lowering operation of the cassette body 10. Also in that respect, the configuration of the present embodiment has great technical value. *

Furthermore, in the wire cassette 100 of the present embodiment, a structure with a small occupied space can be realized in opening and closing the bottom opening 14. That is, in the case of the wire cassette 1100 shown in FIG. 10, an occupied space (a space in the horizontal direction 54) for moving the bottom cover 120 is required. In the case of the wire cassette 1200 shown in FIG. 11, a large space is required below the cassette body 110 to move the bottom cover 121, which also hinders the operation of the roller conveyor. *

On the other hand, according to the wire cassette 100 of the present embodiment, the bottom plate 20 of the wire cassette 100 is either in a state of being placed on the support rod 30 or in a state of closing the bottom opening 14. The periphery of the bottom surface of the wire cassette 100 can be simplified. Therefore, according to the configuration of the present embodiment, a structure with a small occupied space can be realized. *

As mentioned above, although this invention was demonstrated by suitable embodiment, such description is not a limitation matter and of course various modifications are possible. *

For example, the bottom opening 14 of the cassette body 10 is preferably completely closed by the bottom plate pressing portion 22, the sealing member 24, and the bottom plate 20, but there is a portion that is not slightly closed. Even so, if it has a structure in which outside air (air) does not easily enter the inside of the cassette body 10, it alone has technical value. Further, even if the sealing member 24 is removed and the bottom plate pressing portion 22 and the bottom plate 20 are used to block the bottom surface opening portion 14, since the intrusion of outside air is suppressed, there is sufficient technical significance. Furthermore, even if the bottom plate pressing portion 22 does not press the entire periphery of the peripheral portion of the bottom plate 20, the bottom plate 20 can suppress the intrusion of outside air by pressing the upper surface of the peripheral portion of the bottom plate 20, for example, at a plurality of locations. *

Further, the bottom plate pressing portion 22 extends from the inner wall of the cassette body portion 10, but the bottom plate pressing portion 22 does not necessarily have to be in direct contact with the inner wall of the cassette body portion 10. That is, the bottom plate pressing portion 22 may be provided on the inner wall of the cassette main body portion 10 via another member between the inner wall of the cassette main body portion 10 and a part of the bottom plate pressing portion 22. Moreover, when the material (for example, resin) with a high friction degree is used for at least the surface of the sealing member 24, the effect which suppresses that the baseplate 20 slip | deviates with respect to acceleration of conveyance of a wire cassette 100 and a vibration is acquired. You can also. Furthermore, although this embodiment demonstrated the structural example of the wire cassette which can accommodate the board | substrate 40 with a some wire, the technique of this embodiment is not restricted to a wire cassette, The board | substrate which accommodates the board | substrate 40 by means other than a wire The present invention can be applied to a storage cassette (for example, a storage cassette in a shelf-hanging form).

In addition, the support rod 30 that supports the lower surface of the bottom plate 20 is not limited to the configuration arranged on the mounting table 32 shown in FIG. For example, as shown in FIG. 12, it is also possible to arrange a replacement rod 30a on the upper surface of the lifting arm 35 and to support the bottom plate 20 with the replacement rod 30a. In the case of the configuration shown in FIG. 12, the bottom surface 20 can be brought into contact with the sealing member 24 by the holding rod 30 a while supporting the cassette body 10 with the lifting arm 35, thereby closing the bottom opening 14. Further, the portion that supports the lower surface of the bottom plate 20 can be constructed by the replacement rod 30a of the lifting arm 35 by omitting the replacement rod 30 arranged on the mounting base 32. Furthermore, the raising structure for providing the recess 33 under the cassette body 10 is not limited to the structure of the mounting table 32 having the recess 33 shown in FIG. 2, and a height for providing the recess 33 is ensured. You may make it the structure which provided the member in the cassette main-body part 10 side.

ADVANTAGE OF THE INVENTION According to this invention, the cassette structure which can seal and open | release a bottom face simply can be provided.

10 Cassette body

10a inner wall

12 Cassette opening

14 Bottom opening

20 Bottom plate

22 Bottom plate holder

24 Sealing member

30 refill sticks

31 Arm insertion opening

32 table

35 Lifting arm

40 substrates

60 wires

61 Roller conveyor

64 Conveyor

100 wire cassette

1100, 1200 wire cassette

Claims

A cassette for storing substrates,

A cassette main body in which a substrate is arranged;

A cassette opening formed on a side surface of the cassette main body, and the substrate is taken in and out;

A bottom opening formed on the bottom of the cassette body,

A bottom plate for closing the bottom opening;

A stick that supports the bottom surface of the bottom plate;

A bottom plate pressing portion for pressing an upper surface of a peripheral portion of the bottom plate supported by the refilling rod;

A cassette.
The cassette according to claim 1, wherein the replacement rod is disposed on a pedestal located below the bottom opening.
The cassette according to claim 1 or 2, wherein a sealing member that seals a gap between the bottom plate pressing portion and the bottom plate is formed.
The cassette according to claim 3, wherein the sealing member is an elastic member formed on a lower surface of the bottom surface pressing portion.
The cassette according to any one of claims 1 to 4, wherein the bottom surface pressing portion is formed so as to go around the inner wall of the cassette main body portion.
A plurality of the sticks are provided,

The cassette according to any one of claims 1 to 5, wherein an elevating arm for raising and lowering the cassette main body portion is inserted in a space between the replacement rods in a lower region of the bottom plate. .
A plurality of wires are arranged inside the cassette body,

The substrate is a glass substrate;

The glass substrate is supported by the wire,

The cassette according to any one of claims 1 to 6, wherein a substrate transfer device for moving the glass substrate is inserted into the bottom opening.