JP2007258562A - Storage case for process tool - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a storage case for a process tool capable of coping with a production control method, such as a many-kind small quantity production, by eliminating degradation in transport efficiency or waste. <P>SOLUTION: Process tools are arrayed and stored which splittably comprises a lower structural body 1, upper structural body 2, and middle structural body 3 for allowed attaching and detaching, with at least the lower structural body 1 and upper structural body 2, detachably connected together with a semiconductor wafer adhesively held between them. The lower structural body 1 consists of a bottom plate 5, a pair of sidewalls 10 provided on both sides of the bottom plate 5, and a support plate 13 which is provided to the pair of sidewalls 10 for supporting the processing tool. The upper structural body 2 consists of a top plate 14, the pair of sidewalls 10 provided to both sides of the top plate 14 and connected detachably to the sidewall 10 of the lower structural body 1, and a support plate 13 which is provided to the pair of sidewalls 10 for supporting the processing tool. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a processing jig storage case for storing a processing jig for holding a semiconductor wafer.

A conventional storage case for storing a processing jig for a 300 mm diameter semiconductor wafer is not shown, but a front open box type container main body for storing the processing jig, and a lid for opening and closing the front surface of the container main body. It is configured with. On the inner surfaces of the side walls of the container body, a plurality of support pieces for horizontally supporting the peripheral edge of the stored processing jig are arranged in parallel in the vertical direction (see Patent Documents 1, 2, and 3).
Such storage cases are standardized in 13- or 25-stage types capable of storing 13 or 25 processing jigs according to the international SEMI standard for standardization of the semiconductor industry.
JP-A-8-80989 JP 2005-508274 Gazette JP 2000-277603 A

  Conventional storage cases are configured as described above, and 13-stage or 25-stage types that can store 13 or 25 processing jigs are standardized. There is a problem that there is a lot of waste.

  Explaining this issue, many of the end users in recent years have produced and transported the necessary items in small lots as much as necessary when necessary, in order to meet the demands of the market and the times for high-mix low-volume production. The production management method (Kanban method, etc.) that suppresses waste is adopted, but in order to make this method effective, the necessary number of storage cases is required in addition to formulating sales forecasts and production quantity plans without error. These processing jigs need to be stored properly without waste.

  However, since the conventional storage case is uniformly configured to store at least 13 processing jigs, for example, only 3 processing jigs are stored in the storage case instead of 13 sheets and shipped. If this is the case, the shipping unit will be improper, so the load will be applied to the transport device and the transport efficiency will be significantly reduced, or the wasteful storage capacity will increase, resulting in production continuity, repeatability, and cycle time. There is a lot of risk of obstructing compliance.

  The present invention has been made in view of the above, and it is an object of the present invention to provide a storage case for a processing jig that can cope with a production management system such as high-mix low-volume production without reducing the efficiency and waste of conveyance.

In the present invention, in order to solve the above-mentioned problem, the lower structure and the upper structure are detachably connected, and a processing jig for holding the semiconductor wafer between them is housed,
The lower structure includes a bottom plate and a pair of side walls provided on both sides of the bottom plate, and the upper structure is provided on each of the top plate and both side portions of the top plate. And a pair of side walls that are detachably connected.
The lower structure includes a support provided on the pair of side walls to support the processing jig, and the upper structure includes a support provided on the pair of side walls to support the processing jig. .

In addition, a middle structure that is detachably interposed between the lower structure and the upper structure is provided, and the middle structure is configured such that the side wall of the lower structure and the side wall of the upper structure are detachable. It is preferable to include a pair of side walls to be connected and a support body provided on the pair of side walls to support the processing jig.
In addition, a clip body that sandwiches at least the lower structure and the upper structure among the lower structure, the upper structure, and the middle structure can be provided.

Further, among the lower structure, the upper structure, and the middle structure, at least the sidewalls of the lower structure and the upper structure are supported on the rotation shaft, and the rotation shaft is prevented from falling off for the processing jig accommodated therein. A stopper can be provided, and the drop-off prevention stopper can be rotated between the interference position with respect to the processing jig and the non-interference position based on the rotation of the rotating shaft.
Further, at least one of the rotation shafts of the lower structure and the upper structure is formed with a recess, and the other is formed with a protrusion. The rotation shaft of the structure can be connected.

Moreover, it is preferable to provide a power transmission mechanism that rotates the drop-off prevention stopper between the interference position and the non-interference position with respect to the processing jig.
The power transmission mechanism is attached to a prime mover that can slide in the longitudinal direction of the top plate of the upper structure, a link that is rotatably connected to the prime mover, and a rotation shaft of the link and the upper structure. It is good to include a follower.

The power transmission mechanism is provided on a rotatable first gear supported on the top plate of the upper structure, a rack body meshed with the first gear, and each rotation shaft of the upper structure. A second gear meshing with the rack body can be included.
The processing jig includes a hollow frame that accommodates the semiconductor wafer, an elastic adhesion layer that is attached to the frame and covers the hollow portion, and detachably holds the semiconductor wafer accommodated in the hollow portion of the frame; It is good to include.

Further, the support body of the lower structure body, the upper structure body, and / or the middle structure body can be used as a support plate constructed between a pair of side walls.
Furthermore, the support body of the lower structure body, the upper structure body, and / or the middle structure body can be formed as a plurality of support pieces that protrude from the facing surfaces of the pair of side walls and face each other at intervals.
Furthermore, it is also possible to divide the pair of side walls and the support of the middle structure.

  Here, the semiconductor wafer in the claims does not particularly ask whether the diameter is 200 mm type, 300 mm type, 450 mm type or the like, nor does it ask whether dicing is present or not. The lower structure, the upper structure, and the middle structure are not particularly required to be transparent, opaque, or translucent.

  The middle structure may be singular or plural. The power transmission mechanism may be a mechanism combining a drum and a rope, a slider crank mechanism, a piston mechanism, or the like as long as it can transmit power to a rotary shaft provided with a stopper for preventing dropout. Furthermore, the storage case for a processing jig according to the present invention may be transported between processes in a factory, or may be transported between a plurality of factories.

  According to the present invention, when a predetermined number of processing jigs are to be stored in a processing jig storage case and shipped, etc., the lower structure, the upper structure, and a plurality of necessary middle structures are stacked. When the processing jig storage case is assembled by being detachably connected, only a predetermined number of processing jigs can be stored in the processing jig storage case, and can be transported, transported, shipped, and the like.

According to the present invention, there is an effect that it is possible to sufficiently cope with a production management method such as multi-product and small-quantity production while omitting a decrease in transport efficiency and waste.
Further, if the necessary number of middle structures connected to be detachably interposed between the lower structure and the upper structure are provided, the lower structure and the upper structure are stacked to form a storage case for the processing jig. As compared with the case of assembling, the storage amount of the processing jig can be increased, and a processing jig storage case of, for example, a 5-stage, 13-stage, or 25-stage type can be obtained.

  Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. A storage case for a processing jig in the present embodiment includes a lower structure 1, an upper structure 2, as shown in FIGS. 1 to 7. In addition, the necessary middle structure 3 can be attached and detached so as to be freely detachable. Among these lower structure 1, upper structure 2, and middle structure 3, at least the lower structure 1 and the upper structure 2 are moved up and down. A required number of processing jigs 20 that hold the semiconductor wafer W between them are arranged and housed in a detachable connection in the direction.

  Of the lower structure 1, the upper structure 2, and the middle structure 3, at least the lower structure 1 and the upper structure 2 are respectively sandwiched by elastic clip pieces 4 having a substantially inverted U shape from the left and right sides. In this way, they are laminated and fixed so as not to be separated (see FIG. 1).

  The lower structure 1 includes a rigid bottom plate 5 that supports and mounts the processing jig 20, a pair of left and right side walls 10 that are vertically formed on both side portions of the bottom plate 5, and the opposing inner surfaces of the pair of side walls 10. And a support plate 13 for selectively supporting and mounting the processing jig 20 horizontally. The bottom plate 5, the pair of side walls 10, and the support plate 13 of the lower structure 1 are formed using predetermined materials such as polypropylene, polyethylene, polycarbonate, polybutylene terephthalate, and the like. Accordingly, a reinforcing agent such as glass fiber, carbon fiber, or calcium carbonate is blended.

  The bottom plate 5 is formed in a flat planar rectangle corresponding to the size of the processing jig 20, a plurality of kinematic couplings 6 are disposed on the back surface, and a recess is formed on the surface on which the processing jig 20 is mounted. 8 and a pair of left and right positioning stoppers 9 are disposed. The plurality of kinematic couplings 6 are mounted at predetermined intervals so as to draw a triangle or a substantially Y-shape in plan view, and each kinematic coupling 6 has a planar substantially oval or elliptical shape with a V groove 7. And the like, and functions to position the processing jig storage case by fitting from above to a plurality of positioning pins protruding from the opener or the semiconductor processing apparatus.

  The concave portion 8 is formed in a shallow and wide recess so as to exhibit a substantially U-shaped cross section on most of the surface of the bottom plate 5 so as to define a working space, and interferes with the hand of the transfer robot that inserts and removes the processing jig 20. It works to avoid. The pair of positioning stoppers 9 are mounted on the left and right sides of the rear surface of the bottom plate 5. Each positioning stopper 9 is formed in a block shape and is adjacent to the inner surface of the side wall 10. It functions to control displacement and dropout by contacting the rear edge of the peripheral edge.

  The pair of side walls 10 are formed to have the same size and shape, and are aligned so that the upper and lower portions have the same height. Each side wall 10 is formed in a rectangular shape corresponding to the length in the front-rear direction of the bottom plate 5, and the flat lower lower surface protrudes at the same height as or lower than the kinematic coupling 6. A cutout 11 that engages with the bent end of the clip piece 4 is cut out in the part. The notch 11 is notched to such a depth that the outer surface of the bent end is aligned with the lower surface of the side wall 10 when the clip piece 4 is sandwiched (see FIG. 1). A plurality of alignment pins 12 are erected on the flat upper upper surface of each side wall 10 at a predetermined interval.

  The support plate 13 is basically formed in a flat planar rectangle corresponding to the size of the processing jig 20, and the center of the front and rear portions is curved and projected in a substantially semicircular plane, and a pair of left and right sides are projected on the surface. A positioning stopper 9 is provided. The pair of positioning stoppers 9 are mounted on the left and right sides of the rear surface of the support plate 13. Each positioning stopper 9 is formed in a block shape and is adjacent to the inner surface of the side wall 10. It contacts the rear edge of the peripheral edge to regulate displacement and dropout.

  The upper structure 2 is formed by hanging from a flat rectangular top plate 14 facing the surface of the bottom plate 5 via a support plate 13 and both sides of the top plate 14, and on the side wall 10 of the lower structure 1. And a pair of left and right side walls 10 that are detachably connected to each other, and a support plate 13 that is selectively installed between the opposing inner surfaces of the pair of side walls 10 to support and mount the processing jig 20 horizontally. The The top plate 14, the pair of side walls 10, and the support plate 13 of the upper structure 2 are formed using the same material as that of the lower structure 1.

  The top plate 14 is formed in a flat planar rectangle corresponding to the bottom plate 5 of the lower structure 1, and a handling flange 15 is detachably attached to the center of the surface, and this handling flange 15 is a transfer robot (not shown). As a result, the processing jig storage case is transported.

  The pair of side walls 10 are formed to have the same size and shape, and are aligned so that the upper and lower portions have the same height. Each side wall 10 is formed in a rectangular shape corresponding to the length of the top plate 14 in the front-rear direction, and alignment holes 16 that engage with the alignment pins 12 of the lower structure 1 are formed at predetermined intervals on the flat lower lower surface. Perforated side by side. A cutout 11 that engages with the bent end portion of the clip piece 4 is cut out at a part of the upper upper surface of each side wall 10, and the cutout 11 has an outer surface of the bent end portion when the clip piece 4 is sandwiched. It is notched to a depth that matches the top surface of the side wall 10 (see FIG. 1).

  Similar to the support plate 13 of the lower structure 1, the support plate 13 is basically formed in a flat planar rectangle corresponding to the size of the processing jig 20, and the center of the front and rear portions is curved into a substantially semicircular plane. A pair of right and left positioning stoppers 9 similar to the positioning stopper 9 are provided on the surface.

  As shown in FIGS. 2 and 3, the middle structure 3 includes a pair of left and right side walls 10 that detachably connect the side wall 10 of the lower structure 1 and the side wall 10 of the upper structure 2, and the pair of side walls 10. A plurality of support plates 13 that are arranged side by side between the opposing inner surfaces of the side wall 10 and support and mount the processing jig 20 are provided, and a necessary number is interposed between the lower structure 1 and the upper structure 2. Connected. The pair of side walls 10 and the support plate 13 of the middle structure 3 are formed using the same material as the lower structure 1 and the upper structure 2.

  The pair of side walls 10 are formed to have the same size and shape, and are aligned so that the upper and lower portions have the same height. Each side wall 10 is formed in a rectangular shape corresponding to the length in the front-rear direction of the bottom plate 5 and the top plate 14, and an alignment hole 16 that fits with an alignment pin 12 such as the lower structure 1 is formed on the flat lower lower surface. Are perforated at predetermined intervals, and a plurality of alignment pins 12 that fit into the alignment holes 16 of the upper structure 2 and the like are erected at predetermined intervals on the flat upper upper surface. . Each support plate 13 is formed in the same manner as the support plate 13 of the lower structure 1 or the upper structure 2.

  The semiconductor wafer W is made of, for example, a round silicon wafer sliced to a diameter of 300 mm (12 inches), a circuit pattern is drawn on the front surface, and the back surface is back-grinded so that the thickness is reduced to 100 μm or less. (See FIG. 6). A positioning orientation flat and a semicircular notch are selectively formed on the peripheral edge of the semiconductor wafer W.

  As shown in FIGS. 5 to 7, the processing jig 20 has a hollow frame 21 that accommodates the semiconductor wafer W, and is attached to the back surface of the frame 21 to cover the hollow portion. And an elastic adhesion layer 28 that detachably holds and mounts the semiconductor wafer W accommodated therein, and is used in a semiconductor dicing process.

  The frame 21 is formed in a ring shape larger than the semiconductor wafer W, and is mounted on the bottom plate 5 and the support plate 13. The material of the frame 21 is not particularly limited, and examples thereof include PPS, PA, PEI, PAI, PEEK, PES, LCP, and PBT which are excellent in mechanical strength. These materials are blended with fillers such as glass fiber, carbon fiber, or calcium carbonate to ensure strength and rigidity as necessary.

  The frame 21 is formed with notches 22 for positioning on both sides of the front portion of the outer peripheral surface thereof, and a horizontally long storage hole 23 is selectively recessed in the center of the rear portion of the surface. The RF tag 24 for constructing the RFID system (mobile object identification system) is selectively attached.

  As shown in FIG. 7, the RFID system has an RF tag 24 that moves with the frame 21 when an internal memory is accessed by radio waves, an antenna unit 25 that transmits and receives radio waves and power between the RF tag 24, and an RF tag. A reader / writer 26 that controls communication with the computer 24 and a computer 27 that controls the reader / writer 26 are provided. The antenna unit 25 and the reader / writer 26 are configured separately, but are integrated as necessary. In addition, various controllers are used instead of the computer 27 as long as the control of the reader / writer 26 is not hindered.

  The adhesion layer 28 is formed in a flexible thin disk that can be deformed using a predetermined material, and is adhered and held on the back surface of the frame 21, and the semiconductor is formed on the adhesion surface exposed in the hollow portion at the center of the frame 21. It functions to hold the back surface of the wafer W in a detachable manner. The material of the adhesion layer 28 is not particularly limited. For example, PP, PE, ethylene propylene copolymer, ethylene vinyl acetate copolymer, ethylene-methyl acrylate copolymer having a thickness of 20 to 300 μm. , Vinyl chloride, or PET film. In addition, as the pressure-sensitive adhesive, a pressure-sensitive adhesive resin such as a polymer made of acrylic acid, methacrylic acid or various ester derivatives of these acids, or an acrylic resin made of a copolymer is used.

  In the above, for example, when three processing jigs 20 are stored and shipped in a processing jig storage case, the lower structure 1 and the upper structure 2 are stacked in the vertical direction, and the plurality of positions are aligned. If the pin 12 and the alignment hole 16 are fitted to each other, and both side portions of the lower structure 1 and the upper structure 2 are sandwiched by the clip pieces 4, respectively, the processing jig for three sheets opened at the front and rear is provided. The storage case can be assembled, and the three processing jigs 20 that can handle small-lot production can be stored and shipped quickly (see FIG. 1).

  For example, when five processing jigs 20 are stored in a processing jig storage case and shipped, the lower structure 1, the upper structure 2, and the middle structure 3 are stacked in the vertical direction. If the plurality of alignment pins 12 and the alignment holes 16 are fitted together, five processing jig storage cases opened front and rear are assembled, and the five processing jigs 20 are stored and shipped quickly. (See FIG. 2).

  For example, when 13 processing jigs 20 are stored in a processing jig storage case and shipped, the lower structure 1, the upper structure 2, and a plurality of middle structures 3 are stacked in multiple stages. When the plurality of alignment pins 12 and the alignment holes 16 are fitted together, 13 processing jig storage cases opened in front and rear are assembled, and 13 processing jigs 20 are stored and shipped quickly. (See FIG. 3).

  Further, for example, when 25 processing jigs 20 are stored in a processing jig storage case and shipped, the lower structure 1, the upper structure 2, and a plurality of middle structures 3 are stacked in multiple stages. When the plurality of alignment pins 12 and the alignment holes 16 are fitted, a front and rear open 25 processing jig storage case is assembled, and the 25 processing jigs 20 are stored and shipped quickly. can do.

  On the other hand, for example, when one processing jig 20 is stored in a processing jig storage case and shipped, the support plates 13 of the lower structure 1 and the upper structure 2 are removed, and these lower structures are removed. 1 and the upper structure 2 are laminated and the plurality of alignment pins 12 and the alignment holes 16 are fitted to each other, a front and rear opening storage case for one processing jig is assembled. Only one processing jig 20 can be accommodated on the surface and shipped quickly (see FIG. 4).

  According to the above configuration, a processing jig storage case of an appropriate shipment unit can be freely assembled according to the number of semiconductor wafers W and processing jigs 20, so that a load is applied to the transfer device and the transfer efficiency is lowered. And an increase in wasteful storage capacity can be surely prevented, and there is no possibility of hindering the continuity of production, repeatability, and compliance with cycle time. Therefore, waste can be extremely effectively suppressed in response to the demands of the market and the times of high-mix low-volume production.

  In addition, since the production management system such as the Kanban system can be made efficient, the inventory quantity can be reduced to improve the quality and prevent the delay of the process. Moreover, since the lower structure 1, the upper structure 2, and the middle structure 3 are simply configured, cost reduction can be greatly expected. In addition, if the lower structure 1 and the upper structure 2 are configured in conformity with the upper and lower portions of the existing semiconductor wafer storage container, the existing peripheral device can be used without any special processing. become.

  Further, since the adhesion layer 28 of the processing jig 20 is mounted on the surface of the bottom plate 5 and the support plate 13 without any gap, the adhesion layer 28 vibrates up and down when the processing jig 20 is transported or transported, and the semiconductor wafer W And will not adversely affect the chip. Further, if the support plates 13 of the lower structure 1 and the upper structure 2 are respectively removed and the handling flange 15 of the upper structure 2 is removed, the processing jig storage case for storing one processing jig 20 is moved vertically. In addition, since it can be easily and multi-layered (see FIG. 4), the handling convenience can be greatly improved.

  Next, FIGS. 8 to 10 show a second embodiment of the present invention. In this case, a support that is a support for the lower structure 1, the upper structure 2, and the necessary middle structure 3 is shown. The plate 13 is omitted, and a support piece 17 is used as a support instead.

  As shown in the figure, the support in the present embodiment protrudes inward from the opposed inner surfaces of the pair of side walls 10 of the lower structure 1, the upper structure 2, and the middle structure 3, and is spaced apart from each other. It is formed from a pair of left and right support pieces 17 facing each other. The other parts are the same as those in the above embodiment, and the description thereof is omitted.

  In this embodiment, the same effect as the above embodiment can be expected, and the support is not the support plate 13 having a large occupied area, but the rail-shaped support piece 17 extending in the front-rear direction. It is clear that can be greatly reduced. Further, interference with the hand of the transfer robot that inserts and removes the processing jig 20 can be more easily realized.

  Next, FIGS. 11 to 15 show a third embodiment of the present invention. In this case, each of the side walls 10 of the lower structure 1, the upper structure 2, and the necessary middle structure 3 is provided. The rotary shaft 30 is rotatably supported, and a drop-off prevention stopper 33 for the stored processing jig 20 is formed on each rotary shaft 30, and power is transmitted to the rotary shaft 30 by a power transmission mechanism 37 to prevent the drop-off. The stopper 33 is swung between an interference position 34 and a non-interference position 35 with respect to the processing jig 20.

  The rotating shafts 30 of the lower structure 1, the upper structure 2, and the middle structure 3 are connected to the upper and lower rotating shafts 30 adjacent to each other when the processing jig storage case is assembled. Each rotary shaft 30 has a concave portion 31 formed on the upper upper end surface thereof, and a convex portion 32 formed on the lower lower end surface thereof so as to protrude vertically through a through hole vertically drilled in the front portion of the side wall 10. The recessed portion 31 or the protruding portion 32 exposed from the insertion shaft is detachably directly fitted and connected to the protruding portion 32 or the recessed portion 31 of another adjacent rotating shaft 30 (FIG. 11, (See FIG. 12).

  The drop-off prevention stopper 33 is formed in a substantially inverted U-shape, and both free ends thereof are integrally formed on the peripheral surface of the rotary shaft 30, and come into contact with interference positions 34 on both sides of the peripheral edge of the processing jig 20. It fits and retreats in the storage groove 36 of the side wall 10 which is the non-interference position 35 separated from both sides of the peripheral portion of the tool 20 (see FIG. 11). The storage groove 36 is curved and cut out from the front part of the side wall 10 to the front part of the support piece 17.

  As shown in FIGS. 13 to 15, the power transmission mechanism 37 includes an operation lever 38 that can slide on the top plate 14 of the upper structure 2, and a plurality of links 41 that are swingably connected to the operation lever 38. And a follower piece 45 that is swingably supported by each link 41 and each rotation shaft 30 of the upper structure 2. The operation lever 38 is formed in a substantially straight bar shape, and a guide pin 39 is suspended from the end of the lower surface, and the guide pin 39 is cut out in the longitudinal direction of the top plate of the upper structure 2. It is slidably inserted and supported in the straight groove 40.

  Each link 41 includes a long first link 42 that is rotatably connected to the guide pin 39 of the operation lever 38, and a short second link 43 that is rotatably connected to the end of the first link 42. The second link 43 is linearly guided in the lateral direction of the processing jig storage case in a state in which the second link 43 is slidably fitted to the guide piece 44 on the top plate 14. In addition, the driven piece 45 is pivotally connected between the upper part of the rotating shaft 30 exposed through the top plate 14 and the end of the second link 43 so as to be swingable.

  In the above, when it is desired to prevent the processing jig 20 stored in the processing jig storage case from dropping or dropping from the front, the operation lever 38 at the reference position of the top plate 14 is gripped in front (FIG. 14). (Downward direction).

  Then, the first lever 42, the second link 43, and the driven piece 45, which are bent by sliding the operation lever 38 forward of the storage case for the processing jig, are extended in a horizontal line and connected in the vertical direction. Each rotary shaft 30 rotates to swing the drop-off prevention stopper 33 from the non-interference position 35 to the interference position 34, and each drop-off prevention stopper 33 comes into contact at the interference positions 34 with respect to both sides of the peripheral edge of the processing jig 20. The contact prevents the processing jig 20 from dropping or dropping from the front (see FIG. 14).

  On the other hand, when the processing jig 20 is to be stored in or removed from the processing jig storage case, the operation lever 38 at the position shown in FIG. It can be pushed to the reference position.

  Then, the operation lever 38 slides rearward of the processing jig storage case to swing the first link 42 and the driven piece 45, respectively, and the rotary shafts 30 connected in the vertical direction rotate to prevent dropping. The stopper 33 is swung from the interference position 34 to the non-interference position 35 behind it, and each drop-off prevention stopper 33 is separated from both sides of the peripheral edge of the processing jig 20, and by this separation, the processing jig is stored in the processing jig storage case. The tool 20 can be stored or taken out (see FIG. 15). The other parts are the same as those in the above embodiment, and the description thereof is omitted.

  Also in this embodiment, the same effect as the above embodiment can be expected, and each drop-off prevention stopper 33 moves back and forth with respect to the peripheral edge of the processing jig 20, so that the processing jig is included in the processing jig storage case. Obviously, the dropping and dropping of the processing jig 20 can be effectively suppressed and prevented without any trouble in the operation of storing or taking out 20. Further, if the operation lever 38 of the power transmission mechanism 37 is operated once, not all the rotating shafts 30 and the drop-off prevention stoppers 33 are rotated, but all the rotary shafts 30 and the drop-off prevention stoppers 33 are interlocked. Therefore, operability and workability can be remarkably improved.

  In the above embodiment, the lower structure 1, the upper structure 2, and / or the middle structure 3 are stacked and fixed using the clip pieces 4, the alignment pins 12, and the alignment holes 16, but the present invention is not limited to this. It is not something. For example, a plurality of fasteners such as bolts, nuts, and screws may be used for stacking and fixing.

  Moreover, in the said embodiment, although the several kinematic coupling 6 was directly arrange | positioned in the baseplate 5 of the lower structure 1, it is not limited to this at all. For example, a bottom plate may be attached to the bottom plate 5 of the lower structure 1, and a plurality of kinematic couplings 6 may be disposed on the bottom plate.

  In addition, the plurality of middle structures 3 may be the same size, or may be formed in different sizes within a stackable range. Further, the processing jig storage case may be mounted in a holding body having a substantially U-shaped cross section, and gripping handles for workers may be mounted on the outer surfaces of both side walls. It is also possible to form a recess in the support plate 13 or the support piece 17 so as to be fitted into the peripheral edge portion of the processing jig 20 and restrict the displacement and dropping thereof.

  Further, the pair of side walls 10 and the plurality of support plates 13 and the support pieces 17 of each middle structure 3 may be integrally formed, or may be divided. Furthermore, the side wall 10 of each middle structure 3 can be formed in a substantially J shape or a substantially L shape in a plan view, and the back wall of the processing jig storage case can be formed by the bent piece. Furthermore, although the slidable operation lever 38 is disposed on the top plate 14 of the upper structure 2, a slider, a handle, or the like can be slidably disposed instead of the operation lever 38.

It is explanatory drawing which shows typically the lamination | stacking state of the lower structure and upper structure in embodiment of the storage case for processing jigs concerning this invention. It is explanatory drawing which shows typically the lower structure in the embodiment of the processing jig storage case which concerns on this invention, an upper structure, and a middle structure. It is explanatory drawing which shows typically the lower structure in the embodiment of the processing jig storage case which concerns on this invention, an upper structure, and several middle structure. It is explanatory drawing which shows typically the lamination | stacking state of the storage case for one processing jig in embodiment of the storage case for processing jigs concerning this invention. It is a plane explanatory view showing typically the processing jig in the embodiment of the processing jig storage case according to the present invention. It is a section explanatory view showing typically the processing jig in the embodiment of the processing jig storage case according to the present invention. It is a perspective explanatory view showing typically an RFID system in an embodiment of a processing jig storage case according to the present invention. It is explanatory drawing which shows typically the lamination | stacking state of the lower structure and upper structure in 2nd Embodiment of the storage case for processing jigs concerning this invention. It is explanatory drawing which shows typically the lower structure body, upper structure body, and middle part structure in 2nd Embodiment of the storage case for processing jigs concerning this invention. It is explanatory drawing which shows typically the lower structure in the 2nd Embodiment of the processing jig storage case which concerns on this invention, an upper structure, and several middle structure. It is a perspective explanatory view showing typically a rotating shaft and a drop-off prevention stopper in a third embodiment of a processing jig storage case according to the present invention. It is a plane explanatory view showing typically the connection state of a pair of opposed rotating shafts in the third embodiment of the processing jig storage case according to the present invention. It is explanatory drawing which shows typically 3rd Embodiment of the storage case for processing jigs concerning this invention. It is a plane explanatory view showing typically the state where the drop-off prevention stopper in the third embodiment of the processing jig storage case according to the present invention was swung to an interference position with respect to the processing jig. It is a plane explanatory view showing typically the state where the drop-off prevention stopper in the third embodiment of the processing jig storage case according to the present invention was swung to the non-interference position with respect to the processing jig.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Lower structure 2 Upper structure 3 Middle structure 4 Clip piece 5 Bottom plate 10 Side wall 11 Notch 12 Alignment pin 13 Support plate (support)
14 Top plate 16 Alignment hole 17 Support piece (support)
20 Processing jig 21 Frame 28 Adhesion layer 30 Rotating shaft 31 Concave portion 32 Convex portion 33 Fall-off prevention stopper 34 Interference position 35 Non-interference position 36 Storage groove 37 Power transmission mechanism 38 Operation lever (prime body)
39 guide pin 41 link 42 first link 43 second link 45 driven piece (driven body)
W Semiconductor wafer

Claims (9)

A processing jig storage case for storing a processing jig for detachably connecting a lower structure and an upper structure and holding a semiconductor wafer therebetween,
The lower structure includes a bottom plate and a pair of side walls provided on both sides of the bottom plate, and the upper structure is provided on each of the top plate and both side portions of the top plate. A processing jig storage case comprising a pair of side walls that are detachably connected.   The lower structure includes a support provided on the pair of side walls to support the processing jig, and the upper structure includes a support provided on the pair of side walls to support the processing jig. Storage case for the processing jig described.   A middle structure is provided that is detachably interposed between the lower structure and the upper structure, and the middle structure detachably connects the side wall of the lower structure and the side wall of the upper structure. The processing jig storage case according to claim 1 or 2, comprising a pair of side walls and a support provided on the pair of side walls to support the processing jig.   Of the lower structure, the upper structure, and the middle structure, at least the sidewalls of the lower structure and the upper structure are supported on the rotation shaft, and a stopper for the stored processing jig is provided on the rotation shaft. The processing jig storage case according to claim 3, wherein the stopper is provided to rotate between the interference position and the non-interference position with respect to the processing jig based on rotation of the rotating shaft.   At least one of the rotating shafts of the lower structure and the upper structure is formed with a recess, and the other is formed with a protrusion. The recess and the protrusion are detachably fitted to each other, so that the lower structure and the upper structure are formed. The storage case for a processing jig according to claim 4, wherein the rotating shafts are connected.   6. The processing jig storage case according to claim 4, further comprising a power transmission mechanism that rotates the drop-off prevention stopper between an interference position and a non-interference position with respect to the processing jig.   The power transmission mechanism includes a driving body that is slidable in the longitudinal direction of the top plate of the upper structure, a link that is rotatably connected to the driving body, and a driven body that is attached to the link and the rotation shaft of the upper structure. The processing jig storage case according to claim 6, comprising:   The processing jig storage case according to any one of claims 2 to 7, wherein the support body of the lower structure, the upper structure, and / or the middle structure is a support plate laid between a pair of side walls.   8. The support body of the lower structure body, the upper structure body, and / or the middle structure body is formed as a plurality of support pieces that protrude from the facing surfaces of the pair of side walls and face each other at intervals. Storage jig storage case.

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