WO2010041485A1 - p型窒化ガリウム系半導体を作製する方法、窒化物系半導体素子を作製する方法、及びエピタキシャルウエハを作製する方法 - Google Patents
p型窒化ガリウム系半導体を作製する方法、窒化物系半導体素子を作製する方法、及びエピタキシャルウエハを作製する方法 Download PDFInfo
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- WO2010041485A1 WO2010041485A1 PCT/JP2009/059441 JP2009059441W WO2010041485A1 WO 2010041485 A1 WO2010041485 A1 WO 2010041485A1 JP 2009059441 W JP2009059441 W JP 2009059441W WO 2010041485 A1 WO2010041485 A1 WO 2010041485A1
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- gallium nitride
- based semiconductor
- semiconductor region
- nitride based
- monomethylamine
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 174
- 229910002601 GaN Inorganic materials 0.000 title claims abstract description 162
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 title claims abstract description 121
- 238000000034 method Methods 0.000 title claims abstract description 72
- 150000004767 nitrides Chemical class 0.000 title claims description 26
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 claims abstract description 114
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 claims abstract description 94
- 239000000758 substrate Substances 0.000 claims abstract description 64
- 239000002019 doping agent Substances 0.000 claims abstract description 42
- 239000012298 atmosphere Substances 0.000 claims abstract description 41
- 238000004519 manufacturing process Methods 0.000 claims abstract description 36
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 34
- 239000011777 magnesium Substances 0.000 claims abstract description 24
- 229910021529 ammonia Inorganic materials 0.000 claims abstract description 17
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 9
- 229910052749 magnesium Inorganic materials 0.000 claims abstract description 9
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims abstract description 5
- 125000002524 organometallic group Chemical group 0.000 claims abstract description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 56
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 32
- 229910052757 nitrogen Inorganic materials 0.000 claims description 26
- 229910002704 AlGaN Inorganic materials 0.000 claims description 16
- 239000007789 gas Substances 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
- 230000004044 response Effects 0.000 claims description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 3
- 238000000927 vapour-phase epitaxy Methods 0.000 claims description 3
- 239000011701 zinc Substances 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 230000004913 activation Effects 0.000 abstract description 23
- 238000000137 annealing Methods 0.000 abstract description 12
- 230000003247 decreasing effect Effects 0.000 abstract 2
- 235000012431 wafers Nutrition 0.000 description 43
- 229910052739 hydrogen Inorganic materials 0.000 description 40
- 239000001257 hydrogen Substances 0.000 description 36
- 238000000354 decomposition reaction Methods 0.000 description 20
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 17
- 238000001816 cooling Methods 0.000 description 13
- -1 gallium nitride compound Chemical class 0.000 description 10
- 150000002431 hydrogen Chemical class 0.000 description 7
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 150000001412 amines Chemical class 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
- 229910052594 sapphire Inorganic materials 0.000 description 5
- 239000010980 sapphire Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 4
- 238000010494 dissociation reaction Methods 0.000 description 4
- 230000005593 dissociations Effects 0.000 description 4
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 4
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- KSOCVFUBQIXVDC-FMQUCBEESA-N p-azophenyltrimethylammonium Chemical compound C1=CC([N+](C)(C)C)=CC=C1\N=N\C1=CC=C([N+](C)(C)C)C=C1 KSOCVFUBQIXVDC-FMQUCBEESA-N 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- NIIPNAJXERMYOG-UHFFFAOYSA-N 1,1,2-trimethylhydrazine Chemical compound CNN(C)C NIIPNAJXERMYOG-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- WGQKYBSKWIADBV-UHFFFAOYSA-N benzylamine Chemical compound NCC1=CC=CC=C1 WGQKYBSKWIADBV-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000002484 cyclic voltammetry Methods 0.000 description 2
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N hydrazine Substances NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- 150000004678 hydrides Chemical class 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 125000001477 organic nitrogen group Chemical group 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 150000002926 oxygen Chemical class 0.000 description 2
- DIIIISSCIXVANO-UHFFFAOYSA-N 1,2-Dimethylhydrazine Chemical compound CNNC DIIIISSCIXVANO-UHFFFAOYSA-N 0.000 description 1
- MHYQBXJRURFKIN-UHFFFAOYSA-N C1(C=CC=C1)[Mg] Chemical compound C1(C=CC=C1)[Mg] MHYQBXJRURFKIN-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 238000000089 atomic force micrograph Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- UCSVJZQSZZAKLD-UHFFFAOYSA-N ethyl azide Chemical compound CCN=[N+]=[N-] UCSVJZQSZZAKLD-UHFFFAOYSA-N 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- UIUXUFNYAYAMOE-UHFFFAOYSA-N methylsilane Chemical compound [SiH3]C UIUXUFNYAYAMOE-UHFFFAOYSA-N 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- YBRBMKDOPFTVDT-UHFFFAOYSA-N tert-butylamine Chemical compound CC(C)(C)N YBRBMKDOPFTVDT-UHFFFAOYSA-N 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Images
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02387—Group 13/15 materials
- H01L21/02389—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
- C30B25/183—Epitaxial-layer growth characterised by the substrate being provided with a buffer layer, e.g. a lattice matching layer
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
- C30B29/406—Gallium nitride
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
- H01L21/02573—Conductivity type
- H01L21/02579—P-type
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
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- H—ELECTRICITY
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
Definitions
- the present invention relates to a method of manufacturing a p-type gallium nitride semiconductor, a method of manufacturing a nitride semiconductor device, and a method of manufacturing an epitaxial wafer.
- Patent Document 1 describes a method of manufacturing a p-type gallium nitride compound semiconductor by activation annealing. In a nitrogen atmosphere, the gallium nitride compound semiconductor doped with p-type impurities is annealed.
- Patent Document 2 describes a vapor growth method of a low-resistance p-type gallium nitride compound semiconductor.
- the temperature is first lowered to 700 degrees Celsius in an atmosphere composed of ammonia and hydrogen, and then the temperature is lowered from 700 degrees Celsius in an atmosphere composed of organic nitrogen and nitrogen.
- organic nitrogen tertiary butylamine, ethyl azide, and dimethylhydrazine are used.
- Patent Document 3 describes a method for manufacturing a nitride compound semiconductor.
- the stacked structure is cooled in an atmosphere of a nitrogen source that does not release hydrogen by dissociation.
- the nitrogen raw material is an amine compound, a hydrazine compound or an azide compound such as trimethylamine, dimethylamine, triethylamine, diethylamine, phenylmethylamine, and trimethylhydrazine.
- Patent Document 4 describes a method for manufacturing a p-type gallium nitride semiconductor. At the time of cooling the p-type gallium nitride semiconductor, the atmosphere containing hydride gas is switched to the hydrogen or nitrogen atmosphere at a temperature of 400 degrees Celsius or higher. Ammonia is used as the hydride gas.
- Patent Document 1 activation annealing is performed, while in Patent Documents 2 to 4, cooling after film formation is performed in a desired atmosphere.
- Patent Documents 2 and 4 in order to prevent nitrogen from being decomposed from the gallium nitride semiconductor, cooling of the region made of the gallium nitride semiconductor is started in an atmosphere containing ammonia.
- active hydrogen is generated by the decomposition of ammonia, which hinders the separation of hydrogen from the semiconductor.
- Patent Document 3 cooling of the laminated structure is performed in an atmosphere of a nitrogen raw material that does not release hydrogen by dissociation.
- Patent Document 3 is different from Patent Documents 2 and 4.
- the nitrogen raw material used in Patent Document 3 is an amine compound, a hydrazine compound, or an azide compound such as trimethylamine, dimethylamine, triethylamine, diethylamine, phenylmethylamine, and trimethylhydrazine.
- the concentration of active nitrogen in the atmosphere is lowered, and as a result, nitrogen is decomposed from the surface of the nitride semiconductor.
- the present invention relates to a method for producing a p-type gallium nitride semiconductor, a method for producing a nitride semiconductor device, and an epitaxial wafer that can provide a gallium nitride semiconductor containing a p-type dopant without performing activation annealing. It is an object of the present invention to provide a method for manufacturing the above.
- One aspect of the present invention is a method of manufacturing a p-type gallium nitride semiconductor.
- This method includes (a) a step of forming a gallium nitride based semiconductor region containing a p-type dopant, and (b) after the formation of the gallium nitride based semiconductor region, in an atmosphere containing at least one of monomethylamine and monoethylamine. And a step of lowering the substrate temperature from the growth temperature of the gallium nitride based semiconductor region.
- Another aspect according to the present invention is a method of manufacturing a nitride-based semiconductor element.
- This method includes (a) a step of forming a gallium nitride based semiconductor region containing a p-type dopant on a substrate in a growth furnace, and (b) removing the substrate from the growth furnace after the gallium nitride based semiconductor region. And a step of lowering the substrate temperature while supplying a gas containing at least one of monomethylamine and monoethylamine to the growth reactor.
- Still another aspect of the present invention is a method for producing an epitaxial wafer for a nitride-based semiconductor element.
- This method includes (a) a step of forming a semiconductor region including one or a plurality of gallium nitride based semiconductor layers on a substrate in a growth furnace; and (b) after the gallium nitride based semiconductor region, the substrate is removed from the growth furnace.
- the gallium nitride semiconductor region exhibits p conductivity. Therefore, there is no need to perform activation annealing of the gallium nitride based semiconductor region.
- Monomethylamine and monoethylamine is decomposed to produce an active NH 2.
- NH 3 is more stable than these amine substances, and therefore NH 3 is difficult to decompose when the temperature is lowered.
- the production rate of NH 2 from monomethylamine is 1 million times or more compared with the production rate of NH 3 to NH 2 . Therefore, the atmosphere of monomethylamine and monoethylamine can suppress the decomposition of the nitride semiconductor more efficiently than the atmosphere of NH 3 .
- Monomethylamine and monoethylamine are decomposed to produce a methyl group or an ethyl group.
- decomposition of NH 3 generates not only NH 2 but also active hydrogen (H).
- decomposition of monomethylamine and monoethylamine produces methyl and ethyl groups and no hydrogen. Therefore, the surface of the gallium nitride based semiconductor is not exposed to active hydrogen due to the use of monomethylamine and monoethylamine.
- the bond between hydrogen and the p-type dopant can be broken to activate the p-type dopant.
- hydrogen gas is not supplied in the step of lowering the substrate temperature.
- this method when hydrogen is supplied simultaneously with monomethylamine and monoethylamine at a high temperature, the decomposition rate of the nitride-based semiconductor may be increased. Also. The supply of hydrogen gas prevents hydrogen from escaping from the gallium nitride based semiconductor region containing the p-type dopant.
- NH 3 is not supplied in the step of lowering the substrate temperature. According to this method, in the cooling using the atmosphere containing NH 3 , the activation of the gallium nitride based semiconductor region containing the p-type dopant is lowered.
- the ratio of the molar supply amount of monomethylamine and monoethylamine to the total flow rate may be 3% or less. According to this method, since monomethylamine and monoethylamine exhibit high decomposition efficiency, it is not necessary to supply a large amount of these amine materials compared to NH 3 .
- the ratio of the molar supply amount of monomethylamine and monoethylamine to the total flow rate can be 0.00001% or more. According to this method, by supplying monomethylamine and monoethylamine at a molar supply ratio of 0.00001% or more, decomposition of the nitride-based semiconductor can be suppressed and p-type dopant can be activated. .
- the molar supply partial pressure of monomethylamine and monoethylamine can be 3 kPa or less. In the method according to the present invention, the molar supply partial pressure of monomethylamine or monoethylamine can be 0.01 Pascal or more.
- the water content in monomethylamine and monoethylamine can be 50 ppm or less. According to this method, if the water content is 50 ppm or less, oxygen is generated by the decomposition of the water content, but there is almost no influence on the activation by this oxygen.
- the p-type dopant may include at least one of magnesium and zinc.
- the gallium nitride based semiconductor region may be performed by metal organic vapor phase epitaxy.
- the atmosphere may further contain nitrogen.
- the method according to the present invention includes, after the step of lowering the substrate temperature, lowering the temperature of the growth furnace while supplying nitrogen to the growth furnace without supplying either monomethylamine or monoethylamine, and After the step of lowering the temperature of the growth furnace, a step of removing the substrate from the growth furnace can be further provided. Further, the step of lowering the temperature of the growth furnace may be performed after the substrate temperature reaches 500 degrees Celsius. According to this method, the atmosphere does not affect the activation and the surface roughness of the gallium nitride semiconductor at a substrate temperature of 500 degrees Celsius or less.
- the method according to the present invention may further include a step of growing an active layer made of a gallium nitride semiconductor prior to the growth of the gallium nitride semiconductor region.
- the active layer is provided between the gallium nitride semiconductor region and the n-type gallium nitride semiconductor region, and the active layer is formed from the gallium nitride semiconductor region and the n-type gallium nitride semiconductor region. Light is generated in response to charge injection.
- a good p-type gallium nitride semiconductor region can be provided for the light emitting element.
- the active layer includes a well layer, and the growth temperature of the well layer is 700 degrees Celsius to 750 degrees Celsius. According to this method, it is possible to provide an active layer light-emitting element capable of generating long-wavelength light.
- the growth temperature of the active layer is lower than the annealing temperature of activation annealing, activation annealing may not be applicable.
- the method according to the present application can provide a good p-type gallium nitride based semiconductor region.
- the nitride semiconductor device may include a semiconductor optical device.
- the semiconductor region includes an active layer that generates light in response to charge injection. According to this method, a good p-type gallium nitride based semiconductor region can be provided to the semiconductor optical device.
- the gallium nitride based semiconductor region is exposed to the gas atmosphere.
- the method may further include forming an electrode that contacts the gallium nitride based semiconductor region.
- an electrode can be formed on a gallium nitride based semiconductor region having a good surface morphology.
- a method for producing a p-type gallium nitride semiconductor, a method for producing a nitride semiconductor element, and a method for producing an epitaxial wafer are provided. These methods can provide a gallium nitride-based semiconductor containing a p-type dopant without performing activation annealing.
- FIG. 1 is a drawing showing main steps in a method for producing a p-type gallium nitride semiconductor, a method for producing a nitride semiconductor element, and a method for producing an epitaxial wafer according to the present embodiment.
- FIG. 2 is a drawing schematically showing products in main processes.
- FIG. 3 is a diagram showing electrochemical CV measurement of epitaxial wafers A and C.
- FIG. 4 is a view showing profiles of Mg, Si, and H of the epitaxial wafer A.
- FIG. 5 is a drawing showing the profiles of Mg, Si and H of the epitaxial wafer C.
- FIG. FIG. 6 is an atomic force microscope image of the surfaces of the epitaxial wafers A and C.
- FIG. 7 is a drawing showing main steps in a method for manufacturing a nitride semiconductor device and a method for manufacturing an epitaxial wafer according to the present embodiment.
- FIG. 8 is a drawing showing a laminated structure of a nitride semiconductor device and an epitaxial wafer according to the present embodiment.
- FIG. 1 is a drawing showing main steps in a method for producing a p-type gallium nitride semiconductor, a method for producing a nitride semiconductor device, and a method for producing an epitaxial wafer according to the present embodiment.
- FIG. 2 is a drawing schematically showing products in main processes.
- a substrate 11 having a surface made of a gallium nitride semiconductor is prepared.
- the substrate 11 includes a support 13 and a gallium nitride based semiconductor layer 15 grown on the support.
- the substrate 11 is manufactured as follows. First, as shown in FIG. 2A, a support 13 is prepared. As the support 13, a sapphire substrate, a GaN substrate or the like is used. In step S102, the support 13 is placed on the susceptor of the growth furnace 10 to which the metal organic chemical vapor deposition method can be applied.
- step S ⁇ b> 103 an organometallic raw material and ammonia are supplied to the growth reactor 10 to grow the gallium nitride based semiconductor layer 15 on the support 13.
- a source gas G1 containing trimethylgallium, ammonia and silane is supplied to the growth reactor 10 to grow an n-type GaN layer.
- a gallium nitride based semiconductor region 17 containing a p-type dopant is formed in the growth furnace 10 in step S ⁇ b> 104.
- an organic metal raw material and ammonia are supplied to the growth reactor 10 to grow a gallium nitride based semiconductor layer 17 on the gallium nitride based semiconductor layer 15.
- a p-type dopant is added to the gallium nitride semiconductor, and the p-type dopant can be, for example, magnesium (Mg), zinc (Zn), or the like.
- a p-type dopant is added to the gallium nitride semiconductor, it exhibits high resistance electrically without activation annealing. Most of the p-type dopant of the gallium nitride based semiconductor is bonded to hydrogen, and the p-type dopant atoms are not activated. This phenomenon occurs, for example, when a gallium nitride based semiconductor is grown by metal organic vapor phase epitaxy.
- a source gas G2 containing trimethylgallium (TMG), ammonia (NH 3 ) and cyclopentadienylmagnesium (Cp 2 Mg) is supplied to the growth reactor 10 to grow a p-type GaN layer.
- the p-type GaN layer can include not only a single p-type dopant (eg, magnesium) but also other p-type dopants (eg, zinc).
- step S105 After the formation of the gallium nitride based semiconductor regions 15 and 17, in step S105, an atmosphere 19 containing at least one of monomethylamine and monoethylamine is formed in the growth reactor 10 as shown in FIG.
- the atmosphere 19 can contain nitrogen if necessary.
- step S105 the substrate temperature is lowered from the growth temperature of the gallium nitride based semiconductor region 17 after the atmosphere 19 is provided.
- the p type dopant in the gallium nitride based semiconductor region 17 is activated, and the gallium nitride based semiconductor region 17a. Indicates p conductivity. Therefore, it is not necessary to perform another activation annealing in order to activate the p-type dopant in the gallium nitride based semiconductor region 17.
- the film formation is completed and the substrate temperature is lowered to near room temperature, the production of the p-type gallium nitride semiconductor 17a and the epitaxial wafer E is completed.
- Monomethylamine and monoethylamine are supplied to the growth furnace 10 during the temperature drop. Monomethylamine and monoethylamine is decomposed to produce an active NH 2.
- NH 3 is more stable than these amine substances, and therefore NH 3 is difficult to decompose when the temperature is lowered.
- the production rate of NH 2 from monomethylamine is 1 million times or more compared to the production rate of NH 3 to NH 2 . Therefore, the atmosphere of monomethylamine and monoethylamine can suppress the decomposition of the nitride semiconductor more efficiently than the atmosphere of NH 3 .
- Monomethylamine and monoethylamine are decomposed to produce a methyl group or an ethyl group.
- decomposition of NH 3 generates not only NH 2 but also active hydrogen (H).
- decomposition of monomethylamine and monoethylamine produces methyl and ethyl groups and no hydrogen. Therefore, according to the use of monomethylamine and monoethylamine, the surface of the nitride-based semiconductor is not affected by active hydrogen.
- the bond between hydrogen and the p-type dopant can be broken to activate the p-type dopant.
- hydrogen gas is not supplied in the process of lowering the substrate temperature.
- hydrogen is supplied simultaneously with monomethylamine and monoethylamine at a high temperature, the decomposition rate of the nitride-based semiconductor may increase.
- the supply of hydrogen gas prevents hydrogen from escaping from the gallium nitride based semiconductor region 17 containing the p-type dopant.
- NH 3 is not supplied in the step of lowering the substrate temperature.
- the epitaxial wafer is cooled in an atmosphere containing NH 3 , the activation of the gallium nitride based semiconductor region containing the p-type dopant is lowered.
- the ratio of the molar supply amounts of monomethylamine and monoethylamine to the total flow rate can be 3% or less. Since monomethylamine and monoethylamine show high decomposition efficiency, it is not necessary to supply a large amount of these amine substances compared to NH 3 . On the other hand, the supply amount of NH 3 is, for example, about 12%. Further, the molar supply ratio of monomethylamine and monoethylamine to the total flow rate can be 0.00001% or more. The molar supply ratio of 0.00001% or more can suppress the decomposition of the nitride-based semiconductor by supplying monomethylamine and monoethylamine, and can activate the p-type dopant and reduce the surface roughness. .
- the molar supply partial pressure of monomethylamine and monoethylamine can be 3 kilopascals or less.
- the molar supply partial pressure of monomethylamine and monoethylamine can be 0.01 Pa or more.
- the water content in monomethylamine and monoethylamine can be 50 ppm or less. Although oxygen is generated by the decomposition of the contained water, this amount of water has little influence on activation by this oxygen. Since the contained water generates oxygen, appropriate management is required.
- both monomethylamine and monoethylamine are supplied after the substrate temperature is lowered to a temperature at which nitrogen decomposition from the surface of the gallium nitride semiconductor becomes sufficiently small. It is possible to perform a step of lowering the temperature of the growth furnace 10 while supplying nitrogen to the growth furnace 10.
- 500 degrees Celsius is considered as a standard of temperature at which decomposition from the surface of the gallium nitride semiconductor becomes sufficiently small.
- the atmosphere does not significantly affect the activation and the surface roughness of the gallium nitride semiconductor.
- an epitaxial wafer having a p-type gallium nitride based semiconductor region is completed.
- the epitaxial wafer can include an active layer for a semiconductor optical device.
- the active layer is provided between the p-type gallium nitride semiconductor region and the n-type gallium nitride semiconductor region, and is made of a gallium nitride semiconductor.
- the step of growing the active layer can be performed prior to the growth of the gallium nitride based semiconductor region.
- the active layer generates light in response to charge injection from the p-type gallium nitride semiconductor region and the n-type gallium nitride semiconductor region.
- a favorable p-type gallium nitride based semiconductor region can be provided for the light emitting element.
- Example 1 In this embodiment, a sapphire substrate is prepared.
- the metalorganic vapor phase growth furnace was maintained at a pressure of 100 kPa. While supplying hydrogen (H 2 ) and nitrogen (N 2 ) to the growth furnace, the surface of the sapphire substrate was heat-treated at 1000 degrees Celsius. This cleaning time was, for example, about 10 minutes. After cleaning, a low temperature buffer layer was grown on the sapphire substrate. This buffer layer is GaN.
- hydrogen, nitrogen, ammonia and TMG were supplied to the growth furnace at a substrate temperature of 470 degrees Celsius. The thickness of the GaN layer was 25 nanometers.
- the substrate temperature is raised to 1150 degrees Celsius.
- an n-type GaN layer was grown on the buffer layer.
- hydrogen, nitrogen, ammonia, TMG and monomethylsilane were supplied to the growth furnace.
- the thickness of the Si-doped GaN layer was 3 micrometers.
- the substrate temperature is lowered to 1000 degrees Celsius. After the temperature drop was completed, a p-type GaN layer was grown on the n-type GaN layer.
- hydrogen, nitrogen, ammonia, TMG, and Cp 2 Mg were supplied to the growth furnace.
- the thickness of the Mg-doped GaN layer was 50 nanometers.
- the growth furnace atmosphere was changed to monomethylamine and nitrogen. After this change, the substrate temperature was lowered from 1000 degrees Celsius. The monomethylamine and nitrogen supply was continued until the substrate temperature reached 500 degrees Celsius. The flow rate of monomethylamine was, for example, in the range of 1 to 10 sccm using several flow rates. After the substrate temperature dropped to 500 degrees Celsius, the growth furnace atmosphere was changed to nitrogen. After the substrate temperature dropped to about room temperature, the epitaxial wafer A was taken out of the growth furnace.
- the atmosphere of the growth furnace was changed to ammonia, hydrogen, and nitrogen. After this change, the substrate temperature was lowered from 1000 degrees Celsius. The supply of ammonia and nitrogen was continued until the substrate temperature reached 500 degrees Celsius. After the substrate temperature dropped to 500 degrees Celsius, the growth furnace atmosphere was changed to nitrogen and hydrogen. After the substrate temperature dropped to about room temperature, the epitaxial wafer C was taken out of the growth furnace.
- the electrochemical CV measurement of the epitaxial wafers A and C was performed. Referring to FIG. 3A, a pn junction is formed at a position of 0.6 micrometers from the surface of the epitaxial wafer A. The acceptor concentration was 1.8 ⁇ 10 18 to 2.1 ⁇ 10 18 cm ⁇ 3 . Referring to FIG. 3B, it is shown that the gallium nitride region shallower than the position of 0.6 micrometers from the surface of the epitaxial wafer C has a high resistance.
- FIG. 4 shows Mg, Si, and H profiles of the epitaxial wafer A.
- Mg concentration, Si concentration, H concentration is shown as P Mg, P Si, P H .
- the average value of H concentration in the surface region of the epitaxial wafer A is 2.5 ⁇ 10 19 cm ⁇ 3 .
- the average value of Mg concentration in the surface region is 6.8 ⁇ 10 19 cm ⁇ 3 .
- FIG. 5 shows Mg, Si, and H profiles of the epitaxial wafer C.
- Mg concentration, Si concentration, H concentration is shown as C Mg, C Si, C H .
- the average value of H concentration in the surface region of the epitaxial wafer C is 4.8 ⁇ 10 19 cm ⁇ 3 .
- the average value of Mg concentration in the surface region is 6.4 ⁇ 10 19 cm ⁇ 3 .
- the surface of the epitaxial wafers A and C was observed with an atomic force microscope. Referring to FIG. 6A, a step flow morphology was observed on the surface of the epitaxial wafer A. Referring to FIG. 6 (b), a morphology showing spiral roughness was observed on the surface of the epitaxial wafer C. Lowering the temperature in a monomethylamine atmosphere provides a good morphology on the surface of the gallium nitride region containing the p-type dopant. This morphology is good for providing good electrical contact characteristics at the junction between the metal and the p-type gallium nitride region.
- an embodiment including a cooling step using monomethylamine has been described, similar results can be obtained by cooling using monoethylamine. Similar results can be obtained by cooling using a mixed gas of monomethylamine and monoethylamine.
- Example 2 A method of manufacturing a semiconductor laser will be described with reference to FIGS.
- a GaN wafer 31 was prepared. After placing the GaN wafer 31 in the growth furnace in step S201, heat treatment was performed in an atmosphere of ammonia and hydrogen. The heat treatment temperature was 1100 degrees Celsius and the heat treatment time was about 10 minutes.
- step S202 an n-type gallium nitride based semiconductor region is formed.
- the n-type gallium nitride based semiconductor region is formed as follows, for example.
- TMG, TMA, NH 3 , and SiH 4 were supplied to the growth reactor, and a Si-doped AlGaN layer 33 for the cladding layer was grown on the GaN wafer 31 at 1150 degrees Celsius.
- the thickness of the n-type AlGaN layer 33 was 2300 nm.
- the Al composition of the n-type AlGaN layer 33 was 0.04.
- TMG, NH 3 , and SiH 4 were supplied to the growth reactor, and the n-type GaN layer 35 was grown on the n-type AlGaN layer 33 at 1150 degrees Celsius.
- the thickness of the n-type GaN layer 35 was 50 nm.
- a light emitting layer is formed on the n-type gallium nitride based semiconductor region.
- the light emitting layer is formed as follows, for example.
- TMG, TMI, and NH 3 were supplied to the growth reactor, and an undoped InGaN layer 37 for the light guide layer was grown on the n-type GaN layer 35 at 840 degrees Celsius.
- the thickness of the undoped InGaN layer 37 was 50 nm.
- the In composition of the undoped InGaN layer 37 was 0.02.
- an active layer 39 was grown on the light guide layer 37.
- TMG and NH 3 were supplied to the growth reactor, and an undoped GaN layer 39a for the barrier layer was grown on the undoped InGaN layer 37 at 870 degrees Celsius.
- the thickness of the GaN layer 39a was 15 nm.
- the temperature of the growth furnace was changed from 870 degrees Celsius to 745 degrees Celsius.
- TMG, TMI, and NH 3 were supplied to the growth reactor, and the undoped InGaN layer 39b was grown on the GaN layer 39a at 745 degrees Celsius.
- the thickness of the InGaN layer 39b was 3 nm.
- the In composition of the undoped InGaN layer 39b was 0.2.
- the temperature of the growth furnace was changed from 745 degrees Celsius to 870 degrees Celsius. Thereafter, TMG and NH 3 were supplied to the growth reactor, and the undoped GaN layer 39a was grown on the InGaN layer 39b at 870 degrees Celsius.
- the thickness of the GaN layer 39a was 15 nm.
- the growth of the InGaN well layer and the GaN barrier layer was repeated to form the active layer 39.
- the growth temperature of an InGaN well layer that emits green light is in the range of 700 to 750 degrees Celsius, for example.
- TMG, TMI, and NH 3 were supplied to the growth reactor, and an undoped InGaN layer 41 for the light guide layer was grown on the active layer 39 at 840 degrees Celsius.
- the thickness of the undoped InGaN layer 41 was 50 nm.
- the In composition of the undoped InGaN layer 41 was 0.02.
- TMG and NH 3 were supplied to the growth reactor, and the undoped GaN layer 43 was grown on the light guide layer 41.
- the thickness of the undoped GaN layer 43 was 50 nm.
- a p-type gallium nitride based semiconductor region was grown on the light emitting layer.
- the p-type gallium nitride based semiconductor region is formed as follows, for example. TMG, TMA, NH 3 , and Cp 2 Mg were supplied to the growth reactor, and the Mg-doped AlGaN layer 45 was grown on the GaN layer 43 at 1100 degrees Celsius. The thickness of the AlGaN layer 45 was 20 nm. The Al composition of the AlGaN layer 45 was 0.18.
- TMG, TMA, NH 3 , and Cp 2 Mg were supplied to the growth furnace, and the Mg-doped AlGaN layer 47 was grown on the Mg-doped AlGaN layer 45 at 1100 degrees Celsius.
- the thickness of the AlGaN layer 47 was 400 nm.
- the Al composition of the AlGaN layer 47 was, for example, 0.06.
- TMG, NH 3 , and Cp 2 Mg were supplied to the growth reactor, and the Mg-doped GaN layer 49 was grown on the AlGaN layer 47 at 1100 degrees Celsius.
- the thickness of the GaN layer 49 was 50 nm.
- step S205 After growing the above laser structure, the supply of NH 3 was stopped in step S205. After this, or before stopping the supply of NH 3 , the supply of monomethylamine (for example, 1 sccm) and nitrogen gas was immediately started. While flowing these gases, the susceptor temperature was lowered to 500 degrees Celsius. After this temperature decrease, in step S206, the supply of monomethylamine was stopped, and the susceptor temperature was cooled to a temperature near room temperature while flowing nitrogen gas through the growth furnace. Epitaxial wafer B was fabricated through these steps. In step S207, the epitaxial wafer B was taken out of the growth furnace.
- monomethylamine for example, 1 sccm
- the susceptor temperature and the substrate temperature were lowered to room temperature while quickly flowing nitrogen gas. At this time, monomethylamine is not supplied to the growth reactor.
- the epitaxial wafer D was produced by these steps.
- An electrode was formed on each of the epitaxial wafers B and D without performing activation annealing.
- the anode 51a and the cathode 51b were formed on this epitaxial wafer, and the semiconductor laser diode shown in FIG. 8 was obtained.
- an electrode was produced as follows.
- the anode electrode 51a is electrically connected to the p-type GaN layer 49 through an insulating film 53 having a stripe window with a width of 10 micrometers.
- the anode 51a is made of Ni / Au
- the cathode 51b is made of Ti / Al / Au.
- a resonator was fabricated by cleaving on the a-plane.
- a laser bar having a length of 600 micrometers was produced from the epitaxial wafer C. When energized, the oscillation wavelength was 460 nm. Further, a laser bar having a length of 600 micrometers was produced from the epitaxial wafer D. When energized, there was no laser oscillation.
- activation using cooling using monomethylamine was described. However, activation was achieved even using cooling using monoethylamine, and cooling using monomethylamine and monoethylamine was used. Even activation was achieved.
- the semiconductor laser structure has been described. However, the same activation effect can be obtained with a laminated structure for a semiconductor optical device such as a light emitting diode structure. Furthermore, in this embodiment, the activation for the semiconductor optical device has been described. However, this activation requires that the bond between the p-type dopant and hydrogen be broken in the gallium nitride semiconductor containing the p-type dopant.
- a gallium nitride based semiconductor device for example, a pn junction diode, a field effect transistor, etc.
- a good p-type gallium nitride based semiconductor region can be provided to the semiconductor optical device.
- an electrode can be formed on a gallium nitride based semiconductor region having a good surface morphology.
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Abstract
Description
本実施例では、サファイア基板を準備する。有機金属気相成長炉を100kPaの圧力に保った。水素(H2)及び窒素(N2)を成長炉に供給しながら、サファイア基板の表面を摂氏1000度で熱処理した。このクリーニング時間は、例えば約10分であった。クリーニングの後に、サファイア基板上に低温バッファ層を成長した。このバッファ層はGaNである。成長のために、摂氏470度の基板温度で、水素、窒素、アンモニア及びTMGを成長炉に供給した。GaN層の厚みは25ナノメートルであった。
図7及び図8を参照しながら、半導体レーザを作製する方法を説明する。図8に示されるように、GaNウエハ31を準備した。工程S201でGaNウエハ31を成長炉に配置した後に、アンモニア及び水素の雰囲気中で熱処理を行った。熱処理温度は摂氏1100度であり、熱処理時間は約10分であった。
Claims (20)
- p型窒化ガリウム系半導体を作製する方法であって、
p型ドーパントを含む窒化ガリウム系半導体領域を形成する工程と、
前記窒化ガリウム系半導体領域の形成の後に、モノメチルアミン及びモノエチルアミンの少なくともいずれかを含む雰囲気で前記窒化ガリウム系半導体領域の成長温度から基板温度を下げる工程と
を備える、ことを特徴とする方法。 - 前記基板温度を下げる前記工程では、水素ガスを供給しない、ことを特徴とする請求項1に記載された方法。
- 前記基板温度を下げる前記工程では、NH3を供給しない、ことを特徴とする、請求項1または請求項2に記載された方法。
- 前記基板温度を下げる前記工程では、総流量に対するモノメチルアミン及びモノエチルアミンのモル供給量の比率は3%以下である、ことを特徴とする請求項1~請求項3のいずれか一項に記載の方法。
- 前記基板温度を下げる前記工程では、総流量に対するモノメチルアミン及びモノエチルアミンのモル供給量の比率は0.00001%以上である、ことを特徴とする請求項1~請求項4のいずれか一項に記載の方法。
- モノメチルアミン及びモノエチルアミンのモル供給分圧は3キロパスカル以下であることを特徴とする、請求項1~請求項5のいずれか一項に記載の方法。
- モノメチルアミン及びモノエチルアミンのモル供給分圧は0.01パスカル以上である、ことを特徴とする請求項1~請求項6のいずれか一項に記載の方法。
- モノメチルアミン及びモノエチルアミンにおける水分含有量は50ppm以下である、ことを特徴とする請求項1~請求項7のいずれか一項に記載の方法。
- 前記p型ドーパントはマグネシウム及び亜鉛の少なくともいずれかを含む、ことを特徴とする請求項1~請求項8のいずれか一項に記載の方法。
- 前記窒化ガリウム系半導体領域の成長は有機金属気相成長法で行われる、ことを特徴とする請求項1~請求項9のいずれか一項に記載の方法。
- 前記基板温度を下げる前記工程では、前記雰囲気はさらに窒素を含む、ことを特徴とする請求項1~請求項10のいずれか一項に記載の方法。
- 前記窒化ガリウム系半導体領域は、GaN、AlGaN、InGaN、及びInAlGaNの少なくともいずれかを含む、ことを特徴とする請求項1~請求項11のいずれか一項に記載の方法。
- 窒化物系半導体素子を作製する方法であって、
p型ドーパントを含む窒化ガリウム系半導体領域を基板上に成長炉で形成する工程と、
窒化ガリウム系半導体領域の後に、前記成長炉から前記基板を取り出すために、モノメチルアミン及びモノエチルアミンの少なくともいずれかを含むガスを前記成長炉に供給しながら前記成長炉において基板温度を下げる工程と
を備える、ことを特徴とする方法。 - 前記窒化ガリウム系半導体領域は、窒素源としてアンモニアを用いると共に、III族原料として有機金属原料を用いて形成され、
前記窒化物系半導体素子の窒化ガリウム系半導体表面が前記雰囲気にさらされている、ことを特徴とする請求項13に記載された方法。 - 前記基板温度を下げる前記工程の後に、モノメチルアミン及びモノエチルアミンのいずれも供給することなく、窒素を前記成長炉に供給しながら前記成長炉の温度を下げる工程と、
前記成長炉の温度を下げる前記工程の後に、前記成長炉から基板を取り出す工程と
を更に備える、ことを特徴とする請求項13または請求項14に記載の方法。 - 前記成長炉の温度を下げる前記工程は、前記基板温度が摂氏500度に到達した後に行われる、ことを特徴とする請求項15に記載の方法。
- 前記窒化ガリウム系半導体領域の成長に先だって、窒化ガリウム系半導体からなる活性層を成長する工程を更に備え、
前記活性層は、前記窒化ガリウム系半導体領域とn型窒化ガリウム系半導体領域との間に設けられており、
前記活性層は、前記窒化ガリウム系半導体領域及び前記n型窒化ガリウム系半導体領域からの電荷の注入に応答して光を発生し、
前記活性層は井戸層を含み、
前記井戸層の成長温度は、摂氏700度~摂氏750度である、ことを特徴とする請求項16に記載された方法。 - 前記窒化ガリウム系半導体領域の表面は前記ガスの雰囲気にさらされており、
当該方法は、前記窒化ガリウム系半導体領域の前記表面に接触する電極を形成する工程を更に備える、ことを特徴とする請求項13~請求項17のいずれか一項に記載された方法。 - 窒化物系半導体素子のためのエピタキシャルウエハを作製する方法であって、
一または複数の窒化ガリウム系半導体層を含む半導体領域を基板上に成長炉で形成する工程と、
窒化ガリウム系半導体領域の後に、前記成長炉から前記基板を取り出すために、モノメチルアミン及びモノエチルアミンの少なくともいずれかを含むガスを前記成長炉に供給しながら基板温度を下げる工程と
を備え、
前記半導体領域は、p型ドーパントを含む窒化ガリウム系半導体領域を含む、ことを特徴とする方法。 - 前記窒化物系半導体素子は半導体光素子を含み、
前記半導体領域は当該半導体光素子の活性層を含む、ことを特徴とする請求項19に記載された方法。
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CN108987256B (zh) * | 2018-07-10 | 2022-03-29 | 中山大学 | p型AlGaN半导体材料生长方法 |
CN109285774B (zh) * | 2018-09-12 | 2023-03-24 | 江苏能华微电子科技发展有限公司 | 一种基于氮化镓的结势垒肖特基二极管及其形成方法 |
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KR20100075645A (ko) | 2010-07-02 |
US20100279495A1 (en) | 2010-11-04 |
EP2333819A4 (en) | 2013-11-20 |
CN101868848A (zh) | 2010-10-20 |
US8815621B2 (en) | 2014-08-26 |
JP2010093031A (ja) | 2010-04-22 |
CN101868848B (zh) | 2012-01-11 |
TW201015757A (en) | 2010-04-16 |
EP2333819A1 (en) | 2011-06-15 |
US20110111578A1 (en) | 2011-05-12 |
KR101146024B1 (ko) | 2012-05-14 |
JP4416044B1 (ja) | 2010-02-17 |
US7879636B2 (en) | 2011-02-01 |
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