WO2010009716A2 - Strahlungsemittierende vorrichtung und verfahren zur herstellung einer strahlungsemittierenden vorrichtung - Google Patents
Strahlungsemittierende vorrichtung und verfahren zur herstellung einer strahlungsemittierenden vorrichtung Download PDFInfo
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- WO2010009716A2 WO2010009716A2 PCT/DE2009/001022 DE2009001022W WO2010009716A2 WO 2010009716 A2 WO2010009716 A2 WO 2010009716A2 DE 2009001022 W DE2009001022 W DE 2009001022W WO 2010009716 A2 WO2010009716 A2 WO 2010009716A2
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- H10K77/111—Flexible substrates
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- H05B33/00—Electroluminescent light sources
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- H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
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- H10K50/844—Encapsulations
- H10K50/8445—Encapsulations multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
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- H10K59/873—Encapsulations
- H10K59/8731—Encapsulations multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
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- H10K59/874—Passivation; Containers; Encapsulations including getter material or desiccant
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- the invention relates to a radiation-emitting device and a method for producing a radiation-emitting device.
- Radiation-emitting devices such as, for example, electroluminescent, organic light-emitting diodes, have a substrate, on which an organic layer sequence is arranged between a first and a second electrode.
- the object of the invention is to provide a radiation-emitting device comprising a substrate with improved properties. Another object of the invention is to provide a method by which such a radiation-emitting device can be manufactured. These objects are achieved by a device according to the patent claim 1 and by a method according to the patent claim 10. Further embodiments of the device and the method are the subject of dependent claims.
- a radiation-emitting device is provided which has a substrate, at least one organic functional layer on the substrate and a second electrode on the at least one organic functional layer.
- the substrate comprises a plastic film and a metal film, and the metal film is disposed between the plastic film and the at least one organic functional layer and arranged as a first electrode.
- a radiation-emitting device for example a flexible, organic light-emitting diode (OLED)
- OLED organic light-emitting diode
- the substrate may further be free of barrier layers.
- the substrate may be flexibly formed and comprise a flexible, non-rigid plastic film.
- the provision of the plastic film is associated with low costs, also plastic films may have a low surface roughness.
- substrates which comprise plastic films on which a metal film is arranged it is possible to dispense with sealing the plastic film against diffusion of oxygen or moisture, for example by means of a barrier layer, since a metal film is arranged on it. This may be hermetically and intrinsically diffusion-tight, thus preventing diffusion of oxygen or water (in the form of moisture) through the substrate.
- Radiation-emitting device is provided, which is also roll-to-roll in the case of the flexible embodiment.
- Roll-to-roll capability is understood to mean that the substrate is formed so that it can be unrolled from a roll, printed with additional layers, and rolled up again.
- the metal film can be vapor-deposited on the plastic film, sputtered or applied by other methods.
- “Established” in this context means that the first metal film is contactable with an external electrical connection, and is electrically conductively connected to the organic functional layers arranged on the substrate.
- the metal film can additionally have a structured surface which can influence the injection of charge carriers into the at least one organic functional layer.
- the metal film may have the same lateral dimensions as the plastic film. If the substrate from the arranged on the substrate layers in Be isolated areas, the metal film may have recesses in these areas.
- the substrate may further have a greater lateral extent than the at least one organic functional layer and the second electrode.
- the substrate comprising the plastic film and the metal film may extend beyond the active area, that is beyond the area bounded by the at least one organic functional layer and the second electrode.
- the substrate may have an area that extends on all sides of the area bounded by the at least one organic functional layer and the second electrode.
- the substrate comprising the plastic film and the metal film may have regions which are not covered by the at least one organic functional layer and to which further functional layers, for example insulating layers or encapsulation layers, may be applied.
- the metal film may further be diffusion-tight.
- Diffusion-tight in this context means hermetically and intrinsically tight to oxygen and water, also in the form of moisture. This means that the diffusion of oxygen and / or water through the metal film can no longer be detected with measurement methods available for this purpose. Thus, for a long period of time, for example several years, no measurable amount of oxygen and / or water diffuses through the metal film.
- the oxygen- and water-sensitive organic functional layers disposed on the substrate are protruded through the metal film Oxygen and water protected, which leads to an extension of their life.
- the tightness of the metal film not only consists of an intrinsic tightness on small surfaces, but there are also no or very few grain boundaries, pores and channels, could diffuse through the oxygen or water. This means, among other things, that the dense metal film has no or very few point effects. This avoids the formation of so-called black spots and increases the efficiency of the device.
- the finished radiation-emitting device may be subjected to a lifetime test. For this purpose, the device is placed in a humidity oven, and exposed to extremely high levels of oxygen and water in the form of humidity for 3 to 6 weeks. This accelerated measurement of diffusion through the substrate can be extrapolated to the life of the device under normal conditions.
- a radiation emitting device which can be made flexible with a substrate comprising a plastic film and a dense metal film can have a life of 8 to 12 years.
- the plastic film may continue to be less diffusion-tight than the metal film.
- Plastic films generally have poorer barrier properties than dense metal films, that is, they have diffusion of oxygen and water. Nevertheless, in the radiation emitting device, which can be made flexible, they can be used in the substrate may be dispensed with, for example by a barrier layer for oxygen and water to make diffusion-tight, since a metal film, which is intrinsic and hermetically diffusion-tight, is arranged on them. This can save costs and effort for the provision of the substrate.
- the plastic film may comprise a material selected from a group including polyester, polyethylene (PE), polypropylene (PP), polyvinyl chloride (PVC), polystyrene (PS), polyvinylidene chloride (saran), ethylene vinyl alcohol (EVA), cellophane, cellulose , Polyacrylamide (PLA), polyamide, polyimide (PI), polycarbonates (PC), polyacrylates and mixtures thereof.
- polyesters are PET (polyethylene terephthalate), Mylar (BOPET: biaxially oriented polyethylene terephthalate) or PES (polyethersulfone).
- a polyacrylate for example, PMMA (Poly ⁇ nethylmethacrylat).
- Polyethylene can be used as a highly branched low density polyethylene (LDPE) or as a low density, high density polyethylene (HDPE).
- These materials can have the property that they can be drawn into films, blown, extruded or processed into films by other methods.
- Moisture absorption or mechanical deformation avoided. Due to the improved properties of the substrate comprising a plastic film and a metal film, the long-term stability of the radiation-emitting device can be increased and quality drops can be avoided.
- a planarization layer can be arranged between the plastic film and the metal film.
- the planarization layer has a thickness that is so large that possible surface roughnesses of the plastic film and the metal film can be compensated. Since organic layers of a radiation-emitting device are typically a few tens of nm thick, surface roughness is effective through multiple layers. By using a planarization layer, these surface roughening effects through multiple layers can be reduced or avoided. Furthermore, the planarization layer may help to improve the adhesion between the plastic film and the metal film.
- the planarization layer may comprise a material selected from the group consisting of polyimides, polyamides, polysiloxanes, epoxy resins, polyurethanes, BGB, acrylics, and other low dielectric constant polymers, inorganic oxides, and combinations thereof.
- Inorganic oxides can be obtained from a sol-gel process in which gels are prepared from colloidal dispersions and include, for example, spin-on glasses or vacuum-deposited inorganic oxides.
- spin-on glasses polysiloxanes or other siloxanes are understood that in a Solvents are dissolved, and applied as a solution and cured at high temperatures. In this case, a glassy material with a high SiO 2 content is formed.
- planarization and self-assembling monolayers In addition to these materials for planarization and self-assembling monolayers (English: seif-assembling monolayers, SAM) can be used, which can also represent an electrical insulation. Self-assembling monolayers are high-order layers and form spontaneously upon immersion of surface-active and / or organic substances in a solution. In general, the planarization layer need not be formed diffusion-tight, since it is disposed between the plastic film and the dense metal film.
- a flexible substrate By combining a flexible plastic film, planarization layer and metal film, a flexible substrate can be provided that is diffusion-tight and roll-to-roll compatible. This substrate can furthermore be produced inexpensively, in contrast to metal foils which, when used as a substrate, have an expensive production technique and a high roughness of their surface.
- the radiation-emitting device may have on the second electrode and on the substrate a glass and / or thin-film encapsulation for encapsulating the at least one organic functional layer.
- the thin-film encapsulation may be a thin layer that completely surrounds the organic layers.
- the encapsulation can hermetically and intrinsically close to oxygen and water and have no point effects.
- the at least one organic functional layer and the second electrode are disposed on the substrate having a metal film, so that the light generated by the device is not coupled out through the substrate but through the second electrode.
- the metal film can mirror the substrate and improve the outcoupling of the light through the second electrode.
- a radiation-emitting device is called a top emitter.
- a thin-film encapsulation may comprise a plasma-enhanced Chemical Vapor Deposition (PE-CVD) method SiC ⁇ layer having a thickness of 25 nm to 500 nm, for example, having a thickness of 100 nm.
- PE-CVD plasma-enhanced Chemical Vapor Deposition
- SiC ⁇ layer having a thickness of 25 nm to 500 nm, for example, having a thickness of 100 nm.
- a thin-film material as inorganic materials such as Al2O3, TiO 2, ZrO 2 / SiO 2, 8 3N 4, SiC or DLC! (Diamond Like Carbon: diamond-like carbon coatings) or combinations of these layers.
- the encapsulation is a glass encapsulation, it may comprise an amorphous glass which is applied, for example, by electron beam evaporation in layer thicknesses of a few micrometers, for example 3 ⁇ m.
- a thin-film encapsulation can be combined with a glass encapsulation.
- a thin glass layer is laminated onto the thin-film encapsulation.
- Possible last small pores in the thin-film encapsulation can be suppressed by the additional glass encapsulation.
- the additional glass encapsulation increases the diffusion paths for water and oxygen by orders of magnitude and thus slows down the diffusion.
- the additional glass encapsulation on the thin-film encapsulation replaces additional functional layers, for example scratch and corrosion layers.
- the glass encapsulation can be applied to the thin-film encapsulation even without a protective gas environment and thus with little effort.
- additional layers may furthermore be present which have, for example, conversion phosphors or light extraction structures.
- the wavelength of the light emitted by the device can be changed and / or amplified.
- the encapsulation can also be electrically insulating.
- a thin-film encapsulation of multiple layers comprising a sequence of layers of SiN x, SiC> 2 / SiN x comprise layers.
- the second electrode may be transparent or semi-transparent.
- the second electrode may have a transparency of more than 50%.
- Electrode materials which have high conductivity and transparency can be selected from transparent, electrically conductive oxides ("TCO" for short) or thin metal films which can have a particularly low sheet resistance in a range of 10 nm to 10 ⁇ m and a sheet resistance ⁇ 5 ⁇ / area
- TCO transparent, electrically conductive oxides
- an ITO electrode on glass have a sheet resistance of 15 ⁇ / area and a layer sequence ITO metal ITO of 5 ⁇ / area
- mixed systems such as indium tin oxide / metal / indium tin oxide can also be provided as the material for the second electrode.
- Transparent, electrically conductive oxides are transparent, electrically conductive materials, usually metal oxides, such as zinc oxide, tin oxide, cadmium oxide, titanium oxide, indium oxide or indium tin oxide (ITO).
- metal oxides such as zinc oxide, tin oxide, cadmium oxide, titanium oxide, indium oxide or indium tin oxide (ITO).
- binary metal oxygen compounds such as ZnO, SnO 2 or In 2 O 3 also include ternary metal oxygen compounds such as Zn 2 SnO 4 , CdSnO 3 , ZnSnO 3 , MgIn 2 O 4 , GaInO 3 , Zn 2 In 2 O 5 or In 4 Sn 3 Oi 2 or mixtures of different transparent conductive oxides to the group of TCOs.
- the TCOs do not necessarily correspond to a stoichiometric composition and may also be p- or n-doped.
- the metal film configured as the first electrode may include a material including aluminum, copper, chromium, gold, platinum, chromium, molybdenum, silver, or alloys of these metals includes.
- the metal film may further comprise at least partial layers each comprising one of the metals aluminum, copper, chromium, gold, platinum, chromium, molybdenum, silver or alloys thereof and stacked on top of each other.
- the metal film need not be made transparent when the radiation-emitting device is a top emitter.
- a structured insulation layer can furthermore be arranged. This is not located in the active region of the device, that is, on areas of the substrate which are covered by the at least one organic functional layer.
- the insulating layer can electrically insulate the direct contact between the metal film and the second electrode.
- the insulating layer may comprise a material selected from Al 2 O 3, TiO 2 , ZrO 2 , SiO 2 , Si 3 N 4 , SiC, DLC, or combinations thereof.
- the insulating layer can furthermore be shaped in a diffusion-tight manner and applied, for example, in a plasma.
- the radiation-emitting device may include an organic light-emitting diode (OLED).
- OLED organic light-emitting diode
- the OLED which can also be configured flexibly, can emit colored or white light.
- at least one light-emitting layer is arranged between two electrodes. The electrodes inject electrons or holes into the light-emitting layer, where they recombine and thus lead to the Li ⁇ htemission.
- the substrate may have a larger area than the arrangement provided in method step C).
- a method which enables the production of a radiation emitting device having a substrate comprising a plastic film and a metal film, wherein the metal film is configured as a first electrode, and the substrate is inexpensive to produce.
- the method also enables the production of a flexible radiation-emitting device having a substrate comprising a flexible plastic film and a metal film, wherein the metal film is configured as a first electrode
- the method may further comprise method step A) with the steps
- a substrate comprising a plastic film and a metal film can be produced.
- the process step A1) involves drawing, extruding or blowing a material for the plastic film.
- plastic film for the substrate.
- the plastic film can also be flexibly formed.
- a material for the metal film can be vapor-deposited onto the plastic film.
- a metal film which may be thin, dense and smooth, is applied to the plastic film, thus providing a substrate that is also suitable for flexible radiation-emitting devices and damage by diffusion of oxygen or water of the organic layers disposed on the substrate prevented.
- the metal film By setting up the metal film as a first electrode, the metal film has the two functions of being configured as an electrode and as a seal of the plastic film.
- the metal film In order to establish the metal film as an electrode, the metal film is electrically conductively connected to an external electrical connection and formed in such a way that an electrically conductive connection to the subsequently applied organic functional layers is produced.
- a material for the metal film can be sputtered on.
- the plastic film Before sputtering, the plastic film can be etched. The etching improves the adhesion between the plastic film and the metal film and thus increases the stability of the substrate.
- a planarization layer can be arranged on the plastic film.
- Planarization can be formed so that it balances surface roughness of the plastic film by a suitable choice of its thickness and thus allows the arrangement of a smooth metal film on the planarization.
- the planarizing layer may be formed, for example, in a thickness selected from the range of 1 to 100 ⁇ m.
- the method can furthermore have a method step D) which follows the method step C), in which the arrangement provided in method step C) is encapsulated with a glass and / or thin-film encapsulation.
- a method step D) which follows the method step C), in which the arrangement provided in method step C) is encapsulated with a glass and / or thin-film encapsulation.
- the method step D) can be the steps
- the at least one organic functional layer is completely surrounded by the glass and / or Dünnfilmverkapselung and thus protected from all sides from diffusion of oxygen and / or moisture.
- FIG. 1 shows the schematic side view of a flexible radiation-emitting device
- FIG. 2 shows the schematic side view of a conventional, top-emitting, radiation-emitting device
- Figure 3 shows the schematic side view of a
- Figure 4 shows the schematic side view of another
- Figure 5 shows the schematic side view of a
- Figure 6 shows the schematic side view of a
- FIG. 7 shows the schematic plan view of an embodiment of the flexible radiation-emitting device
- Figure 8 shows a scheme for the diffusion rate of oxygen and water of various materials.
- FIG. 1 and 3 to 7 show embodiments of flexible radiation-emitting devices. Likewise, the embodiments may also be formed as non-flexible devices.
- FIG. 1 shows the schematic side view of a flexible radiation-emitting device, which may be, for example, an organic light-emitting diode (OLED).
- OLED organic light-emitting diode
- This comprises a substrate 10, a first electrode 20, a charge injection layer 30, a charge transport layer 40, a first light-emitting layer 50, a second light-emitting layer 60, a third light-emitting layer 70, and a second electrode 80.
- OLED organic light-emitting diode
- Charge injection layer 30, charge transport layer 40, and first, second, and third light emitting layers 50, 60, and 70 together form organic functional layers 100.
- First electrode 20 may be an anode, for example, second electrode 80 may be a cathode. Between anode and cathode, the organic layers are arranged.
- the charge injection layer 30 is a hole injection layer and the charge transport layer 40 is a hole transport layer.
- the first light-emitting layer 50 may emit blue light
- the second light-emitting layer 60 may emit green light
- light emitting layer 70 may emit red light.
- Further light-emitting layers or other sequences of the colors of the emitted light of the different layers are also conceivable.
- other organic functional layers such as electron injection and electron transport layers may be present.
- a radiation-emitting device may also have a simpler structure, and for example a substrate 10, a first electrode 20, a light-emitting layer 50 which can emit light in any desired color, and a second electrode 80.
- the remaining layers shown in FIG can be added optionally.
- Exemplary materials for these layers are Indium Tin Oxide (ITO) for the first electrode in the case of an anode, 1-TNATA for the charge injection layer in the case of a Lo ⁇ hinjemiesschi ⁇ ht, s-TAD for the charge transport layer in the case of a hole transport layer, SEBOlO. SEB020 for a blue light emitting Layer, TMM004: Ir (ppy) 3 (15%) for a green light emitting layer, and TMM-04: TERO12 for a red light emitting layer.
- ITO Indium Tin Oxide
- 1-TNATA for the charge injection layer in the case of a Lo ⁇ hinjemiesschi ⁇ ht
- s-TAD for the charge transport layer in the case of a hole transport layer
- SEBOlO. SEB020 for a blue light emitting Layer
- TMM004 Ir (ppy) 3 (15%) for a green light emitting layer
- TMM-04 TERO12 for a red light emitting layer.
- metals such as aluminum
- the electrons and holes injected from the electrodes into the organic functional layers recombine in the light-emitting layers, resulting in the emission of light.
- the light depends on whether the substrate, the first and the second electrode are formed transparent. If the substrate and the first electrode are of transparent design, is a bottom emitter, and if the second electrode and the encapsulation are transparent, then this is a top emitter. It is further conceivable that both substrate, first electrode and second electrode are formed transparent and the light emission takes place on both sides of the radiation-emitting device.
- Figure 2 shows the schematic side view of a top emitting, radiation-emitting device.
- This has a substrate 10, on which the first electrode 20 is arranged, the light-emitting layer 50 and the second electrode 80.
- the substrate here comprises a rigid glass and is thus not formed flexibly. By using this substrate, it is necessary to arrange an additional first electrode 20 on the substrate.
- the emitted light which is indicated here by arrows, is coupled out of the radiation-emitting device through the second electrode and passed through functional layers 90 and a thin-film encapsulation 600.
- the functional layers may contain radiation conversion phosphors to alter the wavelength of the emitted light.
- functional layers may have scattering structures to enhance the intensity of the light.
- the thin-film encapsulation 600 is transparent in this case, so that the emission of the light is not hindered.
- the thin-film encapsulation also serves to encapsulate the device so that the organic layers not be damaged by oxygen or moisture. It is shown schematically on the functional layer, but may also enclose the entire radiation-emitting device.
- FIG. 3 shows the schematic side view of an embodiment of the flexible radiation-emitting device.
- This comprises a substrate 10 which comprises a plastic film 1, a planarization layer 2 and a metal film 3.
- the planarization layer 2 is optionally present, depending on the roughness of the plastic film 1 can be dispensed with.
- the metal film 3 is an intrinsically and hermetically sealed metal film which is simultaneously formed as an electrode for the radiation-emitting device. It can be configured as an anode or as a cathode and can be applied structured or unstructured on the plastic film or on the planarization layer. The arrangement of an additional first electrode on the substrate is thus not necessary.
- the planarization layer may also serve to improve the adhesion between the metal film 3 and the plastic film 1.
- the substrate can seal the organic layers from moisture and oxygen and at the same time serves as the first electrode to which voltage can be applied to generate the radiation emission.
- the substrate 10 has a larger area than the subsequent layers, so that on all sides there is an overlap of the surface of the substrate 10 beyond the surface of the other layers.
- a structured insulating layer 200 is present, which is the direct Contact of the metal film 3 and the second electrode 80 prevented.
- the insulating layer may comprise a material selected from Al 2 O 3, TiO 2 , ZrO 2 , SiO 2 , Si 3 N 4 , SiC, DLC, or combinations thereof.
- the insulating layer 200 may, for example, be a 100 nm-thick SiO 2 layer produced by a PE-CVD method.
- the organic functional layers 100 are applied.
- the second electrode 80 With an adhesive 300, a glass encapsulation 400 is applied to the organic layers and the second electrode 80 such that a cavity is formed between the glass encapsulation 400 and the second electrode 80.
- a desiccant 500 which eventually absorbs diffusing moisture through the adhesive 300.
- a drying agent are zeolites or CaO, which are incorporated in Teflon.
- the adhesive 300 is applied to the insulating layer 200. It can also be applied to the metal film 3.
- the adhesive may comprise a material selected from the group consisting of epoxies, acrylates, silicones, and varnish-like materials.
- FIG. 4 shows the schematic side view of a further embodiment of the flexible radiation-emitting device.
- the substrate 10, the insulating layer 200, the Organic functional layers 100 and the second electrode 80 are formed analogously to the embodiment in FIG.
- the encapsulation here includes one
- Thin-film encapsulation 600 and a glass encapsulation 400 are again connected together with an adhesive 300.
- the thin-film encapsulation 600 is deposited directly on the second electrode 80, for example by means of a plasma process. It is a transparent thin layer that is hermetically water and oxygen tight. They may be thick, for example, a stack of 100 nm SiN x, SiO 2 50 nm thick and 100 nm thick SiN x act layers. On this thin-film encapsulation 600, a glass encapsulation 400 provided with a transparent, light-resistant adhesive is laminated free of air bubbles.
- Adhesives may include, for example, epoxies, acrylates, silicones, paint-like materials and other adhesive materials.
- the curing of the adhesive can be done for example by exposure, heat or chemical reaction in two-component adhesives.
- adhesives that are permanently tacky can also be used.
- the adhesive may have a thickness of 10 ⁇ m.
- FIG. 5 shows a schematic side view of a further embodiment of the flexible radiation-emitting device.
- the substrate 10, the insulating layer 200, the organic functional layers 100 and the second electrode 80 are formed analogously to the embodiments in FIGS. 3 and 4.
- an encapsulation is present here, the only a Dünnfilmverkapseiung 600 includes. This is deposited directly on the second electrode 80, for example, by a plasma process as a transparent thin film, and is hermetically waterproof.
- the thin-film encapsulation may, for example, comprise a layer stack comprising a larger number of SiN x , SiO 2, SiN x layers.
- further functional layers may be present (not shown here) which have conversion phosphors, outcoupling structures, color filters, scratch and / or UV protection materials. These layers can be inside or outside the encapsulation.
- FIG. 6 shows a schematic side view of an embodiment of the flexible radiation-emitting device.
- FIGS. 3 to 5 each show an encapsulation which completely encloses the functional layers 100 and the second electrode 80.
- FIG. 6 shows that the second electrode 80 protrudes from the encapsulation, in this case a thin-film encapsulation 600, in order to be electrically connected from the outside.
- the second electrode must be applied to the insulation layer 200 in order to prevent short-circuiting with the metal foil 3.
- the lead out second electrode 80 is also in the
- FIG. 7 shows the top view of a flexible one
- Radiation-emitting device with a substrate 10, a structured one Insulation layer 200 and a second electrode 80.
- the substrate has a portion having a recess of the metal film 3 and in which the plastic film 1 is exposed (indicated by dashed line). This region may serve for insulation between the substrate and layers arranged on the substrate and is an alternative embodiment to insulating layers which can be applied to the metal layer in this region.
- the remaining layers such as planarization layer 2 and organic functional layers 100 are not shown for the sake of clarity.
- the plan is intended to clarify that the second electrode 80 protrudes from the encapsulation 600, which is not shown here, in order to be able to be electrically connected from the outside. So that it does not come into contact with the metal film 3, the insulating layer 200 is present. Additionally or alternatively, the substrate 10 may be formed in a region such that there is no metal film 3 which may come into contact with the second electrode and thus be insulated from the substrate.
- Figure 8 shows a scheme for the diffusion rate of oxygen R Q 2 and water Rjj20 for various materials.
- the diffusion rate of oxygen R Q 2 xdx bar is indicated on the y-axis in cm 3 / m2, the diffusion rate rH2O ⁇ 0 ⁇ ⁇ ⁇ au he ⁇ x axis in g / m 2 xd specified.
- Pg are standard polymers
- P E are specially designed polymers
- P Q coated polymers In this order, these polymers show decreasing diffusion rates RQ2 and Rjj20 au f •
- the Polymers P 1 and P 2 can be used, for example, for buttons, in the automotive sector or in electronic utility devices. This range of diffusion rates is indicated by region I.
- Region III shows the range of even lower diffusion rates RQ2 and R H2O 'which is suitable, for example, for the use of organic liquid-crystal diodes or for use in organic photovoltaics.
- Region IV exhibits the diffusion rates suitable for the use of organic light emitting diodes.
- A denotes target value of the diffusion rate rH2O ' ⁇ he n ⁇ a material is necessary to allow the use in OLEDs. This setpoint is so low that the diffusion can no longer be measured with the usual measuring methods. Such a low diffusion value can be achieved by the use of the flexible substrate comprising a plastic film and a metal film.
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011519037A JP5794915B2 (ja) | 2008-07-25 | 2009-07-21 | ビーム放射装置およびビーム放射装置を製造する方法 |
| EP09775996.3A EP2308117B1 (de) | 2008-07-25 | 2009-07-21 | Strahlungsemittierende vorrichtung und verfahren zur herstellung einer strahlungsemittierenden vorrichtung |
| US13/055,901 US8772818B2 (en) | 2008-07-25 | 2009-07-21 | Radiation-emitting device and method for producing a radiation-emitting device |
| CN200980129404.8A CN102106018B (zh) | 2008-07-25 | 2009-07-21 | 发射辐射的装置和用于制造发射辐射的装置的方法 |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102008034717 | 2008-07-25 | ||
| DE102008034717.5 | 2008-07-25 | ||
| DE102008053326A DE102008053326A1 (de) | 2008-07-25 | 2008-10-27 | Strahlungsemittierende Vorrichtung und Verfahren zur Herstellung einer strahlungsemittierenden Vorrichtung |
| DE102008053326.2 | 2008-10-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2010009716A2 true WO2010009716A2 (de) | 2010-01-28 |
| WO2010009716A3 WO2010009716A3 (de) | 2010-05-14 |
Family
ID=41428852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/DE2009/001022 Ceased WO2010009716A2 (de) | 2008-07-25 | 2009-07-21 | Strahlungsemittierende vorrichtung und verfahren zur herstellung einer strahlungsemittierenden vorrichtung |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8772818B2 (enExample) |
| EP (1) | EP2308117B1 (enExample) |
| JP (1) | JP5794915B2 (enExample) |
| KR (1) | KR101596070B1 (enExample) |
| CN (1) | CN102106018B (enExample) |
| DE (1) | DE102008053326A1 (enExample) |
| WO (1) | WO2010009716A2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012054225A (ja) * | 2010-08-04 | 2012-03-15 | Canon Inc | 表示装置 |
| US20140306211A1 (en) * | 2011-11-14 | 2014-10-16 | Konica Minolta, Inc. | Organic electroluminescent element and planar light-emitting unit |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2356372B1 (de) | 2008-12-11 | 2016-08-10 | OSRAM OLED GmbH | Organische leuchtdiode und beleuchtungsmittel |
| US8803135B2 (en) * | 2010-06-04 | 2014-08-12 | Mitsui Mining & Smelting Co., Ltd. | Electrode foil and organic device |
| KR101430173B1 (ko) * | 2010-10-19 | 2014-08-13 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 |
| US9934836B2 (en) * | 2011-06-27 | 2018-04-03 | Thin Film Electronics Asa | Short circuit reduction in an electronic component comprising a stack of layers arranged on a flexible substrate |
| EP2794814B1 (de) | 2011-12-19 | 2017-10-18 | InovisCoat GmbH | Leuchtelemente mit einer elektrolumineszenzanordnung sowie verfahren zur herstellung eines leuchtelements |
| DE102012109228A1 (de) * | 2012-09-28 | 2014-04-03 | Osram Opto Semiconductors Gmbh | Verfahren zum Ermitteln der Permeabilität einer dielektrischen Schicht eines optoelektronischen Bauelementes; Vorrichtung zum Ermitteln der Permeabilität einer dielektrischen Schicht eines optoelektronischen Bauelementes; optoelektronisches Bauelement und Verfahren zum Herstellen eines optoelektronischen Bauelementes |
| KR102083448B1 (ko) * | 2012-12-20 | 2020-03-03 | 삼성디스플레이 주식회사 | 기상 증착 장치, 이를 이용한 증착 방법 및 유기 발광 표시 장치 제조 방법 |
| US8921839B2 (en) * | 2013-03-12 | 2014-12-30 | Sharp Laboratories Of America, Inc. | Light emitting device with spherical back mirror |
| US9356256B2 (en) * | 2013-07-31 | 2016-05-31 | Samsung Display Co., Ltd. | Flexible display device and manufacturing method thereof |
| KR102253531B1 (ko) * | 2014-07-25 | 2021-05-18 | 삼성디스플레이 주식회사 | 표시 장치 및 그 제조 방법 |
| CN109994643B (zh) * | 2018-01-02 | 2021-02-02 | 京东方科技集团股份有限公司 | 有机发光二极管器件及其制造方法、显示基板、显示装置 |
| US20220209166A1 (en) * | 2019-04-11 | 2022-06-30 | Sharp Kabushiki Kaisha | Light-emitting element and display device |
| CN110943184B (zh) * | 2019-12-13 | 2022-08-16 | 昆山国显光电有限公司 | 显示面板及其制造方法、蒸镀掩模版组及显示装置 |
| CN115275779A (zh) * | 2022-07-13 | 2022-11-01 | 常州承芯半导体有限公司 | 垂直腔面发射激光器及其形成方法 |
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| JPH11339969A (ja) * | 1998-05-22 | 1999-12-10 | Tdk Corp | 有機el素子 |
| CA2353506A1 (en) * | 1998-11-02 | 2000-05-11 | 3M Innovative Properties Company | Transparent conductive oxides for plastic flat panel displays |
| US6633121B2 (en) * | 2000-01-31 | 2003-10-14 | Idemitsu Kosan Co., Ltd. | Organic electroluminescence display device and method of manufacturing same |
| US20020110673A1 (en) * | 2001-02-14 | 2002-08-15 | Ramin Heydarpour | Multilayered electrode/substrate structures and display devices incorporating the same |
| US7074501B2 (en) * | 2001-08-20 | 2006-07-11 | Nova-Plasma Inc. | Coatings with low permeation of gases and vapors |
| JP4383077B2 (ja) * | 2003-03-31 | 2009-12-16 | 大日本印刷株式会社 | ガスバリア性基板 |
| US7229703B2 (en) | 2003-03-31 | 2007-06-12 | Dai Nippon Printing Co. Ltd. | Gas barrier substrate |
| US6888172B2 (en) * | 2003-04-11 | 2005-05-03 | Eastman Kodak Company | Apparatus and method for encapsulating an OLED formed on a flexible substrate |
| EP1712109A4 (en) | 2003-12-30 | 2008-03-19 | Agency Science Tech & Res | FLEXIBLE ELECTROLUMINESCENT FACILITIES |
| KR100666550B1 (ko) | 2004-04-07 | 2007-01-09 | 삼성에스디아이 주식회사 | 평판표시장치 및 그의 제조방법 |
| DE102004022004B4 (de) * | 2004-05-03 | 2007-07-05 | Novaled Ag | Schichtanordnung für eine organische lichtemittierende Diode |
| JP2006024535A (ja) | 2004-07-09 | 2006-01-26 | Seiko Epson Corp | 有機薄膜素子の製造方法、電気光学装置の製造方法及び電子機器の製造方法 |
| US7504770B2 (en) * | 2005-02-09 | 2009-03-17 | Osram Opto Semiconductors Gmbh | Enhancement of light extraction with cavity and surface modification |
| JP4830411B2 (ja) | 2005-09-07 | 2011-12-07 | 株式会社豊田自動織機 | 有機el装置の製造方法 |
| US7597603B2 (en) * | 2005-12-06 | 2009-10-06 | Corning Incorporated | Method of encapsulating a display element |
| CN100585771C (zh) * | 2005-12-06 | 2010-01-27 | 康宁股份有限公司 | 包封显示元件的方法 |
| DE102006060781B4 (de) * | 2006-09-29 | 2021-09-16 | Pictiva Displays International Limited | Organisches Leuchtmittel |
| JP2008311059A (ja) | 2007-06-14 | 2008-12-25 | Rohm Co Ltd | 有機エレクトロルミネセンス素子及びその製造方法 |
-
2008
- 2008-10-27 DE DE102008053326A patent/DE102008053326A1/de not_active Withdrawn
-
2009
- 2009-07-21 WO PCT/DE2009/001022 patent/WO2010009716A2/de not_active Ceased
- 2009-07-21 US US13/055,901 patent/US8772818B2/en active Active
- 2009-07-21 CN CN200980129404.8A patent/CN102106018B/zh active Active
- 2009-07-21 KR KR1020117004233A patent/KR101596070B1/ko active Active
- 2009-07-21 EP EP09775996.3A patent/EP2308117B1/de active Active
- 2009-07-21 JP JP2011519037A patent/JP5794915B2/ja active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012054225A (ja) * | 2010-08-04 | 2012-03-15 | Canon Inc | 表示装置 |
| US20140306211A1 (en) * | 2011-11-14 | 2014-10-16 | Konica Minolta, Inc. | Organic electroluminescent element and planar light-emitting unit |
| US9236583B2 (en) * | 2011-11-14 | 2016-01-12 | Konica Minolta, Inc. | Organic electroluminescent element and planar light-emitting unit |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102106018B (zh) | 2015-04-22 |
| KR101596070B1 (ko) | 2016-02-19 |
| JP5794915B2 (ja) | 2015-10-14 |
| WO2010009716A3 (de) | 2010-05-14 |
| EP2308117A2 (de) | 2011-04-13 |
| US8772818B2 (en) | 2014-07-08 |
| KR20110055568A (ko) | 2011-05-25 |
| US20110260201A1 (en) | 2011-10-27 |
| DE102008053326A1 (de) | 2010-01-28 |
| EP2308117B1 (de) | 2019-12-11 |
| JP2011529244A (ja) | 2011-12-01 |
| CN102106018A (zh) | 2011-06-22 |
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