WO2010001542A1 - 圧電磁器組成物及びこれを用いた圧電素子 - Google Patents
圧電磁器組成物及びこれを用いた圧電素子 Download PDFInfo
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- WO2010001542A1 WO2010001542A1 PCT/JP2009/002817 JP2009002817W WO2010001542A1 WO 2010001542 A1 WO2010001542 A1 WO 2010001542A1 JP 2009002817 W JP2009002817 W JP 2009002817W WO 2010001542 A1 WO2010001542 A1 WO 2010001542A1
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- 239000000919 ceramic Substances 0.000 title claims abstract description 89
- 239000000203 mixture Substances 0.000 title claims abstract description 84
- 239000013078 crystal Substances 0.000 claims abstract description 28
- 229910052797 bismuth Inorganic materials 0.000 claims abstract description 18
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 17
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 13
- -1 particularly Substances 0.000 abstract description 3
- 239000011651 chromium Substances 0.000 description 24
- 239000000843 powder Substances 0.000 description 24
- 239000010936 titanium Substances 0.000 description 23
- 239000011734 sodium Substances 0.000 description 18
- 239000002994 raw material Substances 0.000 description 15
- 238000002441 X-ray diffraction Methods 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 10
- 229910010413 TiO 2 Inorganic materials 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- 239000002002 slurry Substances 0.000 description 6
- 230000006866 deterioration Effects 0.000 description 5
- 239000011812 mixed powder Substances 0.000 description 5
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 4
- 229910052788 barium Inorganic materials 0.000 description 4
- 229910000424 chromium(II) oxide Inorganic materials 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 229910052712 strontium Inorganic materials 0.000 description 4
- 238000009694 cold isostatic pressing Methods 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
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- 239000002184 metal Substances 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 3
- 238000004876 x-ray fluorescence Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910000416 bismuth oxide Inorganic materials 0.000 description 2
- 229910000423 chromium oxide Inorganic materials 0.000 description 2
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 2
- 239000002612 dispersion medium Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
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- 239000007788 liquid Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 description 2
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241001272720 Medialuna californiensis Species 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001622 bismuth compounds Chemical class 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002609 medium Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
- C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
- C04B35/475—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on bismuth titanates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3201—Alkali metal oxides or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3241—Chromium oxides, chromates, or oxide-forming salts thereof
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/327—Iron group oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3275—Cobalt oxides, cobaltates or cobaltites or oxide forming salts thereof, e.g. bismuth cobaltate, zinc cobaltite
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/604—Pressing at temperatures other than sintering temperatures
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/176—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of ceramic material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8561—Bismuth based oxides
Definitions
- the present invention relates to a piezoelectric ceramic composition and a piezoelectric element using the same. More specifically, the present invention relates to a piezoelectric ceramic composition containing Na, Bi and Ti and not containing Pb, and a piezoelectric element using the same.
- Piezoelectric ceramics that are currently practical and widely used are represented by lead titanate (hereinafter simply referred to as “PT”), lead zirconate titanate (hereinafter simply referred to as “PZT”), and the like. It is a lead piezoelectric ceramic.
- PT lead titanate
- PZT lead zirconate titanate
- Pb lead
- the environmental impact at each stage of manufacturing, during and after use has become an issue.
- the piezoelectric ceramic has a Curie point, and the piezoelectricity disappears in a range exceeding the Curie point.
- leaded piezoelectric ceramics have a Curie point of about 200 to 500 ° C., and therefore piezoelectric ceramics that can be used at higher temperatures are demanded.
- a bismuth layered structure ferroelectric ⁇ (Na0.5Bi4.5Ti4O15) (hereinafter also simply referred to as “NBT”) ⁇ is known as a piezoelectric ceramic capable of meeting such requirements. Since NBT has a high Curie point of about 670 ° C. and higher than that of PT and PZT, it is expected as a lead-free piezoelectric ceramic that can be used at a high temperature exceeding 500 ° C.
- the piezoelectric ceramics mainly composed of NBT are disclosed in the following patent documents 1 to 3 and non-patent documents 1 and 2.
- the NBT has a high Curie point in the lead-free composition as described above, there is a problem that the piezoelectric strain constant (d constant) is small. That is, there is a problem that the amount of displacement with respect to the applied voltage is small and it is difficult to apply to a sensor (for example, a pressure sensor).
- a material having crystal structure anisotropy such as NBT can generally improve the piezoelectric strain constant by performing an orientation treatment.
- it is necessary to perform hot pressing or the like for the alignment treatment and there is a problem that the manufacturing process is complicated and the manufacturing cost is high.
- the present invention has been made in view of the above conventional technique, and an object thereof is to provide a piezoelectric ceramic composition having high heat resistance and a large piezoelectric strain constant, and a piezoelectric element using the same.
- [1] contains Na, Bi, Ti, Cr and O
- a, b, c and d represent molar ratios, 0.030 ⁇ a ⁇ 0.042, 0.330 ⁇ b ⁇ 0.370, 0.580 ⁇ c ⁇ 0.620, 0 ⁇ d.
- a piezoelectric element comprising: a piezoelectric body made of the piezoelectric ceramic composition according to any one of [1] to [6] above; and at least a pair of electrodes in contact with the piezoelectric body.
- a piezoelectric ceramic having a high Curie point and excellent heat resistance and a large piezoelectric strain constant can be obtained without containing lead. Furthermore, these piezoelectric characteristics can be obtained in a non-oriented state (a state in which the orientation of crystal grains is substantially absent). Further, in the above piezoelectric ceramic composition, a composition system containing Na, Bi, Ti, Cr and O was applied without substantially reducing the Curie point by making the Group 2 element substantially free. The effect of increasing the Curie point is surely brought.
- substantially free means that the Group 2 element of the periodic table cannot be detected or identified even by X-ray fluorescence analysis (XRF). .
- the piezoelectric ceramic composition when the Cr content in terms of CrO 3/2 is 1.00% by mass or less (more preferably 0.35% by mass or less), particularly excellent heat resistance and A piezoelectric ceramic having a piezoelectric strain constant can be obtained. According to the piezoelectric element of the present invention, it is possible to obtain piezoelectric characteristics that have excellent heat resistance due to a high Curie point and a large piezoelectric strain constant without containing lead.
- Piezoelectric ceramic composition contains Na, Bi, Ti, Cr and O
- a piezoelectric ceramic composition wherein the content ratio of the Na, Bi, Ti, and Cr in terms of oxides is within the following composition range (1).
- the piezoelectric ceramic composition contains Na, Bi, Ti, Cr and O, and among these, the metal elements are Na 2 O, Bi 2 O 3 , TiO 2 and CrO 2/3 , respectively.
- a, b, c, and d representing the molar ratio of each oxide satisfy the following relationships (3) to (7) at the same time.
- the above “a” is the total content of Na, Bi, Ti and Cr contained in the piezoelectric ceramic composition, converted into oxides of Na 2 O, Bi 2 O 3 , TiO 2 and CrO 3/2 , respectively.
- This “a” is 0.030 ⁇ a ⁇ 0.042.
- “A” within the above range is preferable because the piezoelectric strain constant can be further increased.
- the above “b” is the total content of Na, Bi, Ti and Cr contained in the present piezoelectric ceramic composition, converted into oxides of Na 2 O, Bi 2 O 3 , TiO 2 and CrO 3/2 , respectively.
- This “b” is 0.330 ⁇ b ⁇ 0.370.
- “B” within the above range is preferable because the piezoelectric strain constant can be further increased.
- the above “c” is the total content of Na, Bi, Ti and Cr contained in the piezoelectric ceramic composition converted into oxides of Na 2 O, Bi 2 O 3 , TiO 2 and CrO 3/2 , respectively.
- This “c” is 0.580 ⁇ c ⁇ 0.620.
- “C” within the above range is preferable because the piezoelectric strain constant can be further increased.
- the above “d” is the total content of Na, Bi, Ti and Cr contained in the piezoelectric ceramic composition, converted into respective oxides of Na 2 O, Bi 2 O3, TiO 2 and CrO 3/2 , respectively. Content ratio of CrO 3/2 with respect to ⁇ molar ratio, d / (a + b + c + d) ⁇ .
- This “d” is 0 ⁇ d ⁇ 0.017.
- the piezoelectric strain constant is particularly large, and excellent piezoelectric characteristics can be obtained.
- d> 0.017 the piezoelectric strain constant tends to be small. This is presumably because the crystal strain of the bismuth layer structure ferroelectric becomes excessively large and the crystal structure itself becomes unstable.
- the range of “d” is preferably 0 ⁇ d ⁇ 0.017, and more preferably 0 ⁇ d ⁇ 0.010.
- the piezoelectric ceramic composition of the present invention preferably comprises a bismuth layered structure ferroelectric as a main crystal phase.
- the bismuth layered structure ferroelectric in the present invention has a crystal structure in which [(Bi 2 O 2 ) 2+ ] and [(X m-1 Ti m O 3m + 1 ) 2- ] are alternately laminated in layers.
- the bismuth layered structure ferroelectric ceramic is a Na 0.5 Bi 4.5 Ti 4 O 15 type crystal. Thereby, particularly excellent heat resistance and piezoelectric strain constant can be obtained.
- the main crystal phase is substantially composed of a bismuth layer-structured ferroelectric material in an X-ray diffraction chart obtained by X-ray diffraction measurement of a piezoelectric ceramic composition as in Examples described later. Means. Further, it is particularly preferable that the crystal phase only be included.
- the Cr content when the entire piezoelectric ceramic composition is 100% by mass is preferably greater than 0% by mass and equal to or less than 1.00% by mass when converted to CrO 3/2 . That is, when the CrO 3/2 equivalent content is MCr (mass%), 0 ⁇ MCr ⁇ 1.00. In this range, the piezoelectric strain constant is particularly large, and excellent piezoelectric characteristics can be obtained. When MCr> 1.00, the piezoelectric strain constant tends to be small. This is presumably because the crystal strain of the bismuth layer structure ferroelectric becomes excessively large and the crystal structure itself becomes unstable.
- a ferroelectric material having a bismuth layer structure can be generated with extremely high efficiency by containing Cr in the composition having piezoelectric characteristics formed of Na, Bi, Ti and O.
- a crystal represented by Na 0.5 Bi 4.5 Ti 4 O 15 (NBT) is generated, and an impurity phase that is easily formed during the generation of this crystal is generated. It is thought that the action which suppresses is especially strong. That is, for example, this impurity phase includes crystals of Bi 4 Ti 3 O 12 , Bi 0.5 Na 0.5 TiO 3, and the like.
- the piezoelectric ceramic composition of the present invention can exhibit the above-described excellent heat resistance and excellent piezoelectric strain constant even when the orientation of crystal grains is non-oriented in the case of a polycrystal. .
- the composition of the piezoelectric ceramic composition in the present invention is 0.030 ⁇ a ⁇ 0. From the viewpoint that a piezoelectric strain constant (d33) of 20 pC / N or more can be maintained even after heat treatment at 600 ° C. for 1 hour. 042, 0.330 ⁇ b ⁇ 0.370, 0.580 ⁇ c ⁇ 0.620, 0 ⁇ d ⁇ 0.017, and CrO 3/2 equivalent content MCr is preferably 0 ⁇ MCr ⁇ 0.70. .
- the method for producing the piezoelectric ceramic composition of the present invention is not particularly limited, it is usually a mixed raw material powder (oxide, carbonate, bicarbonate, nitrate, etc.) containing each metal element so as to be in the composition range (1). ), And calcined at a temperature lower than the firing temperature, and then fired at a temperature of 1000 ° C. or higher (maximum temperature). More specifically, first, raw material powders of sodium carbonate as the Na source, bismuth oxide as the Bi source, titanium oxide as the Ti source, and chromium oxide as the Cr source are prepared.
- each raw material powder is weighed so as to be in the composition range (1) and wet-mixed with a dispersion medium (such as ethanol) by a mixer (such as a ball mill) to obtain a slurry. Subsequently, the obtained slurry is dried to obtain the raw material mixed powder.
- a dispersion medium such as ethanol
- a mixer such as a ball mill
- the obtained slurry is dried to obtain the raw material mixed powder.
- the raw material which does not contain a Group 2 element as an impurity as little as possible, or does not contain at all shall be used.
- the raw material mixed powder is calcined (for example, 600 ° C. to 1000 ° C., 10 minutes to 300 minutes in an air atmosphere) to obtain a calcined powder.
- this calcined powder is further wet pulverized by a mixer (such as a ball mill) together with an organic binder (such as polyvinyl alcohol and polyvinyl butyral) and a dispersion medium (such as alcohols and ethers) to obtain a slurry. Thereafter, the obtained slurry is dried and then granulated to obtain a granulated powder.
- a mixer such as a ball mill
- an organic binder such as polyvinyl alcohol and polyvinyl butyral
- a dispersion medium such as alcohols and ethers
- the granulated powder is molded into a predetermined shape to obtain a molded body.
- the molding conditions for this molding are not particularly limited, but it is preferable to perform uniaxial molding at about 30 MPa and then perform cold isostatic pressing (CIP) treatment at about 150 MPa. Then, the sintered compact which consists of the piezoelectric ceramic composition of this invention is obtained by baking the obtained molded object.
- the piezoelectric element of the present invention includes a piezoelectric body made of the piezoelectric ceramic composition of the present invention and at least a pair of electrodes in contact with the piezoelectric body.
- the above-mentioned “piezoelectric body” is a piezoelectric ceramic made of the piezoelectric ceramic composition of the present invention, and is a portion that exhibits piezoelectric characteristics in the piezoelectric element.
- the shape and size of the piezoelectric body are not particularly limited, and it is preferable that the piezoelectric body be appropriately selected depending on the pressure-sensitive use and the oscillation use.
- the planar shape may be various shapes such as a flat plate shape such as a square shape or a circular shape, a flat plate shape with a through hole provided in the central portion in the thickness direction, a prismatic shape, or a cylindrical shape.
- the piezoelectric element of the present invention may be configured by laminating a plurality of piezoelectric bodies having these shapes.
- the “pair of electrodes” is a conductor layer formed in contact with the surface of the piezoelectric body.
- Each of the electrodes may be formed on one surface and the other surface when the piezoelectric body is plate-shaped, and each electrode may be formed on the same surface of the piezoelectric body.
- the shape, size, material, and the like of the electrode are not particularly limited, and it is preferable that the electrode be appropriately selected depending on the size, application, and the like of the piezoelectric body.
- the shape of the electrodes may be planar, and in particular, when each of the pair of electrodes is formed on the same surface of the piezoelectric body, it may be comb-shaped or half-moon shaped.
- the method for forming this electrode is not particularly limited, but it is usually obtained by applying a conductive paste to a desired surface of a piezoelectric body and then baking it.
- a piezoelectric element 200 is shown in FIG. 3 as an example of the piezoelectric element.
- the piezoelectric element 200 is formed in a disk shape and has a through hole 130 in the center, and a conductor 100 is formed on the front and rear surfaces of the piezoelectric body 100 made of the piezoelectric ceramic composition of the present invention.
- Layers 301 and 302 (a pair of electrodes).
- the conductor layer is obtained by applying a conductive paste to a polished surface obtained by parallel polishing the surface of the sintered body made of the piezoelectric ceramic composition of the present invention, and baking it (for example, 600 to 800 ° C.). For 10 minutes).
- the conductive paste can be prepared using glass frit, a conductive component, and an organic medium. By including the glass frit, the bonding strength between the piezoelectric body and the electrode can be improved.
- the conductive component there can be used a powder made of a noble metal such as silver, gold, palladium, platinum, a mixed powder containing two or more of these powders, a powder made of an alloy of two or more kinds of noble metals, and the like.
- powders made of copper, nickel, etc., or mixed powders thereof, and powders made of alloys of these metals can also be used.
- the piezoelectric element of the present invention can obtain the piezoelectric characteristics by performing polarization treatment.
- the polarization treatment is usually placed in an insulating environment maintained at a predetermined temperature (for example, in a highly insulating liquid (such as silicone oil or fluorinate liquid kept at 25 to 250 ° C.)), and 1 to This can be done by applying an electric field of 10 kV / mm for 1 to 60 minutes.
- Example 1 As raw powders, sodium carbonate (Na 2 CO 3 , purity 99.53%), bismuth oxide (Bi 2 O 3 , purity 98.8%), titanium oxide (TiO 2 , purity 99.0%) and chromium oxide ( Cr 2 O 3 (purity 99.8%) was used, and each raw material powder was weighed so as to have a molar ratio shown in Table 1 below (Examples; Experimental Examples 2 to 6, Comparative Examples; Experimental Examples 1 and 7). Thereafter, the slurry obtained by wet mixing with ethanol for 15 hours in a ball mill was dried in hot water to obtain a raw material mixed powder.
- the obtained pulverized raw material was calcined at 800 ° C. for 120 minutes to obtain a calcined powder, and further added with an organic binder and ethanol, and the slurry obtained by wet mixing with a ball mill for 15 hours was obtained. Dried and then granulated to obtain a granulated powder.
- a powder in which a Group 2 element could not be detected or identified even when an ICP emission analysis was performed after obtaining a sintered body to be described later was used.
- the obtained granulated powder was uniaxially pressed at a pressure of 30 MPa to obtain a disk-shaped molded body having a diameter of 20 mm and a thickness of 3 mm. Thereafter, the compact was subjected to cold isostatic pressing (CIP treatment) at a pressure of 150 MPa, and then fired at a firing temperature of 1150 ° C. for 120 minutes to obtain sintered bodies of Experimental Examples 1 to 7. .
- CIP treatment cold isostatic pressing
- each obtained sintered body was planar polished. Thereafter, a conductive paste prepared using glass frit (including SiO 2 , Al 2 O 3 , ZnO and TiO 2 ), silver powder and butyl carbitol acetate was applied to both the front and back polished surfaces of the molded body. A pair of electrodes was formed by baking at 700 ° C. for 20 minutes. Next, each element having an electrode on the surface of the sintered body was subjected to a polarization treatment by applying an electric field of 9 kV / mm for 30 minutes in an insulating oil at 150 ° C. Obtained.
- the piezoelectric strain constant (d33) was measured, and after heat-treating it at 600 ° C. for 1 hour, the piezoelectric strain constant (d33) was measured again.
- the piezoelectric strain constant (d33) was measured in accordance with EMAS-6100 by using an impedance analyzer (manufactured by Hewlett-Packard Co., model “4194A”) and standing in a thermostat holding the piezoelectric element at a temperature of 20 ° C. .
- the obtained results are shown in Table 2.
- the correlation between the Cr content and the piezoelectric strain constant before and after the heat treatment is shown as a graph in FIG.
- ⁇ 33T / ⁇ 0 relative permittivity
- Qm value mechanical quality factor
- kt value electromechanical coupling factor
- the maintenance ratio is 86 Very good at 7-90.7%. That is, it can be seen that the film has excellent heat resistance even at 600 ° C.
- the piezoelectric ceramic compositions of Experimental Examples 2 to 6 were confirmed to be non-oriented. That is, it can be seen that the above-described various excellent characteristics are sufficiently exhibited even in a non-oriented state.
- Example 2 Composition of the piezoelectric ceramic composition (piezoelectric element) of Experimental Example 2 of Example 1 and the piezoelectric ceramic composition (piezoelectric element) of Experimental Example 2 containing Group 2 metals Ba and Sr
- Tc Curie point
- d33 initial piezoelectric strain constant
- d33 piezoelectric strain constant
- the main component NBT is expressed as (Na 0.5 Bi 0.5 ) Bi 4 Ti 4 O 15 (Na 0.5 Bi). 0.5 ) was replaced with 25 mol% Ba, and the raw material powder was adjusted so that the raw material powder was adjusted to Experimental Example 8, and (Na 0.5 Bi 0.5 ) was replaced with 25 mol% Sr.
- the Curie point (Curie temperature) Tc was measured using an impedance analyzer (type “4194A” manufactured by Hewlett-Packard Company) and an electric furnace. Further, in the same manner as in Example 1 described above, the piezoelectric strain constant (d33) at the initial stage (before heat treatment) of the piezoelectric element and the piezoelectric strain constant (d33) after heat treatment at 600 ° C. for 1 hour are used. Was measured. The obtained results are shown in Table 3. In addition, in the piezoelectric elements of Experimental Examples 8 and 9, when fluorescent X-ray analysis was separately performed on the portion of the sintered body, Ba and Sr components were detected.
- the piezoelectric ceramic composition of the present invention and piezoelectric elements using the same are widely used for pressure detection applications, vibration detection applications, oscillation applications, piezoelectric device applications, and the like. More specifically, it is suitable as a piezoelectric transformer, a resonator, a combustion pressure sensor, a knocking sensor, a pressure sensor, an ultrasonic sensor, a load sensor, an ultrasonic motor, a piezoelectric gyro sensor, a piezoelectric vibrator and an actuator.
- it has a high mechanical quality factor and good temperature dependence of the resonance frequency, so it can be used as a piezoelectric transformer and a resonator or in a high temperature part such as the vicinity of a combustion chamber of an automobile and can be used stably for a long period of time. It is suitable as a high-temperature sensor component such as a combustion pressure detection sensor.
- Piezoelectric body made of a piezoelectric ceramic composition 130 Through-hole 200 Piezoelectric element 301, 302 Conductor layer (a pair of electrodes).
Abstract
Description
また、圧電磁器にはキュリー点が存在し、このキュリー点を越える範囲では圧電性が消失してしまう。一般に、有鉛圧電磁器では、キュリー点が200~500℃程度であるため、更なる高温で使用可能な圧電磁器が求められている。
また、NBTのような結晶構造異方性を有する材料については、一般に配向処理を施すことによって圧電歪定数を向上できることが知られている。しかし、配向処理にはホットプレス等を行なう必要があり、製造工程が複雑化し且つ製造コストがかかるという課題がある。
〔1〕Na、Bi、Ti、Cr及びOを含有し、
Na、Bi、Ti及びCrの酸化物換算による含有比が下記組成範囲(1)内であることを特徴とする圧電磁器組成物。
aNa2O-bBi2O3-cTiO2-dCrO3/2 ・・・ (1)
(但し、a、b、c及びdは、モル比を表し、0.030≦a≦0.042、0.330≦b≦0.370、0.580≦c≦0.620、0<d≦0.017、a+b+c+d=1である。)
〔2〕第2族元素が実質的に無含有である上記〔1〕記載の圧電磁器組成物。
〔3〕ビスマス層状構造強誘電体を主結晶相とする上記〔1〕又は〔2〕に記載の圧電磁器組成物。
〔4〕Na0.5Bi4.5Ti4O15型結晶を主結晶相とする上記〔3〕に記載の圧電磁器組成物。
〔5〕本圧電磁器組成物全体を100質量%とした場合に、CrO3/2換算によるCrの含有量が1.00質量%以下である上記〔1〕乃至〔4〕のいずれか1つに記載の圧電磁器組成物。
〔6〕本圧電磁器組成物全体を100質量%とした場合に、CrO3/2換算によるCrの含有量が0.35質量%以下である上記〔1〕乃至〔4〕のいずれか1つに記載の圧電磁器組成物。
〔7〕上記〔1〕乃至〔6〕のいずれか1つに記載の圧電磁器組成物からなる圧電体と、該圧電体と接する少なくとも一対の電極と、を備えることを特徴とする圧電素子。
また、上記の圧電磁器組成物においては、第2族元素を実質的に無含有とすることで、キュリー点の低下がなく、Na、Bi、Ti、Cr及びOを含有する組成系を適用した際のキュリー点が高くなる効果が確実にもたらされる。また、圧電磁器組成物が高熱に晒された際にも、第2族元素を実質的に無含有とすることで、圧電歪定数(d33)の劣化の度合を実使用下で問題のない範囲内に抑えられるというメリットが得られる。なお、本発明において、「実質的に無含有」とは、蛍光X線分析(XRF ; X-ray fluorescence analysis)によっても周期表の第2族元素が検出ないし同定できないことを意味するものである。
また、上記の圧電磁器組成物においては、Na0.5Bi4.5Ti4O15型結晶を主結晶相とする場合には、特に優れた耐熱性及び圧電歪定数を有する圧電磁器を得ることができる。
本発明の圧電素子によれば、鉛を含有することなく、高いキュリー点による優れた耐熱性を有すると共に大きな圧電歪定数を有する圧電特性が得られる。
本発明の圧電磁器組成物は、Na、Bi、Ti、Cr及びOを含有し、
上記Na、Bi、Ti及びCrの酸化物換算による含有比が下記組成範囲(1)内であることを特徴とする圧電磁器組成物。
aNa2O-bBi2O3-cTiO2-dCrO3/2 ・・・ (1)
(但し、a、b、c及びdは、モル比を表し、0.030≦a≦0.042、0.330≦b≦0.370、0.580≦c≦0.620、0<d≦0.017、a+b+c+d=1である。)
aNa2O-bBi2O3-cTiO2-dCrO2/3 ・・・ (2)
0.030≦a≦0.042 ・・・ (3)
0.330≦b≦0.370 ・・・ (4)
0.580≦c≦0.620 ・・・ (5)
0<d≦0.017 ・・・ (6)
a+b+c+d=1 ・・・ (7)
更に、本発明の圧電磁器組成物は、多結晶体である場合に結晶粒子の配向が無配向な状態であっても、前述の優れた耐熱特性及び優れた圧電歪定数を発揮させることができる。
更に詳しくは、まず、原料粉末として、上記Na源として炭酸ナトリウム、上記Bi源として酸化ビスマス、上記Ti源として酸化チタン、上記Cr源として酸化クロムの各原料粉末を用意する。その後、各原料粉末が上記組成範囲(1)となるように秤量し、分散媒(エタノール等)と共に混合機(ボールミル等)により湿式混合を行って泥漿を得る。次いで、得られた泥漿を乾燥させて上記原料混合粉末が得られる。なお、原料粉末としては、不純物として第2族元素を極力少量しか含まない、あるいは、全く含まない原料を用いるものとする。
本発明の圧電素子は、本発明の圧電磁器組成物からなる圧電体と、該圧電体と接する少なくとも一対の電極と、を備えることを特徴とする。
(実施例1)
原料粉末として、炭酸ナトリウム(Na2CO3、純度99.53%)、酸化ビスマス(Bi2O3、純度98.8%)、酸化チタン(TiO2、純度99.0%)及び酸化クロム(Cr2O3、純度99.8%)を用い、下記表1(実施例;実験例2~6、比較例;実験例1及び7)に示すモル比となるように各原料粉末を秤量した後、ボールミルにてエタノールと共に15時間湿式混合して得られた泥漿を湯煎乾燥して原料混合粉末を得た。その後、得られた原料粉砕物を、800℃で120分間仮焼し、仮焼粉末とした後、更に有機バインダとエタノールとを加え、ボールミルにより15時間の湿式混合を行って得られた泥漿を乾燥し、次いで、造粒して造粒粉末を得た。なお、上記の各原料粉末においては、後述する焼結体を得た後に、ICP発光分析を行った場合にも、第2族元素が検出ないし同定できない粉末を用いた。
一方、本発明の実施例である実験例2~6は、d33は30~33.3pC/Nと極めて大きく、kt値は27.8~35.1%と非常に良好であり、尚かつ、Qm値は2800~4800と非常に大きいことが分かる。更に、これらの実験例2~6では、X線回折測定の結果、副結晶相は認められず、Na0.5Bi4.5Ti4O15で示されるビスマス層状構造強誘電体が認められた。
加えて、実験例2~6の圧電磁器組成物について無配向であることが確認された。即ち、上記優れた各種特性はいずれも無配向な状態であっても十分に発揮されていることが分かる。
実施例1の実験例2の圧電磁器組成物(圧電素子)と、この実験例2の圧電磁器組成物(圧電素子)に対して第2族金属であるBa,Srを含有させたときの組成(比較例)とについて、それぞれキュリー点(Tc)と、初期(換言すれば、熱処理前)の圧電歪定数(d33)と、600℃、1時間の熱処理した後の圧電歪定数(d33)を測定した。
なお、実験例2の圧電磁器組成物をなす原料粉末は、上記の実施例1と同様のものである。また、実験例2の圧電磁器組成物の組成をベースにしつつ、主成分をなすNBTを(Na0.5Bi0.5)Bi4Ti4O15と表したときに(Na0.5Bi0.5)が25mol%Baに置換されるように原料粉末を調整したものを実験例8、(Na0.5Bi0.5)が25mol%Srに置換されるように原料粉末を調整したものを実験例9として、それぞれ準備した。
そして、これらの原料粉末を用いて、実施例1と同様の手順で調製し、それぞれの圧電素子を得た。
この結果から、前記組成範囲(1)となるように、Na、Bi、Ti、Cr及びOを含む本発明の圧電磁器組成物において、第2族元素を実質的に無含有とすることで、キュリー点の低下を招くことなく、圧電歪定数(d33)の劣化の度合が小さく抑えられることが分かった。
130 貫通孔
200 圧電素子
301,302 導体層(一対の電極)。
Claims (7)
- Na、Bi、Ti、Cr及びOを含み、
Na、Bi、Ti及びCrの酸化物換算による含有比が下記組成範囲(1)内であることを特徴とする圧電磁器組成物。
aNa2O-bBi2O3-cTiO2-dCrO3/2 ・・・ (1)
(但し、a、b、c及びdは、モル比を表し、0.030≦a≦0.042、0.330≦b≦0.370、0.580≦c≦0.620、0<d≦0.017、a+b+c+d=1である。) - 請求項1に記載の圧電磁器組成物であって、
第2族元素が実質的に無含有であることを特徴とする圧電磁器組成物。 - 請求項1又は請求項2に記載の圧電磁器組成物であって、
ビスマス層状構造強誘電体を主結晶相とする圧電磁器組成物。 - 請求項3に記載の圧電磁器組成物であって、
Na0.5Bi4.5Ti4O15型結晶を主結晶相とする圧電磁器組成物。 - 請求項1乃至請求項4のいずれか1項に記載の圧電磁器組成物であって、
本圧電磁器組成物全体を100質量%とした場合に、CrO3/2換算によるCrの含有量が1.00質量%以下である圧電磁器組成物。 - 請求項1乃至請求項4のいずれか1項に記載の圧電磁器組成物であって、
本圧電磁器組成物全体を100質量%とした場合に、CrO3/2換算によるCrの含有量が0.35質量%以下である圧電磁器組成物。 - 請求項1乃至請求項6のいずれか1項に記載の圧電磁器組成物からなる圧電体と、該圧電体と接する少なくとも一対の電極と、を備えることを特徴とする圧電素子。
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US7009328B2 (en) * | 2003-06-20 | 2006-03-07 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device made of piezoelectric/electrostrictive film and manufacturing method |
JP5051996B2 (ja) * | 2005-10-25 | 2012-10-17 | 日本碍子株式会社 | 圧電/電歪膜保持体、圧電/電歪膜型素子及びそれらの製造方法 |
US7808161B2 (en) * | 2008-03-25 | 2010-10-05 | Ngk Spark Plug Co., Ltd. | Piezoelectric ceramic composition and piezoelectric device |
-
2009
- 2009-06-22 BR BRPI0905621-1A patent/BRPI0905621B1/pt not_active IP Right Cessation
- 2009-06-22 CN CN2009801016292A patent/CN101918340A/zh active Pending
- 2009-06-22 US US12/747,810 patent/US8142679B2/en not_active Expired - Fee Related
- 2009-06-22 KR KR1020107015520A patent/KR101235434B1/ko active IP Right Grant
- 2009-06-22 EP EP09773120.2A patent/EP2295389B1/en not_active Not-in-force
- 2009-06-22 JP JP2009547001A patent/JP5714819B2/ja not_active Expired - Fee Related
- 2009-06-22 WO PCT/JP2009/002817 patent/WO2010001542A1/ja active Application Filing
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See also references of EP2295389A4 |
TAKENAKA; K.SAKATA: "Grain-Oriented and Mn-Doped (NaBi)(1-x)/2CaxBi4Ti4O15 Ceramics for Piezo- and Pyrosensor Materials", SENSOR AND MATERIALS, vol. 1, 1988, pages 35 - 46 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015096455A (ja) * | 2013-11-15 | 2015-05-21 | 日本特殊陶業株式会社 | 圧電磁器組成物、圧電素子、内燃機関用センサ、及び圧電磁器組成物の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US8142679B2 (en) | 2012-03-27 |
EP2295389A4 (en) | 2011-12-07 |
US20100264355A1 (en) | 2010-10-21 |
KR101235434B1 (ko) | 2013-02-20 |
JPWO2010001542A1 (ja) | 2011-12-15 |
BRPI0905621A2 (pt) | 2015-07-07 |
BRPI0905621B1 (pt) | 2019-05-14 |
JP5714819B2 (ja) | 2015-05-07 |
KR20110038600A (ko) | 2011-04-14 |
EP2295389B1 (en) | 2016-07-20 |
CN101918340A (zh) | 2010-12-15 |
EP2295389A1 (en) | 2011-03-16 |
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