WO2009131051A1 - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- WO2009131051A1 WO2009131051A1 PCT/JP2009/057637 JP2009057637W WO2009131051A1 WO 2009131051 A1 WO2009131051 A1 WO 2009131051A1 JP 2009057637 W JP2009057637 W JP 2009057637W WO 2009131051 A1 WO2009131051 A1 WO 2009131051A1
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- drain
- semiconductor substrate
- schottky
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 143
- 238000004519 manufacturing process Methods 0.000 title claims description 39
- 238000000034 method Methods 0.000 title claims description 19
- 239000000758 substrate Substances 0.000 claims abstract description 103
- 230000004888 barrier function Effects 0.000 claims abstract description 45
- 230000005669 field effect Effects 0.000 claims abstract description 5
- 239000002019 doping agent Substances 0.000 claims description 63
- 229910021332 silicide Inorganic materials 0.000 claims description 26
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 26
- 229910052751 metal Inorganic materials 0.000 claims description 21
- 239000002184 metal Substances 0.000 claims description 21
- 239000012535 impurity Substances 0.000 claims description 11
- 238000005204 segregation Methods 0.000 claims description 7
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052796 boron Inorganic materials 0.000 claims description 4
- 229910052785 arsenic Inorganic materials 0.000 claims description 3
- 229910052691 Erbium Inorganic materials 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 229910052787 antimony Inorganic materials 0.000 claims description 2
- 229910052797 bismuth Inorganic materials 0.000 claims description 2
- 229910052733 gallium Inorganic materials 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 229910052698 phosphorus Inorganic materials 0.000 claims description 2
- 229910052717 sulfur Inorganic materials 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 23
- 125000006850 spacer group Chemical group 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 10
- 229910021334 nickel silicide Inorganic materials 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 238000005468 ion implantation Methods 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 150000004767 nitrides Chemical class 0.000 description 6
- 238000002955 isolation Methods 0.000 description 5
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052735 hafnium Inorganic materials 0.000 description 4
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 238000002513 implantation Methods 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 229910003855 HfAlO Inorganic materials 0.000 description 2
- 229910004129 HfSiO Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- VYBYZVVRYQDCGQ-UHFFFAOYSA-N alumane;hafnium Chemical compound [AlH3].[Hf] VYBYZVVRYQDCGQ-UHFFFAOYSA-N 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- ZXEYZECDXFPJRJ-UHFFFAOYSA-N $l^{3}-silane;platinum Chemical compound [SiH3].[Pt] ZXEYZECDXFPJRJ-UHFFFAOYSA-N 0.000 description 1
- VLJQDHDVZJXNQL-UHFFFAOYSA-N 4-methyl-n-(oxomethylidene)benzenesulfonamide Chemical compound CC1=CC=C(S(=O)(=O)N=C=O)C=C1 VLJQDHDVZJXNQL-UHFFFAOYSA-N 0.000 description 1
- 229910019001 CoSi Inorganic materials 0.000 description 1
- 229910008484 TiSi Inorganic materials 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- 229910021340 platinum monosilicide Inorganic materials 0.000 description 1
- 229910021339 platinum silicide Inorganic materials 0.000 description 1
- 229910021341 titanium silicide Inorganic materials 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/095—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being Schottky barrier gate field-effect transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0688—Integrated circuits having a three-dimensional layout
- H01L27/0694—Integrated circuits having a three-dimensional layout comprising components formed on opposite sides of a semiconductor substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/665—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using self aligned silicidation, i.e. salicide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66643—Lateral single gate silicon transistors with source or drain regions formed by a Schottky barrier or a conductor-insulator-semiconductor structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7839—Field effect transistors with field effect produced by an insulated gate with Schottky drain or source contact
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/6656—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using multiple spacer layers, e.g. multiple sidewall spacers
Definitions
- the present invention relates to a semiconductor device and a manufacturing method thereof, and more particularly to a CMOS transistor having a Schottky junction and a manufacturing method thereof.
- MOSFETs Field-effect MOS transistors
- MOSFETs field-effect MOS transistors
- SBMOSFET Schottky barrier field effect transistor
- FIG. 12A shows the energy band of the substrate surface at the zero bias of the N-type SBMOSFET.
- Vg> 0 and drain voltage Vd> 0 When a bias of gate voltage Vg> 0 and drain voltage Vd> 0 is applied, the result is as shown in FIG.
- Vg> 0 and drain voltage Vd> 0 When a bias of gate voltage Vg> 0 and drain voltage Vd> 0 is applied, the result is as shown in FIG. At this time, electrons are injected from the source silicide 11 into the channel region through a tunnel and travel toward the drain silicide 12.
- the depletion layer extending in the channel region is small compared to the MOSFET using the diffusion layer, the resistance to the short channel effect is increased.
- a side insulating layer is formed in a spacer shape on a side wall of a gate on a gate dielectric layer on a Si substrate, and a source / drain is formed on both sides of a channel in the vicinity of the gate.
- the Schottky barrier height formed between the conduction band of the metal silicide forming the drain, the channel, and the conduction band is described, the Schottky barrier is formed between the end portion of the Schottky source / drain and the portion other than the end portion. Configurations with different heights are not described.
- Patent Document 2 has a structure in which a gate insulating film and a gate electrode are formed on a semiconductor substrate, and a Schottky source / drain is formed on the semiconductor substrate.
- a semiconductor device is described in which the end portion is formed so as not to cover the lower end portion of the gate insulating film, and the Schottky barrier height is aligned with P and NMISFET.
- the Schottky barrier height is different between the end portion and the portion other than the end portion, and that the portion other than the end portion has a larger Schottky barrier height.
- Patent Document 3 describes a semiconductor device in which source / drain regions made of metal silicide are formed, a Schottky barrier is formed between the metal silicide and the silicon substrate, and the Schottky barrier height and the width thereof are substantially small. However, a configuration in which the Schottky barrier height is different between the end portions of the Schottky source / drain and portions other than the end portions is not described.
- SBMOSFET SBMOSFET
- the present invention has been made to solve the above-described conventional problems, and an object of the present invention is to provide a semiconductor device capable of improving the above-described problems and improving the characteristics and reliability of an element, and a method for manufacturing the same. To do.
- a semiconductor device is formed such that a gate electrode formed on a channel formed on a semiconductor substrate via a gate insulating film, and the gate insulating film is sandwiched between upper surfaces of the semiconductor substrate.
- the semiconductor device comprising a Schottky source / drain that forms a Schottky junction with the semiconductor substrate, the end of the Schottky source / drain and the semiconductor
- the Schottky barrier height at the interface with the substrate is different from the Schottky barrier height at the interface between the portion other than the end portions of the Schottky source / drain and the semiconductor substrate.
- a method for manufacturing a Schottky barrier field effect transistor according to the present invention includes a first step of doping a channel impurity in a semiconductor substrate, a second step of forming a gate insulating film on the semiconductor substrate, and the gate insulating film.
- the portions other than the end portions of the Schottky source / drain are provided.
- the above-described SBMOSFET can be obtained by using a resist process, an ion implantation process, and a silicidation process that have already been established in the semiconductor manufacturing process. And cost reduction can be realized.
- FIG. 1 is a cross-sectional view showing a configuration of an N-type SBMOSFET according to the present embodiment.
- An element isolation 2 is formed on a semiconductor substrate (P-type silicon substrate) 1.
- a gate electrode 4 is formed on the semiconductor substrate 1 with a gate insulating film 3 interposed therebetween. Spacers 5 and sidewalls 7 are formed on the side surfaces of the gate insulating film 3 and the gate electrode 4.
- Schottky source / drain 10 formed in a side wall 7 in a self-aligned manner is formed.
- the Schottky source / drain 10 is formed so as to sandwich the gate insulating film 3 in the upper surface of the semiconductor substrate 1, and its end is not formed on the lower end of the gate insulating film 3.
- the Schottky source / drain 10 is made of a metal silicide, and an N-type dopant having a polarity opposite to that in the channel has the same polarity as that in the channel at the interface between the Schottky source / drain end portion 101 and the semiconductor substrate 1.
- the P-type dopant having the same polarity as that in the channel is segregated at the interface between the bottom 102 other than the end portion 101 of the Schottky source / drain 10 and the semiconductor substrate 1.
- the end portion of the Schottky source / drain 10 is compared with the Schottky barrier height at the interface between the end portion 101 of the Schottky source / drain 10 and the semiconductor substrate 1.
- the Schottky barrier height at the interface between the portion 102 other than that and the semiconductor substrate 1 is increased.
- 2 to 5 are process cross-sectional views for explaining a method for manufacturing an N-type SBMOSFET.
- element isolation 2 is formed on a semiconductor substrate (P-type silicon substrate) 1, and a gate insulating film 3 and a gate electrode 4 are formed on the semiconductor substrate 1.
- the gate insulating film 3 may be a silicon oxide film, an HfSiO (hafnium silicate) film having a higher dielectric constant than the silicon oxide film, an HfSiON (hafnium nitride silicate) film that is a nitride film thereof, or an HfAlO (hafnium aluminum) film.
- An insulating film such as a nate) film may be used.
- the gate insulating film thickness can be set to 0.5 to 3 nm when converted to a so-called oxide film equivalent film thickness calculated from electric capacity.
- the gate electrode 4 may be a polysilicon film, a metal gate electrode (such as a metal nitride film such as TiN) in which gate depletion is not in principle, or a laminated film in which a polysilicon film is deposited on the metal gate electrode. But it ’s okay.
- the height of the gate electrode 4 can be about 100 to 150 nm, for example.
- a spacer 5 having a film thickness of, for example, 5 nm to 10 nm is formed on the side surfaces of the gate insulating film 3 and the gate electrode 4, and an N-type dopant such as arsenic is used with the gate electrode 4 and the spacer 5 as a mask.
- an N-type dopant such as arsenic is used with the gate electrode 4 and the spacer 5 as a mask.
- As is ion-implanted to form the N-type diffusion region 6.
- a sidewall 7 having a film thickness of, for example, 25 nm to 50 nm is formed on the side surface of the spacer 5, and an N-type diffusion region is formed by ion implantation using the gate electrode 4, the spacer 5 and the sidewall 7 as a mask.
- a P-type diffusion region 8 is formed by ion-implanting a larger amount of P-type dopant, for example, boron (B), than the amount implanted to form 6.
- the implantation energy may be adjusted so that the P-type dopant is implanted deeper into the substrate than the N-type dopant.
- a metal film 9 for later forming a metal silicide such as nickel (Ni) is formed on the entire surface of the semiconductor substrate 1 with a film thickness of, for example, 10 nm, the entire surface of the semiconductor substrate 1 is formed. Is heat-treated at a temperature of about 300 to 500 ° C. Then, Schottky source / drain 10 made of nickel silicide is formed in the source / drain region of the semiconductor substrate 1. During the formation of nickel silicide, arsenic segregates more than boron at the interface between the Schottky source / drain end portion 101 and the semiconductor substrate 1, and the Schottky source / drain 10 has a bottom portion 102 other than the end portion 101.
- a metal silicide such as nickel (Ni)
- the entire surface of the semiconductor substrate 1 is formed. Is heat-treated at a temperature of about 300 to 500 ° C.
- Schottky source / drain 10 made of nickel silicide is formed in the source / drain region of the semiconductor substrate 1.
- the interface between the bottom 102 other than the end of the Schottky source / drain 10 and the semiconductor substrate 1 is compared with the Schottky barrier height at the interface between the end 101 of the Schottky source / drain 10 and the semiconductor substrate 1. Increases the Schottky barrier height.
- the N-type SBMOSFET shown in FIG. 1 can be obtained.
- a dopant having a polarity opposite to that in the channel is segregated more at the interface between the Schottky source / drain end portion 101 and the semiconductor substrate 1 than a dopant having the same polarity as that in the channel.
- a dopant having the same polarity as that in the channel is segregated at the interface between the bottom 102 other than the end 101 of the Schottky source / drain 10 and the semiconductor substrate 1 more than a dopant having a polarity opposite to that in the channel.
- the above-described SBMOSFET can be obtained by using a resist process, an ion implantation process, and a silicidation process that have already been established in the semiconductor manufacturing process. Simplification and cost reduction can be realized.
- FIG. 6 is a cross-sectional view showing a configuration of a CMOS device in which N-type and P-type SBMOSFETs according to the present embodiment are combined.
- An element isolation 2 is formed on a semiconductor substrate (P-type silicon substrate) 1, and an N-type SBMOSFET is formed in one semiconductor surface region 100 and a P-type SBMOSFET is formed in the other semiconductor surface region 200, respectively.
- a gate electrode 4 is formed on the semiconductor substrate 1 with a gate insulating film 3 interposed therebetween. Spacers 5 and sidewalls 7 are formed on the side surfaces of the gate insulating film 3 and the gate electrode 4.
- Schottky source / drain 10 formed in a side wall 7 in a self-aligned manner is formed.
- the Schottky source / drain 10 is formed so as to sandwich the gate insulating film 3 in the upper surface of the semiconductor substrate 1, and its end is not formed on the lower end of the gate insulating film 3.
- the Schottky source / drain 10 is made of metal silicide, and the polarity between the end of the Schottky source / drain end 1101 and the semiconductor substrate 1 is opposite to that in the channel.
- the N-type dopant is more segregated than the P-type dopant having the same polarity as in the channel, and the interface between the bottom 1102 other than the end 1101 of the Schottky source / drain 10 and the semiconductor substrate 1 has the same polarity as in the channel.
- More P-type dopants are segregated than N-type dopants whose polarities are opposite to those in the channel, so that the Schottky barrier height for electrons at the interface between the end portion 1101 of the Schottky source / drain 10 and the semiconductor substrate 1 is increased. Compared to, a portion 1 other than the end of Schottky source / drain 10 Schottky barrier height is increased for 02 and electrons at the interface between the semiconductor substrate 1.
- the Schottky source / drain 10 is made of metal silicide, and the polarity between the end of the Schottky source / drain end 2101 and the semiconductor substrate 1 is opposite to that in the channel.
- P-type dopant is more segregated than N-type dopant having the same polarity as in the channel, and the same polarity as in the channel is present at the interface between the bottom 2102 other than the end 2101 of the Schottky source / drain 10 and the semiconductor substrate 1.
- the N-type dopant is more segregated than the P-type dopant whose polarity is opposite to that in the channel, so that the Schottky barrier at the interface between the end portion 2101 of the Schottky source / drain 10 and the semiconductor substrate 1 with respect to holes Compared to the height, the portion 21 other than the end of the Schottky source / drain 10 Schottky barrier height for holes at the interface between the 2 and the semiconductor substrate 1 is increased.
- FIG. 7 to 9 are process sectional views for explaining a method of manufacturing a CMOS device in which N-type and P-type SBMOSFETs are combined.
- element isolation 2 is formed on a semiconductor substrate (P-type silicon substrate) 1, and P-type and N-type dopants are ion-implanted into the semiconductor surface regions 100 and 200, respectively, and activated.
- a gate insulating film 3 and a gate electrode 4 are formed on the semiconductor substrate 1.
- the gate insulating film 3 may be a silicon oxide film, an HfSiO (hafnium silicate) film having a higher dielectric constant than the silicon oxide film, an HfSiON (hafnium nitride silicate) film that is a nitride film thereof, or an HfAlO (hafnium aluminum) film.
- An insulating film such as a nate) film may be used.
- the gate insulating film thickness can be set to 0.5 to 3 nm when converted to a so-called oxide film equivalent film thickness calculated from electric capacity.
- the gate electrode 4 may be a polysilicon film, a metal gate electrode (such as a metal nitride film such as TiN) in which gate depletion is not in principle, or a laminated film in which a polysilicon film is deposited on the metal gate electrode. But it ’s okay.
- the height of the gate electrode 4 can be about 100 to 150 nm, for example.
- spacers 5 having a film thickness of, for example, 5 nm to 10 nm are formed on the side surfaces of the gate insulating film 3 and the gate electrode 4, and the semiconductor surface regions 100 and 200 are formed using the gate electrode 4 and the spacer 5 as a mask.
- N-type dopant and P-type dopant are ion-implanted to form an N-type diffusion region 16 and a P-type diffusion region 26, respectively.
- sidewalls 7 having a film thickness of, for example, 25 nm to 50 nm are formed on the side surfaces of the spacer 5, and the semiconductor surface regions 100 and 200 are formed using the gate electrode 4, the spacer 5 and the sidewalls 7 as a mask.
- P-type dopant and N-type dopant are ion-implanted to form a P-type diffusion region 18 and an N-type diffusion region 28, respectively.
- a P-type diffusion region 18 is formed by ion-implanting more P-type dopant than the amount implanted to form the N-type diffusion region 16 by ion implantation.
- the P-type diffusion region 18 is formed, as shown in FIG.
- the implantation energy may be adjusted so that the P-type dopant is implanted deeper than the N-type dopant.
- an N-type diffusion region 28 is formed by ion-implanting more N-type dopant than the amount implanted to form the P-type diffusion region 26 by ion implantation.
- the implantation energy may be adjusted so that the N-type dopant is implanted deeper than the P-type dopant.
- a metal film such as nickel (Ni) is formed on the entire surface of the semiconductor substrate 1 to form a metal silicide later, for example, with a thickness of 10 nm
- the entire surface of the semiconductor substrate 1 is heated to a temperature of about 300 to 500.degree.
- a CMOS device combining the N-type and P-type SBMOSFETs shown in FIG. 6 can be obtained.
- Schottky source / drain 10 made of nickel silicide is formed in the source / drain region of the semiconductor substrate 1.
- more N-type dopant is segregated at the interface between the Schottky source / drain end portion 1101 and the semiconductor substrate 1, and the Schottky source.
- More P-type dopant is segregated at the interface between the bottom 1102 other than the end 1101 of the drain 10 and the semiconductor substrate 1 compared to the N-type dopant.
- the interface between the bottom 1102 other than the end of the Schottky source / drain 10 and the semiconductor substrate 1 is compared with the Schottky barrier height at the interface between the end 1101 of the Schottky source / drain 10 and the semiconductor substrate 1. Increases the Schottky barrier height.
- more P-type dopant is segregated at the interface between the Schottky source / drain end 2101 and the semiconductor substrate 1 than the N-type dopant, and More N-type dopant segregates at the interface between the bottom 2102 other than the end 2101 of the key source / drain 10 and the semiconductor substrate 1 as compared with the P-type dopant.
- the interface between the bottom 2102 other than the end of the Schottky source / drain 10 and the semiconductor substrate 1 is compared with the Schottky barrier height at the interface between the end 2101 of the Schottky source / drain 10 and the semiconductor substrate 1. Increases the Schottky barrier height.
- N-type SBMOSFET in the semiconductor device according to the present embodiment, more N-type dopant is segregated at the interface between the Schottky source / drain end portion 1101 and the semiconductor substrate 1 than the P-type dopant, and More P-type dopant is segregated at the interface between the bottom 1102 other than the end 1101 of the key source / drain 10 and the semiconductor substrate 1 compared to the N-type dopant.
- the bottom 1102 other than the end of the Schottky source / drain 10 and the semiconductor substrate 1 are compared with the Schottky barrier height with respect to electrons at the interface between the end 1101 of the Schottky source / drain 10 and the semiconductor substrate 1.
- the Schottky barrier height with respect to electrons at the interface is increased.
- a P-type dopant becomes an N-type dopant at the interface between the Schottky source / drain end 2101 and the semiconductor substrate 1.
- more N-type dopant is segregated at the interface between the bottom 2102 other than the end 2101 of the Schottky source / drain 10 and the semiconductor substrate 1.
- the bottom 2102 other than the end of the Schottky source / drain 10 and the semiconductor substrate 1 are compared with the Schottky barrier height for holes at the interface between the end 2101 of the Schottky source / drain 10 and the semiconductor substrate 1.
- the Schottky barrier height with respect to holes at the interface is increased.
- the N-type and P-type SBMOSFETs are combined by using a resist process, an ion implantation process, and a silicidation process that are already established in the semiconductor manufacturing process.
- a CMOS device can be obtained, and the manufacturing process can be simplified and the cost can be reduced.
- the substrate is not necessarily a silicon substrate, and may be a semiconductor substrate made of another material.
- nickel silicide is applied to the Schottky source / drain has been described, it is not necessary to be nickel silicide.
- CoSi 2 cobalt silicide
- TiSi 2 titanium silicide
- PtSi platinum silicide
- ErSi 2 Erbium silicide
- B is used as the P-type dopant this time
- other dopants including one of B, Al, Ga, and In can also be used.
- the present invention can be applied to a so-called vertical SBMOSFET as shown in FIG. In these cases, the same effect as described above can be obtained.
- SYMBOLS 1 Silicon substrate 2 Element isolation region 3 Gate insulating film 4 Gate electrode 5 Spacer 6 1st ion implantation area 7 Side wall 8 2nd ion implantation area 9 Metal film 10 Silicide layer 11 Source silicide 12 Drain silicide 16 N type SBMOSET formation N-type diffusion region in region 18 P-type diffusion region in N-type SBMOSET formation region 26 P-type diffusion region in P-type SBMOSET formation region 28 N-type diffusion region in P-type SBMOSET formation region 100 N-type SBMOSET formation region 101 Silicide layer edge 102 Silicide layer bottom 200 P-type SBMOSET formation region 1101 N-type SBMOSET silicide layer end 1102 N-type SBMOSET silicide layer bottom 2101 P-type SBMOSET silicide layer end 21 02 Silicide layer bottom of P-type SBMOSET
Abstract
Description
2 素子分離領域
3 ゲート絶縁膜
4 ゲート電極
5 スペーサー
6 第一のイオン注入領域
7 サイドウォール
8 第二のイオン注入領域
9 金属膜
10 シリサイド層
11 ソースシリサイド
12 ドレインシリサイド
16 N型SBMOSET形成領域におけるN型拡散領域
18 N型SBMOSET形成領域におけるP型拡散領域
26 P型SBMOSET形成領域におけるP型拡散領域
28 P型SBMOSET形成領域におけるN型拡散領域
100 N型SBMOSET形成領域
101 シリサイド層端部
102 シリサイド層底部
200 P型SBMOSET形成領域
1101 N型SBMOSETのシリサイド層端部
1102 N型SBMOSETのシリサイド層底部
2101 P型SBMOSETのシリサイド層端部
2102 P型SBMOSETのシリサイド層底部
Claims (9)
- 半導体基板上に形成されたチャネル上にゲート絶縁膜を介して形成されたゲート電極と、
前記半導体基板の上面内に前記ゲート絶縁膜をはさむように形成され、端部が前記ゲート絶縁膜下端部にかからないように形成され、前記半導体基板とショットキー接合を形成するショットキーソース・ドレインとを備える半導体装置において、
前記ショットキーソース・ドレインの前記端部と前記半導体基板との界面におけるショットキーバリアハイトと、
前記ショットキーソース・ドレインの前記端部以外の部分と前記半導体基板との界面におけるショットキーバリアハイトとは異なる、
ことを特徴とする半導体装置。 - 前記ショットキーソース・ドレインの前記端部と前記半導体基板との界面におけるショットキーバリアハイトに比べ、
前記ショットキーソース・ドレインの前記端部以外の部分と前記半導体基板との界面におけるショットキーバリアハイトが大きい、
ことを特徴とする請求項1に記載の半導体装置。 - 前記ショットキーソース・ドレインは金属シリサイドからなり、前記ショットキーソース・ドレインの前記端部と前記半導体基板との界面には前記チャネル中と極性が逆のドーパントが前記チャネル中と同じ極性のドーパントに比べより多く偏析し、
且つ前記ショットキーソース・ドレインの前記端部以外の部分と前記半導体基板との界面には前記チャネル中と同じ極性のドーパントが前記チャネル中と極性が逆のドーパントに比べより多く偏析していることにより、
前記ショットキーソース・ドレインの前記端部と前記半導体基板との界面におけるショットキーバリアハイトに比べ、
前記ショットキーソース・ドレインの前記端部以外の部分と前記半導体基板との界面におけるショットキーバリアハイトが大きくなっている、
ことを特徴とする請求項2に記載の半導体装置。 - 前記ショットキーソース・ドレインを構成するシリサイドは少なくともNi、Co、Ti、Pt、Erの中の一つを含むことを特徴とする請求項3に記載の半導体装置。
- 前記偏析ドーパントはN型ドーパントとしては少なくともN、P、As、Sb、Bi、Sの中の一つを含み、またP型ドーパントとしては少なくともB、Al、Ga、In中の一つを含むことを特徴とする請求項4に記載の半導体装置。
- 前記ゲート絶縁膜は高誘電率ゲート絶縁膜からなることを特徴とする請求項5に記載の半導体装置。
- 前記ゲート電極は金属ゲート電極からなることを特徴とする請求項6に記載の半導体装置。
- ショットキー・バリア型電界効果トランジスタを製造する方法において、
半導体基板中にチャネル不純物をドーピングする第一工程と、
半導体基板上にゲート絶縁膜を形成する第二工程と、
前記ゲート絶縁膜上にゲート電極を形成する第三工程と、
前記ゲート電極の側面に第一側壁膜を形成する第四工程と、
前記ゲート電極及び第一側壁膜をマスクとして前記チャネル不純物と逆の極性の不純物をドーピングする第五工程と、
前記ゲート電極及び第一側壁膜の側壁に第二側壁膜を形成する第六工程と、
前記ゲート電極、第一側壁膜及び第二側壁膜をマスクとして前記チャネル不純物と同じ極性の不純物をドーピングする第七工程と、
を備え、
前記半導体表面をシリサイド化してショットキーソース・ドレインを形成することにより、
前記ショットキーソース・ドレインの前記ゲート電極直下の端部と前記半導体基板との界面には前記チャネル中と極性が逆のドーパントを偏析させ、
且つ前記ショットキーソース・ドレインの前記端部以外の部分と前記半導体基板との界面には前記チャネル中と同じ極性のドーパントを偏析させる、
ことを特徴とする半導体装置の製造方法。 - 前記第五工程におけるドーピング量が前記第七工程におけるドーピング量に比べて少ないことを特徴とする請求項8に記載の半導体装置の製造方法。
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JP2020061547A (ja) * | 2018-10-11 | 2020-04-16 | 朋程科技股▲ふん▼有限公司 | 車両用整流装置、整流器、発電装置及びパワートレイン |
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