WO2009110604A1 - 光学式エンコーダ装置 - Google Patents
光学式エンコーダ装置 Download PDFInfo
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- WO2009110604A1 WO2009110604A1 PCT/JP2009/054323 JP2009054323W WO2009110604A1 WO 2009110604 A1 WO2009110604 A1 WO 2009110604A1 JP 2009054323 W JP2009054323 W JP 2009054323W WO 2009110604 A1 WO2009110604 A1 WO 2009110604A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
Definitions
- the present invention relates to an optical encoder device capable of obtaining an output signal with less distortion.
- Patent Document 1 shows a known example of an optical encoder device that can obtain an output signal with little distortion.
- the slit pattern provided on the fixed slit plate has a phase difference of 1/12 with respect to the slit pitch P of the movable slit plate, and is a light transmission slit of a multiple of four.
- the phase between the first and second light transmission slits is shifted by P / 12
- the phase between the second and third light transmission slits is P
- the phase between the third and fourth light transmission slits is shifted by P / 4.
- Patent Document 2 shows an optical encoder in which a phase difference of 1/6 is provided between two slits in order to cancel third-order harmonics.
- Patent Document 3 has a phase difference of 1/6 or 1/10 between two slits or slit groups in order to cancel third-order harmonics and fifth-order harmonics.
- 1 shows an optical encoder.
- Patent Document 4 n types of harmonics are canceled out by using 2 n or more slits.
- the number of light transmitting slits provided on the fixed slit plate needs to be a predetermined number, and when a light receiving element having a finite length is considered, the necessary light transmitting slits cannot be arranged. On the contrary, there is a problem that the length of the light receiving element becomes uselessly long.
- the distortion rate here, the mean square of the ratio of harmonics up to the 21st order
- An encoder apparatus is provided.
- An optical encoder device includes: a light emitting element; a light receiving element disposed to face the light emitting element; a movable slit plate and a fixed slit plate disposed between the light emitting element and the light receiving element; Have The movable slit plate has a plurality of light transmissive slits having an electrical angle of 180 ° and a plurality of non-light transmissive slits having a slit width of 180 °, and the light transmissive slit and the non-light transmissive slit move. Movable side slit rows formed alternately in the direction are provided.
- the light transmitting slit is not limited to the through-hole as long as it transmits light, and the light transmitting slit may be provided by forming a plurality of light transmitting windows on a light-transmitting substrate. .
- the non-light-transmitting slit does not have to have a physical slit, but may have a portion that does not transmit light.
- a non-light-transmitting slit can be formed by forming a film that does not transmit light on a light-transmitting substrate.
- the “movement direction” means a direction in which the movable slit plate moves relative to the fixed slit plate.
- the fixed slit plate is formed by alternately arranging a plurality of light transmission slits having an electrical angle of 180 ° and a plurality of non-light transmission slits having an electrical angle of (360 ⁇ k ⁇ 180) °.
- the number of light transmission slits that can make maximum use of the light receiving surface can be formed in the fixed slit plate. Therefore, according to the present invention, an output signal with less distortion can be obtained, and the light receiving surface of the light receiving element is compared with the optical encoder device of Patent Document 1 in which four light transmitting slits must be formed as one unit.
- the number of light transmitting slits provided in the fixed slit plate can be increased to the maximum according to the length dimension.
- n is determined so that the length dimension of the fixed slit row of the fixed slit plate is as close as possible to the usable length dimension of the light receiving surface of the light receiving element, the utilization factor of the light receiving element is maximized. be able to.
- the multiplication accuracy can be increased when a multiplication circuit for electrically multiplying the optical signal output from the light receiving element is provided.
- the invention is suitable for an optical encoder device having a multiplier circuit.
- the second invention of the present application solves the problem by arranging two fixed side slit rows in parallel.
- the fixed slit plate is disposed between the light emitting element and the light receiving element, and a plurality of light transmitting slits having a slit width of 180 ° in electrical angle and the slit width in electrical angle (360 ⁇ k ⁇
- Two fixed-side slit rows having a plurality of non-light transmissive slits of 180) ° and formed by alternately arranging light transmissive slits and non-light transmissive slits in the moving direction of the movable slit plate are used.
- the two fixed side slit rows are arranged in parallel in the width direction orthogonal to the moving direction.
- the total number of the some light transmission slit formed in the fixed slit plate be n (an integer greater than or equal to 5).
- n 2q ⁇ r (where q is an integer of 2 or more and r is an integer of 0 or more and less than q)
- two fixed side slit rows are all (2 pieces when r is 0).
- the fixed-side slit array of the light beam has q light transmitting slits.
- r is not 0, one fixed side slit row has q light transmissive slits, and the remaining one fixed side slit row has qr light transmissive slits.
- the two fixed slit rows are in a positional relationship shifted in the (360-360 ⁇ k) ⁇ (q ⁇ r) ° movement direction.
- the usable length dimension of the light receiving surface of the light receiving element can be shortened. Further, the utilization factor of the light receiving element can be maximized by making maximum use of the length dimension and the width dimension of the light receiving surface of the light receiving element.
- the fixed slit plate is disposed between the light emitting element and the light receiving element and has a plurality of light transmitting slits having an electrical angle of 180 ° and an slit having an electrical angle of (360 ⁇ k ⁇ ).
- m fixed side slit rows are arranged in parallel in the width direction orthogonal to the moving direction.
- the total number of the plurality of light transmission slits formed on the fixed slit plate is n (an integer of 5 or more).
- the m fixed-side slit rows have all q light transmitting slits when r x is all zero. When r x is not 0, the fixed side slit row has q ⁇ r x light transmitting slits.
- the m fixed-side slit rows are configured by combining m types of fixed-side slit rows that have a positional relationship shifted in the moving direction by (360-360 ⁇ k) ⁇ (q ⁇ r x ) °. .
- the light transmission slit provided on the movable slit plate side may be configured in the same manner as in the first invention.
- the usable lengthwise dimension of the light receiving surface of the light receiving element can be shortened as in the second invention. Further, the utilization factor of the light receiving element can be maximized by making maximum use of the length dimension and the width dimension of the light receiving surface of the light receiving element.
- two light transmission slits adjacent in the width direction may be separated or may be continuous. Even if two adjacent light transmission slits are separated or continuous, the light transmitted through the two adjacent light transmission slits is received by the same light receiving element, so that signal processing can be performed without hindrance. .
- FIG. 10 is a diagram showing a relationship between a pitch k (slit interval) coefficient k and the third harmonic amplitude when the number of light transmitting slits n is 6 to 9. It is a figure which shows the relationship between the amount of displacement of the light transmission slit by the side of the movable slit plate per light transmission slit, and the quantity of the transmitted light.
- FIG. 1 is a perspective view schematically showing an example of an embodiment of an optical encoder device according to a first invention of the present application.
- a member denoted by reference numeral 1 is a light emitting element made of a light emitting diode or the like
- a member denoted by reference numeral 2 is a light receiving element made of a semiconductor substrate having a function of converting an optical signal into an electric signal and outputting it. It is an element.
- a movable slit plate 3 and a fixed slit plate 4 fixed to a fixed portion are arranged.
- the movable slit plate 3 is a rectangular plate, but the present invention can of course be applied to a disk-like rotating movable slit plate.
- a multiplier circuit 5 that electrically multiplies the electric signal output from the light receiving element 2 is provided.
- the movable slit plate 3 includes a plurality of light transmission slits S1 having a slit width of 180 ° in electrical angle and a plurality of non-light transmission slits S2 having a slit width of 180 ° in electrical angle (not transmitting light). And the movable side slit row R1 formed alternately. In addition, as shown in FIG.
- the fixed slit plate 4 has a plurality of light transmission slits S3 having a slit width of 180 ° in electrical angle and a slit width in electrical angle ( A plurality of non-light-transmitting slits S4 of 360 ⁇ k ⁇ 180) ° are formed, and fixed side slit rows R2 are formed alternately.
- the number of light transmitting slits that can utilize the light receiving surface 2A of the element 2 to the maximum can be formed in the fixed slit plate.
- the pitch of the light transmission slits S3 (the distance between the centers of the two light transmission slits S3) is set to 360 ⁇ k °.
- the light receiving element 2 receives light.
- the number of light transmitting slits S3 provided in the fixed slit plate 4 can be increased to the maximum according to the length dimension of the surface 2A.
- the signal used for multiplication is required to be close to a sine wave.
- the amount of light transmitted through the light transmission slit S1 of the movable slit plate 3 changes linearly, so that the signal obtained is a triangular wave.
- FIG. 3 shows the relationship between the amount of displacement of the light transmission slit S1 of the movable slit plate 3 and the amount of transmitted light in the ideal optical system.
- This triangular wave can be expressed as the following formula (1), where the slit width of the light transmitting slit S1 and the non-light transmitting slit S2 of the movable slit plate 3 is one cycle (360 ° in electrical angle).
- the third-order component with respect to the fundamental wave component has an amplitude of about 11%
- the fifth-order component has an amplitude of about 4%
- the seventh-order component has an amplitude of about 2%.
- the slit width of the light transmitting slit and the non-light transmitting slit is 180 °
- the pitch between two adjacent light transmitting slits is 360 °.
- a movable slit plate is used in which the slit width of the light transmitting slit and the non-light transmitting slit of the movable slit plate is 180 °, and the pitch of the two light transmitting slits is 360 °.
- the interval between the light transmitting slit and the non-light transmitting slit is equal, and since there is no phase difference, the synthesized signal is simply the number of slits ( n) Doubled.
- the interval that is, the pitch of the light transmission slits S3 is changed to 360 ⁇ k ° using a constant ratio k.
- FIG. 2 shows a case where K ⁇ 1.
- FIG. 4 shows the relationship between the coefficient k of the pitch (slit spacing) and the amplitude of the third harmonic when the number of light transmitting slits n is 6-9.
- the amplitude of each order periodically changes with respect to k, and the cycle is inversely proportional to N.
- the multiplied signal is required to have not only a small harmonic component but also a large amplitude, it is necessary to make k close to 1. In that case, what is necessary is just to determine k by Formula (9).
- the third harmonic is 0%
- the fifth harmonic is about 0.85%
- the seventh harmonic is The amplitude is about 0.33%
- the distortion rate is 0.92%.
- FIG. 5 shows the relationship between the displacement amount of the light transmission slit S1 on the movable slit plate side and the amount of transmitted light per one light transmission slit S3 in this case. As can be seen from FIG. 5, the change in the amount of light is indistinguishable from the sine wave.
- the amplitude of the fundamental wave also decreases as the number n of the light transmission slits S3 increases.
- the number of light transmissive slits is not particularly limited. . Therefore, it can be seen that a number of light transmitting slits that can make maximum use of the light receiving surface of the light receiving element can be formed in the fixed slit plate. Therefore, according to the present invention, an output signal with less distortion can be obtained, and light reception by the light receiving element 2 can be achieved as compared with a conventional optical encoder device in which a predetermined number of light transmission slits must be formed as one unit.
- the number of light transmitting slits S3 provided in the fixed slit plate 4 can be increased to the maximum according to the length dimension of the surface 2A.
- FIG. 6 shows an example of a fixed-side slit plate used in the second embodiment of the present invention.
- the second invention solves the problem in the same manner as the first invention by arranging two fixed side slit rows in parallel.
- FIG. 6 shows the configuration of the fixed slit plate 40 used in the embodiment of the second invention.
- the fixed slit plate 40 is also disposed between the light emitting element and the light receiving element.
- the movable slit plate having the same configuration as that of the movable slit plate 3 in FIG. 1 can be used.
- the fixed slit plate 40 includes a plurality of (six) light transmitting slits S31 and S32 having a slit width of 180 ° in electrical angle and a plurality (four) of non-slits having a slit width of (360 ⁇ k ⁇ 180) ° in electrical angle.
- Light transmission slits S41 and S42 are provided.
- the fixed slit plate 40 uses two fixed side slit rows R21 and R22 in which light transmissive slits and non-light transmissive slits are alternately arranged in the moving direction of the movable slit plate.
- the two fixed slit rows R21 and R22 are arranged side by side in the width direction orthogonal to the moving direction of the movable slit plate.
- two light transmission slits S31 and S32 adjacent in the width direction are continuous.
- the two fixed slit rows R21 and R22 are in a positional relationship shifted in the (360-360 ⁇ k) (q ⁇ r) ° movement direction.
- the dimension in the usable length direction of the light receiving surface of the light receiving element can be shortened.
- the utilization factor of the light receiving element can be maximized by making maximum use of the length dimension and the width dimension of the light receiving surface of the light receiving element.
- the distortion rate can be reduced as compared with the case where n is q in the first embodiment described with reference to FIGS.
- FIG. 7 shows another embodiment of the second invention.
- the number of light transmission slits S32 included in the second fixed slit row R22 is two.
- the two fixed-side slit rows R21 and R22 have one fixed-side slit row R21 when r is not 0 (FIG. 7).
- FIG. 8 shows an example of an embodiment of the third invention of the present application.
- the third invention solves the problem similarly to the first invention and the second invention by arranging a plurality of fixed-side slit rows (m: m is an integer of 3 or more).
- FIG. 8 shows the configuration of the fixed slit plate 40 used in the embodiment of the third invention.
- the fixed slit plate 40 is also disposed between the light emitting element and the light receiving element.
- the movable slit plate having the same configuration as that of the movable slit plate 3 in FIG. 1 can be used.
- the fixed slit plate 40 has a plurality (nine) of light transmission slits S31, S32 and S33 having a slit width of 180 ° in electrical angle and a plurality (six) of slit widths in an electrical angle of (360 ⁇ k ⁇ 180) °.
- Non-light transmitting slits S41, S42 and S43 The fixed slit plate 40 uses two fixed side slit rows R21, R22, and R23 in which light transmissive slits and non-light transmissive slits are alternately arranged in the moving direction of the movable slit plate.
- the three fixed-side slit rows R21, R22, and R23 are juxtaposed in the width direction orthogonal to the moving direction of the movable slit plate.
- the three fixed-side slit rows R21, R22, and R23 are formed by separating two light transmission slits S31, S32, and R33 that are adjacent in the width direction.
- n an integer of 5 or more
- the three fixed side slit rows R21 to R23 are arranged in the width direction in order, but the three types of fixed side slit rows R21 to R23 only need to be combined, so R21 ⁇ R23 ⁇ R22. , R23 ⁇ R21 ⁇ R22, and three fixed side slit rows R21 to R23 may be arranged. Also in the example of FIG. 8, it goes without saying that the number of light transmission slits in one fixed side slit row may be reduced as in the example of FIG.
- the number of slits n is larger even when q is the same as in the example of FIGS. 6 and 7 even when two fixed side slit rows are used.
- the distortion rate can be reduced.
- an appropriate number of n, m, and r is determined in consideration of the size of the light receiving element to be used and the irradiation range R of light from the light emitting element as shown in FIG.
- the light transmission slit on the end side of the fixed slit row R22 is not provided in consideration of the irradiation range R.
- an output signal with less distortion can be obtained, and the number of light transmission slits provided in the fixed slit plate can be increased to the maximum according to the length dimension and width dimension of the light receiving surface of the light receiving element. .
Abstract
Description
Claims (7)
- 発光素子と、前記発光素子と対向するように配置された受光素子と、
前記発光素子と前記受光素子との間に配置され、スリット幅が電気角で180°の複数の光透過スリットとスリット幅が電気角で180°の複数の非光透過スリットとを有し且つ前記光透過スリットと前記非光透過スリットとが移動方向に交互に並んで形成された可動側スリット列を備えた可動スリットプレートと、
前記発光素子と前記受光素子との間に配置され、スリット幅が電気角で180°の複数の光透過スリットとスリット幅が電気角で(360×k-180)°の複数の非光透過スリットとを有し且つ前記光透過スリットと前記非光透過スリットとが交互に並んで形成された固定側スリット列を備えた固定スリットプレートとからなり、
前記固定スリットプレートに形成された前記複数の光透過スリットの数をn(5以上の整数)としたときに、前記kを、k=1±[1/3n]を満たす値としたことを特徴とする光学式エンコーダ装置。 - 発光素子と、前記発光素子と対向するように配置された受光素子と、
前記発光素子と前記受光素子との間に配置され、スリット幅が電気角で180°の複数の光透過スリットとスリット幅が電気角で180°の複数の非光透過スリットとを有し且つ前記光透過スリットと前記非光透過スリットとが移動方向に交互に並んで形成された可動側スリット列を備えた可動スリットプレートと、
前記発光素子と前記受光素子との間に配置され、スリット幅が電気角で180°の複数の光透過スリットとスリット幅が電気角で(360×k-180)°の複数の非光透過スリットとを有し且つ前記光透過スリットと前記非光透過スリットとが前記移動方向に交互に並んで形成された2個の固定側スリット列を備え、前記2個の固定側スリット列が前記移動方向と直交する幅方向に並設されている固定スリットプレートとからなり、
前記kを、k=1±[1/3n]を満たす値とし、
前記固定スリットプレートに形成された前記複数の光透過スリットの合計数をn(5以上の整数)とし、またn=2q-r(但し、qは2以上の整数、rは0以上q未満の整数)としたときに、前記2個の固定側スリット列は、前記rが0のときには、全てq個の前記光透過スリットを有しており、前記rが0では無いときには、1つの前記固定側スリット列がq個の前記光透過スリットを有し且つ残りの1個の前記固定側スリット列がr個の前記光透過スリットを有しており、
前記2個の固定側スリット列は、(360-360×k)×(q-r)°前記移動方向にずれた位置関係にあることを特徴とする光学式エンコーダ装置。 - 発光素子と、前記発光素子と対向するように配置された受光素子と、
前記発光素子と前記受光素子との間に配置され、スリット幅が電気角で180°の複数の光透過スリットとスリット幅が電気角で180°の複数の非光透過スリットとを有し且つ前記光透過スリットと前記非光透過スリットとが移動方向に交互に並んで形成された可動側スリット列を備えた可動スリットプレートと、
前記発光素子と前記受光素子との間に配置され、スリット幅が電気角で180°の複数の光透過スリットとスリット幅が電気角で(360×k-180)°の複数の非光透過スリットとを有し且つ前記光透過スリットと前記非光透過スリットとが前記移動方向に交互に並んで形成されたm個(mは3以上の整数)の固定側スリット列を備え、前記m個の固定側スリット列が前記移動方向と直交する幅方向に並設されている固定スリットプレートとからなり、
前記kを、k=1±[1/3n]を満たす値とし、
前記固定スリットプレートに形成された前記複数の光透過スリットの合計数をn(5以上の整数)とし、また、
前記m個の固定側スリット列は、(360-360×k)×(q-rx)°ずつ前記移動方向にずれた位置関係にあるm種類の固定側スリット列が組み合わされて構成されていることを特徴とする光学式エンコーダ装置。 - 前記幅方向に隣り合う二つの光透過スリットが連続している請求項2または3に記載の光学式エンコーダ。
- 前記受光素子から出力される光学的信号を電気的に逓倍する逓倍回路を備えている請求項1,2または3に記載の光学式エンコーダ装置。
- 前記固定スリットプレートの前記固定側スリット列の長さ寸法が、前記受光素子の受光面の使用可能な長さ寸法に最大限近い値になるように、前記nが定められている請求項1に記載の光学式エンコーダ装置。
- 前記固定スリットプレートの前記固定側スリット列の長さ寸法が、前記受光素子の受光面の使用可能な長さ寸法に最大限近い値になるように、前記n,m及びqが定められている請求項2または3に記載の光学式エンコーダ装置。
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KR1020107019824A KR101481472B1 (ko) | 2008-03-07 | 2009-03-06 | 광학식 인코더 장치 |
JP2010501982A JP5171935B2 (ja) | 2008-03-07 | 2009-03-06 | 光学式エンコーダ装置 |
US12/921,259 US8389925B2 (en) | 2008-03-07 | 2009-03-06 | Optical encoder device comprising a moveable slit plate and a stationary slit plate |
CN2009801080890A CN101965502B (zh) | 2008-03-07 | 2009-03-06 | 光学式编码装置 |
EP09716200.2A EP2251646A4 (en) | 2008-03-07 | 2009-03-06 | Optical encoder device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2008-058288 | 2008-03-07 | ||
JP2008058288 | 2008-03-07 |
Publications (1)
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WO2009110604A1 true WO2009110604A1 (ja) | 2009-09-11 |
Family
ID=41056153
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2009/054323 WO2009110604A1 (ja) | 2008-03-07 | 2009-03-06 | 光学式エンコーダ装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8389925B2 (ja) |
EP (1) | EP2251646A4 (ja) |
JP (1) | JP5171935B2 (ja) |
KR (1) | KR101481472B1 (ja) |
CN (1) | CN101965502B (ja) |
WO (1) | WO2009110604A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011047926A (ja) * | 2009-07-29 | 2011-03-10 | Sanyo Denki Co Ltd | 光学式エンコーダ装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10303270B2 (en) * | 2016-09-12 | 2019-05-28 | Microsoft Technology Licensing, Llc | Linear encoder force transducer |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6042616A (ja) * | 1983-08-19 | 1985-03-06 | Sony Magnescale Inc | 光学スケ−ル装置 |
JPS60237317A (ja) * | 1984-05-10 | 1985-11-26 | Yokogawa Hokushin Electric Corp | 変位変換器 |
JPH0348122A (ja) * | 1989-07-17 | 1991-03-01 | Okuma Mach Works Ltd | 光学式エンコーダ |
JPH08184466A (ja) * | 1994-12-28 | 1996-07-16 | Okuma Mach Works Ltd | 光学格子およびエンコーダ |
JP2005121640A (ja) * | 2003-10-14 | 2005-05-12 | Dr Johannes Heidenhain Gmbh | 光学式位置測定装置 |
JP2007218603A (ja) * | 2006-02-14 | 2007-08-30 | Matsushita Electric Ind Co Ltd | 光学式エンコーダ装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3486351T2 (de) * | 1983-07-27 | 1995-02-16 | Sony Magnescale Inc | Detektorkopf. |
JPS6042626A (ja) | 1983-08-19 | 1985-03-06 | Mitsubishi Electric Corp | 熱電対利用温度測定装置の冷接点補償回路 |
US4680466A (en) * | 1984-04-20 | 1987-07-14 | Yokogawa Hokushin Electric Corporation | Displacement transducer which simultaneously extracts signals via sequential switching |
KR0141445B1 (ko) * | 1993-06-10 | 1998-07-01 | 모리시타 요이찌 | 변이의 측정방법 및 측정장치 |
DE19508700C1 (de) * | 1995-03-02 | 1996-08-14 | Huebner Elektromasch Ag | Vorrichtung zum Gewinnen weitgehend oberwellenfreier periodischer Signale |
JPH09196705A (ja) * | 1996-01-23 | 1997-07-31 | Mitsutoyo Corp | 変位測定装置 |
EP0867693A1 (en) * | 1997-03-27 | 1998-09-30 | Koyo Seiko Co., Ltd. | Optical rotary encoder |
-
2009
- 2009-03-06 WO PCT/JP2009/054323 patent/WO2009110604A1/ja active Application Filing
- 2009-03-06 US US12/921,259 patent/US8389925B2/en active Active
- 2009-03-06 JP JP2010501982A patent/JP5171935B2/ja active Active
- 2009-03-06 EP EP09716200.2A patent/EP2251646A4/en not_active Withdrawn
- 2009-03-06 KR KR1020107019824A patent/KR101481472B1/ko active IP Right Grant
- 2009-03-06 CN CN2009801080890A patent/CN101965502B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6042616A (ja) * | 1983-08-19 | 1985-03-06 | Sony Magnescale Inc | 光学スケ−ル装置 |
JPS60237317A (ja) * | 1984-05-10 | 1985-11-26 | Yokogawa Hokushin Electric Corp | 変位変換器 |
JPH0348122A (ja) * | 1989-07-17 | 1991-03-01 | Okuma Mach Works Ltd | 光学式エンコーダ |
JPH08184466A (ja) * | 1994-12-28 | 1996-07-16 | Okuma Mach Works Ltd | 光学格子およびエンコーダ |
JP2005121640A (ja) * | 2003-10-14 | 2005-05-12 | Dr Johannes Heidenhain Gmbh | 光学式位置測定装置 |
JP2007218603A (ja) * | 2006-02-14 | 2007-08-30 | Matsushita Electric Ind Co Ltd | 光学式エンコーダ装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011047926A (ja) * | 2009-07-29 | 2011-03-10 | Sanyo Denki Co Ltd | 光学式エンコーダ装置 |
Also Published As
Publication number | Publication date |
---|---|
EP2251646A1 (en) | 2010-11-17 |
US20110036970A1 (en) | 2011-02-17 |
JP5171935B2 (ja) | 2013-03-27 |
JPWO2009110604A1 (ja) | 2011-07-14 |
US8389925B2 (en) | 2013-03-05 |
KR101481472B1 (ko) | 2015-01-12 |
CN101965502B (zh) | 2013-02-13 |
KR20100133372A (ko) | 2010-12-21 |
EP2251646A4 (en) | 2017-05-10 |
CN101965502A (zh) | 2011-02-02 |
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