WO2009107735A1 - 開閉バルブ - Google Patents
開閉バルブ Download PDFInfo
- Publication number
- WO2009107735A1 WO2009107735A1 PCT/JP2009/053580 JP2009053580W WO2009107735A1 WO 2009107735 A1 WO2009107735 A1 WO 2009107735A1 JP 2009053580 W JP2009053580 W JP 2009053580W WO 2009107735 A1 WO2009107735 A1 WO 2009107735A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- container
- shielding member
- opening
- melting point
- point metal
- Prior art date
Links
- 239000002184 metal Substances 0.000 claims abstract description 100
- 229910052751 metal Inorganic materials 0.000 claims abstract description 100
- 238000002844 melting Methods 0.000 claims abstract description 93
- 230000008018 melting Effects 0.000 claims abstract description 90
- 238000010438 heat treatment Methods 0.000 claims description 32
- 230000008602 contraction Effects 0.000 claims description 12
- 239000007787 solid Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 4
- 150000002739 metals Chemical class 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 2
- 230000000903 blocking effect Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 17
- 239000000463 material Substances 0.000 description 17
- 238000001816 cooling Methods 0.000 description 13
- 230000015572 biosynthetic process Effects 0.000 description 12
- 238000007740 vapor deposition Methods 0.000 description 12
- 239000000758 substrate Substances 0.000 description 10
- 238000005192 partition Methods 0.000 description 6
- 238000007789 sealing Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 238000000354 decomposition reaction Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
- F16K17/36—Safety valves; Equalising valves, e.g. pressure relief valves actuated in consequence of extraneous circumstances, e.g. shock, change of position
- F16K17/38—Safety valves; Equalising valves, e.g. pressure relief valves actuated in consequence of extraneous circumstances, e.g. shock, change of position of excessive temperature
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/42—Valve seats
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K13/00—Other constructional types of cut-off apparatus; Arrangements for cutting-off
- F16K13/08—Arrangements for cutting-off not used
- F16K13/10—Arrangements for cutting-off not used by means of liquid or granular medium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/4456—With liquid valves or liquid trap seals
- Y10T137/4643—Liquid valves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86493—Multi-way valve unit
- Y10T137/86879—Reciprocating valve unit
Definitions
- the present invention relates to an on-off valve, and more particularly to an on-off valve used for switching between gas supply start and supply stop.
- an open / close valve is used to switch between gas supply start and supply stop.
- Reference numeral 200 in FIGS. 7A and 7B denotes an opening / closing valve.
- the opening / closing valve 200 includes a partition wall 211 and a valve body 221.
- the partition wall 211 is provided with a hole 212 into which the valve body 221 is fitted.
- the valve body 221 is attached to a moving means (not shown). When the valve body 221 is seated in the hole 212 by the moving means, the surface of the valve body 221 comes into close contact with the inner wall surface (valve seat surface 215) of the hole 212. Then, the one space and the other space are separated with the partition wall 211 in between, and the closed state is established (FIG. 7B).
- valve body 221 When the valve body 221 is removed from the hole 212 and the surface of the valve body 221 and the valve seat surface 215 are separated from each other, one space and the other space are connected with the partition wall 211 interposed therebetween, and an open state is established (FIG. 7A). ).
- the on-off valve 200 is widely used for switching between supply start and supply stop of a fluid such as gas or liquid.
- the partition wall 211 and the valve body 221 of the on-off valve 200 are made of metal, ceramic, or the like.
- the fitting portion of the valve body 221 and the partition wall 211 is worn, not only the sealing performance of the open / close valve 200 is deteriorated, but also dust is generated and causes fluid contamination.
- the opening / closing operation is repeated at a high temperature (240 ° C. to 400 ° C.), the sealing surface may be damaged, and the sealing performance of the valve may be lost.
- JP-T-2001-523768 Special table 2003-525349 gazette JP 2004-204289 A JP 2005-29885 A JP 2006-1111920 A
- the present invention is for solving the above-described problems, and an object thereof is to provide an on-off valve that does not contaminate a fluid and has a long life. It is another object of the present invention to provide an open / close valve having a long service life without losing sealing performance even when opening and closing is repeated at a high temperature.
- the open / close valve switches between connection and disconnection between the first and second connection spaces
- the open / close valve includes a low-melting-point metal and a container in which the low-melting-point metal is accommodated.
- a lower end having a shielding member capable of contacting the low melting point metal, the low melting point metal disposed in the container, and a moving means for relatively moving the shielding member, and melting the low melting point metal.
- the present invention is an on-off valve, wherein the shielding member is cylindrical, the lower end of the shielding member is constituted by the lower end of the cylinder, and the first connection space is connected to the internal space of the shielding member.
- This is an open / close valve configured as follows.
- the present invention is an on-off valve, comprising an occluding body that accommodates the container, the occluding body having an opening, the shielding member passing through the opening, and an outer periphery of the shielding member and the opening Between the shield member, the upper end of the shield member is opened to the outside, the lower end of the shield member is opened to the interior of the shield member, and the moving means shields the container from the shield member.
- the present invention is an on-off valve, wherein the moving means is disposed outside the covering body, and is provided between the moving means and the container, and has an expansion / contraction member that blocks the internal space and the external space of the covering body.
- the container and the moving means are connected in the internal space of the expansion / contraction member, and when the movement means moves the container, the expansion / contraction member expands and contracts, and the inside and the external space of the covering body are blocked. And an open / close valve for moving the container.
- the present invention is an on-off valve, and has a connection portion connected to an external space of the shielding member in an internal space of the on-off valve, and the second connection space is connected to the connection portion. It is a configured on-off valve.
- the present invention is an on-off valve, wherein the connection portion is an on-off valve stationary with respect to the shielding member.
- the present invention is an open / close valve, wherein the covering body is fixed, the container is attached to the moving means, and the connecting portion is an opening / closing valve attached to the covering body.
- the present invention is an open / close valve having a pipe whose tip is surrounded by the container and a lid, and a cylinder formed of a ring-shaped projection formed on the bottom of the lid so as to protrude from the bottom of the lid.
- the present invention is an on-off valve, which has a moving device for relatively moving the shielding member and the container.
- the present invention is an on-off valve, comprising an occluding body, a connection port for communicating the inside and the outside of the occluding body, and first and second on-off ports, while the second on-off port is closed.
- a first state in which gas can pass between the first opening and closing port and the connection port through the inside of the covering body, and the second opening and closing port while the first opening and closing is closed An open / close valve configured to be able to switch between a second state in which gas can pass through the interior of the obscuration body, and is disposed in the obscuration body, and a solid and liquid can be disposed respectively.
- a first container, a second container, and cylindrical first and second shielding portions which are disposed in the covering body and can be inserted into and removed from the first and second containers, respectively.
- a molten low melting point metal is disposed in the second container, and the first container is the covering member.
- the first shielding part is removed from the first container, and the second shielding part is inserted into the second container and comes into contact with the low-melting-point metal.
- the open / close valve is in the second state.
- the present invention is an opening / closing valve, wherein the second shielding member is provided in the first container, and an opening at an upper end of a pipe inserted into the second container is the second opening / closing opening. It is a valve.
- the present invention is an open / close valve having an heating means for heating the low melting point metal.
- the present invention is an on-off valve, wherein the low melting point metal is any one or more kinds of metals selected from the group consisting of indium, tin, and an indium tin oxide alloy.
- the present invention is configured as described above. If a pressure difference is formed in the first and second connection spaces, the first and second in the open state in which the shielding member is separated from the low melting point metal. Of the connection space, gas is supplied from the high-pressure side space to the low-pressure side space.
- the open / close valve of the present invention is disposed in the middle of the gas supply path, and is used for switching between supply start and supply stop of the gas.
- the high-pressure side space is an internal space of a high-pressure device such as a gas generator or a gas cylinder
- the low-pressure side space is an internal space of a low-pressure device such as a shower plate or a vacuum tank.
- the gas whose supply is started and stopped is vapor of a vapor deposition material, etching gas, CVD gas, purge gas, sputtering gas, and the like.
- a vacuum chamber used for film formation or the like may be a high-pressure side space and a vacuum exhaust system may be a low-pressure side space, which may be used for switching between gas exhaust start and exhaust stop.
- the low melting point metal may be blown off and spilled out of the housing member when opened. It is necessary to suppress to such an extent that is not blown away.
- the shielding property of the gas is higher than when contacting the solid. Further, even if the open / close valve is repeatedly opened and closed, the lower end of the shielding member is not worn, and the life of the open / close valve is long. In addition, since dust does not generate even when opening and closing is repeated, dust does not enter the gas passing through the opening and closing valve. Even when used in a high-temperature process, it is possible to supply an open / close valve with a long service life that hardly causes damage to the seal portion.
- Sectional drawing which shows an example of the film-forming apparatus using the on-off valve of this invention Schematic top view which shows an example of the film-forming apparatus using the on-off valve of this invention
- A sectional view for explaining the closed state
- Sectional drawing explaining the 4th example of an on-off valve (A)
- the opening / closing valve of the present invention has a casing that is a covering body, an opening / closing port and a connection port that allow the inside and outside of the casing to communicate with each other, and the gas between the opening / closing port and the connection port passes through the inside of the casing. Is switched between a connection state in which the vehicle can pass and a shielding state in which the gap between the opening and closing port is shielded.
- the occluding body is airtight and can be evacuated.
- the opening / closing valve of the present invention includes a container in which a solid and a liquid can be disposed, and a shielding member disposed in the housing.
- the container and the shielding member are configured to be relatively movable, and the shielding member is configured to be inserted into and removed from the container.
- the opening / closing port is surrounded by either the shielding member or the container.
- a low melting point metal can be placed in the container.
- the shielding member comes into contact with the molten metal when the shielding member is inserted into the container.
- the contact portion or the immersion portion surrounds the opening / closing port to close the opening / closing port and the shielding member is removed from the container, the shielding member is separated from the molten metal, and the opening / closing port is opened.
- the housing has a connection port. If the opening at the tip of the pipe in the housing is an opening / closing port, the opening / closing port and the connection port are connected when the tip of the pipe is separated from the molten metal in the container. However, if the part around the opening and closing port, which is the tip of the pipe housing, is a ring-shaped shielding member, the container and the pipe are moved relatively, and the entire circumference of the shielding member is melted in the container. When immersed in contact with metal, the pipe is closed, and the opening and closing port and the connection port are blocked.
- the opening at the tip of the pipe becomes an opening / closing port.
- a cylindrical shielding member which is a ring-shaped projection, is formed on the bottom surface of the lid member that does not allow gas to pass therethrough, the molten metal in the container surrounding the opening / closing port and the shielding member are connected to the opening / closing port.
- connection port When the connection port is provided in the housing, the opening / closing port and the connection port are blocked in a state where the lid is covered, and when the shielding member is separated from the molten metal and the lid is opened, the opening / closing port and the connection port are connected.
- a moving device that relatively moves the container and the shielding member as described above can be provided. Any one or both of the shielding member and the container may be moved and opened / closed.
- Reference numeral 10 in FIG. 2 is an example of a film forming apparatus having the opening / closing valve 70 of the first example of the present invention, and FIG. 1 corresponds to a cross-sectional view taken along the line AA in FIG.
- the opening / closing valve 70 includes a low melting point metal 76, a housing member 71, a covering member 79, a shielding member 72, and a telescopic member 66.
- the covering member 79 is disposed so that at least a part thereof is positioned above the opening of the housing member 71.
- the cover member 79 is box-shaped and has an opening formed on the bottom surface.
- the housing member 71 is a support plate 64 disposed below the cover member 79, and a support shaft 65 that is provided upright on the surface of the support plate 64 and has a tip protruding into the cover member 79 through an opening on the bottom surface of the cover member 79.
- a container 75 attached to the tip of the support shaft 65.
- the container 75 has an opening directed upward, and the low melting point metal 76 is disposed inside the container 75.
- the expansion / contraction member 66 has a cylindrical shape such as bellows, and surrounds the periphery of the support shaft 65. One end of the expansion / contraction member 66 is airtightly attached to the periphery of the opening of the covering member 79 so as to surround the opening. Is attached.
- one end and the other end of the expansion / contraction member 66 are hermetically connected to the covering member 79 and the housing member 71, respectively, and the internal space of the covering member 79, the internal space of the housing member 71, and the space between the covering member 79 and the housing member 71 are respectively.
- the internal space of the opening / closing valve 70 constituted by the above-described space is blocked from the external space (for example, atmospheric atmosphere) in a state where a connection pipe 78 and a shielding member 72 described later are sealed.
- the heating means 48 is attached to one or both of the covering member 79 and the housing member 71.
- the heating means 48 When the heating means 48 is energized from the power supply 47 and the member to which the heating means 48 is attached is heated among the covering member 79 and the housing member 71, the remaining members are heated by radiant heat, and eventually the covering member 79 and the housing member 71. Both are heated by the heating means 48.
- the low melting point metal 76 is disposed inside the housing member 71, and when the housing member 71 is heated, it is heated by heat conduction or radiant heat and melts or softens.
- the shielding member 72 has a cylindrical shape (pipe), and one end (upper end) is hermetically connected to the opening 77 of the covering member 79 so that gas does not move between the shielding member 72 and the covering member 79, and the other end (lower end). ) Faces the surface of the low-melting point metal 76 disposed in the housing member 71.
- a part of the shielding member 72 protrudes upward from the opening 77 of the covering member 79 in order to simplify the connection with the external device.
- the opening at the lower end of the pipe constituting the covering 79 becomes an opening / closing port 69, and the surrounding pipe tip portion becomes a shielding member 72, and the opening / closing port 69 is opened / closed as will be described later.
- the accommodating member 71 is attached to the moving means 61.
- the support plate 64 of the housing member 71 is attached to the moving unit 61, and when the support plate 64 is moved up and down by the moving unit 61, the support shaft 65 and the container 75 are moved up and down. That is, the entire storage member 71 is raised and lowered.
- the expansion / contraction member 66 expands and contracts, and the storage member 71 and the shielding member 72 relatively move while the internal space of the open / close valve 70 is blocked from the external space.
- the internal space of the on-off valve 70 is the outside of the shielding member 72. It will be in the closed state isolate
- the amount of movement of the moving means 61 is located between the bottom surface and the surface of the low-melting point metal 76 when the lower end of the shielding member 72 is not in contact with the bottom surface of the housing member 71 on which the low-melting point metal 76 is disposed. Is set to That is, the shielding member 72 is immersed in the molten low melting point metal 76.
- the opening / closing valve 70 Even if the opening / closing valve 70 is repeatedly opened and closed, the lower end of the shielding member 72 does not contact the solid (bottom surface) and thus does not wear, and the lower end reliably adheres to the surface of the low melting point metal 76. Therefore, the first and second internal spaces 73a and 73b are reliably separated when in the closed state.
- a through hole is formed in the cover 79, and a connection pipe 78 is configured by the through hole or a pipe inserted through the through hole in an airtight manner.
- the opening that is one end of the connection pipe 78 faces the first internal space 73 a to become the connection port 62, and the opening at the other end is located outside the opening / closing valve 70. Therefore, the connection pipe 78 connects the first internal space 73 a and the external space of the opening / closing valve 70. Further, the upper end of the shielding member 72 is led out to the outside of the on-off valve 70. Therefore, the shielding member 72 connects the second internal space 73b and the open / close valve 70 external space.
- the first and second internal spaces 73a and 73b are respectively inside the external device. Connected to space. Since the opening / closing valve 70 does not have an opening for connecting the internal space to the external space other than the shielding member 72 and the connection pipe 78, the internal space of the opening / closing valve 70 is external when the opening / closing valve 70 is connected to an external device. The space is shielded from the external atmosphere (eg air).
- the external atmosphere eg air
- the film forming apparatus 10 (evaporation apparatus) in FIG. 2 includes a discharge apparatus 50, one or more steam generators (gas generators) 20, and an opening / closing valve 70 equal to or more than the number of the steam generators 20. .
- An open / close valve 70 is disposed between each steam generator 20 and the discharge device 50, and one of the first and second internal spaces 73 a and 73 b is the steam generator 20 and the other is the discharge device 50. It is connected.
- At least a part of the discharge device 50 is disposed in a film formation tank 11 formed of a vacuum tank, and a discharge port 55 is formed in a portion of the discharge device 50 located in the film formation tank 11, and the discharge is performed through the discharge port 55.
- the internal space of the apparatus 50 is connected to the internal space of the film formation tank 11.
- the steam generator 20 includes a heating chamber 29 formed of a vacuum chamber, a mounting member 24 disposed inside the heating chamber 29, a heating unit 48 that heats both the heating chamber 29 and the mounting member 24, and a mounting member 24. And a supply means 31 for disposing the vapor deposition material.
- a vacuum exhaust system 9 is connected to the heating chamber 29, the film formation tank 11, and the opening / closing valve 70, and the vacuum exhaust system 9 opens and closes the internal space of the heating chamber 29 and the internal space of the film formation tank 11.
- the internal space of the valve 70 is evacuated to form a vacuum atmosphere at a predetermined pressure (for example, 10 ⁇ 5 Pa).
- the vapor deposition material is, for example, a material for an organic thin film of an organic EL element. More specifically, it is an organic material containing an electron transfer material, a light emitting material, a charge transfer material and the like.
- the heating device 48 is also attached to the discharge device 50.
- the heating means 48 is energized to heat the heating chamber 29, the mounting member 24, the discharge device 50, the covering member 79, the housing member 71, and the expansion / contraction member 66, and above the evaporation temperature at which the vapor deposition material evaporates. Therefore, the heating temperature (240 ° C. or higher and 400 ° C. or lower) below the decomposition temperature at which the vapor of the vapor deposition material decomposes is maintained.
- the low melting point metal 76 has a melting point equal to or lower than the heating temperature, and enters a molten state when the housing member 71 is heated to the heating temperature.
- the vacuum evacuation of the heating chamber 29 and the opening / closing valve 70 is stopped while the vacuum evacuation of the film forming tank 11 is continued and the vapor deposition material is supplied from the supply means 31 to the mounting member 24 heated to the heating temperature, the vapor of the vapor deposition material Occurs.
- the internal space of the on-off valve 70 (here, the first internal space 73 a) is connected to the internal space of the heating chamber 29.
- the vacuum evacuation of the heating chamber 29 is stopped, and vapor is generated inside the heating chamber 29.
- the pressure is higher than the internal pressure of the film formation tank 11 and further higher than the internal pressure of the discharge device 50 connected to the film formation tank 11.
- the opening / closing valve 70 between the steam generator 20 that has generated steam and the discharge device 50 When the opening / closing valve 70 between the steam generator 20 that has generated steam and the discharge device 50 is opened, and the heating chamber 29 of the steam generator 20 is connected to the discharge device 50, the steam is heated by the pressure difference. From 29, it passes through the opening / closing valve 70, moves to the discharge device 50, and is discharged from the discharge port 55 into the film formation tank 11. At this time, if the open / close valve 70 between the steam generating device 20 other than the steam generating device 20 that generated the steam and the discharge device 50 is closed, the steam is mixed into the other steam generating device 20. Instead, it moves to the discharge device 50.
- the discharge device 50, the accommodating member 71, the expansion / contraction member 66, the covering member 79, the low melting point metal 76, and the heating chamber 29 are maintained at the above heating temperature, the steam generated in the heating chamber 29 is released. It does not deposit in the middle of the route that passes until it is discharged from the outlet 55.
- a substrate holder 15 is disposed inside the film forming tank 11, and a substrate 81 is disposed on the substrate holder 15 so as to face the discharge port 55.
- the vapor discharged from the discharge port 55 reaches the surface of the substrate 81, and a thin film of vapor deposition material is formed on the surface of the substrate 81.
- the cooling plate 67 which shields the radiant heat from the discharge
- the supply of the material is stopped, and the open / close valve 70 between the steam generator 20 that generated the steam and the discharge device 50 is closed.
- the opening / closing valve 70 between the steam generator 20 and the discharge device 50 is opened, the newly generated steam is discharged from the discharge port 55, A new thin film of a vapor deposition material can be formed on the surface of the substrate 81.
- the on-off valve 100 of the second example has the same structure as the on-off valve 70 of the first example, except that the plurality of on-off valves 100 share the covering body 109, and the same members are denoted by the same reference numerals. explain.
- the covering member 109 is fixed, and the accommodating member 71 moves.
- the covering body 109 has a box shape, and the same number of openings as the housing member 71 are formed on the bottom surface.
- the housing member 71 is a support plate 64 disposed below the cover body 109, and a support shaft 65 that stands on the surface of the support plate 64 and has a tip projecting into the cover body 109 through an opening on the bottom surface of the cover body 109.
- a container 75 attached to the tip of the support shaft 65.
- the container 75 has an opening directed upward, and the low melting point metal 76 is disposed inside the container 75.
- the telescopic member 66 surrounds the support shaft 65, one end is airtightly attached around the opening of the covering body 109 so as to surround the opening, and the other end is attached to the surface of the support plate 64.
- the internal space is sealed.
- the support plate 64 is attached to the moving unit 61.
- the support shaft 65 and the container 75 are moved up and down. That is, the entire storage member 71 is raised and lowered.
- the expansion / contraction member 66 expands / contracts, so that the internal space of the on-off valve 100 is maintained from being blocked from the external space. Since the covering body 109 is fixed, it is relatively stationary with respect to an external device (for example, the steam generator 20 or the discharge device 50).
- connection pipe 78 and the shielding member 72 are also stationary with respect to the external device, the connection portion between the connection pipe 78 and the external device, and the shielding member can be opened and closed without opening any special member. No load is applied to the connection part of 72 and the external device.
- the connection pipe 78 is connected to the discharge device 50 and the shielding member 72 is connected to the vapor generating device 20. To do.
- the steam generated in each steam generation device 20 moves to the discharge device 50 through the internal space of the same covering body 109.
- the case where the moving unit 61 moves the housing member 71 has been described above, but the present invention is not limited to this.
- Reference numerals 110 and 120 in FIGS. 5 and 6 indicate open / close valves of the third and fourth examples.
- the difference between the third example and the fourth example is that, in the third example, each on-off valve 110 has an accommodating member (container) 111, whereas in the fourth example, a plurality of on-off valves 120 share one accommodating member 121. It is a point to do.
- the low melting point metal 76 may be disposed directly on the housing member 111 to which the elastic member 116 is attached, or the container 125 is disposed inside the housing member (box body 124) to which the elastic member 126 is attached. You may arrange
- each of the elastic members 116 and 126 is attached around the opening of the housing member 111 and 121 in an airtight manner so as to surround the opening, and the other end is closed by the covering members 119 and 129. The space is sealed.
- the housing members 111 and 121 are fixed and are stationary with respect to the external device.
- the covering members 119 and 129 are attached to the moving means, and when the covering members 119 and 129 are moved up and down by the moving means, the shielding member 72 is moved up and down together.
- the elastic members 116 and 126 expand and contract, the state where the internal spaces of the opening and closing valves 110 and 120 are blocked from the external space is maintained.
- the shielding member 72 When the covering members 119 and 129 move, the shielding member 72 also moves together. Therefore, the shielding member 72 is connected to an external device (e.g., a discharge device or a steam generation device) via an elastic member such as bellows. The impact generated during movement is absorbed by the elastic member to prevent the external device from being damaged.
- an external device e.g., a discharge device or a steam generation device
- the connecting pipe 78 is provided on the housing members 111 and 121, the connecting pipe 78 is stationary with respect to the external device. There is no need to provide an elastic member between the pipe 78 and the external device. Even when the connection pipe 78 is provided on the covering members 119 and 129, damage to the external apparatus can be prevented by connecting the connection pipe 78 to the external apparatus via an elastic member.
- any one of the covering members 79, 109, 119, and 129 and the housing members 71, 101, 111, and 121 is moved.
- the present invention is not limited to this, and the covering member 79 and the housing member are accommodated. Both of the members 71 may be moved. In this case, if both the connection pipe 78 and the shielding member 72 are connected to the external device via the expansion / contraction member, the external device is prevented from being damaged.
- the shape of the shielding member 72 is not particularly limited, but if the lower end of the wall constituting the cylinder of the shielding member 72 is tapered and sharpened, the contact area between the lower end of the shielding member 72 and the surface of the low melting point metal 76 is reduced. When the on-off valve 70 is closed, the low melting point metal 76 is not scattered.
- the shielding member 72 is not limited to a cylindrical shape, and may be various shapes such as a plate shape and a spherical shape as long as the internal space of the on-off valve 70 can be separated.
- the protrusion 74 is disposed on the bottom surface (here, the bottom surface of the container 75) where the low melting point metal 76 of the housing member 71 is disposed, and the inner wall surface of the container 75 is disposed.
- the low melting point metal 76 may be disposed in a ring-shaped space between the protrusion 74 and the side surface of the protrusion 74, and the low melting point metal 76 may be formed in a ring shape.
- the outer periphery and the inner periphery of the lower end of the shielding member 72 are made smaller than the opening of the container 75 and larger than the tip of the protrusion 74, respectively, and the outer periphery and the inner periphery are made the edge of the opening of the container 75.
- the protrusion 74 is positioned right above the region between the tip and outer periphery.
- the lower end of the shielding member 72 faces the surface of the ring-shaped low melting point metal 76, the lower end of the shielding member 72 is in close contact with the surface of the low melting point metal 76 in the closed state. If the protrusion 74 is disposed and the low melting point metal 76 is formed in a ring shape, the amount of the low melting point metal 76 required is small, and the heating efficiency of the low melting point metal 76 is high.
- the opening / closing port 69 is disposed at the lower end of the pipe, but as shown in FIGS. 8A and 8B, the opening is formed at the upper end of the pipe 41 inserted into the bottom surface of the container 43.
- the shielding member 49 made of a cylindrical projection provided on the bottom surface of the lid portion 40 may be moved up and down to open and close the opening / closing port 69 surrounded by the container 43.
- the opening / closing valve 70a has a container main body 45 disposed in a cover 79 which is a casing.
- a pipe 41 is inserted into the container main body 45 from the lower side of the bottom surface of the container main body 45 in a liquid-tight manner between the bottom surface of the container main body 45 and the pipe 41 protrudes above the bottom surface of the container main body 45. Yes.
- the outer periphery of the pipe 41 and the inner peripheral surface of the container main body 45 are spaced apart from each other. Therefore, the portion of the pipe 41 on the bottom surface of the container main body 45 has the inner peripheral surface and the bottom surface of the container main body 45 and the pipe 41. It is surrounded by a ring-shaped container 43 composed of an outer peripheral surface.
- a low melting point metal 46 is disposed in the ring-shaped container 43, and the low melting point metal 46 is heated to a temperature equal to or higher than the melting point by a heater 48 disposed outside the cover 79.
- a lid 40 is disposed on the top of the container 43. The bottom surface of the lid portion 40 faces the container 43, and the bottom surface is made of a ring-shaped protrusion, and a cylindrical shielding member 49 is formed. The lid 40 and the shielding member 49 do not transmit gas and are connected to each other in an airtight manner.
- a moving shaft 42 is connected to the lid portion 40, and the moving shaft 42 is led out of the covering body 79 in an airtight manner and connected to a motor 44.
- the motor 44 When the motor 44 is operated, the lid 40 and the shielding member 49 move up and down via the moving shaft 42.
- the covering member 79 is provided with a connection port 62 connected to one of the steam generator 20 and the discharge device 50.
- the lower end portion of the pipe 41 is led out from the wall surface of the covering member 79 in an airtight manner, and the upper end of the portion constituting the container 43 is formed as an opening / closing port 69 to connect the steam generator 20 and the discharge device 50. It is connected to the one not connected to the mouth 62.
- connection port 62 and the opening / closing port 69 are connected inside the cover 79, and accordingly, the steam generator 20 and the discharge device 50 are connected.
- the opening / closing port 69 has the lid portion 40 and the shielding member 49.
- the connection port 62 and the opening / closing port 69 are shut off. This is the same even if the ring-shaped container 43 and the pipe 41 move instead of the lid 40.
- the shielding member 49 is not in contact with the bottom surface of the container body 45.
- the low melting point metal 46 is not particularly limited, but the low melting point metal 46 having a melting point below the decomposition temperature of the gas to be moved (for example, vapor of the vapor deposition material) is used. If the low melting point metal 46 is heated below the decomposition temperature and melted, even if the gas contacts the low melting point metal 46, it is not decomposed.
- Reference numeral 70b in FIGS. 9 and 10 represents another open / close valve of the present invention.
- a first container 75 is disposed inside the covering member 79.
- a pipe is inserted in the cover 79 in an airtight manner. If the lower part of the pipe is a first shielding member 72, the first shielding member 72 is disposed above the first container 75.
- the first container 75 is airtightly attached to a moving means 61 such as a motor via a support shaft 65, and is configured to move up and down with respect to the first shielding member 72.
- a moving means 61 such as a motor
- a support shaft 65 is configured to move up and down with respect to the first shielding member 72.
- a low melting point metal 76 is disposed in the first container 75.
- the low melting point metal 76 is melted, and when the first shielding member 72 is separated from the melted low melting point metal 76 and is in non-contact state, the shielding port 72 is surrounded by the connection port 62 provided in the covering member 79.
- the first opening / closing port 69 is in communication as shown in FIG.
- a container main body 95 is disposed below the first container 75.
- a pipe 91 is connected to the bottom surface to form a ring-shaped second container 93, similar to the on-off valve 70a shown in FIGS. 8 (a) and 8 (b).
- a cylindrical second shielding member 98 made of a ring-shaped protrusion is formed in an airtight manner on the back surface of the first container 75 facing the vertically lower side.
- the second shielding member 98 is located above the second container 93, and the second shielding member 98 is inserted into and removed from the second container 93 by moving the first container 75 up and down. It is comprised so that.
- a low melting point metal 96 having the same composition as the low melting point metal 76 in the first container 75 is also disposed inside the second container 93, and is melted by raising the temperature.
- the second opening / closing port 63 is The container 75 becomes a lid portion and is closed by the lid portion and the second shielding member 98.
- the first opening / closing port 69 is opened, and the first opening / closing port 69 is connected to the connection port 62.
- the second shielding member 98 is removed from the second container 93, and the second shielding member 98 is a low melting point metal 96. And the second opening / closing port 63 is opened. At this time, the first opening / closing port 69 is closed, and the second opening / closing port 63 is connected to the connection port 62.
- the other end of the pipe 91 whose one end is the second opening / closing port 63 is connected to the cooling tank 92.
- the cooling tank 92 is cooled by being provided with a cooling device 97 on the outer periphery.
- the connection port 69 is connected to the steam generator 20, the first opening / closing port 69 is connected to the discharge device 50, and when the first opening / closing port 69 is closed and the second opening / closing port 63 is opened, steam is generated.
- the apparatus 20 and the cooling tank 92 are connected, and the vapor of the organic compound generated by the vapor generating apparatus 20 is guided to the cooling tank 92, cooled by the cooling apparatus 97, and deposited on the wall surface of the cooling tank 92.
- the residual steam in the steam generator 20 is removed, if it is connected to the cooling tank 92, the residual steam can be deposited and removed.
- the gas is deposited like the vapor of the vapor deposition material
- the gas is deposited on the surface of the low melting point metal 76 when the low melting point metal 76 is lower than the deposition temperature of the gas.
- a low melting point metal 76 having a melting point lower than the gas deposition temperature is used, and the low melting point metal 76 is heated to a temperature exceeding the deposition temperature to be melted.
- the low melting point metal 76 is any selected from the group consisting of In (melting point 156 ° C.), Sn (melting point 232 ° C.), and InSn alloy. One or more kinds of metals are used, and the low melting point metal 76 is heated to 240 ° C. or more and 400 ° C. or less to be melted.
- the housing member 71, the containers 75 and 93, and the shielding members 72 and 98 are made of a heat-resistant material that does not melt at the heating temperature, such as stainless steel, when the low melting point metals 76 and 96 are melted, neither deformation nor melting occurs. .
- the installation location of the opening / closing valves 70, 70 a, 70 b is not particularly limited, and the opening / closing valves 70, 70 a, 70 b may be arranged inside the film formation tank 11 or in a vacuum tank different from the film formation tank 11. May be.
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Abstract
Description
隔壁211には弁体221が嵌合する孔212が設けられている。
弁体221は不図示の移動手段に取り付けられており、移動手段により、弁体221を孔212に着座させると、弁体221の表面が孔212の内壁面(弁座面215)に密着し、隔壁211を挟んで一方の空間と他方の空間が分離され、閉状態となる(図7(b))。
弁体221を孔212から外し、弁体221表面と弁座面215とを離間させると、隔壁211を挟んで一方の空間と他方の空間が接続され、開状態となる(図7(a))。
一般に、開閉バルブ200の隔壁211と弁体221は金属やセラミック等で構成されている。そのような開閉バルブ200を繰り返し開閉すると、弁体221や隔壁211の嵌合部分が磨耗し、開閉バルブ200の密閉性が劣化するだけでなく、塵が発生して流体汚染の原因となる。
また、高温(240℃~400℃)で開閉動作を繰り返すと、シール面が破損し、バルブのシール性が失われる場合がある。
本発明は開閉バルブであって、前記遮蔽部材は筒状であり、前記遮蔽部材の下端は、筒の下端で構成され、前記第一の接続空間は前記遮蔽部材の内部空間に接続されるように構成された開閉バルブである。
本発明は開閉バルブであって、前記容器を収容する掩蔽体を有し、前記掩蔽体は開口を有し、前記開口に前記遮蔽部材が貫通し、かつ、前記遮蔽部材の外周と前記開口との間が気密になるよう設置され、前記遮蔽部材の上端が前記掩蔽体の外部に開口され、前記遮蔽部材の下端が前記掩蔽体の内部に開口し、前記移動手段は、前記容器を前記遮蔽部材に対して移動させ、前記移動手段が前記容器を上昇させると、前記遮蔽部材の下端が前記容器内の前記低融点金属と接して前記掩蔽体内部と前記遮蔽部材の内部を遮断し、前記移動手段が前記容器を下降させると、前記遮蔽部材の下端が前記容器内の前記低融点金属から離間して、前記掩蔽体内部と前記遮蔽部材の内部を接続する開閉バルブである。
本発明は開閉バルブであって、前記移動手段が前記掩蔽体の外部に配置され、前記移動手段と前記容器の間に配置され、前記掩蔽体の内部空間と外部空間を遮断する伸縮部材を有し、前記容器と前記移動手段は前記伸縮部材の内部空間内で連結され、前記移動手段が前記容器を移動させると、前記伸縮部材が伸縮し、前記掩蔽体の内部と外部空間を遮断した状態で、前記容器が移動する開閉バルブである。
本発明は開閉バルブであって、前記開閉バルブの内部空間のうち、前記遮蔽部材の外部空間に接続された接続部を有し、前記第二の接続空間は前記接続部に接続されるように構成された開閉バルブである。
本発明は開閉バルブであって、前記接続部は前記遮蔽部材に対して静止した開閉バルブである。
本発明は開閉バルブであって、前記掩蔽体は固定され、前記容器が前記移動手段に取り付けられ、前記接続部は前記掩蔽体に取り付けられた開閉バルブである。
本発明は開閉バルブであって、先端が前記容器で取り囲まれたパイプと、蓋部を有し、前記蓋部底面には、前記蓋部底面から突出して形成されたリング状の突起から成る筒状の前記遮蔽部材が形成され、前記パイプの外周に亘って、前記容器内に配置された溶融された前記低融点金属に前記遮蔽部材が接触すると、前記遮蔽部材と前記蓋部によって、前記開閉口が閉塞され、前記パイプの外側である前記第一の接続空間と、前記パイプの内側である前記第二の接続空間とが遮断される開閉バルブ。
本発明は開閉バルブであって、前記遮蔽部材と前記容器とを相対的に移動させる移動装置を有する開閉バルブ。
本発明は開閉バルブであって、掩蔽体と、前記掩蔽体の内部と外部をそれぞれ連通させる接続口と第一、第二の開閉口を有し、前記第二の開閉口が閉塞されながら前記第一の開閉口と前記接続口の間を前記掩蔽体の内部を通って気体が通行できる第一の状態と、前記第一の開閉口が閉塞されながら前記第二の開閉口と前記接続口の間を前記掩蔽体の内部を通って気体が通行できる第二の状態とを切り換えできるようにされた開閉バルブであって、前記掩蔽体内に配置され、固体と液体とがそれぞれ配置可能な第一、第二の容器と、前記掩蔽体内に配置され、前記第一、第二の容器にそれぞれ挿入、抜去が可能な筒状の第一、第二の遮蔽部とを有し、前記第一、第二の容器には、溶融された低融点金属が配置され、前記第一の容器が前記掩蔽体内で下方に位置するときは前記第一の遮蔽部が前記第一の容器から抜去され、前記第二の遮蔽部が前記第二の容器に挿入されて前記低融点金属と接触して前記第一の状態になり、上方に位置するときは前記第一の遮蔽部が前記第一の容器に挿入されて前記低融点金属と接触し、前記第二の遮蔽部が前記第二の容器から抜去されて前記第二の状態になる開閉バルブである。
本発明は開閉バルブであって、前記第二の遮蔽部材は前記第一の容器に設けられ、前記第二の容器に挿通されたパイプの上端の開口が前記第二の開閉口にされた開閉バルブである。
本発明は開閉バルブであって、前記低融点金属を加熱する加熱手段を有する開閉バルブである。
本発明は開閉バルブであって、前記低融点金属は、インジウムと、錫と、インジウム錫酸化物合金とからなる群より選択されるいずれか1種類以上の金属である開閉バルブである。
更に、成膜等に用いられる真空槽を高圧側空間とし、真空排気系を低圧側空間とし、気体の排気開始と、排気停止の切替に用いてもよい。
本発明の開閉バルブは、筺体内に配置され、固体と液体とが配置可能な容器と、筺体内に配置された遮蔽部材とを有している。
開閉バルブ70は、低融点金属76と、収容部材71と、掩蔽体79と、遮蔽部材72と、伸縮部材66とを有している。掩蔽体79は少なくとも一部が収容部材71の開口上方に位置するよう配置されている。
掩蔽体79を構成するパイプの下端の開口が開閉口69となり、その周囲のパイプ先端部分が遮蔽部材72となり、後述するように、開閉口69が開閉される
移動手段61により、収容部材71を昇降させると、伸縮部材66が伸縮し、開閉バルブ70の内部空間を外部空間から遮断したまま、収容部材71と遮蔽部材72とが相対的に移動する。
接続配管78の一端である開口は、第一の内部空間73aに面して接続口62となり、他端の開口は開閉バルブ70の外部に位置する。従って、接続配管78は、第一の内部空間73aと開閉バルブ70の外部空間を接続している。
また、遮蔽部材72の上端は開閉バルブ70外部に気密に導出されている。従って、遮蔽部材72は、第二の内部空間73bと開閉バルブ70外部空間を接続している。
各蒸気発生装置20と放出装置50の間に開閉バルブ70がそれぞれ配置され、第一、第二の内部空間73a、73bのうち、いずれか一方が蒸気発生装置20に、他方が放出装置50に接続されている。
蒸着材料は、例えば、有機EL素子の有機薄膜の材料である。より具体的には、電子移動材料、発光材料、電荷移動材料等を含有する有機材料である。
低融点金属76は、融点が上記加熱温度以下であり、収容部材71が加熱温度に昇温すると、溶融状態になる。
開閉バルブ70の内部空間(ここでは第一の内部空間73a)は、加熱室29の内部空間に接続されている。
このとき、蒸気を発生させた蒸気発生装置20以外の他の蒸気発生装置20と、放出装置50との間の開閉バルブ70を閉状態にすれば、蒸気が他の蒸気発生装置20へ混入せず、放出装置50へ移動する。
尚、基板ホルダ15上の基板81と、放出装置50の間に、放出装置50からの輻射熱を遮る冷却板67を設ければ、基板81が熱損傷しない。
第二例の開閉バルブ100は、複数の開閉バルブ100が掩蔽体109を共有する以外は、上記第一例の開閉バルブ70と同じ構造になっており、同じ部材には同じ符号を付して説明する。
掩蔽体109は箱状であって、底面に収容部材71と同じ数の開口が形成されている。収容部材71は掩蔽体109の下方に配置された支持板64と、支持板64の表面に立設され、先端が掩蔽体109底面の開口を通って掩蔽体109内部に突き出された支持軸65と、支持軸65の先端に取り付けられた容器75とを有している。容器75は開口を上方に向けられ、低融点金属76は容器75の内部に配置される。
掩蔽体109は固定されているから、外部装置(例えば蒸気発生装置20や放出装置50)に対して相対的に静止している。
以上は、移動手段61が収容部材71を移動させる場合について説明したが、本発明はこれに限定されない。
第三例と第四例の違いは、第三例では各開閉バルブ110がそれぞれ収容部材(容器)111を有するのに対し、第四例では複数の開閉バルブ120が一つの収容部材121を共有する点である。
伸縮部材116、126は一端が収容部材111、121の開口の周囲に、該開口を取り囲むように気密に取り付けられ、他端が掩蔽体119、129で塞がれ、開閉バルブ110、120の内部空間が密閉されている。
このとき、伸縮部材116、126が伸縮するから、開閉バルブ110、120の内部空間が外部空間から遮断された状態が維持される。
接続配管78を掩蔽体119、129に設ける場合であっても、接続配管78を伸縮部材を介して外部装置に接続すれば、外部装置の損傷が防止される。
遮蔽部材72は筒状に限定されず、開閉バルブ70の内部空間を分離可能であれば、板状、球状等種々の形状にすることができる。
容器43の上部には、蓋部40が配置されている。
蓋部40の底面は、容器43に面しており、底面には、リング形状の突出物から成り、筒状の遮蔽部材49が形成されている。蓋部40と遮蔽部材49は気体を透過させず、互いに気密に接続されている。
蓋部40が降下し、遮蔽部材49が、開閉口69の周囲の全周に亘って溶融した低融点金属46に接触し、浸漬されると、開閉口69は、蓋部40と遮蔽部材49とで蓋をされ、接続口62と開閉口69とは遮断される。
蓋部40ではなく、リング形状の容器43とパイプ41とが移動しても同様である。遮蔽部材49は容器本体45の底面とは接触しない。
図9、10の符号70bは、本発明の他の開閉バルブを示している。
掩蔽体79の内部には、第一の容器75が配置されている。
掩蔽体79にはパイプが気密に挿通されており、そのパイプの下部を第一の遮蔽部材72とすると、第一の遮蔽部材72は、第一の容器75の上方に配置されている。
第一の容器75の下方には、容器本体95が配置されている。容器本体95には、図8(a)、(b)で示した開閉バルブ70aと同様に、底面にパイプ91が接続されてリング状の第二の容器93が構成されている。
第一の容器75の底面の鉛直下方を向く裏面には、リング状の突起からなる筒状の第二の遮蔽部材98が気密に形成されている。
第二の遮蔽部材98が第二の容器93内に挿入され、第二の遮蔽部材98が低融点金属96に接触し、その内部に浸漬されると第二の開閉口63は、第一の容器75が蓋部となり、蓋部と第二の遮蔽部材98とによって閉塞される。このとき、第一の開閉口69は開放され、第一の開閉口69が接続口62に接続されている。
開閉バルブ70、70a、70bの設置場所は特に限定されず、開閉バルブ70、70a、70bを成膜槽11内部に配置してもよいし、成膜槽11とは異なる真空槽内に配置してもよい。
Claims (13)
- 第一、第二の接続空間の間の接続と遮断とを切り替える開閉バルブであって、
前記開閉バルブは低融点金属と、
前記低融点金属が収容される容器と、
下端が前記低融点金属に接触可能な遮蔽部材と、
前記容器に配置された前記低融点金属と、前記遮蔽部材とを相対的に移動させる移動手段とを有し、
前記低融点金属を溶融した状態で、前記遮蔽部材の下端を前記低融点金属の表面に接触させると、前記第一、第二の接続空間が遮断され、
前記遮蔽部材の下端を前記低融点金属の表面から離間させると、前記第一、第二の接続空間が接続される開閉バルブ。 - 前記遮蔽部材は筒状であり、
前記遮蔽部材の下端は、筒の下端で構成され、
前記第一の接続空間は前記遮蔽部材の内部空間に接続されるように構成された請求項1記載の開閉バルブ。 - 前記容器を収容する掩蔽体を有し、
前記掩蔽体は開口を有し、前記開口に前記遮蔽部材が貫通し、かつ、前記遮蔽部材の外周と前記開口との間が気密になるよう設置され、
前記遮蔽部材の上端が前記掩蔽体の外部に開口され、前記遮蔽部材の下端が前記掩蔽体の内部に開口し、
前記移動手段は、前記容器を前記遮蔽部材に対して移動させ、
前記移動手段が前記容器を上昇させると、前記遮蔽部材の下端が前記容器内の前記低融点金属と接して前記掩蔽体内部と前記遮蔽部材の内部を遮断し、
前記移動手段が前記容器を下降させると、前記遮蔽部材の下端が前記容器内の前記低融点金属から離間して、前記掩蔽体内部と前記遮蔽部材の内部を接続する請求項1記載の開閉バルブ。 - 前記移動手段が前記掩蔽体の外部に配置され、
前記移動手段と前記容器の間に配置され、前記掩蔽体の内部空間と外部空間を遮断する伸縮部材を有し、
前記容器と前記移動手段は前記伸縮部材の内部空間内で連結され、
前記移動手段が前記容器を移動させると、前記伸縮部材が伸縮し、前記掩蔽体の内部と外部空間を遮断した状態で、前記容器が移動する請求項3記載の開閉バルブ。 - 前記開閉バルブの内部空間のうち、前記遮蔽部材の外部空間に接続された接続部を有し、
前記第二の接続空間は前記接続部に接続されるように構成された請求項2乃至請求項4のいずれか1項記載の開閉バルブ。 - 前記接続部は前記遮蔽部材に対して静止した請求項5記載の開閉バルブ。
- 前記掩蔽体は固定され、
前記容器が前記移動手段に取り付けられ、
前記接続部は前記掩蔽体に取り付けられた請求項6記載の開閉バルブ。 - 先端が前記容器で取り囲まれたパイプと、
蓋部を有し、
前記蓋部底面には、前記蓋部底面から突出して形成されたリング状の突起から成る筒状の前記遮蔽部材が形成され、
前記パイプの外周に亘って、前記容器内に配置された溶融された前記低融点金属に前記遮蔽部材が接触すると、前記遮蔽部材と前記蓋部によって、前記開閉口が閉塞され、前記パイプの外側である前記第一の接続空間と、前記パイプの内側である前記第二の接続空間とが遮断される請求項1記載の開閉バルブ。 - 前記遮蔽部材と前記容器とを相対的に移動させる移動装置を有する請求項8記載の開閉バルブ。
- 掩蔽体と、前記掩蔽体の内部と外部をそれぞれ連通させる接続口と第一、第二の開閉口を有し、前記第二の開閉口が閉塞されながら前記第一の開閉口と前記接続口の間を前記掩蔽体の内部を通って気体が通行できる第一の状態と、前記第一の開閉口が閉塞されながら前記第二の開閉口と前記接続口の間を前記掩蔽体の内部を通って気体が通行できる第二の状態とを切り換えできるようにされた開閉バルブであって、
前記掩蔽体内に配置され、固体と液体とがそれぞれ配置可能な第一、第二の容器と、前記掩蔽体内に配置され、前記第一、第二の容器にそれぞれ挿入、抜去が可能な筒状の第一、第二の遮蔽部とを有し、
前記第一、第二の容器には、溶融された低融点金属が配置され、
前記第一の容器が前記掩蔽体内で下方に位置するときは前記第一の遮蔽部が前記第一の容器から抜去され、前記第二の遮蔽部が前記第二の容器に挿入されて前記低融点金属と接触して前記第一の状態になり、
上方に位置するときは前記第一の遮蔽部が前記第一の容器に挿入されて前記低融点金属と接触し、前記第二の遮蔽部が前記第二の容器から抜去されて前記第二の状態になる開閉バルブ。 - 前記第二の遮蔽部材は前記第一の容器に設けられ、
前記第二の容器に挿通されたパイプの上端の開口が前記第二の開閉口にされた請求項10記載の開閉バルブ。 - 前記低融点金属を加熱する加熱手段を有する請求項1乃至請求項11のいずれか1項記載の開閉バルブ。
- 前記低融点金属は、インジウムと、錫と、インジウム錫酸化物合金とからなる群より選択されるいずれか1種類以上の金属である請求項1乃至請求項12のいずれか1項記載の開閉バルブ。
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KR101223831B1 (ko) | 2013-01-17 |
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US8181666B2 (en) | 2012-05-22 |
US20110048563A1 (en) | 2011-03-03 |
JPWO2009107735A1 (ja) | 2011-07-07 |
JP5042354B2 (ja) | 2012-10-03 |
KR20100115776A (ko) | 2010-10-28 |
CN101960190A (zh) | 2011-01-26 |
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