WO2009080998A3 - Microscope a plasmon de surface a haute resolution avec interferometre heterodyne en polarisation radiale - Google Patents

Microscope a plasmon de surface a haute resolution avec interferometre heterodyne en polarisation radiale Download PDF

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Publication number
WO2009080998A3
WO2009080998A3 PCT/FR2008/052279 FR2008052279W WO2009080998A3 WO 2009080998 A3 WO2009080998 A3 WO 2009080998A3 FR 2008052279 W FR2008052279 W FR 2008052279W WO 2009080998 A3 WO2009080998 A3 WO 2009080998A3
Authority
WO
WIPO (PCT)
Prior art keywords
light source
microscope
surface plasmon
interferometer
radial polarization
Prior art date
Application number
PCT/FR2008/052279
Other languages
English (en)
Other versions
WO2009080998A2 (fr
Inventor
Lofti Berguiga
Francoise Argoul
Original Assignee
Ecole Norm Superieure Lyon
Centre Nat Rech Scient
Lofti Berguiga
Francoise Argoul
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ecole Norm Superieure Lyon, Centre Nat Rech Scient, Lofti Berguiga, Francoise Argoul filed Critical Ecole Norm Superieure Lyon
Priority to US12/747,266 priority Critical patent/US8610897B2/en
Priority to EP08865044A priority patent/EP2220480A2/fr
Publication of WO2009080998A2 publication Critical patent/WO2009080998A2/fr
Publication of WO2009080998A3 publication Critical patent/WO2009080998A3/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G01N21/553—Attenuated total reflection and using surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/067—Electro-optic, magneto-optic, acousto-optic elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

La présente invention concerne un microscope à plasmon de surface à balayage à haute résolution comportant une source (LG) de lumière cohérente, et un milieu de couplage et de confinement d'un plasmon de surface comportant un objectif (O, 0M) à grande ouverture numérique, une huile à immersion (Hi) et une lamelle de verre (Gs). Une couche métallique (Ms) recouvre une surface de la lamelle de verre (Gs). le microscope comporte également un interféromètre de Twyman-Green en mode hétérodyne est placé entre la source lumineuse et le milieu de couplage ainsi que des moyens de balayage (PL1, PL2, EC) de la couche métallique à l'aide d'un faisceau lumineux, et des moyens de détection (PD) du faisceau issu de l'interféromètre reliés à des moyens de traitement (S, F, DTec, COMP) et de formation d'une image à partir de ce faisceau. Conformément à l'invention, au moins un convertisseur de polarisation linéaire en polarisation radiale (CP) des faisceaux lumineux (L) émis par la source lumineuse (LG) est disposé entre la source lumineuse et l'interféromètre.
PCT/FR2008/052279 2007-12-11 2008-12-11 Microscope a plasmon de surface a haute resolution avec interferometre heterodyne en polarisation radiale WO2009080998A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/747,266 US8610897B2 (en) 2007-12-11 2008-12-11 High-resolution surface plasmon microscope with heterodyne interferometry in radial polarization mode
EP08865044A EP2220480A2 (fr) 2007-12-11 2008-12-11 Microscope a plasmon de surface a haute resolution avec interferometre heterodyne en polarisation radiale

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0759716 2007-12-11
FR0759716A FR2924805B1 (fr) 2007-12-11 2007-12-11 Microscope a plasmon de surface a haute resolution avec interferometre heterodyne en polarisation radiale.

Publications (2)

Publication Number Publication Date
WO2009080998A2 WO2009080998A2 (fr) 2009-07-02
WO2009080998A3 true WO2009080998A3 (fr) 2009-08-20

Family

ID=39226775

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2008/052279 WO2009080998A2 (fr) 2007-12-11 2008-12-11 Microscope a plasmon de surface a haute resolution avec interferometre heterodyne en polarisation radiale

Country Status (4)

Country Link
US (1) US8610897B2 (fr)
EP (1) EP2220480A2 (fr)
FR (1) FR2924805B1 (fr)
WO (1) WO2009080998A2 (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2924805B1 (fr) 2007-12-11 2011-05-06 Ecole Norm Superieure Lyon Microscope a plasmon de surface a haute resolution avec interferometre heterodyne en polarisation radiale.
WO2010088418A1 (fr) * 2009-01-29 2010-08-05 The Regents Of The University Of California Microscopie de haute résolution à éclairage structuré
EP2635896A1 (fr) 2010-11-03 2013-09-11 Reametrix Inc. Procédé et dispositif de mesure de fluorescence d'échantillons
CN102243174B (zh) * 2011-04-14 2013-05-22 中国科学院半导体研究所 基于相位检测的表面等离子体共振传感装置
DE102012010207B4 (de) * 2012-05-15 2024-02-29 Carl Zeiss Microscopy Gmbh Mikroskop und Mikroskopieverfahren
GB201216645D0 (en) * 2012-09-18 2012-10-31 Univ Nottingham Surface plasmon microscopy
US20150168300A1 (en) * 2014-01-28 2015-06-18 National Institute Of Standards And Technology Article and process for modifying light
CN107014803B (zh) * 2017-06-06 2019-09-27 中国计量大学 一种拉曼光谱检测装置
CN107329245B (zh) * 2017-07-06 2023-05-05 中国科学院西安光学精密机械研究所 基于径向偏振调制的干涉式结构光照明显微镜系统与方法
TWI637162B (zh) * 2017-08-01 2018-10-01 陳敬恒 Radial polarized light surface plasma excitation device
FR3090099B1 (fr) 2018-12-18 2022-04-22 Univ De Technologie De Troyes Dispositif laser pour interferometrie a polarisation
CN112649368B (zh) * 2020-12-25 2022-05-13 厦门大学 基于物镜耦合型的表面等离子体耦合发射定向增强型显微荧光成像与光谱检测方法及装置
KR102650211B1 (ko) * 2021-12-27 2024-03-21 재단법인 구미전자정보기술원 단일 광원을 이용한 표면 형상 정보 획득 장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5028136A (en) * 1987-01-23 1991-07-02 Iit Research Institute Rugate optical filter systems
US20040100636A1 (en) * 2000-05-30 2004-05-27 Somekh Michael Geoffrey Microscopy
US6970249B1 (en) * 1999-09-15 2005-11-29 Proteoptics, Ltd. Plasmon resonance phase imaging
FR2924805A1 (fr) * 2007-12-11 2009-06-12 Ecole Norm Superieure Lyon Microscope a plasmon de surface a haute resolution avec interferometre heterodyne en polarisation radiale.

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GB2248497B (en) * 1990-09-26 1994-05-25 Marconi Gec Ltd An optical sensor
US5623339A (en) * 1995-08-04 1997-04-22 International Business Machines Corporation Interferometric measuring method based on multi-pole sensing
JP2003083886A (ja) 2001-09-13 2003-03-19 Kubota Corp 表面プラズモン顕微鏡及び表面プラズモン顕微鏡における暗環像情報取得方法
US7545503B2 (en) * 2005-09-27 2009-06-09 Verity Instruments, Inc. Self referencing heterodyne reflectometer and method for implementing

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5028136A (en) * 1987-01-23 1991-07-02 Iit Research Institute Rugate optical filter systems
US6970249B1 (en) * 1999-09-15 2005-11-29 Proteoptics, Ltd. Plasmon resonance phase imaging
US20040100636A1 (en) * 2000-05-30 2004-05-27 Somekh Michael Geoffrey Microscopy
FR2924805A1 (fr) * 2007-12-11 2009-06-12 Ecole Norm Superieure Lyon Microscope a plasmon de surface a haute resolution avec interferometre heterodyne en polarisation radiale.

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
BERGUIGA L ET AL: "HIGH-RESOLUTION SURFACE-PLASMON IMAGING IN AIR AND IN WATER: V(Z) CURVE AND OPERATING CONDITIONS", OPTICS LETTERS, OSA, OPTICAL SOCIETY OF AMERICA, WASHINGTON, DC, US, vol. 32, no. 5, 1 March 2007 (2007-03-01), pages 509 - 511, XP001504715, ISSN: 0146-9592 *
HECHT EUGENE: "OPTICS - second edition", 1987, ADDISON-WESLEY PUBLISHING COMPANY, INC, ISBN: 0-201-11611-1, XP002533179 *
WATANABE K ET AL: "OPTIMIZED MEASUREMENT PROBE OF THE LOCALIZED SURFACE PLASMON MICROSCOPE BY USING RADIALLY POLARIZED ILLUMINATION", APPLIED OPTICS, OSA, OPTICAL SOCIETY OF AMERICA, WASHINGTON, DC, US, vol. 46, no. 22, 1 August 2007 (2007-08-01), pages 4985 - 4990, XP001507011, ISSN: 0003-6935 *

Also Published As

Publication number Publication date
EP2220480A2 (fr) 2010-08-25
US20100328674A1 (en) 2010-12-30
WO2009080998A2 (fr) 2009-07-02
FR2924805B1 (fr) 2011-05-06
FR2924805A1 (fr) 2009-06-12
US8610897B2 (en) 2013-12-17

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