ATE428100T1 - Interferometrisches verfahren und anordnung - Google Patents
Interferometrisches verfahren und anordnungInfo
- Publication number
- ATE428100T1 ATE428100T1 AT05793343T AT05793343T ATE428100T1 AT E428100 T1 ATE428100 T1 AT E428100T1 AT 05793343 T AT05793343 T AT 05793343T AT 05793343 T AT05793343 T AT 05793343T AT E428100 T1 ATE428100 T1 AT E428100T1
- Authority
- AT
- Austria
- Prior art keywords
- depth resolution
- chromatic
- focussing
- confocal
- wavelength
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4795—Scattering, i.e. diffuse reflection spatially resolved investigating of object in scattering medium
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
- A61B5/0062—Arrangements for scanning
- A61B5/0066—Optical coherence imaging
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
- A61B5/0062—Arrangements for scanning
- A61B5/0068—Confocal scanning
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
- A61B5/0075—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence by spectroscopy, i.e. measuring spectra, e.g. Raman spectroscopy, infrared absorption spectroscopy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
- G01B9/02035—Shaping the focal point, e.g. elongated focus
- G01B9/02036—Shaping the focal point, e.g. elongated focus by using chromatic effects, e.g. a wavelength dependent focal point
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02041—Interferometers characterised by particular imaging or detection techniques
- G01B9/02042—Confocal imaging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02041—Interferometers characterised by particular imaging or detection techniques
- G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
- G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/0056—Optical details of the image generation based on optical coherence, e.g. phase-contrast arrangements, interference arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
- A61B5/0082—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence adapted for particular medical purposes
- A61B5/0084—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence adapted for particular medical purposes for introduction into the body, e.g. by catheters
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/45—For evaluating or diagnosing the musculoskeletal system or teeth
- A61B5/4538—Evaluating a particular part of the muscoloskeletal system or a particular medical condition
- A61B5/4542—Evaluating the mouth, e.g. the jaw
- A61B5/4547—Evaluating teeth
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/72—Signal processing specially adapted for physiological signals or for diagnostic purposes
- A61B5/7235—Details of waveform analysis
- A61B5/7253—Details of waveform analysis characterised by using transforms
- A61B5/7257—Details of waveform analysis characterised by using transforms using Fourier transforms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200410052205 DE102004052205A1 (de) | 2004-10-20 | 2004-10-20 | Interferometrischer Multispektral-Sensor und interferometrisches Multispektral-Verfahren zur hochdynamischen Objekt-Tiefenabtastung oder Objekt-Profilerfassung |
DE200510006724 DE102005006724A1 (de) | 2004-10-20 | 2005-02-03 | Verfahren und Anordung zur konfokalen Spektral-Interferometrie, insbesondere auch zur optischen Kohärenz-Tomografie (OCT)und/oder optischen Kohärenz-Mikroskopie (OCM)von biologischen und technischen Objekten |
DE200510042733 DE102005042733B3 (de) | 2005-09-05 | 2005-09-05 | Verfahren und Anordnung zur Spektral-Interferometrie mit chromatischer Tiefenaufspaltung, insbesondere auch Mirau-Interferometer |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE428100T1 true ATE428100T1 (de) | 2009-04-15 |
Family
ID=35717652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05793343T ATE428100T1 (de) | 2004-10-20 | 2005-10-13 | Interferometrisches verfahren und anordnung |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1805477B1 (de) |
AT (1) | ATE428100T1 (de) |
DE (2) | DE112005002575A5 (de) |
WO (1) | WO2006042696A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109945800A (zh) * | 2019-03-28 | 2019-06-28 | 浙江大学 | 一种用于三维面型测量的线形光谱共焦系统 |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006023887B3 (de) * | 2006-05-16 | 2007-08-23 | Universität Stuttgart | Anordnung und Verfahren zur konfokalen Durchlicht-Mikroskopie, insbesondere auch zur Vermessung von bewegten Phasenobjekten |
CN100520361C (zh) * | 2006-07-05 | 2009-07-29 | 中国科学院上海光学精密机械研究所 | 全深度探测的频域光学相干层析成像的方法及其系统 |
US8725477B2 (en) | 2008-04-10 | 2014-05-13 | Schlumberger Technology Corporation | Method to generate numerical pseudocores using borehole images, digital rock samples, and multi-point statistics |
CN101878434B (zh) | 2008-04-10 | 2014-05-07 | 普拉德研究及开发股份有限公司 | 用于表征被井眼穿过的地质构造的方法 |
US8311788B2 (en) | 2009-07-01 | 2012-11-13 | Schlumberger Technology Corporation | Method to quantify discrete pore shapes, volumes, and surface areas using confocal profilometry |
DE102011000213A1 (de) * | 2011-01-19 | 2012-07-19 | Universität Kassel | Weißlicht-Interferenzmikroskop |
DE102011077567B4 (de) * | 2011-06-15 | 2013-05-29 | Leibniz-Institut Für Polymerforschung Dresden E.V. | Verfahren und vorrichtung zur ermittlung der oberflächentopografie von beschichteten, reflektierenden oberflächen |
MX2016004378A (es) * | 2013-10-11 | 2016-08-17 | Wavelight Gmbh | Sistema de diagnostico y metodo de diagnostico. |
CA2944688C (en) | 2014-04-10 | 2022-07-26 | Thorlabs, Inc. | Autofocus system |
EP3628990B1 (de) | 2018-09-26 | 2021-08-25 | ams International AG | Integrierter optischer wandler und verfahren zur erfassung von dynamischen druckänderungen |
CN110865392A (zh) * | 2019-11-28 | 2020-03-06 | 天津大学 | 一种基于光学频率梳并应用于工件测距成像的方法 |
US11477350B2 (en) * | 2021-01-15 | 2022-10-18 | Raytheon Company | Active imaging using a micro-electro-mechanical system (MEMS) micro-mirror array (MMA) |
US11550146B2 (en) | 2021-01-19 | 2023-01-10 | Raytheon Company | Small angle optical beam steering using micro-electro-mechanical system (MEMS) micro-mirror arrays (MMAS) |
CN114383823B (zh) * | 2022-01-04 | 2023-05-23 | 中国科学院精密测量科学与技术创新研究院 | 一种用于非相干光源光谱线型精确测量的方法和装置 |
FR3135793A1 (fr) * | 2022-05-19 | 2023-11-24 | Sciences Et Techniques Industrielles De La Lumiere | Sonde interférométrique à faible encombrement |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4405450A1 (de) * | 1994-02-18 | 1995-08-24 | Johannes Prof Dr Schwider | Dispersives Interferometrisches Profilometer |
US6480285B1 (en) * | 1997-01-28 | 2002-11-12 | Zetetic Institute | Multiple layer confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation |
GB2355310A (en) * | 1999-09-28 | 2001-04-18 | Ocular Sciences Ltd | White light interferometer |
DE10321895B4 (de) * | 2003-05-07 | 2010-09-16 | Universität Stuttgart | Sensor zur Erfassung der Topografie mit einem Zweistrahl-Interferometer |
-
2005
- 2005-10-13 DE DE112005002575T patent/DE112005002575A5/de not_active Withdrawn
- 2005-10-13 DE DE502005007056T patent/DE502005007056D1/de active Active
- 2005-10-13 AT AT05793343T patent/ATE428100T1/de active
- 2005-10-13 WO PCT/EP2005/011042 patent/WO2006042696A1/de active Application Filing
- 2005-10-13 EP EP05793343A patent/EP1805477B1/de not_active Not-in-force
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109945800A (zh) * | 2019-03-28 | 2019-06-28 | 浙江大学 | 一种用于三维面型测量的线形光谱共焦系统 |
Also Published As
Publication number | Publication date |
---|---|
EP1805477A1 (de) | 2007-07-11 |
DE112005002575A5 (de) | 2007-11-29 |
WO2006042696A1 (de) | 2006-04-27 |
EP1805477B1 (de) | 2009-04-08 |
DE502005007056D1 (de) | 2009-05-20 |
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