WO2009072351A1 - 圧電振動部品 - Google Patents

圧電振動部品 Download PDF

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Publication number
WO2009072351A1
WO2009072351A1 PCT/JP2008/068562 JP2008068562W WO2009072351A1 WO 2009072351 A1 WO2009072351 A1 WO 2009072351A1 JP 2008068562 W JP2008068562 W JP 2008068562W WO 2009072351 A1 WO2009072351 A1 WO 2009072351A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric vibration
volume
vibration element
package
vibration component
Prior art date
Application number
PCT/JP2008/068562
Other languages
English (en)
French (fr)
Inventor
Eitaro Kameda
Toru Kidu
Akihiro Mitani
Hiroaki Kaida
Original Assignee
Murata Manufacturing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co., Ltd. filed Critical Murata Manufacturing Co., Ltd.
Priority to CN200880118497XA priority Critical patent/CN101884168B/zh
Priority to DE112008003218.1T priority patent/DE112008003218B4/de
Priority to JP2009526964A priority patent/JP4458203B2/ja
Publication of WO2009072351A1 publication Critical patent/WO2009072351A1/ja
Priority to US12/794,144 priority patent/US8330336B2/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

　封止構造のコスト及び部品点数の増大を招くことなく、温度変化による水分の付着による振動特性の劣化が生じ難い、安価な圧電振動部品を得る。 　パッケージ２内に圧電振動素子１０が収納され、かつ封止されており、圧電振動素子１０の体積をＶｅ、パッケージ２内の封止空間の容積から圧電振動子１０の体積Ｖｅを減算して得られた内部空間容積をＶｐとしたときに、Ｖｅ／Ｖｐが下記の式（１）を満たす圧電振動部品１。 　式（１）：Ｖｅ／Ｖｐ＞（Ｓｅ×Ｍ）／｛（Ｓｐ＋Ｓｅ）×２．７２｝ 　ただし、Ｓｅは圧電振動素子の表面積であり、Ｓｐは上記パッケージ材の内部の圧電振動素子を除いた状態におけるパッケージ内の表面積を示し、Ｍは、使用温度がＴであり、相対湿度が１００％ＲＨである場合の単位容積当り最大水分質量（μｇ／ｍｍ３）をいうものとする。
PCT/JP2008/068562 2007-12-06 2008-10-14 圧電振動部品 WO2009072351A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN200880118497XA CN101884168B (zh) 2007-12-06 2008-10-14 压电振动部件
DE112008003218.1T DE112008003218B4 (de) 2007-12-06 2008-10-14 Piezoelektrische Schwingungskomponente
JP2009526964A JP4458203B2 (ja) 2007-12-06 2008-10-14 圧電振動部品
US12/794,144 US8330336B2 (en) 2007-12-06 2010-06-04 Piezoelectric vibration component

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-315409 2007-12-06
JP2007315409 2007-12-06

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/794,144 Continuation US8330336B2 (en) 2007-12-06 2010-06-04 Piezoelectric vibration component

Publications (1)

Publication Number Publication Date
WO2009072351A1 true WO2009072351A1 (ja) 2009-06-11

Family

ID=40717532

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/068562 WO2009072351A1 (ja) 2007-12-06 2008-10-14 圧電振動部品

Country Status (5)

Country Link
US (1) US8330336B2 (ja)
JP (1) JP4458203B2 (ja)
CN (2) CN103401523B (ja)
DE (1) DE112008003218B4 (ja)
WO (1) WO2009072351A1 (ja)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011030571A1 (ja) * 2009-09-14 2011-03-17 株式会社村田製作所 圧電振動装置の製造方法
JP2011066650A (ja) * 2009-09-17 2011-03-31 Kyocera Kinseki Corp 圧電デバイス
JP2011124978A (ja) * 2009-11-11 2011-06-23 Nippon Dempa Kogyo Co Ltd 表面実装水晶振動子及びその製造方法
JP2011142609A (ja) * 2009-12-09 2011-07-21 Nippon Dempa Kogyo Co Ltd 表面実装水晶振動子及びその製造方法
JP2012065305A (ja) * 2010-08-20 2012-03-29 Nippon Dempa Kogyo Co Ltd 圧電デバイスの製造方法及び圧電デバイス
JP2012165039A (ja) * 2011-02-03 2012-08-30 Disco Abrasive Syst Ltd 水晶振動子の製造方法
WO2013172440A1 (ja) * 2012-05-18 2013-11-21 株式会社村田製作所 水晶振動子の製造方法及び水晶振動子
WO2014115451A1 (ja) * 2013-01-23 2014-07-31 株式会社村田製作所 圧電振動部品
WO2014162896A1 (ja) * 2013-04-03 2014-10-09 株式会社村田製作所 水晶振動装置
WO2016194562A1 (ja) * 2015-05-29 2016-12-08 株式会社村田製作所 圧電振動子及びその製造方法
US9893265B2 (en) 2012-04-23 2018-02-13 Murata Manufacturing Co., Ltd. Crystal resonation device and production method therefor
JP7462882B2 (ja) 2021-07-15 2024-04-08 株式会社村田製作所 圧電振動子及びその製造方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012186709A (ja) * 2011-03-07 2012-09-27 Nippon Dempa Kogyo Co Ltd 圧電振動片及び圧電デバイス
JP2014110369A (ja) * 2012-12-04 2014-06-12 Seiko Epson Corp ベース基板、振動子、発振器、センサー、電子デバイス、電子機器、および移動体
CN104421137B (zh) * 2013-08-23 2018-02-06 席斌 一种新型压电泵
US9660610B2 (en) * 2014-05-30 2017-05-23 Kyocera Crystal Device Corporation Crystal device and mounting arrangement
US9666497B2 (en) * 2015-06-25 2017-05-30 Kyocera Crystal Device Corporation Crystal device
JP6245489B2 (ja) * 2015-10-02 2017-12-13 株式会社村田製作所 水晶片及び水晶振動子
CN113472310A (zh) 2015-10-08 2021-10-01 株式会社村田制作所 水晶振动元件、以及具备该水晶振动元件的水晶振子

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09181558A (ja) * 1995-12-27 1997-07-11 Kyocera Corp 圧電素子及び樹脂封止型圧電部品
JPH1022777A (ja) * 1996-07-05 1998-01-23 Miyota Kk 水晶振動子及びその製造方法
JP2002198741A (ja) * 2000-12-27 2002-07-12 Pioneer Electronic Corp 圧電発振器と該圧電発振器の組立方法
JP2004015604A (ja) * 2002-06-10 2004-01-15 Murata Mfg Co Ltd 圧電部品の製造方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06314928A (ja) 1993-04-28 1994-11-08 Nippon Dempa Kogyo Co Ltd 圧電発振器
JPH0936691A (ja) 1995-07-21 1997-02-07 River Eletec Kk 水晶振動子
WO1997008760A1 (fr) * 1995-08-25 1997-03-06 Mitsui Chemicals, Inc. Element d'oscillateur piezo-electrique, structure de support et procede de montage de cet oscillateur
JPH09246904A (ja) * 1996-03-14 1997-09-19 Citizen Watch Co Ltd 表面実装型水晶振動子
JP3336913B2 (ja) * 1997-06-30 2002-10-21 株式会社村田製作所 電子部品のパッケージ構造
WO1999009647A1 (fr) * 1997-08-19 1999-02-25 Miyota Co., Ltd. Vibreur piezo-electrique
JP4547788B2 (ja) * 2000-03-15 2010-09-22 セイコーエプソン株式会社 圧電振動子のパッケージ構造
DE60236790D1 (de) * 2001-04-18 2010-08-05 Epson Toyocom Corp Piezoelektrischer oszillator und verfahren zu seiner herstellung
JP3743302B2 (ja) * 2001-04-25 2006-02-08 株式会社村田製作所 電子部品及び電子部品の基板電極形成方法
JP2003258588A (ja) * 2002-02-27 2003-09-12 Fujimaru Kogyo Kk 小型電子部品
JP3786097B2 (ja) * 2002-03-25 2006-06-14 セイコーエプソン株式会社 圧電デバイスの蓋封止方法及び圧電デバイスの製造方法並びに圧電デバイスの蓋封止装置
JP4329492B2 (ja) * 2003-10-28 2009-09-09 セイコーエプソン株式会社 圧電振動片と圧電デバイスおよびこれらの製造方法、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
US7671517B2 (en) * 2003-12-25 2010-03-02 Murata Manufacturing Co., Ltd. Piezoelectric electroacoustic transducer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09181558A (ja) * 1995-12-27 1997-07-11 Kyocera Corp 圧電素子及び樹脂封止型圧電部品
JPH1022777A (ja) * 1996-07-05 1998-01-23 Miyota Kk 水晶振動子及びその製造方法
JP2002198741A (ja) * 2000-12-27 2002-07-12 Pioneer Electronic Corp 圧電発振器と該圧電発振器の組立方法
JP2004015604A (ja) * 2002-06-10 2004-01-15 Murata Mfg Co Ltd 圧電部品の製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
"Quartz Crystal Industry Association of Japan Gijutsu Iinkai", SUISHO DEVICE NO KAISETSU TO OYO, March 2007 (2007-03-01), pages 56 - 57 *

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9479135B2 (en) 2009-09-14 2016-10-25 Murata Manufacturing Co., Ltd. Method for manufacturing piezoelectric vibration device
JP4998620B2 (ja) * 2009-09-14 2012-08-15 株式会社村田製作所 圧電振動装置の製造方法
WO2011030571A1 (ja) * 2009-09-14 2011-03-17 株式会社村田製作所 圧電振動装置の製造方法
JP2011066650A (ja) * 2009-09-17 2011-03-31 Kyocera Kinseki Corp 圧電デバイス
JP2011124978A (ja) * 2009-11-11 2011-06-23 Nippon Dempa Kogyo Co Ltd 表面実装水晶振動子及びその製造方法
US8289089B2 (en) 2009-11-11 2012-10-16 Nihon Dempa Kogyo Co., Ltd. Surface mount crystal oscillator and manufacturing method of the same
JP2011142609A (ja) * 2009-12-09 2011-07-21 Nippon Dempa Kogyo Co Ltd 表面実装水晶振動子及びその製造方法
US8299859B2 (en) 2009-12-09 2012-10-30 Nihon Dempa Kogyo Co., Ltd Surface mount crystal oscillator and manufacturing method of the same
JP2012065305A (ja) * 2010-08-20 2012-03-29 Nippon Dempa Kogyo Co Ltd 圧電デバイスの製造方法及び圧電デバイス
JP2012165039A (ja) * 2011-02-03 2012-08-30 Disco Abrasive Syst Ltd 水晶振動子の製造方法
US9893265B2 (en) 2012-04-23 2018-02-13 Murata Manufacturing Co., Ltd. Crystal resonation device and production method therefor
JP5790878B2 (ja) * 2012-05-18 2015-10-07 株式会社村田製作所 水晶振動子
WO2013172440A1 (ja) * 2012-05-18 2013-11-21 株式会社村田製作所 水晶振動子の製造方法及び水晶振動子
US9985599B2 (en) 2012-05-18 2018-05-29 Murata Manufacturing Co., Ltd. Quartz vibrator manufacturing method and quartz vibrator
WO2014115451A1 (ja) * 2013-01-23 2014-07-31 株式会社村田製作所 圧電振動部品
WO2014162896A1 (ja) * 2013-04-03 2014-10-09 株式会社村田製作所 水晶振動装置
WO2016194562A1 (ja) * 2015-05-29 2016-12-08 株式会社村田製作所 圧電振動子及びその製造方法
JP6281734B2 (ja) * 2015-05-29 2018-02-21 株式会社村田製作所 圧電振動子及びその製造方法
JPWO2016194562A1 (ja) * 2015-05-29 2018-03-29 株式会社村田製作所 圧電振動子及びその製造方法
US10205434B2 (en) 2015-05-29 2019-02-12 Murata Manufacturing Co., Ltd. Piezoelectric resonator unit and method of manufacturing the same
JP7462882B2 (ja) 2021-07-15 2024-04-08 株式会社村田製作所 圧電振動子及びその製造方法

Also Published As

Publication number Publication date
US8330336B2 (en) 2012-12-11
DE112008003218B4 (de) 2019-01-31
CN103401523B (zh) 2016-06-01
JPWO2009072351A1 (ja) 2011-04-21
US20100231094A1 (en) 2010-09-16
JP4458203B2 (ja) 2010-04-28
CN101884168A (zh) 2010-11-10
CN101884168B (zh) 2013-07-03
DE112008003218T5 (de) 2010-09-23
CN103401523A (zh) 2013-11-20

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