WO2009057202A1 - マイクロ可動素子およびマイクロ可動素子アレイ - Google Patents

マイクロ可動素子およびマイクロ可動素子アレイ Download PDF

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Publication number
WO2009057202A1
WO2009057202A1 PCT/JP2007/071197 JP2007071197W WO2009057202A1 WO 2009057202 A1 WO2009057202 A1 WO 2009057202A1 JP 2007071197 W JP2007071197 W JP 2007071197W WO 2009057202 A1 WO2009057202 A1 WO 2009057202A1
Authority
WO
WIPO (PCT)
Prior art keywords
movable element
micro movable
driving electrode
conductor portion
driving
Prior art date
Application number
PCT/JP2007/071197
Other languages
English (en)
French (fr)
Inventor
Osamu Tsuboi
Norinao Kouma
Yoshihiro Mizuno
Hisao Okuda
Hiromitsu Soneda
Tsuyoshi Matsumoto
Original Assignee
Fujitsu Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to CN2007801011552A priority Critical patent/CN101827781B/zh
Priority to EP07830931.7A priority patent/EP2216288A4/en
Priority to PCT/JP2007/071197 priority patent/WO2009057202A1/ja
Priority to JP2009538878A priority patent/JP5240203B2/ja
Publication of WO2009057202A1 publication Critical patent/WO2009057202A1/ja
Priority to US12/761,123 priority patent/US7893596B2/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0136—Comb structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

【課題】駆動特性の劣化を抑制するのに適したマイクロ可動素子、および、そのようなマイクロ可動素子を含むマイクロ可動素子アレイを、提供する。 【解決手段】本発明のマイクロ可動素子（Ｘ１）は、第１駆動電極を有する可動部と、第１駆動電極との間に静電引力を発生させるための第２駆動電極と、第１駆動電極と電気的に接続している第１導体部（２２ｃ）と、第２駆動電極と電気的に接続している第２導体部（２２ｂ）と、第１および第２駆動電極と電気的に接続しておらず、第１導体部（２２ｃ）と絶縁膜（２３）を介して接合し、且つ、第２導体部（２２ｂ）と絶縁膜（２３）を介して接合している、第３導体部（２１ａ）とを備える。
PCT/JP2007/071197 2007-10-31 2007-10-31 マイクロ可動素子およびマイクロ可動素子アレイ WO2009057202A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN2007801011552A CN101827781B (zh) 2007-10-31 2007-10-31 微型可动元件以及微型可动元件阵列
EP07830931.7A EP2216288A4 (en) 2007-10-31 2007-10-31 MICROMOVABLE ELEMENT AND MICROMANUAL ELEMENT ARRAY
PCT/JP2007/071197 WO2009057202A1 (ja) 2007-10-31 2007-10-31 マイクロ可動素子およびマイクロ可動素子アレイ
JP2009538878A JP5240203B2 (ja) 2007-10-31 2007-10-31 マイクロ可動素子およびマイクロ可動素子アレイ
US12/761,123 US7893596B2 (en) 2007-10-31 2010-04-15 Micro movable element and micro movable element array

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/071197 WO2009057202A1 (ja) 2007-10-31 2007-10-31 マイクロ可動素子およびマイクロ可動素子アレイ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/761,123 Continuation US7893596B2 (en) 2007-10-31 2010-04-15 Micro movable element and micro movable element array

Publications (1)

Publication Number Publication Date
WO2009057202A1 true WO2009057202A1 (ja) 2009-05-07

Family

ID=40590612

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/071197 WO2009057202A1 (ja) 2007-10-31 2007-10-31 マイクロ可動素子およびマイクロ可動素子アレイ

Country Status (5)

Country Link
US (1) US7893596B2 (ja)
EP (1) EP2216288A4 (ja)
JP (1) JP5240203B2 (ja)
CN (1) CN101827781B (ja)
WO (1) WO2009057202A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4477659B2 (ja) * 2007-06-29 2010-06-09 富士通株式会社 マイクロ揺動素子およびマイクロ揺動素子アレイ
US10551613B2 (en) * 2010-10-20 2020-02-04 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
JP5855602B2 (ja) * 2013-05-22 2016-02-09 アオイ電子株式会社 静電誘導型電気機械変換素子およびナノピンセット
CN105712288B (zh) * 2014-12-02 2017-10-27 无锡华润上华半导体有限公司 Mems扭转式静电驱动器的制作方法
JP7128493B2 (ja) * 2019-01-22 2022-08-31 国立大学法人 東京大学 振動発電素子
JP7123881B2 (ja) * 2019-08-28 2022-08-23 株式会社東芝 センサ

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003019700A (ja) 2001-07-06 2003-01-21 Canon Inc マイクロ構造体、およびその作製方法
JP2004341364A (ja) 2003-05-16 2004-12-02 Ricoh Co Ltd 振動ミラーとその製造方法、光走査モジュール、光書込装置、画像形成装置
JP2006072252A (ja) 2004-09-06 2006-03-16 Nippon Signal Co Ltd:The プレーナ型アクチュエータ及びその製造方法
JP2006162663A (ja) * 2004-12-02 2006-06-22 Fujitsu Ltd マイクロ揺動素子
JP2006162699A (ja) * 2004-12-02 2006-06-22 Fujitsu Ltd マイクロ揺動素子

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4045090B2 (ja) * 2001-11-06 2008-02-13 オムロン株式会社 静電アクチュエータの調整方法
CN1549331A (zh) * 2003-05-07 2004-11-24 旺宏电子股份有限公司 整合微机电装置及集成电路的制造流程的方法
US7031040B2 (en) * 2003-05-16 2006-04-18 Ricoh Company, Ltd. Optical scanning apparatus, optical writing apparatus, image forming apparatus, and method of driving vibration mirror

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003019700A (ja) 2001-07-06 2003-01-21 Canon Inc マイクロ構造体、およびその作製方法
JP2004341364A (ja) 2003-05-16 2004-12-02 Ricoh Co Ltd 振動ミラーとその製造方法、光走査モジュール、光書込装置、画像形成装置
JP2006072252A (ja) 2004-09-06 2006-03-16 Nippon Signal Co Ltd:The プレーナ型アクチュエータ及びその製造方法
JP2006162663A (ja) * 2004-12-02 2006-06-22 Fujitsu Ltd マイクロ揺動素子
JP2006162699A (ja) * 2004-12-02 2006-06-22 Fujitsu Ltd マイクロ揺動素子

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2216288A4 *

Also Published As

Publication number Publication date
US7893596B2 (en) 2011-02-22
CN101827781A (zh) 2010-09-08
EP2216288A1 (en) 2010-08-11
EP2216288A4 (en) 2013-07-03
CN101827781B (zh) 2012-05-30
JPWO2009057202A1 (ja) 2011-03-10
US20100194235A1 (en) 2010-08-05
JP5240203B2 (ja) 2013-07-17

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