WO2009036861A1 - Verfahren und messgerät zum vermessen von oberflächen - Google Patents
Verfahren und messgerät zum vermessen von oberflächen Download PDFInfo
- Publication number
- WO2009036861A1 WO2009036861A1 PCT/EP2008/006912 EP2008006912W WO2009036861A1 WO 2009036861 A1 WO2009036861 A1 WO 2009036861A1 EP 2008006912 W EP2008006912 W EP 2008006912W WO 2009036861 A1 WO2009036861 A1 WO 2009036861A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- measuring
- radiation
- measurement
- measuring radiation
- probe head
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
Definitions
- a tactile sample is used in such coordinate measuring instruments as a standard measuring sensor, which consists of a ruby ball, which is mounted on a dipstick whose deflection in the probing via a switching element or weg messengerdes element is determined. The location of the contact is calculated based on the shift point or displacement path.
- a system for surface measurement with optical coherence tomography and a frequency-modulated source is known.
- a fiber ring laser is designed to be tunable by an acoustically tunable filter element.
- the laser radiation is then used for the interferometric measurement of surfaces in a common-path interferometer, ie an interferometer which uses at least partially identical components or beam paths for measurement and reference beam path.
- the reference distance is provided by a reflex in the measuring arm of the interferometer.
- a reference interferometer is used to calibrate the wavelength.
- the fiber ring laser can be extended by a fiber length of several kilometers in length, the repetition rate corresponding to the inverse of the circulation time of the light in the fiber ring.
- FDML Freier Domain Mode Locking
- an external cavity with a dispersive element e.g. a grating or prism in combination with a movable optical surface, e.g. a polygon mirror to be used for fast tuning of the laser wavelength for the laser resonator.
- a dispersive element e.g. a grating or prism in combination with a movable optical surface, e.g. a polygon mirror to be used for fast tuning of the laser wavelength for the laser resonator.
- the interferogram shows a significant variation in the amplitude, which can lead to complete extinction in a narrow wavelength range.
- These influences are dependent on the degree of tilting, i. the deviation of the angle of incidence of the measuring radiation to the surface normal or the perpendicular to the tangent of the surface, and of the surface structure.
- the control of the scanning movement can be carried out on the basis of the recorded measured values themselves, ie without additional supporting Grobmeßvorées.
- the course of the amplitude over the wavelength is analyzed, from which the reliability of the evaluation can be concluded. If the course is uneven, this can be interpreted as an indication that the target surface must be tilted with respect to the measuring beam.
- This information can be used directly for adjusting the measuring device or its means for guiding the optical probe head with respect to the object until a uniform amplitude curve is observed and the systematic error in the measurement is negligible.
- the irregularity of the amplitude profile from the frequency-modulated interferometry over a large wavelength range is a controlled variable for the positioning of the optical probe head by the coordinate measuring machine.
- the position of the object is first determined sufficiently accurately in the coordinate system of the coordinate measuring machine. This can be done by measuring measuring points or structures of the measuring object known in the spatial position. Based on known CAD data or other model or rough measurement data, the scan can then be scheduled and performed. This can be done by the machine automatically, semi-automatically or manually by the operator.
- the measuring point density and measuring point position is determined on the measuring object.
- the orientation of the measurement beam is determined so that the measurement beam is aligned sufficiently orthogonal to the measurement object surface during the measurements, and if necessary, the interference of multiple reflections are minimized.
- the difference between CAD data and measurement object can then be determined as a target / actual comparison subsequently at the necessary points in a further step.
- the necessary measuring object coordinates must be obtained from the data collected in the measuring process. to align the measuring beam sufficiently orthogonal to the target surface.
- the surroundings of the point or area to be measured can be determined by a rough pre-measurement in its spatial position and possibly in its course. For this purpose, a higher measurement error is deliberately accepted, since no high-precision measured values are needed, but only estimates of the orientation of the surface, ie the direction of the surface normals. In the subsequent accurate measurement can be concluded from the coarse measurement on the respective current orientation of the surface of the next measurement point and the beam path by movement of the means for guiding the probe head are oriented accordingly.
- the coordinate measuring machine is readjusted in order to achieve as parallel as possible to the surface tangent movement of the probe head.
- Another approach which can also be fundamentally combined with the above solutions, based on the use of coarse measurements, which can be carried out with other measuring principles or additional components.
- scanning or scanning In addition to also scanning or scanning
- coarse measurements may be parallel or sequential measurements at three measuring points in the vicinity of the
- Such measurements or three-point measurements can be made, for example, by the following methods.
- Pneumatic sensors also work without contact and determine the distance from the pressure drop.
- suitable sensor types are, for example, offered by the company Micro-Epsilon.
- FIG.l is a schematic representation of the measuring arrangement of a measuring device according to the invention.
- FIG. 3 shows the illustration of a first embodiment of an optical probe head for a measuring device according to the invention
- 6a-b show the representation of measurement interferogram, phase and amplitude curve for a non-tilted rough target
- FIGS. 7a-b show the representation of measurement interferogram, phase and amplitude profile for a tilted, rough target and the assumption of a threshold criterion as a first embodiment of the method according to the invention; 8 shows the schematic illustration of the effect of the first embodiment of the method according to the invention for the tilted rough target;
- FIG. 10 shows the illustration of an embodiment of a probe head with parallel coarse measurements for a measuring device according to the invention.
- Fig.l shows the schematic representation of the interferometric distance measuring arrangement of a measuring device according to the invention with a frequency-modulated laser source 1 for generating at least one laser beam and a radiation detector 8 for receiving the backscattered from a surface 7 measuring radiation.
- the frequency-modulated laser source 1 constructed in fiber optics as a fiber ring laser comprises an optical isolator 1a, a semiconductor optical amplifier 1b and a tunable filter element Ic, which may be formed, for example, as a Fabry-Perot element.
- a first optical coupler Id is used, which in turn is connected to a second optical coupler 2.
- the frequency-modulated laser source is preferably designed so that it has a coherence length of more than 1 mm, in particular in the range of 1 millimeter to 20 centimeters, eg a central wavelength between 1.3 and 1.55 microns and a tunable wavelength range of more than 40 nm with a dynamic linewidth of less than 0.02 nm with a coherence length of 60 mm or more has.
- the coherence length thus also allows measurements over a depth or distance range of a few centimeters.
- the laser radiation generated by the laser source is guided via the second optical coupler 2 into a calibration interferometer 4 with an optical detector 5, this calibration interferometer 4 in particular in Etalon or Mach Zehnder configuration can be performed.
- This calibration interferometer 4 serves to take account of or compensate for nonlinearities in the tuning behavior.
- the second output of the second optical coupler 2 leads to the interferometer used for the measurement, which is formed in common-path geometry, that has a partial common interferometer beam for measuring and Referenzinterferometerarm.
- Reference interferometer is hereby defined by a reflection at the optical exit surface of a Gradientenindex- lens 6, so that a constant, in particular known distance is fixed, with further back reflections are avoided.
- the reference surface is within the beam shaping optics used to emit the laser beam.
- the measuring interferometer arm is defined by the reflection at the surface 7 to be measured.
- the back-reflected light from the measuring and reference interferometer arm is finally guided onto the radiation detector 8, which is preferably designed as an InGaAs detector with a bandwidth of more than 100 MHz. 2, the main components for carrying out a method according to the invention are explained as a block diagram.
- the signals picked up by the optical probe head OP are conducted via a communication link 9a to the optical probe head unit OPME, but alternatively the radiation detector can also be arranged in the optical probe head unit OPME, so that instead of the communication link 9a an optical connection, eg a Fiber connection, is used.
- the data of the optical probe head measuring unit OPME are in turn transmitted via a communication link 9b to the control unit SE of the coordinate measuring machine KMM.
- This control unit in turn transmits corresponding control commands via the communication links 9b, 9c and 9d to the optical probe head measuring unit OPM, the coordinate measuring machine and in particular the guide means FM for the defined scanning guidance of the optical probe head OP.
- a computing and evaluation unit RAE for possible evaluation and communication with an operator U is a computing and evaluation unit RAE.
- FIG 3 is a representation of a first embodiment of an optical probe head 12 for a measuring device according to the invention.
- the probe head is defined by an arm member 10 and a hinge 11 as a guiding means guided scanning over the surface to be measured, whereby a rotation of the joint 11 relative to the arm member 10 is possible. Due to the rotatability relative to the arm member 10 and the subsequent hinge 11, the probe head 12 can follow well angled or highly variable surface progressions. In principle, however, further rotational or translatory degrees of freedom can be incorporated into the Guiding means are integrated to allow a further improved guidance of the probe head 12.
- the probe head 12 has at least one surface-side emission and reception beam path of the measurement beam MS.
- the beam paths are passed through a thin tube, wherein in the subsequent to this tube thicker part of the radiation detector itself or light guide can be arranged for forwarding to another integrated radiation detector.
- the probe head 12 can be controlled by the guide means so that the condition of a substantially vertical incidence of the laser beam is adhered to the surface, in particular a deviation of +/- 5 ° is not exceeded to the surface normal.
- the probe head 12 can be moved so that it is moved continuously with relative to the surface tangent constant orientation, in particular with perpendicular to the surface tangent oriented emission and reception beam.
- 4a-b shows the schematic representation of the beam path in the first and a further embodiment of the optical probe head for a measuring device according to the invention.
- FIG. 4a illustrates the optical beam path for the first embodiment of the optical probe head 12.
- a fiber 12a serves to guide the measuring radiation MS to be emitted as well as the reflected radiation.
- the emission takes place here by a gradient index lens 12b arranged in the tubular part, which transmits the measuring radiation to the surface 7 'to be measured. emits and the reflected from there measuring radiation MS coupled again into the fiber 12a.
- the beam path shown in FIG. 4 b is realized for the embodiment of the optical probe head 13 shown below in FIG. 5 b.
- a fiber 13a and a gradient index lens 13b serve to guide the measuring radiation MS to be emitted as well as the reflected radiation MS.
- the emission onto the surface 7 'takes place only after a deflection by a deflecting element 13c arranged downstream of the gradient index lens 13b, which allows an emission direction perpendicular to the longitudinal axis of the tubular part of the probe head 13.
- bores or other cylindrical openings or structures can be scanned particularly advantageously.
- FIGS. 5a-h Various embodiments of the optical probe head are shown in a general overview of FIGS. 5a-h, wherein all variants are shown as guide means for easier comparability with arm element 10 and hinge 11.
- guide means for easier comparability with arm element 10 and hinge 11.
- other embodiments of the guide means may also be used, e.g. with a ball joint instead of the joint 11.
- FIG. 5a shows the variant of a probe head 13 already explained in FIG. 4 b with perpendicular emission of the measuring radiation MS.
- the sample head 14 shown in FIG. 5c represents a combination of the variants of FIGS. 3 and 5b.
- the beam path of the measurement radiation is split into two channels whose emission and reception directions are oriented orthogonal to one another.
- the measuring channels can be used in parallel or sequentially, wherein, when used in parallel, either two measuring arrangements or else a single measuring arrangement with a separation of the two channels, e.g. by different polarization directions, is possible.
- Such a design of the probe head allows, for example, a measurement of edges or steps.
- FIGS. 5d and 5e show a modification of the embodiments of FIGS. 5b and 5c, in which the tubular part of the probe head 13 ', 14' is rotatable in its longitudinal axis and thus in relation to the hinge 11.
- a circular scanning movement can be carried out with the measuring beam MS.
- a further alternative is a cross-shaped scanning movement (not shown here).
- Such scanning movements can also be used in particular for rapid coarse measurement and thus for estimating the position of the surface normals in the region of the surface to be measured.
- FIGS. 5f and 5g sample heads 15, 16 with multi-channel beam guidance are shown, wherein here too a parallel or sequentially switching emission can be realized.
- These embodiments allow the high-precision measurement of openings or surfaces without major changes in the position of the probe head 15, 16 or with reduced accuracy of the measurement an estimating coarse measurement to many points in the environment.
- Fig.5h shows the embodiment of a probe head 17 for local fine measurement.
- the measurement radiation is not emitted in a collimated manner but focused in the near range to the resolution of a finely structured surface 1 ".
- FIGS. 6a-b the representation of the measurement interferogram, phase and amplitude course for a non-tilted rough aluminum surface takes place.
- 6a shows a measured interferogram over a wavelength range of 50 nm. The envelope shows only a very weak variation in this wavelength range.
- FIG. 6b shows the phase and amplitude profile of the above interferogram, with the phase being shown with dashed line and the amplitude with a solid line.
- FIGS. 7a-b show the corresponding representations of the measurement interferogram, phase and amplitude curve for the same surface but tilted with respect to the direction of incidence of the measurement beam.
- the phase information in the constriction areas is very undefined up to strong "outliers".
- the structurally interfering part is shifted laterally, which, however, due to the wavelength is only in a relatively small spectral range of a few nm present. If one looks at the situation in the fiber plane, then a speckle wanders wavelength-dependent around the fiber core.
- phase information belonging to amplitude values above the threshold value is evaluated on the basis of the threshold value, which is illustrated in FIG. 7b by the bold-marked area of the dashed line, which represents the phase.
- Another possibility is the amplitude weighting of the phase values during distance measurement for the calculation of the phase information.
- FIG. 8 shows the corresponding effect of the first embodiment of the method according to the invention for the tilted rough aluminum surface illustrated in FIG. 7a-b.
- Plotted is the measured distance in mm with lateral displacement of the target in discrete steps without changing the geometric distance.
- the solid line corresponds to the measured distances without threshold criterion, which with dashed line the measurements with threshold criterion.
- the fluctuation range of the measured values is reduced by the use of the threshold criterion in the evaluation.
- FIG. 9 illustrates a second embodiment of the method according to the invention with generating a frequency-modulated laser beam, emitting the laser beam as measurement radiation MS onto the surface 1 ", receiving the measurement radiation MS backscattered by the surface 1", and interferometric distance measurements from a reference point to the surface 1 ''.
- the laser radiation is emitted and received during a scanning guide over the surface to be measured 1 '', whereby deviations of a vertical incidence of the laser beam are considered on the surface during scanning of the probe head 12 along the measuring path shown in dashed lines by the control takes place in that the condition of a substantially perpendicular impingement of the laser beam on the surface 1 "is maintained, in particular a deviation of +/- 5 ° from the surface normal is not exceeded.
- This control process ensures that the angle of incidence of the measurement radiation always remains within a narrow tolerance range around the perpendicular to the surface 1 '' or its surface normal or usable measurements are only performed if this condition is met.
- Arm element 10 as a guide means can on the basis of the wavelength-dependent curve of the amplitude of the received measurement radiation MS as a controlled variable for the Issuing done.
- a variation of the angle of incidence of the laser beam can take place, which takes place until a substantially wavelength-independent course of the amplitude is reached.
- the control can be done using information about the topography of the surface 1 ", in particular using a model for the surface 1", wherein the model is preferably computer generated or created by a preceding coarse scan.
- the data from the model or coarse scan of the object to be measured is used to position the probe head 12 so that the measuring radiation MS is aligned along the surface normal.
- the control can also be carried out using extrapolation of previous distance measurements, in particular taking into account predetermined maximum and / or minimum radii of curvature of the surface
- Another possibility is the inclusion of supporting coarse measurements to determine the course of the surface 7 '', as is possible, for example, with the embodiment of a probe head 18 shown in Fig.10 with parallel coarse measurements.
- the probe head 18 substantially corresponds to the variant in Figure 3, but now has additional measuring elements 18a, which are aligned with its coarse measuring axis GM axis parallel to the emission axis of the measuring radiation MS and also pivotally mounted on the hinge 11. These measuring elements 18a can thus be moved in the same way with the emission axis of the measuring radiation MS.
- the number of measuring elements 18a can be chosen differently in principle, the probe head 18 has at least one component for local coarse measurement.
- three measuring elements 18a are arranged around the body of the sample body, so that a parallel three-point measurement can take place. This allows controlling using local coarse measurements near the point of impact of the measuring radiation MS on the surface
- the measuring elements 18a can use a multiplicity of measuring principles; in particular, they can be acoustically, in particular by means of ultrasound, optically, in particular by triangulation, phase or transit time measuring principle, mechanically contacting, in particular by deflecting a path sensor, inductive, capacitive or pneumatic designed.
- Corresponding local coarse measurement components may thus include, for example, one of the following sensors: pneumatic sensor, ultrasonic sensor, tactile sensor, laser triangulation sensor, confocal displacement sensor, laser transit time sensor, laser phase measurement displacement sensor, capacitive displacement sensor, eddy current displacement sensor or inductive displacement sensor.
- sensors for coarse measurement can also be used according to the invention.
- an independent mobility is also possible can be realized, so that parallel to the high-precision measurement process independently and elsewhere takes a rough measurement to record the surface topography.
- this coarse measuring process can also be based on methods other than scanning or pointwise measuring, as are known, for example, from stereo photogrammetry.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010524372A JP5269080B2 (ja) | 2007-09-14 | 2008-08-22 | 表面の測定方法および測定装置 |
CA2698961A CA2698961C (en) | 2007-09-14 | 2008-08-22 | Method and measuring device for gauging surfaces |
AU2008300962A AU2008300962B2 (en) | 2007-09-14 | 2008-08-22 | Method and measuring device for gauging surfaces |
US12/675,191 US9127929B2 (en) | 2007-09-14 | 2008-08-22 | Method and measuring device for gauging surfaces |
EP08785674.6A EP2185890B1 (de) | 2007-09-14 | 2008-08-22 | Verfahren und messgerät zum vermessen von oberflächen |
CN2008801067571A CN101802542B (zh) | 2007-09-14 | 2008-08-22 | 表面测量方法和测量仪 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP07116509.6 | 2007-09-14 | ||
EP07116509A EP2037214A1 (de) | 2007-09-14 | 2007-09-14 | Verfahren und Messgerät zum vermessen von Oberflächen |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009036861A1 true WO2009036861A1 (de) | 2009-03-26 |
Family
ID=38983733
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2008/006912 WO2009036861A1 (de) | 2007-09-14 | 2008-08-22 | Verfahren und messgerät zum vermessen von oberflächen |
Country Status (7)
Country | Link |
---|---|
US (1) | US9127929B2 (de) |
EP (2) | EP2037214A1 (de) |
JP (1) | JP5269080B2 (de) |
CN (1) | CN101802542B (de) |
AU (1) | AU2008300962B2 (de) |
CA (1) | CA2698961C (de) |
WO (1) | WO2009036861A1 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2541193A1 (de) | 2011-06-27 | 2013-01-02 | Hexagon Technology Center GmbH | Interferometrisches Entfernungsmessverfahren zum Vermessen von Oberflächen und ebensolche Messanordnung |
EP2690396A1 (de) | 2012-07-24 | 2014-01-29 | Hexagon Technology Center GmbH | Interferometrische Entfernungsmessanordnung und ebensolches Verfahren |
EP2690395A1 (de) | 2012-07-24 | 2014-01-29 | Hexagon Technology Center GmbH | Interferometrische Entfernungsmessanordnung und ebensolches Verfahren |
Families Citing this family (66)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007018951B3 (de) * | 2007-04-21 | 2009-01-02 | Carl Mahr Holding Gmbh | Modulares Messkopfsystem |
DE102009005111A1 (de) * | 2008-03-20 | 2009-10-29 | Siemens Aktiengesellschaft | Verfahren und Vorrichtung zur Formbestimmung von Objekten bei der Oberflächenabtastung |
US9551575B2 (en) | 2009-03-25 | 2017-01-24 | Faro Technologies, Inc. | Laser scanner having a multi-color light source and real-time color receiver |
DE102009015920B4 (de) | 2009-03-25 | 2014-11-20 | Faro Technologies, Inc. | Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung |
US9529083B2 (en) | 2009-11-20 | 2016-12-27 | Faro Technologies, Inc. | Three-dimensional scanner with enhanced spectroscopic energy detector |
US9210288B2 (en) | 2009-11-20 | 2015-12-08 | Faro Technologies, Inc. | Three-dimensional scanner with dichroic beam splitters to capture a variety of signals |
DE102009057101A1 (de) | 2009-11-20 | 2011-05-26 | Faro Technologies, Inc., Lake Mary | Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung |
US9113023B2 (en) | 2009-11-20 | 2015-08-18 | Faro Technologies, Inc. | Three-dimensional scanner with spectroscopic energy detector |
US8630314B2 (en) | 2010-01-11 | 2014-01-14 | Faro Technologies, Inc. | Method and apparatus for synchronizing measurements taken by multiple metrology devices |
US9163922B2 (en) | 2010-01-20 | 2015-10-20 | Faro Technologies, Inc. | Coordinate measurement machine with distance meter and camera to determine dimensions within camera images |
US8875409B2 (en) | 2010-01-20 | 2014-11-04 | Faro Technologies, Inc. | Coordinate measurement machines with removable accessories |
US8832954B2 (en) | 2010-01-20 | 2014-09-16 | Faro Technologies, Inc. | Coordinate measurement machines with removable accessories |
GB2489370B (en) | 2010-01-20 | 2014-05-14 | Faro Tech Inc | Coordinate measuring machine having an illuminated probe end and method of operation |
CN102947667A (zh) | 2010-01-20 | 2013-02-27 | 法罗技术股份有限公司 | 具有可移除的附件装置的坐标测量机 |
US9628775B2 (en) | 2010-01-20 | 2017-04-18 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations |
US8638446B2 (en) | 2010-01-20 | 2014-01-28 | Faro Technologies, Inc. | Laser scanner or laser tracker having a projector |
US9607239B2 (en) | 2010-01-20 | 2017-03-28 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations |
US8898919B2 (en) | 2010-01-20 | 2014-12-02 | Faro Technologies, Inc. | Coordinate measurement machine with distance meter used to establish frame of reference |
US8677643B2 (en) | 2010-01-20 | 2014-03-25 | Faro Technologies, Inc. | Coordinate measurement machines with removable accessories |
US9879976B2 (en) | 2010-01-20 | 2018-01-30 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features |
US8615893B2 (en) | 2010-01-20 | 2013-12-31 | Faro Technologies, Inc. | Portable articulated arm coordinate measuring machine having integrated software controls |
DE112011100300T5 (de) | 2010-01-20 | 2013-03-07 | Faro Technologies, Inc. | Integriertes Temperaturmesssystem für Teile |
DE102010020925B4 (de) | 2010-05-10 | 2014-02-27 | Faro Technologies, Inc. | Verfahren zum optischen Abtasten und Vermessen einer Umgebung |
DE202010009802U1 (de) | 2010-07-02 | 2011-11-29 | Zapfwerke Gmbh & Co. Kg | Messeinrichtung für Kalksandsteinrohlinge |
US9168654B2 (en) | 2010-11-16 | 2015-10-27 | Faro Technologies, Inc. | Coordinate measuring machines with dual layer arm |
CN102128599B (zh) * | 2010-12-27 | 2012-06-13 | 中国科学院长春光学精密机械与物理研究所 | 接触式非球面面形检验装置 |
US8607536B2 (en) | 2011-01-14 | 2013-12-17 | Faro Technologies, Inc. | Case for a device |
CN102519976A (zh) * | 2011-12-26 | 2012-06-27 | 上海大学 | 光学元件亚表面缺陷数字全息检测装置 |
DE102012100609A1 (de) | 2012-01-25 | 2013-07-25 | Faro Technologies, Inc. | Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung |
FR2988478B1 (fr) * | 2012-03-20 | 2014-04-04 | European Aeronautic Defence & Space Co Eads France | Procede et dispositif de controle non destructif de la sante matiere notamment dans les conges d'une piece composite |
US8817240B2 (en) | 2012-05-25 | 2014-08-26 | Mitutoyo Corporation | Interchangeable optics configuration for a chromatic range sensor optical pen |
US8736817B2 (en) | 2012-05-25 | 2014-05-27 | Mitutoyo Corporation | Interchangeable chromatic range sensor probe for a coordinate measuring machine |
GB2512005C2 (en) * | 2012-06-15 | 2015-03-04 | Faro Tech Inc | Coordinate measurement machines with removable accessories |
US8997362B2 (en) | 2012-07-17 | 2015-04-07 | Faro Technologies, Inc. | Portable articulated arm coordinate measuring machine with optical communications bus |
EP2698596A1 (de) | 2012-08-16 | 2014-02-19 | Hexagon Technology Center GmbH | Verfahren und System zur Bestimmung der räumlichen Koordinaten mit einer mobilen Koordinatenmessmaschine |
EP2698599A1 (de) | 2012-08-17 | 2014-02-19 | Hexagon Technology Center GmbH | Koordinatenmessverfahren und Koordinatenmessmaschine zum Vermessen von Oberflächen mit einem optischen Sensor |
US9513107B2 (en) | 2012-10-05 | 2016-12-06 | Faro Technologies, Inc. | Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner |
US10067231B2 (en) | 2012-10-05 | 2018-09-04 | Faro Technologies, Inc. | Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner |
DE102012109481A1 (de) | 2012-10-05 | 2014-04-10 | Faro Technologies, Inc. | Vorrichtung zum optischen Abtasten und Vermessen einer Umgebung |
DE102013104490A1 (de) * | 2013-01-25 | 2014-07-31 | Werth Messtechnik Gmbh | Verfahren und Vorrichtung zur Bestimmung der Geometrie von Strukturen mittels Computertomografie |
EP2762832B1 (de) | 2013-01-30 | 2018-06-13 | Hexagon Technology Center GmbH | Optische Einzelpunktmessung |
CN103192294A (zh) * | 2013-04-01 | 2013-07-10 | 南京航空航天大学 | 使用三轴数控机床精确测量喷丸制件曲率与厚度的方法 |
WO2014200648A2 (en) * | 2013-06-14 | 2014-12-18 | Kla-Tencor Corporation | System and method for determining the position of defects on objects, coordinate measuring unit and computer program for coordinate measuring unit |
US9068822B2 (en) | 2013-07-03 | 2015-06-30 | Mitutoyo Corporation | Chromatic range sensor probe detachment sensor |
EP2887011B1 (de) | 2013-12-20 | 2017-02-08 | Hexagon Technology Center GmbH | Koordinatenmessmaschine mit hochpräziser 3D-Druckfunktionalität |
DE112014006706B4 (de) * | 2014-05-27 | 2020-09-10 | Carl Zeiss Industrielle Messtechnik Gmbh | Optischer Sensor für ein Koordinatenmessgerät sowie Beleuchtungsmodul für einen solchen optischen Sensor und Verfahren zur Vermessung von Innengewinden oder Bohrlöchern eines Werkstücks mit dem optischen Sensor bzw. Beleuchtungsmodul |
US20150351629A1 (en) * | 2014-06-06 | 2015-12-10 | Novartis Ag | Back reflection minimization for oct probes |
US9759540B2 (en) | 2014-06-11 | 2017-09-12 | Hexagon Metrology, Inc. | Articulating CMM probe |
DE102014215952B4 (de) | 2014-08-12 | 2016-11-10 | Carl Zeiss Industrielle Messtechnik Gmbh | Beleuchtungsmodul für einen optischen Sensor sowie optischer Sensor mit einem solchen Belechtungsmodul für ein Koordinatenmessgerät zur Vermessung von Innengewinden oder Bohrlöchern eines Werkstücks |
DE102014215931B4 (de) | 2014-08-12 | 2016-11-10 | Carl Zeiss Industrielle Messtechnik Gmbh | Beleuchtungsmodul für einen optischen Sensor sowie optischer Sensor mit einem solchen Beleuchtungsmodul für ein Koordinatenmessgerät zur Vermessung von Innengewinden oder Bohrlöchern eines Werkstücks |
DE102014218974A1 (de) | 2014-09-22 | 2016-03-24 | Carl Zeiss Industrielle Messtechnik Gmbh | Beleuchtungsmodul und optischer Sensor für ein Koordinatenmessgerät zur Vermessung von Innengewinden oder Bohrlöchern eines Werkstücks |
DE102014013724A1 (de) * | 2014-09-22 | 2016-03-24 | Andreas Enders | Verfahren zum Abstecken von Bohrlöchern eines Fahrzeugs |
DE102014222629A1 (de) * | 2014-11-05 | 2016-05-12 | Carl Zeiss Meditec Ag | Untersuchen eines Objekts mit OCT-Abtastlichtstrahlen |
WO2016055422A1 (de) | 2014-10-06 | 2016-04-14 | Carl Zeiss Meditec Ag | Operationssystem mit einer oct-einrichtung |
DE102015122844A1 (de) | 2015-12-27 | 2017-06-29 | Faro Technologies, Inc. | 3D-Messvorrichtung mit Batteriepack |
DE102016103954A1 (de) | 2016-03-04 | 2017-09-07 | Blackbird Robotersysteme Gmbh | Messverfahren sowie Messvorrichtung zum Erfassen einer Oberflächentopologie eines Werkstücks |
JP7029222B2 (ja) * | 2016-03-22 | 2022-03-03 | 株式会社日進製作所 | 骨部材用nc加工装置 |
WO2017165793A1 (en) | 2016-03-25 | 2017-09-28 | Thorlabs, Inc. | Mems tunable vcsel powered swept source oct for 3d metrology applications |
DE202016006669U1 (de) | 2016-10-26 | 2017-08-29 | Tesa Sa | Optischer Sensor mit variierbaren Messkanälen |
DE202017107827U1 (de) | 2017-06-12 | 2018-01-12 | Tesa Sa | Dreh /Schwenkkopf für optische Messtaster, Koordinatenmesssystem und Werkzeughalter |
CN108196539B (zh) * | 2017-12-29 | 2021-01-26 | 深圳市艾特智能科技有限公司 | 机器人避障方法、系统、可读存储介质及机器人 |
DE102018200688B4 (de) * | 2018-01-17 | 2023-05-17 | Robert Bosch Gmbh | Verfahren und Vorrichtung zum Betreiben eines akustischen Sensors |
EP3581881A1 (de) | 2018-06-15 | 2019-12-18 | Hexagon Technology Center GmbH | Oberflächenvermessung mittels angeregter fluoreszenz |
US11841330B2 (en) * | 2018-06-20 | 2023-12-12 | Physik Instrumente (Pi) Gmbh & Co. Kg | Sensor probe assembly |
EP3693694A1 (de) * | 2019-02-07 | 2020-08-12 | Hexagon Technology Center GmbH | Verfahren zum vermessen von oberflächen mit klassifizierung von messungen als gültig oder nicht gültig |
CN112720468A (zh) * | 2020-12-17 | 2021-04-30 | 西安交通大学 | 一种基于cad的线激光全自动扫描路径规划方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3322714A1 (de) * | 1983-06-24 | 1985-01-10 | Daimler-Benz Ag, 7000 Stuttgart | Verfahren zum beruehrungslos optischen messen von abstaenden und entsprechende vorrichtung |
US4627731A (en) * | 1985-09-03 | 1986-12-09 | United Technologies Corporation | Common optical path interferometric gauge |
US4839526A (en) * | 1980-11-14 | 1989-06-13 | Diffracto Ltd. | Coordinate measuring method and device |
WO1992019930A1 (en) * | 1991-04-29 | 1992-11-12 | Massachusetts Institute Of Technology | Method and apparatus for optical imaging and measurement |
DE19654067A1 (de) * | 1996-10-21 | 1998-04-23 | Zeiss Carl Fa | Verfahren zur Vermessung von Kanten an Werkstücken |
WO1999053271A1 (de) * | 1998-04-11 | 1999-10-21 | Werth Messtechnik Gmbh | Verfahren zur punktweise scannenden profilbestimmung einer materialoberfläche nach dem autofokusprinzip sowie koordinatenmessgerät |
WO2002040936A1 (de) * | 2000-11-20 | 2002-05-23 | Robert Bosch Gmbh | Interferometrische messvorrichtung |
DE102005026022A1 (de) * | 2005-06-03 | 2006-12-07 | Werth Messtechnik Gmbh | Koordinatenmessgerät sowie Verfahren zum Messen eines Objektes mit einem Koordinatenmessgerät |
Family Cites Families (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4643577A (en) | 1983-07-15 | 1987-02-17 | Wero Ohg Roth & Co. | Length measuring apparatus based on the dual laser beam interferometer principle |
JPS63255685A (ja) * | 1987-04-13 | 1988-10-21 | Yaskawa Electric Mfg Co Ltd | レ−ザ測長装置 |
US4824251A (en) * | 1987-09-25 | 1989-04-25 | Digital Signal Corporation | Optical position sensor using coherent detection and polarization preserving optical fiber |
JPH01119735A (ja) * | 1987-11-04 | 1989-05-11 | Hitachi Ltd | 干渉計 |
JPH02259510A (ja) * | 1989-03-31 | 1990-10-22 | Canon Inc | 面形状等測定方法及び装置 |
JPH03116830A (ja) | 1989-09-29 | 1991-05-17 | Toshiba Corp | エッチバック方法 |
JPH055610A (ja) * | 1990-07-18 | 1993-01-14 | Canon Inc | 計測装置 |
US5198874A (en) * | 1991-04-22 | 1993-03-30 | Sheffield Measurement Division | Coordinate measuring machine with laser interferometer and fiber optic laser delivery system |
IT1257067B (it) | 1992-07-31 | 1996-01-05 | Dea Spa | Macchina di misura. |
IT1257066B (it) | 1992-07-31 | 1996-01-05 | Dea Spa | Unita' di supporto e guida per un organo mobile di una macchina, particolarmente una macchina di misura. |
US5402582A (en) | 1993-02-23 | 1995-04-04 | Faro Technologies Inc. | Three dimensional coordinate measuring apparatus |
JP3065489B2 (ja) * | 1994-10-12 | 2000-07-17 | 捷夫 本田 | 耐振動型干渉計 |
JPH08114434A (ja) * | 1994-10-18 | 1996-05-07 | Fuji Photo Optical Co Ltd | 平面度測定装置 |
CA2214156C (en) | 1996-09-13 | 2003-07-15 | New York Air Brake Corporation | Locomotive brake control unit with dynamic brake interlock |
EP0837300B1 (de) * | 1996-10-21 | 2003-07-09 | Carl Zeiss | Verfahren und Vorrichtung zur Vermessung von Werkstückkanten |
US6008901A (en) * | 1997-08-22 | 1999-12-28 | Canon Kabushiki Kaisha | Shape measuring heterodyne interferometer with multiplexed photodetector aaray or inclined probe head |
JP2000131032A (ja) * | 1998-10-24 | 2000-05-12 | Hitachi Seiki Co Ltd | 三次元形状計測方法およびその装置 |
US6137574A (en) | 1999-03-15 | 2000-10-24 | Zygo Corporation | Systems and methods for characterizing and correcting cyclic errors in distance measuring and dispersion interferometry |
JP4262355B2 (ja) | 1999-05-14 | 2009-05-13 | オリンパス株式会社 | 光イメージング装置 |
JP4188515B2 (ja) | 1999-10-04 | 2008-11-26 | 株式会社ミツトヨ | 光学式形状測定装置 |
JP2001125009A (ja) | 1999-10-28 | 2001-05-11 | Asahi Optical Co Ltd | 内視鏡装置 |
US6943895B2 (en) | 2000-03-30 | 2005-09-13 | Robert Bosch Gmbh | Interferometric measuring device |
JP2001296104A (ja) * | 2000-04-12 | 2001-10-26 | Hitachi Metals Ltd | 干渉縞検出装置 |
DE10041041A1 (de) | 2000-08-22 | 2002-03-07 | Zeiss Carl | Interferometeranordnung und Interferometrisches Verfahren |
DE60314598T2 (de) | 2002-02-14 | 2007-10-25 | Faro Technologies, Inc., Lake Mary | Ein gelenkarm für eine tragbare koordinatenmessmaschine |
JP2004309402A (ja) * | 2003-04-10 | 2004-11-04 | Mitsutoyo Corp | 干渉測定装置及び位相シフト縞解析装置 |
GB2405466B (en) * | 2003-08-27 | 2006-01-25 | Teraview Ltd | Method and apparatus for investigating a non-planner sample |
EP1519144A1 (de) * | 2003-09-29 | 2005-03-30 | Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO | Vorrichtung und Verfahren zur optischen Vermessung einer freigeformten Oberfläche |
EP2278287B1 (de) * | 2003-10-27 | 2016-09-07 | The General Hospital Corporation | Optische Abbildungsmethode und - vorrichtung mit Frequenzbereichsinterferometrie |
JP2005283155A (ja) * | 2004-03-26 | 2005-10-13 | Shimizu Kimiya | 光干渉断層像撮像法における分散補正装置 |
EP1744119A1 (de) | 2005-07-15 | 2007-01-17 | Proximion Fiber Systems AB | Optische Kohärenztomographie mit einer Wobbelsignalquelle |
JP4804820B2 (ja) * | 2005-07-15 | 2011-11-02 | サンテック株式会社 | 光断層画像表示システム |
JP2007033217A (ja) * | 2005-07-26 | 2007-02-08 | Keyence Corp | 干渉計測装置及び干渉計測方法 |
JP3116830U (ja) * | 2005-09-16 | 2005-12-22 | 株式会社モリタ東京製作所 | 歯科光診断装置用ハンドピース |
JP2007209536A (ja) | 2006-02-09 | 2007-08-23 | Kyocera Corp | 光イメージング装置 |
-
2007
- 2007-09-14 EP EP07116509A patent/EP2037214A1/de not_active Withdrawn
-
2008
- 2008-08-22 EP EP08785674.6A patent/EP2185890B1/de active Active
- 2008-08-22 WO PCT/EP2008/006912 patent/WO2009036861A1/de active Application Filing
- 2008-08-22 US US12/675,191 patent/US9127929B2/en active Active
- 2008-08-22 CA CA2698961A patent/CA2698961C/en not_active Expired - Fee Related
- 2008-08-22 CN CN2008801067571A patent/CN101802542B/zh active Active
- 2008-08-22 JP JP2010524372A patent/JP5269080B2/ja not_active Expired - Fee Related
- 2008-08-22 AU AU2008300962A patent/AU2008300962B2/en not_active Ceased
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4839526A (en) * | 1980-11-14 | 1989-06-13 | Diffracto Ltd. | Coordinate measuring method and device |
DE3322714A1 (de) * | 1983-06-24 | 1985-01-10 | Daimler-Benz Ag, 7000 Stuttgart | Verfahren zum beruehrungslos optischen messen von abstaenden und entsprechende vorrichtung |
US4627731A (en) * | 1985-09-03 | 1986-12-09 | United Technologies Corporation | Common optical path interferometric gauge |
WO1992019930A1 (en) * | 1991-04-29 | 1992-11-12 | Massachusetts Institute Of Technology | Method and apparatus for optical imaging and measurement |
DE19654067A1 (de) * | 1996-10-21 | 1998-04-23 | Zeiss Carl Fa | Verfahren zur Vermessung von Kanten an Werkstücken |
WO1999053271A1 (de) * | 1998-04-11 | 1999-10-21 | Werth Messtechnik Gmbh | Verfahren zur punktweise scannenden profilbestimmung einer materialoberfläche nach dem autofokusprinzip sowie koordinatenmessgerät |
WO2002040936A1 (de) * | 2000-11-20 | 2002-05-23 | Robert Bosch Gmbh | Interferometrische messvorrichtung |
DE102005026022A1 (de) * | 2005-06-03 | 2006-12-07 | Werth Messtechnik Gmbh | Koordinatenmessgerät sowie Verfahren zum Messen eines Objektes mit einem Koordinatenmessgerät |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2541193A1 (de) | 2011-06-27 | 2013-01-02 | Hexagon Technology Center GmbH | Interferometrisches Entfernungsmessverfahren zum Vermessen von Oberflächen und ebensolche Messanordnung |
WO2013000866A1 (de) | 2011-06-27 | 2013-01-03 | Hexagon Technology Center Gmbh | Interferometrisches entfernungsmessverfahren zum vermessen von oberflächen und ebensolche messanordnung |
US9677870B2 (en) | 2011-06-27 | 2017-06-13 | Hexagon Technology Center Gmbh | Interferometric distance measuring method for measuring surfaces, and such a measuring arrangement |
EP2690396A1 (de) | 2012-07-24 | 2014-01-29 | Hexagon Technology Center GmbH | Interferometrische Entfernungsmessanordnung und ebensolches Verfahren |
EP2690395A1 (de) | 2012-07-24 | 2014-01-29 | Hexagon Technology Center GmbH | Interferometrische Entfernungsmessanordnung und ebensolches Verfahren |
WO2014016200A1 (de) | 2012-07-24 | 2014-01-30 | Hexagon Technology Center Gmbh | Interferometrische entfernungsmessanordnung und ebensolches verfahren |
WO2014016201A1 (de) | 2012-07-24 | 2014-01-30 | Hexagon Technology Center Gmbh | Interferometrische entfernungsmessanordnung und ebensolches verfahren |
CN104487799A (zh) * | 2012-07-24 | 2015-04-01 | 赫克斯冈技术中心 | 干涉距离测量装置和对应方法 |
CN104520667A (zh) * | 2012-07-24 | 2015-04-15 | 赫克斯冈技术中心 | 干涉型距离测量装置以及相应的方法 |
US9933245B2 (en) | 2012-07-24 | 2018-04-03 | Hexagon Technology Center Gmbh | Interferometric distance measuring arrangement for measuring surfaces and corresponding method with emission of at least two parallel channels |
US10222197B2 (en) | 2012-07-24 | 2019-03-05 | Hexagon Technology Center Gmbh | Interferometric distance measuring arrangement for measuring surfaces and corresponding method with at least two parallel measurement channels and wavelength ramp |
Also Published As
Publication number | Publication date |
---|---|
AU2008300962A1 (en) | 2009-03-26 |
EP2037214A1 (de) | 2009-03-18 |
CN101802542B (zh) | 2012-07-04 |
AU2008300962B2 (en) | 2011-04-28 |
US9127929B2 (en) | 2015-09-08 |
JP5269080B2 (ja) | 2013-08-21 |
CA2698961C (en) | 2014-02-04 |
EP2185890B1 (de) | 2022-11-23 |
US20100312524A1 (en) | 2010-12-09 |
CA2698961A1 (en) | 2009-03-26 |
JP2010539458A (ja) | 2010-12-16 |
CN101802542A (zh) | 2010-08-11 |
EP2185890A1 (de) | 2010-05-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2009036861A1 (de) | Verfahren und messgerät zum vermessen von oberflächen | |
DE102015217637C5 (de) | Betreiben eines konfokalen Weißlichtsensors an einem Koordinatenmessgerät und Anordnung | |
DE102018105877B3 (de) | Vorrichtung für die Bestimmung einer Ausrichtung einer optischen Vorrichtung eines Kohärenztomographen, Kohärenztomograph und Laserbearbeitungssystem | |
WO2014076649A1 (de) | Optische messverfahren und messvorrichtung mit einem messkopf zum erfassen einer oberflachentopographie mittels kalibrierung der orientierung des messkopfs | |
EP1347266B1 (de) | Vorrichtung zum Vermessen eines Messobjekts | |
EP3351893A1 (de) | Messvorrichtung und verfahren zur erfassung wenigstens einer längenmessgrösse | |
DE102011011065B4 (de) | Verfahren und Vorrichtung zur hochpräzisen Vermessung von Oberflächen | |
EP2762832B1 (de) | Optische Einzelpunktmessung | |
WO2012028388A1 (de) | Messeinheit, messsystem und verfahren zum ermitteln einer relativposition und relativorientierung | |
EP3608625B1 (de) | Oct vermessung | |
EP0084144B1 (de) | Dreidimensionale interferometrische Längenmesseinrichtung | |
US10718610B2 (en) | Roughness measurement probe, device with roughness measurement probe and method | |
DE112018004038B4 (de) | Messung der Position von Objekten im Raum | |
EP3435032B1 (de) | Optischer rauheitssensor für eine koordinatenmessmaschine | |
WO2011095145A1 (de) | Messgerät zum messen zumindest einer positionsänderung und/oder zumindest einer winkeländerung und ein verfahren zum dynamischen messen zumindest einer positionsänderung und/oder einer winkeländerung | |
WO2011036033A1 (de) | Verfahren und vorrichtungen zur bestimmung von orientierung und position eines objekts | |
EP3351895B1 (de) | Messvorrichtung und verfahren zum betreiben einer messvorrichtung | |
DE10303659A1 (de) | Optisches Messverfahren zur Ermittlung von Idealformabweichungen technisch polierter Oberflächen und Präzisionsmessmaschine zur Durchführung des Messverfahrens | |
DE102020124704B4 (de) | Vorrichtung und Verfahren zur Erfassung einer räumlichen Position eines Körpers | |
EP3833930B1 (de) | Vorrichtung und verfahren zur geometrischen vermessung eines objekts | |
DE102022126397A1 (de) | Chromatisches entfernungssensorsystem mit sphärischem kalibrierungsobjekt und verfahren | |
DE102019134939A1 (de) | Vorrichtung zur Erfassung einer Lage eines Körpers | |
DE102019002757A1 (de) | Optische messvorrichtung, optisches messsystem und optisches messverfahren | |
DE4138562A1 (de) | Mikroprofilometermesskopf | |
DE102018211813A1 (de) | Verfahren und Anordnung zum Erfassen eines Kalibrierobjekts mit einer optischen Sensoreinrichtung |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200880106757.1 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 08785674 Country of ref document: EP Kind code of ref document: A1 |
|
DPE1 | Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101) | ||
WWE | Wipo information: entry into national phase |
Ref document number: 2008785674 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2008300962 Country of ref document: AU |
|
WWE | Wipo information: entry into national phase |
Ref document number: 12675191 Country of ref document: US |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2698961 Country of ref document: CA |
|
ENP | Entry into the national phase |
Ref document number: 2008300962 Country of ref document: AU Date of ref document: 20080822 Kind code of ref document: A |
|
ENP | Entry into the national phase |
Ref document number: 2010524372 Country of ref document: JP Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |